ATE374846T1 - Verfahren zur herstellung von hochreinem ruthenium-sputter-target - Google Patents

Verfahren zur herstellung von hochreinem ruthenium-sputter-target

Info

Publication number
ATE374846T1
ATE374846T1 AT99929828T AT99929828T ATE374846T1 AT E374846 T1 ATE374846 T1 AT E374846T1 AT 99929828 T AT99929828 T AT 99929828T AT 99929828 T AT99929828 T AT 99929828T AT E374846 T1 ATE374846 T1 AT E374846T1
Authority
AT
Austria
Prior art keywords
ruthenium
sputtering target
solution
purity
purity ruthenium
Prior art date
Application number
AT99929828T
Other languages
English (en)
Inventor
Yuichiro Shindo
Tsuneo Suzuki
Original Assignee
Nippon Mining Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Mining Co filed Critical Nippon Mining Co
Application granted granted Critical
Publication of ATE374846T1 publication Critical patent/ATE374846T1/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
    • C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22B—PRODUCTION AND REFINING OF METALS; PRETREATMENT OF RAW MATERIALS
    • C22B11/00—Obtaining noble metals
    • C22B11/04—Obtaining noble metals by wet processes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F1/00—Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
    • B22F1/14—Treatment of metallic powder
    • B22F1/145—Chemical treatment, e.g. passivation or decarburisation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
    • B22F3/001—Starting from powder comprising reducible metal compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F9/00—Making metallic powder or suspensions thereof
    • B22F9/16—Making metallic powder or suspensions thereof using chemical processes
    • B22F9/18—Making metallic powder or suspensions thereof using chemical processes with reduction of metal compounds
    • B22F9/20—Making metallic powder or suspensions thereof using chemical processes with reduction of metal compounds starting from solid metal compounds
    • B22F9/22—Making metallic powder or suspensions thereof using chemical processes with reduction of metal compounds starting from solid metal compounds using gaseous reductors
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22B—PRODUCTION AND REFINING OF METALS; PRETREATMENT OF RAW MATERIALS
    • C22B61/00—Obtaining metals not elsewhere provided for in this subclass
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
    • C23C14/165—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon by cathodic sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F9/00—Making metallic powder or suspensions thereof
    • B22F9/16—Making metallic powder or suspensions thereof using chemical processes
    • B22F9/18—Making metallic powder or suspensions thereof using chemical processes with reduction of metal compounds
    • B22F9/24—Making metallic powder or suspensions thereof using chemical processes with reduction of metal compounds starting from liquid metal compounds, e.g. solutions
    • B22F2009/245—Reduction reaction in an Ionic Liquid [IL]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F2998/00—Supplementary information concerning processes or compositions relating to powder metallurgy
    • B22F2998/10—Processes characterised by the sequence of their steps

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Metallurgy (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • General Chemical & Material Sciences (AREA)
  • Physical Vapour Deposition (AREA)
  • Manufacture Of Metal Powder And Suspensions Thereof (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
  • Electrodes Of Semiconductors (AREA)
AT99929828T 1998-07-14 1999-07-14 Verfahren zur herstellung von hochreinem ruthenium-sputter-target ATE374846T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10198766A JP2000034563A (ja) 1998-07-14 1998-07-14 高純度ルテニウムスパッタリングターゲットの製造方法及び高純度ルテニウムスパッタリングターゲット

Publications (1)

Publication Number Publication Date
ATE374846T1 true ATE374846T1 (de) 2007-10-15

Family

ID=16396588

Family Applications (1)

Application Number Title Priority Date Filing Date
AT99929828T ATE374846T1 (de) 1998-07-14 1999-07-14 Verfahren zur herstellung von hochreinem ruthenium-sputter-target

Country Status (8)

Country Link
US (1) US6284013B1 (de)
EP (1) EP1026283B1 (de)
JP (1) JP2000034563A (de)
KR (1) KR100319223B1 (de)
AT (1) ATE374846T1 (de)
DE (1) DE69937224T2 (de)
TW (1) TW452602B (de)
WO (1) WO2000004202A1 (de)

