DE3861896D1 - Einwindige-induktionsheizspule fuer tiegelfreie zonenschmelzverfahren. - Google Patents

Einwindige-induktionsheizspule fuer tiegelfreie zonenschmelzverfahren.

Info

Publication number
DE3861896D1
DE3861896D1 DE8888106231T DE3861896T DE3861896D1 DE 3861896 D1 DE3861896 D1 DE 3861896D1 DE 8888106231 T DE8888106231 T DE 8888106231T DE 3861896 T DE3861896 T DE 3861896T DE 3861896 D1 DE3861896 D1 DE 3861896D1
Authority
DE
Germany
Prior art keywords
pot
induction heating
heating coil
melting process
free zone
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8888106231T
Other languages
English (en)
Inventor
Takao Abe
Shyouzo Muraoka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Handotai Co Ltd
Original Assignee
Shin Etsu Handotai Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Handotai Co Ltd filed Critical Shin Etsu Handotai Co Ltd
Application granted granted Critical
Publication of DE3861896D1 publication Critical patent/DE3861896D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
    • C30B13/16—Heating of the molten zone
    • C30B13/20—Heating of the molten zone by induction, e.g. hot wire technique
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B6/00—Heating by electric, magnetic or electromagnetic fields
    • H05B6/02—Induction heating
    • H05B6/36—Coil arrangements
    • H05B6/362—Coil arrangements with flat coil conductors

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • General Induction Heating (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
DE8888106231T 1987-04-27 1988-04-19 Einwindige-induktionsheizspule fuer tiegelfreie zonenschmelzverfahren. Expired - Fee Related DE3861896D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP10206987 1987-04-27
JP62165247A JPS6448391A (en) 1987-04-27 1987-07-03 Single winding induction heating coil used in floating zone melting method

Publications (1)

Publication Number Publication Date
DE3861896D1 true DE3861896D1 (de) 1991-04-11

Family

ID=26442810

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8888106231T Expired - Fee Related DE3861896D1 (de) 1987-04-27 1988-04-19 Einwindige-induktionsheizspule fuer tiegelfreie zonenschmelzverfahren.

Country Status (4)

Country Link
US (1) US4833287A (de)
EP (1) EP0288880B1 (de)
JP (1) JPS6448391A (de)
DE (1) DE3861896D1 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0699218B2 (ja) * 1989-04-26 1994-12-07 信越半導体株式会社 単結晶育成用コイル
US4994637A (en) * 1989-10-30 1991-02-19 Fmc Corporation Induction coil with lapped joint
US5042139A (en) * 1990-03-14 1991-08-27 General Electric Company Method of making an excitation coil for an electrodeless high intensity discharge lamp
JP4768518B2 (ja) * 2006-05-29 2011-09-07 カヤバ工業株式会社 フロントフォーク
DE102008013326B4 (de) * 2008-03-10 2013-03-28 Siltronic Ag Induktionsheizspule und Verfahren zum Schmelzen von Granulat aus Halbleitermaterial
DE102009051010B4 (de) * 2009-10-28 2012-02-23 Siltronic Ag Vorrichtung zur Herstellung eines Einkristalls aus Silizium durch Umschmelzen von Granulat
DE102012022965B4 (de) * 2012-11-19 2018-12-06 Forschungsverbund Berlin E.V. Vorrichtung für das tiegelfreie Zonenziehen von Kristallstäben
DE102014226419A1 (de) * 2014-12-18 2016-06-23 Siltronic Ag Verfahren zum Züchten eines Einkristalls durch Kristallisieren des Einkristalls aus einer Fließzone

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2408229A (en) * 1943-04-30 1946-09-24 Rca Corp Electrical heating apparatus
US2655588A (en) * 1949-08-19 1953-10-13 Ohio Crankshaft Co High-frequency inductor
US2678371A (en) * 1952-01-16 1954-05-11 Gen Electric Heating inductor
US3031555A (en) * 1959-07-15 1962-04-24 Magnethermic Corp Induction heating
DE1644004A1 (de) * 1967-04-21 1970-04-02 Siemens Ag Verfahren und Vorrichtung zum tiegelfreien Zonenschmelzen eines kristallinen Stabes,insbesondere Halbleiterstabes
US3607114A (en) * 1969-10-13 1971-09-21 Siemens Ag Apparatus for producing a monocrystalline rod, particularly of semiconductor material
BE789504A (fr) * 1971-12-07 1973-01-15 Siemens Ag Bobine de chauffage par induction pour la fusion par zones sanscreuset de barreaux semiconducteurs
DE2538831A1 (de) * 1975-09-01 1977-03-03 Wacker Chemitronic Vorrichtung zum tiegelfreien zonenschmelzen
DE2538854B2 (de) * 1975-09-01 1979-02-15 Wacker-Chemitronic Gesellschaft Fuer Elektronik-Grundstoffe Mbh, 8263 Burghausen Einwindige Induktionsheizspule zum tiegelfreien Zonenschmelzen
US4220839A (en) * 1978-01-05 1980-09-02 Topsil A/S Induction heating coil for float zone melting of semiconductor rods

Also Published As

Publication number Publication date
EP0288880A1 (de) 1988-11-02
JPS6448391A (en) 1989-02-22
EP0288880B1 (de) 1991-03-06
US4833287A (en) 1989-05-23
JPH0415598B2 (de) 1992-03-18

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee