WO2023181651A1 - Dispositif d'accouplement pour accoupler un corps rotatif à un arbre rotatif, et dispositif pour fixer et détacher un corps rotatif - Google Patents

Dispositif d'accouplement pour accoupler un corps rotatif à un arbre rotatif, et dispositif pour fixer et détacher un corps rotatif Download PDF

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Publication number
WO2023181651A1
WO2023181651A1 PCT/JP2023/003219 JP2023003219W WO2023181651A1 WO 2023181651 A1 WO2023181651 A1 WO 2023181651A1 JP 2023003219 W JP2023003219 W JP 2023003219W WO 2023181651 A1 WO2023181651 A1 WO 2023181651A1
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WO
WIPO (PCT)
Prior art keywords
shaft
rotating body
dresser
rotating
hole
Prior art date
Application number
PCT/JP2023/003219
Other languages
English (en)
Japanese (ja)
Inventor
伴 伊東
哲也 寺田
Original Assignee
株式会社荏原製作所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社荏原製作所 filed Critical 株式会社荏原製作所
Publication of WO2023181651A1 publication Critical patent/WO2023181651A1/fr

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B31/00—Chucks; Expansion mandrels; Adaptations thereof for remote control
    • B23B31/02—Chucks
    • B23B31/10—Chucks characterised by the retaining or gripping devices or their immediate operating means
    • B23B31/107—Retention by laterally-acting detents, e.g. pins, screws, wedges; Retention by loose elements, e.g. balls
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B31/00—Chucks; Expansion mandrels; Adaptations thereof for remote control
    • B23B31/02—Chucks
    • B23B31/10—Chucks characterised by the retaining or gripping devices or their immediate operating means
    • B23B31/11—Retention by threaded connection
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B31/00—Chucks; Expansion mandrels; Adaptations thereof for remote control
    • B23B31/02—Chucks
    • B23B31/10—Chucks characterised by the retaining or gripping devices or their immediate operating means
    • B23B31/113—Retention by bayonet connection
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B31/00—Chucks; Expansion mandrels; Adaptations thereof for remote control
    • B23B31/02—Chucks
    • B23B31/10—Chucks characterised by the retaining or gripping devices or their immediate operating means
    • B23B31/12—Chucks with simultaneously-acting jaws, whether or not also individually adjustable
    • B23B31/20—Longitudinally-split sleeves, e.g. collet chucks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q3/00—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine
    • B23Q3/155—Arrangements for automatic insertion or removal of tools, e.g. combined with manual handling
    • B23Q3/157—Arrangements for automatic insertion or removal of tools, e.g. combined with manual handling of rotary tools
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/27—Work carriers
    • B24B37/30—Work carriers for single side lapping of plane surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B45/00—Means for securing grinding wheels on rotary arbors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
    • B24B53/017—Devices or means for dressing, cleaning or otherwise conditioning lapping tools
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
    • B24B53/12—Dressing tools; Holders therefor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16D—COUPLINGS FOR TRANSMITTING ROTATION; CLUTCHES; BRAKES
    • F16D1/00—Couplings for rigidly connecting two coaxial shafts or other movable machine elements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16D—COUPLINGS FOR TRANSMITTING ROTATION; CLUTCHES; BRAKES
    • F16D1/00—Couplings for rigidly connecting two coaxial shafts or other movable machine elements
    • F16D1/02—Couplings for rigidly connecting two coaxial shafts or other movable machine elements for connecting two abutting shafts or the like
    • F16D1/04—Couplings for rigidly connecting two coaxial shafts or other movable machine elements for connecting two abutting shafts or the like with clamping hub; with hub and longitudinal key
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16D—COUPLINGS FOR TRANSMITTING ROTATION; CLUTCHES; BRAKES
    • F16D1/00—Couplings for rigidly connecting two coaxial shafts or other movable machine elements
    • F16D1/06—Couplings for rigidly connecting two coaxial shafts or other movable machine elements for attachment of a member on a shaft or on a shaft-end
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16D—COUPLINGS FOR TRANSMITTING ROTATION; CLUTCHES; BRAKES
    • F16D1/00—Couplings for rigidly connecting two coaxial shafts or other movable machine elements
    • F16D1/06—Couplings for rigidly connecting two coaxial shafts or other movable machine elements for attachment of a member on a shaft or on a shaft-end
    • F16D1/08—Couplings for rigidly connecting two coaxial shafts or other movable machine elements for attachment of a member on a shaft or on a shaft-end with clamping hub; with hub and longitudinal key
    • F16D1/09—Couplings for rigidly connecting two coaxial shafts or other movable machine elements for attachment of a member on a shaft or on a shaft-end with clamping hub; with hub and longitudinal key with radial clamping due to axial loading of at least one pair of conical surfaces
    • F16D1/092—Couplings for rigidly connecting two coaxial shafts or other movable machine elements for attachment of a member on a shaft or on a shaft-end with clamping hub; with hub and longitudinal key with radial clamping due to axial loading of at least one pair of conical surfaces the pair of conical mating surfaces being provided on the coupled hub and shaft
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16D—COUPLINGS FOR TRANSMITTING ROTATION; CLUTCHES; BRAKES
    • F16D1/00—Couplings for rigidly connecting two coaxial shafts or other movable machine elements
    • F16D1/06—Couplings for rigidly connecting two coaxial shafts or other movable machine elements for attachment of a member on a shaft or on a shaft-end
    • F16D1/08—Couplings for rigidly connecting two coaxial shafts or other movable machine elements for attachment of a member on a shaft or on a shaft-end with clamping hub; with hub and longitudinal key
    • F16D1/09—Couplings for rigidly connecting two coaxial shafts or other movable machine elements for attachment of a member on a shaft or on a shaft-end with clamping hub; with hub and longitudinal key with radial clamping due to axial loading of at least one pair of conical surfaces
    • F16D1/093—Couplings for rigidly connecting two coaxial shafts or other movable machine elements for attachment of a member on a shaft or on a shaft-end with clamping hub; with hub and longitudinal key with radial clamping due to axial loading of at least one pair of conical surfaces using one or more elastic segmented conical rings forming at least one of the conical surfaces, the rings being expanded or contracted to effect clamping
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting

Definitions

  • the present invention relates to a coupling device for coupling a rotating body such as a polishing head and a dresser to a rotating shaft. Furthermore, the present invention relates to an attachment/detachment device for a rotating body connected to a rotating shaft via this connecting device.
