WO2023181651A1

WO2023181651A1 - Coupling device for coupling rotating body to rotating shaft, and device for attaching and detaching rotating body

Info

Publication number: WO2023181651A1
Application number: PCT/JP2023/003219
Authority: WO
Inventors: 伴伊東; 哲也寺田
Original assignee: 株式会社荏原製作所
Priority date: 2022-03-24
Filing date: 2023-02-01
Publication date: 2023-09-28
Also published as: JP2023141940A; TW202346027A

Abstract

The present invention relates to a coupling device for coupling a rotating body such as such as a polishing head and dresser to a rotating shaft. The present invention further relates to a device for attaching and detaching the rotating body coupled to the rotating shaft via this coupling device. A coupling device (40) is used to couple a rotating body (7) to a rotating shaft (23). The coupling device (40) comprises: a flange (45) which is attached to the rotating body (7) and has a coupling shaft (45a); and a fastening structure (50) which fastens the rotating body (7) to the rotating shaft (23) via the coupling shaft (45a).

Description

A connecting device for connecting a rotating body to a rotating shaft, and a device for attaching and detaching a rotating body

The present invention relates to a coupling device for coupling a rotating body such as a polishing head and a dresser to a rotating shaft. Furthermore, the present invention relates to an attachment/detachment device for a rotating body connected to a rotating shaft via this connecting device.

In recent years, with the increasing integration and density of semiconductor devices, circuit wiring has become increasingly finer and the number of layers in multilayer wiring has also increased. In order to achieve multilayer wiring while miniaturizing circuits, it is necessary to planarize the surface of semiconductor devices. This planarization process is performed by, for example, a CMP apparatus using chemical mechanical polishing.

A CMP apparatus generally includes a polishing table with a polishing pad attached to its upper surface and a polishing head that holds a substrate such as a wafer. In a CMP device, the polishing table and polishing head are rotated around their respective axes, and the polishing head presses the substrate against the polishing surface (upper surface) of the polishing pad, and the polishing liquid is supplied onto the polishing surface while polishing the substrate. Polish the surface.

When a substrate is polished, abrasive grains and polishing debris accumulate on the polishing surface of the polishing pad, and the characteristics of the polishing pad change, resulting in deterioration of polishing performance. Therefore, the CMP apparatus is sometimes equipped with a dressing device for regenerating the polishing surface of the polishing pad. Dressing devices generally include a dresser having a dressing surface that contacts a polishing pad. The dressing device removes abrasive liquid and cutting debris accumulated on the polishing surface by pressing the dressing surface against the polishing surface of the polishing pad on the rotating polishing table while rotating the dresser around its axis. , flattening and dressing the polished surface.

In a CMP apparatus, a polishing head and a dresser are rotating bodies that are connected to a rotating shaft and rotate about their own axis.

Japanese Patent Application Publication No. 2010-172996 Japanese Patent Application Publication No. 2020-19081

The polishing head and dresser, which are rotating bodies, are components of the polishing device that require maintenance and replacement. In order to perform maintenance or replacement of the rotating body, it is necessary to remove the rotating body from the rotating shaft, and after maintenance or to attach a new rotating body to the rotating shaft.

However, conventional coupling devices that attach a rotating body to a rotating shaft have a complicated structure that requires the attachment and detachment of a large number of screws. Furthermore, in the current situation where a reduction in the footprint of a polishing apparatus is required, it is difficult to provide sufficient space for a worker to attach and detach the rotating body near the rotating body.

Therefore, an object of the present invention is to provide a coupling device that allows a rotating body to be easily attached to and detached from a rotating shaft. Another object of the present invention is to provide a rotating body attachment/detachment device for automatically attaching/detaching a rotating body connected to a rotating shaft via such a coupling device to/from the rotating shaft.

In one aspect, a coupling device for coupling a rotating body to a rotating shaft includes a flange attached to the rotating body and having a coupling shaft, and the rotating body is fastened to the rotating shaft via the coupling shaft. A coupling device is provided, comprising a fastening structure.

In one aspect, the fastening structure includes: an insertion hole formed on the rotating shaft into which the connecting shaft is inserted; a collet coaxially disposed in the insertion hole and having a tapered portion at a tip; and the collet. and a nut having a contact surface corresponding to the tapered portion of the rotary shaft and screwed onto the rotating shaft in a state where the connecting shaft is inserted.
In one aspect, the fastening structure includes an insertion groove formed in the rotation shaft, a protrusion formed at the tip of the connection shaft and inserted into the insertion groove, and a rotation a nut that is threaded onto the shaft; the connecting shaft has a shoulder portion that supports the tip of the rotating shaft; a lower surface of the shoulder portion is configured as a tapered surface; , a contact surface having a shape corresponding to the tapered surface and in contact with the tapered surface is formed.
In one aspect, the fastening structure includes a rod formed at a tip of the connecting shaft, an insertion hole formed on the rotating shaft corresponding to the shape of the rod and into which the rod is inserted, and an insertion hole into which the rod is inserted. a first through hole formed in the rod; a second through hole formed in the rotating shaft corresponding to the first through hole of the rod inserted into the insertion hole; A pin inserted into the second through hole.

In one aspect, the rod has a polygonal cross section when viewed in a cross section perpendicular to the longitudinal direction of the connecting shaft.
In one aspect, the rotating shaft includes a magnet that attracts the connecting shaft toward the rotating shaft.

In one aspect, the fastening structure includes a coupling having a fixed end fixed to a tip of the rotating shaft and a hole at an end opposite to the fixed end into which the connecting shaft is inserted. , the coupling includes a slot formed in the hole and extending in the insertion direction of the connecting shaft, a fixing screw that adjusts the size of the gap between the slot, and a screw hole into which the fixing screw is screwed. , has.
In one aspect, the fastening structure is arranged between a box fixed to a tip of the rotating shaft, a plurality of engagement protrusions protruding from an outer peripheral surface of the connecting shaft, and the box and the flange. , an elastic body that urges the flange away from the box, the bottom wall of the box has a through hole through which the connecting shaft can pass, and is connected to the through hole, and the plurality of The device includes a plurality of through grooves through which each of the engagement protrusions can pass, and an engagement groove formed on the inner surface of the bottom wall and into which the plurality of engagement protrusions can respectively engage.

In one aspect, there is provided a rotating body attachment/detachment device for attaching/detaching a rotating body to/from a rotating shaft via the above-described fastening structure, comprising: a support base that supports the rotating body; a rotating body moving mechanism for moving with respect to the rotating shaft; an attachment/detachment jig provided with at least three rollers that contact the outer peripheral surface of the nut in order to rotate the nut; and at least one of the three rollers. A rotating body attachment/detachment device is provided that includes a motor that rotates one roller and a jig moving device that moves the attachment/detachment jig forward and backward with respect to the rotating body.

In one aspect, there is provided a rotating body attachment/detachment device for attaching/detaching a rotating body to/from a rotating shaft via the above-mentioned fastening structure, comprising: a support base that supports the rotating body; and a support base connected to the support base, the connecting shaft A rotating body attachment/detachment device is provided, comprising: a rotating body moving mechanism that moves and rotates the rotating body with respect to the rotation axis; and a pin insertion device that inserts the pin into the first through hole and the second through hole. Ru.

In one aspect, there is provided a rotating body attachment/detachment device for attaching/detaching a rotating body to/from a rotating shaft via the above-described fastening structure, comprising: a support base that supports the rotating body; A rotating body attachment/detachment device is provided that includes a rotating body moving mechanism that moves the rotating body with respect to the rotating shaft, and a screw rotating device that rotates the fixing screw.

In one aspect, there is provided a rotating body attachment/detachment device for attaching/detaching a rotating body to/from a rotating shaft via the above-described fastening structure, comprising: a support base that supports the rotating body; A rotating body attachment/detachment device is provided that includes a rotating body moving mechanism that moves and rotates the rotating body with respect to the rotation axis.

According to the present invention, the rotating body can be attached to and detached from the rotating shaft with a simple operation of the fastening structure. As a result, the rotating body can be easily attached to and detached from the rotating shaft even in a limited space.

FIG. 1 is a perspective view schematically showing an example of a polishing apparatus. FIG. 2A is a schematic diagram showing a coupling device according to one embodiment. FIG. 2B is a cross-sectional view taken along line AA in FIG. 2A. FIG. 3A is a schematic diagram of a coupling device according to another embodiment. FIG. 3B is a sectional view taken along line BB in FIG. 3A. FIG. 4 is a schematic diagram showing a modification of the coupling device shown in FIG. 3A. FIG. 5A is a schematic diagram of a coupling device according to yet another embodiment. FIG. 5B is a sectional view taken along line CC in FIG. 5A. FIG. 6A is a schematic diagram of a coupling device according to yet another embodiment. FIG. 6B is a schematic side view of the coupling shown in FIG. 6A. FIG. 7 is a schematic diagram of a coupling device according to yet another embodiment. 8A is a schematic perspective view of the connecting shaft shown in FIG. 7. FIG. 8B is a top view of the bottom wall of the box shown in FIG. 7. FIG. FIG. 8C is a bottom view of the bottom wall of the box shown in FIG. 8B. FIG. 9 is a schematic diagram showing a rotating body attachment/detachment device according to one embodiment. FIG. 10 is a top view of the attachment/detachment jig shown in FIG. 9. FIG. 11A is a schematic diagram showing how the dresser is removed from the dresser shaft using the rotating body attachment/detachment device shown in FIG. 10. FIG. 11B is a schematic diagram showing how the dresser is removed from the dresser shaft using the rotating body attachment/detachment device shown in FIG. 10. FIG. 12 is a schematic diagram showing a rotating body attachment/detachment device according to another embodiment. FIG. 13A is a schematic diagram showing how the dresser is removed from the dresser shaft using the rotating body attachment/detachment device shown in FIG. 12. FIG. 13B is a schematic diagram showing how the dresser is removed from the dresser shaft using the rotating body attachment/detachment device shown in FIG. 12. FIG. 14 is a schematic diagram showing how the dresser is attached to the dresser shaft using the rotating body attachment/detachment device shown in FIG. 12. FIG. 15 is a schematic diagram showing a rotating body attachment/detachment device according to still another embodiment. FIG. 16A is a schematic diagram showing how the dresser is removed from the dresser shaft using the rotating body attachment/detachment device shown in FIG. 15. FIG. 16B is a schematic diagram showing how the dresser is removed from the dresser shaft using the rotating body attachment/detachment device shown in FIG. 15. FIG. 17 is a schematic diagram showing a rotating body attachment/detachment device according to still another embodiment. FIG. 18A is a schematic diagram showing how the dresser is removed from the dresser shaft using the rotating body attachment/detachment device shown in FIG. 17. FIG. 18B is a schematic diagram showing how the dresser is removed from the dresser shaft using the rotating body attachment/detachment device shown in FIG. 17.

Embodiments of the present invention will be described below with reference to the drawings.
FIG. 1 is a perspective view schematically showing an example of a polishing apparatus. This polishing apparatus 1 includes a polishing table 3 to which a polishing pad 10 having a polishing surface 10a is attached, a wafer W which is an example of a substrate, and a polishing apparatus that presses the wafer W against the polishing pad 10 on the polishing table 3. A dressing device that includes a head 5, a polishing liquid supply nozzle 6 for supplying a polishing liquid or a dressing liquid (for example, pure water) to the polishing pad 10, and a dresser 7 for dressing the polishing surface 10a of the polishing pad 10. It is equipped with 2 and.

The polishing table 3 is connected via a table shaft 3a to a table motor 11 disposed below it, and the table motor 11 rotates the polishing table 3 in the direction shown by the arrow. A polishing pad 10 is attached to the upper surface of the polishing table 3, and the upper surface of the polishing pad 10 constitutes a polishing surface 10a on which the wafer W is polished. The polishing head 5 is connected to the lower end of the head shaft 14. The polishing head 5 is configured to be able to hold the wafer W on its lower surface by vacuum suction. The head shaft 14 is configured to move up and down by a vertical movement mechanism (not shown).

Polishing of the wafer W is performed as follows. The polishing head 5 and the polishing table 3 are rotated in the directions shown by the arrows, and polishing liquid (slurry) is supplied from the polishing liquid supply nozzle 6 onto the polishing pad 10 . In this state, the polishing head 5 presses the wafer W against the polishing surface 10a of the polishing pad 10. The surface of the wafer W is polished by the mechanical action of abrasive grains contained in the polishing liquid and the chemical action of the polishing liquid. After polishing is completed, the polishing surface 10a is dressed (conditioned) by the dresser 7.

The dressing device 2 includes a dresser 7 that slides on the polishing pad 10, a dresser shaft 23 to which the dresser 7 is connected, an air cylinder 24 provided at the upper end of the dresser shaft 23, and a rotatably supported dresser shaft 23. A dresser arm 27 is provided. The lower surface of the dresser 7 constitutes a dressing surface 7a, and this dressing surface 7a is composed of abrasive grains (for example, diamond particles). The air cylinder 24 is placed on a support base 20 supported by a plurality of columns 25, and these columns 25 are fixed to a dresser arm 27.

The dresser arm 27 is driven by a motor (not shown) and is configured to pivot around a pivot shaft 28. The dresser shaft 23 is rotated by the drive of a motor (not shown), and the rotation of the dresser shaft 23 causes the dresser 7 to rotate about the dresser shaft 23 in the direction shown by the arrow. The air cylinder 24 functions as an actuator that moves the dresser 7 up and down via the dresser shaft 23 and presses the dresser 7 against the polishing surface (surface) 10a of the polishing pad 10 with a predetermined pressing force.

Dressing of the polishing pad 10 is performed as follows. While the dresser 7 rotates around the dresser shaft 23, pure water is supplied onto the polishing pad 10 from the polishing liquid supply nozzle 6. In this state, the dresser 7 is pressed against the polishing pad 10 by the air cylinder 24, and its dressing surface 7a comes into sliding contact with the polishing surface 10a of the polishing pad 10. Further, the dresser arm 27 is rotated about the pivot shaft 28 to swing the dresser 7 in the radial direction of the polishing pad 10. In this way, the polishing pad 10 is scraped off by the dresser 7, and its surface 10a is dressed (regenerated).

The head shaft 14 described above is a rotating shaft that is rotatable and movable up and down, and the polishing head 5 described above is a rotating body that rotates around its axis. Similarly, the dresser shaft 23 described above is a rotary shaft that is rotatable and movable up and down, and the dresser 7 described above is a rotating body that rotates around its axis. These

rotating bodies

5 and 7 are connected to rotating

shafts

14 and 23, respectively, by a connecting device described below.

FIG. 2A is a schematic diagram showing a coupling device according to an embodiment, and FIG. 2B is a cross-sectional view taken along the line AA in FIG. 2A. In the connecting device 40 shown in FIGS. 2A and 2B, the rotating body connected to the rotating shaft is the dresser 7 of the dressing device 2.

The connecting device 40 includes a flange 45 attached to the dresser 7 and a fastening structure 50 (described later) that connects the dresser 7 to the dresser shaft 23, which is a rotating shaft, via a connecting shaft 45a formed on the flange 45. There is. The dresser 7 is connected to the dresser shaft 23 by a fastening structure 50.

In this embodiment, the flange 45 has a substantially disk shape, and the lower surface of the flange 45 is fixed to the upper surface of the dresser 7 via a fastener such as a screw (not shown). A connecting shaft 45a is formed in the center of the upper surface of the flange 45 and extends in a direction perpendicular to the radial direction of the dresser 7 (horizontal direction in this embodiment).

The fastening structure 50 shown in FIG. 2A includes an insertion hole 51 formed in the dresser shaft 23, a collet 53 disposed coaxially in the insertion hole 51, and a nut 54 screwed into the dresser shaft 23.

The collet 53 shown in FIGS. 2A and 2B is composed of a plurality of (three in the illustrated example) divided bodies 53b divided by a plurality of (three in the illustrated example) slots 53a. Each divided body 53b is fixed to the wall surface of the insertion hole 51. Furthermore, a tapered portion 53c that is inclined at a predetermined inclination angle with respect to the longitudinal direction (in this embodiment, the vertical direction) of the collet 53 is formed at the tip of each divided body 53b.

A thread (not shown) is formed on the inner peripheral surface of the nut 54, and a thread that can be engaged with the thread of the nut 54 is formed on the outer peripheral surface of the dresser shaft 23. These screws allow the nut 54 to be screwed onto the dresser shaft 23. Furthermore, a through hole into which the connecting shaft 45a of the flange 45 can be inserted is formed in the center of the nut 54, and a contact surface 54a having a shape corresponding to the tapered portion 53c of the collet 53 is formed around the through hole. is formed. Although not shown, before the dresser 7 is connected to the dresser shaft 23, the nut 54 is screwed onto the dresser shaft 23 with its contact surface 54a spaced apart from the tapered portion 53c of the collet 53 (not engaged). ing).

When connecting the dresser 7 to the dresser shaft 23, the connecting shaft 45a of the flange 45 is inserted into the through hole of the nut 54, and the connecting shaft 45a is inserted into the collet fixed to the insertion hole 51 formed in the dresser shaft 23. Insert into 53. Next, when the nut 54 is rotated (eg, clockwise) and screwed onto the dresser shaft 23, the contact surface 54a of the nut 54 comes into contact with the tapered portion 53c of the collet 53. Further, as the nut 54 is screwed onto the dresser shaft 23, the contact surface 54a of the nut 54 moves the tip of the divided body 53b so that the slot 53a of the collet 53 is compressed. That is, as the nut 54 is screwed into the dresser shaft 23, the diameter of the tip of the collet 53 is reduced. By this operation, the connecting shaft 45a of the flange 45 is gripped by the collet 53, and the dresser 7 is connected to the dresser shaft 23.

By managing the tightening torque of the nut 54 screwed onto the dresser shaft 23, the fastening force of the dresser 7 to the dresser shaft 23 can be managed. In one embodiment, one of the divided bodies 53b of the collet 53 may be provided with a keyway (not shown), and the connecting shaft 45a may be provided with a key (not shown) that engages with the keyway. The key and keyway function to position the dresser 7 with respect to the dresser shaft 23 and to prevent it from rotating.

When removing the dresser 7 from the dresser shaft 23, the nut 54 is rotated in the direction in which the engagement between the nut 54 and the dresser shaft 23 is released (for example, counterclockwise), and the coupling shaft 45a and the collet 53 are fastened together. relax. By this operation, the divided body 53b of the collet 53 is moved so that the slot 53a of the collet 53 is expanded, so that the connecting shaft 45a of the flange 45 can be pulled out from the through hole of the dresser shaft 23 and the nut 54.

As described above, according to the coupling device 40 according to the present embodiment, the dresser 7 can be attached to and detached from the dresser shaft 23 by a simple operation of the fastening structure 50. More specifically, the dresser 7 can be attached to and detached from the dresser shaft 23 by simply rotating the nut 54. As a result, the dresser 7 can be easily attached to and detached from the dresser shaft 23 even in a limited space.

FIG. 3A is a schematic diagram of a coupling device according to another embodiment, and FIG. 3B is a sectional view taken along the line BB in FIG. 3A. The fastening structure 50 of the coupling device 40 shown in FIG. 3A is formed at the insertion groove 23a formed at the tip of the dresser shaft 23, which is a rotating shaft, and at the tip of the connection shaft 45a of the flange 45, and can be inserted into the insertion groove 23a. It includes a protrusion 56 and a nut 54 that is screwed into (fits into) the dresser shaft 23.

In this embodiment, the insertion groove 23a formed in the dresser shaft 23 passes through the center of the dresser shaft 23 and extends in a direction perpendicular to the longitudinal direction of the dresser shaft 23 (in this embodiment, in the horizontal direction). and extends straight through the dresser shaft 23. The protrusion 56 formed on the connecting shaft 45a has a shape corresponding to the insertion groove 23a. More specifically, the protrusion 56 has substantially the same shape as the insertion groove 23a. In one embodiment, the length of the protrusion 56 in the direction perpendicular to the longitudinal direction of the dresser shaft 23 may be smaller than the length of the insertion groove 23a. The combination of the insertion groove 23a and the protrusion 56 inserted into the insertion groove 23a can function as a positioning and rotation stopper for the dresser 7 with respect to the dresser shaft 23.

The connecting shaft 45a of the flange 45 is formed with a shoulder portion 45b that supports the tip of the dresser shaft 23 in which the insertion groove 23a is formed. The upper surface of the shoulder portion 45b constitutes a support surface that supports the dresser shaft 23. A tapered portion 45c is formed on the lower surface of the shoulder portion 45b. The nut 54 has a through hole formed in the center thereof into which the connecting shaft 45a of the flange 45 can be inserted. A contact surface 54b having a shape corresponding to the tapered portion 45c formed on the lower surface of the shoulder portion 45b is formed around the through hole of the nut 54.

In this embodiment, the flange 45 has a main body 45d that is detachable from the connecting shaft 45a, and the main body 45d has a substantially disk shape. When inserting the nut 54 into the connecting shaft 45a of the flange 45, the connecting shaft 45a is removed from the main body 45d, and then the connecting shaft 45a is inserted into the through hole of the nut 54. In this state, by fixing the connecting shaft 45a to the main body 45d, the nut 54 is arranged between the shoulder portion 45b of the connecting shaft 45a and the main body 45d of the flange 45.

When connecting the dresser 7 to the dresser shaft 23, first insert the protrusion 56 formed on the connecting shaft 45a into the insertion groove 23a formed at the tip of the dresser shaft 23. In this state, the nut 54 disposed between the shoulder portion 45b of the connecting shaft 45a and the main body 45d of the flange 45 is rotated (eg, clockwise) to screw the nut 54 onto the dresser shaft 23. When the nut 54 is rotated until the tip of the dresser shaft 23 contacts the shoulder portion 45b of the connecting shaft 45a, the contact surface 54b of the nut 54 engages with the tapered portion 45c formed on the lower surface of the shoulder portion 45b. By this operation, the shoulder portion 45b of the connecting shaft 45a of the flange 45 is sandwiched between the nut 54 and the dresser shaft 23, and the dresser 7 is connected to the dresser shaft 23. By managing the tightening torque of the nut 54 screwed onto the dresser shaft 23, the fastening force of the dresser 7 to the dresser shaft 23 can be managed.

When removing the dresser 7 from the dresser shaft 23, rotate the nut 54 (for example, counterclockwise). When the nut 54 is rotated until the engagement between the nut 54 and the dresser shaft 23 is released, the projection 56 of the flange 45 can be pulled out from the insertion groove 23a of the dresser shaft 23.

In this embodiment as well, the dresser 7 can be attached to and detached from the dresser shaft 23 by simply rotating the nut 54. As a result, the dresser 7 can be easily attached to and detached from the dresser shaft 23 even in a limited space.

FIG. 4 is a schematic diagram showing a modification of the coupling device shown in FIG. 3A. The magnitude of the inclination angle (taper angle) of the tapered portion 45c formed on the lower surface of the shoulder portion 45b in the fastening structure 50 shown in FIG. It is smaller than the inclination angle of the portion 45c. Note that the inclination angle is the inclination angle of the tapered portion 45c with respect to the longitudinal direction of the connecting shaft 45a (direction perpendicular to the upper surface of the main body 45d of the flange 45).

The smaller the inclination angle is, the more difficult it becomes for the nut 54 to move in the longitudinal direction (in the illustrated example, horizontal direction) of the connecting shaft 45a, so the reproducibility of the position of the dresser 7 increases. In other words, the smaller the inclination angle is, the more the concentricity between the dresser shaft 23 and the connecting shaft 45a of the flange 45 improves. As a result, the dresser 7 connected to the dresser shaft 23 by the fastening structure 50 shown in FIG. 4 can be rotated at a higher speed than the dresser 7 connected to the dresser shaft 23 by the fastening structure 50 shown in FIG. 3.

On the other hand, the fastening torque required for the nut 54 when connecting the dresser 7 to the dresser shaft 23 using the fastening structure 50 shown in FIG. The tightening torque is larger than that required for the nut 54. Further, the contact surface 54a of the nut 54 and the tapered portion 45c of the connecting shaft 45a shown in FIG. 4 require higher processing accuracy than the contact surface 54a of the nut 54 and the tapered portion 45c of the connecting shaft 45a shown in FIG. Ru. Therefore, the magnitude of the inclination angle is determined in consideration of the rotational speed required of the dresser 7, the ease of machining the nut 54 and the connecting shaft 45a, and the like.

FIG. 5A is a schematic diagram of a coupling device according to yet another embodiment, and FIG. 5B is a sectional view taken along the line CC in FIG. 5A. The fastening structure 50 of the connecting device 40 shown in FIG. 5A includes a rod 58 formed at the tip of the connecting shaft 45a of the flange 45, and an insert formed at the tip of the dresser shaft 23 corresponding to the shape of the rod 58. A hole 23c is provided. A through hole (first through hole) 58a is formed in the rod 58 and extends in a direction perpendicular to the longitudinal direction of the connecting shaft 45a. A through hole (second through hole) 23b is formed in the dresser shaft 23 and is formed to correspond to the through hole 58a of the rod 58 inserted into the insertion hole 23c. When the rod 58 is inserted into the dresser shaft 23, the through hole 58a of the rod 58 and the through hole 23b of the dresser shaft 23 are arranged in a straight line. The fastening structure 50 of the coupling device 40 further includes a pin 59 inserted into the through hole 58a of the rod 58 and the through hole 23b of the dresser shaft 23. The combination of the linearly arranged through holes 58a of the rod 58 and the through holes 23b of the dresser shaft 23, and the pins 59 inserted into these through

holes

58a, 23b, positions the dresser 7 with respect to the dresser shaft 23. and can function as a rotation stopper.

When connecting the dresser 7 to the dresser shaft 23, first insert the rod 58 formed on the connecting shaft 45a into the insertion hole 23c formed at the tip of the dresser shaft 23. By this operation, the through hole 58a of the rod 58 and the through hole 23b of the dresser shaft 23 are arranged in a straight line. In this state, the pin 59 is inserted into the through hole 58a of the rod 58 and the through hole 23b of the dresser shaft 23, thereby connecting the dresser 7 to the dresser shaft 23.

When removing the dresser 7 from the dresser shaft 23, the pins 59 are pulled out from the through holes 58a of the linearly arranged rods 58 and the through holes 23b of the dresser shaft 23. This operation allows the rod 58 to be pulled out from the insertion hole 23c.

The rod 58 shown in FIG. 5B has a rectangular cross-sectional shape when viewed in a cross section perpendicular to the longitudinal direction (in this embodiment, the vertical direction) of the connecting shaft 45a. However, the cross-sectional shape of the rod 58 is arbitrary. Although not shown, the rod 58 may have a circular cross section or a polygonal cross section such as a triangular shape or a pentagonal shape. When the rod 58 has a polygonal cross section, the effect of positioning the dresser 7 with respect to the dresser shaft 23 and preventing rotation thereof can be improved.

Also in this embodiment, the dresser 7 can be attached to and detached from the dresser shaft 23 by a simple operation such as inserting and pulling out the pins 59 into the through holes 58a of the linearly arranged rods 58 and the through holes 23b of the dresser shaft 23. I can do it. As a result, the dresser 7 can be easily attached to and detached from the dresser shaft 23 even in a limited space.

As shown in FIG. 5A, the dresser shaft 23 may have a magnet 29 placed at the tip of the dresser shaft 23. The magnet 29 has, for example, an annular shape. When connecting the flange 45 to the dresser shaft 23, the magnet 29 can attract the connecting shaft 45a of the flange 45 and fix the flange 45 to the dresser shaft 23. As a result, the dresser 7 can be attached to the dresser shaft 23 more easily. Although not shown, the dresser shaft 23 shown in FIGS. 2A, 3A, and 4 may also include a magnet 29 that is disposed at the tip of the dresser shaft 23 and attracts the connecting shaft 45a of the flange 45.

FIG. 6A is a schematic diagram of a coupling device according to yet another embodiment, and FIG. 6B is a schematic side view of the coupling shown in FIG. 6A. FIG. 6B corresponds to a side view of the coupling 60 seen from the direction of line D in FIG. 6A. The fastening structure 50 of the connecting device 40 shown in FIG. 6A includes a coupling 60 that connects the dresser shaft 23 and the connecting shaft 45a of the flange 45.

The coupling 60 shown in FIGS. 6A and 6B has a (first) hole 60c formed at its fixed end 60a, into which the fixed rod 23d formed at the tip of the dresser 23 is inserted, and a fixed end 60a. A (second) hole 60d is formed at the opposite end 60b of the flange 45 and into which the tip of the connecting shaft 45a of the flange 45 is inserted. In the example shown in FIG. 6A, the fixed end 60a corresponds to the upper end of the coupling 60, and the end 60b in which the hole 60d is formed corresponds to the lower end of the coupling 60.

In this embodiment, the coupling 60 has a substantially cylindrical shape. Furthermore, the coupling 60 includes a slot 60e extending in the longitudinal direction (direction perpendicular to the radial direction), two fixing

screws

62A, 62B that adjust the gap between the upper and lower parts of the slot 60e, and fixing

screws

62A, 62B. 62B has

screw holes

63A and 63B into which they are screwed, respectively. The slot 60e shown in FIG. 6B extends from the top surface of the coupling 60 to the bottom surface. The fixed rod 23d of the dresser shaft 23 is inserted into the hole 60c of the coupling 60. In this state, one fixing screw 62A is screwed into one screw hole 63A to reduce the gap between the slots 60e, thereby fixing the fixing rod 23d to the fixed end 60a of the coupling 60.

In the illustrated example, the dresser shaft 23 is fixed to the coupling 60 by a slot 60e formed in the coupling 60 and a fixing screw 62A screwed into the screw hole 63A. but not limited to. Any structure or method can be used to fix the dresser shaft 23 to the fixed end 60a of the coupling 60. For example, the hole 60c formed in the fixed end 60a of the coupling 60 may be formed as a screw hole, and a screw may be formed on the outer peripheral surface of the fixed rod 23d of the dresser shaft 23 to be screwed into the hole 60c. good.

When connecting the dresser 7 to the dresser shaft 23, first, the connecting shaft 45a of the flange 45 is inserted into the hole 60d formed in the end 60b of the coupling 60. Next, the fixing screw 62B is rotated (for example, clockwise) and screwed into the screw hole 63B to reduce the gap at the bottom of the slot 60e. By this operation, the connecting shaft 45a of the flange 45 is connected to the dresser shaft 23 via the coupling 60, and as a result, the dresser 7 is connected to the dresser shaft 23.

When removing the dresser 7 from the dresser shaft 23, rotate the fixing screw 62B (eg, counterclockwise) to increase the gap between the slots 60e. By this operation, the connecting shaft 45a of the flange 45 can be pulled out from the hole 60d of the coupling 60.

In this way, also in this embodiment, the dresser 7 can be attached to and detached from the dresser shaft 23 by a simple operation of rotating the fixing screw 62B provided on the coupling 60 of the fastening structure 50. As a result, the dresser 7 can be easily attached to and detached from the dresser shaft 23 even in a limited space.

FIG. 7 is a schematic diagram of a coupling device according to yet another embodiment. 8A is a schematic perspective view of the connecting shaft shown in FIG. 7, FIG. 8B is a top view of the bottom wall of the box shown in FIG. 7, and FIG. 8C is a top view of the bottom wall of the box shown in FIG. 8B. It is a bottom view. The fastening structure 50 of the connecting device 40 shown in FIG. , two) engaging protrusions 67 (see also FIG. 8A), and an elastic body 68 disposed between the box body 65 and (the main body 45d of) the flange 45. In this embodiment, the elastic body 68 is a coil spring.

The box body 65 has a bottom wall 65a in which a through hole is formed through which the connecting shaft 45a having the engagement protrusion 67 is allowed to pass. More specifically, as shown in FIGS. 8B and 8C, the bottom wall 65a of the box 65 has a through hole 65b through which the connecting shaft 45a can pass, and a plurality of engagement holes connected to the through hole 65b. Through grooves 65c are formed through which the protrusions 67 can pass. Further, on the inner surface of the bottom wall 65a of the box body 65, a plurality of engagement grooves 65d are formed in which the plurality of engagement protrusions 67 can respectively engage.

When connecting the dresser 7 to the dresser shaft 23, first, the connecting shaft 45a of the flange 45 is moved toward the box body 65 (in this embodiment, raised) against the restoring force of the elastic body 68, and the flange The tip of the connecting shaft 45a of 45 is inserted into the through hole 65b formed in the bottom wall 65a of the box body 65. Next, the position of the engaging protrusion 67 protruding from the outer peripheral surface of the connecting shaft 45a is aligned with the position of the through groove 65c formed in the bottom wall 65a of the box body 65, so that the engaging protrusion 67 The connecting shaft 45a is inserted into the internal space of the box body 65 until it passes through the connecting shaft 65a. As the connecting shaft 45a is inserted into the box 65, the elastic body 68 sandwiched between the box 65 and the flange 45 is contracted.

In this state, the flange 45 is rotated to align the engagement protrusion 67 with the engagement groove 65d formed on the inner surface of the bottom wall 65a of the box body 65. Furthermore, when the force applied to the flange 45 against the restoring force of the elastic body 68 is released, the flange 45 (and the connecting shaft 45a) moves (in this embodiment, descends), and the engagement protrusion 67 engages. It engages with the matching groove 65d. By this operation, the connecting shaft 45a of the flange 45 is connected to the dresser shaft 23 via the box body 65, and as a result, the dresser 7 is connected to the dresser shaft 23.

Note that when the dresser 7 is connected to the dresser shaft 23, the elastic body 68 urges the flange 45 away from the box body 65 with a predetermined restoring force. The spring constant of the elastic body 68 is set so that the restoring force (biasing force) that the elastic body 68 applies to the flange 45 is larger than the pressing force with which the dresser 7 is pressed against the polishing pad 10 in the dressing process. In the illustrated example, the elastic body 68 is a coil spring, but the type of the elastic body 68 is arbitrary as long as it can apply a predetermined biasing force to the flange 45.

When removing the dresser 7 from the dresser shaft 23, the elastic body 68 holds the connecting shaft 45a of the flange 45 against the urging force applied to the flange 45 until the engagement protrusion 67 and the engagement groove 65d are disengaged. and move it. Next, the flange 45 is rotated to align the engagement protrusion 67 with the through groove 65c formed in the bottom wall 65a of the box body 65. Furthermore, when the force applied to the flange 45 is released against the restoring force of the elastic body 68, the flange 45 (and the connecting shaft 45a) moves (in this embodiment, descends), and the engagement protrusion 67 penetrates. The connecting shaft 45a of the flange 45 can be pulled out from the box body 65 by passing through the groove 65c.

Next, a rotating body attaching/detaching device for attaching/detaching the rotating body to/from the rotating shaft via the above-mentioned coupling device will be described.

FIG. 9 is a schematic diagram showing a rotating body attachment/detachment device according to one embodiment. A rotary body attachment/detachment device 70 shown in FIG. 9 is a device for attaching and detaching the dresser 7 to and from the dresser shaft 23 via the coupling device 40 shown in FIG. 2A, FIG. 3A, or FIG. 4.

The rotating body attaching/detaching device 70 shown in FIG. and an attachment/detachment jig 75 for rotating the. The support stand 71 has a substantially disk shape and is connected to the rotating body movement mechanism 73 via a support arm 72. In this embodiment, the support stand 71 has a diameter smaller than the diameter of the dresser 7.

The rotating body moving mechanism 73 has an elevator 80 that can move the support arm 72 up and down. When the elevator 80 is operated, the rotating body moving mechanism 73 can be moved up and down with respect to the dresser shaft 23 via the support arm 72. The elevator 80 may be, for example, a piston cylinder device that moves a piston forward and backward relative to a cylinder using fluid pressure, or a ball screw device that has a combination of a ball screw and a motor.

Further, as shown in FIG. 9, the rotating body moving mechanism 73 may further include a horizontal moving device 81 that moves the support arm 72 in the horizontal direction with respect to the dresser shaft 23. By operating the horizontal movement device 81, the position of the support base 71 with respect to the dresser shaft 23 can be adjusted. The horizontal movement device 81 is, for example, a piston cylinder device that moves the support arm 72 back and forth with respect to the dresser shaft 23, or a linear motion device such as a ball screw device. In one embodiment, the horizontal movement device 81 may be a rotation device (eg, a motor) that rotates the support arm 72 in the horizontal direction. Furthermore, the horizontal movement device 81 may be a combination of the above linear motion device and rotation device.

FIG. 10 is a top view of the attachment/detachment jig shown in FIG. 9. The attachment/detachment jig 75 shown in FIG. 10 includes at least three rollers 76A, 76B, 76C that can come into contact with the outer peripheral surface of the nut 54, and a holder 77 for rotatably holding the rollers 76A, 76B, 76C. . Each roller 76A, 76B, 76C is made of an elastic material such as rubber, or a combination of a wheel (not shown) and an elastic material such as rubber attached to the outer peripheral surface of the wheel. be done. The holder 77 includes an opening 77a into which the nut 54 is inserted, when viewed in a cross section perpendicular to the rotation axis (not shown) of the rollers 76A, 76B, and 76C. The width of the opening 77a is larger than the outer diameter of the nut 54, and the distance between the opposing

rollers

77B and 77C is slightly smaller than the outer diameter of the nut 54.

The rotating body attachment/detachment device 70 further includes a motor 78 that rotates one roller 76A among at least three rollers 76A, 76B, and 76C. In the illustrated example, the motor 78 is attached to a wall 77b facing the opening 77a, and rotates one roller 76A rotatably attached to the wall 77b. The rotational torque transmitted from the motor 78 to the roller 76A is transmitted to the remaining rollers 76B and 76C via rotation transmission parts such as pulleys, belts, and/or gears (not shown). With such a configuration, the rollers 76A, 76B, and 76C can be rotated synchronously. In one embodiment, the remaining rollers 76B, 76C may be configured as judo rollers co-rotating with the nut 54, which is rotated by rotation of the roller 76A.

As shown in FIG. 10, the rotating body attachment/detachment device 70 further includes a jig moving device 83 that moves the attachment/detachment jig 75 forward and backward relative to the nut 54. The jig moving device 83 is connected to the attachment/detachment jig 75 via a jig arm 85.

The rotating body attachment/detachment device 70 is provided outside the polishing apparatus 1 (see FIG. 1) and is configured to access the dresser 7 from the outside of the polishing apparatus 1. In one embodiment, the rotating body attachment/detachment device 70 may be provided inside the polishing device 1. In this case, the rotating body attachment/detachment device may be configured to be able to access the dresser 7 spaced apart from the polishing pad 10 at the upper part of the polishing pad 10 (see FIG. 1), or may be configured to be provided on the side of the polishing pad 10. The dresser 7 may be configured to be accessible when the dresser 7 has been moved to the retracted position.

FIGS. 11A and 11B are schematic diagrams showing how the dresser is removed from the dresser shaft using the rotating body attachment/detachment device shown in FIG. 10. As shown in FIG. 11A, first, the elevator 80 and the horizontal moving device 81 of the rotating body moving mechanism 73 are operated to support the dresser 7 on the support base 71. Next, the jig moving device 83 is operated to move the attachment/detachment jig 75 toward the nut 54 and bring the nut 54 into contact with the roller 76A. At this time, since the distance between the remaining rollers 76B, 76C is slightly smaller than the outer diameter of the nut 54, the outer peripheral surface of the nut 54 contacts all the rollers 76A, 76B, 76C. Next, the motor 78 is driven to rotate the rollers 76A, 76B, and 76C, and the nut 54 and the dresser shaft 23 are disengaged from each other.

Next, as shown in FIG. 11B, the elevator 80 is operated to move the support base 71 together with the dresser 7, and the connecting shaft 45a of the flange 45 attached to the dresser 7 is pulled out from the dresser shaft 23. These operations allow the dresser 7, which is a rotating body, to be removed from the dresser shaft 23, which is a rotating shaft.

When attaching the dresser 7 to the dresser shaft 23, the dresser 7 is supported by the support base 71, and in this state, the connecting shaft 45a of the flange 45 attached to the dresser 7 is inserted into the dresser shaft 23. Next, the motor 78 is driven to rotate the rollers 76A, 76B, and 76C, and the nut 54 is tightened to the dresser shaft 23 until the tightening torque between the nut 54 and the dresser shaft 23 reaches a predetermined value. These operations allow the dresser 7, which is a rotating body, to be attached to the dresser shaft 23, which is a rotating shaft.

FIG. 12 is a schematic diagram showing a rotating body attachment/detachment device according to another embodiment. A rotating body attachment/detachment device 70 shown in FIG. 12 is a device for attaching and detaching the dresser 7 to and from the dresser shaft 23 via the coupling device 40 shown in FIG. 5A.

The rotary body attaching/detaching device 70 shown in FIG. 12 includes a support base 71 that supports the dresser 7 which is a rotary body, a rotary body moving mechanism 73 connected to the support base 71, and a pin 59 of the fastening structure 50 of the coupling device 40. The dresser shaft 23 is provided with a pin insertion device 86 for advancing and retracting the through holes 58a of the linearly arranged rods 58 and the through holes 23b of the dresser shaft 23.

As shown in FIG. 12, the pin insertion device 86 includes a pair of gripping arms 90 that can grip the pin 59, a pin insertion bar 87, a motor 88 that rotates the pin insertion bar 87, and a motor 88 that moves the pin insertion bar 87 forward and backward. A pin moving device 89 is provided. In this embodiment, a screw hole is formed at one end of the pin 59, and a screw that can be screwed into the screw hole formed in the pin 59 is formed at the tip of the pin insertion bar 87. The pin moving device 89 may be a piston cylinder device that moves a piston forward and backward relative to a cylinder using fluid pressure, or a ball screw device that has a combination of a ball screw and a motor.

13A and 13B are schematic diagrams showing how the dresser is removed from the dresser shaft using the rotating body attachment/detachment device shown in FIG. 12. As shown in FIG. 13A, first, the elevator 80 and the horizontal moving device 81 of the rotating body moving mechanism 73 are operated to support the dresser 7 on the support base 71. Next, the pin moving device 89 of the pin insertion device 86 is operated to bring the pin insertion bar 87 into contact with the end of the pin 59 , and the motor 88 is further rotated to bring the end of the pin insertion bar 87 into contact with the end of the pin 59 . Screw the tip.

Next, as shown in FIG. 13B, the pin moving device 89 of the pin insertion device 86 is operated to pull out the pins 59 from the through holes 58a of the linearly arranged rods 58 and the through holes 23b of the dresser shaft 23. , the pin 59 is gripped by a pair of gripping arms 90. Next, the elevator 80 is operated to move the support base 71 together with the dresser 7, and the connecting shaft 45a of the flange 45 attached to the dresser 7 is pulled out from the dresser shaft 23. These operations allow the dresser 7, which is a rotating body, to be removed from the dresser shaft 23, which is a rotating shaft.

When attaching the dresser 7 to the dresser shaft 23, the dresser 7 is supported by the support base 71, and in this state, the rod 58 formed at the tip of the connecting shaft 45a of the flange 45 is inserted into the dresser shaft 23. Next, the pin moving device 89 of the pin insertion device 86 is operated to insert the pins 59 into the through holes 58a of the linearly arranged rods 58 and the through holes 23b of the dresser shaft 23.

Next, as shown in FIG. 14, the elevator 80 is operated to separate the support base 71 from the dresser 7. In the state shown in FIG. 14, the weight of the dresser 7 and the flange 45 prevents the pin 59 inserted into the through hole 58a of the rod 58 and the through hole 23b of the dresser shaft 23 from rotating. In this state, the motor 88 is rotated to release the engagement between the end of the pin 59 and the tip of the pin insertion bar 87. Next, the pin moving device 89 of the pin insertion device 86 is operated to retract the pin insertion bar 87 from the pin 59. These operations allow the dresser 7, which is a rotating body, to be attached to the dresser shaft 23, which is a rotating shaft.

FIG. 15 is a schematic diagram showing a rotating body attachment/detachment device according to still another embodiment. A rotating body attachment/detachment device 70 shown in FIG. 15 is a device for attaching/detaching the dresser 7 to/from the dresser shaft 23 via the coupling device 40 shown in FIG. 6A.

The rotating body attaching/detaching device 70 shown in FIG. 15 includes a support base 71 that supports the dresser 7 which is a rotating body, a rotary body moving mechanism 73 connected to the support base 71, and a fixing screw of the fastening structure 50 of the coupling device 40. 62B (see FIG. 6A).

As shown in FIG. 15, the screw rotating device 93 includes a driver (torque driver) 94 that can engage with the head of the fixing screw 62B, a motor 96 that rotates the driver 94, and a driver moving device 95 that moves the driver 94 forward and backward. , is provided. The driver moving device 95 may be a piston cylinder device that moves a piston forward and backward with respect to a cylinder using fluid pressure, or may be a ball screw device that has a combination of a ball screw and a motor.

16A and 16B are schematic diagrams showing how the dresser is removed from the dresser shaft using the rotating body attachment/detachment device shown in FIG. 15. As shown in FIG. 16A, first, the elevator 80 and the horizontal moving device 81 of the rotating body moving mechanism 73 are operated to support the dresser 7 on the support base 71. Next, the driver moving device 95 of the screw rotating device 93 is operated to engage the driver 94 with the head of the fixing screw 62B, and the motor 88 is further rotated to rotate the driver 94. This operation loosens the engagement between the fixing screw 62B and the screw hole 63B, and increases the gap between the slots 60e (see FIG. 6B). As a result, as shown in FIG. 16B, the connecting shaft 45a of the flange 45 can be pulled out from the coupling 60, so the dresser 7, which is a rotating body, can be removed from the dresser shaft 23, which is a rotating shaft.

When attaching the dresser 7 to the dresser shaft 23, the dresser 7 is supported by the support base 71, and in this state, the connecting shaft 45a of the flange 45 is inserted into the coupling 60 to which the tip of the dresser shaft 23 is fixed. Next, the driver moving device 95 of the screw rotating device 93 is operated to engage the driver 94 with the head of the fixing screw 62B, and the motor 88 is further rotated to rotate the driver 94, thereby moving the fixing screw 62B. Screw it into the screw hole 63B. By this operation, the gap between the slots 60e (see FIG. 6B) is reduced, and the connecting shaft 45a is held by the coupling 60. As a result, the dresser 7, which is a rotating body, can be attached to the dresser shaft 23, which is a rotating shaft.

FIG. 17 is a schematic diagram showing a rotating body attachment/detachment device according to still another embodiment. A rotating body attachment/detachment device 70 shown in FIG. 17 is a device for attaching and detaching the dresser 7 to and from the dresser shaft 23 via the connection device 40 shown in FIG. 7(a).

The rotary body attachment/detachment device 70 shown in FIG. 17 includes a support base 71 that supports the dresser 7, which is a rotary body, and a rotary body moving mechanism 73 connected to the support base 71.

The rotating body moving mechanism 73 shown in FIG. 17 includes not only an elevator 80 that can move the support arm 72 up and down, but also a rotation device (for example, a motor) 98 that rotates the support base 71. Therefore, this rotating body moving mechanism 73 can not only move up and down the dresser 7 supported by the support base 71 and the flange 45 attached to the dresser 7, but also rotate it.

18A and 18B are schematic diagrams showing how the dresser is removed from the dresser shaft using the rotating body attachment/detachment device shown in FIG. 17. As shown in FIG. 18A, first, the elevator 80 of the rotating body moving mechanism 73 is operated to support the dresser 7 on the support base 71. Next, the rotating device 98 of the rotating body moving mechanism 73 is operated to move the support base until the engaging protrusion 67 formed on the outer peripheral surface of the connecting shaft 45a of the flange 45 is positioned above the through groove 65c of the box body 65. Rotate 71. Next, the elevator 80 of the rotating body moving mechanism 73 is operated to pull out the connecting shaft 45a of the flange 45 from the box body 65. These operations allow the dresser 7, which is a rotating body, to be removed from the dresser shaft 23, which is a rotating shaft.

Up to now, embodiments of the coupling device 40 and the rotating body attachment/detachment device 70 for coupling the dresser 7 to the dresser shaft 23 have been described. A certain polishing head 5 may be connected to a head shaft 14 that is a rotating shaft.

The embodiments described above have been described for the purpose of enabling those with ordinary knowledge in the technical field to which the present invention pertains to carry out the present invention. Various modifications of the above embodiments can be naturally made by those skilled in the art, and the technical idea of the present invention can be applied to other embodiments. Therefore, the invention is not limited to the described embodiments, but is to be construed in the broadest scope according to the spirit defined by the claims.

The present invention can be used in a coupling device for coupling rotating bodies such as polishing heads and dressers to rotating shafts. Furthermore, the present invention can be used in an attachment/detachment device for a rotating body connected to a rotating shaft via this connecting device.

1 Substrate polishing device 2 Dressing device 3 Polishing table 3a Table shaft 5 Polishing head (rotating body)
6 Polishing liquid supply nozzle 7 Dresser (rotating body)
7a Dressing surface 10 Polishing pad 10a Polishing surface 11 Table motor 14 Head shaft (rotating shaft)
23 Dresser shaft (rotating shaft)
23a Insertion groove 23b Through hole 29 Magnet 40 Connecting device 45 Flange 45a Connecting shaft 45b Shoulder 45c Tapered part 45d Main body 50 Fastening structure 51 Insertion hole 53 Collet 53a Slot 53b Split body 53c Tapered part 54

Nut

54a, 54b Contact surface 56 Protrusion 58 Rod 59 Pin 60 Coupling 60a Upper end (fixed end)
60b Lower end 60c (1st) hole 60d (2nd)

hole 60e Slot

62A,

62B Fixing screw

63A, 63B Screw hole 65 Box 65a Bottom wall 65b Through hole 65c Through groove 65d Engagement groove 67 Engagement protrusion 68 Elastic body 70 Rotating body attachment/detaching device 71 Support stand 72 Support arm 73 Rotating body moving mechanism 75 Attachment/detaching jig 76A, 76B, 76C Roller 77 Holder 80 Elevator 81 Horizontal moving device 83 Jig moving device 85 Jig arm 86 Pin insertion device 87 Pin insertion bar 88 Motor 89 Pin moving device 90 Gripping arm 93 Screw rotating device 94 Driver 95 Driver moving device 96 Motor 98 Rotating device (motor)

Claims

A coupling device for coupling a rotating body to a rotating shaft,
a flange attached to the rotating body and having a connecting shaft;
A coupling device comprising: a fastening structure that fastens the rotating body to the rotating shaft via the coupling shaft.
The fastening structure is
an insertion hole formed in the rotating shaft and into which the connecting shaft is inserted;
a collet arranged coaxially in the insertion hole and having a tapered portion at its tip;
The coupling device according to claim 1, further comprising a nut having a contact surface corresponding to the tapered portion of the collet and screwed onto the rotating shaft in a state where the coupling shaft is inserted.
The fastening structure is
an insertion groove formed in the rotating shaft;
a protrusion formed at the tip of the connecting shaft and inserted into the insertion groove;
a nut that is screwed onto the rotating shaft with the connecting shaft inserted therethrough;
The connecting shaft is formed with a shoulder portion that supports the tip of the rotating shaft,
The lower surface of the shoulder portion is configured as a tapered surface,
The coupling device according to claim 1, wherein the nut has a shape corresponding to the tapered surface and a contact surface that contacts the tapered surface.
The fastening structure is
a rod formed at the tip of the connecting shaft;
an insertion hole formed in the rotating shaft corresponding to the shape of the rod and into which the rod is inserted;
a first through hole formed in the rod;
a second through hole formed in the rotating shaft corresponding to the first through hole of the rod inserted into the insertion hole;
The connecting device according to claim 1, comprising a pin inserted into the first through hole and the second through hole.
The connecting device according to claim 4, wherein the rod has a polygonal cross section when viewed in a cross section perpendicular to the longitudinal direction of the connecting shaft.
The connecting device according to any one of claims 2 to 5, wherein the rotating shaft includes a magnet that attracts the connecting shaft toward the rotating shaft.
The fastening structure includes a fixed end portion fixed to the tip of the rotating shaft, and a coupling having a hole portion into which the connecting shaft is inserted at an end opposite to the fixed end portion,
The coupling is
a slot formed in the hole and extending in the insertion direction of the connecting shaft;
a fixing screw that adjusts the size of the gap between the slots;
The connecting device according to claim 1, further comprising a screw hole into which the fixing screw is screwed.
The fastening structure is
a box fixed to the tip of the rotating shaft;
a plurality of engagement protrusions protruding from the outer peripheral surface of the connecting shaft;
an elastic body disposed between the box body and the flange and urging the flange away from the box body;
The bottom wall of the box body is
a through hole through which the connecting shaft can pass;
a plurality of through grooves connected to the through hole and through which the plurality of engagement protrusions can each pass;
The coupling device according to claim 1, further comprising an engagement groove formed on the inner surface of the bottom wall and into which each of the plurality of engagement protrusions can engage.
A rotating body attachment/detachment device for attaching/detaching a rotating body to/from a rotating shaft via the fastening structure according to claim 2 or 3,
a support stand that supports the rotating body;
a rotating body moving mechanism that is connected to the support base and moves the connecting shaft with respect to the rotating shaft;
an attachment/detachment jig provided with at least three rollers that contact the outer peripheral surface of the nut to rotate the nut;
a motor that rotates at least one of the three rollers;
A rotating body attachment/detachment device comprising: a jig moving device that moves the attachment/detachment jig forward and backward with respect to the rotating body.
A rotating body attachment/detachment device for attaching/detaching a rotating body to/from a rotating shaft via the fastening structure according to claim 4,
a support stand that supports the rotating body;
a rotating body moving mechanism that is connected to the support base and moves and rotates the connecting shaft with respect to the rotating shaft;
A rotating body attachment/detachment device comprising: a pin insertion device for inserting the pin into the first through hole and the second through hole.
A rotating body attachment/detachment device for attaching/detaching a rotating body to/from a rotating shaft via the fastening structure according to claim 7,
a support stand that supports the rotating body;
a rotating body moving mechanism that is connected to the support base and moves the connecting shaft with respect to the rotating shaft;
A rotating body attachment/detachment device comprising: a screw rotation device that rotates the fixing screw;
A rotating body attachment/detachment device for attaching/detaching a rotating body to/from a rotating shaft via the fastening structure according to claim 8,
a support stand that supports the rotating body;
A rotating body attaching/detaching device, comprising: a rotating body moving mechanism connected to the support base and configured to move and rotate the connecting shaft with respect to the rotating shaft.