ATE301917T1 - Keramisches heizelement - Google Patents

Keramisches heizelement

Info

Publication number
ATE301917T1
ATE301917T1 AT00957015T AT00957015T ATE301917T1 AT E301917 T1 ATE301917 T1 AT E301917T1 AT 00957015 T AT00957015 T AT 00957015T AT 00957015 T AT00957015 T AT 00957015T AT E301917 T1 ATE301917 T1 AT E301917T1
Authority
AT
Austria
Prior art keywords
heating body
ceramic
thin film
electrically conductive
heating element
Prior art date
Application number
AT00957015T
Other languages
English (en)
Inventor
Satoru Kariya
Original Assignee
Ibiden Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ibiden Co Ltd filed Critical Ibiden Co Ltd
Application granted granted Critical
Publication of ATE301917T1 publication Critical patent/ATE301917T1/de

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/10—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor
    • H05B3/12—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/10—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor
    • H05B3/12—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material
    • H05B3/14—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material the material being non-metallic
    • H05B3/141—Conductive ceramics, e.g. metal oxides, metal carbides, barium titanate, ferrites, zirconia, vitrous compounds
    • H05B3/143—Conductive ceramics, e.g. metal oxides, metal carbides, barium titanate, ferrites, zirconia, vitrous compounds applied to semiconductors, e.g. wafers heating
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/20—Heating elements having extended surface area substantially in a two-dimensional [2D] plane, e.g. plate-heater
    • H05B3/22—Heating elements having extended surface area substantially in a two-dimensional [2D] plane, e.g. plate-heater non-flexible
    • H05B3/26—Heating elements having extended surface area substantially in a two-dimensional [2D] plane, e.g. plate-heater non-flexible heating conductor mounted on insulating base
    • H05B3/265—Heating elements having extended surface area substantially in a two-dimensional [2D] plane, e.g. plate-heater non-flexible heating conductor mounted on insulating base the insulating base being an inorganic material, e.g. ceramic

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Resistance Heating (AREA)
  • Surface Heating Bodies (AREA)
AT00957015T 1999-09-07 2000-09-07 Keramisches heizelement ATE301917T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP25292699 1999-09-07
PCT/JP2000/006109 WO2001019139A1 (en) 1999-09-07 2000-09-07 Ceramic heater

Publications (1)

Publication Number Publication Date
ATE301917T1 true ATE301917T1 (de) 2005-08-15

Family

ID=17244100

Family Applications (1)

Application Number Title Priority Date Filing Date
AT00957015T ATE301917T1 (de) 1999-09-07 2000-09-07 Keramisches heizelement

Country Status (5)

Country Link
US (3) US6452137B1 (de)
EP (1) EP1133214B1 (de)
AT (1) ATE301917T1 (de)
DE (1) DE60021850T2 (de)
WO (1) WO2001019139A1 (de)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1175127A4 (de) * 1999-12-29 2004-08-18 Ibiden Co Ltd Keramische heizvorrichtung
JP2001247382A (ja) * 2000-03-06 2001-09-11 Ibiden Co Ltd セラミック基板
US20020134775A1 (en) * 2000-04-29 2002-09-26 Jun Ohashi Ceramic heater and method of controlling temperature of the ceramic heater
DE10110792B4 (de) * 2001-03-06 2004-09-23 Schott Glas Keramisches Kochsystem mit Glaskeramikplatte,Isolationsschicht und Heizelementen
JP4659328B2 (ja) * 2002-10-21 2011-03-30 東京エレクトロン株式会社 被検査体を温度制御するプローブ装置
KR100555222B1 (ko) * 2003-11-18 2006-03-03 한국표준과학연구원 유리를 이용한 산화물 세라믹스의 표면개질 방법 및 표면개질된 산화물 세라믹스
US7202447B2 (en) * 2004-04-02 2007-04-10 Kingdon Charles J Conveyor type oven
WO2006060134A2 (en) * 2004-11-15 2006-06-08 Cree, Inc. Restricted radiated heating assembly for high temperature processing
TW200721363A (en) * 2005-07-25 2007-06-01 Sumitomo Electric Industries Wafer holder, heater unit having the wafer holder, and wafer prober having the heater unit
KR101299495B1 (ko) * 2005-12-08 2013-08-29 신에쓰 가가꾸 고교 가부시끼가이샤 세라믹스 히터, 히터 급전 부품 및 세라믹스 히터의제조방법
WO2009015506A1 (en) * 2007-07-27 2009-02-05 Kevin Lin Electrothermal container and electrothermal method
US8629378B2 (en) * 2008-09-09 2014-01-14 Kevin Lin Heating control device and method thereof
CN102308380B (zh) * 2009-02-04 2014-06-04 马特森技术有限公司 用于径向调整衬底的表面上的温度轮廓的静电夹具系统及方法
CN102341683B (zh) * 2009-03-13 2014-02-12 西门子公司 用于气体分析设备的红外辐射器装置
JP5915026B2 (ja) * 2011-08-26 2016-05-11 住友大阪セメント株式会社 温度測定用板状体及びそれを備えた温度測定装置
CN104105229B (zh) * 2013-04-07 2016-02-24 光宝科技股份有限公司 加热单元及应用该加热单元的加热系统
US20180233321A1 (en) * 2017-02-16 2018-08-16 Lam Research Corporation Ion directionality esc

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US3904461A (en) * 1972-10-02 1975-09-09 Bendix Corp Method of manufacturing solderable thin film microcircuit with stabilized resistive films
JPS55126989A (en) * 1979-03-24 1980-10-01 Kyoto Ceramic Ceramic heater
JPS58185624A (ja) 1982-04-24 1983-10-29 Mitsubishi Chem Ind Ltd コポリイミド
JPS58209084A (ja) 1982-05-28 1983-12-05 株式会社日立製作所 直熱形ヒ−タ材
JPS6060983A (ja) 1983-09-08 1985-04-08 株式会社デンソー セラミックヒ−タ及びその製造方法
JPS61114487A (ja) * 1984-11-07 1986-06-02 三菱瓦斯化学株式会社 面状発熱素子
US4804823A (en) * 1986-07-31 1989-02-14 Kyocera Corporation Ceramic heater
US4797508A (en) * 1986-09-19 1989-01-10 Firan Corporation Method for producing circuit boards with deposited metal patterns and circuit boards produced thereby
JPH02112192A (ja) * 1988-10-21 1990-04-24 Kawasaki Steel Corp 箔状発熱体
US5350720A (en) * 1991-03-18 1994-09-27 Shin-Etsu Chemical Co., Ltd. Triple-layered ceramic heater
JP2581373B2 (ja) * 1992-04-27 1997-02-12 双葉電子工業株式会社 透明導電膜配線基板の製造方法
JPH0613161A (ja) * 1992-06-25 1994-01-21 Kyocera Corp セラミックヒーター
JP3072303B2 (ja) * 1992-08-19 2000-07-31 株式会社河合楽器製作所 ヒーター
DE69424478T2 (de) * 1993-07-20 2001-01-18 Tdk Corp., Tokio/Tokyo Keramisches Heizelement
JP2642858B2 (ja) * 1993-12-20 1997-08-20 日本碍子株式会社 セラミックスヒーター及び加熱装置
JPH07307377A (ja) 1993-12-27 1995-11-21 Shin Etsu Chem Co Ltd 静電チャック付セラミックスヒーター
JP2647799B2 (ja) 1994-02-04 1997-08-27 日本碍子株式会社 セラミックスヒーター及びその製造方法
KR100361113B1 (ko) 1994-08-18 2003-02-05 닛뽕도구슈우도오교오가부시끼가이샤 세라믹 히터용 알루미나기 소결재료
EP0720416B1 (de) 1994-12-29 2004-03-24 Robert Bosch Gmbh Keramische Heizeinrichtung, Verfahren zu deren Herstellung und deren Verwendung
JPH08335192A (ja) * 1995-06-06 1996-12-17 Mitsubishi Electric Corp 二重化外部記憶装置の管理装置
JPH08335492A (ja) 1995-06-08 1996-12-17 Toyota Motor Corp セラミックヒータの製造方法
JPH10208853A (ja) * 1996-11-19 1998-08-07 Ngk Spark Plug Co Ltd セラミックヒータ、およびその製造方法
JPH10169982A (ja) 1996-12-11 1998-06-26 Isuzu Ceramics Kenkyusho:Kk セラミックヒータ及びその製造方法
JPH10189226A (ja) 1996-12-27 1998-07-21 Jidosha Kiki Co Ltd セラミックヒータおよびその製造方法
US6025579A (en) 1996-12-27 2000-02-15 Jidosha Kiki Co., Ltd. Ceramic heater and method of manufacturing the same
EP0853444B1 (de) * 1997-01-10 2005-11-23 E.G.O. ELEKTRO-GERÄTEBAU GmbH Kochsystem mit einer Kontaktwärme übertragenden Elektro-Kochplatte
JP3165396B2 (ja) * 1997-07-19 2001-05-14 イビデン株式会社 ヒーターおよびその製造方法
JPH11204238A (ja) * 1998-01-08 1999-07-30 Ngk Insulators Ltd セラミックスヒーター
JPH11260534A (ja) * 1998-01-09 1999-09-24 Ngk Insulators Ltd 加熱装置およびその製造方法
JP3839174B2 (ja) 1998-01-30 2006-11-01 日本特殊陶業株式会社 セラミックヒータの製造方法
US6072163A (en) * 1998-03-05 2000-06-06 Fsi International Inc. Combination bake/chill apparatus incorporating low thermal mass, thermally conductive bakeplate
JP2000268944A (ja) * 1998-08-03 2000-09-29 Denso Corp セラミックヒータおよびその製造方法，並びにガスセンサ
JP2000277240A (ja) * 1999-03-26 2000-10-06 Ibiden Co Ltd セラミックヒーター
US6294769B1 (en) * 1999-05-12 2001-09-25 Mccarter David Infrared food warming device

Also Published As

Publication number Publication date
DE60021850D1 (de) 2005-09-15
US6452137B1 (en) 2002-09-17
EP1133214A4 (de) 2002-01-30
DE60021850T2 (de) 2006-04-13
EP1133214A1 (de) 2001-09-12
WO2001019139A1 (en) 2001-03-15
US20020195441A1 (en) 2002-12-26
US20050133495A1 (en) 2005-06-23
EP1133214B1 (de) 2005-08-10

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Legal Events

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RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties