JP6220240B2 - Grinding equipment - Google Patents

Description

  The present invention relates to a grinding apparatus, and more particularly, to a grinding apparatus that can clean a workpiece surface held on a chuck table during grinding when the workpiece surface is unloaded from the chuck table.

  In general, a disk-shaped workpiece such as a semiconductor wafer is ground with a grinding wheel on the other surface in a state where one surface (held surface) is held by a chuck table of a grinding device. The disc-shaped workpiece ground to a desired thickness is carried out from the chuck table by the carrying-out means. In some grinding apparatuses, a cleaning unit is disposed on a carrying-out path of the disc-shaped workpiece by the carrying-out unit, and the held surface of the disc-shaped workpiece is washed.

  By the way, in a grinding apparatus that uses a disk-shaped workpiece to be ground to a thickness of several tens of μm or less as a workpiece, the annular reinforcing portion is formed by leaving the thickness without grinding the outer periphery of the disk-shaped workpiece. To be done. In order to clean the entire surface to be held of the disk-shaped work to be ground in this way, the cleaning means is provided by rotating the disk-shaped work in the cleaning process while holding the outer peripheral edge of the disk-shaped work. A cleaning method for switching the cleaning position by the cleaning member has been proposed (see, for example, Patent Document 1).

JP2013-105828A

  In the method for cleaning a disk-shaped workpiece described in Patent Document 1, the surface to be held of the disk-shaped workpiece and the upper surface of the cleaning member are adjusted in parallel to avoid occurrence of cleaning spots on the surface to be held after cleaning. It is necessary to The parallelism between the held surface of the disk-shaped workpiece and the upper surface of the cleaning member is determined by the relative positional relationship between the unloading means for unloading the disk-shaped workpiece and the cleaning means having the cleaning member.

  In recent years, in order to increase the number of semiconductor devices that can be acquired, a grinding apparatus using a disk-shaped workpiece having a large diameter of 300 mm or 450 mm as a workpiece has become widespread. When cleaning the held surface of such a large-diameter disk-shaped workpiece by the disk-shaped workpiece cleaning method described in Patent Document 1, the relative positional relationship between the carry-out means and the cleaning means is maintained with high accuracy. Is required.

  The present invention has been made in view of such a situation, and without requiring a complicated configuration, a carrying-out means for carrying out a disk-like work and a washing means for washing a held surface of the disk-like work. An object of the present invention is to provide a grinding apparatus capable of maintaining the relative positional relationship with the high accuracy.

  A grinding apparatus according to the present invention includes a chuck table having a holding surface for sucking and holding a disk-shaped workpiece, a grinding means for grinding the disk-shaped workpiece sucked and held by the chuck table, and an outer peripheral edge of the disk-shaped workpiece. An outer peripheral edge holding mechanism to be held and a moving mechanism for moving the outer peripheral edge holding mechanism to approach / separate from the chuck table, an unloading means for unloading the disk-shaped workpiece from the chuck table, and the unloading means to remove the disk-shaped workpiece from the chuck table. And a cleaning device that is disposed in the unloading path for cleaning while supplying cleaning water to the surface to be held of the disk-shaped workpiece. At least three outer peripheral edge holding mechanisms are arranged at equal angles. A holding portion that moves in the radial direction, and at least three pins that protrude downward from the lower end of the holding portion and that are arranged at equal intervals. The stage has a cleaning plate in which a cleaning member that slides and cleans the outer periphery of the disk-shaped workpiece at the tip of a plate radially extending in at least three directions at an equal angle, and the center of the cleaning plate as a rotation axis. Rotating means for rotating the cleaning plate, and rotating to prevent the disk-shaped work from rotating by a cleaning operation in which the cleaning member and the unloading means hold the disk-shaped work held in contact with each other to rotate the cleaning member. An anti-rotation plate, and the anti-rotation mechanism is disposed outside the outer diameter of the disk-shaped workpiece on the anti-rotation plate and mounted on the anti-rotation plate in parallel with the cleaning plate. And at least three pins are placed on the mounting table by lowering the outer peripheral edge holding mechanism using the moving mechanism, and the outer peripheral edge holding mechanism is reduced. Also a surface made of connecting it triangular common positions of the three pins, the common position consist connecting it triangular surfaces of at least three cleaning member of the cleaning means is characterized by comprising parallel.

  According to the above grinding apparatus, by simply lowering the outer peripheral edge holding mechanism and placing the three pins on the mounting table, the surface formed by the triangle connecting the three pins of the outer peripheral edge holding mechanism and the three cleaning means A triangular surface connecting the cleaning members can be arranged in parallel. Thereby, the relative position of both can be determined without providing the structure etc. which position a carrying-out means and a washing | cleaning means separately. As a result, the relative positional relationship between the unloading means for unloading the disk-shaped workpiece and the cleaning means for cleaning the held surface of the disk-shaped workpiece can be maintained with high accuracy without requiring a complicated configuration. It becomes.

