ATE247700T1 - Suspension zum chemisch-mechanischen polieren mit fluorierten additiven und verfahren zur benutzung dieser suspension - Google Patents
Suspension zum chemisch-mechanischen polieren mit fluorierten additiven und verfahren zur benutzung dieser suspensionInfo
- Publication number
- ATE247700T1 ATE247700T1 AT97303836T AT97303836T ATE247700T1 AT E247700 T1 ATE247700 T1 AT E247700T1 AT 97303836 T AT97303836 T AT 97303836T AT 97303836 T AT97303836 T AT 97303836T AT E247700 T1 ATE247700 T1 AT E247700T1
- Authority
- AT
- Austria
- Prior art keywords
- suspension
- mechanical polishing
- chemical
- fluorinated additives
- chemical mechanical
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09G—POLISHING COMPOSITIONS; SKI WAXES
- C09G1/00—Polishing compositions
- C09G1/02—Polishing compositions containing abrasives or grinding agents
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
- H01L21/321—After treatment
- H01L21/3213—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/659,419 US5993686A (en) | 1996-06-06 | 1996-06-06 | Fluoride additive containing chemical mechanical polishing slurry and method for use of same |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE247700T1 true ATE247700T1 (de) | 2003-09-15 |
Family
ID=24645336
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT97303836T ATE247700T1 (de) | 1996-06-06 | 1997-06-04 | Suspension zum chemisch-mechanischen polieren mit fluorierten additiven und verfahren zur benutzung dieser suspension |
Country Status (11)
Country | Link |
---|---|
US (1) | US5993686A (de) |
EP (1) | EP0811666B1 (de) |
JP (1) | JP3592894B2 (de) |
AT (1) | ATE247700T1 (de) |
AU (1) | AU3138597A (de) |
DE (1) | DE69724187T2 (de) |
ID (1) | ID17160A (de) |
IL (1) | IL120912A (de) |
MY (1) | MY132376A (de) |
TW (1) | TW375660B (de) |
WO (1) | WO1997047030A1 (de) |
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US5770103A (en) * | 1997-07-08 | 1998-06-23 | Rodel, Inc. | Composition and method for polishing a composite comprising titanium |
-
1996
- 1996-06-06 US US08/659,419 patent/US5993686A/en not_active Expired - Fee Related
-
1997
- 1997-05-22 AU AU31385/97A patent/AU3138597A/en not_active Abandoned
- 1997-05-22 WO PCT/US1997/008695 patent/WO1997047030A1/en active Application Filing
- 1997-05-26 IL IL12091297A patent/IL120912A/en not_active IP Right Cessation
- 1997-05-29 TW TW086107337A patent/TW375660B/zh not_active IP Right Cessation
- 1997-06-04 MY MYPI97002487A patent/MY132376A/en unknown
- 1997-06-04 AT AT97303836T patent/ATE247700T1/de not_active IP Right Cessation
- 1997-06-04 EP EP97303836A patent/EP0811666B1/de not_active Expired - Lifetime
- 1997-06-04 DE DE69724187T patent/DE69724187T2/de not_active Expired - Lifetime
- 1997-06-05 JP JP14768897A patent/JP3592894B2/ja not_active Expired - Fee Related
- 1997-06-06 ID IDP971949A patent/ID17160A/id unknown
Also Published As
Publication number | Publication date |
---|---|
WO1997047030A1 (en) | 1997-12-11 |
JP3592894B2 (ja) | 2004-11-24 |
TW375660B (en) | 1999-12-01 |
MY132376A (en) | 2007-10-31 |
US5993686A (en) | 1999-11-30 |
EP0811666A3 (de) | 1998-10-21 |
JPH1067986A (ja) | 1998-03-10 |
AU3138597A (en) | 1998-01-05 |
EP0811666A2 (de) | 1997-12-10 |
DE69724187D1 (de) | 2003-09-25 |
ID17160A (id) | 1997-12-04 |
IL120912A (en) | 2002-11-10 |
EP0811666B1 (de) | 2003-08-20 |
IL120912A0 (en) | 1997-09-30 |
DE69724187T2 (de) | 2004-02-26 |
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