Classifications

• • G—PHYSICS
  • G01—MEASURING; TESTING
  • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
  • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
  • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
  • G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
  • G01N23/2251—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion using incident electron beams, e.g. scanning electron microscopy [SEM]
  • G01N23/2252—Measuring emitted X-rays, e.g. electron probe microanalysis [EPMA]
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
  • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
  • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
  • H01J37/256—Tubes for spot-analysing by electron or ion beams; Microanalysers using scanning beams
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
  • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
  • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
  • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
• • G—PHYSICS
  • G01—MEASURING; TESTING
  • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
  • G01N2223/00—Investigating materials by wave or particle radiation
  • G01N2223/40—Imaging
  • G01N2223/418—Imaging electron microscope
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
  • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
  • H01J2237/244—Detection characterized by the detecting means
  • H01J2237/2441—Semiconductor detectors, e.g. diodes
  • H01J2237/24415—X-ray
  • H01J2237/2442—Energy-dispersive (Si-Li type) spectrometer
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
  • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
  • H01J2237/244—Detection characterized by the detecting means
  • H01J2237/2441—Semiconductor detectors, e.g. diodes
  • H01J2237/24415—X-ray
  • H01J2237/24425—Wavelength-dispersive spectrometer
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
  • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
  • H01J2237/26—Electron or ion microscopes
  • H01J2237/28—Scanning microscopes
  • H01J2237/2803—Scanning microscopes characterised by the imaging method
  • H01J2237/2804—Scattered primary beam
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
  • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
  • H01J2237/26—Electron or ion microscopes
  • H01J2237/28—Scanning microscopes
  • H01J2237/2803—Scanning microscopes characterised by the imaging method
  • H01J2237/2807—X-rays

Landscapes

• Chemical & Material Sciences (AREA)
• Analytical Chemistry (AREA)
• Physics & Mathematics (AREA)
• Health & Medical Sciences (AREA)
• Life Sciences & Earth Sciences (AREA)
• Biochemistry (AREA)
• General Health & Medical Sciences (AREA)
• General Physics & Mathematics (AREA)
• Immunology (AREA)
• Pathology (AREA)
• Analysing Materials By The Use Of Radiation (AREA)

Applications Claiming Priority (2)

Publications (1)

Family

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Family Applications (1)

Country Status (7)

Families Citing this family (22)

Family Cites Families (97)

• 2012
  • 2012-10-26 US US13/662,072 patent/US9778215B2/en active Active
• 2013
  • 2013-09-30 CN CN201380055717.XA patent/CN104755914B/zh not_active Expired - Fee Related
  • 2013-09-30 EP EP13849908.2A patent/EP2912443A4/en not_active Withdrawn
  • 2013-09-30 AU AU2013335211A patent/AU2013335211B2/en not_active Ceased
  • 2013-09-30 WO PCT/US2013/062637 patent/WO2014065992A1/en not_active Ceased
  • 2013-09-30 JP JP2015539608A patent/JP6364150B2/ja not_active Expired - Fee Related
• 2015
  • 2015-04-10 ZA ZA2015/02427A patent/ZA201502427B/en unknown

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