JP7405430B2 - Double-sided polishing device - Google Patents

Description

The present invention relates to a double-sided polishing apparatus that processes the surface of a workpiece held by a carrier by rotating upper and lower polishing plates and rotating and revolving the carrier.

Conventionally, as shown in FIGS. 14 and 15, this type of device includes an upper surface plate 101, a lower surface plate 102 coaxially provided opposite to the upper surface plate 101, and a structure in which the upper surface plate 101 and the lower surface plate are connected to each other. It includes a sun gear 103 and an internal gear 104 coaxially arranged between the disks 102, and a carrier 107 having a holding hole 106 for a workpiece 105 that is interposed between the sun gear 103 and the internal gear 104 and rotates and revolves, An annular lower polishing tool (polishing cloth, grindstone, etc.) is provided on the lower surface of the upper surface plate 101, and an annular upper polishing tool is provided on the upper surface of the lower surface plate 102 opposite to this lower polishing tool. The upper surface plate 101, the lower surface plate 102, the sun gear 103, and the internal gear 104 are rotationally driven by respective driving motors 108, 109, 110, and 111, and the upper surface plate 101 has a fluid outlet formed of a nozzle opened on the lower surface. There is a double-sided polishing device (for example, Patent Documents 1 and 2) provided with a double-side polishing device 112.

In the conventional double-side polishing apparatus described above, when the drive motors 108, 109, 110, and 111 rotate the upper surface plate 101, the lower surface plate 102, the sun gear 103, and the internal gear 104, the carrier 107 rotates while rotating the sun gear 103. Further, an abrasive liquid called slurry is supplied from the fluid outlet 112, so that both sides of the workpiece 105, such as a magnetic disk substrate held by the carrier 107, are placed on the upper surface plate. 101 and a lower surface plate 102.

Although it is not publicly known, it is possible to polish the internal gear 104 by driving the other driving motors 108, 109, 110 with the internal gear 104 fixed without driving the driving motor 111 of the internal gear 104. It is also possible to polish by driving the other drive motors 108, 109, 110 with the internal gear 104 fixed, without providing the drive motor 111.

Japanese Patent Application Publication No. 2007-7748 Japanese Patent Application Publication No. 2010-179398

In recent years, magnetic disk substrates have become thinner, and for example, to hold a magnetic disk substrate with a thickness of 0.5 mm, it is necessary to use a carrier with a thickness of about 0.3 to 0.4 mm, which is thinner than the magnetic disk substrate. There is. For this reason, for example, if the thickness of the carrier becomes 1/2 of the conventional thickness, the pressure applied from the gear to the teeth of the carrier will double. As the carrier becomes thinner, the pressure applied to the teeth increases, and in conventional gears such as involutes, burrs tend to form in the thickness direction (vertical direction) on the end faces of the teeth, and these burrs are polished. It damages the cloth, and the teeth are heavily worn, and the abrasive debris generated by the carrier damages the polishing cloth, so it is necessary to frequently replace the carrier and polishing cloth, and to remove the abrasive debris. The problem is that it takes a lot of time.

In addition, with conventional sun gears and internal gears, it is difficult to replace only the teeth, and it is not possible to select and use teeth made of the optimal material depending on the carrier used, polishing conditions, etc.

SUMMARY OF THE INVENTION In view of the above-mentioned problems, it is an object of the present invention to provide a double-sided polishing device that suppresses the occurrence of burrs and wear on the teeth of a carrier and is easy to maintain.

In order to achieve the above object, the invention according to claim 1 holds a workpiece in a plurality of holding holes of a plurality of carriers arranged on a lower surface plate provided with a lower polishing tool, and meshes with each of the carriers. While at least one of a sun gear and an internal gear disposed outside the sun gear and meshing with the carrier is rotated, the lower surface plate and the upper surface plate facing the same and equipped with an upper polishing tool are rotated. In the double-sided polishing device for polishing both sides of the workpiece, the sun gear has a plurality of teeth on the tooth attachment portion, the internal gear has a plurality of teeth on the tooth attachment portion, and the sun gear has a plurality of teeth on the tooth attachment portion, and the sun gear has a plurality of teeth on the tooth attachment portion, and The tooth portion of the sun gear and/or the internal gear includes a pin having a male screw portion at the tip that is removably screwed into the tooth attachment portion, and a cylinder that is removably covered on the base end side of the pin and meshes with the carrier. and a retaining member for preventing the collar from coming off the pin; the pin is made of stainless steel; The male threaded portion provided at the tip, a small diameter portion provided between the pin body and the male threaded portion and formed to have a smaller diameter than the root diameter of the male threaded portion, and the pin main body. a downward abutment surface provided between the small diameter portion, a chamfered portion provided at a corner between the outer peripheral side of the downward abutment surface and a side surface of the pin body, and a base end of the pin body. a tool engaging portion provided in the tooth portion; a mounting hole is provided in the tooth mounting portion; the mounting hole includes a pin body hole into which the tip end side of the pin body is inserted; a female threaded hole provided on the tip side of the pin body and into which the male threaded part is screwed; and an upwardly facing receptacle provided between the pin main body hole and the female threaded hole, with which the downward abutting surface abuts. It is characterized by having a surface .

According to a second aspect of the present invention, the collar is rotatably mounted on the pin body , and the retaining member prevents the plurality of collars from coming off from the plurality of pins, and also prevents the plurality of collars from coming off from the plurality of pins. The feature is that it is possible.

In the invention according to claim 3, the pin is erected on a flat surface provided on the tooth attachment portion, and the retaining member is removably screwed onto the base end of the pin body , and is pressed against the collar. It is characterized in that it is a screw that prevents the collar from rotating.

In the invention according to claim 4, the pin is provided upright on a plane provided on the tooth attachment portion, and the retaining member is removably screwed onto the base end of the pin body , and is rotatable to the pin body . The present invention is characterized in that it is a screw that prevents the collar from coming off.

