ATE528792T1 - Verfahren und vorrichtung zur ausrichtung von komponenten - Google Patents

Verfahren und vorrichtung zur ausrichtung von komponenten

Info

Publication number
ATE528792T1
ATE528792T1 AT07150412T AT07150412T ATE528792T1 AT E528792 T1 ATE528792 T1 AT E528792T1 AT 07150412 T AT07150412 T AT 07150412T AT 07150412 T AT07150412 T AT 07150412T AT E528792 T1 ATE528792 T1 AT E528792T1
Authority
AT
Austria
Prior art keywords
component
pick
aligning device
aligning
nozzle
Prior art date
Application number
AT07150412T
Other languages
English (en)
Inventor
Pascal Dromard
Sebastien Maier
Original Assignee
Ismeca Semiconductor Holding
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ismeca Semiconductor Holding filed Critical Ismeca Semiconductor Holding
Application granted granted Critical
Publication of ATE528792T1 publication Critical patent/ATE528792T1/de

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67144Apparatus for mounting on conductive members, e.g. leadframes or conductors on insulating substrates
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67242Apparatus for monitoring, sorting or marking
    • H01L21/67259Position monitoring, e.g. misposition detection or presence detection
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6838Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/01Subjecting similar articles in turn to test, e.g. "go/no-go" tests in mass production; Testing objects at points as they pass through a testing station

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Supply And Installment Of Electrical Components (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manipulator (AREA)
  • Attitude Control For Articles On Conveyors (AREA)
AT07150412T 2007-12-24 2007-12-24 Verfahren und vorrichtung zur ausrichtung von komponenten ATE528792T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP07150412A EP2075829B1 (de) 2007-12-24 2007-12-24 Verfahren und Vorrichtung zur Ausrichtung von Komponenten

Publications (1)

Publication Number Publication Date
ATE528792T1 true ATE528792T1 (de) 2011-10-15

Family

ID=39332222

Family Applications (1)

Application Number Title Priority Date Filing Date
AT07150412T ATE528792T1 (de) 2007-12-24 2007-12-24 Verfahren und vorrichtung zur ausrichtung von komponenten

Country Status (9)

