FR2324188A2 - Bobine de chauffage par induction pour la fusion en zone flottante de tiges semi-conductrices - Google Patents

Bobine de chauffage par induction pour la fusion en zone flottante de tiges semi-conductrices

Info

Publication number
FR2324188A2
FR2324188A2 FR7536842A FR7536842A FR2324188A2 FR 2324188 A2 FR2324188 A2 FR 2324188A2 FR 7536842 A FR7536842 A FR 7536842A FR 7536842 A FR7536842 A FR 7536842A FR 2324188 A2 FR2324188 A2 FR 2324188A2
Authority
FR
France
Prior art keywords
induction heating
heating coil
zone melting
floating zone
semiconductor rods
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7536842A
Other languages
English (en)
Other versions
FR2324188B2 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Publication of FR2324188A2 publication Critical patent/FR2324188A2/fr
Application granted granted Critical
Publication of FR2324188B2 publication Critical patent/FR2324188B2/fr
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B6/00—Heating by electric, magnetic or electromagnetic fields
    • H05B6/02—Induction heating
    • H05B6/36—Coil arrangements
    • H05B6/362—Coil arrangements with flat coil conductors
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
    • C30B13/16—Heating of the molten zone
    • C30B13/20—Heating of the molten zone by induction, e.g. hot wire technique
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F7/00—Magnets
    • H01F7/06—Electromagnets; Actuators including electromagnets
    • H01F7/20—Electromagnets; Actuators including electromagnets without armatures
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B6/00—Heating by electric, magnetic or electromagnetic fields
    • H05B6/02—Induction heating
    • H05B6/22—Furnaces without an endless core
    • H05B6/30—Arrangements for remelting or zone melting
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B6/00—Heating by electric, magnetic or electromagnetic fields
    • H05B6/02—Induction heating
    • H05B6/36—Coil arrangements
    • H05B6/42—Cooling of coils

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Power Engineering (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • General Induction Heating (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
FR7536842A 1974-12-10 1975-12-02 Bobine de chauffage par induction pour la fusion en zone flottante de tiges semi-conductrices Granted FR2324188A2 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19742458450 DE2458450C3 (de) 1974-12-10 1974-12-10 Wassergekühlte Induktionsheizspule zum tiegelfreien Zonenschmelzen von Stäben aus Halbleitermaterial

Publications (2)

Publication Number Publication Date
FR2324188A2 true FR2324188A2 (fr) 1977-04-08
FR2324188B2 FR2324188B2 (fr) 1979-07-13

Family

ID=5933079

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7536842A Granted FR2324188A2 (fr) 1974-12-10 1975-12-02 Bobine de chauffage par induction pour la fusion en zone flottante de tiges semi-conductrices

Country Status (6)

Country Link
JP (1) JPS5851920B2 (fr)
DE (1) DE2458450C3 (fr)
DK (1) DK556675A (fr)
FR (1) FR2324188A2 (fr)
GB (1) GB1498085A (fr)
IT (1) IT1054423B (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2938793A1 (de) * 1979-09-25 1981-04-16 Siemens AG, 1000 Berlin und 8000 München Induktionsheizspule zum tiegelfreien zonenschmelzen
JPS62176605A (ja) * 1986-01-31 1987-08-03 Kawasaki Steel Corp 異巾鋼材の接合部構造及び異巾鋼材の接合部加工装置
CN112359411A (zh) * 2020-12-09 2021-02-12 中国电子科技集团公司第四十六研究所 用于区熔法制备单晶硅的加热线圈

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1170565B (de) * 1958-07-16 1964-05-21 Siemens Ag Einrichtung zum Erhitzen von metallischen Werkstuecken, insbesondere Rohren, im magnetischen Wechselfeld eines Induktors
GB1002388A (en) * 1963-07-18 1965-08-25 Philips Electronic Associated Improvements in and relating to inductors for use in high-frequency heating apparatus

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1170565B (de) * 1958-07-16 1964-05-21 Siemens Ag Einrichtung zum Erhitzen von metallischen Werkstuecken, insbesondere Rohren, im magnetischen Wechselfeld eines Induktors
GB1002388A (en) * 1963-07-18 1965-08-25 Philips Electronic Associated Improvements in and relating to inductors for use in high-frequency heating apparatus

Also Published As

Publication number Publication date
JPS5183803A (en) 1976-07-22
DK556675A (da) 1976-06-11
FR2324188B2 (fr) 1979-07-13
DE2458450C3 (de) 1980-09-25
DE2458450B2 (de) 1979-10-31
JPS5851920B2 (ja) 1983-11-18
DE2458450A1 (de) 1976-06-16
GB1498085A (en) 1978-01-18
IT1054423B (it) 1981-11-10

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