ATE511668T1 - Beleuchtungssystem für eine mikrolithographische projektionsbelichtungsvorrichtung - Google Patents

Beleuchtungssystem für eine mikrolithographische projektionsbelichtungsvorrichtung

Info

Publication number
ATE511668T1
ATE511668T1 AT05707395T AT05707395T ATE511668T1 AT E511668 T1 ATE511668 T1 AT E511668T1 AT 05707395 T AT05707395 T AT 05707395T AT 05707395 T AT05707395 T AT 05707395T AT E511668 T1 ATE511668 T1 AT E511668T1
Authority
AT
Austria
Prior art keywords
illumination system
projection exposure
raster element
microlithographic projection
exposure device
Prior art date
Application number
AT05707395T
Other languages
English (en)
Inventor
Damian Fiolka
Manfred Maul
Axel Scholz
Markus Deguenther
Johannes Wangler
Original Assignee
Zeiss Carl Smt Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zeiss Carl Smt Gmbh filed Critical Zeiss Carl Smt Gmbh
Application granted granted Critical
Publication of ATE511668T1 publication Critical patent/ATE511668T1/de

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G03F7/7015—Details of optical elements
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B27/00—Photographic printing apparatus
    • G03B27/32—Projection printing apparatus, e.g. enlarger, copying camera
    • G03B27/52—Details
    • G03B27/54—Lamp housings; Illuminating means
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G03F7/70075—Homogenization of illumination intensity in the mask plane by using an integrator, e.g. fly's eye lens, facet mirror or glass rod, by using a diffusing optical element or by beam deflection
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G03F7/70091—Illumination settings, i.e. intensity distribution in the pupil plane or angular distribution in the field plane; On-axis or off-axis settings, e.g. annular, dipole or quadrupole settings; Partial coherence control, i.e. sigma or numerical aperture [NA]
    • G03F7/70108—Off-axis setting using a light-guiding element, e.g. diffractive optical elements [DOEs] or light guides

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
AT05707395T 2004-02-17 2005-02-15 Beleuchtungssystem für eine mikrolithographische projektionsbelichtungsvorrichtung ATE511668T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US54510504P 2004-02-17 2004-02-17
PCT/EP2005/001501 WO2005078522A2 (en) 2004-02-17 2005-02-15 Illumination system for a microlithographic projection exposure apparatus

Publications (1)

Publication Number Publication Date
ATE511668T1 true ATE511668T1 (de) 2011-06-15

Family

ID=34860514

Family Applications (1)

Application Number Title Priority Date Filing Date
AT05707395T ATE511668T1 (de) 2004-02-17 2005-02-15 Beleuchtungssystem für eine mikrolithographische projektionsbelichtungsvorrichtung

Country Status (6)

Country Link
US (2) US8004656B2 (de)
EP (1) EP1716458B1 (de)
JP (1) JP4846600B2 (de)
KR (1) KR101170182B1 (de)
AT (1) ATE511668T1 (de)
WO (1) WO2005078522A2 (de)

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WO2010102649A1 (en) 2009-03-13 2010-09-16 Carl Zeiss Smt Ag Microlithographic projection exposure apparatus
KR101646814B1 (ko) 2009-03-19 2016-08-08 칼 짜이스 에스엠티 게엠베하 마이크로리소그래피 투영 노광 장치의 조명 시스템
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EP2354853B1 (de) 2010-02-09 2013-01-02 Carl Zeiss SMT GmbH Optisches Rasterelement, optischer Integrator und Beleuchtungssystem eines mikrolithografischen Projektionsbelichtungsgerätes
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CN103412465B (zh) 2013-07-01 2015-04-15 中国科学院上海光学精密机械研究所 步进扫描投影光刻机的照明系统
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Also Published As

Publication number Publication date
WO2005078522A3 (en) 2006-03-02
US8730455B2 (en) 2014-05-20
US20110285978A1 (en) 2011-11-24
JP2007525027A (ja) 2007-08-30
WO2005078522A2 (en) 2005-08-25
KR20060123538A (ko) 2006-12-01
JP4846600B2 (ja) 2011-12-28
EP1716458A2 (de) 2006-11-02
US8004656B2 (en) 2011-08-23
KR101170182B1 (ko) 2012-08-01
EP1716458B1 (de) 2011-06-01
US20070206171A1 (en) 2007-09-06

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