According to the first aspect of the invention, since the carrier meshes with the collar, it is possible to suppress the occurrence of burrs and wear on the teeth of the carrier. Furthermore, by removing the retaining member, the collar can be removed from the pin and replaced, and if necessary, the pin can also be removed from the tooth attachment portion and replaced.

According to the second aspect of the invention, since the collar rotates, it is possible to further suppress the occurrence of burrs and wear on the teeth of the carrier. Furthermore, since the plurality of collars are prevented from falling off by the retaining member, it becomes easy to replace the plurality of collars.

According to the third aspect of the invention, since the pin is provided upright on the flat surface provided on the tooth attachment portion, it is possible to easily remove and clean the wear debris adhering to the collar and the flat surface. Furthermore, since the retaining member is a screw, there is no member that straddles the upper portions of adjacent pins, making cleaning easier. Furthermore, by pressing the screw against the collar, it is possible to prevent the collar from coming off in a non-rotating state.

According to the fourth aspect of the present invention, since the pin is provided upright on the flat surface provided on the tooth attachment portion, it is possible to easily remove and clean the wear debris attached to the collar and the flat surface. Furthermore, since the retaining member is a screw, there is no member that straddles the upper portions of adjacent pins, making cleaning easier. Furthermore, since the collar rotates, it is possible to further suppress the occurrence of burrs and wear on the teeth of the carrier.

Further, according to the invention of claim 1 , the male screw portion of the pin is screwed into the female screw hole portion of the mounting hole, and after the downward contact surface contacts the upward receiving surface, the pin is further turned in the direction of tightening. Then, the small diameter part expands slightly, the male thread part is screwed into the female thread hole part, and the downward contact surface presses against the upward receiving surface , which determines the height position of the pin and also increases the height of the pin body. Since the lower portion is inserted into the pin body hole by a predetermined length, the plurality of pins can be accurately attached to the tooth attachment portion by aligning the height positions while ensuring attachment strength. Therefore, after removing the pin, when reattaching it or replacing it, the height position of the pin can be accurately attached.

FIG. 2 is a plan view of a main part of an upper surface plate showing Embodiment 1 of the present invention. It is a longitudinal cross-sectional view of the main part of the same device as above. Same as above, the pin is shown, FIG. 3(A) is a front view, and FIG. 3(B) is a plan view. It is a sectional view of the main part of the sun gear same as the above. FIG. 2 is a cross-sectional view of the main part of the sun gear with the pin removed. It is a top view of the main part of sun gear same as the above. It is a sectional view of the main part of an internal gear same as the above. FIG. 7 is a plan view of a main part of an upper surface plate showing a second embodiment of the present invention. It is a longitudinal cross-sectional view of the lower surface plate same as the above. It is a sectional view of the main part of the sun gear same as the above. It is a top view of the main part of sun gear same as the above. It is a sectional view of the main part of an internal gear same as the above. FIG. 7 is a cross-sectional view around a tooth portion showing a third embodiment of the present invention. FIG. 2 is a perspective view showing a prior art. Same as above, it is a sectional view of the main part.

Preferred embodiments of the present invention will be described with reference to the accompanying drawings.

1 to 7 show a first embodiment of the present invention, and a double-sided polishing device 1 has a polishing cloth 2, which is a lower polishing tool, attached to an upper surface 3U, as shown in FIGS. 2, 4, and 7. A lower surface plate 3 for polishing and a polishing cloth 4 as an upper polishing tool are attached to the lower surface 5K, and the lower surface plate 3 and the upper surface plate 5 for polishing are coaxial.

As shown in FIG. 1 etc., a carrier 7 for holding a plurality of workpieces 6 is placed on the upper surface 3U of the lower surface plate 3, and this carrier 7 is provided with a support for holding the workpieces 6. A hole 8 is bored, and a plurality of teeth 9 are formed on the outer circumference 7A of the carrier 7. In addition, a plurality of carriers 7 are arranged concentrically in parallel on the upper surface 3U of the lower surface plate 3, and one carrier 7 has holding holes 8 at a plurality of locations (5 locations) for holding five workpieces 6. ) is formed. Note that the work 6 is exemplified by a metal magnetic disk substrate.

A driving sun gear 11 that meshes with the teeth 9 of the carrier 7 is provided at the center of the upper surface 3U of the lower surface plate 3, and an internal gear 12 is provided concentrically on the outer peripheral portion 3A of the lower surface plate 3. The tooth portion 9 of the carrier 7 is meshed with this internal gear 12, and the carrier 7 is located on the outer periphery of the sun gear 11. In addition, 11J in the figure is the rotation center axis of the sun gear 11.

The sun gear 11 and the internal gear 12 have different rotational speeds, and the sun gear 11 and the internal gear 12 rotate differently. As a result, when the lower surface plate 3, upper surface plate 5, sun gear 11, and internal gear 12 are rotated by the lower surface plate drive motor 13, the upper surface plate drive motor 14, the sun gear drive motor 15, and the internal gear drive motor 16, The carrier 7 makes a planetary motion revolving around the sun gear 11 while rotating, and both upper and lower surfaces of the workpiece 6 held by the carrier 7 are polished.

Although it is preferable to use a method of driving the four drive motors 13, 14, 15, and 16 due to the pressure applied to the teeth 9 of the carrier 7, etc., it is preferable to use a method of driving the four drive motors 13, 14, 15, and The internal gear 12 can be polished by driving the other drive motors 13, 14, 15 while the gear 12 is fixed (not rotating), or the internal gear 12 can be fixed without providing the internal gear drive motor 16 in the double-sided polishing device 1. In this state, the other drive motors 13, 14, and 15 can be driven to perform polishing.

