WO2021166407A1 - Dispositif de traitement laser et procédé de commande de dispositif de traitement laser - Google Patents

Dispositif de traitement laser et procédé de commande de dispositif de traitement laser Download PDF

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Publication number
WO2021166407A1
WO2021166407A1 PCT/JP2020/047225 JP2020047225W WO2021166407A1 WO 2021166407 A1 WO2021166407 A1 WO 2021166407A1 JP 2020047225 W JP2020047225 W JP 2020047225W WO 2021166407 A1 WO2021166407 A1 WO 2021166407A1
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Prior art keywords
scanning
laser
control unit
laser beam
distance
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PCT/JP2020/047225
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English (en)
Japanese (ja)
Inventor
達典 阪本
克充 芦原
和美 土道
忠正 横井
直毅 吉武
Original Assignee
オムロン株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by オムロン株式会社 filed Critical オムロン株式会社
Priority to DE112020006766.1T priority Critical patent/DE112020006766T5/de
Priority to CN202080093494.6A priority patent/CN114981034A/zh
Publication of WO2021166407A1 publication Critical patent/WO2021166407A1/fr

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
    • B23K26/0622—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/352—Working by laser beam, e.g. welding, cutting or boring for surface treatment

Definitions

  • the present disclosure relates to a laser processing apparatus and a control method for the laser processing apparatus.
  • a laser processing device for processing an object (work) to be processed by using a laser beam.
  • a laser marker that uses laser light to mark the surface of a marking object (work) such as characters and figures (hereinafter, also referred to as "printing").
  • printing a marking object
  • Japanese Patent Application Laid-Open No. 2008-6467 discloses a laser processing apparatus that irradiates a processing object with a laser beam to perform processing such as printing.
  • the laser processing apparatus includes a scanning unit for scanning the laser output light on the work.
  • the scanning unit includes an XY-axis scanner that constitutes a pair of galvano mirrors, and a galvano motor for rotating each galvano mirror.
  • the X / Y axis scanner can scan by reflecting the laser beam in the X direction and the Y direction.
  • a method of processing an object to be processed along the scanning direction of the scanner is adopted, but when the scanning speed of the scanner is increased, the scanning start position in the same direction and the scanning in the same direction are performed. At the end position, there is a problem that the operation of the galvano mirror or the like is delayed, the printed line becomes shorter than the expected printed line, and the processed object cannot be processed according to the accepted processing pattern.
  • An object of the present disclosure is to provide a laser processing apparatus capable of processing an object to be processed according to a processing pattern accepted without being affected by the scanning speed of the scanner.
  • the laser processing apparatus includes an oscillator that oscillates laser light, a scanner that scans the laser light output from the oscillator, a control unit that controls the output of the laser light by the oscillator, and scanning of the laser light by the scanner. And a reception unit that accepts the input of the processing pattern of the processing object.
  • the control unit divides the processing pattern into a plurality of ranges in which the directions for scanning the laser beam are continuously the same, and scans the laser beam with the scanner.
  • the range includes at least one block that irradiates the laser beam.
  • the control unit sets the scanning start position to the front of the first block in the range by the first distance with respect to the position input in the machining pattern.
  • the first block within the range can be machined according to the machining pattern without being affected by the scanning speed of the scanner.
  • control unit sets the scanning end position to the second distance behind the position input in the machining pattern with respect to the last block in the range.
  • the last block within the range can be processed according to the processing pattern without being affected by the scanning speed of the scanner.
  • control unit sets the first distance and the second distance to the same distance.
  • control unit sets the respective distances for the first distance and the second distance.
  • the first distance and the second distance can be flexibly set according to the situation.
  • control unit keeps the scanning speed of the scanner within the range constant.
  • the scanning speed of the scanner within the range is constant, so that the processing can be stabilized.
  • control unit changes the first distance according to the scanning speed of the scanner within the range.
  • the scanning speed of the scanner is taken into consideration in determining the first distance, it is possible to process the object to be processed according to the accepted processing pattern without being affected by the scanning speed of the scanner.
  • control unit changes the second distance according to the scanning speed of the scanner within the range.
  • the scanning speed of the scanner is taken into consideration in determining the second distance, it is possible to process the object to be processed according to the accepted processing pattern without being affected by the scanning speed of the scanner.
  • control unit changes the first distance and the second distance in proportion to the scanning speed of the scanner within the range.
  • the machining object is machined according to the accepted machining pattern without being affected by the scanning speed of the scanner. be able to.
  • the proportional coefficient between the first and second distances and the scanning speed of the scanner within the range is determined according to the response characteristics of the scanner.
  • the object to be processed is processed according to the accepted processing pattern without being affected by the response characteristics of the scanner. be able to.
  • the oscillator shifts the timing of outputting the laser beam by the first predetermined time with respect to the output start instruction of the laser beam received from the control unit.
  • the oscillator shifts the timing of stopping the laser beam by a second predetermined time in response to the instruction to stop the output of the laser beam received from the control unit.
  • the timing for stopping the laser beam can be adjusted, it becomes easy to process the object to be processed according to the accepted processing pattern.
  • the control method of the laser processing apparatus is to control an oscillator that oscillates a laser beam, a scanner that scans the laser beam output from the oscillator, the output of the laser beam by the oscillator, and the scanning of the laser beam by the scanner.
  • This is a method of controlling a laser processing apparatus including a control unit for performing processing and a reception unit for receiving input of a processing pattern of a processing object.
  • the control unit has a step of dividing the processing pattern into a plurality of ranges in which the directions for scanning the laser beam are continuously the same and scanning the laser beam with the scanner.
  • the range includes at least one block that irradiates the laser beam.
  • the control unit has a step of setting the scanning start position to the front by the first distance with respect to the position input in the machining pattern for the first block in the range.
  • the first block within the range can be machined according to the machining pattern without being affected by the scanning speed of the scanner.
  • control unit further has a step of setting the scanning end position by a second distance and behind the position input in the machining pattern with respect to the last block in the range.
