WO2023119417A1 - 電気的特性取得装置 - Google Patents

電気的特性取得装置 Download PDF

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Publication number
WO2023119417A1
WO2023119417A1 PCT/JP2021/047312 JP2021047312W WO2023119417A1 WO 2023119417 A1 WO2023119417 A1 WO 2023119417A1 JP 2021047312 W JP2021047312 W JP 2021047312W WO 2023119417 A1 WO2023119417 A1 WO 2023119417A1
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WO
WIPO (PCT)
Prior art keywords
pair
probes
component
electrical characteristic
correction value
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2021/047312
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English (en)
French (fr)
Japanese (ja)
Inventor
剛 水越
将士 木村
周平 水谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Corp
Original Assignee
Fuji Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Corp filed Critical Fuji Corp
Priority to JP2023568820A priority Critical patent/JPWO2023119417A1/ja
Priority to US18/718,257 priority patent/US20250052794A1/en
Priority to PCT/JP2021/047312 priority patent/WO2023119417A1/ja
Priority to DE112021008533.6T priority patent/DE112021008533T5/de
Priority to CN202180105002.5A priority patent/CN118339464A/zh
Publication of WO2023119417A1 publication Critical patent/WO2023119417A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
    • G01R27/26—Measuring inductance or capacitance; Measuring quality factor, e.g. by using the resonance method; Measuring loss factor; Measuring dielectric constants ; Measuring impedance or related variables
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R35/00—Testing or calibrating of apparatus covered by the other groups of this subclass

Definitions

  • the present disclosure relates to an electrical characteristic acquisition device that acquires electrical characteristics of electronic components.
  • Patent Document 1 describes a jig for obtaining an open correction value when obtaining impedance as an electrical characteristic of an electronic component.
  • This jig has a surface made of an insulating material and a thickness that varies in a plurality of stages.
  • the stray admittance is measured as the open correction value while being grasped by the child.
  • a problem of the present disclosure is to obtain an open correction value well.
  • the open correction value which is the electrical characteristic when the distance between the pair of probes is the length of the electrode side of the part to be acquired, is the distance between the pair of probes. It is obtained by calculation based on the measured value of the electrical characteristics when the distance between them is the set length, the set length, and the electrode-side length of the part to be acquired. Therefore, even if it is difficult to adjust the spacing between the pair of probes, the open correction value can be obtained accurately. In addition, it is not necessary to measure the open correction value each time the part to be acquired changes, and the working efficiency can be improved accordingly.
  • FIG. 1 is a perspective view of a mounter including an electrical characteristic acquisition device that is an embodiment of the present disclosure
  • FIG. FIG. 2 is a perspective view of a main part of the electrical characteristic acquisition device
  • FIG. 2 is a cross-sectional view of a main part of the electrical characteristic acquisition device
  • FIG. 2 is a partial plan view of the electrical characteristic acquisition device
  • 3 is an air circuit diagram included in the electrical characteristic acquisition device
  • FIG. 4 is a cross-sectional view of a same-potential portion provided in the coaxial cable; It is the figure which decomposed
  • FIG. 2 is a diagram conceptually showing an electrical characteristic measuring circuit of the electrical characteristic acquisition device
  • FIG. 3 is a diagram conceptually showing an equivalent circuit of the electrical characteristic measuring circuit
  • FIG. 2 is a diagram conceptually showing a component whose electrical characteristics are acquired by the electrical characteristic acquisition device
  • FIG. 5 is a diagram showing the relative positional relationship between the holding base and the pair of probes when obtaining an open correction value in the electrical characteristic apparatus
  • FIG. 2 is a block diagram conceptually showing the periphery of a control device of the electrical characteristic acquisition device
  • 4 is a flow chart showing an electrical characteristic acquisition program stored in a storage unit of the control device
  • 15A is a diagram showing the initial state of the electrical characteristic acquisition device
  • FIG. 15B is a diagram showing a clamped state
  • FIG. 15C is a diagram showing a measurement state
  • FIG. 15D is a diagram showing a discarded state. .
  • a mounting machine including a measuring device as an electrical characteristic acquisition device which is an embodiment of the present disclosure, will be described below in detail based on the drawings.
  • the mounting machine shown in FIG. 1 mounts components on a circuit board, and includes a main body 2, a circuit board transfer/holding device 4, a component supply device 6, a head moving device 8, and the like.
  • the circuit board transporting/holding device 4 transports and holds a circuit board P (hereinafter abbreviated as the board P) in a horizontal posture.
  • the width direction is the y direction
  • the thickness direction of the substrate P is the z direction.
  • the y-direction and z-direction are the front-back direction and the up-down direction of the mounting machine, respectively. These x-direction, y-direction, and z-direction are orthogonal to each other.
  • the component supply device 6 supplies electronic components (hereinafter abbreviated as components) s to be mounted on the substrate P, and includes a plurality of tape feeders 14 and the like.
  • the head moving device 8 holds and moves the mounting head 16 in the x, y, and z directions, and the mounting head 16 has a suction nozzle 18 that picks up and holds the component s.
  • Reference numeral 20 indicates a camera.
  • the camera 20 captures an image of the component s held by the suction nozzle 18, and based on the image captured by the camera 20, it is determined whether the component s is to be mounted on the circuit board P. be judged.
  • Reference numeral 22 designates a measuring device.
  • the measuring device 22 measures electrical characteristics of the component s.
  • the electrical characteristics of the component s include L (inductance), C (capacitance), R (resistance, resistance), X (reactance), Z' (impedance) and the like. One or more are measured.
  • the measuring device 22 is mounted on the mounting machine, and is provided on the main body of the circuit board transporting and holding device 4 via the storage box 26 .
  • a disposal passage 28 is provided between the storage box 26 and the measuring device 22 , and the component s whose electrical characteristics have been measured is stored in the storage box 26 through the disposal passage 28 .
  • the measuring device 22 is provided in the storage box 26 so that height adjustment is possible.
  • a base portion 30 is engaged with the storage box 26 so as to be able to move up and down, and a measuring table 29 is attached to the base portion 30 by fastening portions (hereinafter referred to as fastening portions) including, for example, bolts and nuts.
  • fastening portions including, for example, bolts and nuts.
  • a part is detachably held by a member 31 (see FIGS.
  • the base portion 30 and the measuring table 29 are integrally movable up and down. Through holes 29a and 30a that can communicate with the waste passage 28 are provided in the measuring table 29 and the base portion 30, respectively (see FIGS. 3 and 4).
  • the measuring device 22 includes the measuring table 29 and the base portion 30, a holding table 32 capable of holding the part s, a pair of probes 37 composed of a stator 34 and a mover 36, a holding table 32, a mover moving device 41 as an approaching/separating device for moving the mover 36 toward or away from the stator 34, a measuring unit 42 (see FIG. 4), and the like.
  • the part s has electrodes sp1 and sp2 at both ends and can be gripped by a pair of probes 37.
  • the part s as the square chip can be generally rectangular in plan view, and the length d of the side having the electrodes sp1 and sp2 at both ends is The length d of the part s on the electrode side is called.
  • the holding table 32 includes a component placement section 44 and a placement section holder 46 that holds the component placement section 44 .
  • a V-groove 44c is formed in the component mounting portion 44, and the component s is mounted thereon.
  • the component mounting portion 44 abuts on the mounting portion holder 46 and is fixed by the fastening portion 47 .
  • the mounting portion holder 46 abuts on the measuring table 29 via the stopper 90 (see FIG. 3), and the measuring table 29 is fixed to the base portion 30 by the fastening portion 31 as described above.
  • the component mounting portion 44, mounting portion holder 46, stopper 90, measuring table 29, base portion 30, fastening portions 31, 47, etc. are made of a conductive material. .
  • the base portion 30 is grounded. As described above, the component mounting portion 44 is grounded. Further, as a result, static electricity can be removed from the component s placed on the component placement section 44 .
  • the stator 34 and the mover 36 respectively have facing surfaces 34f and 36f facing each other, and the part s is gripped by the pair of facing surfaces 34f and 36f.
  • the stator 34 is held by a stator holder 55 , and the stator holder 55 is fixed to the measuring table 29 .
  • the mover 36 is integrally and movably held by a mover holder 56 , and the mover holder 56 is provided movably with respect to the measuring table 29 . As a result, the mover 36 can be moved toward or away from the stator 34 .
  • a facing surface 36f of the mover 36 has a shape capable of entering a V-groove 44c formed in the upper surface of the holding table 32, in other words, has a generally triangular shape corresponding to the V-groove 44c. Therefore, the mover 36 and the stator 34 can grip the part s placed in the V-groove 44c.
  • the mover 36 includes a front end portion 36a including a facing surface 36f, and has a shape in which the front end portion 36a protrudes downward from the intermediate portion 36b. The outer surface of the front end portion 36a is close to the inner surface of the V-groove 44c, but the intermediate portion 36b is shaped to be far away from the inner surface of the V-groove 44c.
  • the stator holder 55 is connected to a coaxial cable portion 58 via a bracket 57
  • the mover holder 56 is connected to a coaxial cable portion 60 via a bracket 59 .
  • the stator holder 55, the stator 34, the movable element holder 56, the movable element 36, and the brackets 57 and 59 are all made of a conductive material, the stator 34, the movable element 36 and the coaxial cable
  • the parts 58 and 60 are electrically connected.
  • An electrical characteristic measuring circuit 61 is formed by the stator 34, the mover 36 and the like, the coaxial cable portions 58 and 60, the measuring portion 42 and the like.
  • the stator-side member (for example, one or more of the upper portion of the stator 34, the portion of the stator holder 55 above the stator 34, and the measurement table 29) has air passages. 70 is formed and connected to air cylinders 72 and 74 as fluid pressure cylinders. An opening 70a of the air passage 70 is formed to face the facing surface 36f of the mover 36. As shown in FIG. Also, an ionizer 76 is provided in the air passage 70 . The ionizer 76 generates corona discharge to ionize the air.
  • the air cylinder 72 is the driving source of the pedestal moving device 40, and the mounting section holder 46 is connected to the piston rod 72p (see FIG. 5) of the air cylinder 72.
  • An electromagnetic valve device 80 is provided between the two air chambers 72a and 72b of the air cylinder 72, the air source 78, the air passage 70, and the filter (atmosphere). Movement and the like of the mounting section holder 46 (holding table 32) are controlled by the control of the solenoid valve device 80.
  • the air cylinder 74 is a drive source for the mover moving device 41, and the mover holder 56 is connected to the piston rod 74p.
  • An air source 78 , an air passage 70 and a filter (atmosphere) are connected to the air chambers 74 a and 74 b of the air cylinder 74 via an electromagnetic valve device 82 .
  • the electromagnetic valve device 82 By controlling the electromagnetic valve device 82, the movement of the mover holder 56 (the mover 36) and the like are controlled. Further, when the holding table 32 advances and the movable element 36 retreats, air is supplied from the air cylinders 72 and 74 to the air passage 70 and discharged toward the movable element 36 from the opening 70a.
  • a pair of guide rods 86 and 87 extending in the y direction are provided on the holding table 32 and the movable element holder 56, and a pair of guide rods 86 and 87 extending in the y direction are provided on the movable element holder 56 and the measuring table 29.
  • Rods 88, 89 are provided.
  • the guide rods 86, 87, 88, and 89 allow the holding table 32 and the mover 36 to move relative to the measuring table 29 in the y direction.
  • the mover 36 is relatively movable in the y direction.
  • a stopper 92 is provided on the stator side of the mover holder 56, and a stopper 90 is provided on the portion of the measuring table 29 that holds the stator holder 55. As shown in FIG. The stopper 92 regulates the approach limit between the mover holder 56 and the holder 32 (mounting section holder 46). It defines the approach limit.
  • the holding table 32 is moved by the holding table moving device 40 between a position in contact with the stopper 90 and a position in contact with the stopper 92 .
  • the holding table 32 is in contact with the stopper 90 and the pair of probes 37 are separated (when the mover 36 is separated from the stator 34), at least one of the holding tables 32 The part is positioned between the pair of probes 37 and the holding base 32 is in close proximity to the pair of probes 37 .
