JP2022079151A

JP2022079151A - Double-side polishing device

Info

Publication number: JP2022079151A
Application number: JP2020190151A
Authority: JP
Inventors: 孝雄飯濱; Takao Iihama
Original assignee: Taiyo Co Ltd
Current assignee: Taiyo Co Ltd
Priority date: 2020-11-16
Filing date: 2020-11-16
Publication date: 2022-05-26
Anticipated expiration: 2040-11-16
Also published as: JP7405430B2

Abstract

To provide a double-side polishing device that suppresses the generation of burring and a wear at a tooth portion of a carrier, and facilitates maintenance.SOLUTION: In a double-side polishing device 1 polishing both sides of work 6, tooth portions 11H, 12H of a sun gear 11 and/or an internal gear 12 is equipped with a pin 21 that has a male screw portion detachably screwed with an outer peripheral portion 18 and an inner peripheral portion 19 at a tip end, cylindrical collars 41 and 42 detachably and externally fitted on a base end side of the pin 21 and engaged with the carrier 7, and retaining portions 55 and 55A that prevent the collars 41 and 42 from coming off from the pin 21. Since the carrier 7 engages with the collars 41 and 42, a wear of a tooth portion 9 of the carrier 7 can be suppressed. By removing the retaining portions 55 and 55A, the collars 41 and 42 are removed from the pin 21 and the collars 41 and 42 can be exchanged. Furthermore, if necessary, the pin 21 is removed from the outer peripheral portion 18 and the inner peripheral portion 19 to exchange the pin 21.SELECTED DRAWING: Figure 1

Description

本発明は、キャリアによって保持されたワークを、研磨用の上，下定盤を回転させると共に、キャリアを自転及び公転させてワークの表面を加工する両面研磨装置に関するものである。 The present invention relates to a double-sided polishing device for processing the surface of a work held by a carrier by rotating the upper and lower platens for polishing and rotating and revolving the carrier.

従来、この種のものとして、図１４～図１５に示すように、上定盤１０１と、この上定盤１０１に対向して同軸状に設けられる下定盤１０２と、これら上定盤１０１と下定盤１０２の間に同軸状に配置されるサンギア１０３及びインターナルギア１０４と、サンギア１０３及びインターナルギア１０４との間に介在して自転及び公転するワーク１０５の保持孔１０６を有するキャリア１０７とを備え、前記上定盤１０１の下面に環状をなす下側研磨具（研磨布や砥石など）を設け、この下側研磨具に対向して前記下定盤１０２の上面に環状の上側研磨具を設け、これら上定盤１０１、下定盤１０２、サンギア１０３、インターナルギア１０４は、それぞれの駆動用モータ１０８，１０９，１１０，１１１によって回転駆動され、前記上定盤１０１には下面に開口したノズルからなる流体出口１１２が設けられた両面研磨装置（例えば特許文献１及び２）がある。 Conventionally, as shown in FIGS. 14 to 15, the upper surface plate 101, the lower surface plate 102 coaxially provided facing the upper surface plate 101, and these upper surface plates 101 and the lower surface plate 101 are conventionally used. It is provided with a sun gear 103 and an internal gear 104 coaxially arranged between the plates 102, and a carrier 107 having a holding hole 106 of a work 105 that rotates and revolves between the sun gear 103 and the internal gear 104. An annular lower polishing tool (polishing cloth, grindstone, etc.) is provided on the lower surface of the upper surface plate 101, and an annular upper polishing tool is provided on the upper surface of the lower surface plate 102 facing the lower surface plate. The upper surface plate 101, the lower surface plate 102, the sun gear 103, and the internal gear 104 are rotationally driven by the respective drive motors 108, 109, 110, 111, and the upper surface plate 101 has a fluid outlet including a nozzle opened on the lower surface. There is a double-sided polishing device provided with 112 (for example, Patent Documents 1 and 2).

上記従来の両面研磨装置においては、駆動用モータ１０８，１０９，１１０，１１１で上定盤１０１、下定盤１０２、サンギア１０３及びインターナルギア１０４を回転させると、キャリア１０７は自転運動をしながらサンギア１０３の回りを公転する遊星運動を起こして、さらに、スラリーなどと称する研磨剤の液が流体出口１１２より供給されることでキャリア１０７に保持された磁気ディスク基板などのワーク１０５の両面が上定盤１０１と下定盤１０２により研磨される。 In the conventional double-sided polishing apparatus, when the upper platen 101, the lower platen 102, the sun gear 103 and the internal gear 104 are rotated by the drive motors 108, 109, 110, 111, the carrier 107 rotates while rotating the sun gear 103. Both sides of the work 105 such as the magnetic disk substrate held by the carrier 107 are formed on the upper platen by causing a planetary motion that revolves around the surface and further, a liquid of a polishing agent called a slurry or the like is supplied from the fluid outlet 112. It is polished by 101 and the lower platen 102.

尚、公知ではないが、インターナルギア１０４の駆動用モータ１１１を駆動せずに、インターナルギア１０４を固定した状態で他の駆動用モータ１０８，１０９，１１０を駆動して研磨したり、インターナルギア１０４の駆動用モータ１１１を設けずに、インターナルギア１０４を固定した状態で他の駆動用モータ１０８，１０９，１１０を駆動して研磨したりすることもできる。 Although it is not known, the internal gear 104 may be driven and polished by driving other drive motors 108, 109, 110 with the internal gear 104 fixed without driving the drive motor 111 of the internal gear 104, or the internal gear 104. It is also possible to drive and polish other drive motors 108, 109, 110 with the internal gear 104 fixed without providing the drive motor 111.

特開２００７－７７４８号公報Japanese Unexamined Patent Publication No. 2007-7748 特開２０１０－１７９３９８号公報Japanese Unexamined Patent Publication No. 2010-179398

近年、磁気ディスク基板の薄型化が図られ、例えば厚さ０．５ｍｍの磁気ディスク基板を保持するキャリアには、磁気ディスク基板より薄い０．３～０．４ｍｍ程度の厚さのものを用いる必要がある。このため例えばキャリアの厚さが従来の厚さの１／２になると、ギアからキャリアの歯部に加わる圧力が２倍に増加する。このようにキャリアの薄型化により、歯部に加わる圧力も増加し、従来のインボリュートなどの歯車では、歯部の端面に厚さ方向（上下方向）のバリが発生し易くなり、このバリが研磨布を傷付け、また、歯部の摩耗が激しく、摩耗により発生したキャリアの磨耗くずが、研磨布などを傷付けるため、頻繁にキャリアと研磨布を交換する必要があると共に、磨耗くずを除去するために手間が掛かるという問題がある。 In recent years, the thickness of the magnetic disk substrate has been reduced. For example, as a carrier for holding a magnetic disk substrate having a thickness of 0.5 mm, it is necessary to use a carrier having a thickness of about 0.3 to 0.4 mm, which is thinner than the magnetic disk substrate. There is. Therefore, for example, when the thickness of the carrier is halved from the conventional thickness, the pressure applied from the gear to the tooth portion of the carrier doubles. As the carrier becomes thinner in this way, the pressure applied to the tooth portion also increases, and with conventional gears such as involutes, burrs in the thickness direction (vertical direction) are more likely to occur on the end face of the tooth portion, and these burrs are polished. In addition to damaging the cloth, the wear of the teeth is severe, and the wear debris of the carrier generated by the wear damages the polishing cloth, etc., so it is necessary to replace the carrier and the polishing cloth frequently, and to remove the wear debris. There is a problem that it takes time and effort.

また、従来のサンギア及びインターナルギアでは、歯部のみの交換が難しく、使用するキャリアや研磨条件などにより、最適な材質の歯部を選択して使用するこができなかった。 Further, in the conventional sun gear and internal gear, it is difficult to replace only the tooth portion, and it is not possible to select and use the tooth portion made of the optimum material depending on the carrier to be used and the polishing conditions.

そこで、本発明は上記した問題点に鑑み、キャリアの歯部のバリの発生と磨耗を抑え、メンテナンスが容易な両面研磨装置を提供することを目的とする。 Therefore, in view of the above-mentioned problems, it is an object of the present invention to provide a double-sided polishing apparatus that suppresses the generation and wear of burrs on the tooth portions of the carrier and is easy to maintain.

前記目的を達成するために、請求項１の発明は、下側研磨具を備えた下定盤の上に配置された複数のキャリアの複数の保持孔にワークを保持し、それぞれの前記キャリアに噛み合うサンギアと、前記サンギアの外方に配置されてそれぞれ前記キャリアに噛み合うインターナルギアの少なくとも一方を回転させた状態で、前記下定盤とこれに対向した上側研磨具を備えた上定盤とを回転させることにより、前記ワークの両面を研磨加工する両面研磨装置において、前記サンギアは歯部取付部に複数の歯部を備えると共に、前記インターナルギアは歯部取付部に複数の歯部を備え、前記サンギア及び／又は前記インターナルギアの歯部は、前記歯部取付部に着脱可能に螺合する雄螺子部を先端に有するピンと、このピンの基端側に着脱可能に外装され前記キャリアに噛み合う筒状のカラーと、前記カラーの前記ピンからの抜け出しを防止する抜け止め部材とを備えることを特徴とする。 In order to achieve the above object, the invention of claim 1 holds a work in a plurality of holding holes of a plurality of carriers arranged on a lower platen provided with a lower polishing tool and meshes with the respective carriers. With the sun gear and at least one of the internal gears arranged outside the sun gear and meshing with the carrier rotated, the lower platen and the upper platen provided with the upper polishing tool facing the sun gear are rotated. Thereby, in the double-sided polishing device for polishing both sides of the work, the sun gear has a plurality of tooth portions on the tooth portion mounting portion, and the internal gear has a plurality of tooth portions on the tooth portion mounting portion. And / or the tooth portion of the internal gear is a pin having a male screw portion at the tip that is detachably screwed to the tooth portion mounting portion, and a tubular shape that is detachably attached to the base end side of the pin and meshes with the carrier. The collar is provided with a retaining member for preventing the collar from coming out of the pin.

請求項２の発明は、前記ピンに前記カラーが回動可能に外装され、前記抜け止め部材は複数の前記ピンからの複数の前記カラーの抜け出しを防止すると共に、前記歯部取付部に着脱可能に設けられていることを特徴とする。 According to the second aspect of the present invention, the collar is rotatably mounted on the pin, and the retaining member prevents the collar from coming out from the plurality of pins and is removable from the tooth portion mounting portion. It is characterized by being provided in.

請求項３の発明は、前記歯部取付部に設けた平面に前記ピンを立設し、前記抜け止め部材は、前記ピンの上端に着脱可能に螺合し、前記カラーに圧接して該カラーを回り止め状態とするネジであることを特徴とする。 According to the third aspect of the present invention, the pin is erected on a flat surface provided on the tooth portion mounting portion, and the retaining member is detachably screwed to the upper end of the pin and pressed against the collar to bring the collar. It is characterized by being a screw that prevents rotation.