Furthermore, without driving the sun gear drive motor 15, the other drive motors 13, 14, 16 may be driven to polish while the sun gear 11 is fixed (not rotating), or the sun gear drive motor 15 may be driven by the sun gear drive motor 15. It is also possible to polish by driving the other drive motors 13, 14, 16 with the sun gear 11 fixed (not rotating) without providing the motor 15.

The lower surface plate 3 and the upper surface plate 5 have the same outer diameter, and the motors 13, 14, 15, 16 are formed by servo motors or inverter motors. A brake means (not shown), which is a stopping means, is integrally provided.

Further, as shown in FIG. 2, the upper surface plate 5 is provided with a downward outlet 17A of fluid, which is a pressing means 17, on the lower surface 5K, and after polishing, when the upper surface plate 5 is stopped, the A fluid supply path (not shown) is connected to the upper part of the outlet 17A so that, for example, compressed air as a fluid can be introduced, and compressed air or the like is supplied from this fluid supply path. It has become. A plurality of the outlets 17A are arranged so as to correspond to the carriers 7 arranged on the lower surface plate 3. As explained in the prior art section, the upper surface plate 5 is provided with a fluid outlet (not shown) consisting of a nozzle opened on the lower surface 5K, and the supply means provided on the upper surface plate 5 is supplied through the slurry ring. is connected to the fluid outlet, and an abrasive such as slurry is supplied between the upper and lower surface plates 5 and 3 from this fluid outlet.

As shown in FIG. 1 etc., a plurality of teeth 11H are provided at equal intervals in the circumferential direction on the outer circumferential portion 18, which is the tooth attachment portion of the sun gear 11, and the inner circumference, which is the tooth attachment portion of the internal gear 12, is provided at equal intervals in the circumferential direction. The portion 19 is provided with a plurality of tooth portions 12H at equal intervals in the circumferential direction, and these tooth portions 11H, 12H are provided with pins 21, 21 that are removably screwed into the lower surface plate 3, and each pin 21, 21. It includes cylindrical collars 41 and 42 that are removably attached to the proximal end of the carrier 7 and engage with the carrier 7, and the pin 21 is made of a hard material such as stainless steel.

As shown in FIG. 3, the pin 21 includes a cylindrical pin body 22 provided on the base end side, a male screw portion 23 having a smaller diameter than the pin body 22 and provided at the tip, and the pin body 22. It integrally has a small diameter part 24 provided between the male thread part 23, and the small diameter part 24 is formed to have a smaller diameter than the root diameter of the male thread part 23, and The small portion 24 is formed shorter than the male screw portion 23.

Further, a downward contact surface 25 in a direction crossing the central axis of the pin 21 is provided between the tip of the pin main body 22 and the small diameter portion 24, and the outer peripheral side of this downward contact surface 25 and the pin A chamfered portion 26 is provided at the corner between the main body 22 and the side surface by chamfering. Note that the downward contact surface 25 faces toward the tip of the pin 21.

Further, a tool engaging portion 27 is provided at the base end of the pin 21, and this tool engaging portion 27 has notches 28, 28 formed by cutting out the outer peripheral side of the pin 21 at the center of the pin 21. The cutout portion 28 includes a flat surface 28A in the length direction of the pin 21 and a step surface 28B provided on the tip side of the flat surface 28A, and the notch portion 28 is provided with a flat surface 28A in the length direction of the pin 21 and a step surface 28B provided on the tip side of the flat surface 28A. The surfaces 28A, 28A are arranged substantially parallel to each other. Therefore, the pin 21 can be rotated by locking a tool such as pliers or a spanner to both flat surfaces 28A, 28A.

In the manufacturing process of the pin 21, preferably, after forming the tool engaging part 27 on the round bar forming the pin 21, the tool engaging part 27 is gripped and fixed by a chuck device, and in the case of case 1, , a small diameter portion 24 is formed using a cutting device at a position with the base end of the pin 21 as a reference. By doing so, the downward contact surface 25 can be formed at an accurate position from the base end of the pin 21. Thereafter, a male screw portion 23 is formed in a portion of the pin 21 that is closer to the tip than the small diameter portion 24 .

Alternatively, in the case of case 2, after forming the male threaded portion 23 to a position on the distal end side of the downward contact surface 25 with a length equal to or longer than the male threaded portion 23, the small diameter portion 24 is formed. Note that in case 1 and case 2, the tool engaging portion 27 may be formed after forming the small diameter portion 24 and the male thread portion 23.

If the pin 21 does not have the small diameter portion 24, if a male thread is formed from the tip of the pin 21 to the downward abutting surface 25, only an incomplete threaded portion can be formed in the vicinity of the downward abutting surface 25. The contact surface 25 cannot be accurately brought into contact with an upward receiving surface (described later), and the downward contact surface 25 cannot be brought into pressure contact with an upward receiving surface (described later).

As shown in FIGS. 1, 2, and 4, the outer circumferential portion 18 of the sun gear 11 is formed into an outer flange shape, and the upper and lower surfaces of the outer circumferential portion 18 correspond to the positions of the plurality of tooth portions 11H. A plurality of mounting holes 31 are provided in different directions. The upper surface of the outer circumferential portion 18 provided with the attachment hole 31 is a flat attachment hole side upper surface portion 50. The mounting hole 31 is a stepped hole, and is provided coaxially with a pin body hole 32 into which the lower part of the tip side of the pin body 22 is inserted, and the lower part of this pin body hole 32. The male thread part 23 is provided with a female thread hole part 33 into which the male thread part 23 is removably screwed, and between the pin main body hole part 32 and the female thread hole part 33 there is an upwardly facing surface in which the downward abutting surface 25 abuts. A receiving surface 35 is provided. Further, the female screw hole portion 33 has a smaller diameter than the pin body hole portion 32.

As shown in FIG. 4, the female screw hole portion 33 is formed to penetrate the lower surface of the outer peripheral portion 18. Further, the length L of the female screw hole portion 33 is longer than the length LP between the downward contact surface 25 of the pin 21 and the lower end 21K, and the difference in length (L−LP) is This is the maximum tightening margin of the male screw portion 23. When the male screw portion 23 is tightened by this tightening margin, the lower end 21K of the pin 21 becomes flush with the lower surface of the outer peripheral portion 18, and in this attached state, the lower end 21K of the pin 21 does not protrude from the lower surface of the outer peripheral portion 18. In this way, since the lower end 21K does not protrude from the lower surface of the outer circumferential portion 18, it becomes difficult for dust and the like to adhere thereto.

Then, as shown in FIG. 4, when the pin body 22 is fitted into the pin body hole 32 and the male thread part 23 of the pin 21 is screwed into the female thread hole part 33 of the mounting hole 31, the upward receiving surface 35 The downward contact surface 25 comes into pressure contact with the pins 21, and the upper end heights of the plurality of pins 21 are correctly positioned. In addition, in the attached state of the pin 21, the base end of the pin 21 is the upper end, and the tip of the pin 21 is the lower end 21K.

In this case, when the pin 21 is further turned in the tightening direction after the downward abutting surface 25 of the pin 21 has come into contact with the upward receiving surface 35, the small diameter portion 24 will expand slightly, and the male screw will fit into the female threaded hole portion 33. When the screw portion 23 is screwed in, the downward contact surface 25 presses against the upward receiving surface 35, and the height position of the pin 21 becomes accurate, and the mounting strength is ensured so that it will not loosen even when subjected to vibration. can. In addition, the dimension by which the small diameter portion 24 extends is set to the maximum tightening margin.

The collar 41 is rotatably mounted on the pin body 22 of the pin 21 fixed to the outer peripheral part 18. In this case, as shown in FIG. 4, the height of the collar 41 is formed to be slightly lower than the height from the upper surface portion 50 on the mounting hole side to the upper end (base end) of the pin 21 in the mounted state. There is. For example, in a collar 41 having a diameter (outer diameter) of 5 to 10 mm (5 mm or more and 10 mm or less), the height difference h between the pin 21 and the collar 41 is about 0.7 to 1.5 mm. By doing so, smooth rotation of the collar 41 can be ensured.

Further, as shown in FIG. 4, the collar 41 is arranged such that the outer circumferential surface of the collar 41 on the center side of the lower surface plate 3 is located on the outer circumferential surface 18G of the outer circumferential portion 18. As a result, since the mounting hole side upper surface portion 50 is not located closer to the center of the lower surface plate 3 than the collar 41 position, dust is less likely to accumulate on the center side of the lower surface plate 3 of the collar 41.

As shown in FIG. 4, on the upper surface part 50 of the outer peripheral part 18 of the sun gear 11 on the side of the mounting hole, there is a gap 57 between the teeth 11H, 11H, and the center side of the plurality of teeth 11H, 11H. A step 51 is provided around the periphery at a distance of 1, and the step 51 is centered at the center of the rotation center axis 11J.

Further, a center side upper surface part 52 formed higher than the mounting hole side upper surface part 50 is provided on the center side of the step 51, and a gap 53 (see FIG. 4) is provided. The width of this gap 53 is 0.5 times or more the outer diameter of the collar 41, and by providing the gap 53, it becomes easier to remove wear debris and the like. Further, the height of the step 51 corresponds to the height of the upper end of the pin 21 in the attached state.

Further, as shown in FIG. 1 and the like, a plurality of holding portions 55 are provided as retaining members for preventing the collar 41 from coming off the pin 21. The holding portions 55 are formed by forming a plate material into an arc shape corresponding to the arrangement of the tooth portions 11H, and in this example, five holding portions 55 prevent all the collars 41 from coming off. Note that the presser portion 55 only needs to have at least a lower outer corner portion 56 of the outer periphery formed in an arc shape.

For this reason, the lower outer corner portion 56 of the presser portion 55 is arranged so as to be close to or in contact with the upper end (base end) of the pin 21, and the lower surface 55K of the presser portion 55 on the lower outer corner portion 56 side is aligned with the upper end of the collar 41. The holding parts 55 are arranged at intervals 57, and are removably fixed to the central upper surface part 52 by screws 58, which are fixing means, with their lower surfaces 55K in contact with the central upper surface part 52. A female screw hole 58M into which a screw 58 is removably screwed is formed in the central upper surface 52. By providing the interval 57 in this manner, smooth rotation of the collar 41 can be ensured. In this example, the height position of the upper end of the pin 21 is equal to the height position of the lower surface 55K, and the vertical dimension of the interval 57 is equal to the height difference h.

In order to prevent the collar 41 from coming off by the presser portion 55, the vertical dimension of the interval 57 may be set to be greater than or equal to the height difference h, and a portion of the lower surface 55K of the presser portion 55 may be attached to the collar 41. If it is located above, the lower outer corner portion 56 may be arranged on the center side (on the right side in FIG. 4).

As shown in FIGS. 1, 2, and 7, the inner circumferential portion 19, which is a tooth attachment portion of the internal gear 12, is formed in a ring shape, and the inner circumferential portion The mounting hole 31 is provided on the upper surface of the holder 19 . Note that the upper surface of the inner peripheral portion 19 provided with the attachment hole 31 is the attachment hole side upper surface portion 50A. Further, the female screw hole 33 provided in the inner peripheral portion 19 is formed longer than the male screw portion 23, and the bottom 33T of the female screw hole 33 is closed.

The collar 42 is rotatably mounted on a pin 21 fixed to the inner peripheral part 19. In this case, in the installed state, the height of the collar 42 is formed to be slightly lower than the height from the upper surface portion 50A on the mounting hole side to the upper end (base end) of the pin 21, as shown in FIG. There is. For example, in a collar 42 having a diameter (outer diameter) of 5 to 10 mm (5 mm or more and 10 mm or less), the height difference h between the pin 21 and the collar 42 is about 0.7 to 1.5 mm.

Further, the collar 42 is arranged such that the outer peripheral side of the lower surface plate 3 on the outer peripheral surface of the collar 42 is located on the inner peripheral surface 19N of the inner peripheral portion 19. It becomes difficult for garbage to accumulate.

The collars 41 and 42 are made of synthetic resin, and preferably made of the same synthetic resin as the carrier 7, such as PEEK resin (polyetheretherketone). Note that the upper and lower edges of the collars 41 and 42 are parallel to each other and perpendicular to the central axes of the collars 41 and 42.

As shown in FIG. 7, a plurality of tooth portions 12H, 12H, . Steps 51A are provided around the circumference at intervals, and the steps 51A are centered on the center of the rotation center axis 11J. An outer circumferential upper surface portion 52A formed higher than the mounting hole side upper surface portion 50A is provided on the inner circumferential side of the step 51A, and a gap 53A (FIG. 7) is provided between the tooth portion 12H and the step 51A. ), and the width of this gap 53A is at least 0.5 times the outer diameter of the collar 42, making it easier to remove wear debris and the like using the gap 53A. Further, the height of the step 51A corresponds to the height of the pin 21 in the attached state.

Further, as shown in FIG. 7 and the like, a plurality of holding portions 55A are provided as retaining members for preventing the collar 42 from coming off from the pin 21. The holding portion 55A is formed by forming a plate material into an arc shape corresponding to the arrangement of the tooth portions 12H, and in this example, five holding portions 55A prevent all the collars 42 from coming off. It is sufficient that at least the inner lower corner portion 56A of the inner circumferential edge of the presser portion 55A is formed in an arc shape.

In addition, as the presser parts 55, 55A, the ring is divided into five parts, but the presser parts 55, 55A may be one-piece ring-shaped parts, parts divided into two parts, or parts divided into three or more parts. It is sufficient that one presser portion prevents at least the plurality of collars 41 and 42 from coming off. Note that, as shown in FIGS. 1 and 6, a gap is provided between adjacent presser parts 55, 55, and a gap is similarly provided between adjacent presser parts 55A, 55A.

For this reason, the lower inner corner 56A of the presser portion 55A is arranged so as to be close to or in contact with the upper end (base end) of the pin 21, and the lower surface 55K of the presser portion 55A on the inner lower corner 56A side is aligned with the collar 42. The holding portion 55A is arranged at a distance 57A from the upper end, and is removably fixed to the outer circumferential upper surface portion 52A with a screw 58 serving as a fixing means, with its lower surface 55K in contact with the outer circumferential upper surface portion 52A. A female screw hole 58M into which a screw 58 is removably screwed is bored in the central upper surface 52. By providing the interval 57A in this manner, smooth rotation of the collar 42 can be ensured. In this example, the height position of the upper end of the pin 21 is equal to the height position of the lower surface 55K, and the vertical dimension of the interval 57A is equal to the height difference h.

In order to prevent the collar 42 from coming off by the presser portion 55A, the vertical dimension of the interval 57A may be greater than or equal to the height difference h, and a portion of the lower surface 55K of the presser portion 55A may be attached to the collar 42. If it is located above, the lower inner corner portion 56A may be arranged on the outer circumferential side (on the left side in FIG. 7).

Next, the operation of the above structure will be explained. The work 6 is placed on the upper surface 3U of the lower surface plate 3 together with the carrier 7, with the upper surface plate 5 separated from the lower surface plate 3 by a lifting means (not shown). At this time, the workpiece 6 is held in the holding hole 8 of the carrier 7. Then, the upper surface plate 5 is lowered to bring the lower surface side of the upper surface plate 5 into contact with the upper surface of the workpiece 6.

Then, when the lower surface plate 3, the upper surface plate 5, the sun gear 11, and the internal gear 12 are rotated by the lower surface plate drive motor 13, the upper surface plate drive motor 14, the sun gear drive motor 15, and the internal gear drive motor 16, The carrier 7 makes a planetary motion revolving around the sun gear 11 while rotating, and further, by supplying an abrasive such as slurry (not shown), both sides of the workpiece 6 held by the carrier 7 are polished. Polishing is performed by the polishing cloth 2 on the lower surface plate 3 and the polishing cloth 4 on the upper surface plate 5.

After polishing both sides of the workpiece 6, when the upper surface plate 5 is slightly raised and separated from the lower surface plate 3, or before or after, a fluid such as compressed air or a liquid such as water is supplied from the outlet 17A with an on-off valve (not shown). ) to eject toward the upper surface of the workpiece 6. Note that after the upper surface plate 5 stops rotating, the fluid supply path is connected to the outlet 17A. The jetting is arranged such that at least one outlet 17A faces one workpiece 6. Then, the workpiece 6 and carrier 7 are pressed against the lower surface plate 3 by the pressing force of the fluid, and the workpiece 6 and carrier 7 are peeled off from the lower surface 5K of the upper surface plate 5 and remain on the upper surface plate 5. continue.

When the work 6 and the carrier 7 are pressed by the fluid against the lower surface plate 3, or when the fluid is stopped and the pressure is released, the work is carried out between the upper surface plate 5 and the lower surface plate 3. The worker puts his hand in and takes out workpiece 6 and carrier 7. Note that the workpiece 6 and the carrier 7 may be taken out using an automatic takeout device equipped with a robot arm or the like. After this, a new workpiece 6 and carrier 7 are placed on the lower surface plate 3 again and polishing is performed.

In this case, even if a thin carrier 7 is used, the carrier 7 meshes with the rotatable collars 41 and 42 of the teeth 11H and 12H, so burrs occur in the thickness direction (vertical direction) on the end surface of the teeth 9. In addition, wear of the tooth portion 9 of the carrier 7 can be suppressed. In addition, since the generation of burrs is suppressed, damage to the polishing cloths 2 and 4 due to burrs is suppressed, and the generation of wear debris can also be suppressed, so the number of times the carrier 7 and polishing cloths 2 and 4 are replaced can be greatly reduced. It can be reduced.

In addition, due to the thinner carrier 7, the pressure when the teeth 9 of the carrier 7 and the collars 41, 42 mesh increases, and wear is more likely to occur than in the past. Even if it becomes necessary to replace the collars 42, the collars 41, 42 can be removed and replaced from the plurality of pins 21, 21, . Furthermore, the collars 41, 42 made of different materials can be selected and used depending on the carrier 7 used, the polishing conditions, etc., and therefore the collars 41, 42 can be easily replaced. Note that even if the collars 41 and 42 become worn due to long-term use, they can be replaced.

Moreover, since the gaps 57, 57A are provided between the tooth portions 11H, 12H and the steps 51, 51A, the structure allows easy removal of wear debris.

In this embodiment, in accordance with claim 1, the workpiece 6 is inserted into the plurality of holding holes 8 of the plurality of carriers 7 arranged on the lower surface plate 3 provided with the polishing cloth 2 serving as the lower polishing tool. While holding and rotating at least one of the sun gears 11 that mesh with the respective carriers 7 and the internal gears 12 that are arranged outside the sun gears 11 and mesh with the carriers 7, the lower surface plate 3 and the upper polishing surface facing the lower surface plate 3 are rotated. In a double-sided polishing device 1 that polishes both sides of a workpiece 6 by rotating an upper surface plate 5 equipped with a polishing cloth 4, a sun gear 11 has a plurality of teeth 11H on an outer peripheral portion 18 serving as a tooth attachment portion. In addition, the internal gear 12 has a plurality of teeth 12H on the inner peripheral part 19 which is a tooth attachment part, and the teeth 11H and 12H of the sun gear 11 and/or the internal gear 12 are attached to the outer peripheral part 18 and the inner peripheral part 19. A pin 21 having a male threaded portion 23 at its tip that is removably screwed into the pin 21, cylindrical collars 41 and 42 that are removably mounted on the proximal end of the pin 21 and mesh with the carrier 7, and the collars 41 and 42. Since the holding portions 55 and 55A are provided as retaining members to prevent the pin 21 from coming off, the carrier 7 engages with the collars 41 and 42, thereby suppressing the occurrence of burrs and wear on the tooth portions 9 of the carrier 7. Furthermore, by removing the presser parts 55 and 55A, the collars 41 and 42 can be removed from the pin 21 and replaced.Furthermore, if necessary, the collars 41 and 42 can be removed from the outer peripheral part 18 and the inner peripheral part 19. It is also possible to remove the pin 21 and replace it.

In this embodiment, the collars 41 and 42 are rotatably mounted on the pin body 22 , and the retaining portion 55, which is a retaining member, is attached to a plurality of collars from a plurality of pins 21 in accordance with claim 2. In addition to preventing the collars 41 and 42 from coming off, since the collars 41 and 42 are removably provided on the outer peripheral part 18 and the inner peripheral part 19, the rotation of the collars 41 and 42 further prevents the occurrence of burrs on the teeth 9 of the carrier 7. In addition, since the plurality of collars 41, 42 are prevented from coming off by the holding portions 55, 55A, it becomes easy to replace the plurality of collars 41, 42.

Further, in this embodiment, in accordance with claim 1 , the pin 21 is made of stainless steel and includes a cylindrical pin body 22 that covers the collars 41 and 42, and a tip having a diameter smaller than that of the pin body 22. a male threaded portion 23 provided between the pin body 22 and the male threaded portion 23; a small diameter portion 24 provided between the pin body 22 and the male threaded portion 23 and formed to have a smaller diameter than the root diameter of the male threaded portion 23; A downward contact surface 25 provided between the small diameter portion 24 , a chamfered portion 26 provided at the corner between the outer peripheral side of the downward contact surface 25 and the side surface of the pin body 22, and A tool engaging portion is provided at the base end , and a mounting hole 31 is provided in the outer circumferential portion 18 and inner circumferential portion 19, which are tooth portion mounting portions, and the pin body 22 is inserted into the mounting hole 31. Between the main body hole 32, the female thread hole 33 provided at the lower part of the pin main body hole 32 and into which the male thread 23 is screwed, and the pin main body hole 32 and the female thread hole 33. The male screw portion 23 of the pin 21 is screwed into the female screw hole portion 33 of the mounting hole 31, and the downward abutting surface 35 is provided with an upward receiving surface 35 which is in contact with the downward abutting surface 25. The height position of the pin 21 is determined by the contact of the contact surface 25, and the lower part of the pin body 22 is inserted into the pin body hole 32 by a predetermined dimension, so that the mounting strength is ensured. The plurality of pins 21 can be accurately attached to the outer circumferential portion 18 and the inner circumferential portion 19 by aligning their height positions. Therefore, the height position of the pin 21 can be accurately set when the pin 21 is removed and then reattached or replaced.

Hereinafter, as an effect of the embodiment, since the pin 21 is provided with the tool engaging portion 27, there is no protrusion on the pin 21, and the pin 21 can be rotated by locking a tool such as pliers or a spanner on both flat surfaces 28A, 28A. can move. Further, since the pin 21 is provided with the small diameter portion 24 which is a portion without a threaded portion, the height position of the pin 21 can be accurately controlled by pressing the downward contact surface 25 and the upward receiving surface 35. In addition, since the chamfered portion 26 is provided, it becomes easier for the downward abutting surface 25 and the upward receiving surface 35 to come into pressure contact with each other. Furthermore, since the height difference h between the pin 21 and the collar 41 is approximately 0.7 to 1.5 mm, and the height position of the upper end of the pin 21 is approximately equal to the height position of the lower surface 55K of the presser part 55, the collar 41 , 42 are vertically displaced, the collars 41, 42 can be rotated smoothly. The teeth 9 of the carrier 7 mesh with the center sides of the collars 41 and 42 in the height direction. Further, since the collars 41 and 42 are made of PEEK resin, they have excellent wear resistance. Note that the collars 41 and 42 can be replaced with ones made of various materials other than PEEK resin, depending on the conditions of use. Furthermore, since the male screw portion 23 of the pin 21 is screwed into the female screw hole portion 33 of the mounting hole 31, a nut is not required, and parts management and installation work are facilitated. Furthermore, since the tightening margin (L-LP) is set, the pins 21 can be installed uniformly based on the tightening margin (L-LP). The female threaded hole portion 33 having the bottom portion 33T is longer than the male threaded portion 23 by at least the tightening margin (L-LP).

8 to 12 show a second embodiment of the present invention, in which the same parts as in the first embodiment are given the same reference numerals, and detailed description thereof will be omitted and will be described in detail. In this example, a screw 61 is used as the retaining member, and the collars 41A, 42A are fixed to the pin 21 in a non-rotating state by the screw 61. The collars 41A and 42A have substantially the same configuration as the collars 41 and 42, except that they are slightly longer and are made of different materials.

As shown in FIG. 10, there is no step 51 on the upper surface of the outer peripheral portion 18, and the upper surface portion 50 on the side of the attachment hole is formed flat. Further, the length of the collar 41A is set so that its upper end is slightly higher than the upper end of the pin 21 in the attached state.

As shown in FIGS. 10 to 12, the screw 61 integrally includes a male threaded portion 62 and a head 63 having a larger diameter than the male threaded portion 62, and has a cross groove on the upper surface of the head 63. A tool engaging portion 64 is provided, and a lower head surface 63K of the head 63 is formed flat. Furthermore, a female screw portion 29 is formed at the upper end of the pin 21, into which the male screw portion 62 is screwed. The difference in height between the upper end of the pin 21 and the upper ends of the collars 41A and 42A is the tightening allowance S of the screw 61.

After attaching the pin 21 to the attachment hole 31 of the outer peripheral part 18, the collar 41A is mounted on the pin 21, and the male thread part 62 of the screw 61 is screwed into the female thread part 29 of the pin 21. After the lower surface 63K contacts the upper edge of the collar 41A, by further screwing, the lower surface 63K of the head comes into pressure contact with the upper edge of the collar 41A, and the collar 41A is fixed to the pin 21 in a non-rotating state (Fig. 10 ).

Similarly, after attaching the pin 21 to the attachment hole 31 of the inner circumferential portion 19, the collar 42A is mounted on the pin 21, and the male thread portion 62 of the screw 61 is screwed into the female thread portion 29 of the pin 21. After the lower head surface 63K contacts the upper edge of the collar 42A, by further screwing the lower surface 63K of the head comes into pressure contact with the upper edge of the collar 42A, and the collar 42A is fixed to the pin 21 in a non-rotating state. (Figure 12). Note that in FIG. 9, the drive motors 13, 14, 15, and 16 are not shown.

Even if a thin carrier 7 is used, since the carrier 7 meshes with the cylindrical collars 41A, 42A of the teeth 11H, 12H, the generation of burrs and wear on the teeth 9 of the carrier 7 can be suppressed. Further, since the generation of burrs is suppressed, damage to the polishing cloths 2 and 4 due to burrs can be suppressed, and at the same time, the generation of wear debris can be suppressed, so that the number of times the carrier 7 and the polishing cloths 2 and 4 are replaced can be reduced.

Further, even if it becomes necessary to replace the collars 41A, 42A due to wear due to use, the collars 41A, 42A can be replaced by removing the screws 61 and removing the collars 41A, 42A from the pin 21.

Further, since the tooth portions 11H and 12H are provided on the flat upper surfaces of the flat outer circumferential portion 18 and the flat inner circumferential portion 19, the structure is such that wear debris can be easily removed.

In this way, this embodiment provides the same functions and effects as those of the first embodiment.

Further, in this embodiment, in accordance with claim 3, pins 21, 21 are provided on the flat mounting hole side upper surface parts 50, 50A provided on the outer peripheral part 18 and inner peripheral part 19, which are the tooth part mounting parts. The retaining members are screws 61, 61 that are removably screwed into the base end of the pin body 22 , press against the collars 41A, 42A, and prevent the collars 41A, 42A from rotating. Since the pin 21 is provided upright on the upper surface portions 50, 50A on the mounting hole side provided in the outer peripheral portion 18 and inner peripheral portion 19, wear debris attached to the collars 41A, 42A and the flat upper surface portions 50, 50A on the mounting hole side can be removed. Removal and cleaning can be easily performed, and since the retaining members are the screws 61, 61, there is no member that spans over the tops of the adjacent pins 21, 21, making cleaning easy. By press-contacting the collars 61 to the collars 41A, 42A, the collars 41A, 42A can be prevented from coming off in a non-rotating state.

Further, since the retaining member is a screw 61, 61 that is removably screwed onto the upper end of the pin 21 and presses against the collars 41A, 42A to prevent the collars 41A, 42A from rotating, the pin 21 cannot be removed. Instead, the collars 41A and 42A can be replaced using the screws 61.

FIG. 13 shows a third embodiment of the present invention, in which the same parts as in the first embodiment are denoted by the same reference numerals, and detailed description thereof will be omitted and will be described in detail. In this example, in Embodiment 2, the lengths of the collars 41A and 42A are set so that their upper ends are slightly shorter than the upper ends of the pins 21 in the attached state, and are the same length as in Embodiment 2. The pin 21 is used. Note that the pin 21 may be made longer by using collars 41A and 42A having the same length as in the second embodiment.

Therefore, when the male threaded portion 62 of the screw 61 is screwed into the female threaded portion 29 at the upper end of the pin 21, the lower head surface 63K of the pin 21 comes into pressure contact with the upper end of the pin 21, while the lower surface 63K of the head A gap is created between the collars 41A, 42A and their upper ends, and the collars 41A, 42A are rotatably attached to the pin 21 in a manner that prevents them from coming off.

As described above, this embodiment provides the same functions and effects as those of the above-mentioned embodiments, corresponding to claims 1 and 5.

Further, in this embodiment, in accordance with claim 4, the pins 21 are set up on the flat upper surface portions 50 and 50A on the mounting hole side provided on the outer peripheral portion 18 and the inner peripheral portion 19, which are the tooth portion mounting portions. The retaining member includes a screw 61, which is removably screwed onto the base end of the pin body 22 and prevents the collars 41A and 42A rotatably provided on the pin bodies 22 and 22 from coming off. 61, the pins 21 are provided upright on the upper surface portions 50, 50A of the mounting holes provided in the outer circumferential portion 18 and inner circumferential portion 19, so that the carrier 7 engages with the collars 41A, 42A, so that the teeth 9 of the carrier 7 The occurrence of burrs and wear can be suppressed, and wear debris attached to the collars 41A, 42A and the flat upper surface portions 50, 50A of the mounting holes can be easily removed and cleaned. Since the screws 61 and 61 are screws, there is no member that straddles the tops of the adjacent pins 21 and 21, making cleaning easier.Furthermore, since the collars 41A and 42A rotate, the teeth of the carrier 7 can be cleaned more easily. The occurrence of burrs and wear on the portion 9 can be suppressed.

In addition, as a modification, if the pins 21 are of the same configuration and have the same length, and collars 41A and 42A of different lengths are prepared, and the long collars 41A and 42A are used, the screw 61 can be used as in the second embodiment. The collars 41A, 42A can be attached in a non-rotating state, whereas if short collars 41A, 42A are used, the collars 41A, 42A can be attached in a rotatable state with the screw 61 as in the third embodiment. .

It should be noted that the present invention is not limited to the above embodiments, and various modifications can be made within the scope of the present invention. For example, the workpiece can be applied to semiconductor wafers, liquid crystal substrates, etc. other than magnetic disk substrates. Further, the pressing means may be provided not only on the workpiece but also on the carrier alone, or facing both the carrier and the workpiece. Furthermore, the tooth portion of Example 2 or 3 is provided on one of the sun gear and the internal gear of Example 1, the tooth portion of Example 1 or 3 is provided on one of the sun gear and the internal gear of Example 2, etc. The types of teeth in each embodiment can be used in combination with sun gears and internal gears.

1 Double-sided polishing device 2 Polishing cloth (lower polishing tool)
3 Lower surface plate 4 Polishing cloth (upper polishing tool)
5 Upper surface plate 6 Work 7 Carrier 8 Holding hole 9 Teeth 11 Sun gear 11H Teeth 12 Internal gear 12H Teeth 18 Outer periphery (tooth attachment part)
19 Inner periphery (teeth attachment part)
21 Pin 22 Pin body 23 Male screw portion 25 Downward contact surface 31 Mounting hole 32 Pin body hole 33 Female screw hole 35 Upward receiving surface 41, 41A, 42, 42A Collar 50 Mounting hole side upper surface (flat surface)
55 Holding part (retaining member)
50A Mounting hole side upper surface (flat surface)
51A Step 55A Holding part (retaining member)
61 Screw (retainer)

Claims (4)

A sun gear that holds a workpiece in a plurality of holding holes of a plurality of carriers disposed on a lower surface plate having a lower polishing tool and meshes with each of the carriers, and a sun gear that is disposed outside of the sun gear and each of the carriers. A double-sided polishing device that polishes both sides of the workpiece by rotating the lower surface plate and an upper surface plate facing the lower surface plate and having an upper polishing tool while rotating at least one of the internal gears that mesh with the internal gear. In,
The sun gear includes a plurality of teeth on a tooth attachment portion, and the internal gear includes a plurality of teeth on a tooth attachment portion,
The tooth portion of the sun gear and/or the internal gear includes a pin having a male thread portion at the tip that is removably screwed into the tooth attachment portion, and a pin that is removably mounted on the proximal end of the pin and meshes with the carrier. comprising a cylindrical collar and a retaining member that prevents the collar from coming off the pin ;
The pin is made of stainless steel, and includes a cylindrical pin body that covers the collar, the male screw portion that has a smaller diameter than the pin body and is provided at the tip, and a portion between the pin body and the male screw portion. a small-diameter portion formed to have a smaller diameter than the root diameter of the male thread portion; a downward contact surface provided between the pin body and the small-diameter portion; and a downward contact surface of the downward contact surface. A chamfered portion provided at a corner between an outer peripheral side and a side surface of the pin body, and a tool engaging portion provided at a base end of the pin body,
A mounting hole is provided in the tooth mounting portion, and the mounting hole is provided in a pin body hole into which the tip end of the pin body is inserted, and in the tip side of this pin body hole, and the male screw portion is provided in the hole for the pin body. A double-sided polishing device comprising: a female screw hole that screws together; and an upward receiving surface that is provided between the pin body hole and the female screw hole and that the downward abutting surface abuts. . The collar is rotatably mounted on the pin body , and the retaining member prevents the plurality of collars from coming off from the plurality of pins, and is removably provided on the tooth attachment portion. The double-sided polishing apparatus according to claim 1, characterized in that: The pin is provided upright on a flat surface provided on the tooth attachment portion, and the retaining member is removably screwed onto the base end of the pin body , and presses against the collar to prevent rotation of the collar. The double-sided polishing device according to claim 1, wherein the double-sided polishing device is a screw. The pin is provided upright on a flat surface provided on the tooth attachment portion, the retaining member is removably screwed onto the base end of the pin body , and the collar is rotatably provided on the pin body . The double-sided polishing device according to claim 1, characterized in that the screw is a screw that prevents the screw from coming off.

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