  • the holding table 32 is in a position to abut against the stopper 92, the holding table 32 does not exist between the pair of probes 37, and the position from at least one of the pair of probes 37 (movable element 36). It is in a state separated by a set distance a (see FIG. 12) or more.
  • the surface of the measuring table 29 and the surface of the base portion 30 are electrically connected by a ground wire 132 .
  • a ground wire is also connected to the base portion 30 to eliminate static electricity from the entire measuring device 22 .
  • the coaxial cable sections 58, 60 each include two coaxial cables 58a, 58b and two coaxial cables 60a, 60b.
  • Each of the coaxial cables 58a, 58b, 60a, 60b has the same structure, and as shown in FIG. , protective coating 146 and the like.
  • the outer conductor 144 is often formed of braided copper wires in which copper wires are woven into a mesh, and is usually connected to the ground. By providing the outer conductor 144, leakage of the transmitted signal to the outside is suppressed. For this reason, the copper wire of the outer conductor 144 can be called a shield wire.
  • the inner conductor 140 , insulator 142 and outer conductor 144 are covered with a protective film 146 .
  • the electrical characteristics of the part s are measured by the self-balancing bridge method, and the coaxial cables 58a, 58b, 60a, 60b are connected by the four-terminal pair measurement method.
  • the method of measuring the electrical characteristics of the component s and the method of connecting the coaxial cable portions 58 and 60 are not limited to the automatic balancing bridge method and the four-terminal pair measurement method.
  • the inner conductors 140 of the coaxial cables 58 a and 58 b are each connected to one (same) probe-side connecting portion 58 c , and the probe-side connecting portion 58 c is attached to the bracket 57 .
  • the inner conductors 140 of the coaxial cables 60 a and 60 b are also connected to one probe-side connecting portion 60 c , and the probe-side connecting portion 60 c is attached to the bracket 59 .
  • the detector-side connecting portions 58p, 58q, 60p, and 60q which are the other ends of the coaxial cables 58a, 58b, 60a, and 60b, are connected to the terminal Hc of the measuring portion 42, respectively, as shown in FIGS. , Hp, Lc, Lp.
  • an AC power supply is connected to the coaxial cable 58a.
  • the output of the AC power supply is supplied to the inner conductor 140 of the coaxial cable 58a and returned via the outer conductor 144.
  • the potential difference between inner conductor 140 and outer conductor 144 is detected as a voltage value applied to component s.
  • the current flowing between the inner conductor 140 and the outer conductor 144 is obtained as the current value flowing through the part s.
  • the potential difference of the resistance value Rx (not shown) provided between the inner conductor 140 and the outer conductor 144 is obtained, and the current flowing through the resistor is obtained based on the potential difference and the resistance value Rx.
  • the potential difference between the inner conductor 140 and the outer conductor 144 is detected, and the constituent elements (oscillator, etc.) of the measuring section 42 (not shown) are controlled so that the detected potential difference becomes zero.
  • the current flowing through the resistor and the current flowing through the component s become the same, and the current flowing through the resistor acquired at the terminal Lc in this state is taken as the current value flowing through the component s.
  • Each of the coaxial cables 58a, 58b, 60a, 60b is provided with the same potential section 150, and in the same potential section 150, the outer conductors 144 of the coaxial cables 58a, 58b, 60a, 60b are electrically connected to each other. .
  • each of coaxial cables 58a, 58b, 60a, 60b is stripped of protective coating 146 and exposed outer conductor 144 is wrapped with copper foil tape 152 and solder 154 is applied.
  • the coaxial cables 58a, 58b, 60a, 60b are positioned at the vertices of the square, respectively, and adjacent cables are connected by the solder 154.
  • FIG. the portion where the protective coating 146 has been peeled off is covered with a protective tube 156 .
  • the outer conductors 144 of the coaxial cables 58a, 58b, 60a, 60b can be electrically connected to each other, and the electric potential of each outer conductor 144 can be set to can be the same.
  • the outer conductor 144 of each coaxial cable 58a, 58b, 60a, 60b is set to the same ground potential.
  • the coaxial cables 58a, 58b, 60a, 60b are connected by the 4-terminal pair measurement method in this way, the current flowing through the component s and the voltage applied to the component s are measured by separate circuits.