請求項４の発明は、前記歯部取付部に設けた平面に前記ピンを立設し、前記抜け止め部材は、前記ピンの上端に着脱可能に螺合し、前記ピンに回動可能に設けた前記カラーの抜け出しを防止するネジであることを特徴とする。 In the invention of claim 4, the pin is erected on a flat surface provided on the tooth portion mounting portion, and the retaining member is detachably screwed to the upper end of the pin and rotatably provided on the pin. It is characterized by being a screw that prevents the collar from coming off.

請求項５の発明は、前記ピンは、前記カラーを外装するピン本体と、このピン本体の先端に設けられた前記雄螺子部と、前記ピン本体と前記雄螺子部との間に設けられた下向き当接面とを備え、前記歯部取付部に取付孔を設け、この取付孔は、前記ピン本体の下部を挿入するピン本体用孔部と、このピン本体用孔部の先端側に設けられ、前記雄螺子部が螺合する雌螺子孔部と、前記ピン本体用孔部と前記雌螺子孔部との間に設けられ、前記下向き当接面が当接する上向き受面とを備えることを特徴とする。 In the invention of claim 5, the pin is provided between the pin body that exteriors the collar, the male screw portion provided at the tip of the pin body, and between the pin body and the male screw portion. A downward contact surface is provided, and a mounting hole is provided in the tooth portion mounting portion, and the mounting hole is provided in the pin body hole for inserting the lower portion of the pin body and the tip end side of the pin body hole. It is provided with a female screw hole portion into which the male screw portion is screwed, and an upward receiving surface provided between the pin body hole portion and the female screw hole portion and with which the downward contact surface abuts. It is characterized by.

請求項１の発明によれば、キャリアがカラーに噛み合うため、キャリアの歯部のバリの発生と磨耗を抑えることができる。また、抜け止め部材を外すことにより、ピンからカラーを外し、カラーを交換することができ、さらに、必要な場合は、歯部取付部からピンを外し、ピンを交換することもできる。 According to the first aspect of the present invention, since the carrier meshes with the collar, it is possible to suppress the generation and wear of burrs on the tooth portions of the carrier. Further, by removing the retaining member, the collar can be removed from the pin and the collar can be replaced, and if necessary, the pin can be removed from the tooth attachment portion and the pin can be replaced.

請求項２の発明によれば、カラーが回動するため、一層、キャリアの歯部のバリの発生と磨耗を抑えることができる。また、抜け止め部材により複数のカラーの抜け止めを行うため、複数のカラーの交換作業が容易となる。 According to the second aspect of the present invention, since the collar rotates, it is possible to further suppress the generation and wear of burrs on the tooth portions of the carrier. In addition, since the retaining member prevents the plurality of collars from coming off, it becomes easy to replace the plurality of collars.

請求項３の発明によれば、歯部取付部に設けた平面にピンを立設したから、カラーや平面に付着した磨耗くずの除去掃除を簡便に行うことができる。また、抜け止め部材がネジであるから、隣り合うピンの上部に跨る部材がなく、掃除を容易に行うことができる。さらに、ネジをカラーに圧接することにより、回り止め状態でカラーの抜け出しを防止できる。 According to the third aspect of the present invention, since the pin is erected on the flat surface provided on the tooth portion mounting portion, it is possible to easily remove and clean the collar and the wear debris adhering to the flat surface. Further, since the retaining member is a screw, there is no member straddling the upper part of the adjacent pin, and cleaning can be easily performed. Further, by pressing the screw against the collar, it is possible to prevent the collar from coming off in a non-rotating state.

請求項４の発明によれば、歯部取付部に設けた平面にピンを立設したから、カラーや平面に付着した磨耗くずの除去掃除を簡便に行うことができる。また、抜け止め部材がネジであるから、隣り合うピンの上部に跨る部材がなく、掃除を容易に行うことができる。さらに、カラーが回動するため、一層、キャリアの歯部のバリの発生と磨耗を抑えることができる。 According to the fourth aspect of the present invention, since the pin is erected on the flat surface provided on the tooth portion mounting portion, it is possible to easily remove and clean the collar and the wear debris adhering to the flat surface. Further, since the retaining member is a screw, there is no member straddling the upper part of the adjacent pin, and cleaning can be easily performed. Further, since the collar rotates, it is possible to further suppress the generation and wear of burrs on the tooth portions of the carrier.

請求項５の発明によれば、取付孔の雌螺子孔部にピンの雄螺子部を螺合し、上向き受面に下向き当接面が当接することより、ピンの高さ位置が定められると共に、ピン本体の下部が所定寸法だけピン本体用孔部に挿入されるため、取付強度が確保された状態で、歯部取付部に複数のピンの高さ位置を合わせて正確に取り付けることができる。このためピンを取り外した後、再び取り付ける際や、交換する際に、ピンの高さ位置を正確に取り付けることがきる。 According to the fifth aspect of the present invention, the male screw portion of the pin is screwed into the female screw hole portion of the mounting hole, and the downward contact surface abuts on the upward receiving surface, whereby the height position of the pin is determined. Since the lower part of the pin body is inserted into the hole for the pin body by a predetermined dimension, it is possible to accurately mount the pin body by aligning the height positions of multiple pins with the tooth mounting part while the mounting strength is secured. .. Therefore, after removing the pin, the height position of the pin can be accurately attached when reattaching or replacing the pin.

本発明の実施例１を示す上定盤の要部の平面図である。It is a top view of the main part of the upper surface plate which shows Example 1 of this invention. 同上、装置の要部の縦断面図である。Same as above, it is a vertical sectional view of a main part of the apparatus. 同上、ピンを示し、図３（Ａ）は正面図、図３（Ｂ）は平面図である。Same as above, the pins are shown, FIG. 3 (A) is a front view, and FIG. 3 (B) is a plan view. 同上、サンギアの要部の断面図である。Same as above, it is a cross-sectional view of a main part of Sun Gear. 同上、ピンを取り外した状態のサンギアの要部の断面図である。Same as above, it is a cross-sectional view of a main part of the sun gear with the pin removed. 同上、サンギアの要部の平面図である。Same as above, it is a plan view of the main part of the sun gear. 同上、インターナルギアの要部の断面図である。Same as above, it is a cross-sectional view of a main part of the internal gear. 本発明の実施例２を示す上定盤の要部の平面図である。It is a top view of the main part of the upper surface plate which shows Example 2 of this invention. 同上、下定盤の縦断面図である。Same as above, it is a vertical sectional view of the lower platen. 同上、サンギアの要部の断面図である。Same as above, it is a cross-sectional view of a main part of Sun Gear. 同上、サンギアの要部の平面図である。Same as above, it is a plan view of the main part of the sun gear. 同上、インターナルギアの要部の断面図である。Same as above, it is a cross-sectional view of a main part of the internal gear. 本発明の実施例３を示す歯部周りの断面図である。It is sectional drawing around the tooth part which shows Example 3 of this invention. 従来技術を示す斜視図である。It is a perspective view which shows the prior art. 同上、要部の断面図である。Same as above, it is a cross-sectional view of a main part.

本発明における好適な実施の形態について、添付図面を参照して説明する。 Preferred embodiments of the present invention will be described with reference to the accompanying drawings.

図１～図７は本発明の実施例１を示し、両面研磨装置１は、図２，図４及び図７などに示すように、下側研磨具たる研磨布２が上面３Ｕに貼着された研磨用の下定盤３と、上側研磨具たる研磨布４が下面５Ｋに貼着され、下定盤３と同軸状な研磨用の上定盤５とを備えている。 1 to 7 show the first embodiment of the present invention, and in the double-sided polishing apparatus 1, as shown in FIGS. 2, 4 and 7, a polishing cloth 2 as a lower polishing tool is attached to the upper surface 3U. A lower surface plate 3 for polishing and a polishing cloth 4 as an upper polishing tool are attached to the lower surface 5K, and are provided with an upper surface plate 5 for polishing coaxial with the lower surface plate 3.

図１などに示すように、前記下定盤３の上面３Ｕ上には、複数のワーク６を保持するためのキャリア７が載置されており、このキャリア７にはワーク６を保持するための保持孔８が穿設されていると共に、キャリア７の外周部７Ａには複数の歯部９が形成されている。また、前記下定盤３の上面３Ｕに複数のキャリア７が同心円状に並設されており、１枚のキャリア７には５枚のワーク６を保持するために保持孔８が複数箇所（５箇所）に形成されている。尚、ワーク６は金属製の磁気ディスク基板などが例示される。 As shown in FIG. 1 and the like, a carrier 7 for holding a plurality of works 6 is placed on the upper surface 3U of the lower platen 3, and the carrier 7 holds the work 6 for holding the work 6. A hole 8 is formed, and a plurality of tooth portions 9 are formed on the outer peripheral portion 7A of the carrier 7. Further, a plurality of carriers 7 are concentrically arranged side by side on the upper surface 3U of the lower platen 3, and one carrier 7 has a plurality of holding holes 8 (five places) for holding five works 6. ) Is formed. The work 6 is exemplified by a metal magnetic disk substrate or the like.

そして、下定盤３の上面３Ｕの中央に、キャリア７の歯部９に噛合される駆動用のサンギア１１が設けられ、下定盤３の外周部３Ａには、インターナルギア１２が同心円状に設けられており、このインターナルギア１２にキャリア７の歯部９が噛合されると共に、キャリア７はサンギア１１の外周に位置する。尚、図中１１Ｊがサンギア１１の回動中心軸である。 A drive sun gear 11 that meshes with the tooth portion 9 of the carrier 7 is provided in the center of the upper surface 3U of the lower platen 3, and internal gears 12 are concentrically provided on the outer peripheral portion 3A of the lower platen 3. The tooth portion 9 of the carrier 7 is meshed with the internal gear 12, and the carrier 7 is located on the outer periphery of the sun gear 11. In the figure, 11J is the rotation center axis of the sun gear 11.

サンギア１１とインターナルギア１２とは回転速度が異なり、サンギア１１とインターナルギア１２とはそれぞれ異なる回転をする。これにより下定盤用駆動モータ１３、上定盤用駆動モータ１４、サンギア用駆動モータ１５及びインターナルギア用駆動モータ１６で下定盤３、上定盤５及びサンギア１１、インターナルギア１２を回転させると、キャリア７は自転運動をしながらサンギア１１の回りを公転する遊星運動を起こして、キャリア７に保持されたワーク６の上下両面が研磨される。 The rotation speeds of the sun gear 11 and the internal gear 12 are different, and the sun gear 11 and the internal gear 12 rotate differently. As a result, when the lower platen 3, the upper platen 5, the sun gear 11, and the internal gear 12 are rotated by the drive motor 13 for the lower platen, the drive motor 14 for the upper platen, the drive motor 15 for the sun gear, and the drive motor 16 for the internal gear, The carrier 7 causes a planetary motion that revolves around the sun gear 11 while rotating, and both the upper and lower surfaces of the work 6 held by the carrier 7 are polished.

尚、キャリア７の歯部９などに加わる圧力などから、４つの駆動モータ１３，１４，１５，１６を駆動する方法を用いることが好ましいが、インターナルギア用駆動モータ１６を駆動せずに、インターナルギア１２を固定した状態（回転しない状態）で他の駆動モータ１３，１４，１５を駆動して研磨したり、両面研磨装置１にインターナルギア用駆動モータ１６を設けずに、インターナルギア１２を固定した状態で他の駆動モータ１３，１４，１５を駆動して研磨したりすることもできる。 It is preferable to use a method of driving the four drive motors 13, 14, 15, 16 from the pressure applied to the tooth portions 9 of the carrier 7, but the internal gear drive motor 16 is not driven. The internal gear 12 is fixed without driving and polishing other drive motors 13, 14 and 15 with the lugia 12 fixed (non-rotating state) or by providing the internal gear drive motor 16 in the double-sided polishing device 1. It is also possible to drive and polish other drive motors 13, 14 and 15 in this state.

さらに、サンギア用駆動モータ１５を駆動せずに、サンギア１１を固定した状態（回転しない状態）で他の駆動モータ１３，１４，１６を駆動して研磨したり、両面研磨装置１にサンギア用駆動モータ１５を設けずに、サンギア１１を固定した状態（回転しない状態）で他の駆動モータ１３，１４，１６を駆動して研磨したりすることもできる。 Further, without driving the sun gear drive motor 15, other drive motors 13, 14 and 16 are driven and polished in a state where the sun gear 11 is fixed (non-rotating state), or the sun gear is driven by the double-sided polishing device 1. It is also possible to drive and polish other drive motors 13, 14 and 16 in a state where the sun gear 11 is fixed (in a state where it does not rotate) without providing the motor 15.

尚、下定盤３と上定盤５とは同一の外径であり、また、モータ１３，１４，１５，１６はサーボモータやインバータモータによって形成されており、これらモータ１３，１４，１５，１６には停止手段であるブレーキ手段（図示せず）が一体に設けられている。 The lower surface plate 3 and the upper surface plate 5 have the same outer diameter, and the motors 13, 14, 15, 16 are formed by a servo motor or an inverter motor, and these motors 13, 14, 15, 16 are formed. Is integrally provided with a braking means (not shown) which is a stopping means.

さらに、図２に示すように、上定盤５には、下面５Ｋに押圧手段１７である流体の下向きの出口１７Ａが設けられており、研磨後、上定盤５が停止した状態で、前記出口１７Ａの上部には、例えば流動体である圧縮空気を導入することができるように流動体供給路（図示せず）が接続され、この流動体供給路から圧縮空気などが供給されるようになっている。前記出口１７Ａは下定盤３上に配置されるキャリア７に対応するように複数配置されている。尚、従来技術で説明したように、前記上定盤５には下面５Ｋに開口したノズルからなる流体出口（図示せず）が設けられ、上定盤５に設けた供給手段がスラリーリングを介して前記流体出口に接続され、この流体出口から上，下定盤５，３間にスラリーなどと称する研磨剤が供給される。 Further, as shown in FIG. 2, the upper surface plate 5 is provided with a downward outlet 17A of a fluid which is a pressing means 17 on the lower surface 5K, and the upper surface plate 5 is stopped after polishing. A fluid supply path (not shown) is connected to the upper part of the outlet 17A so that compressed air, which is a fluid, can be introduced, and compressed air or the like is supplied from this fluid supply path. It has become. A plurality of the outlets 17A are arranged so as to correspond to the carriers 7 arranged on the lower platen 3. As described in the prior art, the upper surface plate 5 is provided with a fluid outlet (not shown) composed of a nozzle opened in the lower surface 5K, and the supply means provided in the upper surface plate 5 is provided via a slurry ring. It is connected to the fluid outlet, and a polishing agent called a slurry or the like is supplied between the upper and lower surface plates 5 and 3 from the fluid outlet.

図１などに示すように、前記サンギア１１の歯部取付部たる外周部１８には、周方向に等間隔で複数の歯部１１Ｈが設けられ、前記インターナルギア１２の歯部取付部たる内周部１９には、周方向に等間隔で複数の歯部１２Ｈが設けられ、これら歯部１１Ｈ，１２Ｈは、前記下定盤３に着脱可能に螺合するピン２１，２１と、各ピン２１，２１の基端側に着脱可能に取り付けられ、前記キャリア７に噛み合う筒状のカラー４１，４２とを備え、前記ピン２１はステンレスなどの硬質材料からなる。 As shown in FIG. 1 and the like, a plurality of tooth portions 11H are provided on the outer peripheral portion 18 which is the tooth portion mounting portion of the sun gear 11 at equal intervals in the circumferential direction, and the inner circumference of the tooth portion mounting portion of the internal gear 12 is provided. A plurality of tooth portions 12H are provided in the portion 19 at equal intervals in the circumferential direction, and these tooth portions 11H and 12H have pins 21 and 21 that are detachably screwed to the lower platen 3 and pins 21 and 21 respectively. The pins 21 are made of a hard material such as stainless steel and are provided with tubular collars 41 and 42 that are detachably attached to the base end side of the carrier 7 and mesh with the carrier 7.

図３に示すように、前記ピン２１は、基端側に設けられた円柱状のピン本体２２と、このピン本体２２より小径で先端に設けられた雄螺子部２３と、前記ピン本体２２と前記雄螺子部２３との間に設けられた径小部２４とを一体に有し、この径小部２４は前記雄螺子部２３の谷径に比べて径小に形成され、また、前記径小部２４は前記雄螺子部２３より短く形成されている。 As shown in FIG. 3, the pin 21 includes a columnar pin body 22 provided on the base end side, a male screw portion 23 provided at the tip having a diameter smaller than that of the pin body 22, and the pin body 22. It has a small diameter portion 24 provided between the male screw portion 23 and the small diameter portion 24 integrally, and the small diameter portion 24 is formed to have a smaller diameter than the valley diameter of the male screw portion 23, and also has the diameter. The small portion 24 is formed shorter than the male screw portion 23.

また、前記ピン本体２２の先端と前記径小部２４との間には、ピン２１の中心軸と交差方向の下向き当接面２５が設けられ、この下向き当接面２５の外周側と前記ピン本体２２の側面との間の角部には、面取り加工により面取り部２６が設けられている。尚、前記下向き当接面２５は、ピン２１の先端側に向いている。 Further, a downward contact surface 25 in the direction intersecting the central axis of the pin 21 is provided between the tip of the pin body 22 and the small diameter portion 24, and the outer peripheral side of the downward contact surface 25 and the pin. A chamfered portion 26 is provided at a corner portion between the side surface of the main body 22 by chamfering. The downward contact surface 25 faces the tip end side of the pin 21.

さらに、ピン２１の基端には工具係合部２７が設けられ、この工具係合部２７は、ピン２１の外周側を切り欠いて形成した切欠き部２８，２８を、ピン２１の中心に対して対向して設けており、前記切欠き部２８は、ピン２１の長さ方向の平坦面２８Ａと、この平坦面２８Ａの先端側に設けられた段差面２８Ｂとを備え、対をなす平坦面２８Ａ，２８Ａ同士は略平行に配置されている。従って、ペンチやスパナなどの工具を両平坦面２８Ａ，２８Ａに係止してピン２１を回動することができる。 Further, a tool engaging portion 27 is provided at the base end of the pin 21, and the tool engaging portion 27 has the cutout portions 28, 28 formed by cutting out the outer peripheral side of the pin 21 at the center of the pin 21. The notch 28 is provided so as to face each other, and the cutout portion 28 includes a flat surface 28A in the length direction of the pin 21 and a stepped surface 28B provided on the tip end side of the flat surface 28A, and forms a pair of flat surfaces. The surfaces 28A and 28A are arranged substantially in parallel. Therefore, tools such as pliers and spanners can be locked to both flat surfaces 28A and 28A to rotate the pin 21.

前記ピン２１の製造工程においては、好ましくは、ピン２１を形成する丸棒に工具係合部２７を形成した後、工具係合部２７をチャック装置により把持して固定し、ケース１の場合は、ピン２１の基端を基準とした位置に切削装置により径小部２４を形成する。こうすることにより、ピン２１の基端から正確な位置に下向き当接面２５を形成することができる。この後、ピン２１の径小部２４より先端側の部分に雄螺子部２３を形成する。 In the manufacturing process of the pin 21, preferably, after forming the tool engaging portion 27 on the round bar forming the pin 21, the tool engaging portion 27 is gripped and fixed by the chuck device, and in the case of the case 1, the case 1 is used. , A small diameter portion 24 is formed by a cutting device at a position with reference to the base end of the pin 21. By doing so, the downward contact surface 25 can be formed at an accurate position from the base end of the pin 21. After that, the male screw portion 23 is formed on the portion on the tip end side of the small diameter portion 24 of the pin 21.

あるいは、ケース２の場合は、雄螺子部２３をその長さ以上で下向き当接面２５より先端側の位置まで形成した後、径小部２４を形成する。尚、ケース１及びケース２において、径小部２４と雄螺子部２３を形成した後、工具係合部２７を形成してもよい。 Alternatively, in the case of the case 2, the male screw portion 23 is formed at a length equal to or longer than the male screw portion 23 to a position on the tip end side of the downward contact surface 25, and then the small diameter portion 24 is formed. In the case 1 and the case 2, the tool engaging portion 27 may be formed after forming the small diameter portion 24 and the male screw portion 23.

そして、ピン２１に前記径小部２４がない場合、ピン２１の先端から下向き当接面２５まで雄螺子を形成すると、下向き当接面２５の近傍では不完全螺子部しか形成できないから、下向き当接面２５を後述する上向き受面に正確に当接することができないと共に、下向き当接面２５と後述する上向き受面とを圧接することができない。 If the pin 21 does not have the small diameter portion 24, if a male screw is formed from the tip of the pin 21 to the downward contact surface 25, only an incomplete screw portion can be formed in the vicinity of the downward contact surface 25. The contact surface 25 cannot be accurately contacted with the upward receiving surface described later, and the downward contact surface 25 cannot be pressed against the upward receiving surface described later.

図１，図２及び図４などに示すように、前記サンギア１１の外周部１８は外鍔状に形成され、複数の前記歯部１１Ｈの位置に対応して、前記外周部１８の上面に上下方向の取付孔３１が複数設けられている。尚、取付孔３１を設けた外周部１８の上面が、平面たる取付孔側上面部５０である。前記取付孔３１は、段付き孔であって、前記ピン本体２２の先端側である下部を挿入するピン本体用孔部３２と、このピン本体用孔部３２の下部に同軸で設けられ、前記雄螺子部２３が着脱可能に螺合する雌螺子孔部３３とを備え、前記ピン本体用孔部３２と前記雌螺子孔部３３との間には、前記下向き当接面２５が当接する上向き受面３５が設けられている。また、前記雌螺子孔部３３は前記ピン本体用孔部３２より径小である。 As shown in FIGS. 1, 2 and 4, the outer peripheral portion 18 of the sun gear 11 is formed in the shape of an outer collar, and is vertically placed on the upper surface of the outer peripheral portion 18 corresponding to the positions of the plurality of tooth portions 11H. A plurality of mounting holes 31 in the direction are provided. The upper surface of the outer peripheral portion 18 provided with the mounting hole 31 is the upper surface portion 50 on the mounting hole side, which is a flat surface. The mounting hole 31 is a stepped hole, and is provided coaxially with a pin body hole portion 32 into which a lower portion on the tip end side of the pin body 22 is inserted and a lower portion of the pin body hole portion 32. The female screw hole portion 33 to which the male screw portion 23 is detachably screwed is provided, and the downward contact surface 25 abuts between the pin body hole portion 32 and the female screw hole portion 33. A receiving surface 35 is provided. Further, the female screw hole portion 33 has a smaller diameter than the pin body hole portion 32.

図４に示すように、前記雌螺子孔部３３は、外周部１８の下面を貫通して形成されている。また、前記雌螺子孔部３３の長さＬは、前記ピン２１の下向き当接面２５と下端２１Ｋとの間の長さＬＰより長く形成されており、長さの差（Ｌ－ＬＰ）が雄螺子部２３の最大の締め代であり、この締め代だけ雄螺子部２３を締めると、ピン２１の下端２１Ｋが外周部１８の下面と面一になり、この取付状態でピン２１の下端２１Ｋが外周部１８の下面から突出することが無い。このように下端２１Ｋが外周部１８の下面から突出しないから、ごみなどが付着し難くなる。 As shown in FIG. 4, the female screw hole portion 33 is formed so as to penetrate the lower surface of the outer peripheral portion 18. Further, the length L of the female screw hole portion 33 is formed to be longer than the length LP between the downward contact surface 25 of the pin 21 and the lower end 21K, and the difference in length (L-LP) is formed. It is the maximum tightening allowance of the male screw portion 23, and when the male screw portion 23 is tightened by this tightening allowance, the lower end 21K of the pin 21 becomes flush with the lower surface of the outer peripheral portion 18, and the lower end 21K of the pin 21 is in this mounted state. Does not protrude from the lower surface of the outer peripheral portion 18. Since the lower end 21K does not protrude from the lower surface of the outer peripheral portion 18 in this way, it becomes difficult for dust and the like to adhere.

そして、図４に示すように、ピン本体用孔部３２にピン本体２２を嵌入し、前記取付孔３１の雌螺子孔部３３にピン２１の雄螺子部２３を螺合すると、上向き受面３５に下向き当接面２５が圧接し、複数のピン２１の上端高さが正しく位置決めされる。尚、ピン２１の取付状態で、ピン２１の基端が上端であり、ピン２１の先端が前記下端２１Ｋである。 Then, as shown in FIG. 4, when the pin body 22 is fitted into the pin body hole 32 and the male screw portion 23 of the pin 21 is screwed into the female screw hole 33 of the mounting hole 31, the upward receiving surface 35 is formed. The downward contact surface 25 is pressed against the surface, and the heights of the upper ends of the plurality of pins 21 are correctly positioned. In the mounted state of the pin 21, the base end of the pin 21 is the upper end, and the tip of the pin 21 is the lower end 21K.

この場合、ピン２１の下向き当接面２５が上向き受面３５が当接した後、さらに締める方向にピン２１を回すと、径小部２４が僅かに伸びることにより、雌螺子孔部３３に雄螺子部２３が捻じ込まれ、下向き当接面２５が上向き受面３５が圧接し、ピン２１の高さ位置が正確になると共に、振動を受けても緩むことのない取付強度を確保することができる。尚、径小部２４が伸びる寸法を前記最大締め代に設定している。 In this case, when the pin 21 is turned in the direction of further tightening after the downward contact surface 25 of the pin 21 is in contact with the upward receiving surface 35, the small diameter portion 24 is slightly extended, so that the female screw hole portion 33 is male. The screw portion 23 is screwed in, the downward contact surface 25 is in pressure contact with the upward receiving surface 35, the height position of the pin 21 is accurate, and the mounting strength that does not loosen even when subjected to vibration can be ensured. can. The dimension in which the small diameter portion 24 extends is set as the maximum tightening allowance.

外周部１８に固定したピン２１のピン本体２２に、前記カラー４１を回動可能に外装する。この場合、図４に示すように、取付状態で、前記取付孔側上面部５０からピン２１の上端（基端）までの高さに比べて、カラー４１の高さは僅かに低く形成されている。例えば、直径（外径）５～１０ｍｍ（５ｍｍ以上、１０ｍｍ以下）のカラー４１において、ピン２１とカラー４１の高さ差ｈは０．７～１．５ｍｍ程度である。こうすることにより、カラー４１の円滑な回動を確保することができる。 The collar 41 is rotatably mounted on the pin body 22 of the pin 21 fixed to the outer peripheral portion 18. In this case, as shown in FIG. 4, the height of the collar 41 is formed to be slightly lower than the height from the upper surface portion 50 on the mounting hole side to the upper end (base end) of the pin 21 in the mounted state. There is. For example, in a collar 41 having a diameter (outer diameter) of 5 to 10 mm (5 mm or more and 10 mm or less), the height difference h between the pin 21 and the collar 41 is about 0.7 to 1.5 mm. By doing so, smooth rotation of the collar 41 can be ensured.

また、図４に示すように、前記カラー４１は、該カラー４１の外周面の下定盤３の中心側が前記外周部１８の外周面１８Ｇに位置するように配置されている。これにより、カラー４１位置より下定盤３の中心側に取付孔側上面部５０が位置しないため、カラー４１の下定盤３の中心側にゴミが溜まり難くなる。 Further, as shown in FIG. 4, the collar 41 is arranged so that the center side of the lower platen 3 on the outer peripheral surface of the collar 41 is located on the outer peripheral surface 18G of the outer peripheral portion 18. As a result, since the mounting hole side upper surface portion 50 is not located on the center side of the lower platen 3 from the position of the collar 41, dust is less likely to collect on the center side of the lower platen 3 of the collar 41.

図４に示すように、前記サンギア１１の外周部１８の取付孔側上面部５０には、複数の前記歯部１１Ｈ，１１Ｈ・・・の中央側に、これら前記歯部１１Ｈ，１１Ｈと間隔５７を置いて段差５１を周設し、この段差５１は前記回転中心軸１１Ｊの中心を中心とする。 As shown in FIG. 4, on the upper surface portion 50 on the mounting hole side of the outer peripheral portion 18 of the sun gear 11, the tooth portions 11H, 11H and the distance 57 are located on the central side of the plurality of tooth portions 11H, 11H. A step 51 is provided around the wheel, and the step 51 is centered on the center of the rotation center axis 11J.

また、前記段差５１の中央側に、前記取付孔側上面部５０に比べて高く形成された中央側上面部５２が設けられ、前記歯部１１Ｈと前記段差５１との間には隙間５３（図４）が設けられている。この隙間５３の幅は前記カラー４１の外径の０.５倍以上であり、隙間５３を設けることにより摩耗くずなどを除去し易くなる。また、前記段差５１の高さは、取付状態の前記ピン２１の上端の高さに対応している。 Further, a central upper surface portion 52 formed higher than the mounting hole side upper surface portion 50 is provided on the central side of the step 51, and a gap 53 (FIG. 5) is provided between the tooth portion 11H and the step 51. 4) is provided. The width of the gap 53 is 0.5 times or more the outer diameter of the collar 41, and the provision of the gap 53 facilitates the removal of wear debris and the like. Further, the height of the step 51 corresponds to the height of the upper end of the pin 21 in the mounted state.

さらに、図１などに示すように、前記ピン２１から前記カラー４１の抜け出しを防止する抜け止め部材たる押え部５５を複数備える。この押え部５５は、前記歯部１１Ｈの並びに対応して、板材を円弧状に形成してなり、この例では、５個の押え部５５により、全てのカラー４１の抜け出しを防止している。尚、前記押え部５５は、少なくとも、外周縁の外周下角部５６が円弧状に形成されていればよい。 Further, as shown in FIG. 1, a plurality of holding portions 55, which are retaining members for preventing the collar 41 from coming off from the pin 21, are provided. The pressing portion 55 is formed by forming a plate material in an arc shape corresponding to the arrangement of the tooth portions 11H, and in this example, the five pressing portions 55 prevent all the collars 41 from coming off. The pressing portion 55 may have at least an outer peripheral lower corner portion 56 formed in an arc shape.

このため前記押え部５５の外周下角部５６をピン２１の上端（基端）に近接又は当接するように配置し、前記外周下角部５６側の押え部５５の下面５５Ｋが、カラー４１の上端と間隔５７を置いて配置され、前記押え部５５は、その下面５５Ｋが前記中央側上面部５２に当接した状態で、固定手段たるネジ５８により中央側上面部５２に着脱可能に固定されており、中央側上面部５２にはネジ５８を着脱可能に螺合する雌螺子孔部５８Ｍが穿設されている。このように間隔５７を設けることにより、カラー４１の円滑な回動を確保することができる。尚、この例では、前記ピン２１の上端の高さ位置は、前記下面５５Ｋと高さ位置と等しく、前記間隔５７の上下寸法は前記高さ差ｈと等しい。 Therefore, the outer peripheral lower corner portion 56 of the holding portion 55 is arranged so as to be close to or in contact with the upper end (base end) of the pin 21, and the lower surface 55K of the pressing portion 55 on the outer peripheral lower corner portion 56 side is the upper end of the collar 41. The holding portions 55 are arranged at intervals 57, and the lower surface 55K is detachably fixed to the central upper surface portion 52 by a screw 58 as a fixing means in a state where the lower surface 55K is in contact with the central side upper surface portion 52. A female screw hole portion 58M for detachably screwing the screw 58 is bored in the upper surface portion 52 on the center side. By providing the interval 57 in this way, smooth rotation of the collar 41 can be ensured. In this example, the height position of the upper end of the pin 21 is equal to the lower surface 55K and the height position, and the vertical dimension of the interval 57 is equal to the height difference h.

尚、押え部５５によりカラー４１の抜け止めを防止するには、前記間隔５７の上下寸法を前記高さ差ｈ以上にしてもよく、また、押え部５５の下面５５Ｋの一部がカラー４１の上に位置していれば、前記外周下角部５６を中央側（図４中、右側）に配置してもよい。 In order to prevent the collar 41 from coming off by the presser portion 55, the vertical dimension of the interval 57 may be set to the height difference h or more, and a part of the lower surface 55K of the presser portion 55 is the collar 41. If it is located above, the outer peripheral lower corner portion 56 may be arranged on the center side (right side in FIG. 4).

図１，図２及び図７などに示すように、前記インターナルギア１２の歯部取付部たる内周部１９はリング状に形成され、前記歯部１２Ｈの位置に対応して、前記内周部１９の上面に前記取付孔３１が設けられている。尚、取付孔３１を設けた内周部１９の上面が、取付孔側上面部５０Ａである。また、内周部１９に設けた前記雌螺子孔部３３は、前記雄螺子部２３より長く形成されると共に、前記雌螺子孔部３３の底部３３Ｔは閉塞している。 As shown in FIGS. 1, 2 and 7, the inner peripheral portion 19 which is the tooth portion mounting portion of the internal gear 12 is formed in a ring shape, and the inner peripheral portion corresponds to the position of the tooth portion 12H. The mounting hole 31 is provided on the upper surface of 19. The upper surface of the inner peripheral portion 19 provided with the mounting hole 31 is the mounting hole side upper surface portion 50A. Further, the female screw hole portion 33 provided in the inner peripheral portion 19 is formed longer than the male screw portion 23, and the bottom portion 33T of the female screw hole portion 33 is closed.

内周部１９に固定したピン２１に、前記カラー４２を回動可能に外装する。この場合、取付状態で、図７に示すように、前記取付孔側上面部５０Ａからピン２１の上端（基端）までの高さに比べて、カラー４２の高さは僅かに低く形成されている。例えば、直径（外径）５～１０ｍｍ（５ｍｍ以上、１０ｍｍ以下）のカラー４２において、ピン２１とカラー４２の高さ差ｈは０．７～１．５ｍｍ程度である。 The collar 42 is rotatably exteriorized on a pin 21 fixed to the inner peripheral portion 19. In this case, as shown in FIG. 7, the height of the collar 42 is formed to be slightly lower than the height from the upper surface portion 50A on the mounting hole side to the upper end (base end) of the pin 21 in the mounted state. There is. For example, in a collar 42 having a diameter (outer diameter) of 5 to 10 mm (5 mm or more and 10 mm or less), the height difference h between the pin 21 and the collar 42 is about 0.7 to 1.5 mm.

また、前記カラー４２は、該カラー４２の外周面の下定盤３の外周側が前記内周部１９の内周面１９Ｎに位置するように配置されているから、カラー４２の下定盤３の外側にゴミが溜まり難くなる。 Further, since the collar 42 is arranged so that the outer peripheral side of the lower platen 3 on the outer peripheral surface of the collar 42 is located on the inner peripheral surface 19N of the inner peripheral portion 19, the collar 42 is located outside the lower platen 3 of the collar 42. It becomes difficult for dust to collect.

尚、前記カラー４１，４２は、合成樹脂製で、例えばＰＥＥＫ樹脂（ポリエーテルエーテルケトン）などのキャリア７と同材質の合成樹脂を用いることが好ましい。尚、カラー４１，４２の上縁と下縁は、相互に平行で、且つカラー４１，４２の中心軸に対して直交している。 The colors 41 and 42 are made of synthetic resin, and it is preferable to use a synthetic resin of the same material as the carrier 7, such as PEEK resin (polyetheretherketone). The upper and lower edges of the collars 41 and 42 are parallel to each other and orthogonal to the central axis of the collars 41 and 42.

図７に示すように、前記インターナルギア１２の内周部１９の取付孔側上面部５０Ａには、複数の前記歯部１２Ｈ，１２Ｈ・・・の外周側に、これら前記歯部１２Ｈ，１２Ｈと間隔を置いて段差５１Ａを周設し、この段差５１Ａは前記回転中心軸１１Ｊの中心を中心とする。前記段差５１Ａの内周側に、前記取付孔側上面部５０Ａに比べて高く形成された外周側上面部５２Ａが設けられ、前記歯部１２Ｈと前記段差５１Ａとの間には隙間５３Ａ（図７）が設けられ、この隙間５３Ａの幅は前記カラー４２の外径の０．５倍以上であり、隙間５３Ａを使って摩耗くずなどを除去し易くなる。また、前記段差５１Ａの高さは、取付状態の前記ピン２１の高さに対応している。 As shown in FIG. 7, the upper surface portion 50A on the mounting hole side of the inner peripheral portion 19 of the internal gear 12 has the tooth portions 12H, 12H on the outer peripheral side of the plurality of tooth portions 12H, 12H ... Steps 51A are provided around the wheels at intervals, and the steps 51A are centered on the center of the rotation center axis 11J. An outer peripheral side upper surface portion 52A formed higher than the mounting hole side upper surface portion 50A is provided on the inner peripheral side of the step 51A, and a gap 53A (FIG. 7) is provided between the tooth portion 12H and the step 51A. ) Is provided, the width of the gap 53A is 0.5 times or more the outer diameter of the collar 42, and the gap 53A makes it easy to remove wear debris and the like. Further, the height of the step 51A corresponds to the height of the pin 21 in the mounted state.

さらに、図７などに示すように、前記ピン２１から前記カラー４２の抜け出しを防止する抜け止め部材たる複数の押え部５５Ａを備える。この押え部５５Ａは、前記歯部１２Ｈの並びに対応して、板材を円弧状に形成してなり、この例では、５個の押え部５５Ａにより全てのカラー４２の抜け出しを防止している。尚、前記押え部５５Ａは、少なくとも、内周縁の内周下角部５６Ａが円弧状に形成されていればよい。 Further, as shown in FIG. 7 and the like, a plurality of pressing portions 55A, which are retaining members for preventing the collar 42 from coming off from the pin 21, are provided. The pressing portion 55A is formed by forming a plate material in an arc shape corresponding to the arrangement of the tooth portions 12H, and in this example, the five pressing portions 55A prevent all the collars 42 from coming off. In the pressing portion 55A, at least the inner peripheral lower corner portion 56A of the inner peripheral edge may be formed in an arc shape.

また、前記押え部５５，５５Ａとして、リングを５分割した形状を有するものを例示したが、押え部５５，５５Ａは、リング状の１体物や、２分割したものなどや、３分割以上のものでもよく、１つの押え部が少なくとも複数のカラー４１，４２の抜け出しを防止するものであればよい。尚、図１及び図６に示すように、隣り合う押え部５５，５５の間には隙間が設けられ、同様に隣り合う押え部５５Ａ，５５Ａの間には隙間が設けられている。 Further, as the presser portions 55 and 55A, those having a shape in which the ring is divided into five are exemplified, but the presser portions 55 and 55A are a ring-shaped one body, a two-divided one, and three or more divisions. It may be any one, as long as one pressing portion prevents at least a plurality of collars 41 and 42 from coming off. As shown in FIGS. 1 and 6, a gap is provided between the adjacent pressing portions 55 and 55, and similarly, a gap is provided between the adjacent pressing portions 55A and 55A.

このため前記押え部５５Ａの内周下角部５６Ａをピン２１の上端（基端）に近接又は当接するように配置し、前記内周下角部５６Ａ側の押え部５５Ａの下面５５Ｋが、カラー４２の上端と間隔５７Ａを置いて配置され、前記押え部５５Ａは、その下面５５Ｋが前記外周側上面部５２Ａに当接した状態で、固定手段たるネジ５８により外周側上面部５２Ａに着脱可能に固定されており、中央側上面部５２にはネジ５８を着脱可能に螺合する雌螺子孔部５８Ｍが穿設されている。このように間隔５７Ａを設けることにより、カラー４２の円滑な回動を確保することができる。尚、この例では、前記ピン２１の上端の高さ位置は、前記下面５５Ｋと高さ位置と等しく、前記間隔５７Ａの上下寸法は前記高さ差ｈと等しい。 Therefore, the inner peripheral lower corner portion 56A of the pressing portion 55A is arranged so as to be close to or in contact with the upper end (base end) of the pin 21, and the lower surface 55K of the pressing portion 55A on the inner peripheral lower corner portion 56A side is the collar 42. The holding portion 55A is arranged with a distance of 57A from the upper end, and the lower surface 55K is detachably fixed to the outer peripheral side upper surface portion 52A by a screw 58 as a fixing means in a state where the lower surface 55K is in contact with the outer peripheral side upper surface portion 52A. A female screw hole portion 58M for detachably screwing the screw 58 is bored in the upper surface portion 52 on the center side. By providing the interval 57A in this way, smooth rotation of the collar 42 can be ensured. In this example, the height position of the upper end of the pin 21 is equal to the lower surface 55K and the height position, and the vertical dimension of the interval 57A is equal to the height difference h.

尚、押え部５５Ａによりカラー４２の抜け止めを防止するには、前記間隔５７Ａの上下寸法を前記高さ差ｈ以上にしてもよく、また、押え部５５Ａの下面５５Ｋの一部がカラー４２の上に位置していれば、前記内周下角部５６Ａを外周側（図７中、左側）に配置してもよい。 In order to prevent the collar 42 from coming off by the presser portion 55A, the vertical dimension of the interval 57A may be set to the height difference h or more, and a part of the lower surface 55K of the presser portion 55A is the collar 42. If it is located above, the inner peripheral lower corner portion 56A may be arranged on the outer peripheral side (left side in FIG. 7).

次に、前記構成についてその作用を説明する。下定盤３に対して昇降手段（図示せず）によって上定盤５が離間した状態で、下定盤３の上面３Ｕにワーク６をキャリア７と共に載置する。この際、ワーク６はキャリア７の保持孔８に保持されている。そして、上定盤５を下降して上定盤５の下面側をワーク６の上面に接触させる。 Next, the operation of the configuration will be described. The work 6 is placed together with the carrier 7 on the upper surface 3U of the lower surface plate 3 in a state where the upper surface plate 5 is separated from the lower surface plate 3 by an elevating means (not shown). At this time, the work 6 is held in the holding hole 8 of the carrier 7. Then, the upper surface plate 5 is lowered to bring the lower surface side of the upper surface plate 5 into contact with the upper surface of the work 6.

そして、下定盤用駆動モータ１３、上定盤用駆動モータ１４及びサンギア用駆動モータ１５、インターナルギア用駆動モータ１６により下定盤３、上定盤５及びサンギア１１、インターナルギア１２を回転させると、キャリア７は自転運動をしながらサンギア１１の回りを公転する遊星運動を起こして、さらに、スラリーなどと称する研磨剤（図示せず）を供給することでキャリア７に保持されたワーク６の両面が下定盤３の研磨布２及び上定盤５の研磨布４により研磨される。 Then, when the lower platen 3, the upper platen 5, the sun gear 11, and the internal gear 12 are rotated by the lower platen drive motor 13, the upper platen drive motor 14, the sun gear drive motor 15, and the internal gear drive motor 16, the lower platen 3, the upper platen 5, the sun gear 11, and the internal gear 12 are rotated. The carrier 7 causes a planetary motion that revolves around the sun gear 11 while rotating, and further, by supplying a polishing agent (not shown) called a slurry or the like, both sides of the work 6 held by the carrier 7 are pressed. It is polished by the polishing cloth 2 of the lower platen 3 and the polishing cloth 4 of the upper platen 5.

ワーク６の両面研磨が終了したら、上定盤５をやや上昇させて下定盤３より離間するとき又はその前後に、出口１７Ａより圧縮空気或いは水等液体などの流動体を開閉バルブ（図示せず）により制御してワーク６の上面に向けて噴出する。尚、上定盤５が回転を停止した後、前記出口１７Ａに前記流動体供給路を接続する。前記噴出は１枚のワーク６に対して出口１７Ａが少なくとも一つ対向するように配置されている。そして、流動体の押圧力によりワーク６、さらにはキャリア７は下定盤３側に押し付けられて、これらワーク６、キャリア７は上定盤５の下面５Ｋより剥離して上定盤５上に残り続ける。 After the double-sided polishing of the work 6 is completed, when the upper surface plate 5 is slightly raised and separated from the lower surface plate 3, or before and after that, a fluid such as compressed air or a liquid such as water is opened and closed from the outlet 17A (not shown). ) To eject toward the upper surface of the work 6. After the upper surface plate 5 stops rotating, the fluid supply path is connected to the outlet 17A. The ejection is arranged so that at least one outlet 17A faces one work 6. Then, the work 6 and the carrier 7 are pressed against the lower surface plate 3 by the pressing force of the fluid, and these works 6 and the carrier 7 are peeled off from the lower surface 5K of the upper surface plate 5 and remain on the upper surface plate 5. continue.

このような流動体によるワーク６、キャリア７が下定盤３に押圧された状態、或いは流体の噴出が停止されて押圧が解除された状態で、上定盤５と下定盤３との間に作業員が手を入れてワーク６、キャリア７を取り出す。尚、ロボットアームなどを備えた自動取出装置を用いてワーク６、キャリア７を取り出してもよい。この後、再び新たなワーク６、キャリア７を下定盤３に置いて研磨を行うものである。 Work between the upper surface plate 5 and the lower surface plate 3 in a state where the work 6 and the carrier 7 due to such a fluid are pressed against the lower surface plate 3 or in a state where the fluid ejection is stopped and the pressure is released. A member puts his hand and takes out the work 6 and the carrier 7. The work 6 and the carrier 7 may be taken out by using an automatic taking-out device provided with a robot arm or the like. After that, a new work 6 and carrier 7 are placed on the lower platen 3 again for polishing.

この場合、薄型のキャリア７を用いても、キャリア７が歯部１１Ｈ，１２Ｈの回動可能なカラー４１，４２に噛み合うため、歯部９の端面における厚さ方向（上下方向）のバリの発生が抑えられると共に、キャリア７の歯部９の摩耗を抑えることができる。また、バリの発生が抑えられるため、バリによる研磨布２，４の損傷が抑えられ、さらに、摩耗くずの発生も抑えることができるため、キャリア７と研磨布２，４の交換回数も大幅に削減できる。 In this case, even if the thin carrier 7 is used, the carrier 7 meshes with the rotatable collars 41 and 42 of the tooth portions 11H and 12H, so that burrs in the thickness direction (vertical direction) occur on the end face of the tooth portions 9. Can be suppressed and the wear of the tooth portion 9 of the carrier 7 can be suppressed. In addition, since the generation of burrs is suppressed, damage to the polishing cloths 2 and 4 due to burrs can be suppressed, and further, the generation of wear debris can be suppressed, so that the number of times the carrier 7 and the polishing pads 2 and 4 are replaced is significantly increased. Can be reduced.

また、キャリア７の薄型化により、キャリア７の歯部９とカラー４１，４２の歯合時の圧力が増加し、従来に比べて磨耗が発生し易くなるが、その磨耗などにより、カラー４１，４２の交換が必要になった場合も、ネジ５８を外し、押え部５５，５５Ａを取り外せば、複数のピン２１，２１・・・からカラー４１，４２を外して交換することができる。さらに、使用するキャリア７や研磨条件などに合わせて異なる材質のカラー４１，４２を選択して使用することができ、そのためにカラー４１，４２の交換を容易に行うことできる。尚、長期使用によりカラー４１，４２が磨耗した場合も、交換できる。 Further, due to the thinning of the carrier 7, the pressure at the time of meshing between the tooth portion 9 of the carrier 7 and the collars 41 and 42 increases, and wear is more likely to occur as compared with the conventional case. If the 42 needs to be replaced, the screws 58 can be removed and the holding portions 55 and 55A can be removed to remove the collars 41 and 42 from the plurality of pins 21 and 21 .... Further, the colors 41 and 42 of different materials can be selected and used according to the carrier 7 to be used, the polishing conditions and the like, and therefore the colors 41 and 42 can be easily replaced. Even if the collars 41 and 42 are worn due to long-term use, they can be replaced.

また、歯部１１Ｈ，１２Ｈと段差５１，５１Ａとの間には間隔５７，５７Ａを設けたから、摩耗くずを除去し易い構造となる。 Further, since the distances 57 and 57A are provided between the tooth portions 11H and 12H and the steps 51 and 51A, the structure is such that wear debris can be easily removed.

このように本実施例では、請求項１に対応して、下側研磨具たる研磨布２を備えた下定盤３の上に配置された複数のキャリア７の複数の保持孔８にワーク６を保持し、それぞれのキャリア７に噛み合うサンギア１１と、サンギア１１の外方に配置されてそれぞれキャリア７に噛み合うインターナルギア１２の少なくとも一方を回転させた状態で、下定盤３とこれに対向した上側研磨具たる研磨布４を備えた上定盤５とを回転させることにより、ワーク６の両面を研磨加工する両面研磨装置１において、サンギア１１は歯部取付部たる外周部１８に複数の歯部１１Ｈを備えると共に、インターナルギア１２は歯部取付部たる内周部１９に複数の歯部１２Ｈを備え、サンギア１１及び／又はインターナルギア１２の歯部１１Ｈ，１２Ｈは、外周部１８，内周部１９に着脱可能に螺合する雄螺子部２３を先端に有するピン２１と、このピン２１の基端側に着脱可能に外装されキャリア７に噛み合う筒状のカラー４１，４２と、カラー４１，４２のピン２１からの抜け出しを防止する抜け止め部材たる押え部５５，５５Ａとを備えるから、キャリア７がカラー４１，４２に噛み合うため、キャリア７の歯部９のバリの発生と磨耗を抑えることができ、また、押え部５５，５５Ａを外すことにより、ピン２１からカラー４１，４２を外し、カラー４１，４２を交換することができ、さらに、必要な場合は、外周部１８，内周部１９からピン２１を外し、ピン２１を交換することもできる。 As described above, in the present embodiment, in accordance with claim 1, the work 6 is provided in the plurality of holding holes 8 of the plurality of carriers 7 arranged on the lower platen 3 provided with the polishing cloth 2 as the lower polishing tool. In a state where at least one of the sun gear 11 which is held and meshes with each carrier 7 and the internal gear 12 which is arranged outside the sun gear 11 and meshes with the carrier 7 is rotated, the lower platen 3 and the upper polishing facing the lower platen 3 are rotated. In the double-sided polishing device 1 that grinds both sides of the work 6 by rotating the upper platen 5 provided with the tool polishing cloth 4, the sun gear 11 has a plurality of tooth portions 11H on the outer peripheral portion 18 that is the tooth portion mounting portion. The internal gear 12 is provided with a plurality of tooth portions 12H on the inner peripheral portion 19 which is the tooth portion mounting portion, and the tooth portions 11H and 12H of the sun gear 11 and / or the internal gear 12 are the outer peripheral portion 18 and the inner peripheral portion 19. A pin 21 having a male screw portion 23 at the tip that is detachably screwed into the pin 21, a tubular collar 41, 42 that is detachably attached to the base end side of the pin 21 and meshes with the carrier 7, and a collar 41, 42. Since the carrier 7 is provided with the holding portions 55 and 55A which are the retaining members for preventing the pin 21 from coming off, the carrier 7 meshes with the collars 41 and 42, so that the generation and wear of the tooth portion 9 of the carrier 7 can be suppressed. Further, by removing the presser portions 55 and 55A, the collars 41 and 42 can be removed from the pin 21 and the collars 41 and 42 can be replaced, and further, if necessary, from the outer peripheral portion 18 and the inner peripheral portion 19. It is also possible to remove the pin 21 and replace the pin 21.

このように本実施例では、請求項２に対応して、ピン２１にカラー４１，４２が回動可能に外装され、抜け止め部材たる押え部５５は複数のピン２１からの複数のカラー４１，４２の抜け出しを防止すると共に、外周部１８，内周部１９に着脱可能に設けられているから、カラー４１，４２が回動するため、一層、キャリア７の歯部９のバリの発生と磨耗を抑えることができ、また、押え部５５，５５Ａにより複数のカラー４１，４２の抜け止めを行うため、複数のカラー４１，４２の交換作業が容易となる。 As described above, in the present embodiment, in accordance with claim 2, the collars 41 and 42 are rotatably mounted on the pins 21, and the holding portion 55 as the retaining member is the plurality of collars 41 from the plurality of pins 21. Since the collars 41 and 42 are detachably provided on the outer peripheral portion 18 and the inner peripheral portion 19 while preventing the 42 from coming off, the collars 41 and 42 rotate, so that burrs and wear of the tooth portions 9 of the carrier 7 are further generated. In addition, since the holding portions 55 and 55A prevent the plurality of collars 41 and 42 from coming off, the replacement work of the plurality of collars 41 and 42 becomes easy.

このように本実施例では、請求項５に対応して、ピン２１は、カラー４１，４２を外装するピン本体２２と、このピン本体２２の先端に設けられた雄螺子部２３と、ピン本体２２と雄螺子部２３との間に設けられた下向き当接面２５とを備え、歯部取付部たる外周部１８，内周部１９に取付孔３１を設け、この取付孔３１は、ピン本体２２の先端側を挿入するピン本体用孔部３２と、このピン本体用孔部３２の下部に設けられ、雄螺子部２３が螺合する雌螺子孔部３３と、ピン本体用孔部３２と雌螺子孔部３３との間に設けられ、下向き当接面２５が当接する上向き受面３５とを備えるから、取付孔３１の雌螺子孔部３３にピン２１の雄螺子部２３を螺合し、上向き受面３５に下向き当接面２５が当接することにより、ピン２１の高さ位置が定められると共に、ピン本体２２の下部が所定寸法だけピン本体用孔部３２に挿入されるため、取付強度が確保された状態で、外周部１８，内周部１９に複数のピン２１の高さ位置を合わせて正確に取り付けることができる。このためピン２１を取り外した後、再び取り付ける際や、交換する際に、ピン２１の高さ位置を正確に取り付けることがきる。 As described above, in the present embodiment, in accordance with claim 5, the pin 21 includes the pin body 22 that exteriors the collars 41 and 42, the male screw portion 23 provided at the tip of the pin body 22, and the pin body. A downward contact surface 25 provided between the 22 and the male screw portion 23 is provided, and mounting holes 31 are provided in the outer peripheral portion 18 and the inner peripheral portion 19 which are the tooth portion mounting portions, and the mounting holes 31 are the pin main body. A pin body hole 32 into which the tip end side of the 22 is inserted, a female screw hole 33 provided at the bottom of the pin body hole 32 into which the male screw 23 is screwed, and a pin body hole 32. Since it is provided between the female screw hole portion 33 and the upward receiving surface 35 with which the downward contact surface 25 abuts, the male screw portion 23 of the pin 21 is screwed into the female screw hole portion 33 of the mounting hole 31. The downward contact surface 25 abuts on the upward receiving surface 35 to determine the height position of the pin 21, and the lower portion of the pin body 22 is inserted into the pin body hole 32 by a predetermined dimension. With the strength secured, the height positions of the plurality of pins 21 can be aligned with the outer peripheral portion 18 and the inner peripheral portion 19 and accurately attached. Therefore, after removing the pin 21, the height position of the pin 21 can be accurately attached when reattaching or replacing the pin 21.

以下、実施例上の効果として、ピン２１に工具係合部２７を設けたから、ピン２１に出っ張りがなく、ペンチやスパナなどの工具を両平坦面２８Ａ，２８Ａに係止してピン２１を回動することができる。また、ピン２１に螺子部の無い部分である径小部２４を設けたから、下向き当接面２５と上向き受面３５とを圧接してピン２１の高さ位置を正確に管理することができ、加えて、面取り部２６を設けたから、一層、下向き当接面２５と上向き受面３５とが圧接し易くなる。さらに、ピン２１とカラー４１の高さ差ｈを０．７～１．５ｍｍ程度し、ピン２１の上端の高さ位置を押え部５５の下面５５Ｋと高さ位置と略等しくしたから、カラー４１，４２が上下にずれても、カラー４１，４２が円滑に回動することができる。尚、キャリア７の歯部９はカラー４１，４２の高さ方向中央側に歯合する。また、カラー４１，４２は、ＰＥＥＫ樹脂製であるから、耐摩耗性に優れたものとなる。尚、カラー４１，４２は、使用条件に合わせて、ＰＥＥＫ樹脂製以外の各種の材質のものに交換して用いることができる。さらに、ピン２１の雄螺子部２３を取付孔３１の雌螺子孔部３３に螺合するから、ナットが不要とあり、部品管理と取付作業が容易となる。さらに、締め代（Ｌ－ＬＰ）を設定したから、締め代（Ｌ－ＬＰ）を基準としてピン２１を均一に取り付けることができる。尚、底部３３Ｔを有する雌螺子孔部３３は、少なくとも前記締め代（Ｌ－ＬＰ）以上に、前記雄螺子部２３より長く形成されている。 Hereinafter, as an effect in the embodiment, since the tool engaging portion 27 is provided on the pin 21, there is no protrusion on the pin 21, and tools such as pliers and spanners are locked to both flat surfaces 28A and 28A to rotate the pin 21. Can move. Further, since the pin 21 is provided with a small diameter portion 24 which is a portion without a screw portion, the downward contact surface 25 and the upward receiving surface 35 can be pressed against each other to accurately control the height position of the pin 21. In addition, since the chamfered portion 26 is provided, the downward contact surface 25 and the upward receiving surface 35 are more easily pressed against each other. Further, the height difference h between the pin 21 and the collar 41 is set to about 0.7 to 1.5 mm, and the height position of the upper end of the pin 21 is substantially equal to the lower surface 55K of the holding portion 55 and the height position. The collars 41 and 42 can rotate smoothly even if the collars 41 and 42 are displaced up and down. The tooth portion 9 of the carrier 7 meshes with the center side of the collars 41 and 42 in the height direction. Further, since the collars 41 and 42 are made of PEEK resin, they have excellent wear resistance. The colors 41 and 42 can be replaced with various materials other than PEEK resin according to the usage conditions. Further, since the male screw portion 23 of the pin 21 is screwed into the female screw hole portion 33 of the mounting hole 31, no nut is required, which facilitates parts management and mounting work. Further, since the tightening allowance (L-LP) is set, the pins 21 can be uniformly attached with the tightening allowance (L-LP) as a reference. The female screw hole portion 33 having the bottom portion 33T is formed longer than the male screw portion 23 by at least the tightening allowance (L-LP) or more.

図８～図１２は本発明の実施例２を示し、上記実施例１と同一部分に同一符号を付し、その詳細な説明を省略して詳述する。この例では、抜け止め部材として、ネジ６１を用い、このネジ６１により前記ピン２１に前記カラー４１Ａ，４２Ａを回り止め状態で固定している。尚、カラー４１Ａ，４２Ａは、前記カラー４１，４２に比べて僅かに長い点と、材質が異なる点以外は略同一構成である。 8 to 12 show a second embodiment of the present invention, the same parts as those of the first embodiment are designated by the same reference numerals, and detailed description thereof will be omitted. In this example, a screw 61 is used as a retaining member, and the collars 41A and 42A are fixed to the pin 21 in a detented state by the screw 61. The collars 41A and 42A have substantially the same configuration except that they are slightly longer than the collars 41 and 42 and the materials are different.

図１０に示すように、前記外周部１８の上面には、前記段差５１が無く、前記取付孔側上面部５０が平坦に形成されている。また、前記カラー４１Ａの長さは、その上端が取付状態の前記ピン２１の上端より僅かに高くなる長さに設定されている。 As shown in FIG. 10, the upper surface of the outer peripheral portion 18 does not have the step 51, and the upper surface portion 50 on the mounting hole side is formed flat. Further, the length of the collar 41A is set so that the upper end thereof is slightly higher than the upper end of the pin 21 in the mounted state.

図１０～図１２に示すように、前記ネジ６１は、雄螺子部６２と、この雄螺子部６２より径大な頭部６３とを一体に有し、この頭部６３の上面に十字溝などの工具係合部６４が設けられ、その頭部６３の頭部下面６３Ｋは平坦に形成されている。また、前記ピン２１の上端には、前記雄螺子部６２を螺合する雌螺子部２９が形成されている。そして、ピン２１の上端とカラー４１Ａ，４２Ａの上端の高さの差がネジ６１の締め代Ｓである。 As shown in FIGS. 10 to 12, the screw 61 integrally has a male screw portion 62 and a head 63 having a diameter larger than that of the male screw portion 62, and a cross groove or the like is formed on the upper surface of the head 63. The tool engaging portion 64 of the above is provided, and the lower surface 63K of the head of the head 63 is formed flat. Further, a female screw portion 29 for screwing the male screw portion 62 is formed at the upper end of the pin 21. The difference in height between the upper end of the pin 21 and the upper ends of the collars 41A and 42A is the tightening allowance S of the screw 61.

そして、前記外周部１８の取付孔３１にピン２１を取り付けた後、このピン２１に前記カラー４１Ａを外装し、ピン２１の雌螺子部２９にネジ６１の雄螺子部６２を螺入し、頭部下面６３Ｋがカラー４１Ａの上縁に当接した後、さらに捻じ込むことにより頭部下面６３Ｋがカラー４１Ａの上縁が圧接し、ピン２１にカラー４１Ａが回り止め状態で固定される（図１０）。 Then, after attaching the pin 21 to the mounting hole 31 of the outer peripheral portion 18, the collar 41A is attached to the pin 21, and the male screw portion 62 of the screw 61 is screwed into the female screw portion 29 of the pin 21 to head. After the lower surface of the portion 63K abuts on the upper edge of the collar 41A, the lower surface of the head 63K is further screwed into contact with the upper edge of the collar 41A, and the collar 41A is fixed to the pin 21 in a non-rotating state (FIG. 10). ).

また、同様に前記内周部１９の取付孔３１にピン２１を取り付けた後、このピン２１に前記カラー４２Ａを外装し、ピン２１の雌螺子部２９にネジ６１の雄螺子部６２を螺入し、頭部下面６３Ｋがカラー４２Ａの上縁に当接した後、さらに捻じ込むことにより頭部下面６３Ｋがカラー４２Ａの上縁が圧接し、ピン２１にカラー４２Ａが回り止め状態で固定される（図１２）。尚、図９では、駆動モータ１３，１４，１５，１６を図示省略している。 Similarly, after attaching the pin 21 to the mounting hole 31 of the inner peripheral portion 19, the collar 42A is attached to the pin 21, and the male screw portion 62 of the screw 61 is screwed into the female screw portion 29 of the pin 21. Then, after the lower surface of the head 63K comes into contact with the upper edge of the collar 42A, the lower surface of the head 63K is further screwed so that the upper edge of the collar 42A is in pressure contact with the lower surface of the head 63K, and the collar 42A is fixed to the pin 21 in a non-rotating state. (Fig. 12). In FIG. 9, the drive motors 13, 14, 15, and 16 are not shown.

そして、薄型のキャリア７を用いても、キャリア７が歯部１１Ｈ，１２Ｈの円筒形状のカラー４１Ａ，４２Ａに噛み合うため、キャリア７の歯部９のバリの発生と摩耗を抑えることができる。また、バリの発生が抑えられるため、バリにより研磨布２，４の損傷が抑えられ、同時に摩耗くずの発生も抑えることができるため、キャリア７と研磨布２，４の交換回数も削減できる。 Even if the thin carrier 7 is used, since the carrier 7 meshes with the cylindrical collars 41A and 42A of the tooth portions 11H and 12H, it is possible to suppress the generation and wear of the tooth portion 9 of the carrier 7. Further, since the generation of burrs is suppressed, damage to the polishing pads 2 and 4 can be suppressed by the burrs, and at the same time, the generation of wear debris can be suppressed, so that the number of replacements between the carrier 7 and the polishing pads 2 and 4 can be reduced.

また、使用による磨耗などにより、カラー４１Ａ，４２Ａの交換が必要になった場合も、ネジ６１を外せば、ピン２１からカラー４１Ａ，４２Ａを外して交換することができる。 Further, even when the collars 41A and 42A need to be replaced due to wear due to use or the like, the collars 41A and 42A can be removed from the pin 21 and replaced by removing the screw 61.

また、歯部１１Ｈ，１２Ｈは平坦な外周部１８，内周部１９の平坦な上面に設けられているから、摩耗くずを除去し易い構造となる。 Further, since the tooth portions 11H and 12H are provided on the flat upper surface of the flat outer peripheral portion 18 and the inner peripheral portion 19, the structure is such that wear debris can be easily removed.

このように本実施例では、上記実施例１と同様な作用・効果を奏する。 As described above, in this embodiment, the same actions and effects as those in Example 1 are obtained.

また、このように本実施例では、請求項３に対応して、前記歯部取付部たる外周部１８，内周部１９に設けた平面たる取付孔側上面部５０，５０Ａにピン２１，２１を立設し、抜け止め部材は、ピン２１の上端に着脱可能に螺合し、カラー４１Ａ，４２Ａに圧接して該カラー４１Ａ，４２Ａを回り止め状態とするネジ６１，６１であるから、外周部１８，内周部１９に設けた取付孔側上面部５０，５０Ａにピン２１を立設したため、カラー４１Ａ，４２Ａや平坦な取付孔側上面部５０，５０Ａに付着した磨耗くずの除去掃除を簡便に行うことができ、また、抜け止め部材がネジ６１，６１であるから、隣り合うピン２１，２１の上部に跨る部材がなく、掃除を容易に行うことができ、さらに、ネジ６１をカラー４１Ａ，４２Ａに圧接することにより、回り止め状態でカラー４１Ａ，４２Ａの抜け出しを防止できる。 Further, in this embodiment, in accordance with the third aspect, the pins 21 and 21 are attached to the upper surface portions 50 and 50A on the mounting hole side of the flat surface provided on the outer peripheral portion 18 and the inner peripheral portion 19 of the tooth portion mounting portion. The retaining member is a screw 61, 61 that is detachably screwed to the upper end of the pin 21 and is pressed against the collars 41A, 42A to prevent the collars 41A, 42A from rotating. Since the pins 21 are erected on the mounting hole side upper surface portions 50 and 50A provided in the portions 18 and the inner peripheral portion 19, wear debris adhering to the collars 41A and 42A and the flat mounting hole side upper surface portions 50 and 50A can be removed and cleaned. It can be easily performed, and since the retaining member is the screw 61, 61, there is no member straddling the upper part of the adjacent pins 21 and 21, and cleaning can be easily performed. Further, the screw 61 is colored. By pressure contacting the 41A and 42A, it is possible to prevent the collars 41A and 42A from coming off in a non-rotating state.

また、抜け止め部材は、ピン２１の上端に着脱可能に螺合しカラー４１Ａ，４２Ａに圧接して該カラー４１Ａ，４２Ａを回り止め状態とするネジ６１，６１であるから、ピン２１を外すことなく、ネジ６１を用いてカラー４１Ａ，４２Ａを交換することができる。 Further, since the retaining member is a screw 61, 61 that is detachably screwed to the upper end of the pin 21 and pressed against the collars 41A, 42A to prevent the collars 41A, 42A from rotating, remove the pin 21. Instead, the collars 41A and 42A can be replaced using the screws 61.

図１３は本発明の実施例３を示し、上記実施例１と同一部分に同一符号を付し、その詳細な説明を省略して詳述する。この例では、実施例２において、前記カラー４１Ａ，４２Ａの長さは、その上端が取付状態の前記ピン２１の上端より僅かに短くなる長さに設定されており、実施例２と同一長さのピン２１を用いている。尚、実施例２と同じ長さのカラー４１Ａ，４２Ａを用い、前記ピン２１を長くしてもよい。 FIG. 13 shows Example 3 of the present invention, the same parts as those in Example 1 are designated by the same reference numerals, and detailed description thereof will be omitted. In this example, in the second embodiment, the length of the collars 41A and 42A is set so that the upper end thereof is slightly shorter than the upper end of the pin 21 in the mounted state, and is the same length as the second embodiment. Pin 21 is used. The pins 21 may be lengthened by using the collars 41A and 42A having the same length as in the second embodiment.

したがって、前記ピン２１の上端の雌螺子部２９に、前記ネジ６１の雄螺子部６２を螺合すると、ピン２１の頭部下面６３Ｋがピン２１の上端に圧接し、一方、頭部下面６３Ｋとカラー４１Ａ，４２Ａとの上端との間に隙間ができ、ピン２１に対して、カラー４１Ａ，４２Ａが抜け止め状態で回動可能に取り付けられる。 Therefore, when the male screw portion 62 of the screw 61 is screwed into the female screw portion 29 at the upper end of the pin 21, the lower surface 63K of the head of the pin 21 presses against the upper end of the pin 21, while the lower surface of the head 63K. A gap is formed between the collars 41A and 42A and the upper ends, and the collars 41A and 42A are rotatably attached to the pin 21 in a retaining state.

このように本実施例では、請求項１及び５に対応して、上記各実施例と同様な作用・効果を奏する。 As described above, in this embodiment, the same actions and effects as those in each of the above-mentioned embodiments are obtained in response to claims 1 and 5.

また、このように本実施例では、請求項４に対応して、前記歯部取付部たる外周部１８，内周部１９に設けた平面たる取付孔側上面部５０，５０Ａにピン２１を立設し、抜け止め部材は、ピン２１の上端に着脱可能に螺合し、ピン２１，２１に回動可能に設けたカラー４１Ａ，４２Ａの抜け出しを防止するするネジ６１，６１であるから、外周部１８，内周部１９に設けた取付孔側上面部５０，５０Ａにピン２１を立設したから、キャリア７がカラー４１Ａ，４２Ａに噛み合うため、キャリア７の歯部９のバリの発生と磨耗を抑えることができ、また、カラー４１Ａ，４２Ａや平坦な取付孔側上面部５０，５０Ａに付着した磨耗くずの除去掃除を簡便に行うことができ、また、抜け止め部材がネジ６１，６１であるから、隣り合うピン２１，２１の上部に跨る部材がなく、掃除を容易に行うことができ、さらに、カラー４１Ａ，４２Ａが回動するため、一層、キャリア７の歯部９のバリの発生と磨耗を抑えることができる。 Further, in this embodiment, in accordance with the fourth aspect, the pin 21 is erected on the upper surface portions 50 and 50A on the mounting hole side of the flat surface provided on the outer peripheral portion 18 and the inner peripheral portion 19 which are the tooth portion mounting portions. The retaining member is a screw 61, 61 that is detachably screwed to the upper end of the pin 21 and rotatably provided on the pins 21 and 21 to prevent the collars 41A and 42A from coming off. Since the pins 21 are erected on the mounting hole side upper surface portions 50 and 50A provided in the portions 18 and the inner peripheral portions 19, the carrier 7 meshes with the collars 41A and 42A, so that burrs and wear of the tooth portions 9 of the carrier 7 occur. It is possible to easily remove and clean the wear debris adhering to the collars 41A and 42A and the flat mounting hole side upper surface portions 50 and 50A, and the retaining member is a screw 61 and 61. Therefore, there is no member straddling the upper parts of the adjacent pins 21 and 21, and cleaning can be easily performed. Further, since the collars 41A and 42A rotate, burrs on the tooth portions 9 of the carrier 7 are further generated. And wear can be suppressed.

また、変形例として、ピン２１は長さの等しい同一構成のものを使用し、長さの異なるカラー４１Ａ，４２Ａを用意し、長いカラー４１Ａ，４２Ａを用いれば、実施例２のようにネジ６１によりカラー４１Ａ，４２Ａを回り止め状態で取り付けることができ、一方、短いカラー４１Ａ，４２Ａを用いれば、実施例３のようにネジ６１によりカラー４１Ａ，４２Ａを回動可能な状態で取り付けることができる。 Further, as a modification, if the pins 21 have the same configuration with the same length, the collars 41A and 42A having different lengths are prepared, and the long collars 41A and 42A are used, the screw 61 as in the second embodiment is used. The collars 41A and 42A can be attached in a non-rotating state, while the short collars 41A and 42A can be attached in a rotatable state by the screw 61 as in the third embodiment. ..

尚、本発明は上記各実施例に限定されるものではなく、本発明の容易の範囲内において、種々の変形実施が可能である。例えば、ワークとしては、磁気ディスク基板以外の半導体ウエハや液晶基板などにも適応できる。また、押圧手段はワーク単独の他にキャリア単独、或いはキャリアとワークの両方に対向して設けられるものでもよい。さらに、実施例１のサンギアとインターナルギアの一方に、実施例２又は３の歯部を設けたり、実施例２のサンギアとインターナルギアの一方に、実施例１又は３の歯部を設けるなど、各実施例のタイプの歯部を、サンギアとインターナルギアに組み合わせて用いることができる。 It should be noted that the present invention is not limited to each of the above embodiments, and various modifications can be carried out within the range of the ease of the present invention. For example, the work can be applied to a semiconductor wafer or a liquid crystal substrate other than the magnetic disk substrate. Further, the pressing means may be provided not only on the work alone but also on the carrier alone or facing both the carrier and the work. Further, one of the sun gear and the internal gear of the first embodiment is provided with the tooth portion of the second or third embodiment, and one of the sun gear and the internal gear of the second embodiment is provided with the tooth portion of the first or third embodiment. The tooth portions of each embodiment type can be used in combination with the sun gear and the internal gear.

１両面研磨装置
２研磨布（下側研磨具）
３下定盤
４研磨布（上側研磨具）
５上定盤
６ワーク
７キャリア
８保持孔
９歯部
１１サンギア
１１Ｈ歯部
１２インターナルギア
１２Ｈ歯部
１８外周部（歯部取付部）
１９内周部（歯部取付部）
２１ピン
２２ピン本体
２３雄螺子部
２５下向き当接面
３１取付孔
３２ピン本体用孔部
３３雌螺子孔部
３５上向き受面
４１，４１Ａ，４２，４２Ａカラー
５０取付孔側上面部（平面）
５５押え部（抜け止め部材）
５０Ａ取付孔側上面部（平面）
５１Ａ段差
５５Ａ押え部（抜け止め部材）
６１ネジ（抜け止め部材） 1 Double-sided polishing device 2 Polishing cloth (lower polishing tool)
3 Lower platen 4 Abrasive cloth (upper polishing tool)
5 Upper surface plate 6 Work 7 Carrier 8 Holding hole 9 Tooth part 11 Sun gear 11H Tooth part 12 Internal gear 12H Tooth part 18 Tooth part (tooth part mounting part)
19 Inner circumference (tooth mounting part)
21 Pin 22 Pin body 23 Male screw part 25 Downward contact surface 31 Mounting hole 32 Pin body hole part 33 Female screw hole part 35 Upward receiving surface 41, 41A, 42, 42A Color 50 Mounting hole side upper surface (flat surface)
55 Presser part (retaining member)
50A Mounting hole side upper surface (flat surface)
51A Step 55A Presser part (retaining member)
61 screws (retaining member)

Claims

The work is held in a plurality of holding holes of a plurality of carriers arranged on a lower surface plate provided with a lower polishing tool, and a sun gear that meshes with each of the carriers and a sun gear that is arranged outside the sun gear and each of the carriers. A double-sided polishing device that grinds both sides of the work by rotating the lower surface plate and the upper surface plate provided with the upper polishing tool facing the lower surface plate while rotating at least one of the internal gears that mesh with the work. In
The sun gear has a plurality of teeth on the tooth mounting portion, and the internal gear has a plurality of teeth on the tooth mounting portion.
The tooth portion of the sun gear and / or the internal gear has a pin having a male screw portion at the tip that is detachably screwed to the tooth portion mounting portion, and is detachably attached to the base end side of the pin and meshes with the carrier. A double-sided polishing apparatus comprising a tubular collar and a retaining member for preventing the collar from coming out of the pin.

The collar is rotatably mounted on the pin, and the retaining member prevents the collar from coming out from the plurality of pins and is detachably provided on the tooth portion mounting portion. The double-sided polishing apparatus according to claim 1.

A screw in which the pin is erected on a flat surface provided on the tooth portion mounting portion, the retaining member is detachably screwed to the upper end of the pin, and is pressed against the collar to prevent the collar from rotating. The double-sided polishing apparatus according to claim 1, wherein the double-sided polishing apparatus is characterized by the above.

The pin is erected on a flat surface provided on the tooth portion mounting portion, and the retaining member is detachably screwed to the upper end of the pin to prevent the collar provided rotatably on the pin from coming off. The double-sided polishing apparatus according to claim 1, wherein the screw is a screw.

The pin includes a pin body that exteriors the collar, a male screw portion provided at the tip of the pin body, and a downward contact surface provided between the pin body and the male screw portion. ,
A mounting hole is provided in the tooth mounting portion, and a mounting hole is provided.
The mounting holes are provided in a hole for a pin body into which the lower portion of the pin body is inserted, a female screw hole portion provided on the tip end side of the hole portion for the pin body, and a female screw hole portion into which the male screw portion is screwed, and the pin body. The double-sided polishing according to any one of claims 1 to 4, which is provided between the hole portion and the female screw hole portion and includes an upward receiving surface to which the downward contact surface abuts. Device.