ATE523803T1 - Herstellungsverfahren für eine optoelektrische hybridplatte - Google Patents
Herstellungsverfahren für eine optoelektrische hybridplatteInfo
- Publication number
- ATE523803T1 ATE523803T1 AT09158611T AT09158611T ATE523803T1 AT E523803 T1 ATE523803 T1 AT E523803T1 AT 09158611 T AT09158611 T AT 09158611T AT 09158611 T AT09158611 T AT 09158611T AT E523803 T1 ATE523803 T1 AT E523803T1
- Authority
- AT
- Austria
- Prior art keywords
- core
- optical waveguide
- production method
- optical element
- optical
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
- G02B6/422—Active alignment, i.e. moving the elements in response to the detected degree of coupling or position of the elements
- G02B6/4221—Active alignment, i.e. moving the elements in response to the detected degree of coupling or position of the elements involving a visual detection of the position of the elements, e.g. by using a microscope or a camera
- G02B6/4224—Active alignment, i.e. moving the elements in response to the detected degree of coupling or position of the elements involving a visual detection of the position of the elements, e.g. by using a microscope or a camera using visual alignment markings, e.g. index methods
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/43—Arrangements comprising a plurality of opto-electronic elements and associated optical interconnections
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/0274—Optical details, e.g. printed circuits comprising integral optical means
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
- G02B6/4214—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms the intermediate optical element having redirecting reflective means, e.g. mirrors, prisms for deflecting the radiation from horizontal to down- or upward direction toward a device
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/0266—Marks, test patterns or identification means
- H05K1/0269—Marks, test patterns or identification means for visual or optical inspection
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/09—Shape and layout
- H05K2201/09818—Shape or layout details not covered by a single group of H05K2201/09009 - H05K2201/09809
- H05K2201/09918—Optically detected marks used for aligning tool relative to the PCB, e.g. for mounting of components
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/0011—Working of insulating substrates or insulating layers
- H05K3/0017—Etching of the substrate by chemical or physical means
- H05K3/0023—Etching of the substrate by chemical or physical means by exposure and development of a photosensitive insulating layer
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Optical Integrated Circuits (AREA)
- Optical Couplings Of Light Guides (AREA)
- Structure Of Printed Boards (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008114329A JP5055193B2 (ja) | 2008-04-24 | 2008-04-24 | 光電気混載基板の製造方法 |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE523803T1 true ATE523803T1 (de) | 2011-09-15 |
Family
ID=40901955
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT09158611T ATE523803T1 (de) | 2008-04-24 | 2009-04-23 | Herstellungsverfahren für eine optoelektrische hybridplatte |
Country Status (6)
Country | Link |
---|---|
US (1) | US8142672B2 (de) |
EP (1) | EP2112534B1 (de) |
JP (1) | JP5055193B2 (de) |
KR (1) | KR101560404B1 (de) |
CN (1) | CN101566706B (de) |
AT (1) | ATE523803T1 (de) |
Families Citing this family (41)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5049145B2 (ja) * | 2008-01-22 | 2012-10-17 | 日東電工株式会社 | 光導波路デバイスの製法 |
JP5138459B2 (ja) * | 2008-05-15 | 2013-02-06 | 新光電気工業株式会社 | 配線基板の製造方法 |
JP5106348B2 (ja) | 2008-10-28 | 2012-12-26 | 日東電工株式会社 | 光電気混載モジュールの製造方法およびそれによって得られた光電気混載モジュール |
JP4796615B2 (ja) * | 2008-11-26 | 2011-10-19 | 日東電工株式会社 | 光電気混載基板およびその製造方法 |
JP5653745B2 (ja) * | 2010-12-22 | 2015-01-14 | 日東電工株式会社 | 光導波路の製法 |
JP2012155215A (ja) * | 2011-01-27 | 2012-08-16 | Nitto Denko Corp | 光導波路の製法およびそれに用いられる光導波路体 |
JP5696538B2 (ja) * | 2011-03-15 | 2015-04-08 | 住友ベークライト株式会社 | 光電気混載基板の製造方法 |
JP2012208306A (ja) * | 2011-03-29 | 2012-10-25 | Nitto Denko Corp | 光電気混載基板およびその製法 |
WO2013095426A1 (en) | 2011-12-21 | 2013-06-27 | Intel Corporation | Fabrication of planar light-wave circuits (plcs) for optical i/o |
WO2013101112A1 (en) | 2011-12-29 | 2013-07-04 | Intel Corporation | Two-dimensional, high-density optical connector |
US9507086B2 (en) | 2011-12-30 | 2016-11-29 | Intel Corporation | Optical I/O system using planar light-wave integrated circuit |
JP5840988B2 (ja) | 2012-03-16 | 2016-01-06 | 日東電工株式会社 | 光電気混載基板およびその製法 |
JP5840989B2 (ja) | 2012-03-16 | 2016-01-06 | 日東電工株式会社 | 光電気混載基板およびその製法 |
JP5877749B2 (ja) * | 2012-03-29 | 2016-03-08 | 日東電工株式会社 | 光電気混載基板の製法 |
JP5877756B2 (ja) * | 2012-05-08 | 2016-03-08 | 日東電工株式会社 | 光電気混載基板およびその製法 |
CN103389546B (zh) * | 2012-05-08 | 2016-12-07 | 鸿富锦精密工业(深圳)有限公司 | 光纤模组 |
JP6081086B2 (ja) * | 2012-06-14 | 2017-02-15 | Tdk株式会社 | 光電素子用実装装置及び実装方法 |
JP6045829B2 (ja) * | 2012-07-13 | 2016-12-14 | 日東電工株式会社 | 光電気混載基板 |
JP6202662B2 (ja) | 2012-11-27 | 2017-09-27 | 日東電工株式会社 | 光電気混載基板およびその製法 |
AT513747B1 (de) | 2013-02-28 | 2014-07-15 | Mikroelektronik Ges Mit Beschränkter Haftung Ab | Bestückungsverfahren für Schaltungsträger und Schaltungsträger |
JP6048241B2 (ja) * | 2013-03-18 | 2016-12-21 | 富士通株式会社 | 光伝送装置の製造方法及び製造装置、並びに光伝送装置 |
CN104101958B (zh) * | 2013-04-03 | 2017-10-03 | 赛恩倍吉科技顾问(深圳)有限公司 | 光通讯装置 |
JP2014216377A (ja) * | 2013-04-23 | 2014-11-17 | イビデン株式会社 | 電子部品とその製造方法及び多層プリント配線板の製造方法 |
TWI572933B (zh) * | 2013-05-20 | 2017-03-01 | 鴻海精密工業股份有限公司 | 光通訊裝置 |
JP6245569B2 (ja) | 2013-06-06 | 2017-12-13 | 日東電工株式会社 | 光電気混載基板 |
AT514599B1 (de) * | 2013-07-05 | 2015-02-15 | Melecs Ews Gmbh & Co Kg | Verfahren zur Bestückung elektronischer Leiterplatten mit optischen Bauelementen |
JP6202566B2 (ja) | 2013-10-29 | 2017-09-27 | 日東電工株式会社 | 光電気混載基板およびその製法 |
US10634325B2 (en) | 2014-08-04 | 2020-04-28 | Fuji Corporation | Mounting device |
JP6525240B2 (ja) * | 2014-10-24 | 2019-06-05 | 日東電工株式会社 | 光電気混載基板およびその製法 |
JP6460515B2 (ja) | 2014-10-24 | 2019-01-30 | 日東電工株式会社 | 光電気混載基板およびその製法 |
JP6460516B2 (ja) | 2014-10-28 | 2019-01-30 | 日東電工株式会社 | 光電気混載基板 |
JP6653857B2 (ja) | 2014-11-25 | 2020-02-26 | 日東電工株式会社 | 光電気混載基板およびその製法 |
CN104698552B (zh) * | 2015-03-16 | 2016-05-11 | 中国航天科技集团公司第九研究院第七七一研究所 | 一种用于航天器和军用计算机上的光互连基板及其制造方法 |
DE102015207709A1 (de) * | 2015-04-27 | 2016-10-27 | Automotive Lighting Reutlingen Gmbh | Verfahren und Vorrichtung zur Anordnung eines Schaltungsträgers mit einer Halbleiterlichtquelle in einer bestimmten Lage relativ zu einem optischen System einer Beleuchtungseinrichtung |
JP6649076B2 (ja) * | 2015-10-26 | 2020-02-19 | 京セラ株式会社 | 光回路基板の製造方法 |
US9739942B2 (en) * | 2015-10-26 | 2017-08-22 | Kyocera Corporation | Method for manufacturing optical circuit board |
JP7002886B2 (ja) * | 2017-08-22 | 2022-01-20 | 日東電工株式会社 | 光導波路、光電気混載基板、および光電気混載モジュール |
JP6677232B2 (ja) * | 2017-09-29 | 2020-04-08 | 日亜化学工業株式会社 | 発光装置の製造方法 |
JP7489756B2 (ja) | 2018-07-25 | 2024-05-24 | 日東電工株式会社 | 光学素子装置およびその製造方法 |
US10775573B1 (en) * | 2019-04-03 | 2020-09-15 | International Business Machines Corporation | Embedding mirror with metal particle coating |
KR20220131256A (ko) * | 2020-02-12 | 2022-09-27 | 닛토덴코 가부시키가이샤 | 광전기 혼재 기판 및 광전기 복합 전송 모듈 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000199827A (ja) * | 1998-10-27 | 2000-07-18 | Sony Corp | 光導波装置およびその製造方法 |