In the grinding apparatus of the present invention, the cleaning means includes an elevating means for raising and lowering the antirotation plate, and the antirotation plate mounting table in which the upper surface of the antirotation member is positioned at substantially the same height as the upper surface of the cleaning member by the elevating means. outer edge is placed on the holding portion of the holding mechanism, the a surface constituted by the triangle formed by connecting the common position of at least three holding portions of the common position connecting it to the surface with at least three consisting of triangles the cleaning member is parallel to the Is preferred. According to this configuration, by simply moving the anti-rotation plate up and down and placing the holding portion of the outer peripheral edge holding mechanism on the mounting table, the surface formed of the triangle connecting the three holding portions of the outer peripheral edge holding mechanism and the cleaning means A triangular surface connecting three cleaning members can be arranged in parallel. Thereby, the relative position of both can be determined without providing the structure etc. which position a carrying-out means and a washing | cleaning means separately. As a result, the relative positional relationship between the unloading means for unloading the disk-shaped workpiece and the cleaning means for cleaning the held surface of the disk-shaped workpiece can be maintained with high accuracy without requiring a complicated configuration. It becomes.

  According to the present invention, the relative positional relationship between the unloading means for unloading the disk-shaped workpiece and the cleaning means for cleaning the held surface of the disk-shaped workpiece is maintained with high accuracy without requiring a complicated configuration. It becomes possible.

It is the top view which showed typically an example of the grinding device which concerns on this Embodiment. It is a perspective view which shows an example of the carrying-out means of the grinding device which concerns on this Embodiment. It is a cross-sectional schematic diagram which shows an example of the washing | cleaning means of the grinding device which concerns on this Embodiment. It is a top view which shows an example of the washing | cleaning means of the grinding apparatus which concerns on this Embodiment. It is a cross-sectional schematic diagram of the state which the disc-shaped workpiece | work hold | maintained by the carrying-out means of the grinding device which concerns on this Embodiment, and the cleaning member contacted. It is a cross-sectional schematic diagram of the state which the rotation prevention member contacted the disk-shaped workpiece | work which the carrying-out means of the grinding device which concerns on this Embodiment hold | maintained. It is a cross-sectional schematic diagram in the state from which the inclination of the carrying-out means and the washing | cleaning means of the grinding apparatus which concerns on this Embodiment differs. It is a cross-sectional schematic diagram of the state by which the inclination of the carrying-out means and the washing | cleaning means of the grinding device which concerns on this Embodiment was correct | amended. It is a cross-sectional schematic diagram which shows schematically the state which wash | cleans a disk-shaped workpiece | work with the washing | cleaning means of the grinding apparatus which concerns on this Embodiment. It is a bottom view which shows typically an example of the procedure which wash | cleans a disk-shaped workpiece | work with the washing | cleaning means of the grinding apparatus which concerns on this Embodiment. It is a top view which shows the other example of the washing | cleaning means of the grinding device which concerns on this Embodiment. It is a cross-sectional schematic diagram of the state which the rotation prevention member which comprises the washing | cleaning means shown in FIG. 11 contacted the disk-shaped workpiece | work which the carrying-out means hold | maintained.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the following description, the grinding apparatus according to the present invention uses, for example, a disk-shaped workpiece that is ground to a thickness of several tens of μm or less as a workpiece, and the outer peripheral portion of the disk-shaped workpiece is not ground. The present invention is applied to a grinding apparatus capable of grinding with an annular reinforcing part leaving However, the configuration of the grinding apparatus to which the present invention is applied is not limited to this and can be changed as appropriate.

  Further, the disk-shaped workpiece that is a workpiece in the grinding apparatus according to the present invention includes a workpiece in which a protective tape for device protection is attached to a held surface held by a chuck table 2 described later.

  FIG. 1 is a plan view schematically showing an example of a grinding apparatus according to the present embodiment. In the following, for convenience of explanation, the lower side shown in FIG. 1 is called the front side of the grinding apparatus, and the upper side shown in FIG. 1 is called the rear side of the grinding apparatus. For convenience of explanation, the left-right direction shown in FIG. 1 is called the X-axis direction of the grinding apparatus, and the up-down direction shown in FIG. 1 is called the Y-axis direction of the grinding apparatus.

  As shown in FIG. 1, the grinding apparatus 1 according to the present embodiment includes a plurality (four in the present embodiment) of chuck tables 2, two first grinding means 31 and second grinding means 32, and polishing. And means 33. The plurality of chuck tables 2 are arranged on the turntable 21 and supported by the turntable 21 so as to be able to revolve and rotate. Each chuck table 2 is connected to a suction source (not shown) and sucks and holds a disk-shaped workpiece W that is a workpiece. The first grinding means 31 and the second grinding means 32 perform grinding on the disk-shaped workpiece W held on the chuck table 2 respectively. The polishing means 33 polishes the disk-shaped workpiece W ground by the grinding means 3.

  On the front side of the grinding apparatus 1, a first cassette C <b> 1 that stores a disk-shaped workpiece W before processing and a second cassette C <b> 2 that stores a disk-shaped workpiece W after processing are provided. These 1st cassette C1 and 2nd cassette C2 are comprised so that the some disc-shaped workpiece | work W can be accommodated. The first cassette C1 and the second cassette C2 are detachably provided on a part of the front side of the grinding apparatus 1, for example.

  In the vicinity of the first cassette C1 and the second cassette C2, a robot 40 is provided for taking out the disk-shaped workpiece W from the first cassette C1 and storing the disk-shaped workpiece W in the second cassette C2. . The robot 40 includes a hand unit 401 that sucks and holds the circular plate-shaped workpiece W, an arm unit 402 that is connected to the hand unit 401 and can be bent, and a drive mechanism 403 that moves the hand unit 401 and the arm unit 402 in the X-axis direction. It has. The drive mechanism 403 includes, for example, a guide rail portion that extends in the X-axis direction of the grinding device 1 and is configured to be able to move the hand portion 401 and the arm portion 402.

  On the rear side of the left end portion of the drive mechanism 403 of the robot 40, a temporary placement table 41 for the disk-shaped workpiece W is provided. The temporary placement table 41 is used when the disc-shaped workpiece W before grinding is aligned with a predetermined position. The temporary placement table 41 is disposed in the movable range of the hand unit 401 of the robot 40. Behind the temporary placement table 41, the disk-shaped workpiece W before processing is placed on the chuck table 2, and the circular plate-shaped workpiece W after processing is taken out from the chuck table 2 to be transferred to the next process. It is a carry-in / out area 42 which is an area.

  In the vicinity of the loading / unloading area 42, loading means 43 for loading the disk-shaped workpiece W from the temporary placement table 41 to the chuck table 2 positioned in the loading / unloading area 42 and the chuck table 2 positioned in the loading / unloading area 42. And an unloading means 5 for unloading the disk-shaped workpiece W. As will be described later, the carry-out means 5 includes an outer peripheral edge holding mechanism 10 that is attached to the tip of the arm portion 11 and holds the circular plate-like workpiece W. The outer peripheral edge holding mechanism 10 holds the outer peripheral edge of the ground disc-shaped workpiece W, and in this state, the arm portion 11 is turned and moved in the Y-axis direction, so that the disc-shaped workpiece W is removed from the chuck table 2. It is configured to be able to carry out.

  In the carry-out path of the disk-like workpiece W by the carry-out means 5, a cleaning means for washing the lower surface of the disk-like workpiece W held by the outer peripheral edge holding mechanism 10, that is, the held surface sucked and held by the chuck table 2. 6 is disposed. In the vicinity of the cleaning means 6, a cleaning / drying means 7 for cleaning and drying the upper surface side of the disk-shaped workpiece W is disposed. In FIG. 1, a path from the carry-in / out area 42 to the cleaning / drying means 7 is shown as the carry-out path of the disk-shaped workpiece W. The arrangement position of the cleaning means 6 can be changed to any position as long as it is on the carry-out path of the disk-like workpiece W by the carry-out means 5.

  Here, the structure of the carrying-out means 5 with which the grinding apparatus 1 which concerns on this Embodiment is provided is demonstrated, referring FIG. FIG. 2 is a perspective view showing an example of the carry-out means 5 provided in the grinding apparatus 1 according to the present embodiment. In FIG. 2, for convenience of explanation, one holding portion 13 provided in the carry-out means 5 and a bolt 22 corresponding to the holding portion 13 are shown separately from the support plate 14.

  As shown in FIG. 2, the carry-out means 5 includes the outer peripheral edge holding mechanism (hereinafter simply referred to as “holding mechanism”) 10 and a movement for moving the holding mechanism 10 in the vertical direction (vertical direction) of the grinding apparatus 1. The mechanism 12 is comprised. The holding mechanism 10 holds, for example, the outer peripheral edge of the circular plate-like workpiece W arranged in the carry-in / out area 42. For example, the moving mechanism 12 brings the holding mechanism 10 that does not hold the disk-shaped workpiece W closer to the chuck table 2 and moves the holding mechanism 10 that holds the disk-shaped workpiece W away from the chuck table 2.

  The holding mechanism 10 is engaged with the outer peripheral edge of the disc-shaped workpiece W to hold the disc-shaped workpiece W, and the holding portion 13 is horizontally oriented with respect to the outer peripheral edge of the disc-shaped workpiece W. A support plate 14 that is movably supported on the support plate 14, a rotation plate 15 that is disposed on the upper surface side of the support plate 14 so as to be rotatable within a predetermined range with respect to the support plate 14, and a support plate attached to the tip of the arm portion 11 14 includes an attachment plate 16 that is tiltably connected to the base plate 14 and a plurality of pins 17 that are attached to the lower surface of the support plate 14.

  In the present embodiment, the holding mechanism 10 includes at least three holding portions 13. The three holding portions 13 have the same shape and configuration. These holding portions 13 are arranged at equal angles (that is, at intervals of 120 °) with respect to the center of the support plate 14. These holding portions 13 are configured to be movable in the radial direction, that is, in the radial direction of the support plate 14.

  For example, the holding portion 13 includes an engaging member 130 that is formed of a synthetic resin having a low frictional resistance such as a fluorine-based resin and includes an engaging concave portion 130a, and a column-shaped supported member that is erected upward from the engaging member 130. Part 131. On the inner peripheral surface of the supported portion 131, a female screw hole 131a for screwing a bolt is formed. The three holding portions 13 are configured to be able to hold the disk-shaped workpiece W from the outer peripheral surface side by engaging the outer peripheral edge of the circular plate-shaped workpiece W in the engagement recess 130a.

  In the support plate 14, corresponding to the number and position of the holding portions 13, elongated holes 140 that are long in the radial direction and penetrate the front and back surfaces are formed. The long hole 140 functions as a guide portion when the supported portion 131 of the holding portion 13 is movably supported in the longitudinal direction of the long hole 140 and the three holding portions 13 are operated in the radial direction. The width of the long hole 140 is slightly larger than the diameter of the supported portion 131. Further, from the upper surface of the support plate 14, three support columns 18 into which a coil spring 180 is inserted are erected. A female screw hole (not shown) is formed at the upper end of the support column 18. These support pillars 18 and coil springs 180 are disposed through a long hole 151 of a rotating plate 15 described later.

  The holding mechanism 10 includes at least three pins 17. The three pins 17 are arranged at equal intervals (that is, 120 ° intervals) with the center of the support plate 14 as a reference. Each pin 17 has the same shape and configuration. The pin 17 has such a length that its lower end protrudes downward from the lower end of the holding portion 13 (see FIG. 5). The adjacent pins 17 and the holding portions 13 are arranged with an angle of 60 ° with respect to the center of the support plate 14. These pins 17 position the holding portion 13 and the outer peripheral edge of the disk-shaped workpiece W in the height direction when the holding mechanism 10 grips the disk-shaped workpiece W from the chuck table 2, and carry-out means 5. And maintaining the relative positional relationship between the cleaning means 6 constant. Due to the former role, the lower end portions of the three holding portions 13 are arranged at positions slightly above the upper surface of the chuck table 2, and the surface connecting the common positions of the three holding portions 13 and the upper surface of the chuck table 2 Are positioned in parallel.

  A rotation plate 15 is attached to the center of the upper surface of the support plate 14 so as to be rotatable with respect to the support plate 14. The rotating plate 15 has a generally circular shape. The rotating plate 15 is provided with three long holes 151 that are long in the circumferential direction and penetrate the front and back surfaces, and three arm portions 152 that are formed to protrude in the outer circumferential direction at a predetermined interval. A link 154 is connected to the tip of each arm portion 152 so as to be rotatable with respect to the arm portion 152 by a pivot 153. A through hole 154 a is formed at the tip of the link 154. Of the three arm portions 152, one arm portion 152 is formed with a connecting portion 155 that is connected to a piston rod 19 described later.

  On the upper surface of the support plate 14, an air cylinder 20 that causes the piston rod 19 to appear and disappear is disposed. A connecting engagement portion 19 a formed in a ring shape is provided at the tip of the piston rod 19. The connection engagement portion 19 a is configured to be able to engage with the connection portion 155 of the arm portion 152 of the rotation plate 15.

  In the mounting plate 16, three through holes (not shown) are formed at positions corresponding to the three support pillars 18 erected from the upper surface of the support plate 14. The support plate 14 is fixed to the mounting plate 16 by screwing the bolts 21 inserted through these through holes into the female screw holes formed in the support column 18.

  Further, the rotating plate 15 is connected to the support plate 14 by inserting the bolt 22 into the through hole 154 a of the link 154, the spacer 23 and the long hole 140 and screwing into the female screw hole 131 a of the engaging member 130. In this case, the rotation plate 15 is connected to the support plate 14 in a state where the link 154 rotates about the pivot 153 and can rotate within a predetermined range with respect to the support plate 14.

  Further, when the connecting portion 155 of the arm portion 152 is engaged with the connecting engaging portion 19a of the piston rod 19, the piston rod 19 is driven in the direction of arrow A shown in FIG. 15 can be rotated in the direction of arrow B. When the rotation plate 15 rotates in the direction of arrow B, the link 154 moves in the direction of arrow C accordingly, so that the holding portion 13 connected to the link 154 moves in the direction of arrow D, that is, the direction toward the center of the support plate 14. Move to.

  As described above, the air cylinder 20, the piston rod 19, and the rotation plate 15 serve to move the three holding portions 13 (engagement members 130) in the center direction of the support plate 14. The unloading means 5 is configured to hold the disk-shaped workpiece W by bringing the holding portion 13 driven and moved by these components into contact with the outer peripheral edge of the disk-shaped workpiece W.

  Next, the configuration of the cleaning means 6 provided in the grinding apparatus 1 according to the present embodiment will be described with reference to FIGS. 3 and 4. FIG. 3 is a schematic cross-sectional view showing an example of the cleaning means 6 provided in the grinding apparatus 1 according to the present embodiment. FIG. 4 is a plan view showing an example of the cleaning means 6 provided in the grinding apparatus 1 according to the present embodiment. In FIG. 3, two cleaning members 611, an anti-rotation member 633, and a mounting table 634 are shown for convenience of explanation. In FIG. 4, for convenience of explanation, the disk-shaped workpiece W is indicated by a broken line, and the holding portion 13 and the pin 17 of the carry-out means 5 are indicated.

  As shown in FIGS. 3 and 4, the cleaning unit 6 includes a cleaning plate 61, a rotation unit 62, and a rotation prevention mechanism 63. As shown in FIG. 4, the cleaning plate 61 has plate portions 610 that extend radially in equal directions at least in three directions. These plate portions 610 are provided to extend at 120 ° intervals with the center of the cleaning plate 61 as a reference. A cleaning member 611 is mounted on the upper surface of the tip of these plate portions 610. Each cleaning member 611 is a flexible member such as a sponge, and for example, a product called Sofras manufactured by Aion Co., Ltd. can be used.

  A cleaning nozzle (not shown) is provided at a predetermined position of the cleaning plate 61. This cleaning nozzle is connected to a cleaning water supply source, and discharges cleaning water to the held surface while the cleaning member 611 is cleaning the held surface of the disk-shaped workpiece W. That is, the cleaning unit 6 is configured to be able to clean the held surface by the cleaning member 611 while supplying cleaning water to the held surface of the disk-shaped workpiece W.

  As shown in FIG. 3, the rotating means 62 rotates the cleaning plate 61 about the center of the cleaning plate 61 as a rotation axis. For example, the rotation means 62 is configured by a drive motor that rotates a rotation shaft 612 that passes through the center of the cleaning plate 61 and extends in the vertical direction. The axis of the rotation shaft 612 is perpendicular to the surface to be held of the disk-like workpiece W held by the holding mechanism 10 constituting the unloading means 5. Here, the surface to be held is a surface held by the chuck table 2 shown in FIG. 1 during grinding. The cleaning member 611 can clean the outer peripheral portion of the held surface by rotating in contact with the held surface of the disk-shaped workpiece W. In other words, the cleaning member 611 slides on the outer peripheral portion of the disk-shaped workpiece W and cleans the held surface.

  As shown in FIGS. 3 and 4, the rotation prevention mechanism 63 is disposed below the cleaning plate 61. The rotation prevention mechanism 63 serves to prevent the disk-shaped workpiece W cleaned by the cleaning plate 61 from rotating. More specifically, the cleaning member 611 of the cleaning plate 61 and the disk-like workpiece W held by the holding mechanism 10 (the unloading means 5) are brought into contact with each other, and the cleaning member 611 is rotated by the rotating means 62 to perform a circular operation. The plate-like workpiece W is prevented from rotating. As shown in FIG. 4, the rotation prevention mechanism 63 includes a rotation prevention plate 631 that extends radially at equal angles at least in three directions, and an annular portion 632 that connects the tips of these rotation prevention plates 631. . The anti-rotation plate 631 is provided to extend at 120 ° intervals with the center of the anti-rotation mechanism 63 as a reference.

  The rotation prevention plate 630 is disposed in parallel with the cleaning plate 61 (more specifically, the plate portion 610). Three anti-rotation members 633 are fixed to the upper surface of the connection portion of the anti-rotation plate 631 to the annular portion 632. The three anti-rotation members 633 are arranged at positions inside the arc connecting the three holding portions 13 of the unloading means 5 in a state where the unloading means 5 is located above the cleaning means 6 (see FIG. 4). The annular portion 632 is disposed outside the outer diameter of the disc-shaped workpiece W held by the holding portion 13 of the carry-out means 5. Further, three mounting tables 634 for mounting the pins 17 are provided at predetermined positions of the annular portion 632. These mounting tables 634 are provided at intervals of 120 ° with reference to the center of the rotation prevention plate 630.

  As shown in FIG. 3, the rotation prevention mechanism 63 includes a cylindrical portion 635 that is disposed at the center of the rotation prevention plate 631 and is disposed around the rotation shaft 612 of the cleaning plate 61. On the outer peripheral side of the cylindrical portion 635, lifting means 636 that lifts and lowers the rotation preventing plate 631 is provided. The lifting / lowering means 636 includes a piston 636a connected to the outer peripheral portion of the cylindrical portion 635, and a cylinder 636b that drives the piston 636a. The lifting / lowering means 636 moves the position of the rotation prevention mechanism 63 up and down relatively with respect to the cleaning plate 61.

  Hereinafter, the operation of the grinding apparatus 1 according to the present embodiment will be described. In the grinding apparatus 1 according to the present embodiment, the disk-shaped workpiece W before processing is taken out from the first cassette C1 by the robot 40 and conveyed to the temporary placement table 41. In the temporary placement table 41, the disk-shaped workpiece W is positioned at a predetermined position. Thereafter, it is transported and held by the loading means 43 to the chuck table 2 located in the loading / unloading area 42.

  As the turntable 21 rotates, the disk-shaped workpiece W held on the chuck table 2 is sequentially transferred below the first grinding means 31, the second grinding means 32, and the polishing means 33. Thereby, processing (grinding processing, polishing processing) by each means is performed on the exposed surface (upper surface) of the disk-shaped workpiece W. After the processing by the polishing means 33 is performed, the processed disk-shaped workpiece W is transferred to the carry-in / out area 42 by the rotation of the turntable 21. In the carry-in / out region 42, the processed disk-like workpiece W is held by the carry-out means 5.

  In the holding mechanism 10 constituting the unloading means 5, the three holding portions 13 are held in contact with the outer peripheral edge of the disk-shaped workpiece W (see FIG. 5). When the processed disk-shaped workpiece W is held by the holding mechanism 10, the disk-shaped workpiece W moves immediately above the cleaning means 6 positioned in the carry-out path by the movement and turning of the arm portion 11 in the Y-axis direction. Then stop. At this time, the position of the disc-shaped workpiece W held by the unloading means 5 is a workpiece cleaning position whose center coincides with the rotation shaft 612 of the cleaning means 6.

  With the disc-shaped workpiece W positioned at the workpiece cleaning position, the moving mechanism 12 lowers the holding mechanism 10 to bring the cleaning member 611 into contact with the lower surface (held surface) of the disc-shaped workpiece W. FIG. 5 is a schematic cross-sectional view of the state in which the disc-shaped workpiece W held by the carry-out means 5 of the grinding apparatus 1 according to the present embodiment and the cleaning member 611 are in contact with each other. In the holding mechanism 10 constituting the unloading means 5, the three holding portions 13 are in contact with and hold the outer peripheral edge of the circular plate-like workpiece W as shown in FIG. 5. Further, as shown in FIG. 5, in the cleaning unit 6, the rotation prevention mechanism 63 is disposed at the initial position, and the rotation prevention member 633 is separated from the held surface of the disk-shaped workpiece W.

  In the cleaning means 6, the lifting / lowering means 636 of the rotation prevention mechanism 63 raises the rotation prevention plate 631, so that the rotation prevention member 633 comes into contact with the held surface of the disk-shaped workpiece W. FIG. 6 is a schematic cross-sectional view of a state in which the rotation preventing member 633 is in contact with the disk-shaped workpiece W held by the carry-out means 5 of the grinding apparatus 1 according to the present embodiment. In a state where the rotation preventing member 633 is in contact with the held surface of the disk-shaped workpiece W, the upper surface of the rotation preventing member 633 is positioned at substantially the same height as the upper surface of the cleaning member 611. More specifically, the upper surface of the rotation preventing member 633 is arranged at a position higher by about 0.5 mm than the upper surface of the cleaning member 611 in a state where it contacts the held surface of the disk-shaped workpiece W. Thereby, the rotation preventing member 633 presses the held surface of the disk-shaped workpiece W more strongly than the cleaning member 611. In this way, the rotation prevention member 633 prevents the rotation of the disk-shaped workpiece W.

  As described above, the lower end portion of the pin 17 projects downward from the lower end of the holding portion 13. For this reason, when the rotation prevention plate 631 is raised, the pin 17 is placed on the placing table 634 provided in the annular portion 632 as shown in FIG. In this case, in the unloading means 5 and the cleaning means 6, a surface P1 (a surface P1 indicated by a one-dot chain line shown in FIG. 6) formed of a triangle connecting the common positions (for example, lower end portions) of the three pins 17; A plane P2 made of a triangle connecting the common positions (for example, the upper surface portion) of the three cleaning members 611 (a plane P2 indicated by a one-dot chain line shown in FIG. 6) is arranged in parallel. And as a result of arrange | positioning these surfaces P1 and P2 in parallel, the to-be-held surface of the disk-shaped workpiece | work W and the surface P2 which consists of a triangle which connected the common position of the three washing | cleaning members 611 are arrange | positioned in parallel. At the same time, the cleaning member 611 is positioned at a height suitable for cleaning the disk-shaped workpiece W.

  In this way, when the rotation prevention plate 631 is raised to prevent the rotation of the disk-shaped workpiece W, the support plate 14 and the rotation prevention mechanism 63 are fixed by placing the pins 17 on the mounting table 634. It is arrange | positioned in the state which had this positional relationship. As a result, the relative positional relationship between the unloading means 5 and the cleaning means 6 including these as components is maintained with high accuracy.

  It is assumed that the transport unit 5 (holding mechanism 10) is transported in an inclined state with respect to the cleaning unit 6, as shown in FIG. FIG. 7 shows a case where a straight line L1 passing through the center of the rotation shaft 612 of the cleaning means 6 and a straight line L2 passing through the center of the transport means 5 (holding mechanism 10) are inclined by an angle θ. .

  Thus, even when the inclination of the conveying means 5 (holding mechanism 10) and the inclination of the cleaning means 6 do not coincide with each other, the holding mechanism 10 is lowered by the moving mechanism 12 and the rotation preventing plate 631 is raised by the elevating means 636. Then, the three pins 17 are mounted on the mounting table 634. In this case, the three pins 17 come into contact with the mounting table 634 from the pin 17 arranged on the lowermost side (the pin 17 on the right side in FIG. 7). The pin 17 already in contact is pushed up by the anti-rotation plate 631 (mounting table 634) until the pin 17 arranged on the uppermost side (the pin 17 on the left side in FIG. 7) comes into contact.

  The portion of the support plate 14 corresponding to the pushed up pin 17 moves upward via the link 154, the arm portion 152, and the rotating plate 15. Such upward movement of the support plate 14 is absorbed by the coil spring 180 inserted into the support column 18. Thus, in the process of the information movement of the support plate 14, as shown in FIG. 8, the difference (θ) in the tilt amount between the transport unit 5 (holding mechanism 10) and the cleaning unit 6 is corrected. As a result, the conveying means 5 (holding mechanism 10) and the cleaning means 6 are arranged in parallel.

  Further, as shown in FIG. 6, when the cleaning member 611 and the rotation prevention member 633 are in contact with the held surface of the disk-shaped workpiece W, the cleaning member 611 and the rotation prevention member 633 are arranged at positions where they do not overlap. Has been. Then, as shown in FIG. 9A, the cleaning plate 61 is rotated in the direction of arrow P by driving the rotating means 62. Specifically, the cleaning plate 61 is stopped after rotating in a range where one cleaning member 611 does not collide with the two rotation preventing members 633.

  By rotating the cleaning member 611 in contact with the held surface of the disk-shaped workpiece W as described above, the rotation preventing member 633 comes into contact with the outer peripheral portion of the held surface as shown in FIG. 10A. The first region 100, which is a portion other than the portion where it is, is cleaned. During cleaning, the rotation preventing mechanism 63 prevents the disk-like workpiece W from rotating by rotating the cleaning member 611 by the rotating means 62, so that cleaning can be performed reliably. At this stage, the second region 101 that is an uncleaned region is left between the adjacent first regions 100. In FIG. 10, the cleaned region is indicated by a hatched portion.

  Next, after the anti-rotation plate 631 is lowered to release the contact state between the anti-rotation member 633 and the held surface of the disk-shaped workpiece W, the cleaning plate 61 is moved in the direction of the arrow Q as shown in FIG. 9B. Rotate. In this case, since the held surface of the disk-shaped workpiece W is not in contact with the rotation preventing member 633, the disk-shaped workpiece W also rotates in the direction of the arrow Q together with the cleaning member 611. As a result, as shown in FIG. 10B, the uncleaned second region 101, which is the portion of the surface to be held of the disk-shaped workpiece W where the rotation preventing member 633 is in contact, is exposed.

