DE3873173D1 - Vorrichtung fuer hf-induktionsheizung. - Google Patents

Vorrichtung fuer hf-induktionsheizung.

Info

Publication number
DE3873173D1
DE3873173D1 DE8888108274T DE3873173T DE3873173D1 DE 3873173 D1 DE3873173 D1 DE 3873173D1 DE 8888108274 T DE8888108274 T DE 8888108274T DE 3873173 T DE3873173 T DE 3873173T DE 3873173 D1 DE3873173 D1 DE 3873173D1
Authority
DE
Germany
Prior art keywords
induction heating
induction
heating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8888108274T
Other languages
English (en)
Other versions
DE3873173T2 (de
Inventor
Yasuhiro Ikeda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Handotai Co Ltd
Original Assignee
Shin Etsu Handotai Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP12580187A external-priority patent/JPS63291887A/ja
Priority claimed from JP12580287A external-priority patent/JPS63291388A/ja
Priority claimed from JP12580387A external-priority patent/JPS63291389A/ja
Application filed by Shin Etsu Handotai Co Ltd filed Critical Shin Etsu Handotai Co Ltd
Application granted granted Critical
Publication of DE3873173D1 publication Critical patent/DE3873173D1/de
Publication of DE3873173T2 publication Critical patent/DE3873173T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B6/00—Heating by electric, magnetic or electromagnetic fields
    • H05B6/02—Induction heating
    • H05B6/22—Furnaces without an endless core
    • H05B6/30—Arrangements for remelting or zone melting
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
    • C30B13/16—Heating of the molten zone
    • C30B13/20—Heating of the molten zone by induction, e.g. hot wire technique
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1076—Apparatus for crystallization from liquid or supercritical state having means for producing a moving solid-liquid-solid zone
    • Y10T117/1088—Apparatus for crystallization from liquid or supercritical state having means for producing a moving solid-liquid-solid zone including heating or cooling details

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
DE8888108274T 1987-05-25 1988-05-24 Vorrichtung fuer hf-induktionsheizung. Expired - Fee Related DE3873173T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP12580187A JPS63291887A (ja) 1987-05-25 1987-05-25 半導体単結晶製造装置
JP12580287A JPS63291388A (ja) 1987-05-25 1987-05-25 浮遊帯域溶融法に用いる単巻誘導加熱コイル
JP12580387A JPS63291389A (ja) 1987-05-25 1987-05-25 浮遊帯域溶融法に用いる誘導加熱装置

Publications (2)

Publication Number Publication Date
DE3873173D1 true DE3873173D1 (de) 1992-09-03
DE3873173T2 DE3873173T2 (de) 1993-03-04

Family

ID=27315207

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8888108274T Expired - Fee Related DE3873173T2 (de) 1987-05-25 1988-05-24 Vorrichtung fuer hf-induktionsheizung.

Country Status (3)