  • a CMP apparatus generally includes a polishing table with a polishing pad attached to its upper surface and a polishing head that holds a substrate such as a wafer.
  • the polishing table and polishing head are rotated around their respective axes, and the polishing head presses the substrate against the polishing surface (upper surface) of the polishing pad, and the polishing liquid is supplied onto the polishing surface while polishing the substrate. Polish the surface.
  • the CMP apparatus is sometimes equipped with a dressing device for regenerating the polishing surface of the polishing pad.
  • Dressing devices generally include a dresser having a dressing surface that contacts a polishing pad. The dressing device removes abrasive liquid and cutting debris accumulated on the polishing surface by pressing the dressing surface against the polishing surface of the polishing pad on the rotating polishing table while rotating the dresser around its axis. , flattening and dressing the polished surface.
  • a polishing head and a dresser are rotating bodies that are connected to a rotating shaft and rotate about their own axis.
  • the polishing head and dresser which are rotating bodies, are components of the polishing device that require maintenance and replacement. In order to perform maintenance or replacement of the rotating body, it is necessary to remove the rotating body from the rotating shaft, and after maintenance or to attach a new rotating body to the rotating shaft.
  • a coupling device for coupling a rotating body to a rotating shaft includes a flange attached to the rotating body and having a coupling shaft, and the rotating body is fastened to the rotating shaft via the coupling shaft.
  • a coupling device is provided, comprising a fastening structure.
  • the fastening structure includes: an insertion hole formed on the rotating shaft into which the connecting shaft is inserted; a collet coaxially disposed in the insertion hole and having a tapered portion at a tip; and the collet. and a nut having a contact surface corresponding to the tapered portion of the rotary shaft and screwed onto the rotating shaft in a state where the connecting shaft is inserted.
  • the fastening structure includes an insertion groove formed in the rotation shaft, a protrusion formed at the tip of the connection shaft and inserted into the insertion groove, and a rotation a nut that is threaded onto the shaft;
  • the connecting shaft has a shoulder portion that supports the tip of the rotating shaft; a lower surface of the shoulder portion is configured as a tapered surface; , a contact surface having a shape corresponding to the tapered surface and in contact with the tapered surface is formed.
  • the fastening structure includes a rod formed at a tip of the connecting shaft, an insertion hole formed on the rotating shaft corresponding to the shape of the rod and into which the rod is inserted, and an insertion hole into which the rod is inserted. a first through hole formed in the rod; a second through hole formed in the rotating shaft corresponding to the first through hole of the rod inserted into the insertion hole; A pin inserted into the second through hole.
  • the rod has a polygonal cross section when viewed in a cross section perpendicular to the longitudinal direction of the connecting shaft.
  • the rotating shaft includes a magnet that attracts the connecting shaft toward the rotating shaft.
  • the fastening structure includes a coupling having a fixed end fixed to a tip of the rotating shaft and a hole at an end opposite to the fixed end into which the connecting shaft is inserted.
  • the coupling includes a slot formed in the hole and extending in the insertion direction of the connecting shaft, a fixing screw that adjusts the size of the gap between the slot, and a screw hole into which the fixing screw is screwed.
  • the fastening structure is arranged between a box fixed to a tip of the rotating shaft, a plurality of engagement protrusions protruding from an outer peripheral surface of the connecting shaft, and the box and the flange.
  • an elastic body that urges the flange away from the box, the bottom wall of the box has a through hole through which the connecting shaft can pass, and is connected to the through hole, and the plurality of The device includes a plurality of through grooves through which each of the engagement protrusions can pass, and an engagement groove formed on the inner surface of the bottom wall and into which the plurality of engagement protrusions can respectively engage.
  • a rotating body attachment/detachment device for attaching/detaching a rotating body to/from a rotating shaft via the above-described fastening structure, comprising: a support base that supports the rotating body; a rotating body moving mechanism for moving with respect to the rotating shaft; an attachment/detachment jig provided with at least three rollers that contact the outer peripheral surface of the nut in order to rotate the nut; and at least one of the three rollers.
  • a rotating body attachment/detachment device is provided that includes a motor that rotates one roller and a jig moving device that moves the attachment/detachment jig forward and backward with respect to the rotating body.
  • a rotating body attachment/detachment device for attaching/detaching a rotating body to/from a rotating shaft via the above-mentioned fastening structure, comprising: a support base that supports the rotating body; and a support base connected to the support base, the connecting shaft
  • a rotating body attachment/detachment device comprising: a rotating body moving mechanism that moves and rotates the rotating body with respect to the rotation axis; and a pin insertion device that inserts the pin into the first through hole and the second through hole.
  • a rotating body attachment/detachment device for attaching/detaching a rotating body to/from a rotating shaft via the above-described fastening structure, comprising: a support base that supports the rotating body; A rotating body attachment/detachment device is provided that includes a rotating body moving mechanism that moves the rotating body with respect to the rotating shaft, and a screw rotating device that rotates the fixing screw.
  • a rotating body attachment/detachment device for attaching/detaching a rotating body to/from a rotating shaft via the above-described fastening structure, comprising: a support base that supports the rotating body; A rotating body attachment/detachment device is provided that includes a rotating body moving mechanism that moves and rotates the rotating body with respect to the rotation axis.
  • the rotating body can be attached to and detached from the rotating shaft with a simple operation of the fastening structure.
  • the rotating body can be easily attached to and detached from the rotating shaft even in a limited space.
  • FIG. 1 is a perspective view schematically showing an example of a polishing apparatus.
  • FIG. 2A is a schematic diagram showing a coupling device according to one embodiment.
  • FIG. 2B is a cross-sectional view taken along line AA in FIG. 2A.
  • FIG. 3A is a schematic diagram of a coupling device according to another embodiment.
  • FIG. 3B is a sectional view taken along line BB in FIG. 3A.
  • FIG. 4 is a schematic diagram showing a modification of the coupling device shown in FIG. 3A.
  • FIG. 5A is a schematic diagram of a coupling device according to yet another embodiment.
  • FIG. 5B is a sectional view taken along line CC in FIG. 5A.
  • FIG. 6A is a schematic diagram of a coupling device according to yet another embodiment.
  • FIG. 6B is a schematic side view of the coupling shown in FIG. 6A.
  • FIG. 7 is a schematic diagram of a coupling device according to yet another embodiment.
  • 8A is a schematic perspective view of the connecting shaft shown in FIG. 7.
  • FIG. 8B is a top view of the bottom wall of the box shown in FIG. 7.
  • FIG. 8C is a bottom view of the bottom wall of the box shown in FIG. 8B.