  After the second region 101 is exposed in this way, the anti-rotation member 633 is again raised and brought into contact with the held surface of the disk-shaped workpiece W, and as shown in FIG. 9C, the cleaning member 611 is moved in the direction of the arrow R. The second region 101 is cleaned by the rotation operation. As a result, as shown in FIG. 10C, the cleaning member 611 also comes into contact with the second region 101 and is cleaned, and the outer peripheral portion is cleaned over the entire circumference. When performing the second cleaning, since the third region 102 with which the rotation preventing member 633 is in contact is not cleaned, the cleaning may be performed after the third region 102 is exposed.

  As described above, in the grinding apparatus 1 according to the present embodiment, the three pins 17 provided on the holding mechanism 10 constituting the carry-out means 5 are provided on the rotation prevention mechanism 63 constituting the cleaning means 6. From the triangle that connects the common position of the cleaning member 611 provided on the cleaning plate 61 constituting the cleaning means 6 and the surface P1 that is mounted on the mounting table 634 and connects the common positions of these pins 17. The plane P2 is arranged in parallel. Accordingly, the relative positions of the unloading means 5 and the cleaning means 6 can be determined without providing a configuration for individually positioning the unloading means 5 and the cleaning means 6. Accordingly, the relative positional relationship between the unloading means 5 for unloading the disk-shaped workpiece W and the cleaning means 6 for cleaning the held surface of the disk-shaped workpiece W is maintained with high accuracy without requiring a complicated configuration. It becomes possible to do. As a result, the held surface of the disk-shaped workpiece W held by the unloading means 5 and the upper surface of the cleaning member 611 of the cleaning means 6 can be positioned in parallel, and cleaning spots are formed on the held surface of the disk-shaped workpiece W. It becomes possible to wash without occurring.

  In the above description, the three pins 17 provided in the holding mechanism 10 by raising the rotation prevention plate 631 by the lifting / lowering means 636 of the cleaning means 6 are mounted on the mounting table 634 provided in the rotation prevention mechanism 63. The case where it is placed is explained. However, the operation when placing the pins 17 on the placing table 634 is not limited to this. The rotation preventing member 633 is disposed in advance so that the upper surface of the rotation preventing member 633 is slightly above the upper surface of the cleaning member 611, and the pin 17 is mounted on the mounting table 634 according to the lowering operation of the holding mechanism 10 by the moving mechanism 12. You may make it place. In this case, by simply lowering the holding mechanism 10 and placing the three pins 17 on the mounting table 634, the triangular surface P <b> 1 connecting the pins 17 of the holding mechanism 10 and the cleaning member 611 of the cleaning unit 6. Can be arranged in parallel with a plane P2 made of a triangle connecting the two. Accordingly, the relative positional relationship between the unloading means 5 for unloading the disk-shaped workpiece W and the cleaning means 6 for cleaning the held surface of the disk-shaped workpiece W is maintained with high accuracy without requiring a complicated configuration. It becomes possible to do. In this case, the lifting / lowering means 636 of the rotation prevention mechanism 63 plays a role of lowering the rotation prevention plate 631 when the disc-like workpiece W is rotated by the cleaning plate 61.

  In addition, this invention is not limited to the said embodiment, It can change and implement variously. In the above-described embodiment, the size, shape, and the like illustrated in the accompanying drawings are not limited to this, and can be appropriately changed within a range in which the effect of the present invention is exhibited. In addition, various modifications can be made without departing from the scope of the object of the present invention.

  For example, in the cleaning means 6 of the above-described embodiment, the mounting table 634 is provided in the annular portion 632 that constitutes the rotation prevention mechanism 63, and the three holding mechanisms 10 that constitute the carry-out means 5 are provided on this mounting table 634. A configuration for placing the pins 17 is described. However, the configuration of the mounting table 634 provided in the rotation prevention mechanism 63 and the configuration of the holding mechanism 10 to be mounted on the mounting table 634 are not limited to this, and can be appropriately changed.

  Hereinafter, another example of the cleaning means 6 of the grinding apparatus 1 according to the present embodiment will be described with reference to FIGS. 11 and 12. FIG. 11 is a plan view showing another example of the cleaning means 6 of the grinding apparatus 1 according to the present embodiment. FIG. 12 is a schematic cross-sectional view of a state in which the rotation preventing member 633 constituting the cleaning unit 6 shown in FIG. 11 is in contact with the disk-shaped workpiece W held by the carry-out unit 5. In FIG. 11 and FIG. 12, the same reference numerals are given to the same components as those in the above embodiment, and the description is omitted. In FIG. 11, for convenience of explanation, the disk-shaped workpiece W is indicated by a broken line, and the holding portion 13 and the pin 17 of the carry-out means 5 are indicated. In FIG. 12, for convenience of explanation, two cleaning members 611, a rotation preventing member 633, and a mounting table 634a are shown.

  The cleaning means 6 shown in FIG. 11 is different from the above-described embodiment in that three mounting tables 634a are provided by extending the distal end portion of the rotation prevention plate 631 outward. Unlike the above-described embodiment, these mounting bases 634a are provided for mounting the holding portion 13 instead of the pins 17.

