ATE189558T1 - Rasterelektronenmikroskop in kontrollierter atmosphäre - Google Patents

Rasterelektronenmikroskop in kontrollierter atmosphäre

Info

Publication number
ATE189558T1
ATE189558T1 AT94922723T AT94922723T ATE189558T1 AT E189558 T1 ATE189558 T1 AT E189558T1 AT 94922723 T AT94922723 T AT 94922723T AT 94922723 T AT94922723 T AT 94922723T AT E189558 T1 ATE189558 T1 AT E189558T1
Authority
AT
Austria
Prior art keywords
detector
electron microscope
scanning electron
pressure limiting
specimen
Prior art date
Application number
AT94922723T
Other languages
English (en)
Inventor
W Ralph Knowles
William G Schultz
Allen E Armstrong
Original Assignee
Philips Electronics Na
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US08/100,545 external-priority patent/US5362964A/en
Application filed by Philips Electronics Na filed Critical Philips Electronics Na
Application granted granted Critical
Publication of ATE189558T1 publication Critical patent/ATE189558T1/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/22—Optical, image processing or photographic arrangements associated with the tube
    • H01J37/226—Optical arrangements for illuminating the object; optical arrangements for collecting light from the object
    • H01J37/228—Optical arrangements for illuminating the object; optical arrangements for collecting light from the object whereby illumination or light collection take place in the same area of the discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/2002—Controlling environment of sample
    • H01J2237/2003—Environmental cells
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/24475—Scattered electron detectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/2602—Details
    • H01J2237/2605—Details operating at elevated pressures, e.g. atmosphere

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Sources, Ion Sources (AREA)
AT94922723T 1993-07-30 1994-07-25 Rasterelektronenmikroskop in kontrollierter atmosphäre ATE189558T1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US08/100,545 US5362964A (en) 1993-07-30 1993-07-30 Environmental scanning electron microscope
US08/253,548 US5412211A (en) 1993-07-30 1994-06-03 Environmental scanning electron microscope
PCT/US1994/008392 WO1995004367A1 (en) 1993-07-30 1994-07-25 Improved environmental scanning electron microscope

Publications (1)

Publication Number Publication Date
ATE189558T1 true ATE189558T1 (de) 2000-02-15

Family

ID=26797291

Family Applications (1)

Application Number Title Priority Date Filing Date
AT94922723T ATE189558T1 (de) 1993-07-30 1994-07-25 Rasterelektronenmikroskop in kontrollierter atmosphäre

Country Status (6)

Country Link
US (1) US5412211A (de)
EP (2) EP0924743A1 (de)
JP (2) JP3457671B2 (de)
AT (1) ATE189558T1 (de)
DE (1) DE69422932T2 (de)
WO (1) WO1995004367A1 (de)

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Also Published As

Publication number Publication date
JP4056890B2 (ja) 2008-03-05
EP0924743A1 (de) 1999-06-23
JP2003229083A (ja) 2003-08-15
EP0753200B1 (de) 2000-02-02
EP0753200A1 (de) 1997-01-15
JP3457671B2 (ja) 2003-10-20
DE69422932T2 (de) 2000-10-05
WO1995004367A1 (en) 1995-02-09
JPH09501010A (ja) 1997-01-28
US5412211A (en) 1995-05-02
EP0753200A4 (de) 1998-04-01
DE69422932D1 (de) 2000-03-09

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