  • the currents flowing through the inner conductor 140 and the outer conductor 144 are opposite to each other, the generation of magnetic flux in the inner conductor 140 and the outer conductor 144 can be suppressed. From the above, it is possible to accurately measure the current and voltage flowing through the component s.
  • the outer conductors 144 of the plurality of coaxial cables 58 and 60 are set to the same ground potential, so noise can be reduced and the electrical characteristics of the component s can be improved. It can be stably detected.
  • the electrical characteristic measurement circuit (hereinafter sometimes simply referred to as the measurement circuit) 61 is a dedicated part of the measurement device 22 and can be called a test fixture (accessory).
  • the measurement circuit 61 when the electrical characteristics of the component s are acquired in the measurement circuit 61, if current is supplied to the cable portions 58, 60, etc., electrical disturbance occurs in portions other than the component s, causing the measurement section 42 to affects the measured electrical property, which is the electrical property of the part s measured by . In order to reduce this effect, the disturbances (residual impedance, stray admittance) are determined, the measured electrical characteristics are corrected, and the final electrical characteristics of the component s are obtained.
  • FIG. 10 shows an equivalent circuit of this measurement circuit (test fixture) 61.
  • FIG. In the equivalent circuit, it is assumed that a resistor 160 and a coil 161 are positioned in series with the pair of probes 37 (stator 34 and mover 36), and a resistor 162 and a capacitor 163 are positioned in parallel with the pair of probes 37. do.
  • the residual impedance of the measuring circuit 61 is the impedance that occurs in series with the component s
  • the stray admittance is the reciprocal of the impedance that occurs between the pair of probes 37 in parallel with the component s. Residual impedance can be assumed to occur at resistor 160 and coil 161 in the equivalent circuit, and stray admittance can be assumed to occur at resistor 162 and capacitor 163 .
  • the residual impedance Zs can be obtained as the impedance measured by the measuring section 42 while the pair of probes 37 are in contact with each other.
  • the residual impedance can be called a short correction value.
  • the solenoid valve devices 80 and 82 are controlled to bring the mover 36 closer to the stator 34 so that they are in contact with each other, and the holding base 32 is retracted until it abuts against the stopper 92. , are separated from the pair of probes 37 .
  • the holding table 32 is made of a conductive material, and holds the movable element 36 of the pair of probes 37 in a state of being retracted to the rearward end position behind the front end portion 36a of the movable element 36.
  • the distance to the base 32 becomes equal to or greater than the set distance, and the influence of the holding base 32 on the value measured by the measuring section 42 is reduced. In this state, the measurement unit 42 acquires a short correction value as the residual impedance Zs.
  • the residual impedance Zs can be expressed as shown in the following formula in the equivalent circuit of FIG. Rs is the resistance value that is the electrical characteristic of the resistor 160 and jLs ⁇ is the impedance that is the electrical characteristic of the coil 161 .
  • Zs Rs+jLs ⁇
  • the floating admittance is obtained by measuring with the measuring unit 42 when the distance between the pair of probes 37 is the length d on the electrode side of the part s whose electrical characteristics are to be measured (acquired target). be able to.
  • the mover 36 can be moved toward or away from the stator 34 by driving the air cylinder 74 . Therefore, it is difficult to adjust the distance between the pair of probes 37 to the length d. Therefore, in the present embodiment, the steady state of the measuring device 22, that is, the state in which the movable element 36 is at the retracted end position, in other words, the distance between the pair of probes 37 is set to a predetermined set length x.
  • the stray admittance (which can be referred to as the reference stray admittance) Yox is measured by the measurement unit 42 and pre-stored.
  • An open correction value is obtained based on the reference floating admittance Yox, the set length x, and the length d of the part s on the electrode side.
  • the set length x which is the distance between the pair of probes 37 in the retracted end position), is often known, but if it is not known, it can be obtained by actual measurement.
  • the holding base 32 When acquiring the reference floating admittance Yox, as shown in FIG. 12, the holding base 32 is retracted to the retraction end position where the stopper 92 abuts against the stopper 92 under the control of the electromagnetic valve device 80 while the pair of probes 37 are separated from each other. Let me.
