ATE209394T1 - Laminat und verfahren für die herstellung einer ohmschen elektrode - Google Patents
Laminat und verfahren für die herstellung einer ohmschen elektrodeInfo
- Publication number
- ATE209394T1 ATE209394T1 AT96927199T AT96927199T ATE209394T1 AT E209394 T1 ATE209394 T1 AT E209394T1 AT 96927199 T AT96927199 T AT 96927199T AT 96927199 T AT96927199 T AT 96927199T AT E209394 T1 ATE209394 T1 AT E209394T1
- Authority
- AT
- Austria
- Prior art keywords
- film
- ohmic electrode
- image
- fabricating
- iii
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D64/00—Electrodes of devices having potential barriers
- H10D64/01—Manufacture or treatment
- H10D64/011—Manufacture or treatment of electrodes ohmically coupled to a semiconductor
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D64/00—Electrodes of devices having potential barriers
- H10D64/01—Manufacture or treatment
- H10D64/011—Manufacture or treatment of electrodes ohmically coupled to a semiconductor
- H10D64/0116—Manufacture or treatment of electrodes ohmically coupled to a semiconductor to Group III-V semiconductors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D64/00—Electrodes of devices having potential barriers
- H10D64/60—Electrodes characterised by their materials
- H10D64/62—Electrodes ohmically coupled to a semiconductor
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
- H10D62/80—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials
- H10D62/85—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials being Group III-V materials, e.g. GaAs
Landscapes
- Electrodes Of Semiconductors (AREA)
- Laminated Bodies (AREA)
- Junction Field-Effect Transistors (AREA)
- Light Receiving Elements (AREA)
- Bipolar Transistors (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23912095 | 1995-08-24 | ||
| PCT/JP1996/002318 WO1997008744A1 (fr) | 1995-08-24 | 1996-08-20 | Lamine permettant de former une electrode ohmique et electrode ohmique |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ATE209394T1 true ATE209394T1 (de) | 2001-12-15 |
Family
ID=17040094
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AT96927199T ATE209394T1 (de) | 1995-08-24 | 1996-08-20 | Laminat und verfahren für die herstellung einer ohmschen elektrode |
Country Status (14)
| Country | Link |
|---|---|
| US (1) | US20040238891A1 (de) |
| EP (1) | EP0789387B1 (de) |
| JP (1) | JP4048284B2 (de) |
| KR (1) | KR970707572A (de) |
| CN (1) | CN1107339C (de) |
| AT (1) | ATE209394T1 (de) |
| AU (1) | AU6709996A (de) |
| BR (1) | BR9606606A (de) |
| CA (1) | CA2203557A1 (de) |
| DE (1) | DE69617192T2 (de) |
| ES (1) | ES2165515T3 (de) |
| MY (1) | MY118640A (de) |
| TW (1) | TW307926B (de) |
| WO (1) | WO1997008744A1 (de) |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20040214417A1 (en) * | 2003-03-11 | 2004-10-28 | Paul Rich | Methods of forming tungsten or tungsten containing films |
| CN100483631C (zh) * | 2003-08-14 | 2009-04-29 | 克里公司 | 金属-碳化硅欧姆接触的局部退火及其形成的装置 |
| US20050175770A1 (en) * | 2004-02-10 | 2005-08-11 | Eastman Kodak Company | Fabricating an electrode for use in organic electronic devices |
| CN100479102C (zh) * | 2006-08-29 | 2009-04-15 | 中国科学院声学研究所 | 一种图形化铂/钛金属薄膜的剥离制备方法 |
| JP5621228B2 (ja) * | 2009-08-27 | 2014-11-12 | 富士通株式会社 | 半導体装置及びその製造方法 |
| JP5437114B2 (ja) * | 2010-03-02 | 2014-03-12 | 次世代パワーデバイス技術研究組合 | 半導体トランジスタの製造方法 |
| JP2011204717A (ja) * | 2010-03-24 | 2011-10-13 | Sanken Electric Co Ltd | 化合物半導体装置 |