Country Link
US (1) US8550766B2 (de)
EP (1) EP2075829B1 (de)
KR (1) KR101448076B1 (de)
CN (1) CN101919039B (de)
AT (1) ATE528792T1 (de)
MX (1) MX2010006994A (de)
MY (1) MY147294A (de)
TW (1) TWI483340B (de)
WO (1) WO2009080652A1 (de)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2471712A (en) * 2009-07-10 2011-01-12 De Beers Centenary AG Gemstone alignment system
JP5299380B2 (ja) * 2010-08-17 2013-09-25 パナソニック株式会社 部品実装装置および部品検出方法
JP5299379B2 (ja) * 2010-08-17 2013-09-25 パナソニック株式会社 部品実装装置および部品検出方法
DE102011013369A1 (de) * 2010-12-30 2012-07-05 Osram Opto Semiconductors Gmbh Verfahren zum Herstellen einer Mehrzahl von Halbleiterbauelementen
EP2658958B1 (de) * 2011-03-18 2017-05-03 Siemens Healthcare Diagnostics Inc. Verfahren und systeme zur kalibrierung einer positionsausrichtung zwischen einem probenbehälter und einer düsenspitze
US9044812B2 (en) 2011-08-03 2015-06-02 General Electric Company Jig and method for modifying casing in turbine system
EP2801109A1 (de) 2011-12-07 2014-11-12 ISMECA Semiconductor Holding SA Anordnung zur komponentenhandhabung
US8919528B2 (en) * 2012-07-13 2014-12-30 Hewlett-Packard Industrial Printing Ltd. Nozzled device to align a substrate on a surface
TW201432080A (zh) * 2013-02-01 2014-08-16 Chiuan Yan Technology Co Ltd 負壓無塵型對位機構
KR101479667B1 (ko) * 2014-04-21 2015-01-07 주식회사 디앤씨 압력 조절 장치 및 이를 이용한 피처리물 이송 방법
KR101687191B1 (ko) * 2015-08-17 2016-12-19 비케이전자 주식회사 전자부품 실장장치
DE102017008869B3 (de) 2017-09-21 2018-10-25 Mühlbauer Gmbh & Co. Kg Bauteilzentrierung
MY192110A (en) * 2018-07-26 2022-07-28 Mi Equipment M Sdn Bhd Method for automatic alignment of an electronic component during die sorting process
WO2020203948A1 (ja) * 2019-04-04 2020-10-08 アキム株式会社 部品搬送処理装置
JP7291577B2 (ja) * 2019-08-28 2023-06-15 芝浦メカトロニクス株式会社 移送装置および実装装置
DE102019125127A1 (de) * 2019-09-18 2021-03-18 Mühlbauer Gmbh & Co. Kg Bauteilhandhabung, Bauteilinspektion
DE102019125134B4 (de) 2019-09-18 2025-12-18 Mühlbauer Gmbh & Co. Kg Vorrichtung und Verfahren zur Bauteilhandhabung
CN114787978A (zh) * 2019-12-26 2022-07-22 佐藤控股株式会社 Ic芯片搭载装置、ic芯片搭载方法
TWI741748B (zh) * 2020-08-20 2021-10-01 鴻勁精密股份有限公司 接合機構及其應用之作業設備
WO2022046566A1 (en) * 2020-08-27 2022-03-03 Mrsi Systems Llc Self-aligning tip
CN114203612B (zh) * 2020-09-17 2025-10-24 深圳市索恩达电子有限公司 一种快速调节真空吸嘴机构
DE102021111953A1 (de) 2021-05-07 2022-11-10 Mühlbauer Gmbh & Co. Kg Optische Bauteilinspektion
CN113877845A (zh) * 2021-10-28 2022-01-04 浙江庆鑫科技有限公司 一种压力补偿装置及方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0697718B2 (ja) 1989-11-18 1994-11-30 太陽誘電株式会社 チップ状電子部品マウント方法及び装置
US5133926A (en) * 1991-04-18 1992-07-28 Westinghouse Electric Corp. Extended burnup top nozzle for a nuclear fuel assembly
JP3258026B2 (ja) * 1995-07-12 2002-02-18 松下電器産業株式会社 電子部品実装方法及び装置
JP3935632B2 (ja) 1998-10-27 2007-06-27 松下電器産業株式会社 電子部品の実装方法
JP3719182B2 (ja) 2001-09-28 2005-11-24 松下電器産業株式会社 電子部品実装装置および電子部品実装方法
JP3861710B2 (ja) 2002-02-15 2006-12-20 松下電器産業株式会社 電子部品供給装置および電子部品実装装置
US7306695B2 (en) 2003-04-10 2007-12-11 Matsushita Electric Industrial Co., Ltd. Apparatus and method for picking up semiconductor chip
US7222654B2 (en) * 2004-04-30 2007-05-29 The Procter & Gamble Company Apparatus for producing elastomeric nonwoven laminates
JP4516354B2 (ja) 2004-05-17 2010-08-04 パナソニック株式会社 部品供給方法
US7207430B2 (en) * 2004-10-25 2007-04-24 Ui Holding Company Vacuum gripper for handling small components

Also Published As

Publication number Publication date
US20100254788A1 (en) 2010-10-07
TW200935551A (en) 2009-08-16
CN101919039B (zh) 2012-12-05
MY147294A (en) 2012-11-30
KR20100110835A (ko) 2010-10-13
US8550766B2 (en) 2013-10-08
EP2075829A1 (de) 2009-07-01
EP2075829B1 (de) 2011-10-12
TWI483340B (zh) 2015-05-01
MX2010006994A (es) 2010-08-25
KR101448076B1 (ko) 2014-10-07
CN101919039A (zh) 2010-12-15
HK1148387A1 (en) 2011-09-02
WO2009080652A1 (en) 2009-07-02

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