  Similarly to the above embodiment, in the cleaning means 6 shown in FIG. 11, the anti-rotation member 633 holds the disc-shaped workpiece W by the elevating means 636 of the anti-rotation mechanism 63 ascending the anti-rotation plate 631. Touch the surface. At this time, the upper surface of the rotation preventing member 633 is positioned at substantially the same height as the upper surface of the cleaning member 611. More specifically, the upper surface of the rotation preventing member 633 is arranged at a position higher by about 0.5 mm than the upper surface of the cleaning member 611 in a state where it contacts the held surface of the disk-shaped workpiece W. Thereby, the rotation preventing member 633 presses the held surface of the disk-shaped workpiece W more strongly than the cleaning member 611. In this way, the rotation prevention member 633 prevents the rotation of the disk-shaped workpiece W.

  In the cleaning means 6 shown in FIG. 11, when the rotation prevention plate 631 is raised, the holding portion 13 is placed on a placement table 634 a provided at the tip of the rotation prevention plate 631 as shown in FIG. 12. In this case, in the unloading means 5 and the cleaning means 6, a surface P3 (surface P3 indicated by a one-dot chain line shown in FIG. 12) connecting the common position (for example, the lower end portion) of the holding portion 13 and three A plane P4 made of a triangle connecting the common positions (for example, the upper surface portion) of the cleaning member 611 (a plane P4 indicated by a one-dot chain line shown in FIG. 12) is arranged in parallel.

  In this way, also in the cleaning means 6 shown in FIG. 11, when the rotation prevention plate 631 is raised to prevent the rotation of the disk-shaped workpiece W, the holding unit 13 is mounted on the mounting table 634. The support plate 14 and the rotation prevention mechanism 63 are arranged with a certain positional relationship. Thereby, the relative position of both can be determined without providing the structure etc. which position the carrying-out means 5 and the washing | cleaning means 6 separately. As a result, the relative positional relationship between the unloading means 5 for unloading the disk-shaped workpiece W and the cleaning means 6 for cleaning the surface to be held of the disk-shaped workpiece W is maintained with high accuracy without requiring a complicated configuration. It becomes possible to do.

  Further, the length extending downward from the support plate 14 is a length common to the holding portion 13 and the pin 17, and both the holding portion 13 and the pin 17 are attached to the annular portion 632 of the rotation prevention mechanism 63 according to the above embodiment. You may make it mount.

  As described above, according to the present invention, the unloading means 5 for unloading the disk-shaped workpiece W and the cleaning means 6 for cleaning the held surface of the disk-shaped workpiece W without requiring a complicated configuration. The relative positional relationship can be maintained with high accuracy, and is particularly useful for a grinding apparatus having a function of cleaning a held surface of a disk-shaped workpiece W having a large diameter.

W disk work 2 chuck table 31 first grinding means 32 second grinding means 5 carry-out means 6 cleaning means 61 cleaning plate 610 plate portion 611 cleaning member 612 rotating shaft 62 rotating means 63 anti-rotation mechanism 631 anti-rotation plate 632 annular portion 633 Anti-rotation member 634, 634a Mounting table 635 Cylindrical portion 636 Lifting means 636a Piston 636b Cylinder 7 Washing and drying means 10 Outer peripheral edge holding mechanism (holding mechanism)
11 Arm part 12 Movement mechanism 13 Holding part 14 Support plate 17 Pin

Claims (2)

A chuck table having a holding surface for sucking and holding a disk-shaped work, a grinding means for grinding the disk-shaped work sucked and held by the chuck table, and an outer peripheral edge holding mechanism for holding the outer peripheral edge of the disk-shaped work And at least a moving mechanism for moving the outer peripheral edge holding mechanism toward / separates from the chuck table, and unloading means for unloading the disk-shaped work from the chuck table; and the unloading means unloads the disk-shaped work from the chuck table. In a grinding device provided with a cleaning means that is disposed in the carry-out path and performs cleaning while supplying cleaning water to the held surface of the disk-shaped workpiece,
The outer peripheral edge holding mechanism includes at least three holding portions arranged at an equal angle and moving in a radial direction; and pins arranged at an equal interval protruding downward from the lower end of the holding portion; Comprising at least
The cleaning means includes a cleaning plate having a cleaning member attached to a front end of a plate radially extending in at least three directions at an equal angle and mounted on the outer peripheral portion of the disk-shaped workpiece for cleaning, and a center of the cleaning plate A disk-shaped workpiece by a cleaning operation in which the rotating member that rotates the cleaning plate with the rotating shaft as a rotation axis, and the disk-shaped workpiece held by the cleaning member and the carry-out means are brought into contact with each other to rotate the cleaning member An anti-rotation mechanism that prevents the rotation of
The anti-rotation mechanism includes: an anti-rotation plate that is mounted with at least three anti-rotation members parallel to the cleaning plate; and a mounting table that is disposed on the anti-rotation plate outside the outer diameter of the disk-shaped workpiece. At least composed,
The outer peripheral edge holding mechanism is lowered using the moving mechanism, the at least three pins are placed on the mounting table, and the outer peripheral edge holding mechanism is composed of a triangle connecting the common positions of the at least three pins. A grinding apparatus, wherein a surface and a surface made of a triangle connecting the common positions of the at least three cleaning members of the cleaning means are parallel to each other. The cleaning means includes elevating means for elevating and lowering the rotation prevention plate,
Upper surface of the rotation preventing member elevating means is placed on the holding portion of the cleaning member of the upper surface and substantially the same height located was the anti-rotation plate mounting table in the outer periphery holding mechanism, said at least 2. The grinding apparatus according to claim 1, wherein a surface made of a triangle connecting the common positions of the three holding portions is parallel to a surface made of a triangle connecting the common positions of the at least three cleaning members.

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