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JPWO2004001092A1 (ja) * 2002-06-24 2005-10-20 株式会社日鉱マテリアルズ ＡｌＲｕスパッタリングターゲット及びその製造方法
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AU2003264343A1 (en) † 2002-11-29 2004-06-23 Mitsubishi Materials Corporation Method for separating platinum group element
US20040127584A1 (en) * 2002-12-31 2004-07-01 Phillips Petroleum Company Chemical vapor deposition synthesis of polymerization catalyst composition
EP1724364B1 (de) * 2004-03-01 2014-01-22 JX Nippon Mining & Metals Corporation Verfahren zur Herstellung von hochreinem Ruthen-Pulver und daraus eines Sputtertargets.
WO2006081234A2 (en) * 2005-01-27 2006-08-03 Applied Materials, Inc. Ruthenium layer deposition apparatus and method
US20060162658A1 (en) * 2005-01-27 2006-07-27 Applied Materials, Inc. Ruthenium layer deposition apparatus and method
US20060237303A1 (en) * 2005-03-31 2006-10-26 Hoya Corporation Sputtering target, method of manufacturing a multilayer reflective film coated substrate, method of manufacturing a reflective mask blank, and method of manufacturing a reflective mask
JP2006283054A (ja) * 2005-03-31 2006-10-19 Hoya Corp スパッタリングターゲット、多層反射膜付き基板の製造方法、及び反射型マスクブランクの製造方法、並びに反射型マスクの製造方法
WO2006134743A1 (ja) * 2005-06-16 2006-12-21 Nippon Mining & Metals Co., Ltd. ルテニウム合金スパッタリングターゲット
CN101287858B (zh) * 2005-10-14 2010-08-25 日矿金属株式会社 高纯度Ru合金靶及其制造方法以及溅射膜
US20070116592A1 (en) * 2005-11-22 2007-05-24 Paul Tylus Fabrication of Ruthenium and Ruthenium Alloy Sputtering Targets with Low Oxygen Content
CN101389784B (zh) * 2006-02-22 2011-04-20 Jx日矿日石金属株式会社 含有高熔点金属的烧结体溅射靶
US8133367B1 (en) 2006-08-11 2012-03-13 Raytheon Company Sputtering system and method using a loose granular sputtering target
WO2008084867A1 (ja) * 2007-01-10 2008-07-17 Nec Corporation 半導体装置及びその製造方法
ZA200800816B (en) * 2007-01-29 2008-12-31 Nippon Mining Co Method for producing ammonium hexachlororuther ate and ruthenium powder, as well as ammonium hexachlororuthenate
DE102007020142A1 (de) 2007-04-26 2008-10-30 Bayer Materialscience Ag Verfahren zur Rückgewinnung von Ruthenium aus einem rutheniumhaltigen geträgerten Katalysatormaterial
KR100884369B1 (ko) * 2007-05-14 2009-02-18 진인수 폐촉매 등에서 회수한 루테늄의 정제방법
KR100898746B1 (ko) * 2007-08-17 2009-05-25 희성금속 주식회사 분말야금법을 이용한 고밀도 단상의 ＲｕＡｌ 금속간화합물제조방법
KR100885698B1 (ko) * 2007-08-17 2009-02-26 희성금속 주식회사 단상구조를 갖는 고온재료용 Ｒｕ계 금속간화합물의제조방법
US8118906B2 (en) * 2007-10-29 2012-02-21 Heraeus Inc. Methodology for recycling Ru and Ru-alloy deposition targets and targets made of recycled Ru and Ru-based alloy powders
DE102008006797B4 (de) * 2008-01-30 2014-05-22 Heraeus Precious Metals Gmbh & Co. Kg Verfahren und Vorrichtungen zum Entfernen von Ruthenium durch Destillation als RuO4 aus ruthenathaltigen Lösungen
DE102008006796A1 (de) * 2008-01-30 2009-08-27 W.C. Heraeus Gmbh Verfahren zum Gewinnen von Ruthenium aus Ruthenium oder Rutheniumoxide enthaltenden Materialien oder rutheniumhaltigen Edelmetall-Erzkonzentraten
JP4514807B2 (ja) * 2008-04-10 2010-07-28 山本貴金属地金株式会社 貴金属微粒子の製造方法
JP4576470B1 (ja) * 2009-05-29 2010-11-10 田中貴金属工業株式会社 塩化ルテニウム酸アンモニウムの製造方法
KR101175676B1 (ko) * 2010-03-25 2012-08-22 희성금속 주식회사 폐 루테늄（Ｒｕ） 타겟을 이용한 고순도화 및 미세화된 루테늄（Ｒｕ）분말 제조법
CN101891261A (zh) * 2010-08-31 2010-11-24 郴州高鑫铂业有限公司 一种粗钌粉制备三氯化钌的方法
KR101335353B1 (ko) * 2011-05-25 2013-12-02 성일하이텍(주) 함(含)루테늄 금속 및 산화물 스크랩으로 부터 삼염화루테늄의 제조 방법
KR101300778B1 (ko) 2011-06-09 2013-08-29 성일하이텍(주) 수소환원법을 이용한 루테늄 분말 제조 방법
CN102605332A (zh) * 2012-03-25 2012-07-25 昆明贵金属研究所 一种高纯Ru溅射靶及制备方法
KR101638270B1 (ko) 2012-07-30 2016-07-08 제이엑스금속주식회사 루테늄 스퍼터링 타깃 및 루테늄 합금 스퍼터링 타깃
KR20140129279A (ko) * 2012-08-10 2014-11-06 캐논 아네르바 가부시키가이샤 터널 자기저항소자 제조장치
CN103223493B (zh) * 2013-04-02 2015-06-17 贵研资源（易门）有限公司 一种制备靶用钌粉的方法
WO2015068564A1 (ja) 2013-11-06 2015-05-14 三井金属鉱業株式会社 スパッタリングターゲット
CN104032270B (zh) * 2014-06-12 2016-05-04 贵研铂业股份有限公司 一种大尺寸钌基合金溅射靶材及其制备方法
EP3243914B1 (de) * 2016-05-13 2018-10-17 Heraeus Deutschland GmbH & Co. KG Verfahren zur herstellung von partikulärem ruthenium
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JPWO2020256007A1 (de) * 2019-06-21 2020-12-24
CN110919019A (zh) * 2019-12-02 2020-03-27 河南东微电子材料有限公司 一种高纯钌粉的制备方法
CN112758996B (zh) * 2020-12-14 2022-04-19 清华大学 一种双功能氧电催化剂及其制备和应用
CN114289727A (zh) * 2021-12-09 2022-04-08 贵研铂业股份有限公司 一种高均质微粒径高纯钌粉及其制备方法

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Also Published As

Publication number Publication date
EP1026283B1 (de) 2007-10-03
EP1026283A4 (de) 2005-01-26
TW452602B (en) 2001-09-01
DE69937224T2 (de) 2008-01-10
US6284013B1 (en) 2001-09-04
KR20010023932A (ko) 2001-03-26
DE69937224D1 (de) 2007-11-15
EP1026283A1 (de) 2000-08-09
WO2000004202A1 (fr) 2000-01-27
KR100319223B1 (ko) 2002-01-05
JP2000034563A (ja) 2000-02-02

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