TW202346027A - Coupling device for coupling rotating body to rotating shaft, and device for attaching and detaching rotating body - Google Patents

Abstract

The present invention relates to a coupling device for coupling a rotating body such as such as a polishing head and dresser to a rotating shaft. The present invention further relates to a device for attaching and detaching the rotating body coupled to the rotating shaft via this coupling device. A coupling device (40) is used to couple a rotating body (7) to a rotating shaft (23). The coupling device (40) comprises: a flange (45) which is attached to the rotating body (7) and has a coupling shaft (45a); and a fastening structure (50) which fastens the rotating body (7) to the rotating shaft (23) via the coupling shaft (45a).

Description

The connecting device used to connect the rotating body to the rotating shaft, and the attaching and detaching device of the rotating body

The invention relates to a connecting device for connecting rotating bodies such as grinding heads and dressers to rotating shafts. Furthermore, the present invention relates to a take-off device for a rotating body connected to a rotating shaft via the connecting device.

In recent years, as semiconductor devices have become more integrated and denser, circuit wiring has become more refined, and the number of multilayer wiring layers has also increased. In order to achieve miniaturization of circuits and realize multi-layer wiring, it is necessary to flatten the surface of semiconductor elements. This planarization process is performed, for example, by a CMP device using chemical mechanical polishing (Chemical Mechanical Polishing).

CMP equipment generally includes a polishing table on which a polishing pad is attached, and a polishing head that holds a substrate such as a wafer. The CMP device rotates the polishing table and the polishing head respectively around their axes, presses the substrate against the polishing surface (upper surface) of the polishing pad through the polishing head, supplies polishing fluid on the polishing surface, and simultaneously polishes the surface of the substrate.

When the substrate is polished, abrasive grains and abrasive debris will accumulate on the polishing surface of the polishing pad. In addition, the characteristics of the polishing pad will change, resulting in deterioration of polishing performance. Therefore, the CMP apparatus is equipped with a dressing device for reproducing the polishing surface of the polishing pad. Dressing devices generally include a dresser having a dressing surface that contacts the polishing pad. The dressing device rotates the dresser around its axis and presses the dressing surface against the polishing surface of the polishing pad on the rotating polishing table to remove the grinding fluid and cutting chips accumulated on the polishing surface and polish the surface. Flattening and dressing (Dressing).

In the CMP device, the grinding head and dresser are connected to the rotating shaft and rotate around its own axis. [Prior technical literature] [Patent Document]

[Patent Document 1] Japanese Patent Application Publication No. 2010-172996 [Patent Document 2] Japanese Patent Application Publication No. 2020-19081

(Invent the problem you want to solve)

The grinding heads and dressers of the rotating body are components of the grinding device that need to be repaired and replaced. In order to repair or replace the rotating body, the rotating body must be disassembled from the rotating shaft, and a new rotating body must be installed on the rotating shaft after repair.

However, the conventional connection device for mounting the rotating body to the rotating shaft has a complicated structure that requires attaching and removing many screws and the like. Furthermore, in the current situation where the footprint of the grinding device is required to be reduced, it is difficult to provide sufficient space for the operator near the rotating body for the operation of attaching and detaching the rotating body.

Therefore, an object of the present invention is to provide a connecting device that allows the rotating body to be easily attached to and detached from the rotating shaft. Furthermore, an object of the present invention is to provide a take-off and take-off device for a rotary body that can automatically take off and take off a rotary body connected to a rotary shaft via such a connecting device. (Technical means to solve problems)

One aspect provides a connecting device for connecting a rotating body to a rotating shaft, and is provided with: a flange, which is installed to the aforementioned rotating body and has a connecting shaft; and a fastening structure, which is tightened through the aforementioned connecting shaft. Fix the aforementioned rotating body to the aforementioned rotating shaft.

In one aspect, the fastening structure includes: an insertion hole formed in the rotation shaft and into which the connecting shaft is inserted; and a collet coaxially disposed in the insertion hole and having a taper formed at the front end. and a nut, which has a contact surface corresponding to the tapered portion of the collet, and is screwed with the rotating shaft in a state where the connecting shaft is inserted. One aspect is that the fastening structure includes: an insertion groove formed on the rotation shaft; a protrusion formed on the front end of the connecting shaft and inserted into the insertion groove; and a nut inserted into the insertion groove. The connecting shaft is screwed with the rotating shaft; the connecting shaft is formed with a shoulder that supports the front end of the rotating shaft; the lower surface of the shoulder forms a tapered surface; and the nut has a shape corresponding to the tapered surface. , and form a contact surface that contacts the tapered surface. One aspect is that the fastening structure includes: a rod body formed on the front end of the connecting shaft; an insertion hole formed on the rotation axis corresponding to the shape of the rod body and into which the rod body is inserted; first a through hole formed in the rod body; a second through hole formed in the rotation shaft corresponding to the first through hole of the rod body before being inserted into the insertion hole; and a latch inserted into the first through hole. Perforation and the aforementioned second through hole.

One aspect is that the rod body has a polygonal cross-section when viewed from a cross-section perpendicular to the length direction of the connecting axis. In one aspect, the rotating shaft has a magnet that attracts the connecting shaft toward the rotating shaft.

In one aspect, the fastening structure includes: a fixed end fixed to the front end of the rotating shaft; and a coupling having a hole for inserting the connecting shaft at an end opposite to the fixed end. ; The aforementioned coupling has: a slot, which is formed in the aforementioned hole and extends in the insertion direction of the aforementioned connecting shaft; a fixing screw, which is used to adjust the gap size of the aforementioned slot; and a screw hole, which is screwed into the aforementioned coupling; Fixing screws. One aspect is that the fastening structure includes: a box fixed to the front end of the rotating shaft; a plurality of engagement protrusions protruding from the outer peripheral surface of the connecting shaft; and an elastic body arranged on the box between the body and the aforementioned flange, and apply force on the aforementioned flange in a direction away from the aforementioned box body; the bottom wall of the aforementioned box body is provided with: a through hole through which the aforementioned connecting shaft can pass; and a plurality of through grooves through which the aforementioned connecting shaft can pass. Connected to the aforementioned through hole, the aforementioned plurality of engaging protrusions can pass through respectively; and the engaging groove is formed on the inner surface of the aforementioned bottom wall, and the aforementioned plurality of engaging protrusions can respectively engage.

One aspect provides a rotating body attachment and detachment device for attaching and detaching the rotating body to the rotating shaft via the above-mentioned fastening structure, and includes: a support base that supports the aforementioned rotating body; and a rotating body moving mechanism that is connected On the aforementioned supporting platform, the aforementioned connecting shaft is moved toward the aforementioned rotating shaft; the attaching and detaching fixture is provided with at least three rollers contacting the outer circumferential surface of the aforementioned nut in order to rotate the aforementioned nut; and the motor is configured to rotate the aforementioned nut. At least one of the three rollers rotates; and a clamp moving device is used to move the attaching and detaching clamp forward and backward toward the rotating body.

One aspect provides a rotating body attachment and detachment device for attaching and detaching the rotating body to the rotating shaft via the above-mentioned fastening structure, and includes: a support base that supports the aforementioned rotating body; and a rotating body moving mechanism that is connected On the aforementioned supporting platform, the aforementioned connecting shaft is moved relative to the aforementioned rotating shaft; and a plug insertion device is configured to insert the aforementioned plug pin into the aforementioned first through hole and the aforementioned second through hole.

One aspect provides a rotating body attachment and detachment device for attaching and detaching the rotating body to the rotating shaft via the above-mentioned fastening structure, and includes: a support base that supports the aforementioned rotating body; and a rotating body moving mechanism that is connected On the above-mentioned support platform, the above-mentioned connecting shaft is moved to the above-mentioned rotation axis; and a screw rotating device is used to rotate the above-mentioned fixing screw.

One aspect provides a rotating body attachment and detachment device for attaching and detaching the rotating body from the rotating shaft via the above-mentioned fastening structure, and includes: a support base that supports the aforementioned rotating body; and a rotating body moving mechanism that is It is connected to the support base, and the connection shaft is moved and rotated relative to the rotation shaft. (Compare the effectiveness of previous technologies)

When the present invention is adopted, the rotating body and the rotating shaft can be attached and detached by simple operation of the fastening structure. As a result, the rotating body can be easily attached and detached from the rotating shaft even in a limited space.

Hereinafter, embodiments of the present invention will be described with reference to the drawings. FIG. 1 is a perspective view schematically showing an example of a grinding device. This polishing device 1 includes: a polishing table 3 on which a polishing pad 10 having a polishing surface 10a is mounted; and a polishing head 5 which holds a wafer W, which is an example of a substrate, and presses the wafer W onto the polishing pad 10 on the polishing table 3; A polishing liquid supply nozzle 6 for supplying polishing liquid and dressing liquid (for example, pure water) to the polishing pad 10 ; and a dressing device 2 having a dresser 7 for dressing the polishing surface 10 a of the polishing pad 10 .

The grinding table 3 is connected to a table motor 11 disposed below it through a table shaft 3a, and the grinding table 3 can rotate in the direction indicated by the arrow by the table motor 11. A polishing pad 10 is attached to the upper surface of the polishing table 3 , and the upper surface of the polishing pad 10 forms a polishing surface 10 a for polishing the wafer W. The grinding head 5 is connected to the lower end of the head shaft 14 . The polishing head 5 is configured to hold the wafer W underneath the polishing head 5 by vacuum suction. The head shaft 14 can move up and down by an up and down movement mechanism (not shown).

Wafer W is polished as follows. The polishing head 5 and the polishing table 3 are rotated in the directions indicated by arrows, and the polishing liquid (slurry) is supplied from the polishing liquid supply nozzle 6 to the polishing pad 10 . In this state, the polishing head 5 presses the wafer W to the polishing surface 10 a of the polishing pad 10 . The surface of the wafer W is polished by the mechanical action of the abrasive grains contained in the polishing fluid and the chemical action of the polishing fluid. After the grinding is completed, the grinding surface 10a is trimmed (adjusted) by the dresser 7.

The dressing device 2 includes: a dresser 7 that slides in contact with the polishing pad 10; a dresser shaft 23 connected to the dresser 7; an air cylinder 24 provided at the upper end of the dresser shaft 23; and a rotatable support for the dresser shaft 23. Dresser arm 27. The lower surface of the dresser 7 forms a dressing surface 7a, and the dressing surface 7a is composed of abrasive grains (for example, diamond particles). The air cylinder 24 is arranged on a support platform 20 supported by a plurality of pillars 25, which are fixed to the dresser arm 27.

The dresser arm 27 is driven by a motor (not shown) and is configured to rotate around the rotation axis 28 . The dresser shaft 23 is rotated by driving a motor (not shown), and the dresser 7 can rotate in the direction indicated by the arrow with the dresser shaft 23 as the center due to the rotation of the dresser shaft 23. The air cylinder 24 moves the dresser 7 up and down via the dresser shaft 23, and functions as an actuator that presses the dresser 7 to the polishing surface (surface) 10a of the polishing pad 10 with a specified pressing force.

The polishing pad 10 is dressed as follows. The dresser 7 rotates around the dresser shaft 23 and supplies pure water to the polishing pad 10 from the polishing liquid supply nozzle 6 . In this state, the dresser 7 is pressed to the polishing pad 10 by the air cylinder 24, and its dressing surface 7a is in sliding contact with the polishing surface 10a of the polishing pad 10. Furthermore, the dresser arm 27 is rotated around the rotation axis 28 to rock the dresser 7 in the radial direction of the polishing pad 10 . In this way, the polishing pad 10 is shaved off by the dresser 7 to dress (reproduce) its surface 10a.

The head shaft 14 is a rotary shaft that can rotate and move up and down, and the grinding head 5 is a rotary body that rotates about its axis. Similarly, the dresser shaft 23 is a rotary shaft that can rotate and move up and down, and the dresser 7 is a rotary body that rotates around its axis. These rotating bodies 5 and 7 are connected to the rotating shafts 14 and 23 respectively through the connecting devices described below.

FIG. 2A is a schematic diagram showing a connection device according to an embodiment, and FIG. 2B is a cross-sectional view along line AA of FIG. 2A. In the connecting device 40 shown in FIGS. 2A and 2B , the dresser 7 of the rotating system dressing device 2 is connected to the rotating shaft.

The connection device 40 includes a flange 45 attached to the dresser 7 and a fastening structure 50 (described later) that connects the dresser 7 to the dresser shaft 23 of the rotation axis via a connecting shaft 45 a formed on the flange 45 . The dresser 7 is connected to the dresser shaft 23 by a fastening structure 50 .

The flange 45 of this embodiment has a rough disk shape, and the lower surface of the flange 45 is fixed to the upper surface of the dresser 7 via fasteners such as screws (not shown). A connecting shaft 45a extending in a direction perpendicular to the radial direction of the dresser 7 (horizontal direction in this embodiment) is formed on the upper surface of the flange 45 in the center.

The fastening structure 50 shown in FIG. 2A includes: an insertion hole 51 formed in the dresser shaft 23; a collet 53 coaxially arranged in the insertion hole 51; and a nut 54 screwed to the dresser shaft 23. .

The collet 53 shown in FIGS. 2A and 2B is composed of a plurality (three in the example shown) of divided bodies 53b divided by a plurality (three in the example shown) of grooves 53a. Each divided body 53b is fixed to the wall surface of the insertion hole 51. Furthermore, a tapered portion 53c that is inclined at a predetermined inclination angle with respect to the longitudinal direction (vertical direction in this embodiment) of the collet 53 is formed at the front end of each divided body 53b.

A screw (not shown) is formed on the inner circumferential surface of the nut 54 , and a screw that can engage with the nut 54 is formed on the outer circumferential surface of the dresser shaft 23 . The nut 54 and the dresser shaft 23 can be screwed together by these screws. Furthermore, a through hole into which the connecting shaft 45a of the flange 45 can be inserted is formed in the center of the nut 54, and a contact surface 54a having a shape corresponding to the tapered portion 53c of the collet 53 is formed around the through hole. . Before connecting the dresser 7 to the dresser shaft 23, the nut 54 is threaded (engaged) with the dresser shaft 23 in a state where its contact surface 54a is separated from the tapered portion 53c of the collet 53, but this is not shown in the figure. Show.

When connecting the dresser 7 to the dresser shaft 23, insert the connecting shaft 45a of the flange 45 into the through hole of the nut 54, and further insert and fix the connecting shaft 45a into the insertion hole 51 formed in the dresser shaft 23. Collet 53. Next, when the nut 54 is rotated (for example, clockwise) and screwed into the dresser shaft 23 , the contact surface 54 a of the nut 54 contacts the tapered portion 53 c of the collet 53 . Furthermore, when the nut 54 is screwed into the dresser shaft 23, the front end of the divided body 53b is moved in such a manner that the contact surface 54a of the nut 54 retracts into the slot 53a of the collet 53. That is, when the nut 54 is screwed into the dresser shaft 23, the front end of the collet 53 is reduced in diameter. By this operation, the connecting shaft 45a of the flange 45 is held by the collet 53, and the dresser 7 is connected to the dresser shaft 23.

By managing the tightening torque of the nut 54 threaded with the dresser shaft 23, the tightening force of the dresser 7 on the dresser shaft 23 can be managed. In one embodiment, a keyway (not shown) may be provided in one divided body 53b of the collet 53, and a key (not shown) engaging with the keyway may be provided on the connecting shaft 45a. The key and the keyway play the role of the dresser 7 in positioning and preventing the dresser shaft 23 from rotating.

When disassembling the dresser 7 from the dresser shaft 23, rotate the nut 54 in the direction of disengaging the nut 54 from the dresser shaft 23 (for example, in the counterclockwise direction) to loosen the connection between the connecting shaft 45a and the collet 53. Fasten. By this operation, the split body 53b of the collet 53 moves so that the slot 53a of the collet 53 expands, so that the connection of the flange 45 can be pulled out from the through hole of the dresser shaft 23 and the nut 54. Shaft 45a.

In this way, when the connecting device 40 of this embodiment is used, the dresser 7 and the dresser shaft 23 can be attached and detached by a simple operation of the fastening structure 50 . More specifically, the dresser 7 can be attached and detached from the dresser shaft 23 by simply rotating the nut 54 . As a result, the dresser 7 can be easily attached and detached from the dresser shaft 23 even in a limited space.

FIG. 3A is a schematic diagram of a connecting device according to another embodiment, and FIG. 3B is a cross-sectional view taken along line B-B in FIG. 3A. The fastening structure 50 of the connecting device 40 shown in FIG. 3A has: an insertion groove 23a formed at the front end of the dresser shaft 23 of the rotating shaft; a front end of the connecting shaft 45a formed at the flange 45, and can be inserted into the insertion groove 23a The protrusion 56; and the nut 54 that is threaded (engaged) with the dresser shaft 23.

In this embodiment, the insertion groove 23a formed in the dresser shaft 23 passes through the center of the dresser shaft 23 and extends in a direction perpendicular to the length direction of the dresser shaft 23 (horizontal direction in this embodiment), and It runs through the dresser shaft 23 in a straight line. The protrusion 56 formed on the connecting shaft 45a has a shape corresponding to the insertion groove 23a. More specifically, the protrusion 56 has substantially the same shape as the insertion groove 23a. In one embodiment, in the direction perpendicular to the length direction of the dresser shaft 23, the length of the protrusion 56 may also be shorter than the length of the insertion groove 23a. The combination of the insertion groove 23a and the protrusion 56 inserted into the insertion groove 23a can exert the function of positioning and preventing rotation of the dresser shaft 23 by the dresser 7.

The connecting shaft 45a of the flange 45 is formed with a shoulder 45b that supports the front end of the dresser shaft 23 formed with the insertion groove 23a. The upper surface of the shoulder 45b forms a supporting surface for supporting the dresser shaft 23. A tapered portion 45c is formed below the shoulder portion 45b. The nut 54 is formed at the center thereof and has a through hole into which the connecting shaft 45 a of the flange 45 can be inserted. A contact surface 54b having a shape corresponding to the tapered portion 45c formed under the shoulder portion 45b is formed around the through hole of the nut 54.

In this embodiment, the flange 45 has a main body 45d that is detachably attached to the connecting shaft 45a, and the main body 45d has a general disk shape. When inserting the nut 54 into the connecting shaft 45a of the flange 45, remove the connecting shaft 45a from the body 45d, and then insert the connecting shaft 45a into the through hole of the nut 54. In this state, by fixing the connecting shaft 45a to the body 45d, the nut 54 is disposed between the shoulder 45b of the connecting shaft 45a and the body 45d of the flange 45.

When connecting the dresser 7 to the dresser shaft 23, first, insert the protrusion 56 formed on the connecting shaft 45a into the insertion groove 23a formed on the front end of the dresser shaft 23. In this state, the nut 54 disposed between the shoulder 45b of the connecting shaft 45a and the body 45d of the flange 45 is rotated (for example, clockwise) to screw the nut 54 into the trimmer shaft 23. When the nut 54 is rotated until the front end of the dresser shaft 23 contacts the shoulder 45b of the connecting shaft 45a, the contact surface 54b of the nut 54 engages with the tapered portion 45c formed below the shoulder 45b. By this operation, the shoulder 45b of the connecting shaft 45a of the flange 45 is sandwiched between the nut 54 and the dresser shaft 23, thereby connecting the dresser 7 to the dresser shaft 23. By managing the tightening torque of the nut 54 threaded with the dresser shaft 23, the tightening force of the dresser 7 on the dresser shaft 23 can be managed.

When removing the dresser 7 from the dresser shaft 23, rotate the nut 54 (for example, counterclockwise). When the nut 54 is rotated until the engagement between the nut 54 and the dresser shaft 23 is released, the protrusion 56 of the flange 45 can be pulled out from the insertion groove 23 a of the dresser shaft 23 .

Even in this embodiment, the dresser 7 can be attached and detached from the dresser shaft 23 by a simple operation of just rotating the nut 54 . As a result, the dresser 7 can be easily attached and detached from the dresser shaft 23 even in a limited space.

FIG. 4 is a schematic diagram showing a variation of the connecting device shown in FIG. 3A. The inclination angle (taper angle) of the tapered portion 45c formed under the shoulder 45b in the fastening structure 50 shown in Figure 4 is larger than that of the shoulder 45b formed in the fastening structure 50 shown in Figure 3 The inclination angle of the lower tapered portion 45c is smaller. In addition, the inclination angle is the inclination angle of the tapered portion 45c with respect to the longitudinal direction of the connecting shaft 45a (the direction perpendicular to the upper surface of the body 45d of the flange 45).

As the inclination angle decreases, the nut 54 is less likely to move in the length direction (horizontal direction in the example shown) of the connecting shaft 45a, so the position reproducibility of the dresser 7 is improved. In other words, the smaller the inclination angle is, the greater the concentricity of the connecting shaft 45a between the dresser shaft 23 and the flange 45 is. As a result, the dresser 7 connected to the dresser shaft 23 through the fastening structure 50 shown in FIG. 4 is faster than the dresser 7 connected to the dresser shaft 23 through the fastening structure 50 shown in FIG. 3 . Can rotate at high speed.

On the one hand, the tightening torque of the nut 54 required when the dresser 7 is connected to the dresser shaft 23 through the fastening structure 50 shown in FIG. 4 is higher than that required for the dresser 7 through the fastening structure 50 shown in FIG. 3 . When the trimmer 7 is connected to the dresser shaft 23, the tightening torque of the nut 54 is required to be large. Furthermore, the contact surface 54a of the nut 54 and the tapered portion 45c of the connecting shaft 45a shown in FIG. 4 are required to be more precise than the contact surface 54a of the nut 54 and the tapered portion 45c of the connecting shaft 45a shown in FIG. 3 machining accuracy. Therefore, the size of the inclination angle is determined by considering the required rotation speed of the dresser 7, the ease of processing of the nut 54 and the connecting shaft 45a, and the like.

FIG. 5A is a schematic diagram of a connection device according to another embodiment, and FIG. 5B is a cross-sectional view taken along line CC in FIG. 5A. The fastening structure 50 of the connecting device 40 shown in FIG. 5A includes: a rod 58 formed on the front end of the connecting shaft 45a of the flange 45; and an insert formed on the front end of the trimmer shaft 23 corresponding to the shape of the rod 58. Hole 23c. A through hole (first through hole) 58 a extending in a direction perpendicular to the longitudinal direction of the connecting shaft 45 a is formed in the rod body 58 . The dresser shaft 23 is formed with a through hole (second through hole) 23 b corresponding to the through hole 58 a of the rod 58 inserted into the insertion hole 23 c. When the rod body 58 is inserted into the dresser shaft 23, the through hole 58a of the rod body 58 and the through hole 23b of the dresser shaft 23 are linearly arranged. The fastening structure 50 of the connecting device 40 further includes a latch 59 inserted into the through hole 58 a of the rod body 58 and the through hole 23 b of the dresser shaft 23 . The combination of the through hole 58a of the rod body 58 and the through hole 23b of the dresser shaft 23, which are arranged linearly, and the pin 59 inserted into the through holes 58a and 23b can position and stop the dresser shaft 23 by the dresser 7. transfer function.

When connecting the dresser 7 to the dresser shaft 23, first, insert the rod 58 formed on the connecting shaft 45a into the insertion hole 23c formed on the front end of the dresser shaft 23. By this operation, the through hole 58a of the rod body 58 and the through hole 23b of the dresser shaft 23 are aligned linearly. In this state, the dresser 7 is connected to the dresser shaft 23 by inserting the latch 59 into the through hole 58a of the rod body 58 and the through hole 23b of the dresser shaft 23.

When removing the dresser 7 from the dresser shaft 23, pull out the latch 59 from the through hole 58a of the linearly arranged rod 58 and the through hole 23b of the dresser shaft 23. By this operation, the rod body 58 can be pulled out from the insertion hole 23c.

The rod 58 shown in FIG. 5B has a square cross-sectional shape when viewed from a cross-section perpendicular to the longitudinal direction of the connecting shaft 45a (in this embodiment, the vertical direction). However, the cross-sectional shape of the rod 58 is not limited. The rod body 58 may have a circular cross section, or may have a polygonal cross section such as a triangular shape or a pentagonal shape, although this is not shown in the figure. When the rod body 58 has a polygonal cross-section, the positioning and rotation-stopping effects of the dresser 7 on the dresser shaft 23 can be improved.

Even in this embodiment, the dresser 7 and the dresser shaft 23 can be connected by a simple operation of inserting and pulling out the latch 59 into the through hole 58a of the linearly arranged rod 58 and the through hole 23b of the dresser shaft 23. Take off. As a result, the dresser 7 can be easily attached and detached from the dresser shaft 23 even in a limited space.

As shown in FIG. 5A , the dresser shaft 23 may also have a magnet 29 arranged at the front end of the dresser shaft 23 . The magnet 29 has a ring shape, for example. When connecting the flange 45 to the dresser shaft 23 , the magnet 29 can absorb the connecting shaft 45 a of the flange 45 and fix the flange 45 to the dresser shaft 23 . As a result, the dresser 7 can be mounted to the dresser shaft 23 more easily. The dresser shaft 23 shown in FIGS. 2A, 3A, and 4 may also have a magnet 29 disposed at the front end of the dresser shaft 23 to attract the connecting shaft 45a of the flange 45, but this is not shown.

FIG. 6A is a schematic diagram of a connection device according to another embodiment, and FIG. 6B is a schematic side view of the coupling shown in FIG. 6A . FIG. 6B is equivalent to a side view of the coupling 60 viewed from the direction of line D in FIG. 6A . The fastening structure 50 of the connecting device 40 shown in FIG. 6A is provided with a coupling 60 that connects the connecting shaft 45a of the dresser shaft 23 and the flange 45.

The coupling 60 shown in FIGS. 6A and 6B has: a (first) hole 60c formed in its fixed end 60a and inserted into the fixed rod 23d formed in the front end of the dresser shaft 23; The end 60b opposite to the end 60a is inserted into the (second) hole 60d at the front end of the connecting shaft 45a of the flange 45. In the example shown in FIG. 6A , the fixed end 60 a corresponds to the upper end of the coupling 60 , and the end 60 b forming the hole 60 d corresponds to the lower end of the coupling 60 .

In this embodiment, the coupling 60 has a generally cylindrical shape. Furthermore, the coupling 60 has: a slot 60e extending in its length direction (a direction perpendicular to the radial direction); two fixing screws 62A and 62B for adjusting the upper and lower gaps of the slot 60e; and a fixing screw 62A. , 62B are screwed into the screw holes 63A, 63B respectively. The slot 60e shown in FIG. 6B extends from the upper side to the lower side of the coupling 60. The fixed rod 23d of the dresser shaft 23 is inserted into the hole 60c of the coupling 60. In this state, by screwing one fixing screw 62A into one screw hole 63A, the gap of the slot 60e is reduced, thereby fixing the fixed rod 23d to the fixed end 60a of the coupling 60.

In the illustrated example, the dresser shaft 23 is fixed to the coupling 60 through the slot 60e formed in the coupling 60 and the fixing screw 62A screwed into the screw hole 63A. However, the present embodiment is not limited to this. example. The structure or method for fixing the dresser shaft 23 to the fixed end 60a of the coupling 60 is not limited. For example, the hole portion 60c formed in the fixed end portion 60a of the coupling 60 may be formed as a screw hole, or a threaded hole 60c may be formed on the outer peripheral surface of the fixed rod body 23d of the trimmer shaft 23. Screws.

When connecting the dresser 7 to the dresser shaft 23, first, insert the connecting shaft 45a of the flange 45 into the hole 60d formed in the end 60b of the coupling 60. Then, the fixing screw 62B is rotated (for example, clockwise) to screw into the screw hole 63B, thereby reducing the gap at the lower part of the slot 60e. By this operation, the connecting shaft 45a of the flange 45 is connected to the dresser shaft 23 via the coupling 60, thereby connecting the dresser 7 to the dresser shaft 23.

When removing the dresser 7 from the dresser shaft 23, rotate the fixing screw 62B (for example, counterclockwise) to increase the gap of the slot 60e. By this operation, the connecting shaft 45a of the flange 45 can be pulled out from the hole 60d of the coupling 60.

In this way, even in this embodiment, the dresser 7 can be attached and detached from the dresser shaft 23 by a simple operation of rotating the fixing screw 62B provided on the coupling 60 of the fastening structure 50 . As a result, the dresser 7 can be easily attached and detached from the dresser shaft 23 even in a limited space.

Fig. 7 is a schematic diagram of a connection device according to another embodiment. 8A is a schematic perspective view of the connecting shaft shown in FIG. 7 , FIG. 8B is a top view of the bottom wall of the box shown in FIG. 7 , and FIG. 8C is a bottom view of the bottom wall of the box shown in FIG. 8B . The fastening structure 50 of the connection device 40 shown in FIG. 7 includes: a cylindrical box 65 fixed to the front end of the dresser shaft 23; and a plurality of protrusions from the outer peripheral surface of the connection shaft 45a of the flange 45. (The example shown in the figure is two) engagement protrusions 67 (see also FIG. 8A ); and an elastic body 68 arranged between the box 65 and the flange 45 (the body 45d). The elastic body 68 of this embodiment is a coil spring.

The box body 65 has a bottom wall 65a formed with a through hole for allowing the connecting shaft 45a having the engaging protrusion 67 to pass therethrough. More specifically, as shown in FIGS. 8B and 8C , a through hole 65b through which the connecting shaft 45a can pass is formed in the bottom wall 65a of the box 65; and connected to the through hole 65b, a plurality of engagement protrusions 67 The through grooves 65c can be passed through respectively. Furthermore, a plurality of engaging grooves 65d in which a plurality of engaging protrusions 67 can engage respectively are formed on the inner surface of the bottom wall 65a of the box 65.

When connecting the dresser 7 to the dresser shaft 23, first, resist the restoring force of the elastic body 68 to move the connecting shaft 45a of the flange 45 toward the box 65 (in this embodiment, make it rise), and move the flange 45 The front end of the connecting shaft 45a is inserted into the through hole 65b formed in the bottom wall 65a of the box 65. Next, the position of the engaging protrusion 67 protruding from the outer peripheral surface of the connecting shaft 45a is aligned with the position of the through groove 65c formed in the bottom wall 65a of the box 65, and the connecting shaft 45a is inserted into the internal space of the box 65 to The engaging protrusion 67 passes through the bottom wall 65a of the box 65. As the connecting shaft 45a is inserted into the box 65, the elastic body 68 sandwiched between the box 65 and the flange 45 contracts.

In this state, the flange 45 is rotated to align the position of the engaging protrusion 67 with the position of the engaging groove 65d formed on the inner surface of the bottom wall 65a of the box 65. Furthermore, when the force exerted on the flange 45 against the restoring force of the elastic body 68 is released, the flange 45 (and the connecting shaft 45a) moves (descends in this embodiment), and the engaging protrusion 67 engages with the engaging groove 65d. combine. By this operation, the connecting shaft 45a of the flange 45 is connected to the dresser shaft 23 via the box 65, and as a result, the dresser 7 is connected to the dresser shaft 23.

In addition, when the dresser 7 is connected to the dresser shaft 23 , the elastic body 68 biases the flange 45 in a direction away from the box 65 with a specified restoring force. The spring constant of the elastic body 68 is set so that the restoring force (applying force) exerted by the elastic body 68 on the flange 45 is greater than the pressing force used to press the dresser 7 to the polishing pad 10 during the dressing process. In the illustrated example, the elastic body 68 is a coil spring, but the type of the elastic body 68 is not limited as long as it can apply a specified force to the flange 45 .

When the dresser 7 is removed from the dresser shaft 23, the connecting shaft 45a of the flange 45 is moved against the force exerted by the elastic body 68 on the flange 45 to disengage the engagement protrusion 67 from the engagement groove 65d. Next, the flange 45 is rotated to align the position of the engaging protrusion 67 with the through groove 65c formed in the bottom wall 65a of the box 65. Furthermore, when the force exerted on the flange 45 against the restoring force of the elastic body 68 is released, the flange 45 (and the connecting shaft 45a) moves (descends in this embodiment), and the engaging protrusion 67 passes through the through groove 65c, and can be removed from the flange 45. The box 65 pulls out the connecting shaft 45a of the flange 45.

Next, the rotating body attaching and detaching device for attaching and detaching the rotating body to the rotating shaft via the above-mentioned connecting device will be described.

FIG. 9 is a schematic diagram showing a rotary body attachment and detachment device according to an embodiment. The rotating body attaching and detaching device 70 shown in FIG. 9 is a device used to attach and detach the dresser 7 and the dresser shaft 23 through the connection device 40 shown in FIG. 2A, FIG. 3A, or FIG. 4.

The rotary body attachment and detachment device 70 shown in FIG. 9 is provided with: a support base 71 that supports the dresser 7 of the rotary body; a rotary body moving mechanism 73 connected to the support base 71; and a screw that secures the fastening structure 50 of the connection device 40. The cap 54 is rotated to take off the clamp 75 . The support base 71 has a general disk shape and is connected to the rotating body moving mechanism 73 via the support arm 72 . The support base 71 of this embodiment has a smaller diameter than the dresser 7 .

The rotating body moving mechanism 73 has a lift 80 that can move the support arm 72 up and down. When the elevator 80 is operated, the rotating body moving mechanism 73 can move the dresser shaft 23 up and down via the support arm 72 . For example, the elevator 80 may also be a piston cylinder device that uses fluid pressure to move the piston forward and backward toward the cylinder, or it may be a ball screw device that is a combination of a ball screw and a motor.

Furthermore, as shown in FIG. 9 , the rotating body moving mechanism 73 may further include a horizontal moving device 81 for moving the support arm 72 in the horizontal direction with respect to the dresser shaft 23 . By operating the horizontal moving device 81, the position of the support table 71 relative to the dresser shaft 23 can be adjusted. The horizontal moving device 81 is, for example, a piston cylinder device that moves the support arm 72 forward and backward toward the dresser shaft 23, or a linear motion device such as a ball screw device. In one embodiment, the horizontal moving device 81 may also be a rotating device (for example, a motor) that rotates the support arm 72 in the horizontal direction. Furthermore, the horizontal moving device 81 may also be a combination of the above-mentioned linear moving device and a rotating device.

Fig. 10 is a top view of the attaching and detaching clamp shown in Fig. 9. The take-off jig 75 shown in FIG. 10 has at least three rollers 76A, 76B, and 76C that can contact the outer peripheral surface of the nut 54, and a holder 77 that can rotatably hold the rollers 76A, 76B, and 76C. Each of the rollers 76A, 76B, and 76C is made of, for example, an elastic material such as rubber, or a combination of a wheel (not shown) and an elastic material such as rubber attached to the outer peripheral surface of the wheel. The holder 77 has an opening 77 a into which the nut 54 is inserted when viewed in a cross-section perpendicular to the rotation axes (not shown) of the rollers 76A, 76B, and 76C. The width of the opening 77a is larger than the outer diameter of the nut 54, and the distance between the opposing rollers 76B and 76C is slightly smaller than the outer diameter of the nut 54.

The rotating body attaching and detaching device 70 further includes a motor 78 that rotates one roller 76A among at least three rollers 76A, 76B, and 76C. In the illustrated example, the motor 78 is mounted on the wall portion 77b facing the opening 77a to rotate one roller 76A rotatably mounted on the wall portion 77b. The rotational torque transmitted from the motor 78 to the roller 76A is transmitted to the remaining rollers 76B and 76C via rotation transmission parts such as pulleys, belts, and/or gears (not shown). With this configuration, the rollers 76A, 76B, and 76C can rotate synchronously. In one embodiment, the remaining rollers 76B and 76C may be configured as driven rollers that rotate together with the nut 54 that is rotated by the rotation of the roller 76A.

As shown in FIG. 10 , the rotary body attaching and detaching device 70 further includes a clamp moving device 83 that moves the attaching and detaching clamp 75 forward and backward toward the nut 54 . The clamp moving device 83 is connected to the take-off clamp 75 via the clamp arm 85 .

The rotating body attaching and detaching device 70 is provided outside the polishing device 1 (see FIG. 1 ) and is configured to be accessible to the dresser 7 from the outside of the polishing device 1 . In one embodiment, the rotating body attaching and detaching device 70 can also be provided inside the grinding device 1 . At this time, the rotating body attaching and detaching device may be configured on the upper part of the polishing pad 10 (see FIG. 1 ), and may be configured to be accessible to the dresser 7 separated from the polishing pad 10 , or may be configured to be accessible and movable to the side of the polishing pad 10 Dresser 7 in the withdrawn position.

11A and 11B are schematic diagrams showing the state of detaching the dresser from the dresser shaft using the rotating body attaching and detaching device shown in FIG. 10 . As shown in FIG. 11A , first, the lift 80 and the horizontal moving device 81 of the rotating body moving mechanism 73 are operated, and the dresser 7 is supported on the support base 71 . Next, the clamp moving device 83 is operated to move the take-off clamp 75 toward the nut 54 so that the nut 54 contacts the roller 76A. At this time, since the distance between the remaining rollers 76B and 76C is slightly smaller than the outer diameter of the nut 54, the outer peripheral surface of the nut 54 contacts all the rollers 76A, 76B and 76C. Next, the drive motor 78 rotates the rollers 76A, 76B, and 76C, thereby disengaging the nut 54 from the dresser shaft 23 .

Next, as shown in FIG. 11B , the elevator 80 is operated to move the support table 71 together with the dresser 7 , and the connecting shaft 45 a mounted on the flange 45 of the dresser 7 is pulled out from the dresser shaft 23 . By these actions, the dresser 7 of the rotating body can be detached from the dresser shaft 23 of the rotating shaft.

When the dresser 7 is installed on the dresser shaft 23, the dresser 7 is supported on the support base 71. In this state, the connecting shaft 45a mounted on the flange 45 of the dresser 7 is inserted into the dresser shaft 23. Next, the drive motor 78 rotates the rollers 76A, 76B, and 76C to tighten the nut 54 on the dresser shaft 23 until the tightening torque between the nut 54 and the dresser shaft 23 reaches a specified value. Through these actions, the dresser 7 of the rotating body can be installed on the dresser shaft 23 of the rotating shaft.

FIG. 12 is a schematic diagram showing a rotating body attachment and detachment device according to another embodiment. The rotating body attaching and detaching device 70 shown in FIG. 12 is a device used to attach and detach the dresser 7 and the dresser shaft 23 via the connecting device 40 shown in FIG. 5A .

The rotary body attaching and detaching device 70 shown in FIG. 12 is provided with: a support base 71 that supports the dresser 7 of the rotary body; a rotary body moving mechanism 73 connected to the support base 71; and a latch for fastening the fastening structure 50 of the connection device 40. 59 is a latch insertion device 86 for advancing and retracting the through hole 58a of the linearly arranged rod body 58 and the through hole 23b of the dresser shaft 23.

As shown in FIG. 12 , the latch insertion device 86 is provided with: a pair of holding arms 90 capable of holding the latch 59; a latch insertion lever 87; a motor 88 that rotates the latch insertion lever 87; and a latch that moves the latch insertion lever 87 forward and backward. Mobile device89. In this embodiment, a screw hole is formed at one end of the latch 59, and a screw that can be screwed into the screw hole formed in the latch 59 is formed at the front end of the latch insertion rod 87. The latch moving device 89 can also be a piston cylinder device that uses fluid pressure to move the piston forward and backward toward the cylinder, or it can be a ball screw device that is a combination of a ball screw and a motor.

13A and 13B are schematic diagrams showing the state of detaching the dresser from the dresser shaft using the rotating body attachment and detachment device shown in FIG. 12 . As shown in FIG. 13A , first, the lift 80 and the horizontal moving device 81 of the rotating body moving mechanism 73 are operated, and the dresser 7 is supported on the support base 71 . Next, the latch moving device 89 of the latch insertion device 86 is operated so that the latch insertion rod 87 contacts the end of the latch 59. Furthermore, the motor 88 is rotated to screw the front end of the latch insertion rod 87 into the end of the latch 59.

Next, as shown in FIG. 13B , the latch moving device 89 of the latch insertion device 86 is operated to pull out the latch 59 from the through hole 58 a of the linearly arranged rod body 58 and the through hole 23 b of the trimmer shaft 23 , and then A pair of holding arms 90 hold the latch 59 . Next, the elevator 80 is operated to move the support table 71 together with the dresser 7 , and the connecting shaft 45 a mounted on the flange 45 of the dresser 7 is pulled out from the dresser shaft 23 . By these actions, the dresser 7 of the rotating body can be detached from the dresser shaft 23 of the rotating shaft.

When the dresser 7 is installed on the dresser shaft 23, the dresser 7 is supported on the support base 71. In this state, the rod 58 formed at the front end of the connecting shaft 45a of the flange 45 is inserted into the dresser shaft 23. Next, the latch moving device 89 of the latch inserting device 86 is operated, and the latch 59 is inserted into the through hole 58a of the linearly arranged rod body 58 and the through hole 23b of the dresser shaft 23.

Next, as shown in FIG. 14 , the elevator 80 is operated to separate the support table 71 from the dresser 7 . In the state shown in FIG. 14 , the weight of the dresser 7 and the flange 45 prevents the rotation of the pin 59 inserted into the through hole 58 a of the rod body 58 and the through hole 23 b of the dresser shaft 23 . In this state, the motor 88 is rotated to disengage the distal end of the latch 59 from the front end of the latch insertion lever 87 . Next, the latch moving device 89 of the latch inserting device 86 is operated to retract the latch insertion lever 87 from the latch 59 . Through these actions, the dresser 7 of the rotating body can be installed on the dresser shaft 23 of the rotating shaft.

FIG. 15 is a schematic diagram showing a rotating body attachment and detachment device according to another embodiment. The rotating body attaching and detaching device 70 shown in FIG. 15 is a device used to attach and detach the dresser 7 and the dresser shaft 23 via the connecting device 40 shown in FIG. 6A .

The rotating body attaching and detaching device 70 shown in FIG. 15 is provided with: a support base 71 that supports the dresser 7 of the rotating body; a rotating body moving mechanism 73 connected to the supporting base 71; and a fastening structure 50 for fixing the connecting device 40. The screw rotating device 93 rotates the screw 62B (refer to FIG. 6A).

As shown in FIG. 15 , the screw rotating device 93 includes a driver (torque driver) 94 that can engage with the head of the set screw 62B; a motor 96 that rotates the driver 94; and a driver moving device 95 that moves the driver 94 forward and backward. The driver moving device 95 may also be a piston cylinder device that uses fluid pressure to move the piston forward and backward toward the cylinder, or it may be a ball screw device that is a combination of a ball screw and a motor.

16A and 16B are schematic diagrams showing the state of detaching the dresser from the dresser shaft using the rotating body attaching and detaching device shown in FIG. 15 . As shown in FIG. 16A , first, the lift 80 and the horizontal moving device 81 of the rotating body moving mechanism 73 are operated, and the dresser 7 is supported on the support base 71 . Next, the driver moving device 95 of the screw rotating device 93 is operated to engage the driver 94 with the head of the fixing screw 62B. Furthermore, the motor 88 is rotated to rotate the driver 94. By this action, the engagement between the fixing screw 62B and the screw hole 63B is loosened, and the gap in the slot 60e (see FIG. 6B ) increases. As a result, as shown in FIG. 16B , since the connecting shaft 45 a of the flange 45 can be pulled out from the coupling 60 , the dresser 7 of the rotating body can be detached from the dresser shaft 23 of the rotating shaft.

When installing the dresser 7 to the dresser shaft 23, support the dresser 7 on the support platform 71. In this state, insert the connecting shaft 45a of the flange 45 into the coupling 60 that fixes the front end of the dresser shaft 23. Next, the driver moving device 95 of the screw rotating device 93 is operated to engage the driver 94 with the head of the fixing screw 62B. Furthermore, the motor 88 is rotated and the driver 94 is rotated to screw the fixing screw 62B in. Screw hole 63B. By this operation, the gap of the groove 60e (refer to FIG. 6B) is reduced, and the connecting shaft 45a is held by the coupling 60. As a result, the dresser 7 of the rotating body can be mounted to the dresser shaft 23 of the rotating shaft.

FIG. 17 is a schematic diagram showing a rotating body attachment and detachment device according to another embodiment. The rotating body attaching and detaching device 70 shown in FIG. 17 is a device for attaching and detaching the dresser 7 and the dresser shaft 23 via the connecting device 40 shown in FIG. 7(a) .

The rotating body attachment and detachment device 70 shown in FIG. 17 includes a support base 71 that supports the dresser 7 of the rotating body, and a rotating body moving mechanism 73 connected to the support base 71.

The rotating body moving mechanism 73 shown in FIG. 17 is provided with a rotating device (for example, a motor) 98 that rotates the supporting table 71 in addition to the elevator 80 that can move the supporting arm 72 up and down. Therefore, the rotating body moving mechanism 73 can not only move the dresser 7 supported by the support table 71 and the flange 45 attached to the dresser 7 up and down, but also rotate them.

18A and 18B are schematic diagrams showing the state of detaching the dresser from the dresser shaft using the rotating body attaching and detaching device shown in FIG. 17 . As shown in FIG. 18A , first, the elevator 80 of the rotating body moving mechanism 73 is operated to support the dresser 7 on the support base 71 . Next, the rotating device 98 of the rotating body moving mechanism 73 is operated to rotate the support base 71 until the engaging protrusion 67 formed on the outer peripheral surface of the connecting shaft 45a of the flange 45 is located above the through groove 65c of the box 65. Next, the elevator 80 of the rotating body moving mechanism 73 is operated, and the connecting shaft 45a of the flange 45 is pulled out from the box 65. By these actions, the dresser 7 of the rotating body can be detached from the dresser shaft 23 of the rotating shaft.

The embodiments of the connecting device 40 and the rotating body attaching and detaching device 70 that connect the dresser 7 to the dresser shaft 23 have been described above. However, the connecting device 40 and the rotating body attaching and detaching device 70 of these embodiments can also be used for connection. The grinding head 5 of the rotating body reaches the head shaft 14 of the rotating shaft.

The above-mentioned embodiments are described so that a person having ordinary knowledge in the technical field to which the present invention belongs can implement the present invention. Of course, those skilled in the art can form various variations of the above embodiments, and the technical ideas of the present invention can also be applied to other embodiments. Therefore, the present invention is not limited to the described embodiments, but is to be construed in the broadest scope of the technical ideas defined by the patent claims. [Industrial availability]

The present invention can be used in a connecting device for connecting a rotating body of a grinding head, a dresser, etc. to a rotating shaft. Furthermore, the present invention can be applied to a take-off device of a rotating body connected to a rotating shaft via the connecting device.

1:Grinding device 2: Dressing device 3:Grinding table 3a:Table axis 5: Grinding head (rotating body) 6: Grinding fluid supply nozzle 7: Dresser (rotating body) 7a: Dressing surface 10: Polishing pad 10a: grinding surface 11: Motor 14: Head shaft (rotary axis) 20:Support platform 23: Dresser shaft (rotary axis) 23a: Insertion groove 23b:Through hole 24:Air cylinder 25:Pillar 27: Dresser arm 28: Rotary axis 29:Magnet 40:Connection device 45:Flange 45a:Connecting shaft 45b:shoulder 45c: Tapered part 45d: Ontology 50: Fastening structure 51: Insertion hole 53:Collet 53a: Grooving 53b: Split body 53c: Tapered part 54: Nut 54a, 54b: Contact surface 56:Protrusion 58: Rod body 58a:Through hole 59:Latch 60:Coupling 60a: Upper end (fixed end) 60b: end 60c: (first) hole part 60d: (Second) hole part 60e: Grooving 62A, 60B: Fixing screws 63A, 63B: screw holes 65: Cabinet 65a: Bottom wall 65b:Through hole 65c:Through the trench 65d: meshing groove 67: Engagement protrusion 68: Elastomer 70: Rotating body attachment and detachment device 71:Support platform 72:Support arm 73: Rotating body moving mechanism 75: On and off clamp 76A, 76B, 76C: roller 77:Retainer 77a: Open your mouth 77b: wall 78:Motor 80: Lift 81: Horizontal moving device 83: Fixture moving device 85: Clamp arm 86:Latch insertion device 87:Latch insertion rod 88: Motor 89:Latch moving device 90: Grip support arm 93:Screw rotation device 94: drive 95:Drive mobile device 96: Motor 98: Rotating device (motor)

FIG. 1 is a perspective view schematically showing an example of a grinding device. FIG. 2A is a schematic diagram showing a connection device according to an embodiment. Figure 2B is a cross-sectional view along line A-A in Figure 2A. FIG. 3A is a schematic diagram of a connection device according to another embodiment. Figure 3B is a cross-sectional view along line B-B of Figure 3A. FIG. 4 is a schematic diagram showing a variation of the connecting device shown in FIG. 3A. FIG. 5A is a schematic diagram of a connection device according to another embodiment. Figure 5B is a cross-sectional view along line CC of Figure 5A. FIG. 6A is a schematic diagram of a connection device according to another embodiment. Figure 6B is a schematic side view of the coupling shown in Figure 6A. Fig. 7 is a schematic diagram of a connection device according to another embodiment. FIG. 8A is a schematic perspective view of the connecting shaft shown in FIG. 7 . FIG. 8B is a top view of the bottom wall of the box shown in FIG. 7 . Figure 8C is a bottom view of the bottom wall of the box shown in Figure 8B. FIG. 9 is a schematic diagram showing a rotary body attachment and detachment device according to an embodiment. Fig. 10 is a top view of the attaching and detaching clamp shown in Fig. 9. FIG. 11A is a schematic diagram showing the state of detaching the dresser from the dresser shaft using the rotating body attachment and detachment device shown in FIG. 10 . FIG. 11B is a schematic diagram showing the state of detaching the dresser from the dresser shaft using the rotating body attachment and detachment device shown in FIG. 10 . FIG. 12 is a schematic diagram showing a rotating body attachment and detachment device according to another embodiment. FIG. 13A is a schematic diagram showing the state of detaching the dresser from the dresser shaft using the rotating body attachment and detachment device shown in FIG. 12 . FIG. 13B is a schematic diagram showing the state of detaching the dresser from the dresser shaft using the rotating body attachment and detachment device shown in FIG. 12 . FIG. 14 is a schematic view showing a situation in which the dresser is attached to the dresser shaft using the rotating body attaching and detaching device shown in FIG. 12 . FIG. 15 is a schematic diagram showing a rotating body attachment and detachment device according to another embodiment. FIG. 16A is a schematic diagram showing the state of detaching the dresser from the dresser shaft using the rotating body attachment and detachment device shown in FIG. 15 . FIG. 16B is a schematic diagram showing the state of detaching the dresser from the dresser shaft using the rotating body attachment and detachment device shown in FIG. 15 . FIG. 17 is a schematic diagram showing a rotating body attachment and detachment device according to another embodiment. FIG. 18A is a schematic diagram showing the state of detaching the dresser from the dresser shaft using the rotating body attaching and detaching device shown in FIG. 17 . FIG. 18B is a schematic diagram showing the state of detaching the dresser from the dresser shaft using the rotating body attachment and detachment device shown in FIG. 17 .

7: Dresser

23: Dresser shaft

40:Connection device

45:Flange

45a:Connecting shaft

50: Fastening structure

51: Insertion hole

53:Collet

53b: Split body

53c: Tapered part

54: Nut

54a: Contact surface

Claims (12)

A connecting device used to connect the rotating body to the rotating shaft, and has: A flange, which is mounted to the aforementioned rotating body and has a connecting shaft; and A fastening structure fastens the rotating body to the rotating shaft via the connecting shaft. The connecting device of claim 1, wherein the aforementioned fastening structure has: An insertion hole is formed on the aforementioned rotating shaft and is inserted into the aforementioned connecting shaft; A collet, which is coaxially arranged in the aforementioned insertion hole and has a tapered portion formed at the front end; and The nut has a contact surface corresponding to the tapered portion of the collet, and is threaded with the rotating shaft in a state where the connecting shaft is inserted. The connecting device of claim 1, wherein the aforementioned fastening structure has: An insertion groove is formed on the aforementioned axis of rotation; A protrusion formed on the front end of the aforementioned connecting shaft and inserted into the aforementioned insertion groove; and A nut, which is screwed with the aforementioned rotating shaft in a state where the aforementioned connecting shaft is inserted; The connecting shaft is formed with a shoulder that supports the front end of the rotating shaft, The lower surface of the aforementioned shoulder forms a tapered surface, The nut has a shape corresponding to the tapered surface, and is formed with a contact surface that contacts the tapered surface. The connecting device of claim 1, wherein the aforementioned fastening structure has: A rod body formed at the front end of the aforementioned connecting shaft; An insertion hole is formed on the rotation axis corresponding to the shape of the rod body and is inserted into the rod body; A first through hole is formed in the aforementioned rod body; A second through hole formed on the rotation shaft corresponding to the first through hole of the rod body before being inserted into the insertion hole; and A latch is inserted into the first through hole and the second through hole. The connecting device of claim 4, wherein the rod body has a polygonal cross-section when viewed from a cross-section perpendicular to the length direction of the connecting axis. The connecting device according to any one of claims 2 to 5, wherein the rotating shaft has a magnet, and the magnet faces the rotating shaft and attracts the connecting shaft. The connection device of claim 1, wherein the fastening structure includes: a fixed end fixed to the front end of the rotating shaft; and a coupling having an end portion inserted into the end opposite to the fixed end. The hole of the connecting shaft; The aforementioned coupling has: A slot is formed in the hole and extends in the insertion direction of the connecting shaft; Fixing screws, which are used to adjust the gap size of the aforementioned slots; and Screw hole, which is screwed into the aforementioned fixing screw. The connecting device of claim 1, wherein the aforementioned fastening structure has: The box is fixed to the front end of the aforementioned rotating shaft; A plurality of engaging protrusions protruding from the outer peripheral surface of the aforementioned connecting shaft; and An elastic body is arranged between the aforementioned box and the aforementioned flange, and applies force to the aforementioned flange in a direction away from the aforementioned box; The bottom wall of the aforementioned box has: A through hole through which the aforementioned connecting shaft can pass; A plurality of through grooves are connected to the aforementioned through holes, and the aforementioned plurality of engaging protrusions can pass through respectively; and An engaging groove is formed on the inner surface of the aforementioned bottom wall, and the aforementioned plurality of engaging protrusions can engage with each other respectively. A rotating body attachment and detachment device, which is used to attach and detach the rotating body from the rotating shaft through the fastening structure of claim 2 or 3, and has: A support platform that supports the aforementioned rotating body; A rotating body moving mechanism, which is connected to the aforementioned support platform and moves the aforementioned connecting shaft to the aforementioned rotating shaft; An attachment and detachment fixture, which is provided with at least three rollers contacting the outer peripheral surface of the nut in order to rotate the nut; A motor that rotates at least one of the aforementioned three rollers; and A clamp moving device is used to move the attaching and detaching clamp forward and backward toward the rotating body. A rotating body attachment and detachment device is used to attach and detach the rotating body from the rotating shaft through the fastening structure of claim 4, and has: A support platform that supports the aforementioned rotating body; A rotating body moving mechanism, which is connected to the aforementioned support platform and allows the aforementioned connecting shaft to move toward the aforementioned rotating shaft; and A latch insertion device is configured to insert the latch into the first through hole and the second through hole. A rotating body attachment and detachment device is used to attach and detach the rotating body from the rotating shaft through the fastening structure of claim 7, and has: A support platform that supports the aforementioned rotating body; A rotating body moving mechanism, which is connected to the aforementioned support platform and allows the aforementioned connecting shaft to move toward the aforementioned rotating shaft; and A screw rotating device is used to rotate the aforementioned fixing screw. A rotating body attachment and detachment device is used to attach and detach the rotating body from the rotating shaft through the fastening structure of claim 8, and has: A support platform that supports the aforementioned rotating body; and A rotating body moving mechanism is connected to the support platform and moves and rotates the connecting shaft relative to the rotating shaft.