  • FIG. 9 is a schematic diagram showing a rotating body attachment/detachment device according to one embodiment.
  • FIG. 10 is a top view of the attachment/detachment jig shown in FIG. 9.
  • FIG. 11A is a schematic diagram showing how the dresser is removed from the dresser shaft using the rotating body attachment/detachment device shown in FIG. 10.
  • FIG. 11B is a schematic diagram showing how the dresser is removed from the dresser shaft using the rotating body attachment/detachment device shown in FIG. 10.
  • FIG. 12 is a schematic diagram showing a rotating body attachment/detachment device according to another embodiment.
  • FIG. 13A is a schematic diagram showing how the dresser is removed from the dresser shaft using the rotating body attachment/detachment device shown in FIG. 12.
  • FIG. 13B is a schematic diagram showing how the dresser is removed from the dresser shaft using the rotating body attachment/detachment device shown in FIG. 12.
  • FIG. 14 is a schematic diagram showing how the dresser is attached to the dresser shaft using the rotating body attachment/detachment device shown in FIG. 12.
  • FIG. 15 is a schematic diagram showing a rotating body attachment/detachment device according to still another embodiment.
  • FIG. 16A is a schematic diagram showing how the dresser is removed from the dresser shaft using the rotating body attachment/detachment device shown in FIG. 15.
  • FIG. 16B is a schematic diagram showing how the dresser is removed from the dresser shaft using the rotating body attachment/detachment device shown in FIG. 15.
  • FIG. 17 is a schematic diagram showing a rotating body attachment/detachment device according to still another embodiment.
  • FIG. 18A is a schematic diagram showing how the dresser is removed from the dresser shaft using the rotating body attachment/detachment device shown in FIG. 17.
  • FIG. 18B is a schematic diagram showing how the dresser is removed from the dresser shaft using the rotating body attachment/detachment device shown in FIG. 17.
  • FIG. 1 is a perspective view schematically showing an example of a polishing apparatus.
  • This polishing apparatus 1 includes a polishing table 3 to which a polishing pad 10 having a polishing surface 10a is attached, a wafer W which is an example of a substrate, and a polishing apparatus that presses the wafer W against the polishing pad 10 on the polishing table 3.
  • a dressing device that includes a head 5, a polishing liquid supply nozzle 6 for supplying a polishing liquid or a dressing liquid (for example, pure water) to the polishing pad 10, and a dresser 7 for dressing the polishing surface 10a of the polishing pad 10. It is equipped with 2 and.
  • the polishing table 3 is connected via a table shaft 3a to a table motor 11 disposed below it, and the table motor 11 rotates the polishing table 3 in the direction shown by the arrow.
  • a polishing pad 10 is attached to the upper surface of the polishing table 3, and the upper surface of the polishing pad 10 constitutes a polishing surface 10a on which the wafer W is polished.
  • the polishing head 5 is connected to the lower end of the head shaft 14.
  • the polishing head 5 is configured to be able to hold the wafer W on its lower surface by vacuum suction.
  • the head shaft 14 is configured to move up and down by a vertical movement mechanism (not shown).
  • Polishing of the wafer W is performed as follows.
  • the polishing head 5 and the polishing table 3 are rotated in the directions shown by the arrows, and polishing liquid (slurry) is supplied from the polishing liquid supply nozzle 6 onto the polishing pad 10 .
  • the polishing head 5 presses the wafer W against the polishing surface 10a of the polishing pad 10.
  • the surface of the wafer W is polished by the mechanical action of abrasive grains contained in the polishing liquid and the chemical action of the polishing liquid.
  • the polishing surface 10a is dressed (conditioned) by the dresser 7.
  • the dressing device 2 includes a dresser 7 that slides on the polishing pad 10, a dresser shaft 23 to which the dresser 7 is connected, an air cylinder 24 provided at the upper end of the dresser shaft 23, and a rotatably supported dresser shaft 23.
  • a dresser arm 27 is provided.
  • the lower surface of the dresser 7 constitutes a dressing surface 7a, and this dressing surface 7a is composed of abrasive grains (for example, diamond particles).
  • the air cylinder 24 is placed on a support base 20 supported by a plurality of columns 25, and these columns 25 are fixed to a dresser arm 27.
  • the dresser arm 27 is driven by a motor (not shown) and is configured to pivot around a pivot shaft 28.
  • the dresser shaft 23 is rotated by the drive of a motor (not shown), and the rotation of the dresser shaft 23 causes the dresser 7 to rotate about the dresser shaft 23 in the direction shown by the arrow.
  • the air cylinder 24 functions as an actuator that moves the dresser 7 up and down via the dresser shaft 23 and presses the dresser 7 against the polishing surface (surface) 10a of the polishing pad 10 with a predetermined pressing force.
  • Dressing of the polishing pad 10 is performed as follows. While the dresser 7 rotates around the dresser shaft 23, pure water is supplied onto the polishing pad 10 from the polishing liquid supply nozzle 6. In this state, the dresser 7 is pressed against the polishing pad 10 by the air cylinder 24, and its dressing surface 7a comes into sliding contact with the polishing surface 10a of the polishing pad 10. Further, the dresser arm 27 is rotated about the pivot shaft 28 to swing the dresser 7 in the radial direction of the polishing pad 10. In this way, the polishing pad 10 is scraped off by the dresser 7, and its surface 10a is dressed (regenerated).
  • the head shaft 14 described above is a rotating shaft that is rotatable and movable up and down
  • the polishing head 5 described above is a rotating body that rotates around its axis
  • the dresser shaft 23 described above is a rotary shaft that is rotatable and movable up and down
  • the dresser 7 described above is a rotating body that rotates around its axis.
  • FIG. 2A is a schematic diagram showing a coupling device according to an embodiment
  • FIG. 2B is a cross-sectional view taken along the line AA in FIG. 2A.
  • the rotating body connected to the rotating shaft is the dresser 7 of the dressing device 2.
  • the connecting device 40 includes a flange 45 attached to the dresser 7 and a fastening structure 50 (described later) that connects the dresser 7 to the dresser shaft 23, which is a rotating shaft, via a connecting shaft 45a formed on the flange 45. There is.
  • the dresser 7 is connected to the dresser shaft 23 by a fastening structure 50.
  • the flange 45 has a substantially disk shape, and the lower surface of the flange 45 is fixed to the upper surface of the dresser 7 via a fastener such as a screw (not shown).
  • a connecting shaft 45a is formed in the center of the upper surface of the flange 45 and extends in a direction perpendicular to the radial direction of the dresser 7 (horizontal direction in this embodiment).
  • the fastening structure 50 shown in FIG. 2A includes an insertion hole 51 formed in the dresser shaft 23, a collet 53 disposed coaxially in the insertion hole 51, and a nut 54 screwed into the dresser shaft 23.
  • the collet 53 shown in FIGS. 2A and 2B is composed of a plurality of (three in the illustrated example) divided bodies 53b divided by a plurality of (three in the illustrated example) slots 53a.
  • Each divided body 53b is fixed to the wall surface of the insertion hole 51.
  • a tapered portion 53c that is inclined at a predetermined inclination angle with respect to the longitudinal direction (in this embodiment, the vertical direction) of the collet 53 is formed at the tip of each divided body 53b.
  • a thread (not shown) is formed on the inner peripheral surface of the nut 54, and a thread that can be engaged with the thread of the nut 54 is formed on the outer peripheral surface of the dresser shaft 23. These screws allow the nut 54 to be screwed onto the dresser shaft 23. Furthermore, a through hole into which the connecting shaft 45a of the flange 45 can be inserted is formed in the center of the nut 54, and a contact surface 54a having a shape corresponding to the tapered portion 53c of the collet 53 is formed around the through hole. is formed.
  • the nut 54 is screwed onto the dresser shaft 23 with its contact surface 54a spaced apart from the tapered portion 53c of the collet 53 (not engaged). ing).
  • the connecting shaft 45a of the flange 45 is inserted into the through hole of the nut 54, and the connecting shaft 45a is inserted into the collet fixed to the insertion hole 51 formed in the dresser shaft 23. Insert into 53.
  • the contact surface 54a of the nut 54 comes into contact with the tapered portion 53c of the collet 53.
  • the contact surface 54a of the nut 54 moves the tip of the divided body 53b so that the slot 53a of the collet 53 is compressed.
  • one of the divided bodies 53b of the collet 53 may be provided with a keyway (not shown), and the connecting shaft 45a may be provided with a key (not shown) that engages with the keyway.
  • the key and keyway function to position the dresser 7 with respect to the dresser shaft 23 and to prevent it from rotating.
  • the nut 54 When removing the dresser 7 from the dresser shaft 23, the nut 54 is rotated in the direction in which the engagement between the nut 54 and the dresser shaft 23 is released (for example, counterclockwise), and the coupling shaft 45a and the collet 53 are fastened together. relax. By this operation, the divided body 53b of the collet 53 is moved so that the slot 53a of the collet 53 is expanded, so that the connecting shaft 45a of the flange 45 can be pulled out from the through hole of the dresser shaft 23 and the nut 54.
  • the dresser 7 can be attached to and detached from the dresser shaft 23 by a simple operation of the fastening structure 50. More specifically, the dresser 7 can be attached to and detached from the dresser shaft 23 by simply rotating the nut 54. As a result, the dresser 7 can be easily attached to and detached from the dresser shaft 23 even in a limited space.
  • FIG. 3A is a schematic diagram of a coupling device according to another embodiment
  • FIG. 3B is a sectional view taken along the line BB in FIG. 3A
  • the fastening structure 50 of the coupling device 40 shown in FIG. 3A is formed at the insertion groove 23a formed at the tip of the dresser shaft 23, which is a rotating shaft, and at the tip of the connection shaft 45a of the flange 45, and can be inserted into the insertion groove 23a. It includes a protrusion 56 and a nut 54 that is screwed into (fits into) the dresser shaft 23.
  • the insertion groove 23a formed in the dresser shaft 23 passes through the center of the dresser shaft 23 and extends in a direction perpendicular to the longitudinal direction of the dresser shaft 23 (in this embodiment, in the horizontal direction). and extends straight through the dresser shaft 23.
  • the protrusion 56 formed on the connecting shaft 45a has a shape corresponding to the insertion groove 23a. More specifically, the protrusion 56 has substantially the same shape as the insertion groove 23a. In one embodiment, the length of the protrusion 56 in the direction perpendicular to the longitudinal direction of the dresser shaft 23 may be smaller than the length of the insertion groove 23a.
  • the combination of the insertion groove 23a and the protrusion 56 inserted into the insertion groove 23a can function as a positioning and rotation stopper for the dresser 7 with respect to the dresser shaft 23.
  • the connecting shaft 45a of the flange 45 is formed with a shoulder portion 45b that supports the tip of the dresser shaft 23 in which the insertion groove 23a is formed.
  • the upper surface of the shoulder portion 45b constitutes a support surface that supports the dresser shaft 23.
  • a tapered portion 45c is formed on the lower surface of the shoulder portion 45b.
  • the nut 54 has a through hole formed in the center thereof into which the connecting shaft 45a of the flange 45 can be inserted.
  • a contact surface 54b having a shape corresponding to the tapered portion 45c formed on the lower surface of the shoulder portion 45b is formed around the through hole of the nut 54.
  • the flange 45 has a main body 45d that is detachable from the connecting shaft 45a, and the main body 45d has a substantially disk shape.
  • the connecting shaft 45a is removed from the main body 45d, and then the connecting shaft 45a is inserted into the through hole of the nut 54.
  • the nut 54 is arranged between the shoulder portion 45b of the connecting shaft 45a and the main body 45d of the flange 45.
  • the shoulder portion 45b of the connecting shaft 45a of the flange 45 is sandwiched between the nut 54 and the dresser shaft 23, and the dresser 7 is connected to the dresser shaft 23.
  • the dresser 7 can be attached to and detached from the dresser shaft 23 by simply rotating the nut 54. As a result, the dresser 7 can be easily attached to and detached from the dresser shaft 23 even in a limited space.
  • FIG. 4 is a schematic diagram showing a modification of the coupling device shown in FIG. 3A.
  • the magnitude of the inclination angle (taper angle) of the tapered portion 45c formed on the lower surface of the shoulder portion 45b in the fastening structure 50 shown in FIG. It is smaller than the inclination angle of the portion 45c.
  • the inclination angle is the inclination angle of the tapered portion 45c with respect to the longitudinal direction of the connecting shaft 45a (direction perpendicular to the upper surface of the main body 45d of the flange 45).
  • the dresser 7 connected to the dresser shaft 23 by the fastening structure 50 shown in FIG. 4 can be rotated at a higher speed than the dresser 7 connected to the dresser shaft 23 by the fastening structure 50 shown in FIG. 3.
  • the tightening torque is larger than that required for the nut 54.
  • the contact surface 54a of the nut 54 and the tapered portion 45c of the connecting shaft 45a shown in FIG. 4 require higher processing accuracy than the contact surface 54a of the nut 54 and the tapered portion 45c of the connecting shaft 45a shown in FIG. Ru. Therefore, the magnitude of the inclination angle is determined in consideration of the rotational speed required of the dresser 7, the ease of machining the nut 54 and the connecting shaft 45a, and the like.
  • FIG. 5A is a schematic diagram of a coupling device according to yet another embodiment
  • FIG. 5B is a sectional view taken along the line CC in FIG. 5A
  • the fastening structure 50 of the connecting device 40 shown in FIG. 5A includes a rod 58 formed at the tip of the connecting shaft 45a of the flange 45, and an insert formed at the tip of the dresser shaft 23 corresponding to the shape of the rod 58.
  • a hole 23c is provided.
  • a through hole (first through hole) 58a is formed in the rod 58 and extends in a direction perpendicular to the longitudinal direction of the connecting shaft 45a.
  • a through hole (second through hole) 23b is formed in the dresser shaft 23 and is formed to correspond to the through hole 58a of the rod 58 inserted into the insertion hole 23c.
  • the fastening structure 50 of the coupling device 40 further includes a pin 59 inserted into the through hole 58a of the rod 58 and the through hole 23b of the dresser shaft 23.
  • the rod 58 shown in FIG. 5B has a rectangular cross-sectional shape when viewed in a cross section perpendicular to the longitudinal direction (in this embodiment, the vertical direction) of the connecting shaft 45a.
  • the cross-sectional shape of the rod 58 is arbitrary.
  • the rod 58 may have a circular cross section or a polygonal cross section such as a triangular shape or a pentagonal shape.
  • the rod 58 has a polygonal cross section, the effect of positioning the dresser 7 with respect to the dresser shaft 23 and preventing rotation thereof can be improved.
  • the dresser 7 can be attached to and detached from the dresser shaft 23 by a simple operation such as inserting and pulling out the pins 59 into the through holes 58a of the linearly arranged rods 58 and the through holes 23b of the dresser shaft 23. I can do it. As a result, the dresser 7 can be easily attached to and detached from the dresser shaft 23 even in a limited space.
  • the dresser shaft 23 may have a magnet 29 placed at the tip of the dresser shaft 23.
  • the magnet 29 has, for example, an annular shape.
  • the dresser shaft 23 shown in FIGS. 2A, 3A, and 4 may also include a magnet 29 that is disposed at the tip of the dresser shaft 23 and attracts the connecting shaft 45a of the flange 45.
  • FIG. 6A is a schematic diagram of a coupling device according to yet another embodiment
  • FIG. 6B is a schematic side view of the coupling shown in FIG. 6A.
  • FIG. 6B corresponds to a side view of the coupling 60 seen from the direction of line D in FIG. 6A.
  • the fastening structure 50 of the connecting device 40 shown in FIG. 6A includes a coupling 60 that connects the dresser shaft 23 and the connecting shaft 45a of the flange 45.
  • the coupling 60 shown in FIGS. 6A and 6B has a (first) hole 60c formed at its fixed end 60a, into which the fixed rod 23d formed at the tip of the dresser 23 is inserted, and a fixed end 60a.
  • a (second) hole 60d is formed at the opposite end 60b of the flange 45 and into which the tip of the connecting shaft 45a of the flange 45 is inserted.
  • the fixed end 60a corresponds to the upper end of the coupling 60
  • the end 60b in which the hole 60d is formed corresponds to the lower end of the coupling 60.
  • the coupling 60 has a substantially cylindrical shape. Furthermore, the coupling 60 includes a slot 60e extending in the longitudinal direction (direction perpendicular to the radial direction), two fixing screws 62A, 62B that adjust the gap between the upper and lower parts of the slot 60e, and fixing screws 62A, 62B. 62B has screw holes 63A and 63B into which they are screwed, respectively.
  • the slot 60e shown in FIG. 6B extends from the top surface of the coupling 60 to the bottom surface.
  • the fixed rod 23d of the dresser shaft 23 is inserted into the hole 60c of the coupling 60. In this state, one fixing screw 62A is screwed into one screw hole 63A to reduce the gap between the slots 60e, thereby fixing the fixing rod 23d to the fixed end 60a of the coupling 60.
  • the dresser shaft 23 is fixed to the coupling 60 by a slot 60e formed in the coupling 60 and a fixing screw 62A screwed into the screw hole 63A.
  • a slot 60e formed in the coupling 60 and a fixing screw 62A screwed into the screw hole 63A are fixed to the dresser shaft 23 by a slot 60e formed in the coupling 60 and a fixing screw 62A screwed into the screw hole 63A.
  • Any structure or method can be used to fix the dresser shaft 23 to the fixed end 60a of the coupling 60.
  • the hole 60c formed in the fixed end 60a of the coupling 60 may be formed as a screw hole, and a screw may be formed on the outer peripheral surface of the fixed rod 23d of the dresser shaft 23 to be screwed into the hole 60c. good.
  • the connecting shaft 45a of the flange 45 is inserted into the hole 60d formed in the end 60b of the coupling 60.
  • the fixing screw 62B is rotated (for example, clockwise) and screwed into the screw hole 63B to reduce the gap at the bottom of the slot 60e.
  • the connecting shaft 45a of the flange 45 is connected to the dresser shaft 23 via the coupling 60, and as a result, the dresser 7 is connected to the dresser shaft 23.
  • the dresser 7 can be attached to and detached from the dresser shaft 23 by a simple operation of rotating the fixing screw 62B provided on the coupling 60 of the fastening structure 50. As a result, the dresser 7 can be easily attached to and detached from the dresser shaft 23 even in a limited space.
  • FIG. 7 is a schematic diagram of a coupling device according to yet another embodiment.
  • 8A is a schematic perspective view of the connecting shaft shown in FIG. 7,
  • FIG. 8B is a top view of the bottom wall of the box shown in FIG. 7,
  • FIG. 8C is a top view of the bottom wall of the box shown in FIG. 8B. It is a bottom view.
  • the fastening structure 50 of the connecting device 40 shown in FIG. two) engaging protrusions 67 (see also FIG. 8A), and an elastic body 68 disposed between the box body 65 and (the main body 45d of) the flange 45.
  • the elastic body 68 is a coil spring.
  • the box body 65 has a bottom wall 65a in which a through hole is formed through which the connecting shaft 45a having the engagement protrusion 67 is allowed to pass. More specifically, as shown in FIGS. 8B and 8C, the bottom wall 65a of the box 65 has a through hole 65b through which the connecting shaft 45a can pass, and a plurality of engagement holes connected to the through hole 65b. Through grooves 65c are formed through which the protrusions 67 can pass. Further, on the inner surface of the bottom wall 65a of the box body 65, a plurality of engagement grooves 65d are formed in which the plurality of engagement protrusions 67 can respectively engage.
  • the connecting shaft 45a of the flange 45 is moved toward the box body 65 (in this embodiment, raised) against the restoring force of the elastic body 68, and the flange
  • the tip of the connecting shaft 45a of 45 is inserted into the through hole 65b formed in the bottom wall 65a of the box body 65.
  • the position of the engaging protrusion 67 protruding from the outer peripheral surface of the connecting shaft 45a is aligned with the position of the through groove 65c formed in the bottom wall 65a of the box body 65, so that the engaging protrusion 67
  • the connecting shaft 45a is inserted into the internal space of the box body 65 until it passes through the connecting shaft 65a.
  • the elastic body 68 sandwiched between the box 65 and the flange 45 is contracted.
  • the flange 45 is rotated to align the engagement protrusion 67 with the engagement groove 65d formed on the inner surface of the bottom wall 65a of the box body 65. Furthermore, when the force applied to the flange 45 against the restoring force of the elastic body 68 is released, the flange 45 (and the connecting shaft 45a) moves (in this embodiment, descends), and the engagement protrusion 67 engages. It engages with the matching groove 65d. By this operation, the connecting shaft 45a of the flange 45 is connected to the dresser shaft 23 via the box body 65, and as a result, the dresser 7 is connected to the dresser shaft 23.
  • the elastic body 68 urges the flange 45 away from the box body 65 with a predetermined restoring force.
  • the spring constant of the elastic body 68 is set so that the restoring force (biasing force) that the elastic body 68 applies to the flange 45 is larger than the pressing force with which the dresser 7 is pressed against the polishing pad 10 in the dressing process.
  • the elastic body 68 is a coil spring, but the type of the elastic body 68 is arbitrary as long as it can apply a predetermined biasing force to the flange 45.
  • the elastic body 68 holds the connecting shaft 45a of the flange 45 against the urging force applied to the flange 45 until the engagement protrusion 67 and the engagement groove 65d are disengaged. and move it.
  • the flange 45 is rotated to align the engagement protrusion 67 with the through groove 65c formed in the bottom wall 65a of the box body 65.
  • the flange 45 (and the connecting shaft 45a) moves (in this embodiment, descends), and the engagement protrusion 67 penetrates.
  • the connecting shaft 45a of the flange 45 can be pulled out from the box body 65 by passing through the groove 65c.
  • FIG. 9 is a schematic diagram showing a rotating body attachment/detachment device according to one embodiment.
  • a rotary body attachment/detachment device 70 shown in FIG. 9 is a device for attaching and detaching the dresser 7 to and from the dresser shaft 23 via the coupling device 40 shown in FIG. 2A, FIG. 3A, or FIG. 4.
  • the support stand 71 has a substantially disk shape and is connected to the rotating body movement mechanism 73 via a support arm 72. In this embodiment, the support stand 71 has a diameter smaller than the diameter of the dresser 7.
  • the rotating body moving mechanism 73 has an elevator 80 that can move the support arm 72 up and down.
  • the elevator 80 may be, for example, a piston cylinder device that moves a piston forward and backward relative to a cylinder using fluid pressure, or a ball screw device that has a combination of a ball screw and a motor.
  • the rotating body moving mechanism 73 may further include a horizontal moving device 81 that moves the support arm 72 in the horizontal direction with respect to the dresser shaft 23.
  • the horizontal movement device 81 is, for example, a piston cylinder device that moves the support arm 72 back and forth with respect to the dresser shaft 23, or a linear motion device such as a ball screw device.
  • the horizontal movement device 81 may be a rotation device (eg, a motor) that rotates the support arm 72 in the horizontal direction.
  • the horizontal movement device 81 may be a combination of the above linear motion device and rotation device.
  • FIG. 10 is a top view of the attachment/detachment jig shown in FIG. 9.
  • the attachment/detachment jig 75 shown in FIG. 10 includes at least three rollers 76A, 76B, 76C that can come into contact with the outer peripheral surface of the nut 54, and a holder 77 for rotatably holding the rollers 76A, 76B, 76C. .
  • Each roller 76A, 76B, 76C is made of an elastic material such as rubber, or a combination of a wheel (not shown) and an elastic material such as rubber attached to the outer peripheral surface of the wheel. be done.
  • the holder 77 includes an opening 77a into which the nut 54 is inserted, when viewed in a cross section perpendicular to the rotation axis (not shown) of the rollers 76A, 76B, and 76C.
  • the width of the opening 77a is larger than the outer diameter of the nut 54, and the distance between the opposing rollers 77B and 77C is slightly smaller than the outer diameter of the nut 54.
  • the rotating body attachment/detachment device 70 further includes a motor 78 that rotates one roller 76A among at least three rollers 76A, 76B, and 76C.
  • the motor 78 is attached to a wall 77b facing the opening 77a, and rotates one roller 76A rotatably attached to the wall 77b.
  • the rotational torque transmitted from the motor 78 to the roller 76A is transmitted to the remaining rollers 76B and 76C via rotation transmission parts such as pulleys, belts, and/or gears (not shown).
  • the rollers 76A, 76B, and 76C can be rotated synchronously.
  • the remaining rollers 76B, 76C may be configured as judo rollers co-rotating with the nut 54, which is rotated by rotation of the roller 76A.
  • the rotating body attachment/detachment device 70 further includes a jig moving device 83 that moves the attachment/detachment jig 75 forward and backward relative to the nut 54.
  • the jig moving device 83 is connected to the attachment/detachment jig 75 via a jig arm 85.
  • the rotating body attachment/detachment device 70 is provided outside the polishing apparatus 1 (see FIG. 1) and is configured to access the dresser 7 from the outside of the polishing apparatus 1.
  • the rotating body attachment/detachment device 70 may be provided inside the polishing device 1.
  • the rotating body attachment/detachment device may be configured to be able to access the dresser 7 spaced apart from the polishing pad 10 at the upper part of the polishing pad 10 (see FIG. 1), or may be configured to be provided on the side of the polishing pad 10.
  • the dresser 7 may be configured to be accessible when the dresser 7 has been moved to the retracted position.