| JP5674106B2 (ja) * | 2010-09-30 | 2015-02-25 | 国立大学法人 東京大学 | 半導体デバイス、その製造方法及び集積回路 |
| CN102306626B (zh) * | 2011-09-09 | 2013-06-12 | 电子科技大学 | 半导体异质结场效应晶体管栅结构的制备方法 |
| US9422621B2 (en) | 2013-10-30 | 2016-08-23 | Skyworks Solutions, Inc. | Refractory metal barrier in semiconductor devices |
| EP2881982B1 (de) | 2013-12-05 | 2019-09-04 | IMEC vzw | Verfahren zur Herstellung CMOS-kompatibler Kontaktschichten in Halbleitervorrichtungen |
| US10224285B2 (en) | 2017-02-21 | 2019-03-05 | Raytheon Company | Nitride structure having gold-free contact and methods for forming such structures |
| US10096550B2 (en) | 2017-02-21 | 2018-10-09 | Raytheon Company | Nitride structure having gold-free contact and methods for forming such structures |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01166556A (ja) * | 1987-12-23 | 1989-06-30 | Hitachi Ltd | ｎ型ＧａＡｓオーム性電極およびその形成方法 |
| US4833042A (en) * | 1988-01-27 | 1989-05-23 | Rockwell International Corporation | Nonalloyed ohmic contacts for n type gallium arsenide |
| SE465211B (sv) * | 1990-01-10 | 1991-08-12 | Bahco Verktyg Ab | Batteridrivet handverktyg |
| US5027187A (en) * | 1990-03-22 | 1991-06-25 | Harris Corporation | Polycrystalline silicon ohmic contacts to group III-arsenide compound semiconductors |
| US5089438A (en) * | 1991-04-26 | 1992-02-18 | At&T Bell Laboratories | Method of making an article comprising a TiNx layer |
| JP3180501B2 (ja) * | 1993-03-12 | 2001-06-25 | ソニー株式会社 | オーミック電極の形成方法 |
| JP3584481B2 (ja) * | 1993-09-21 | 2004-11-04 | ソニー株式会社 | オーミック電極の形成方法およびオーミック電極形成用積層体 |
| JPH1166556A (ja) * | 1997-08-14 | 1999-03-09 | Hightech Syst:Kk | 磁気カード用テープ及び穴開け機 |
-
1996
- 1996-08-20 BR BR9606606A patent/BR9606606A/pt not_active Application Discontinuation
- 1996-08-20 US US08/809,463 patent/US20040238891A1/en not_active Abandoned
- 1996-08-20 JP JP51010097A patent/JP4048284B2/ja not_active Expired - Fee Related
- 1996-08-20 MY MYPI96003429A patent/MY118640A/en unknown
- 1996-08-20 TW TW085110148A patent/TW307926B/zh active
- 1996-08-20 AT AT96927199T patent/ATE209394T1/de not_active IP Right Cessation
- 1996-08-20 CN CN96191112A patent/CN1107339C/zh not_active Expired - Fee Related
- 1996-08-20 WO PCT/JP1996/002318 patent/WO1997008744A1/ja not_active Ceased
- 1996-08-20 AU AU67099/96A patent/AU6709996A/en not_active Abandoned
- 1996-08-20 EP EP96927199A patent/EP0789387B1/de not_active Expired - Lifetime
- 1996-08-20 CA CA002203557A patent/CA2203557A1/en not_active Abandoned
- 1996-08-20 KR KR1019970702664A patent/KR970707572A/ko not_active Ceased
- 1996-08-20 DE DE69617192T patent/DE69617192T2/de not_active Expired - Fee Related
- 1996-08-20 ES ES96927199T patent/ES2165515T3/es not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| CN1107339C (zh) | 2003-04-30 |
| ES2165515T3 (es) | 2002-03-16 |
| EP0789387A1 (de) | 1997-08-13 |
| US20040238891A1 (en) | 2004-12-02 |
| DE69617192D1 (de) | 2002-01-03 |
| TW307926B (de) | 1997-06-11 |
| MX9702916A (es) | 1997-09-30 |
| EP0789387A4 (de) | 1997-09-03 |
| CN1165583A (zh) | 1997-11-19 |
| EP0789387B1 (de) | 2001-11-21 |
| WO1997008744A1 (fr) | 1997-03-06 |
| BR9606606A (pt) | 1997-09-16 |
| MY118640A (en) | 2004-12-31 |
| KR970707572A (ko) | 1997-12-01 |
| DE69617192T2 (de) | 2002-07-18 |
| CA2203557A1 (en) | 1997-03-06 |
| AU6709996A (en) | 1997-03-19 |
| JP4048284B2 (ja) | 2008-02-20 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| REN | Ceased due to non-payment of the annual fee |