JP4366751B2 (ja) * | 1999-04-13 | 2009-11-18 | 凸版印刷株式会社 | 光・電気配線基板及び製造方法並びに実装基板 |
TW451084B (en) * | 1999-06-25 | 2001-08-21 | Toppan Printing Co Ltd | Optical-electro wiring board, mounted board, and manufacturing method of optical-electro wiring board |
EP1122561A1 (de) * | 2000-02-03 | 2001-08-08 | Corning Incorporated | Genaues Ausrichtungsverfahren optischer Bauelemente auf einer dicken Kladdingschicht |
JP2004361858A (ja) * | 2003-06-06 | 2004-12-24 | Sharp Corp | マイクロレンズ付き光導波路およびその製造方法 |
JP4339198B2 (ja) * | 2004-07-20 | 2009-10-07 | 新光電気工業株式会社 | 光モジュールの製造方法 |
JP2006120956A (ja) * | 2004-10-22 | 2006-05-11 | Ibiden Co Ltd | 多層プリント配線板 |
JP4498102B2 (ja) * | 2004-11-10 | 2010-07-07 | イビデン株式会社 | 光電気配線板、および、光通信用デバイス |
JP2007173375A (ja) * | 2005-12-20 | 2007-07-05 | Nec Corp | 複合実装デバイス及びその製造方法 |
-
2008
- 2008-04-24 JP JP2008114329A patent/JP5055193B2/ja not_active Expired - Fee Related
-
2009
- 2009-04-23 US US12/428,669 patent/US8142672B2/en not_active Expired - Fee Related
- 2009-04-23 AT AT09158611T patent/ATE523803T1/de not_active IP Right Cessation
- 2009-04-23 KR KR1020090035369A patent/KR101560404B1/ko active IP Right Grant
- 2009-04-23 EP EP09158611A patent/EP2112534B1/de not_active Not-in-force
- 2009-04-24 CN CN200910135371XA patent/CN101566706B/zh not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP2112534B1 (de) | 2011-09-07 |
KR101560404B1 (ko) | 2015-10-14 |
US20090269704A1 (en) | 2009-10-29 |
KR20090112585A (ko) | 2009-10-28 |
JP2009265342A (ja) | 2009-11-12 |
CN101566706A (zh) | 2009-10-28 |
JP5055193B2 (ja) | 2012-10-24 |
US8142672B2 (en) | 2012-03-27 |
EP2112534A1 (de) | 2009-10-28 |
CN101566706B (zh) | 2012-10-10 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
ATE523803T1 (de) | Herstellungsverfahren für eine optoelektrische hybridplatte | |
US8915657B2 (en) | Opto-electric hybrid board and manufacturing method therefor | |
CN101750673B (zh) | 光电混合基板及其制造方法 | |
JP2014524663A5 (de) | ||
US8135248B2 (en) | Opto-electric hybrid board and manufacturing method thereof | |
US9265141B2 (en) | Opto-electric hybrid board and manufacturing method therefor | |
JP2014081586A (ja) | アディアバティック結合を実現させる、シングルモード・ポリマー導波路(PWG)アレイと、シリコン導波路(SiWG)アレイとの整列。 | |
WO2009036478A3 (de) | Leiterplattenelement und verfahren zu dessen herstellung | |
ATE513250T1 (de) | Prägeform, imprint lithographieverfahren, und verfahren für chipherstellung | |
EP2312357A3 (de) | Optische Vorrichtungen und Herstellungsverfahren dafür | |
JP2011033876A (ja) | 光センサモジュールの製造方法およびそれによって得られた光センサモジュール | |
US10022927B2 (en) | Method of manufacturing optical waveguide device and laser processing apparatus | |
WO2010110496A3 (en) | Method of manufacturing optical waveguide having mirror face, and optoelectronic composite wiring board | |
WO2010114109A3 (en) | Method of manufacturing optical waveguide core, method of manufacturing optical waveguide, optical waveguide, and optoelectric composite wiring board | |
JP2011102955A (ja) | 光センサモジュールの製造方法およびそれによって得られた光センサモジュール | |
TWI670535B (zh) | 光電混合基板及其製法 | |
TWI612350B (zh) | 光電混合模組 | |
US8383327B2 (en) | Method for producing an electro-optical printed circuit board with optical waveguide structures | |
CN103529514B (zh) | 一种隐埋光波导印制线路板的制造方法 | |
KR20090080903A (ko) | 광도파로 디바이스의 제조 방법 | |
WO2008153140A1 (ja) | 光モジュール及びその製造方法 | |
JP5029343B2 (ja) | 光基板の製造方法 | |
US20150355422A1 (en) | Opto-electric hybrid module | |
JPWO2015098854A1 (ja) | 光学装置の製造方法 | |
ATE387639T1 (de) | Herstellung einer optischen verbindungsschicht auf einem elektronischen schaltkreis |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |