DE69810785D1 - Analyse geladener teilchen - Google Patents

Analyse geladener teilchen

Info

Publication number
DE69810785D1
DE69810785D1 DE69810785T DE69810785T DE69810785D1 DE 69810785 D1 DE69810785 D1 DE 69810785D1 DE 69810785 T DE69810785 T DE 69810785T DE 69810785 T DE69810785 T DE 69810785T DE 69810785 D1 DE69810785 D1 DE 69810785D1
Authority
DE
Germany
Prior art keywords
source
electrodes
pair
detector
charged particles
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69810785T
Other languages
English (en)
Other versions
DE69810785T2 (de
Inventor
E Derbyshire
J Bateman
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
THE SCIENCE AND TECHNOLOGY FACILITIES COUNCIL,, GB
Original Assignee
Council for the Central Laboratory of the Research Councils
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Council for the Central Laboratory of the Research Councils filed Critical Council for the Central Laboratory of the Research Councils
Application granted granted Critical
Publication of DE69810785D1 publication Critical patent/DE69810785D1/de
Publication of DE69810785T2 publication Critical patent/DE69810785T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/227—Measuring photoelectric effect, e.g. photoelectron emission microscopy [PEEM]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J47/00—Tubes for determining the presence, intensity, density or energy of radiation or particles
    • H01J47/06—Proportional counter tubes
    • H01J47/062—Multiwire proportional counter tubes

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
DE69810785T 1997-02-14 1998-02-03 Analyse geladener teilchen Expired - Fee Related DE69810785T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GBGB9703024.1A GB9703024D0 (en) 1997-02-14 1997-02-14 Charged particle analysis
PCT/GB1998/000348 WO1998036268A1 (en) 1997-02-14 1998-02-03 Charged particle analysis

Publications (2)

Publication Number Publication Date
DE69810785D1 true DE69810785D1 (de) 2003-02-20
DE69810785T2 DE69810785T2 (de) 2003-10-23

Family

ID=10807621

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69810785T Expired - Fee Related DE69810785T2 (de) 1997-02-14 1998-02-03 Analyse geladener teilchen

Country Status (10)

Country Link
US (1) US6452401B1 (de)
EP (1) EP1012587B1 (de)
JP (1) JP3830978B2 (de)
AT (1) ATE231239T1 (de)
AU (1) AU5995898A (de)
DE (1) DE69810785T2 (de)
DK (1) DK1012587T3 (de)
ES (1) ES2190061T3 (de)
GB (1) GB9703024D0 (de)
WO (1) WO1998036268A1 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6255126B1 (en) * 1998-12-02 2001-07-03 Formfactor, Inc. Lithographic contact elements
JP3741006B2 (ja) * 2001-08-08 2006-02-01 株式会社日立製作所 荷電粒子測定装置およびその測定方法
GB0321039D0 (en) 2003-09-09 2003-10-08 Council Cent Lab Res Councils Ionising particle analyser
GB0506203D0 (en) * 2005-03-29 2005-05-04 Council Cent Lab Res Councils Radiation detector
DE102015004458B4 (de) 2014-06-26 2016-05-12 Elmos Semiconductor Aktiengesellschaft Vorrichtung und Verfahren für einen klassifizierenden, rauchkammerlosen Luftzustandssensor zur Prognostizierung eines folgenden Betriebszustands
DE102014019172B4 (de) 2014-12-17 2023-12-07 Elmos Semiconductor Se Vorrichtung und Verfahren zur Unterscheidung von festen Objekten, Kochdunst und Rauch mit einem kompensierenden optischen Messsystem
DE102014019773B4 (de) 2014-12-17 2023-12-07 Elmos Semiconductor Se Vorrichtung und Verfahren zur Unterscheidung von festen Objekten, Kochdunst und Rauch mittels des Displays eines Mobiltelefons
EP3261110A1 (de) * 2016-06-21 2017-12-27 Excillum AB Röntgenstrahlenquelle mit ionisierungswerkzeug

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH666135A5 (de) * 1982-12-03 1988-06-30 Slm Investissements S A Brandmelder.
JPH0225737A (ja) 1988-07-15 1990-01-29 Hitachi Ltd 表面分析方法および装置
FR2639436B1 (fr) 1988-10-28 1994-07-01 Schlumberger Ind Sa Procede et dispositif de localisation de particules neutres, a haute resolution
US5254861A (en) * 1992-09-29 1993-10-19 The United States Of America As Represented By The Secretary Of The Air Force Biological aerosol particle detector and method having an electronic pulse detection means
US5584938A (en) * 1993-12-10 1996-12-17 Texas Instruments Incorporated Electrostatic particle removal and characterization

Also Published As

Publication number Publication date
ES2190061T3 (es) 2003-07-16
GB9703024D0 (en) 1997-04-02
DE69810785T2 (de) 2003-10-23
EP1012587A1 (de) 2000-06-28
DK1012587T3 (da) 2003-05-05
US6452401B1 (en) 2002-09-17
JP2001512571A (ja) 2001-08-21
JP3830978B2 (ja) 2006-10-11
AU5995898A (en) 1998-09-08
EP1012587B1 (de) 2003-01-15
WO1998036268A1 (en) 1998-08-20
ATE231239T1 (de) 2003-02-15

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: THE SCIENCE AND TECHNOLOGY FACILITIES COUNCIL,, GB

8328 Change in the person/name/address of the agent

Representative=s name: MEISSNER, BOLTE & PARTNER GBR, 80538 MUENCHEN

8339 Ceased/non-payment of the annual fee