  • FIGS. 11A and 11B are schematic diagrams showing how the dresser is removed from the dresser shaft using the rotating body attachment/detachment device shown in FIG. 10.
  • the elevator 80 and the horizontal moving device 81 of the rotating body moving mechanism 73 are operated to support the dresser 7 on the support base 71.
  • the jig moving device 83 is operated to move the attachment/detachment jig 75 toward the nut 54 and bring the nut 54 into contact with the roller 76A.
  • the motor 78 is driven to rotate the rollers 76A, 76B, and 76C, and the nut 54 and the dresser shaft 23 are disengaged from each other.
  • the elevator 80 is operated to move the support base 71 together with the dresser 7, and the connecting shaft 45a of the flange 45 attached to the dresser 7 is pulled out from the dresser shaft 23.
  • These operations allow the dresser 7, which is a rotating body, to be removed from the dresser shaft 23, which is a rotating shaft.
  • the dresser 7 When attaching the dresser 7 to the dresser shaft 23, the dresser 7 is supported by the support base 71, and in this state, the connecting shaft 45a of the flange 45 attached to the dresser 7 is inserted into the dresser shaft 23. Next, the motor 78 is driven to rotate the rollers 76A, 76B, and 76C, and the nut 54 is tightened to the dresser shaft 23 until the tightening torque between the nut 54 and the dresser shaft 23 reaches a predetermined value. These operations allow the dresser 7, which is a rotating body, to be attached to the dresser shaft 23, which is a rotating shaft.
  • FIG. 12 is a schematic diagram showing a rotating body attachment/detachment device according to another embodiment.
  • a rotating body attachment/detachment device 70 shown in FIG. 12 is a device for attaching and detaching the dresser 7 to and from the dresser shaft 23 via the coupling device 40 shown in FIG. 5A.
  • the rotary body attaching/detaching device 70 shown in FIG. 12 includes a support base 71 that supports the dresser 7 which is a rotary body, a rotary body moving mechanism 73 connected to the support base 71, and a pin 59 of the fastening structure 50 of the coupling device 40.
  • the dresser shaft 23 is provided with a pin insertion device 86 for advancing and retracting the through holes 58a of the linearly arranged rods 58 and the through holes 23b of the dresser shaft 23.
  • the pin insertion device 86 includes a pair of gripping arms 90 that can grip the pin 59, a pin insertion bar 87, a motor 88 that rotates the pin insertion bar 87, and a motor 88 that moves the pin insertion bar 87 forward and backward.
  • a pin moving device 89 is provided.
  • a screw hole is formed at one end of the pin 59, and a screw that can be screwed into the screw hole formed in the pin 59 is formed at the tip of the pin insertion bar 87.
  • the pin moving device 89 may be a piston cylinder device that moves a piston forward and backward relative to a cylinder using fluid pressure, or a ball screw device that has a combination of a ball screw and a motor.
  • FIG. 13A and 13B are schematic diagrams showing how the dresser is removed from the dresser shaft using the rotating body attachment/detachment device shown in FIG. 12.
  • the elevator 80 and the horizontal moving device 81 of the rotating body moving mechanism 73 are operated to support the dresser 7 on the support base 71.
  • the pin moving device 89 of the pin insertion device 86 is operated to bring the pin insertion bar 87 into contact with the end of the pin 59 , and the motor 88 is further rotated to bring the end of the pin insertion bar 87 into contact with the end of the pin 59 . Screw the tip.
  • the pin moving device 89 of the pin insertion device 86 is operated to pull out the pins 59 from the through holes 58a of the linearly arranged rods 58 and the through holes 23b of the dresser shaft 23.
  • the pin 59 is gripped by a pair of gripping arms 90.
  • the elevator 80 is operated to move the support base 71 together with the dresser 7, and the connecting shaft 45a of the flange 45 attached to the dresser 7 is pulled out from the dresser shaft 23.
  • the dresser 7 When attaching the dresser 7 to the dresser shaft 23, the dresser 7 is supported by the support base 71, and in this state, the rod 58 formed at the tip of the connecting shaft 45a of the flange 45 is inserted into the dresser shaft 23.
  • the pin moving device 89 of the pin insertion device 86 is operated to insert the pins 59 into the through holes 58a of the linearly arranged rods 58 and the through holes 23b of the dresser shaft 23.
  • the elevator 80 is operated to separate the support base 71 from the dresser 7.
  • the weight of the dresser 7 and the flange 45 prevents the pin 59 inserted into the through hole 58a of the rod 58 and the through hole 23b of the dresser shaft 23 from rotating.
  • the motor 88 is rotated to release the engagement between the end of the pin 59 and the tip of the pin insertion bar 87.
  • the pin moving device 89 of the pin insertion device 86 is operated to retract the pin insertion bar 87 from the pin 59.
  • FIG. 15 is a schematic diagram showing a rotating body attachment/detachment device according to still another embodiment.
  • a rotating body attachment/detachment device 70 shown in FIG. 15 is a device for attaching/detaching the dresser 7 to/from the dresser shaft 23 via the coupling device 40 shown in FIG. 6A.
  • the rotating body attaching/detaching device 70 shown in FIG. 15 includes a support base 71 that supports the dresser 7 which is a rotating body, a rotary body moving mechanism 73 connected to the support base 71, and a fixing screw of the fastening structure 50 of the coupling device 40. 62B (see FIG. 6A).
  • the screw rotating device 93 includes a driver (torque driver) 94 that can engage with the head of the fixing screw 62B, a motor 96 that rotates the driver 94, and a driver moving device 95 that moves the driver 94 forward and backward.
  • the driver moving device 95 may be a piston cylinder device that moves a piston forward and backward with respect to a cylinder using fluid pressure, or may be a ball screw device that has a combination of a ball screw and a motor.
  • FIG. 16A and 16B are schematic diagrams showing how the dresser is removed from the dresser shaft using the rotating body attachment/detachment device shown in FIG. 15.
  • the elevator 80 and the horizontal moving device 81 of the rotating body moving mechanism 73 are operated to support the dresser 7 on the support base 71.
  • the driver moving device 95 of the screw rotating device 93 is operated to engage the driver 94 with the head of the fixing screw 62B, and the motor 88 is further rotated to rotate the driver 94.
  • This operation loosens the engagement between the fixing screw 62B and the screw hole 63B, and increases the gap between the slots 60e (see FIG. 6B).
  • the connecting shaft 45a of the flange 45 can be pulled out from the coupling 60, so the dresser 7, which is a rotating body, can be removed from the dresser shaft 23, which is a rotating shaft.
  • the dresser 7 When attaching the dresser 7 to the dresser shaft 23, the dresser 7 is supported by the support base 71, and in this state, the connecting shaft 45a of the flange 45 is inserted into the coupling 60 to which the tip of the dresser shaft 23 is fixed.
  • the driver moving device 95 of the screw rotating device 93 is operated to engage the driver 94 with the head of the fixing screw 62B, and the motor 88 is further rotated to rotate the driver 94, thereby moving the fixing screw 62B. Screw it into the screw hole 63B.
  • the gap between the slots 60e see FIG. 6B
  • the connecting shaft 45a is held by the coupling 60.
  • the dresser 7, which is a rotating body can be attached to the dresser shaft 23, which is a rotating shaft.
  • FIG. 17 is a schematic diagram showing a rotating body attachment/detachment device according to still another embodiment.
  • a rotating body attachment/detachment device 70 shown in FIG. 17 is a device for attaching and detaching the dresser 7 to and from the dresser shaft 23 via the connection device 40 shown in FIG. 7(a).
  • the rotary body attachment/detachment device 70 shown in FIG. 17 includes a support base 71 that supports the dresser 7, which is a rotary body, and a rotary body moving mechanism 73 connected to the support base 71.
  • the rotating body moving mechanism 73 shown in FIG. 17 includes not only an elevator 80 that can move the support arm 72 up and down, but also a rotation device (for example, a motor) 98 that rotates the support base 71. Therefore, this rotating body moving mechanism 73 can not only move up and down the dresser 7 supported by the support base 71 and the flange 45 attached to the dresser 7, but also rotate it.
  • a rotation device for example, a motor
  • FIG. 18A and 18B are schematic diagrams showing how the dresser is removed from the dresser shaft using the rotating body attachment/detachment device shown in FIG. 17.
  • the elevator 80 of the rotating body moving mechanism 73 is operated to support the dresser 7 on the support base 71.
  • the rotating device 98 of the rotating body moving mechanism 73 is operated to move the support base until the engaging protrusion 67 formed on the outer peripheral surface of the connecting shaft 45a of the flange 45 is positioned above the through groove 65c of the box body 65.
  • Rotate 71 Next, the elevator 80 of the rotating body moving mechanism 73 is operated to pull out the connecting shaft 45a of the flange 45 from the box body 65.
  • a certain polishing head 5 may be connected to a head shaft 14 that is a rotating shaft.
  • the present invention can be used in a coupling device for coupling rotating bodies such as polishing heads and dressers to rotating shafts. Furthermore, the present invention can be used in an attachment/detachment device for a rotating body connected to a rotating shaft via this connecting device.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
  • Automatic Tool Replacement In Machine Tools (AREA)
  • Gripping On Spindles (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)

Abstract

La présente invention concerne un dispositif d'accouplement pour accoupler un corps rotatif tel qu'un touret à polir et un outil de dressage à un arbre rotatif. La présente invention concerne en outre un dispositif pour fixer et détacher le corps rotatif accouplé à l'arbre rotatif par l'intermédiaire de ce dispositif d'accouplement. Un dispositif d'accouplement (40) est utilisé pour accoupler un corps rotatif (7) à un arbre rotatif (23). Le dispositif d'accouplement (40) comprend : une bride (45) qui est fixée au corps rotatif (7) et comporte un arbre d'accouplement (45a) ; et une structure de fixation (50) qui fixe le corps rotatif (7) à l'arbre rotatif (23) par l'intermédiaire de l'arbre d'accouplement (45a).
PCT/JP2023/003219 2022-03-24 2023-02-01 Dispositif d'accouplement pour accoupler un corps rotatif à un arbre rotatif, et dispositif pour fixer et détacher un corps rotatif WO2023181651A1 (fr)

Applications Claiming Priority (2)

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JP2022-048535 2022-03-24
JP2022048535A JP2023141940A (ja) 2022-03-24 2022-03-24 回転体を回転軸に連結するための連結装置、および回転体の着脱装置

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WO2023181651A1 true WO2023181651A1 (fr) 2023-09-28

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JP2020069591A (ja) * 2018-10-31 2020-05-07 トーヨーエイテック株式会社 加工装置
CN212287050U (zh) * 2020-04-02 2021-01-05 沈阳赫迪电力设备有限公司 一种法兰用打磨固定夹持装置
WO2021220753A1 (fr) * 2020-05-01 2021-11-04 東京エレクトロン株式会社 Dispositif et procédé d'échange
JP2022020099A (ja) * 2020-07-20 2022-02-01 株式会社日研工作所 テーパコレット

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JPS5010216Y1 (fr) * 1969-12-25 1975-03-31
JPS52152935U (fr) * 1976-05-17 1977-11-19
JPS59110428U (ja) * 1983-01-17 1984-07-25 三菱電機株式会社 カツプリング
JPH0332525U (fr) * 1989-08-03 1991-03-29
JP2001347451A (ja) * 2000-06-07 2001-12-18 Speedfam Co Ltd 研磨装置
JP2002021870A (ja) * 2000-07-07 2002-01-23 Daishowa Seiki Co Ltd 締付ナット
JP2002192409A (ja) * 2000-12-25 2002-07-10 Kawabe Kogyo Kk 工具の保持構造
JP2004019925A (ja) * 2002-06-20 2004-01-22 Nsk Ltd 軸継手
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JP2014014883A (ja) * 2012-07-06 2014-01-30 Toshiba Mach Co Ltd スピンドル装置、これを備えた工作機械および工具ホルダ
JP2016121673A (ja) * 2014-10-09 2016-07-07 株式会社荏原製作所 ターボ形ポンプ
JP2018161939A (ja) * 2017-03-24 2018-10-18 株式会社クボタ 作業車
JP2020019115A (ja) * 2018-08-02 2020-02-06 株式会社荏原製作所 基板を保持するためのトップリングおよび基板処理装置
JP2020069591A (ja) * 2018-10-31 2020-05-07 トーヨーエイテック株式会社 加工装置
CN212287050U (zh) * 2020-04-02 2021-01-05 沈阳赫迪电力设备有限公司 一种法兰用打磨固定夹持装置
WO2021220753A1 (fr) * 2020-05-01 2021-11-04 東京エレクトロン株式会社 Dispositif et procédé d'échange
JP2022020099A (ja) * 2020-07-20 2022-02-01 株式会社日研工作所 テーパコレット

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