  • the holding base 32 is positioned between the pair of probes 37 in a state in which the pair of probes 37 are spaced apart, the holding platform 32 made of a conductive material is positioned between the pair of probes 37.
  • the presence of the holding table 32 affects the measurement value (stray admittance) by the measurement unit 42 .
  • the conditions as similar as possible when measuring the reference stray admittance Yox and when measuring the electrical characteristics of the component s.
  • the holding base 32 when measuring the reference floating admittance Yox, the holding base 32 is moved to the retracted end position where it abuts against the stopper 92 and does not exist between the pair of probes 37 . In this state, the holding table 32 is separated from the mover 36 by the set distance a or more, so that the influence of the holding table 32 on the measured value by the measuring unit 42 can be reduced.
  • the reference stray admittance Yox can be expressed as shown below.
  • C is the capacitance of capacitor 163 and Ro is the resistance of resistor 162 .
  • Yox jC ⁇ +1/Ro
  • the resistance value Ro is the resistance value of air, which is a very large value, because it occurs between the pair of probes 37 spaced apart. Therefore, 1/Ro can be considered to be approximately zero.
  • the reference floating admittance Yox can be expressed as shown in the following equation. Yox ⁇ jC ⁇
  • Zdut (Zm-Zs) Yod + (Zm-Zs) Zdut
  • the open correction value can be obtained by calculation regardless of the length d of the part s on the electrode side.
  • the mounting machine includes a control device 200.
  • the control device 200 includes a computer-based controller 202 and a plurality of drive circuits 204, as shown in FIG.
  • the controller 202 includes an execution unit 210, a storage unit 212, an input/output unit 214, and the like.
  • the electromagnetic valve devices 80 and 82 of the holding table moving device 40 and the mover moving device 41 are connected.
  • the measuring section 42, the display 216, the mover position sensor 218, the holding table position sensor 220, the nozzle height sensor 222, etc. are connected.
  • the storage unit 212 stores the set length x, the reference floating admittance Yox for the set length x, and the short correction value Zs. Also, as work plan information, the shape of the part s whose impedance is to be obtained (for example, including the length on the electrode side), the default value of the impedance, etc., are input via an input device (not shown) or the like, and Alternatively, it is stored in a storage unit different from the storage unit 212 .
  • the electrical characteristics of the component s are measured by executing the electrical characteristics measurement program represented by the flow chart of FIG.
  • the electromagnetic valve devices 80 and 82 are controlled based on the output signals of the mover position sensor 218 and the cradle position sensor 220, and the like. Measurement results may be displayed on display 216 .
  • the measuring device 22 is always in the initial state shown in FIG. 15A.
  • the mover 36 is at the retracted end position, and the holding base 32 is at the forward end position, ie, in contact with the stopper 90 .
  • step 1 it is determined whether or not an instruction to measure the electrical characteristics of component s has been issued. For example, when a command to measure the electrical characteristics of the component s is issued, such as when a setup change is performed, the determination is YES.
  • the open correction value Yod for the part s is obtained according to formula (1).
  • the reference floating admittance Yox stored in the storage unit 212, the set length x, the length d on the electrode side of the part whose impedance is to be obtained next, and the like are read. is the length d on the electrode side of the part to be acquired, the floating admittance Yod corresponding to the part is acquired.
  • the mounting head 16 is moved.
  • the mounting head 16 reaches the V-groove 44c, the suction nozzle 18 is lowered, the component s is released, and the component s is placed on the V-groove 44c.
  • the mover 36 is advanced under the control of the electromagnetic valve device 82, and the part s is clamped by the mover 36 and the stator 34 as shown in FIG. 15B.
  • the holding table 32 is retracted until it abuts against the stopper 92 under the control of the solenoid valve device 80. As shown in FIG. The holding table 32 reaches a position where it does not contact the part s and the mover 36 .
  • the static elimination time is the time during which static electricity charged on the component s is eliminated, and is predetermined.
  • the determination in S6 becomes YES, and the measured impedance Zm for the part s is measured in S7.
  • the final impedance Zdut of the part s is obtained by substituting the measured impedance Zm in S8, the open correction value Yod obtained in S2, and the short correction value Zs stored in the storage unit 212 into the equation (2).
  • the final impedance Zdut can be displayed on the display 216, compared with a default value, and the comparison result displayed on the display 216, and the like.
  • the mover 36 is retracted in S9, and the part s gripped between the mover 36 and the stator 34 is released. Further, as the mover 36 retreats, air is supplied obliquely from above to the facing surface 36f of the mover 36 through the opening 70a. As a result, even if the component s adheres to the facing surface 36f, the component s can be dropped favorably.
  • the holding table 32 is retracted as shown in FIG. 15D. Since the space between the mover 36 and the stator 34 is communicated with the disposal passage 28 , the parts s can be stored in the storage box 26 . After the holding table 32 is retracted until it contacts the stopper 92, in S11, the holding table 32 is advanced and positioned between the pair of facing surfaces 34f and 36f. A space is provided above the V-groove 44c so that the component s can be placed thereon, and the initial state shown in FIG. 15A is restored. In addition, since the air containing ions is supplied to the facing surface 36f of the mover 36 as the holding base 32 advances, the facing surface 36f can be neutralized.
  • the open correction value is obtained accurately.
  • the final impedance of the part s can be obtained with high accuracy.
  • the impedance of the component s can be measured with high accuracy.
  • the open correction value can be quickly and easily obtained by calculation even if the part s to be obtained is changed and the length on the electrode side is changed. It is not necessary to adjust the distance between the pair of probes 37 each time to acquire the open correction value. As a result, a decrease in work efficiency can be suppressed.
  • control device 200 and the like constitute the processing unit
  • control device 200, the measurement device 22 and the like constitute the electrical characteristic acquisition device.
  • An open correction value acquisition unit is configured by the storage unit 212, a portion for storing S2 of the control device 200, a portion for executing S2, and the like.
  • S8 can be executed after S11. Further, in the above embodiment, the case where the measuring device as the electrical characteristic acquiring device is provided in the mounting machine has been described, but the measuring device can be used alone instead of being provided in the mounting machine.
  • measuring device 32 holding table 34: stator 36: mover 42: measuring section 44: component mounting section 57, 59: bracket 58, 60: coaxial cable section 58a, 58b, 60a, 60b: coaxial cable 61: Electrical characteristic measurement circuit 150: same potential section 200: control device 202: storage section
  • a characteristic acquisition device a measuring unit for measuring electrical characteristics of the component; Based on the electrical characteristics measured by the measuring unit when the distance between the pair of probes is a predetermined set length, the set length, and the length of the part on the electrode side, the pair of an open correction value acquiring unit that acquires an electrical characteristic as an open correction value by calculation when the interval between the probes is the length of the electrode side of the part; correcting the measured electrical characteristics, which are the electrical characteristics of the component measured by the measuring unit, with at least the open correction value acquired by the open correction value acquiring unit to obtain the final electrical characteristics of the component; an electrical characteristic acquisition apparatus including a processing unit for acquiring;
  • the part can be grasped by a pair of probes and has a pair of electrodes facing each other.
  • the length of the part on the side where the pair of electrodes are positioned facing each other is referred to as the length on the electrode side.
  • the final electrical characteristics are the electrical characteristics output by this electrical characteristic acquisition device, and can be referred to as output electrical characteristics.
  • the final electrical properties are closer to the true electrical properties of the part than the measured electrical properties.
  • the open correction value obtaining unit obtains the stray admittance as the electrical characteristic measured by the measuring unit when the distance between the pair of probes is the set length, the set length, and the Item (1), wherein, based on the length of the part on the electrode side, the stray admittance when the distance between the pair of probes is the length of the part on the electrode side is obtained by calculation as the open correction value. Electrical characteristic acquisition device.
  • the measurement unit corrects the measured impedance, which is the measured electrical characteristic, by at least the open correction value to obtain the final impedance, which is the final electrical characteristic of the part.
  • the electrical characteristic acquisition device preliminarily acquires the set length and a reference floating admittance that is the floating admittance measured by the measuring unit when the distance between the pair of probes is the set length.
  • the electrical characteristic acquisition device according to item (2) which includes a memory for storing.
  • the open correction value acquisition unit obtains an open correction value (the interval between a pair of probes is A floating admittance corresponding to the part, which is the floating admittance when the length of the part is on the electrode side, is acquired by calculation.
  • the electrical characteristic acquisition device includes an approaching/separating device for approaching/separating the pair of probes;
  • the electrical characteristic acquisition device according to any one of items (1) to (3), wherein the approach/separation device includes a fluid pressure cylinder.
  • the fluid pressure cylinder can be an air cylinder or a liquid pressure cylinder. If the approaching/separating device includes a fluid pressure cylinder, the cost can be reduced more than if it includes a motor.
  • the electrical characteristic acquisition device is movable between a position between the pair of probes and a position removed from between the pair of probes, and a holding base capable of holding the component. including When the distance between the pair of probes is the set length, the measuring unit measures the electrical characteristics in a state in which the holding table is positioned away from between the pair of probes ( The electrical characteristic acquisition device according to any one of items 1) to (4).
  • the pair of probes are capable of gripping a component placed on the component placement portion of the holding table by moving closer together; at least a portion of the holding table exists between the pair of probes at a position between the pair of probes;
  • the electrical characteristic acquisition device according to item (5), wherein the distance between the holding base and at least one of the pair of probes is equal to or greater than a set distance at the deviated position.
  • the distance between the one of the pair of probes closer to the holding base (movable piece 36 in the above embodiment) and the holding base is equal to or greater than the set distance a. be.
  • each of the pair of probes and the measuring unit is connected by two coaxial cables;
  • the electrical characteristic acquisition device according to any one of items (1) to (6), wherein the two coaxial cables are connected to the measurement unit by a four-terminal pair measurement method.
  • the electrical characteristic acquisition device a pair of coaxial cable sections respectively connected to the pair of probes; Item (1) including a same potential section provided in the pair of coaxial cable sections, electrically connecting the outer conductors of the plurality of coaxial cables included in the pair of coaxial cable sections to each other and setting the same potential
  • the electrical characteristic acquisition device according to any one of items 1 through 7.
  • An electrical characteristic acquisition device for a measuring unit for measuring electrical characteristics of the component; a processing unit that corrects the measured impedance, which is the impedance as the electrical characteristic of the component measured by the measuring unit, with at least an open correction value to obtain the final impedance of the component, The processing unit measures the stray admittance as the electrical characteristic measured by the measuring unit when the distance between the pair of probes is a predetermined set length, the set length, and the electrode of the part.
  • an open correction value acquisition unit that acquires the floating admittance as the open correction value by calculation when the distance between the pair of probes is the length of the electrode side of the component based on the length of the side and the length of the electrode side. Acquisition device.
  • the electrical characteristic acquisition device described in this section can employ the technical feature described in any one of items (1) to (8). Moreover, the electrical characteristic acquisition device does not necessarily have to be provided in the mounting machine, and can be used alone.
  • a method for acquiring an open correction value used when acquiring electrical characteristics of a component comprising: a measuring step of measuring electrical characteristics with a measuring unit when the distance between the pair of probes is a predetermined set length; Based on the electrical characteristics measured in the measuring step, the set length, and the length of the component on the electrode side, the distance between the pair of probes is the length of the component on the electrode side. and an open correction value obtaining step of obtaining an electrical characteristic as the open correction value.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Resistance Or Impedance (AREA)
  • Testing Electric Properties And Detecting Electric Faults (AREA)
PCT/JP2021/047312 2021-12-21 2021-12-21 電気的特性取得装置 Ceased WO2023119417A1 (ja)

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JP2023568820A JPWO2023119417A1 (https=) 2021-12-21 2021-12-21
US18/718,257 US20250052794A1 (en) 2021-12-21 2021-12-21 Electrical characteristic acquiring device
PCT/JP2021/047312 WO2023119417A1 (ja) 2021-12-21 2021-12-21 電気的特性取得装置
DE112021008533.6T DE112021008533T5 (de) 2021-12-21 2021-12-21 Elektrische-Charakteristik-Erfassungsvorrichtung
CN202180105002.5A CN118339464A (zh) 2021-12-21 2021-12-21 电特性取得装置

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