ATE273562T1 - Fokusringe - Google Patents

Fokusringe

Info

Publication number
ATE273562T1
ATE273562T1 AT98963099T AT98963099T ATE273562T1 AT E273562 T1 ATE273562 T1 AT E273562T1 AT 98963099 T AT98963099 T AT 98963099T AT 98963099 T AT98963099 T AT 98963099T AT E273562 T1 ATE273562 T1 AT E273562T1
Authority
AT
Austria
Prior art keywords
focus ring
chuck
plasma
substrate
processing chamber
Prior art date
Application number
AT98963099T
Other languages
English (en)
Inventor
Rajinder Dhindsa
Ken Tokunaga
Vikram Singh
Original Assignee
Lam Res Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lam Res Corp filed Critical Lam Res Corp
Application granted granted Critical
Publication of ATE273562T1 publication Critical patent/ATE273562T1/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32623—Mechanical discharge control means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32623—Mechanical discharge control means
    • H01J37/32642—Focus rings
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S156/00—Adhesive bonding and miscellaneous chemical manufacture
    • Y10S156/915—Differential etching apparatus including focus ring surrounding a wafer for plasma apparatus

Landscapes

  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Drying Of Semiconductors (AREA)
  • Chemical Vapour Deposition (AREA)
  • Plasma Technology (AREA)
  • Developing Agents For Electrophotography (AREA)
  • Diaphragms For Electromechanical Transducers (AREA)
  • Glass Compositions (AREA)
  • Special Wing (AREA)
  • Adornments (AREA)
AT98963099T 1997-12-19 1998-12-11 Fokusringe ATE273562T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/993,791 US6039836A (en) 1997-12-19 1997-12-19 Focus rings
PCT/US1998/026412 WO1999033087A1 (en) 1997-12-19 1998-12-11 Focus rings and methods therefor

Publications (1)

Publication Number Publication Date
ATE273562T1 true ATE273562T1 (de) 2004-08-15

Family

ID=25539940

Family Applications (1)

Application Number Title Priority Date Filing Date
AT98963099T ATE273562T1 (de) 1997-12-19 1998-12-11 Fokusringe

Country Status (8)

Country Link
US (1) US6039836A (de)
EP (1) EP1042783B1 (de)
JP (1) JP4548560B2 (de)
KR (1) KR100635693B1 (de)
AT (1) ATE273562T1 (de)
DE (1) DE69825630T2 (de)
IL (1) IL136874A (de)
WO (1) WO1999033087A1 (de)

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Also Published As

Publication number Publication date
EP1042783B1 (de) 2004-08-11
JP2001527285A (ja) 2001-12-25
JP4548560B2 (ja) 2010-09-22
KR100635693B1 (ko) 2006-10-17
DE69825630D1 (de) 2004-09-16
DE69825630T2 (de) 2005-09-15
WO1999033087A1 (en) 1999-07-01
IL136874A0 (en) 2001-06-14
KR20010033185A (ko) 2001-04-25
US6039836A (en) 2000-03-21
EP1042783A1 (de) 2000-10-11
IL136874A (en) 2003-07-31

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