  • the last block within the range can be processed according to the processing pattern without being affected by the scanning speed of the scanner.
  • a laser processing apparatus capable of processing an object to be processed according to a processing pattern accepted without being affected by the scanning speed of the scanner.
  • the scene to which the present invention is applied is a scene in which processing is performed by a laser processing apparatus (for example, the laser marker 1 in FIG. 1).
  • the laser machining apparatus sets the scanning start position in front of the position accepted by the machining pattern (expected position) in consideration of the shrinkage of the printed line, and accepts the scanning end position by the machining pattern. Set after the position (expected position). Since the printed line generally shrinks due to the response characteristics of the galvano mirror unit 264 (scanner) shown in FIG. 2, when the laser processing apparatus performs processing under such a setting, as a result, the object to be processed 8 (see FIG. 1). ) Will be processed according to the processing pattern accepted. In this way, the laser machining apparatus can machine the machining object 8 into the expected pattern without being affected by the scanning speed of the galvanometer mirror portion 264.
  • the laser marker according to the present embodiment may have a function of performing processing other than marking such as drilling, peeling, and cutting, in addition to the function of marking characters and symbols.
  • FIG. 1 is a configuration diagram showing a schematic configuration of the laser marker 1.
  • the laser marker 1 has a controller 21 and a marker head 26.
  • the controller 21 controls the operation of the marker head 26. Although the details will be described later, the controller 21 has a laser oscillator that oscillates the laser beam W.
  • the marker head 26 refers to the laser beam W with respect to the machining object 8 (the machining object 8 on the left side of FIG. 1) placed on the member 9 on which the machining object 8 is placed. Irradiate. Specifically, the marker head 26 scans the laser beam W on the machined surface of the object 8 to be machined. In the example of FIG. 1, when the processing (a series of processing such as scanning) for the processing object 8 is completed, the member 9 moves in the left direction (direction of the arrow in FIG. 1), and the next processing object 8 is processed. The laser beam W is applied to (the object to be processed 8 on the right side of FIG. 1).
  • the marker head 26 is connected to the oscillator in the controller 21 by the optical fiber 28. Further, the marker head 26 is connected to the controller 21 by a control cable 29. Specifically, the marker head 26 is connected to the control board in the controller 21 by the control cable 29. Since the connection mode between the controller 21 and the marker head 26 is the same as the conventional configuration, it will not be described in detail here.
  • FIG. 2 is a configuration diagram showing the configuration of the laser marker 1 in more detail.
  • the laser marker 1 includes a controller 21 and a marker head 26 as described above.
  • the controller 21 includes a laser oscillator 240, a control board 210, a driver 220, and a driver power supply 230.
  • a display device 6 and an input device 7 can be connected to the controller 21. The display device 6 and the input device 7 are used in a situation where the user changes the setting contents in the controller 21.
  • the laser oscillator 240 includes an optical fiber 241, semiconductor lasers 242, 243, 249A to 249D, isolators 244 and 246, couplers 245 and 248, and a bandpass filter 247.
  • the semiconductor laser 242 is a seed light source that emits seed light.
  • the semiconductor laser 242 is driven by the driver 220 to emit a pulsed seed light.
  • the isolator 244 transmits light in only one direction and blocks light incident in the opposite direction to the light. Specifically, the isolator 244 passes the seed light emitted from the semiconductor laser 242 and blocks the return light from the optical fiber 241. As a result, damage to the semiconductor laser 242 can be prevented.
  • the semiconductor laser 243 is an excitation light source that emits excitation light for exciting rare earth elements added to the core of the optical fiber 241.
  • the coupler 245 combines the seed light from the semiconductor laser 242 and the excitation light from the semiconductor laser 243 and causes them to enter the optical fiber 241.
  • the excitation light incident on the optical fiber 241 from the semiconductor laser 243 via the coupler 245 is absorbed by the rare earth element contained in the core of the optical fiber 241.
  • rare earth elements are excited and a population inversion state is obtained.
  • seed light pulse light
  • seed light is amplified by this stimulated emission. That is, the seed light is amplified by injecting the seed light and the excitation light into the fiber amplifier configured by the optical fiber 241.
  • the isolator 246 passes the pulsed light output from the optical fiber 241 and blocks the light returning to the optical fiber 241.
  • the bandpass filter 247 is configured to pass light in a predetermined wavelength band.
  • the "predetermined wavelength band” is a wavelength band including the peak wavelength of the pulsed light output from the optical fiber 241.
  • the laser light that has passed through the bandpass filter 247 enters the optical fiber 28 provided for transmitting the laser light via the coupler 248.
  • the semiconductor lasers 249A to 249D emit excitation light in order to amplify the laser light that has passed through the bandpass filter 247 in the optical fiber 28. That is, the optical fiber 28 constitutes a fiber amplifier by combining the coupler 248 and the isolator 262 described later in the same manner as the fiber amplifier composed of the coupler 245, the optical fiber 241 and the isolator 246.
  • the coupler 248 combines the pulsed light that has passed through the bandpass filter 247 with the light from the semiconductor lasers 249A to 249D and causes them to enter the optical fiber 28.
  • the configuration of the laser oscillator 240 shown in FIG. 2 is an example, and is not limited to this.
  • the laser oscillator 240 may not include a bandpass filter 247 as long as it can obtain laser light in a predetermined wavelength band.
  • Control board 210 includes a control unit 211, a pulse generation unit 212, a storage unit 213, and a communication processing unit 214, 216, 217.
  • the control unit 211 controls the overall operation of the controller 21 by controlling the pulse generation unit 212 and the driver 220. Specifically, the control unit 211 controls the overall operation of the controller 21 by executing the operating system and the application program stored in the storage unit 213.
  • the pulse generation unit 212 generates an electric signal having a predetermined repetition frequency and a predetermined pulse width.
  • the pulse generation unit 212 outputs an electric signal or stops the output of the electric signal under the control of the control unit 211.
  • the electric signal from the pulse generating unit 212 is supplied to the semiconductor laser 242.
  • the storage unit 213 stores various data in addition to the operating system and the application program.
  • the communication processing unit 214 is an interface for communicating with the marker head 26.
  • the control unit 211 transmits a control signal to the marker head 26 via the communication processing unit 214 and the control cable 29.
  • the communication processing unit 216 receives the input from the input device 7.
  • the input device 7 is various pointing devices (for example, a mouse, a touch pad, etc.), a keyboard, and the like.
  • the communication processing unit 216 notifies the control unit 211 of the received input.
  • the communication processing unit 217 transmits the image data generated by the control unit 211 to the display device 6.
  • the display device 6 displays an image (user interface) based on the image data.
  • An example of the user interface displayed on the display device 6 will be described later with reference to FIG.
  • the driver power supply 230 supplies power to the driver 220.
  • the driver 220 supplies the drive current to the semiconductor lasers 242, 243, 249A to 249D.
  • Each of the semiconductor lasers 242, 243, 249A to 249D oscillates when a driving current is supplied.
  • the drive current supplied to the semiconductor laser 242 is modulated by an electric signal from the pulse generating unit 212.
  • the semiconductor laser 242 oscillates in pulses and outputs pulsed light having a predetermined repeating frequency and a predetermined pulse width as seed light.
  • a continuous drive current is supplied to each of the semiconductor lasers 243, 249A to 249D by the driver 220.
  • each of the semiconductor lasers 243, 249A to 249D oscillates continuously, and the continuous light is output as the excitation light.
  • the marker head 26 includes an isolator 262, a collimator lens 263, a galvano mirror unit 264 (galvano mirror 264a in the X direction, galvano mirror 264b in the Y direction), and a condenser lens 265.
  • the isolator 262 passes the pulsed light output from the optical fiber 28 and blocks the light returning to the optical fiber 28.
  • the pulsed light that has passed through the isolator 262 is output to the atmosphere from the collimator lens 263 attached to the isolator 262 and is incident on the galvanometer mirror unit 264.
  • the condenser lens 265 collects the laser beam W incident on the galvano mirror unit 264.
  • the galvanometer mirror unit 264 scans the laser beam W in at least one direction of the first axis (specifically, the axis parallel to the arrow in FIG. 1) and the second axial direction orthogonal to the first axis. ..
  • the scanning of the laser beam W may be one-way scanning or reciprocating scanning.
  • FIG. 3 is a configuration diagram showing the hardware included in the control board 210.
  • the control board 210 includes a processor 110, a memory 120, a communication interface 130, and a pulse generation circuit 140.
  • the memory 120 includes, for example, a ROM (Read Only Memory) 121, a RAM (Random Access Memory) 122, and a flash memory 123.
  • the flash memory 123 stores the above-mentioned operating system, application program, and various types of data.
  • the memory 120 corresponds to the storage unit 213 shown in FIG.
  • the processor 110 controls the overall operation of the controller 21.
  • the control unit 211 shown in FIG. 2 is realized by the processor 110 executing an operating system and an application program stored in the memory 120. When executing the application program, various data stored in the memory 120 are referred to.
  • the communication interface 130 is for communicating with an external device (for example, a marker head 26, a display device 6, and an input device 7).
  • the communication interface corresponds to the communication processing units 214, 216 and 217 of FIG.
  • the pulse generation circuit 140 corresponds to the pulse generation unit 212 in FIG. That is, the pulse generation circuit 140 generates an electric signal having a predetermined repetition frequency and a predetermined pulse width based on a command from the processor 110.
  • the hardware configuration shown in FIG. 3 is an example and is not limited to these.
  • FIG. 4 is a diagram showing a user interface 700 displayed on the display device 6 by the controller 21.
  • the user interface 700 is realized by the control unit 211 (see FIG. 2) executing the application program stored in the storage unit 213 (see FIG. 2).
  • the input operation by the user in the input device 7 performed on the user interface 700 is accepted by the communication processing unit 216, and the accepted input is notified to the control unit 211.
  • the control unit 211 can switch the screen mode according to the user's operation.
  • FIG. 4 shows a screen of an edit mode used for creating and editing marking data.
  • the control unit 211 receives the user operation of clicking the button 703
  • the control unit 211 switches the screen from the edit mode screen to the operation mode screen used when actually performing marking (processing).
  • the control unit 211 switches the operation mode screen to the edit mode screen by accepting the user operation of clicking the button displayed on the operation mode screen.
  • control unit 211 When the control unit 211 receives the user operation of clicking the button 702, the control unit 211 displays the test marking screen on the display device 6. As a result, the user can confirm the created and edited marking data on the display device 6.
  • the control unit 211 accepts the input of the reference position of the object to be machined.
  • the reference position is a position (ideal position) that the user assumes that the machining object 8 will be located.
  • the reference position is specified by a coordinate system consisting of an X-axis and a Y-axis.
  • the control unit 211 accepts input of marking patterns (hereinafter referred to as "machining patterns") such as characters, figures, and symbols to be marked.
  • the processing pattern is drawn by the user using the drawing area 701. Since the above coordinate system is set in the drawing area 701, the control unit 211 specifies the processing pattern input by the user in the coordinate system. That is, the control unit 211 receives the processing pattern drawn (input) on the drawing area 701 by the user as position information.
  • the control unit 211 accepts settings related to scanning.
  • the scanning settings include, for example, a scanning speed setting and a run-up / feed function setting. Details of the run-up / feed function will be described later with reference to FIGS. 5 to 10.
  • the user interface 700 includes a setting field 760 for setting the scanning speed and a setting field 762 for setting the run-up / feed function.
  • the setting field 760 includes an input field 761.
  • the scanning speed of the galvano mirror unit 264 (see FIG. 2) is input.
  • the control unit 211 sets the input numerical value as the scanning speed of the galvano mirror unit 264.
  • the control unit 211 maintains the scanning speed within each range A (see FIGS. 7 to 10) described later at the set scanning speed. As a result, the scanning speed of the galvanometer mirror portion 264 within the range A becomes constant, so that the machining can be stabilized.
  • the setting field 762 includes a check box 763,764,765 and an input field 766,767.
  • the control unit 211 receives the user operation of clicking the check box 763, the control unit 211 enables the run-up / feed function.
  • the control unit 211 receives the user operation of clicking the check box 764, the control unit 211 automatically sets the approach distance and the feed distance based on the set scanning speed of the galvano mirror unit 264.
  • the control unit 211 accepts the user operation of clicking the check box 765, the control unit 211 enables the input of the numerical value to the input fields 766 and 767.
  • the control unit 211 sets the numerical value input in the input field 766 as the approach distance, and sets the numerical value input in the input field 767 as the feed distance.
  • the user may input the same numerical value or different numerical values in the input field 766 and the input field 767.
  • the user interface 700 further includes a button 750 for saving the input content (setting content) as a default value, and a button 740 for returning the input content (setting content) to the default value.
  • the control unit 211 can also write the contents set by using the user interface 700 to an external memory or transmit it to an external device, for example, in a file format. According to this, these setting contents can be transferred to a laser marker (not shown) other than the laser marker 1.
  • FIG. 5 is a diagram showing a scanning locus of a laser beam with respect to a control signal.
  • FIG. 5 shows a scanning locus before and after the folding back of the scanning.
  • the galvanometer mirror unit 264 (see FIG. 2) scans the laser beam in response to the control signal sent from the control unit 211 (see FIG. 2).
  • the control signal is a signal instructing the scanning of the laser beam.
  • the control unit 211 generates a control signal for scanning at a set speed (the speed input in the above-mentioned input field 761), and transmits the generated control signal to the galvano mirror unit 264.
  • the control unit 211 When the scanning of the laser beam is turned back, the control unit 211 needs to decelerate the scanning speed from the set speed to the state of speed 0 (zero), change the scanning direction, and accelerate to the set scanning speed again. be. Even if the control unit 211 sends a control signal for decelerating to the galvano mirror unit 264, a delay occurs before the operation of the galvano mirrors 264a and 264b is decelerated. Due to this delay, the control of changing the scanning direction and accelerating to the set scanning speed is started before the scanning of the laser beam reaches the position D2 input in the processing pattern, so that the position D1 before the position D2 is started. The scanning of the laser beam is folded back at. As a result, the printed line becomes shorter than the expected printed line when the scan is folded back.
  • the response characteristic of the galvano mirror unit 264 is that the operation of the galvano mirrors 264a and 264b is started from the time when the control signal is input. It can be expressed by the delay time ⁇ t. Further, when the difference between the position D2 indicated by the control signal and the position D1 at which the scanning of the laser beam is folded back is defined as the shrinkage distance ⁇ d of the printed line, the shrinkage distance ⁇ d of the printed line is the response characteristic of the galvano mirror unit 264. , Can be calculated based on the set scanning speed of the galvanometer mirror unit 264. Specifically, the shrinkage distance of the printed line can be obtained by Equation 1 shown below.
  • T0 in Equation 1 is a margin for allowing an error, and is set to, for example, 5 to 20 ⁇ sec. Further, in the case of a minute step, the delay time ⁇ t is generally set to 100 to 300 ⁇ sec.
  • the shrinkage distance ⁇ d of the printed line changes according to the scanning speed of the galvano mirror unit 264. More specifically, the shrinkage distance ⁇ d of the printed line is proportional to the scanning speed of the galvano mirror unit 264.
  • the proportional coefficient between the shrinkage distance ⁇ d of the printed line and the scanning speed of the galvano mirror unit 264 changes according to the response characteristics of the galvano mirror unit 264, which is a delay in the operation of the galvano mirrors 264a and 264b with respect to the control signal.
  • FIG. 6 is a diagram showing shrinkage of printed lines at the start of scanning in the same direction and at the end of scanning in the same direction.
  • it is necessary to accelerate the scanning speed from the state of speed 0 (zero) to the set speed.
  • the scanning speed of the galvano mirror unit 264 is accelerated, the operations of the galvano mirrors 264a, 264b and the like are delayed, so that the start of scanning of the laser beam is delayed from the timing indicated by the control signal.
  • the delay in the start of this scan increases as the set scanning speed increases.
  • the start of scanning is delayed, so that the printed line becomes shorter than the expected printed line.
  • the shrinkage of the printed line at the start of scanning in the same direction is calculated by the above equation 1.
  • the scanning of the laser beam is not performed up to the position indicated by the control signal, and the scanning ends at the position in front of the position.
  • the printed line becomes shorter than the expected printed line even at the end of scanning in the same direction.
  • the scanning speed is maintained at the set speed. Therefore, the operation of the galvanometer mirrors 264a, 264b and the like is not delayed with respect to the control signal, so that the scanning of the laser beam is performed at the position indicated by the control signal. As a result, when neither the start of scanning in the same direction nor the end of scanning in the same direction is applicable, the printed line becomes the expected printed line.
  • shrinkage of the printed line occurs at the start of scanning in the same direction and at the end of scanning in the same direction.
  • the scanning speed of the galvano mirror unit 264 is not stable at the start of scanning in the same direction and the end of scanning in the same direction, so that the operations of the galvano mirrors 264a and 264b are delayed and the galvano mirror unit 264 controls. This is because it cannot operate at the timing indicated by the signal.
  • the delay in the operation of the galvano mirrors 264a, 264b and the like with respect to the control signal at the start of scanning in the same direction and the end of scanning in the same direction will be referred to as "response characteristics of the galvano mirror unit 264".
  • the shrinkage distance of the printed line is proportional to the scanning speed of the galvano mirror unit 264. Therefore, in the laser marker 1 of the present embodiment, the scanning start position in the same direction is set in front of the position (expected position) received by the machining pattern in consideration of the shrinkage of the printed line, and the scanning in the same direction ends. Set the position after the position accepted by the machining pattern (expected position). Due to the response characteristics of the galvanometer mirror unit 264, the printed line shrinks at the scanning start position in the same direction and the scanning end position in the same direction. The object 8 (see FIG. 1) is processed according to the accepted processing pattern.
  • the laser marker 1 in the present embodiment can process the object to be processed 8 into an expected pattern without being affected by the scanning speed of the galvanometer mirror portion 264.
  • setting the scanning start position in the same direction before the position accepted by the machining pattern is referred to as "giving a run-up”, and the function of giving a run-up is referred to as a "run-up function”.
  • setting the scanning end position in the same direction after the position accepted by the machining pattern is referred to as "feeding”, and the function of giving the feed is referred to as "feed function”.
  • the run-up function and the feed function are collectively referred to as the "run-up / feed function”.
  • FIG. 7 is a diagram showing scanning in the Y-axis direction.
  • FIG. 8 is an enlarged view of a part of the processing pattern N1.
  • the approach / feed function will be described with reference to FIGS. 7 and 8 by taking one-way scanning in the Y-axis direction as an example.
  • the control unit 211 When the control unit 211 (see FIG. 2) receives the input of the machining pattern N1, the received machining pattern N1 is set to a plurality of ranges A (A1, A2, A3, A4 ... An (n is an integer of 1 or more)). Divide into. Specifically, the control unit 211 includes at least one processing pattern N1 including at least one block B (B1, B2, B3 ... Bm (m is an integer of 1 or more)) to which the laser beam is irradiated, and It is divided into ranges A (A1, A2, A3, A4 ... An) in which the scanning directions of the laser light by the galvanometer mirror unit 264 (see FIG. 2) are continuously the same. In FIGS. 7 and 8, since the scanning direction is the Y-axis direction, the range A is composed of blocks B having the same X coordinates.
  • control unit 211 confirms whether or not the run-up / feed function is enabled.
  • control unit 211 grants run-up and feed for each range A.
  • the provision of the run-up by the control unit 211 means that the scanning start position of each range A is set before the position received by the machining pattern N1 in consideration of the shrinkage of the printed line. Specifically, the control unit 211 sets the scanning start position in front of the position received by the machining pattern N1 by the first distance L1 with respect to the block B in which the scanning is first performed in each range A. It is desirable that the first distance L1 (running distance) is a distance that can compensate for the shrinkage of the printed line without excess or deficiency.
  • the control unit 211 uses the above equation 1 based on the set scanning speed of the galvano mirror unit 264 to shrink the printed line ⁇ d (see FIG. 5).
  • Equation 1 is stored in the storage unit 213 (see FIG. 2).
  • the control unit 211 sets the run-up distance input by the user to the first distance L1.
  • the control unit 211 processes the scanning start position with respect to the block B11 in the range A11, the block B14 in the range A12, the block B17 in the range A13, and the block B18 in the range A14.
  • the first distance L1 is set before the position received in the pattern N1.
  • the scanning start position of the range A11 is the position R11
  • the scanning start position of the range A12 is the position R12
  • the scanning start position of the range A13 is the position R13
  • the scanning of the range A14 is position R14.
  • the control unit 211 sets the scanning start position of the range A11 to the position P11, the scanning start position of the range A12 to the position P12, and the scanning start position of the range A13 to the position P13.
  • the scanning start position of the range A14 is set to the position P14.
  • the scanning start position is before the position received by the machining pattern N1 by the first distance L1 with respect to the block B in which the scanning is first performed. Is set to.
  • the feeding given by the control unit 211 means that the scanning end position of each range A is set after the position received by the processing pattern N1 in consideration of the shrinkage of the printed line. Specifically, the control unit 211 sets the scanning end position to be behind the position received by the machining pattern N1 by the second distance L2 with respect to the block B in which the last scanning is performed in each range A. It is desirable that the second distance L2 (feed distance) is a distance that can compensate for the shrinkage of the printed line without excess or deficiency.
  • the control unit 211 calculates the shrinkage distance ⁇ d of the printed line using the above equation 1 based on the scanning speed of the set galvano mirror unit 264, and calculates it. The value is set to the second distance L2. Equation 1 is stored in the storage unit 213.
  • the control unit 211 sets the feed distance input by the user to the second distance L2.
  • the control unit 211 processes the scanning end position with respect to the block B13 in the range A11, the block B16 in the range A12, the block B17 in the range A13, and the block B19 in the range A14.
  • the second distance L2 is set behind the position received in the pattern N1.
  • the scanning end position of the range A11 is the position S11
  • the scanning end position of the range A12 is the position S12
  • the scanning end position of the range A13 is the position S13
  • the scanning of the range A14 is position S14.
  • the control unit 211 sets the scanning end position of the range A11 to the position Q11, the scanning end position of the range A12 to the position Q12, and the scanning end position of the range A13 to the position Q13.
  • the scanning end position of the range A14 is set to the position Q14.
  • the scanning end position is behind the position received by the machining pattern N1 by the second distance L2 with respect to the block B to be scanned last. Is set to.
  • control unit 211 generates an instruction (control signal) for scanning the laser beam from the range A1 to the range An based on the set scanning start position and scanning end position, and transmits the generated control signal to the galvanometer mirror unit 264. do.
  • the galvanometer mirror unit 264 scans the laser beam according to the control signal sent from the control unit 211.
  • the scanning start position in the same direction indicated by the control signal is in front of the position received by the machining pattern N1, and the scanning end position in the same direction indicated by the control signal is behind the position received by the machining pattern N1.
  • the machined object 8 (see FIG. 1) is machined according to the machining pattern N1, that is, the expected printed line appears on the machined object 8.
  • control unit 211 does not correspond to the block B in which the scan is first performed in each range A (for example, block B12, block B13, block B15, block). No run-up is given to B16 and block B19). Further, even when the feed function is enabled, the control unit 211 does not correspond to the block B in which the last scan is performed in each range A (for example, block B11, block B12, block B14). , Block B15, block B18), no feed is given. As a result, it is possible to prevent the processing pattern N1 from being extended.
  • control unit 211 when the control unit 211 includes only one block B as in the range A13, the control unit 211 gives a run-up and a feed to the block B (block B17).
  • the control unit 211 calculated the first distance L1 and the second distance L2 using Equation 1 when the automatic setting of the run-up / feed function was enabled. That is, the control unit 211 changes the first distance L1 and the second distance L2 according to the scanning speed of the galvano mirror unit 264. Specifically, the control unit 211 changes the first distance L1 and the second distance L2 in proportion to the scanning speed of the galvano mirror unit 264. Further, the control unit 211 sets the proportional coefficient between the first distance L1 and the second distance L2 and the scanning speed of the galvano mirror unit 264 to the delay time ⁇ t (see FIG. 5), that is, the response characteristic of the galvano mirror unit 264. Change accordingly. Equation 1 is only an example.
  • the control unit 211 may calculate the first distance L1 and the second distance L2 by using another formula for calculating the first distance L1 and the second distance L2 according to the scanning speed of the galvano mirror unit 264. Further, the formula for calculating the first distance L1 and the formula for calculating the second distance L2 are stored in the storage unit 213, and the control unit 211 uses each formula to store the first distance L1. And the second distance L2 may be calculated. That is, the control unit 211 may set the same distance or different distances for the first distance L1 and the second distance L2.
  • the control unit 211 gives an instruction to scan the laser beam from the range A1 to the range An based on the scanning start position and the scanning end position according to the positions received in the machining pattern N1.
  • (Control signal) is generated, and the generated control signal is transmitted to the galvanometer mirror unit 264.
  • the galvanometer mirror unit 264 scans the laser beam according to the control signal sent from the control unit 211. Since the scanning start position and scanning end position indicated by the control signal are the same as the positions received in the machining pattern N1, printing is performed at the scanning start position in the same direction and the scanning end position in the same direction due to the response characteristics of the galvanometer mirror unit 264. As a result of the line shrinking, the machining object 8 is not machined according to the machining pattern N1.
  • FIG. 9 is a diagram showing scanning in the X-axis direction.
  • FIG. 10 is a diagram showing scanning in a direction intersecting the X-axis and the Y-axis. Since the processing performed by the control unit 211 (see FIG. 2) in the scanning in the X-axis direction and the scanning in the direction intersecting the X-axis and the Y-axis is the same as the processing performed by the control unit 211 in the scanning in the Y-axis direction. , The following will briefly explain only when the run-up / feed function is enabled.
  • the control unit 211 When the control unit 211 receives the input of the machining pattern N, the control unit 211 divides the received machining pattern N into a plurality of ranges A (A1, A2, A3, A4 ... An (n is an integer of 1 or more)). Specifically, the control unit 211 includes at least one processing pattern N including at least one block B (B1, B2, B3 ... Bm (m is an integer of 1 or more)) to which the laser beam is irradiated, and It is divided into ranges A (A1, A2, A3, A4 ... An) in which the scanning directions of the laser light by the galvanometer mirror unit 264 (see FIG. 2) are continuously the same.
  • control unit 211 confirms whether or not the run-up / feed function is enabled, and if the run-up / feed function is enabled, grants the run-up and feed for each range A. conduct.
  • the control unit 211 sets the scanning start position in front of the position received by the machining pattern N by the first distance L1 with respect to the block B1 in which the scanning is first performed in the range A1. ..
  • the calculation method of the first distance L1 is as described above.
  • the scanning start position in the range A1 is the position R1.
  • the control unit 211 sets the scanning start position of the range A1 to the position P1.
  • the scanning start position is set before the position received by the machining pattern N by the first distance L1 with respect to the block B where the scanning is first performed.
  • the control unit 211 sets the scanning end position to be behind the position received by the machining pattern N by the second distance L2 with respect to the block B3 in which the last scanning is performed in the range A1.
  • the calculation method of the second distance L2 is as described above.
  • the scanning end position in the range A1 is the position S1.
  • the control unit 211 sets the scanning end position of the range A1 to the position Q1.
  • the scanning end position is set after the position received by the machining pattern N by the second distance L2 with respect to the block B to which the last scanning is performed.
  • control unit 211 generates an instruction (control signal) for scanning the laser beam from the range A1 to the range An based on the set scanning start position and scanning end position, and transmits the generated control signal to the galvanometer mirror unit 264. do.
  • the galvanometer mirror unit 264 scans the laser beam according to the control signal sent from the control unit 211.
  • the scanning start position in the same direction indicated by the control signal is before the position received by the machining pattern N
  • the scanning end position in the same direction indicated by the control signal is behind the position received by the machining pattern N.
  • the machined object 8 (see FIG. 1) is machined according to the machining pattern N, that is, the expected printed line appears on the machined object 8.
  • the scanning start position in the same direction is set before the position received by the processing pattern N in consideration of the shrinkage of the printed line, and the scanning end position in the same direction is set. It is set after the position accepted by the processing pattern N. Due to the response characteristics of the galvano mirror unit 264, the printed line shrinks at the scanning start position in the same direction and the scanning end position in the same direction. The printed line appears in, that is, the machining object 8 is machined according to the machining pattern N input to the laser marker 1. Therefore, the laser marker 1 in the present embodiment can process the object 8 according to the processing pattern N that accepts the processing object 8 without being affected by the scanning speed of the galvano mirror unit 264.
  • the above-mentioned approach / feed function can be applied not only to one-way scanning but also to reciprocating scanning.
  • the above-mentioned laser marker 1 has both a run-up function and a feed function, it may have only one of them.
  • the above-mentioned laser marker 1 when the run-up / feed function setting is enabled, both the run-up function and the feed function are enabled, but only the run-up function is enabled and only the feed function is enabled.
  • the laser marker 1 may be configured so that it can be set.
  • the on-delay / off-delay function is a general term for the on-delay function and the off-delay function, and is an example of a function for adjusting the output timing of the laser beam.
  • the on-delay function delays the output start timing of the laser beam, and the off-delay function delays the output stop timing of the laser beam.
  • the on-delay / off-delay function is set by the user via the user interface 700.
  • FIG. 11 is a diagram showing the output timing of the laser beam.
  • FIG. 11 shows the output timing of the laser beam in the range A1 (see FIGS. 7, 9, and 10).
  • the output signal SG is a signal sent from the control unit 211 to the laser oscillator 240, and is a signal instructing the output of the laser beam.
  • the output signal SG is output for each block B (see FIGS. 7, 9, and 10).
  • the laser oscillator 240 outputs a laser beam when the output signal SG is turned on. Specifically, the laser oscillator 240 outputs laser light to the block B1 (see FIGS.
  • the laser oscillator 240 when the output signal SG1 is turned on, and when the output signal SG2 is turned on, the laser oscillator 240 outputs the laser beam to the block B2 (see FIGS. 7, 9, and 10).
  • the laser light is output to the block B3 (see FIGS. 7, 9, and 10) when the output signal SG3 is turned on.
  • “Normal” shown in FIG. 11 indicates the output timing of the laser beam when the on-delay / off-delay function is not enabled.
  • the laser oscillator 240 starts the output of the laser beam at the timing t1 and stops the output of the laser beam at the timing t3.
  • the laser oscillator 240 starts the output of the laser beam at the timing t4 and stops the output of the laser beam at the timing t5.
  • the output signal SG3 is turned on, the laser oscillator 240 starts the output of the laser beam at the timing t6 and stops the output of the laser beam at the timing t7.
  • on-delay indicates the output timing of the laser beam when the on-delay function is enabled.
  • the laser oscillator 240 outputs the laser beam to the block B in which scanning is first performed in each range A (see FIGS. 7, 9, and 10). Delay. Specifically, when the output signal SG1 is turned on, the laser oscillator 240 starts outputting the laser beam at the timing t2 after the lapse of the first predetermined time ⁇ from the normal output start timing (timing t1), and the normal output. The output of the laser beam is stopped at the stop timing (timing t3).
  • the laser oscillator 240 starts the output of the laser beam at the same timing as the "normal", and is referred to as "normal". The output of the laser beam is stopped at the same timing.
  • “Off delay” shown in FIG. 11 indicates the output timing of the laser beam when the off delay function is enabled.
  • the laser oscillator 240 delays the stop timing of the laser beam with respect to the block B in which the last scan is performed in each range A. Specifically, when the output signal SG3 is turned on, the laser oscillator 240 starts the output of the laser beam at the normal output start timing (timing t6), and the second predetermined time from the normal output stop timing (timing t7). The output of the laser beam is stopped at the timing t8 after the elapse of ⁇ .
  • the laser oscillator 240 starts the output of the laser beam at the same timing as the "normal", and is referred to as "normal". The output of the laser beam is stopped at the same timing.
  • the "on-delay / off-delay" shown in FIG. 11 indicates the output timing of the laser beam when the on-delay function and the off-delay function are enabled.
  • the laser oscillator 240 delays the output timing of the laser beam with respect to the block B in which the scanning is first performed in each range A, and in each range A, the laser oscillator 240 delays the output timing of the laser light.
  • the stop timing of the laser beam is delayed with respect to the block B in which the scanning is finally performed.
  • the laser oscillator 240 starts outputting the laser beam at the timing t2 after the lapse of the first predetermined time ⁇ from the normal output start timing (timing t1), and the normal output. The output of the laser beam is stopped at the stop timing (timing t3). Further, when the output signal SG3 is turned on, the laser oscillator 240 starts the output of the laser beam at the normal output start timing (timing t6), and after the second predetermined time ⁇ elapses from the normal output stop timing (timing t7). The output of the laser beam is stopped at the timing t8 of. When the output signal SG2 is turned on, the laser oscillator 240 starts the output of the laser beam at the same timing as the "normal” and stops the output of the laser beam at the same timing as the "normal". ..
  • the first predetermined time ⁇ and the second predetermined time ⁇ are set by the laser oscillator 240 based on the response characteristics of the galvanometer mirror unit 264. Specifically, the first predetermined time ⁇ and the second predetermined time ⁇ are set based on the set scanning speed of the galvano mirror unit 264 and the response characteristics of the galvano mirror unit 264.
  • the response characteristics of the galvano mirror unit 264 are intended because the scanning of the galvano mirror unit 264 cannot catch up at the scanning start position and the scanning end position in the same direction. There is a risk that the laser beam will be applied to a position that is not. However, such a possibility can be eliminated by the on-delay / off-delay function.
  • the laser oscillator 240 may set the same time or different times for the first predetermined time ⁇ and the second predetermined time ⁇ .
  • the laser marker 1 in the present embodiment has, as a function of adjusting the output timing of the laser light, a function of delaying the output start timing of the laser light and / or the output stop timing of the laser light, as well as the output start timing of the laser light and the function of delaying the output stop timing of the laser light. / Or may have a function of accelerating the output stop timing of the laser beam.
  • the laser marker 1 advances the laser light output start timing with respect to the block B in which scanning is first performed in each range A.
  • the laser marker 1 advances the laser light output stop timing with respect to the block B in which the last scanning is performed in each range A.
  • the laser marker 1 in the present embodiment has a function of delaying the output start timing of the laser beam (on-delay function), a function of delaying the output stop timing of the laser beam (off-delay function), and a function of advancing the output start timing of the laser beam.
  • at least one of the functions for accelerating the output stop timing of the laser beam may be provided.
  • the laser marker 1 in the present embodiment has a function of delaying the output start timing of the laser beam (on-delay function), a function of delaying the output stop timing of the laser beam (off-delay function), and a function of advancing the output start timing of the laser beam.
  • the function of accelerating the output stop timing of the laser beam which may be configured by the user in any combination.
  • the laser marker 1 in the present embodiment may allow the user to arbitrarily set the first predetermined time ⁇ and the second predetermined time ⁇ .
  • the laser marker 1 in the present embodiment has been described above.
  • the laser marker 1 in the present embodiment can process the object 8 according to the accepted processing pattern without being affected by the scanning speed of the galvano mirror unit 264 by the approach / feed function. Further, the laser marker 1 in the present embodiment can easily process the object to be processed in the expected pattern by combining the approach / feed function with the function of adjusting the output timing of the laser beam.
  • the laser marker 1 in the present embodiment may have at least one of a run-up function and a feed function, and may not have a function of adjusting the output timing of the laser beam. Further, the laser marker 1 in the present embodiment may have at least one of a run-up function and a feed function, and may have at least one of a function of adjusting the output timing of the laser beam. Further, the laser marker 1 in the present embodiment may have a run-up function and a feed function, and may be configured so that at least one of the run-up function and the feed function can be arbitrarily set by the user.
  • the laser marker 1 in the present embodiment has a run-up function and a feed function, and at least one of the run-up function and the feed function can be arbitrarily set by the user, and the laser beam output timing provided is provided. It may be configured so that the user can arbitrarily set at least one of the functions for adjusting.
  • the processing pattern (N) is divided into a plurality of ranges (A) in which the directions for scanning the laser beam (W) are continuously the same, and the scanner (264) scans the laser beam (W).
  • the range (A) includes at least one block (B) that irradiates the laser beam (W), and the processing pattern (N) is relative to the first block (B) in the range (A).
  • a laser processing device that sets the scanning start position to the front by the first distance (L1) with respect to the position input in).
  • the control unit (211) sets the scanning end position at the second distance (L2) with respect to the position input in the machining pattern (N) with respect to the last block (B) in the range (A).
  • the laser processing apparatus according to configuration 1, which is set behind.
  • the control unit (211) changes the first distance (L1) and the second distance (L2) in proportion to the scanning speed of the scanner (264) within the range (A).
  • the laser processing apparatus according to.
  • the oscillator (240) shifts the timing of outputting the laser beam (W) by a first predetermined time with respect to the output start instruction of the laser beam (W) received from the control unit (211).
  • the laser processing apparatus according to any one of 9.
  • the oscillator (240) has configurations 1 to 2 in which the timing of stopping the laser beam (W) is shifted by a second predetermined time in response to the output stop instruction of the laser beam (W) received from the control unit (211).
  • the laser processing apparatus according to any one of 10.
  • FIG. 12 An oscillator (240) that oscillates a laser beam (W), a scanner (264) that scans the laser beam (W) output from the oscillator (240), and the laser beam (W) generated by the oscillator (240).
  • the control unit (211) that controls the output of the laser beam (W) and the scanning of the laser beam (W) by the scanner (264), and the reception unit (216) that receives the input of the processing pattern (N) of the processing object (8). It is a method of controlling a laser processing apparatus (1) including the above.
  • the control unit (211) A step of dividing the processing pattern (N) into a plurality of ranges (A) in which the directions for scanning the laser beam (W) are continuously the same, and scanning the laser beam (W) with the scanner (264).
  • the range (A) includes at least one block (B) that irradiates the laser beam (W), and the processing pattern (N) is relative to the first block (B) in the range (A).
  • a method for controlling a laser processing apparatus which comprises a step of setting a scanning start position to a first distance (L1) and a front position with respect to the position input in).
  • the control unit (211) sets the scanning end position at the second distance (L2) with respect to the position input in the machining pattern (N) with respect to the last block (B) in the range (A). 12.

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)
  • Numerical Control (AREA)

Abstract

La présente invention concerne un marqueur laser (1) qui comprend : un oscillateur laser (240) ; une unité miroir galvanométrique (264) ; une unité de commande (211) ; et une unité de traitement de communication (216) pour recevoir une entrée d'un motif de traitement (N). L'unité de commande (211) divise le motif de traitement (N) en une pluralité de plages (A) de telle sorte que les directions de balayage d'une lumière laser (W) soient les mêmes en série. La plage (A) comprend au moins un bloc (B) qui est exposé à la lumière laser (W). L'unité de commande (211) règle, par rapport à un premier bloc (B) dans la plage (A), une position de début de balayage vers l'avant par rapport à une position entrée dans le motif de traitement (N) à une première distance (L1).
PCT/JP2020/047225 2020-02-20 2020-12-17 Dispositif de traitement laser et procédé de commande de dispositif de traitement laser WO2021166407A1 (fr)

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CN202080093494.6A CN114981034A (zh) 2020-02-20 2020-12-17 激光加工装置以及激光加工装置的控制方法

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JP4943070B2 (ja) 2006-06-29 2012-05-30 株式会社キーエンス レーザ加工装置、レーザ加工条件設定装置、レーザ加工条件設定方法、レーザ加工条件設定プログラム
JP2009142865A (ja) * 2007-12-14 2009-07-02 Keyence Corp レーザ加工装置、レーザ加工方法及びレーザ加工装置の設定方法
CN104220919B (zh) * 2012-02-15 2016-10-05 奥林巴斯株式会社 激光扫描型观察装置
KR101425337B1 (ko) * 2013-02-14 2014-08-04 미쓰비시덴키 가부시키가이샤 레이저 가공 장치, 가공 제어 장치 및 펄스 주파수 제어 방법
CN105195904B (zh) * 2014-06-23 2020-03-10 三菱电机株式会社 激光加工装置
KR101989410B1 (ko) * 2014-06-27 2019-06-14 가부시키가이샤 무라타 세이사쿠쇼 레이저 가공 방법 및 레이저 가공 장치
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JP2011056523A (ja) * 2009-09-07 2011-03-24 Keyence Corp レーザ加工装置

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