Country Link
US (1) US4942279A (de)
EP (1) EP0292920B1 (de)
DE (1) DE3873173T2 (de)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0699218B2 (ja) * 1989-04-26 1994-12-07 信越半導体株式会社 単結晶育成用コイル
US5461215A (en) * 1994-03-17 1995-10-24 Massachusetts Institute Of Technology Fluid cooled litz coil inductive heater and connector therefor
JP3127981B2 (ja) * 1995-01-31 2001-01-29 信越半導体株式会社 高周波誘導加熱装置
US6727483B2 (en) 2001-08-27 2004-04-27 Illinois Tool Works Inc. Method and apparatus for delivery of induction heating to a workpiece
US6713737B1 (en) 2001-11-26 2004-03-30 Illinois Tool Works Inc. System for reducing noise from a thermocouple in an induction heating system
US8038931B1 (en) 2001-11-26 2011-10-18 Illinois Tool Works Inc. On-site induction heating apparatus
US6956189B1 (en) 2001-11-26 2005-10-18 Illinois Tool Works Inc. Alarm and indication system for an on-site induction heating system
US7015439B1 (en) 2001-11-26 2006-03-21 Illinois Tool Works Inc. Method and system for control of on-site induction heating
US6911089B2 (en) 2002-11-01 2005-06-28 Illinois Tool Works Inc. System and method for coating a work piece
US20040084443A1 (en) * 2002-11-01 2004-05-06 Ulrich Mark A. Method and apparatus for induction heating of a wound core
DE10328859B4 (de) * 2003-06-20 2007-09-27 Leibniz-Institut Für Festkörper- Und Werkstoffforschung Dresden E.V. Verfahren und Vorrichtung zum Ziehen von Einkristallen durch Zonenziehen
US20050230379A1 (en) * 2004-04-20 2005-10-20 Vianney Martawibawa System and method for heating a workpiece during a welding operation
JP6111033B2 (ja) * 2011-12-05 2017-04-05 高周波熱錬株式会社 加熱コイル
DE102011089429A1 (de) * 2011-12-21 2013-06-27 Siltronic Ag Verfahren und Vorrichtung zur Herstellung eines Einkristalls
DE102012022965B4 (de) * 2012-11-19 2018-12-06 Forschungsverbund Berlin E.V. Vorrichtung für das tiegelfreie Zonenziehen von Kristallstäben
CN103255472B (zh) * 2013-04-25 2016-12-28 浙江晶盛机电股份有限公司 具有双电源加热的区熔炉热场及保温方法
CN103993349A (zh) * 2014-05-06 2014-08-20 洛阳金诺机械工程有限公司 一种使用区熔法拉制单晶硅棒的高频线圈
CN104264220A (zh) * 2014-07-02 2015-01-07 洛阳金诺机械工程有限公司 一种用产品料直接拉制硅芯的方法
CN108070901A (zh) * 2016-11-17 2018-05-25 上海新昇半导体科技有限公司 浮区法生长晶体的设备及方法
CN110257899A (zh) * 2019-06-24 2019-09-20 天津中环领先材料技术有限公司 一种平衡热场的区熔线圈
EP3995607A4 (de) * 2019-07-05 2023-09-06 SUMCO Corporation Induktionsheizspule und vorrichtung zur herstellung von einkristallen damit

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL274145A (de) * 1961-03-17
DE1208292B (de) * 1963-03-29 1966-01-05 Siemens Ag Vorrichtung zum tiegelfreien Zonenschmelzen von Halbleitermaterial
DE1644004A1 (de) * 1967-04-21 1970-04-02 Siemens Ag Verfahren und Vorrichtung zum tiegelfreien Zonenschmelzen eines kristallinen Stabes,insbesondere Halbleiterstabes
CH472236A (de) * 1968-05-30 1969-05-15 Siemens Ag Vorrichtung zum tiegelfreien Zonenschmelzen eines kristallinen Stabes, insbesondere Halbleiterstabes
DE1802524B1 (de) * 1968-10-11 1970-06-04 Siemens Ag Vorrichtung zum tiegelfreien Zonenschmelzen eines kristallinen Stabes,insbesondere Halbleiterstabes
BE789504A (fr) * 1971-12-07 1973-01-15 Siemens Ag Bobine de chauffage par induction pour la fusion par zones sanscreuset de barreaux semiconducteurs
US3725630A (en) * 1971-12-20 1973-04-03 Cycle Dyne Inc Inductive coil for heating a loop of conductive material
DE2538812A1 (de) * 1975-09-01 1977-03-03 Wacker Chemitronic Verfahren zum dotieren von halbleiterstaeben
US4220839A (en) * 1978-01-05 1980-09-02 Topsil A/S Induction heating coil for float zone melting of semiconductor rods
DE2812216A1 (de) * 1978-03-20 1979-10-11 Siemens Ag Verfahren zum besseren aufschmelzen des vorratsstabes beim tiegelfreien zonenschmelzen
DE3143146A1 (de) * 1981-10-30 1983-05-11 Siemens AG, 1000 Berlin und 8000 München Als flachspule ausgebildete induktionsheizspule zum tiegelfreien zonenschmelzen
DE3143207A1 (de) * 1981-10-30 1983-05-11 Siemens AG, 1000 Berlin und 8000 München Als flachspule ausgebildete induktionsspule zum tiegelfreien zonenschmelzen
DE3226713A1 (de) * 1982-07-16 1984-01-19 Siemens AG, 1000 Berlin und 8000 München Als flachspule ausgebildete induktionsheizspule zum tiegelfreien zonenschmelzen
DE3625669A1 (de) * 1986-07-29 1988-02-04 Siemens Ag Induktionsheizer zum tiegelfreien zonenschmelzen

Also Published As

Publication number Publication date
DE3873173T2 (de) 1993-03-04
US4942279A (en) 1990-07-17
EP0292920B1 (de) 1992-07-29
EP0292920A1 (de) 1988-11-30

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee