JP5908703B2 - Grinding apparatus and method for cleaning circular plate workpiece - Google Patents

Description

  The present invention relates to a grinding apparatus capable of cleaning when a surface of a workpiece held on a chuck table during grinding is carried out of the chuck table.

  For example, a circular plate-like workpiece such as a semiconductor wafer is formed to a predetermined thickness by grinding with a grinding wheel coming into contact with the other surface while one surface is held by a chuck table of a grinding device. However, when the thickness of the circular plate-shaped workpiece is extremely thin, such as several tens of μm or less, there is a problem that it becomes easy to break and handling such as subsequent conveyance becomes difficult. Therefore, the outer peripheral portion of the circular plate-like workpiece is not ground but remains in thickness, and an annular reinforcing portion is formed to prevent breakage and facilitate handling.

  However, if the circular plate-like workpiece formed with the annular reinforcing portion is sucked and held by the entire surface suction pad, the thinly formed portion cannot be adsorbed, so that the thinly formed portion is curved. There is a problem of damage.

  Therefore, by using a holding mechanism having at least three holding members movable in the radial direction, and these holding members support the outer peripheral portion of the reinforcing portion of the circular plate-shaped workpiece from the side surface side, A technique for preventing breakage due to bending has been proposed (see, for example, Patent Document 1).

  Also, when grinding circular plate-like workpieces, grinding scraps also adhere to the surface to be held, which is held on the chuck table of the grinding device and to which the protective tape is attached, so that the flexible member made of sponge or the like is protected with the protective tape A cleaning mechanism has been proposed in which cleaning is performed in contact with the substrate (for example, see Patent Document 2).

JP 2007-258450 A JP 2010-94785 A

  However, since the holding mechanism disclosed in Patent Document 1 holds the held surface side by the holding member at the outer peripheral portion of the circular plate-shaped workpiece, when the cleaning mechanism is used to clean the held surface, the cleaning mechanism is There is a problem that the entire surface of the surface to be held cannot be cleaned due to contact with the holding member.

  In addition, the protective tape on the held surface side of the circular plate-shaped workpiece is peeled off from the circular plate-shaped workpiece by attaching the peeling tape to the peripheral edge of the protective tape after washing by the cleaning mechanism and pulling the peeling tape. If the part held by the holding member of the holding mechanism is not washed, grinding scraps are attached to the protective tape of the part, so if you attach the peeling tape to the part where the grinding scraps are attached When pulled, only grinding scraps stick to the peeling tape, and there is a problem that the protective tape cannot be peeled off. Therefore, in order to avoid such a problem, a complicated process of recognizing a portion of the protective tape that has not been cleaned by the cleaning mechanism and applying the release tape while avoiding that portion is necessary.

  The present invention has been considered in view of such problems, and when the held surface side of the circular plate-like workpiece held by the chuck table of the grinding apparatus is held by the holding member, the holding surface is held. It is an object of the present invention to enable cleaning of a portion held by a member.

According to a first aspect of the present invention, there is provided a chuck table for sucking and holding a circular plate-like workpiece, a grinding means for grinding the circular plate-like workpiece held on the chuck table, and an outer peripheral edge of the circular plate-like workpiece ground by the grinding means. The present invention relates to a grinding apparatus comprising: unloading means for holding and unloading from a chuck table; and cleaning means for cleaning a surface to be held of a circular plate-like workpiece that is disposed in the unloading path of the unloading means and is sucked and held by the chuck table. The unloading means is arranged at least three at equal angles to hold the outer peripheral edge of the circular plate-shaped workpiece, a guide portion that moves the holding portion in the radial direction, and moves the holding portion along the guide portion. And a moving means driven by the moving means to contact the outer peripheral edge of the circular plate workpiece to hold the circular plate workpiece. The rotating plate perpendicular to the surface to be held of the circular plate-like workpiece held by the unloading means, the rotating means for rotating the rotating shaft, and at least three of the circular plate-like workpieces connected to the rotating shaft and arranged at equal angles. A cleaning member for cleaning the outer peripheral portion, and a rotation preventing means for preventing the circular plate workpiece from rotating by a cleaning operation in which the cleaning member is brought into contact with the circular plate workpiece and the cleaning member is rotated by the rotating means. The rotation prevention means is configured to have the same axis as the rotation axis of the cleaning means, and is provided with at least three vertical movement means that move up and down relative to the cleaning means, and at an equal angle around the rotation axis of the cleaning means. A rotation preventing portion positioned inside the holding portion of the unloading means, and the workpiece cleaning on the unloading path of the unloading means where the center of the circular plate-like work held by the unloading means coincides with the rotation axis of the cleaning means In position Te, cleaning unit, for cleaning the outer peripheral portion of the holding surface of the circular plate-shaped workpiece.

  The second invention relates to a method for cleaning a circular plate-shaped workpiece using the cleaning means in the grinding apparatus, and the circular plate-shaped workpiece held by the carry-out means is held by a cleaning member constituting the cleaning means. The surface is brought into contact, the rotation preventing means constituting the cleaning means is raised and brought into contact with the held surface, and the portion other than the portion where the rotation preventing portion is in contact with the held surface is cleaned by the rotation operation of the cleaning member, After that, the rotation preventing means is lowered to expose the portion of the held surface that is in contact with the rotation preventing means, and the circular plate-shaped workpiece is rotated by the same angle as the predetermined angle by rotating the cleaning member by a predetermined angle. Then, the rotation preventing portion is raised again and brought into contact with the held surface, and the uncleaned portion of the held surface is cleaned by the rotation operation of the cleaning member.

  In the present invention, by rotating the circular plate member whose cleaning member is in contact with the surface to be held, the outer peripheral portion of the surface to be held is cleaned while leaving an uncleaned portion, and then the circular plate member is rotated and uncleaned. By exposing the portion and then bringing the cleaning member into contact with the uncleaned portion and rotating the circular plate member, the outer peripheral portion of the held surface can be cleaned over the entire periphery. Therefore, when the surface to be held is a protective tape, grinding scraps are not attached to the part where the release tape for peeling the protective tape is attached. It is possible to reliably peel off the protective tape from the circular plate-shaped workpiece, and recognize the part of the protective tape that has not been cleaned, and avoid the complicated process of attaching the peeling tape. It becomes unnecessary.

It is the top view which showed an example of the grinding device typically. It is a perspective view which shows an example of the holding mechanism which comprises a carrying-out means. It is a disassembled perspective view which shows an example of the holding mechanism. It is a top view which shows typically the operation example of a holding mechanism. It is sectional drawing which shows typically an example of a washing | cleaning means. It is a bottom view which shows the same washing | cleaning means typically. It is sectional drawing which shows an example of the to-be-processed object after grinding. It is sectional drawing which shows schematically the state in which the holding mechanism hold | maintained the said workpiece. It is sectional drawing which shows schematically the state which wash | cleans a to-be-processed object by a washing | cleaning means. It is a bottom view which shows typically an example of the procedure which wash | cleans a to-be-processed object by the same washing | cleaning means. It is a bottom view which shows the area | region where the workpiece cleaned by the cleaning means was cleaned.

  A grinding apparatus 1 shown in FIG. 1 performs a grinding process on a plurality of (four in the illustrated example) chuck tables 2 for sucking and holding a circular plate workpiece and the circular plate workpieces held on the chuck table 2. A first grinding means 30 and a second grinding means 31 and a grinding means 32 for grinding the ground circular plate-like workpiece are provided. The plurality of chuck tables 2 are supported by the turntable 2a so as to be able to revolve and rotate.

  On the front side of the grinding apparatus 1, there are provided a first cassette 40 for storing the circular plate-shaped workpiece W before processing and a second cassette 41 for storing the circular plate-shaped workpiece W after processing. In the vicinity of the first cassette 40 and the second cassette 41, a robot 42 for taking out the circular plate-like workpiece W from the first cassette 40 and storing the circular plate-like workpiece W in the second cassette 41 is arranged. Has been. Note that the circular plate-like workpiece W includes those in which an orientation flat or notch as a crystal orientation identification mark is formed.

  The robot 42 includes a hand unit 420 that sucks and holds the circular plate-shaped workpiece W, an arm unit 421 that is connected to the hand unit 420 and can be bent, and a driving unit 422 that moves the hand unit 420 and the arm unit 421 in the X-axis direction. It has.

  In the movable range of the hand unit 420, a temporary placement table 43 for aligning the circular plate-like workpiece W before processing at a predetermined position is disposed.

  In front of the first grinding means 3, the circular plate-like workpiece W before processing is placed on the chuck table 2, or the processed circular plate-like workpiece W is taken out from the chuck table 2 to be transferred to the next step. It is a carry-in / out area 44 which is an area to be operated. In the vicinity of the loading / unloading area 44, loading means 45 for loading the circular plate-shaped workpiece W from the temporary placement table 43 to the chuck table 2 positioned in the loading / unloading area 44 and the chuck table 2 positioned in the loading / unloading area 44. Unloading means 5 for unloading the circular plate-like workpiece W from is provided. The carry-out means 5 includes a holding mechanism 10 that is attached to the tip of the arm portion 11 and holds the circular plate-like workpiece W. The holding mechanism 10 holds the outer peripheral edge of the ground circular plate-like workpiece W, and in this state, the arm portion 11 is turned and moved in the Y-axis direction to carry out the circular plate-like workpiece W from the chuck table 2. be able to.

  A cleaning unit 6 for cleaning the lower surface of the circular plate-like workpiece W held by the holding mechanism 10, that is, the surface to be held that is sucked and held by the chuck table 2, is provided in the carry-out path of the circular plate-like workpiece W by the carry-out means 5. I have. Further, in the vicinity of the cleaning means 6, a cleaning / drying means 7 for cleaning and drying the upper surface side of the circular plate-like workpiece W is disposed. The position of the cleaning means 6 is not limited to the illustrated position as long as it is below the carry-out path of the circular plate workpiece W by the carry-out means 6.

  As shown in FIG. 2, the holding mechanism 10 includes at least three holding portions 13 that engage with the outer peripheral edge of the plate-like workpiece to hold the plate-like workpiece, and the holding portion 13 with respect to the outer peripheral edge of the plate-like workpiece. A support plate 14 that is movably supported in the horizontal direction, a rotation plate 15 that is disposed on the upper surface side of the support plate 14 so as to be rotatable within a predetermined range with respect to the support plate 14, and attachment of the tip of the arm portion 11. The mounting plate 16 is connected to the support plate 14 so as to be tiltable, and the vertical driving unit 17 moves the support plate 14 in the vertical direction.

  As shown in FIG. 3, the holding portion 13 is formed of a synthetic resin having a low frictional resistance such as a fluorine resin, and includes an engaging member 130 having an engaging concave portion 130 a, and is erected upward from the engaging member 130. A cylindrical threaded supported portion 131 is formed, and a female screw hole 131 a for screwing a bolt is formed on the inner peripheral surface of the supported portion 131. The three holding portions 13 are arranged at an equal angle with respect to the center of the support plate 14. By engaging the outer peripheral edge of the circular plate-like workpiece W in the engagement recess 130 a, the circular plate-like workpiece W is arranged. It can hold | maintain from an outer peripheral surface side.

  In the support plate 14, corresponding to the number and position of the holding portions 13, elongated holes 140 that are long in the radial direction and penetrate the front and back surfaces are formed. The long hole 140 functions as a guide portion when the supported portion 131 of the holding portion 13 is movably supported in the longitudinal direction of the long hole 140 and the three holding portions 13 are operated in the radial direction. The width of the long hole 140 is slightly larger than the diameter of the supported portion 131.

  From the lower surface of the support plate 14, at least three horizontal direction movement restriction pins 18 that restrict the movement of the circular plate-like workpiece W to be held in the horizontal direction protrude downward, and the lower ends thereof are formed. Is located below the holding portion 13. From the upper surface of the support plate 14, three support pillars 19 are erected. A female screw hole 19 a is formed at the upper end of the support column 19. A coil spring 190 is inserted into each support column 19. On the other hand, a stepped nut 20 having a large diameter portion 20a and a small diameter portion 20b is attached to the upper surface of the center portion of the support plate 14.

  The rotating plate 15 has a center hole 150 having an inner diameter that fits into the small diameter portion 20b of the stepped nut 20 and three long holes 151 that are long in the circumferential direction and penetrate the front and back surfaces, with a predetermined interval. And three arm portions 152 projecting in the outer circumferential direction. A link 154 is connected to the tip of each arm portion 152 so as to be rotatable with respect to the arm portion 152 by a pivot 153. The link 154 has a through hole 154a that penetrates the front and back surfaces. A connecting protrusion 155 protruding upward is formed at a position protruding in the circumferential direction from one of the three arm portions 152.

  An air cylinder 22 for projecting and retracting the piston rod 21 is disposed on the upper surface side of the support plate 14, and a distal end portion of the piston rod 21 is connected to a connection protrusion 155 formed in a ring shape on the rotating plate 15. A mating engagement portion 21a is formed.

  Further, as shown in FIG. 2, when the bolt 23 is inserted into the through hole 154a, the spacer 24 and the long hole 140 shown in FIG. 3 and screwed into the female screw hole 131a of the engaging member 13, the pivot 153 is centered. As the link 154 is rotated, the support plate 14 and the rotation plate 15 are connected in a state where the rotation plate 15 can rotate within a predetermined range with respect to the support plate 14. A bolt 26 is screwed into the stepped nut 20 to prevent the turning plate 15 from coming off.

  Further, when the connection protrusion 155 provided at a position protruding sideways from the arm portion 152 is engaged with the connection engagement portion 21a at the tip of the piston rod 21, the piston rod 21 is moved by the arrow A in FIG. By being driven in the direction, the rotation plate 15 can be rotated in the arrow B direction. When the rotation plate 15 rotates in the direction of arrow B, the link 154 moves in the direction of arrow C accordingly, so that the holding portion 13 connected to the link 154 moves in the direction of arrow D, that is, the direction toward the center of the support plate 14. Move to. This movement will be described with reference to FIG. 4. In the initial state, as shown in FIG. 4A, the three arm portions 152 are in line with the link 154. Then, as shown in FIG. 4B, when the rotation plate 15 is driven by the air cylinder 22 and rotates in the arrow B direction, the arm portion 152 and the link 154 are not in a straight line, and are directed in the C direction. The changed link 154 pulls the holding portion 13 in the direction toward the center of the support plate 14, thereby moving the holding portion 13 along the long hole 140 in a direction (D direction) toward each other.

  As described above, the air cylinder 22, the piston rod 21, and the rotation plate 15 constitute a moving unit 27 that moves the three engaging members 13 in a direction in which the three engaging members 13 approach each other, and is moved by being driven by the moving unit 27. The holding part 13 to be in contact with the outer peripheral edge of the circular plate-like workpiece W is configured to hold the circular plate-like workpiece W.

  Further, as shown in FIG. 3, in the mounting plate 16, three through holes 160 are disposed at positions corresponding to the three support pillars 19 erected from the upper surface of the support plate 14. The support plate 14 is fixed to the mounting plate 16 by screwing the bolt 25 inserted into the hole 160 into the female screw hole 19 a formed in the support column 19.

  As shown in FIG. 5, the cleaning unit 6 includes a rotating shaft 60, a rotating unit 61 including a motor that rotates the rotating shaft 60, and a cleaning unit 62 connected to the rotating shaft 60.

  The axis of the rotary shaft 60 is perpendicular to the held surface of the circular plate-like workpiece W held by the holding mechanism 10 shown in FIGS. Here, the surface to be held is a surface held by the chuck table 2 shown in FIG. 1 during grinding.

  As shown in FIG. 6, the cleaning unit 62 includes at least three plate members 620 that are connected to the rotation shaft 60 and extend radially, and at least three cleaning members 621 that are fixed to the upper surface of the front end of the plate member 620. Yes. At least three cleaning members 621 are arranged at an equal angle. Each cleaning member 621 is a flexible member such as a sponge, and for example, a product called Sofras manufactured by Aion Co., Ltd. can be used. The cleaning unit 62 can clean the outer peripheral portion of the held surface by contacting and rotating the held surface of the circular plate-like workpiece W.

  As shown in FIG. 5, below the cleaning unit 62, rotation preventing means 8 that prevents the circular plate-like workpiece cleaned by the cleaning means 6 from rotating is disposed. The rotation preventing means 8 has the same axis as the rotating shaft 60 of the cleaning means 6, and a cylindrical portion 80 is wound around the rotating shaft 60. As shown in FIG. 6, at least three plate members 81 extend radially from the cylindrical portion 80, and a rotation preventing member 82 is fixed to the upper surface of the distal end portion of the plate member 81. The rotation preventing member 82 is arranged at an equal angle around the rotation shaft 60 of the cleaning means 6. Further, in a state in which the carry-out means 5 is located immediately above the cleaning means 6 and the rotation prevention means 8, the three rotation prevention members 82 are located inside the arc connecting the three holding portions 13 of the carry-out means 5. .

  As shown in FIG. 5, a piston 84 that is driven by a cylinder 83 to move up and down is connected to the outer peripheral side of the cylinder portion 80, and the cylinder portion 80 is also moved up and down as the piston 84 moves up and down. The piston 84 and the piston 84 constitute a vertical movement means 85 that moves the rotation prevention means 8 up and down relatively with respect to the cleaning means 6.

  In the grinding apparatus 1 shown in FIG. 1, the circular plate-like workpiece W before processing is taken out from the first cassette 40 by the robot 42 and conveyed to the temporary placement table 43. Then, after the circular plate-like workpiece W is positioned at a predetermined position on the temporary placement table 43, it is conveyed and held by the loading means 45 on the chuck table 2 located in the loading / unloading area 44.

  Next, when the turntable 2a is rotated, the circular plate-like workpiece W held on the chuck table 2 is sequentially transferred below the first grinding means 30, the second grinding means 31, and the polishing means 32, so that the circular plate-like workpiece is transferred. The exposed surface (upper surface) of W is processed by each means. And, as shown in FIG. 7, when grinding only the back side of the device region without grinding the surplus region which is the region of the peripheral portion of the back surface W2 of the circular plate-like workpiece W, about the surplus region, The initial thickness is maintained and the reinforcing portion W3 is formed. The circular plate-like workpiece W on which the reinforcing portion W3 is formed is easier to handle such as subsequent conveyance as compared with the circular plate-like workpiece without the reinforcing portion W3. A protective tape T for device protection is attached to the surface W1 of the circular plate workpiece W.

  After the processing by the polishing means 32 is performed in this way, the circular plate-like workpiece W after processing is moved to the carry-in / out area 44 by the rotation of the turntable 2a, and the circular plate-like workpiece W after processing is held by the carry-out means 5. The

  In the holding mechanism 10 constituting the carry-out means 5, the three holding portions 13 are held in contact with the outer peripheral edge W4 of the circular plate-like workpiece W as shown in FIG. Further, at this time, the circular plate-like workpiece W is prevented from being shifted in the horizontal direction by the horizontal direction movement restriction pin 18.

  When the circular plate-like workpiece W after processing is held by the holding mechanism 10 in this way, the circular plate-like workpiece W is moved to the carry-out path by the movement and turning of the arm portion 11 shown in FIG. It moves right above the cleaning means 6 and the rotation prevention means 8 that are positioned, and stops there. At this time, the position of the circular plate-like workpiece W held by the carry-out means 5 is a workpiece cleaning position whose center coincides with the rotation shaft 60 of the cleaning means 6.

  With the circular plate-like workpiece W positioned at the workpiece cleaning position, the holding mechanism 10 is lowered, so that the cleaning member 621 is applied to the protective tape T on the held surface W1 side of the circular plate-like workpiece W as shown in FIG. Contact. Further, by driving the vertical movement means 85, the rotation prevention means 8 is raised and the rotation prevention member 82 is brought into contact with the protective tape T. At this time, the upper surface of the rotation preventing member 82 is at a position higher by about 0.5 mm than the upper surface of the cleaning member 621, and the rotation preventing member 82 presses the protective tape T stronger than the cleaning member 621. In this manner, the rotation preventing member 82 prevents the rotation of the protective tape T and the circular plate workpiece W.

  As shown in FIG. 9, when the cleaning member 621 and the rotation prevention member 82 are brought into contact with the protective tape T, the cleaning member 621 and the rotation prevention member 82 are positioned so as not to overlap each other. Then, as shown in FIG. 10A, the cleaning means 6 is rotated in the direction of arrow P by driving the rotation means 61. Specifically, the cleaning means 6 stops after rotating one cleaning member 621 within a range where it does not collide with the two rotation preventing members 82. Thus, by rotating the cleaning member 621 in contact with the protective tape T, as shown in FIG. 11A, the anti-rotation member 82 of the outer peripheral portion of the protective tape T that is the held surface is provided. The first region 100 which is a portion other than the portion in contact with is cleaned. During cleaning, the rotation preventing means 82 prevents the circular plate-like workpiece W from rotating by rotating the cleaning member 621 by the rotating means 61 shown in FIG. 9, so that cleaning can be performed reliably. At this stage, a second region that is an uncleaned region remains between the adjacent first regions 100. In FIG. 11, the cleaned region is indicated by hatching.

  Next, after the rotation preventing means 8 is lowered to release the contact state between the rotation preventing member 82 and the protective tape T, the cleaning means 6 is rotated in the arrow Q direction as shown in FIG. Then, since the protective tape T is not in contact with the rotation preventing member 82, the protective tape T and the circular plate-shaped workpiece W are also rotated in the arrow Q direction together with the cleaning member 621.

  And as shown in FIG.11 (b), the 2nd area | region 101 which is not wash | cleaned which is the part which the rotation prevention member 82 which comprises the rotation prevention means 8 was contacting among the protective tape T which is a to-be-held surface is exposed. To do.

  After the second region 101 is exposed in this manner, the rotation preventing member 82 is raised again and brought into contact with the protective tape T, and the cleaning member 621 is rotated in the direction of arrow R as shown in FIG. The second area 101 is cleaned. Then, as shown in FIG. 11C, the cleaning member 621 comes into contact with the second region 101 and is cleaned, and the outer peripheral portion is cleaned over the entire circumference. In the case of performing the second cleaning, since the third region 102 in contact with the rotation preventing member 82 is not cleaned, the cleaning may be performed after the third region 102 is exposed.

  Since the cleaning member 621 comes into contact with the dirty surface of the protective tape T in the first cleaning, a slight amount of grinding dust adheres to the cleaning member 621. However, the grinding dust adhering to the protective tape T affects the quality of the circular plate workpiece. do not do.

  When the protective tape T is washed in this way, the protective tape T is peeled from the circular plate-shaped workpiece by sticking the peeling tape to the protective tape T and pulling the peeling tape. When the release tape is attached to the protective tape T, there is no need to select the position where the release tape is applied because no grinding dust or the like adheres to the protective tape T.

1: Grinding device 2: Chuck table 2a: Turntable 30: First grinding means 31: Second grinding means 32: Polishing means 40: First cassette 41: Second cassette 42: Robot 420: Hand part 421: Arm part 422 : Driving means 43: Temporary placement table 44: Loading / unloading area 45: Loading / unloading means 5: Unloading means 6: Cleaning means 60: Rotating shaft 61: Rotating means 62: Cleaning unit 620: Plate member 621: Cleaning member 7: Cleaning and drying means 8: Anti-rotation means 80: Tube portion 81: Plate member 82: Anti-rotation member 83: Cylinder 84: Piston 10: Holding mechanism 11: Arm portion 13: Holding portion
130: engaging member 131: held portion 131a: female screw hole 14: support plate 140: long hole (guide portion)
15: Rotating plate 150: Center hole 151: Long hole 152: Arm part 153: Pivot 154: Link 154a: Through hole 155: Connection protrusion 16: Mounting plate 160: Through hole 17: Vertical drive part 18: Horizontal movement Restriction pin 19: Support pillar 19a: Female screw hole 190: Coil spring 20: Stepped nut 20a: Large diameter portion 20b: Small diameter portion 21: Piston rod 21a: Connection engagement portion 22: Air cylinder 23: Bolt 24: Spacer 25: Bolt 26: Bolt 27: Moving means

Claims (2)

A chuck table for sucking and holding a circular plate workpiece, a grinding means for grinding the circular plate workpiece held on the chuck table, and an outer peripheral edge of the circular plate workpiece ground by the grinding means for holding the chuck In a grinding apparatus comprising unloading means for unloading from a table, and cleaning means for cleaning a surface to be held of a circular plate-like workpiece disposed in the unloading path of the unloading means and held by suction on the chuck table.
The carrying-out means includes at least three holding parts arranged at equal angles to hold the outer peripheral edge of the circular plate-shaped workpiece, a guide part for operating the holding part in a radial direction, and the holding part along the guide part. Moving means, and is configured to hold the circular plate workpiece by bringing the holding portion that is driven and moved by the moving device into contact with the outer peripheral edge of the circular plate workpiece,
The cleaning means includes at least three rotation shafts that are perpendicular to the held surface of the circular plate-like workpiece held by the carry-out means, rotation means that rotate the rotation shaft, and are connected to the rotation shaft at an equal angle. A cleaning member arranged to clean the outer peripheral portion of the circular plate-shaped workpiece, and the circular plate-shaped workpiece is rotated by a cleaning operation in which the cleaning member is brought into contact with the circular plate-shaped workpiece and the cleaning member is rotated by the rotating means. An anti-rotation means for preventing, and
The rotation prevention means has at least three vertical movement means that are aligned with the rotation axis of the cleaning means and move up and down relative to the cleaning means, and at an equal angle around the rotation axis of the cleaning means. An anti-rotation member that is disposed and located inside the holding portion of the unloading means,
In the work the cleaning position on the unloading path of該搬detecting means該搬out the center of the circular plate-like work held on the device coincides with the axis of rotation of the cleaning means, the cleaning member, the held surface of the circular plate-shaped workpiece Grinding device for cleaning the outer periphery of the machine. The grinding apparatus according to claim 1, wherein the cleaning means is used to clean a circular plate workpiece,
The cleaning member constituting the cleaning means is brought into contact with the held surface of the circular plate-like workpiece held by the carry-out means, and the anti-rotation member constituting the cleaning means is raised and brought into contact with the held surface to perform the cleaning. Washing a portion of the held surface other than the portion in contact with the anti-rotation member by rotating the member,
Thereafter, the anti-rotation member is lowered to expose a portion of the held surface that is in contact with the anti-rotation member, and by rotating the cleaning member by a predetermined angle, the circular plate-shaped workpiece is moved to the predetermined angle. After rotating the same angle, the anti-rotation member is again raised and brought into contact with the held surface, and the uncleaned portion of the held surface is cleaned by the rotating operation of the cleaning member.
A method for cleaning circular plate workpieces.

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