ATE524821T1 - Verbesserungen in einem teilchendetektor - Google Patents

Verbesserungen in einem teilchendetektor

Info

Publication number
ATE524821T1
ATE524821T1 AT03253356T AT03253356T ATE524821T1 AT E524821 T1 ATE524821 T1 AT E524821T1 AT 03253356 T AT03253356 T AT 03253356T AT 03253356 T AT03253356 T AT 03253356T AT E524821 T1 ATE524821 T1 AT E524821T1
Authority
AT
Austria
Prior art keywords
electrode
particles
detector
zone
electrons
Prior art date
Application number
AT03253356T
Other languages
English (en)
Inventor
Armin Heinz Hayn
Original Assignee
Zeiss Carl Smt Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GB0212629A external-priority patent/GB0212629D0/en
Priority claimed from GB0212601A external-priority patent/GB2389260B/en
Application filed by Zeiss Carl Smt Ltd filed Critical Zeiss Carl Smt Ltd
Application granted granted Critical
Publication of ATE524821T1 publication Critical patent/ATE524821T1/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2448—Secondary particle detectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2449—Detector devices with moving charges in electric or magnetic fields
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/2602—Details
    • H01J2237/2605—Details operating at elevated pressures, e.g. atmosphere
    • H01J2237/2608—Details operating at elevated pressures, e.g. atmosphere with environmental specimen chamber

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Measurement Of Radiation (AREA)
AT03253356T 2002-05-31 2003-05-29 Verbesserungen in einem teilchendetektor ATE524821T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB0212629A GB0212629D0 (en) 2002-05-31 2002-05-31 Improvements in or relating to particle detectors
GB0212601A GB2389260B (en) 2002-05-31 2002-05-31 Transresistance amplifier for a charged particle detector

Publications (1)

Publication Number Publication Date
ATE524821T1 true ATE524821T1 (de) 2011-09-15

Family

ID=26247078

Family Applications (1)

Application Number Title Priority Date Filing Date
AT03253356T ATE524821T1 (de) 2002-05-31 2003-05-29 Verbesserungen in einem teilchendetektor

Country Status (4)

Country Link
US (1) US6888140B2 (de)
EP (1) EP1367630B1 (de)
AT (1) ATE524821T1 (de)
GB (1) GB2391696B (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2389260B (en) * 2002-05-31 2006-03-29 Leo Electron Microscopy Ltd Transresistance amplifier for a charged particle detector
CZ20022105A3 (cs) * 2002-06-17 2004-02-18 Tescan, S. R. O. Detektor sekundárních elektronů, zejména v rastrovacím elektronovém mikroskopu
US20100148065A1 (en) * 2008-12-17 2010-06-17 Baxter International Inc. Electron beam sterilization monitoring system and method
CN101895290A (zh) * 2009-05-20 2010-11-24 上海宝信软件股份有限公司 电平转换电路
CN101887003B (zh) 2010-06-29 2016-06-08 上海杰远环保科技有限公司 一种微粒测量装置及其测量方法
US9013316B2 (en) * 2011-07-28 2015-04-21 Finsecur Smoke detector
CN103702762B (zh) 2011-08-23 2016-06-08 英派尔科技开发有限公司 自洁式驻极体过滤器
CN104508791B (zh) 2012-07-30 2017-03-01 Fei 公司 环境扫描电子显微镜气体喷射系统
CN104064649A (zh) * 2013-03-20 2014-09-24 江苏扬景光电有限公司 一种发光二极管电极结构及其制造方法
DE102018204683B3 (de) 2018-03-27 2019-08-08 Carl Zeiss Microscopy Gmbh Elektronenstrahlmikroskop
CN116635974A (zh) * 2020-12-18 2023-08-22 Asml荷兰有限公司 带电粒子检测系统中的两用读出电路系统

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2921217A (en) * 1958-05-16 1960-01-12 Talbot A Chubb Copper-amine-complex photon counter
US3337734A (en) * 1965-01-29 1967-08-22 Talbot A Chubb Space charge limited avalanche counter for ultra-violet radiation detection
US3766427A (en) * 1970-06-15 1973-10-16 American Optical Corp Field emission electron gun
DE3309282A1 (de) * 1983-03-11 1984-09-13 Georg Dr. 1000 Berlin Holzapfel Geiger-zaehler zur registrierung thermisch oder optisch stimulierter exoelektronen
US4823006A (en) 1987-05-21 1989-04-18 Electroscan Corporation Integrated electron optical/differential pumping/imaging signal detection system for an environmental scanning electron microscope
US4785182A (en) 1987-05-21 1988-11-15 Electroscan Corporation Secondary electron detector for use in a gaseous atmosphere
US5087820A (en) * 1989-05-31 1992-02-11 Digital Diagnostic Corp. Radiometric analysis system for solid support samples
US5412211A (en) 1993-07-30 1995-05-02 Electroscan Corporation Environmental scanning electron microscope
US5854490A (en) * 1995-10-03 1998-12-29 Fujitsu Limited Charged-particle-beam exposure device and charged-particle-beam exposure method
JP4084427B2 (ja) * 1997-12-08 2008-04-30 エフ イー アイ カンパニ 改善された２次電子検出のための多極界を用いた環境制御型ｓｅｍ
US5945672A (en) * 1998-01-29 1999-08-31 Fei Company Gaseous backscattered electron detector for an environmental scanning electron microscope
JP2001126655A (ja) * 1999-10-25 2001-05-11 Hitachi Ltd 走査電子顕微鏡
GB2367686B (en) * 2000-08-10 2002-12-11 Leo Electron Microscopy Ltd Improvements in or relating to particle detectors
AUPQ932200A0 (en) * 2000-08-11 2000-08-31 Danilatos, Gerasimos Daniel Environmental scanning electron microscope

Also Published As

Publication number Publication date
GB2391696A (en) 2004-02-11
US6888140B2 (en) 2005-05-03
EP1367630A3 (de) 2009-06-03
GB2391696B (en) 2005-12-21
EP1367630B1 (de) 2011-09-14
US20040026621A1 (en) 2004-02-12
EP1367630A2 (de) 2003-12-03
GB0312288D0 (en) 2003-07-02

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Legal Events

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