IT1014933B - INDUCTION HEATING COIL FOR THE MELTING IN ZONES WITHOUT CROJUNO OF SEMICONDUCTIVE RODS - Google Patents

INDUCTION HEATING COIL FOR THE MELTING IN ZONES WITHOUT CROJUNO OF SEMICONDUCTIVE RODS

Info

Publication number
IT1014933B
IT1014933B IT23824/74A IT2382474A IT1014933B IT 1014933 B IT1014933 B IT 1014933B IT 23824/74 A IT23824/74 A IT 23824/74A IT 2382474 A IT2382474 A IT 2382474A IT 1014933 B IT1014933 B IT 1014933B
Authority
IT
Italy
Prior art keywords
crojuno
semiconductive
zones
melting
rods
Prior art date
Application number
IT23824/74A
Other languages
Italian (it)
Original Assignee
Siemens Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Ag filed Critical Siemens Ag
Application granted granted Critical
Publication of IT1014933B publication Critical patent/IT1014933B/en

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B6/00—Heating by electric, magnetic or electromagnetic fields
    • H05B6/02—Induction heating
    • H05B6/36—Coil arrangements
    • H05B6/362—Coil arrangements with flat coil conductors
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
    • C30B13/16—Heating of the molten zone
    • C30B13/20—Heating of the molten zone by induction, e.g. hot wire technique

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • General Induction Heating (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Crucibles And Fluidized-Bed Furnaces (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
IT23824/74A 1973-06-18 1974-06-11 INDUCTION HEATING COIL FOR THE MELTING IN ZONES WITHOUT CROJUNO OF SEMICONDUCTIVE RODS IT1014933B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2331004A DE2331004C3 (en) 1973-06-18 1973-06-18 Induction heating coil for crucible-free zone melting

Publications (1)

Publication Number Publication Date
IT1014933B true IT1014933B (en) 1977-04-30

Family

ID=5884356

Family Applications (1)

Application Number Title Priority Date Filing Date
IT23824/74A IT1014933B (en) 1973-06-18 1974-06-11 INDUCTION HEATING COIL FOR THE MELTING IN ZONES WITHOUT CROJUNO OF SEMICONDUCTIVE RODS

Country Status (5)

Country Link
US (1) US3898413A (en)
JP (2) JPS5037346A (en)
BE (1) BE816495A (en)
DE (1) DE2331004C3 (en)
IT (1) IT1014933B (en)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2357688C2 (en) * 1973-11-19 1982-11-18 Siemens AG, 1000 Berlin und 8000 München Induction heating coil for crucible-free zone melting
US4184135A (en) * 1978-04-10 1980-01-15 Monsanto Company Breakapart single turn RF induction apparatus
DE3229461A1 (en) * 1982-08-06 1984-02-09 Siemens AG, 1000 Berlin und 8000 München DEVICE FOR POT-FREE ZONE MELTING OF A SEMICONDUCTOR STICK, PARTICULARLY MADE OF SILICON
DE4142245A1 (en) * 1991-12-17 1993-06-24 Tro Transformatoren Und Schalt Inductor insulation mfr. used for induction heating - sand-blasts surface to roughen it, melts aluminium-oxide powder coating with plasma beam, and covers with silicon@ lacquer
JP3127981B2 (en) * 1995-01-31 2001-01-29 信越半導体株式会社 High frequency induction heating device
US5778681A (en) * 1997-04-15 1998-07-14 Varian Associates, Inc. Cooling device for cooling heatable gas chromatography analyte sample injector
JP4581977B2 (en) * 2005-11-24 2010-11-17 信越半導体株式会社 Method for producing silicon single crystal
EP1968355B1 (en) 2007-03-08 2013-02-27 HÜTTINGER Elektronik GmbH + Co. KG Induction coil and device for inductive heating of workpieces
JP2009158598A (en) * 2007-12-25 2009-07-16 Panasonic Electric Works Co Ltd Planar coil and non-contact power transfer device using the same
WO2010007678A1 (en) * 2008-07-17 2010-01-21 電気興業株式会社 Structure of guide chip for high-frequency induction heating coil
JP5505362B2 (en) * 2011-04-21 2014-05-28 信越半導体株式会社 Compound winding induction heating coil, single crystal manufacturing apparatus having the same, and single crystal manufacturing method using the same
JP5505365B2 (en) * 2011-04-28 2014-05-28 信越半導体株式会社 Insulating member for preventing discharge in induction heating coil, single crystal manufacturing apparatus and single crystal manufacturing method using the same
WO2021005853A1 (en) 2019-07-05 2021-01-14 株式会社Sumco Induction-heating coil and single crystal production device using same

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2459971A (en) * 1945-08-30 1949-01-25 Induction Heating Corp Inductor for high-frequency induction heating apparatus
DE1044768B (en) * 1954-03-02 1958-11-27 Siemens Ag Method and device for pulling a rod-shaped crystalline body, preferably a semiconductor body
US3017485A (en) * 1957-11-19 1962-01-16 Asea Ab Means for electric vacuum furnaces
DE1205167C2 (en) * 1964-06-15 1973-05-03 Halbleiterwerk Frankfurt Oder Coil body for inductive heating of an electrically conductive body in a magnetic high-frequency field during zone melting
DE1615429C3 (en) * 1967-12-23 1974-08-22 Siemens Ag, 1000 Berlin Und 8000 Muenchen Induction heating coil for crucible-free zone melting of rods made of semiconductor material
DE1802524B1 (en) * 1968-10-11 1970-06-04 Siemens Ag Device for crucible-free zone melting of a crystalline rod, in particular a semiconductor rod
US3697716A (en) * 1971-11-19 1972-10-10 Gen Electric Induction cooking power converter with improved coil position
DE2158274A1 (en) * 1971-11-24 1973-05-30 Siemens Ag INDUCTION HEATING COIL FOR CRUCIBLE-FREE ZONE MELTING OF BARS MADE OF SEMICONDUCTOR MATERIAL
DE2217407A1 (en) * 1972-04-11 1973-11-29 Siemens Ag INDUCTION HEATING COIL FOR CRUCIBLE-FREE ZONE MELTING

Also Published As

Publication number Publication date
JPS5571170U (en) 1980-05-16
US3898413A (en) 1975-08-05
DE2331004B2 (en) 1981-05-21
JPS5755339Y2 (en) 1982-11-30
DE2331004A1 (en) 1975-01-09
DE2331004C3 (en) 1982-02-04
JPS5037346A (en) 1975-04-08
BE816495A (en) 1974-10-16

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