WO2021117817A1 - ペリクルのデマウント方法、及び、ペリクルのデマウント装置 - Google Patents

ペリクルのデマウント方法、及び、ペリクルのデマウント装置 Download PDF

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Publication number
WO2021117817A1
WO2021117817A1 PCT/JP2020/046072 JP2020046072W WO2021117817A1 WO 2021117817 A1 WO2021117817 A1 WO 2021117817A1 JP 2020046072 W JP2020046072 W JP 2020046072W WO 2021117817 A1 WO2021117817 A1 WO 2021117817A1
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WIPO (PCT)
Prior art keywords
pellicle
film
demounting
electrode
photomask
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PCT/JP2020/046072
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English (en)
French (fr)
Japanese (ja)
Inventor
彰 石川
高村　一夫
Original Assignee
三井化学株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 三井化学株式会社 filed Critical 三井化学株式会社
Priority to EP20900204.7A priority Critical patent/EP4033302A4/en
Priority to CN202080076341.0A priority patent/CN114641724A/zh
Priority to KR1020227015795A priority patent/KR20220079655A/ko
Priority to US17/770,163 priority patent/US20220390829A1/en
Priority to JP2021564032A priority patent/JP7204009B2/ja
Publication of WO2021117817A1 publication Critical patent/WO2021117817A1/ja

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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/62—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/62—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof
    • G03F1/64—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof characterised by the frames, e.g. structure or material, including bonding means therefor
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/22—Masks or mask blanks for imaging by radiation of 100nm or shorter wavelength, e.g. X-ray masks, extreme ultraviolet [EUV] masks; Preparation thereof
    • G03F1/24—Reflection masks; Preparation thereof
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
    • G03F1/82—Auxiliary processes, e.g. cleaning or inspecting

Definitions

  • the present invention relates to a pellicle demounting method and a pellicle demounting device.
  • EUV light has the property of being easily absorbed by any substance.
  • EUV lithography photolithography using EUV light as the exposure light
  • exposure is performed using a reflective optical system. Specifically, the exposure pattern is reflected, EUV light is reflected by a photomask (for example, a reticle), and the resist is exposed by EUV light as reflected light.
  • the photolithography step if foreign matter adheres to the photomask, the EUV light is absorbed by the foreign matter and the EUV light is scattered, so that the desired pattern may not be exposed. Therefore, the pellicle is mounted (that is, mounted) on the EUV light irradiation surface side of the photomask to protect the photomask.
  • the structure of the pellicle includes a pellicle film for protecting the EUV light irradiation surface of the photomask and a pellicle frame for supporting the pellicle film.
  • the pellicle mounted on the photomask may be contaminated by dust or the like, deteriorated by light, or the like. In this case, it may be necessary to replace the pellicle, and therefore it may be necessary to demount (that is, attach / detach) the pellicle mounted on the photomask.
  • a method for demounting a pellicle from a photomask for example, a method for demounting a pellicle described in Patent Document 1 is known.
  • Patent Document 1 discloses a method for demounting a pellicle in which at least the pellicle film of the pellicle arranged on the photomask is brought into close contact with the sheet and the pellicle is demounted from the photomask.
  • Patent Document 1 Japanese Unexamined Patent Publication No. 2016-206527
  • the problem to be solved by the embodiment of the present disclosure is to provide a method for demounting a pellicle that is excellent in suppressing contamination of a photomask.
  • Means for solving the above problems include the following aspects. ⁇ 1> A step of preparing a laminate having a photomask, a pellicle frame, and a pellicle film arranged in this order, and The process of preparing the electrodes and The laminate and the electrode are arranged so that the pellicle film and the electrode in the laminate face each other, and a voltage is applied to the electrode to generate an electrostatic attraction, and the generated electrostatic force is generated. A demounting step of demounting the pellicle film from the photomask in the laminate by attracting the pellicle film toward the electrode by an attractive force. How to demount a pellicle, including.
  • a film is placed between the pellicle film and the electrode in the laminate, and the pellicle film is demounted by attracting the pellicle film to the surface of the film by the electrostatic attraction.
  • ⁇ 3> The method for demounting a pellicle according to ⁇ 1> or ⁇ 2>, wherein the laminated body further includes a mask adhesive layer between the photomask and the pellicle frame.
  • ⁇ 4> When the laminated body is used as the first laminated body, The demounting process A second including the photomask, the mask adhesive layer, and the pellicle frame by demounting the pellicle film by the electrostatic attraction while leaving the pellicle frame on the photomask side in the first laminated body. Obtaining a laminate and By heat-treating the second laminate, Demounting the pellicle frame from the photomask in the second laminated body and The method for demounting a pellicle according to ⁇ 3>, which comprises. ⁇ 5> The method for demounting a pellicle according to any one of ⁇ 1> to ⁇ 4>, further comprising a step of heat-treating the laminate before the demounting step.
  • ⁇ 6> The method for demounting a pellicle according to any one of ⁇ 1> to ⁇ 5>, wherein at least one of a recess and a notch is provided on the outer peripheral surface of the pellicle frame.
  • a holding member that holds the laminated body and With the electrode A pellicle demounting device.
  • the holding member has an opening that holds the laminated body in a direction in which the photomask is on the upper side and the pellicle film is on the lower side, and exposes a self-supporting portion of the pellicle film.
  • the pellicle demounting device described in. ⁇ 9> The holding member and the electrode are arranged so that the opening and the electrode face each other, or. At least one of the holding member and the electrode can be moved so that the opening and the electrode face each other.
  • ⁇ 10> The pellicle demounting device according to ⁇ 9>, wherein the area of the electrode is larger than the area of the opening.
  • ⁇ 11> The pellicle demounting device according to ⁇ 9> or ⁇ 10>, further comprising a film transporting means for running a resin film between the openings facing each other and the electrodes.
  • ⁇ 12> The pellicle demounting device according to any one of ⁇ 7> to ⁇ 11>, wherein the holding member includes a pellicle frame fixing member for fixing the pellicle frame.
  • a method for demounting a pellicle that is excellent in suppressing contamination of a photomask.
  • FIG. 5 is a schematic cross-sectional view schematically showing an example of a laminated body prepared in a step of preparing a laminated body in the pellicle demounting method of the present disclosure. It is the schematic sectional drawing which shows an example of the demounting of a pellicle in this disclosure schematically.
  • FIG. 5 is a schematic cross-sectional view schematically showing another example of demounting a pellicle in the present disclosure. It is schematic cross-sectional view which shows an example of the laminated body of the aspect which the pellicle film and the pellicle frame are provided with the hole which makes the thickness direction of the pellicle film and the pellicle frame the depth direction.
  • FIG. 5 is a schematic cross-sectional view schematically showing another example of the laminated body prepared in the step of preparing the laminated body in the pellicle demounting method of the present disclosure.
  • FIG. 5 is a schematic cross-sectional view schematically showing still another example of the laminated body prepared in the step of preparing the laminated body in the pellicle demounting method of the present disclosure.
  • FIG. 5 is a schematic cross-sectional view schematically showing still another example of the laminated body prepared in the step of preparing the laminated body in the pellicle demounting method of the present disclosure. It is schematic cross-sectional view which conceptually shows an example of the demounting apparatus of the pellicle which concerns on embodiment of this disclosure. It is schematic cross-sectional view which conceptually shows another example of the pellicle demounting apparatus which concerns on embodiment of this disclosure. It is schematic cross-sectional view which conceptually shows still another example of the pellicle demounting apparatus which concerns on embodiment of this disclosure.
  • the numerical range represented by using “-” means a range including the numerical values before and after "-" as the minimum value, the maximum value lower limit value, and the upper limit value, respectively.
  • the upper limit value or the lower limit value described in a certain numerical range may be replaced with the upper limit value or the lower limit value of another numerical range described stepwise.
  • the upper limit value or the lower limit value described in a certain numerical range may be replaced with the value shown in the examples.
  • the combination of preferred embodiments is a more preferred embodiment.
  • the term "process” is included in this term not only as an independent process but also as long as the intended purpose of the process is achieved even if it cannot be clearly distinguished from other processes. Is done.
  • EUV (Extreme Ultra Violet) light refers to light having a wavelength of 5 nm to 30 nm.
  • the wavelength of EUV light is preferably 5 nm to 13.5 nm.
  • EUV light and light having a shorter wavelength than EUV light are generically referred to as "EUV light or the like".
  • the term "pellicle” means a member including a pellicle frame and a pellicle film supported on one end surface of the pellicle frame in the thickness direction.
  • the term "method of demounting a pellicle” means a method of demounting (ie, detaching) at least a pellicle film from a photomask on which a pellicle is mounted.
  • the concept of “method of demounting pellicle” also includes a method of demounting only the pellicle film or both the pellicle film and the pellicle frame, and other elements (for example, an adhesive layer).
  • the concept of "a method of demounting a pellicle” also includes a method of detaching from a photomask while destroying the pellicle.
  • the demounting process of demounting the pellicle film from the photomask in the laminate by attracting it in the direction of including.
  • the pellicle demounting method of the present disclosure is excellent in suppressing contamination of a photomask. That is, according to the pellicle demounting method of the present disclosure, contamination of the photomask is suppressed.
  • the reason why such an effect is achieved is presumed as follows.
  • the pellicle film is an extremely thin film.
  • the pellicle film used in EUV lithography has a thickness on the order of nanometers. Therefore, when the pellicle is demounted from the photomask, the pellicle film is easily damaged, and the pellicle film piece generated by the damage of the pellicle film (including the concept of destruction; the same applies hereinafter) adheres to the photomask.
  • the photomask may be contaminated.
  • the self-supporting portion of the pellicle film (that is, the portion located on the opening formed by the inner peripheral surface of the pellicle frame and not supported by the pellicle frame) is easily damaged.
  • the demounting of the pellicle film from the photomask in the laminate including the photomask, the pellicle frame, and the pellicle film in this order is performed as follows. Do. An electrostatic attraction is generated by arranging the laminate and the electrode so that the pellicle film and the electrode in the laminate face each other and applying a voltage to the electrode.
  • the pellicle film By attracting the pellicle film toward the electrode by this electrostatic attraction, the pellicle film is demounted from the photomask in the laminated body. At this time, the pellicle film may be damaged. When the pellicle film is broken, the pellicle film pieces generated by the breakage are attracted toward the electrode. As described above, in the pellicle demounting method of the present disclosure, even when the pellicle film is damaged, the pellicle film piece generated by the breakage of the pellicle film is attracted toward the electrode, so that the pellicle film piece adheres to the photomask. That (that is, contamination of the photomask with pellicle film pieces) is suppressed.
  • the pellicle film and the electrode in the laminated body face each other means a state in which the electrode is arranged on the pellicle film side (not the photomask side) in the laminated body.
  • another object for example, a member other than the electrode in the electrostatic chuck described later (for example, a resin member), a film described later, etc.) is interposed between the pellicle film and the electrode. May be good.
  • FIG. 1 is a schematic cross-sectional view schematically showing an example of a laminated body prepared in the step of preparing the laminated body in the pellicle demounting method of the present disclosure.
  • the laminate according to this example includes a photomask 105, a pellicle frame 103, and a pellicle film 102 in this order.
  • the laminate according to this example can be obtained, for example, by mounting a pellicle 101 including a pellicle film 102 and a pellicle frame 103 on a photomask 105.
  • the pellicle frame 103 supports the pellicle film 102 on one end surface side in the thickness direction.
  • the portion of the pellicle film 102 that overlaps the pellicle frame 103 in a plan view is supported by the pellicle frame 103.
  • the portion overlapping the opening determined by the inner peripheral surface of the pellicle frame 103 in a plan view is not supported, and the self-supporting portion (that is, the film is not formed on the substrate). , The part that exists in the membrane alone).
  • FIG. 2 is a schematic cross-sectional view schematically showing an example of demounting a pellicle in the present disclosure.
  • the pellicle film 102 is demounted while leaving the pellicle frame 103 on the photomask 105 in the laminated body shown in FIG.
  • Demounting is performed by attracting the pellicle film 102 in the direction of an electrode (for example, upward in FIG. 2) arranged opposite to the pellicle film 102 by an electrostatic attraction.
  • the demounted pellicle film 102 maintains the shape of the film, but the pellicle film 102 may be destroyed when it is demounted.
  • FIG. 3 is a schematic cross-sectional view schematically showing another example of demounting the pellicle in the present disclosure.
  • both the pellicle film 102 and the pellicle frame 103 that is, the entire pellicle 101
  • Demounting is performed by attracting the pellicle 101 in the direction of an electrode (not shown) arranged to face the pellicle film 102 by an electrostatic attraction.
  • the pellicle film 102 in the demounted pellicle 101 maintains the shape of the film, but the pellicle film 102 may be destroyed when it is demounted.
  • the method of demounting a pellicle of the present disclosure includes a step of preparing a laminate.
  • the laminated body referred to here is a laminated body including a photomask, a pellicle frame, and a pellicle film in this order (see, for example, FIG. 1 described above).
  • the step of preparing the laminate may be a step of manufacturing the laminate, or may be a step of simply preparing the laminate produced in advance.
  • the laminate prepared in this step includes a pellicle film.
  • a known pellicle film can be used.
  • the material contained in the pellicle film is not particularly limited, and may be an organic material, an inorganic material, or a mixed material of an organic material and an inorganic material.
  • the organic material include a fluorine-based polymer and the like.
  • the inorganic material include crystalline silicon (for example, single crystal silicon, polycrystalline silicon, etc.), diamond-like carbon (DLC), graphite, amorphous carbon, graphene, silicon carbide, silicon nitride, aluminum nitride and the like.
  • the pellicle film may contain one of the above materials alone, or may contain two or more of the above materials.
  • the structure of the pellicle film may be a single layer structure or a structure composed of two or more layers.
  • the thickness of the pellicle film (total thickness when composed of two or more layers) is preferably 2 nm to 200 nm, more preferably 2 nm to 100 nm, further preferably 2 nm to 70 nm, and 2 nm to 70 nm. It is particularly preferably 50 nm.
  • the lower limit of the thickness of the pellicle film may be 5 nm or 10 nm.
  • the composition of a known pellicle film such as JP-A-2014-022217 and International Publication No. 2015/174412 can be referred to as appropriate.
  • the laminate prepared in this step includes a pellicle frame.
  • a known pellicle frame which is a member having a frame shape, can be used.
  • a normal material used for the pellicle frame can be applied.
  • the material of the pellicle frame aluminum, aluminum alloy (5000 series, 6000 series, 7000 series, etc.), stainless steel, silicon, silicon alloy, iron, iron alloy, carbon steel, tool steel, ceramics, metal- Examples include ceramic composite materials and resins. Of these, aluminum or an aluminum alloy is more preferable from the viewpoint of light weight and rigidity.
  • the pellicle frame may have a protective film on its surface.
  • a protective film having resistance to hydrogen radicals and EUV light existing in the exposure atmosphere is preferable.
  • the protective film include an oxide film.
  • the oxide film can be formed by a known method such as anodic oxidation.
  • the oxide film may be colored with a black dye.
  • the configuration of the pellicle frame for example, the configurations of known pellicle frames such as JP-A-2014-022217 and JP-A-2010-146027 can be appropriately referred to.
  • the outer peripheral surface of the pellicle frame is provided with at least one of a recess and a notch. This makes it easier to demount the pellicle frame at the stage of demounting the pellicle frame after demounting the pellicle film from the photomask by electrostatic attraction.
  • the pellicle frame can be easily demounted from the photomask by inserting or hooking a gripper for handling the pellicle frame into the recess or notch.
  • Only one recess or notch may be provided on the outer peripheral surface of the pellicle frame, or a plurality of recesses or notches may be provided. When a plurality of recesses are provided, the shape of each of the plurality of recesses may be the same or different (the same applies to the notch).
  • FIG. 5A is a schematic cross-sectional view showing an example of a laminated body including a pellicle frame in which a recess is provided on the outer peripheral surface.
  • the laminate according to this example includes a photomask 505 and a pellicle 501 including a pellicle frame 503 and a pellicle film 502.
  • the photomask 505, the pellicle frame 503, and the pellicle film 502 are arranged in this order.
  • a recess 509 is provided on the outer peripheral surface of the pellicle frame 503.
  • the recess 509 starts from the outer peripheral surface of the pellicle frame and extends in a direction parallel to the surface of the pellicle film 502.
  • a gripper for handling the pellicle frame is inserted or hooked into the recess 509. Therefore, the pellicle frame 503 can be easily demounted from the photomask 505.
  • FIG. 5B is a modified example of the laminated body shown in FIG. 5A, and is a schematic cross-sectional view showing an example of the laminated body including a pellicle frame having a notch on the outer peripheral surface.
  • the structure of the laminated body shown in FIG. 5B is the same as the structure of the laminated body shown in FIG. 5A, except that the recess 509 is changed to the notch 510.
  • the pellicle frame 503 can be easily demounted from the photomask 505 by inserting or hooking the gripper for handling the pellicle frame into the notch 510, for example.
  • the pellicle frame may be provided with a through hole penetrating from the outer peripheral surface to the inner peripheral surface of the pellicle frame.
  • the through hole functions as a vent for ventilating, for example, the outside of the laminate and the inside of the laminate (that is, the inner peripheral surface of the pellicle frame, the pellicle film, and the space surrounded by the photomask).
  • a voltage is applied to the electrodes to generate an electrostatic attraction, and gas is sent into the laminate through the vents provided in the pellicle frame, thereby causing the inside of the laminate to flow.
  • the pellicle film can be demounted by causing the pellicle film to swell outward (that is, toward the electrode) to break the pellicle film, and to attract the pellicle film piece generated by the breakage to the electrode side.
  • the pellicle frame may be provided with a hole whose depth direction is the thickness direction of the pellicle frame (hereinafter, also referred to as "hole in the thickness direction of the pellicle frame").
  • hole in the thickness direction of the pellicle frame This makes it easier to demount the pellicle frame at the stage of demounting the pellicle frame after demounting the pellicle film from the photomask by electrostatic attraction.
  • the pellicle frame can be easily demounted from the photomask by inserting or hooking the gripper for handling the pellicle frame into the hole in the thickness direction of the pellicle frame.
  • holes may be provided in the pellicle film and the pellicle frame in the laminated body so that the thickness direction of the pellicle film and the pellicle frame is the depth direction. ..
  • FIG. 4 is a schematic cross-sectional view showing an example of a laminated body in which holes are provided in the pellicle film and the pellicle frame so that the thickness direction of the pellicle film and the pellicle frame is the depth direction.
  • the laminate according to this example includes a photomask 405 and a pellicle 401 including a pellicle frame 403 and a pellicle film 402.
  • the pellicle film 402 and the pellicle frame 403 in the laminated body are provided with holes 409 whose thickness direction is the depth direction.
  • the recesses or notches provided on the outer peripheral surface of the pellicle frame, the holes whose depth direction is the thickness direction of the pellicle frame, and the holes whose depth direction is the thickness direction of the pellicle film and the pellicle frame described above. may be only one or a plurality of each. Moreover, the shape or size of these spaces may be different for each space.
  • the laminate prepared in this step may further include a pellicle film adhesive layer between the pellicle film and the pellicle frame.
  • the laminate in such an embodiment can be produced, for example, by mounting a pellicle including a pellicle film, a pellicle film adhesive layer, and a pellicle frame on a photomask.
  • the pellicle film adhesive layer means a layer that is interposed between the pellicle film and the pellicle frame and for adhering the pellicle film and the pellicle frame.
  • the pellicle film adhesive layer can contain a known adhesive. Examples of the adhesive that can be contained in the pellicle film adhesive layer include an acrylic resin adhesive, an epoxy resin adhesive, a silicone resin adhesive, a fluorine-containing silicone adhesive, and a fluorine-containing ether adhesive.
  • the laminate prepared in this step includes a photomask.
  • the photomask is not particularly limited as long as it has a light irradiation surface to which light is irradiated.
  • a photomask including a support substrate, a reflective layer laminated on the support substrate, and an absorber layer formed on the reflective layer can be used.
  • the surface on the side where the reflection layer and the absorber layer are provided is the light irradiation surface.
  • the absorber layer on the light irradiation surface absorbs at least a part of the irradiated light, and the rest of the light is reflected by the reflection layer.
  • the reflected light is applied to a sensitive substrate (for example, a semiconductor substrate with a photoresist film).
  • a desired image is formed on the sensitive substrate.
  • a multilayer film of molybdenum (Mo) and silicon (Si) is preferably used.
  • the absorber layer is preferably a material having high absorbency such as chromium (Cr), tantalum nitride, and EUV light.
  • the laminate prepared in this step may further include a mask adhesive layer between the photomask and the pellicle frame.
  • the laminate of such an embodiment can be produced, for example, by mounting a pellicle having a pellicle film, a pellicle frame, and a mask adhesive layer in this order on the photomask in a direction in which the mask adhesive layer and the photomask are in contact with each other. ..
  • the mask adhesive layer means a layer that is interposed between the photomask and the pellicle frame and for adhering the photomask and the pellicle frame.
  • the mask adhesive layer can contain a known adhesive. Examples of the adhesive that can be contained in the mask adhesive layer include double-sided adhesive tape, silicone resin adhesive, acrylic adhesive, rubber adhesive, vinyl adhesive, epoxy adhesive and the like.
  • the laminate prepared in this step may include both the mask adhesive layer and the pellicle film adhesive layer.
  • FIG. 6 is a schematic cross section schematically showing another example of the laminated body prepared in the step of preparing the laminated body (that is, another example different from the example shown in FIG. 1) in the pellicle demounting method of the present disclosure. It is a figure. As shown in FIG. 6, in the laminate according to this example, the photomask 605, the mask adhesive layer 607, the pellicle frame 603, the pellicle film adhesive layer 606, and the pellicle film 602 are arranged in this order. Be prepared.
  • the laminate in this example can be produced by using, for example, a pellicle 601 including a mask adhesive layer 607, a pellicle frame 603, a pellicle film adhesive layer 606, and a pellicle film 602 in this order arrangement.
  • FIG. 7 is a schematic cross-sectional view schematically showing still another example of the laminated body prepared in the step of preparing the laminated body in the pellicle demounting method of the present disclosure.
  • the laminate according to the example shown in FIG. 7 has a pellicle film support frame 608 and a support frame adhesive layer 609 between the pellicle film adhesive layer 606 and the pellicle frame 603 (where, the pellicle film support frame 608 is a pellicle film adhesive layer 606).
  • the support frame adhesive layer 609 is in contact with the pellicle frame 603), and the structure is the same as that of the laminated body according to the example shown in FIG.
  • the laminate in this example includes, for example, a pellicle 611 including a mask adhesive layer 607, a pellicle frame 603, a support frame adhesive layer 609, a pellicle film support frame 608, a pellicle film adhesive layer 606, and a pellicle film 602 in this order. Can be made using.
  • FIG. 8 is a schematic cross-sectional view schematically showing still another example of the laminated body prepared in the step of preparing the laminated body in the pellicle demounting method of the present disclosure.
  • the configuration of the laminate according to the example shown in FIG. 8 is the same as the configuration of the laminate according to the example shown in FIG. 7, except that the pellicle film adhesive layer 606 does not exist.
  • the laminate in this example can be produced by using, for example, a pellicle 612 including a mask adhesive layer 607, a pellicle frame 603, a support frame adhesive layer 609, a pellicle film support frame 608, and a pellicle film 602 in this order.
  • the scope of the pellicle in the present disclosure includes Not only in the mode in which the pellicle film is directly supported on one end surface side in the thickness direction of the pellicle frame (that is, without interposing other elements) (see FIG. 1).
  • a mode in which the pellicle film is supported on one end surface side in the thickness direction of the pellicle frame via other elements for example, a pellicle film adhesive layer, a pellicle film support frame, a support frame adhesive layer, etc.
  • FIG. 8 is also included.
  • the method of demounting a pellicle of the present disclosure includes a step of preparing an electrode.
  • the electrode is a member used for demounting the pellicle film in the demounting step described later.
  • the step of preparing the electrode may be a step of manufacturing the electrode, or may be a step of simply preparing the electrode manufactured in advance.
  • the size, shape, and number of electrodes are not particularly limited and can be set as appropriate. From the viewpoint of recoverability of the pellicle film, the size of the electrode is preferably larger than the self-supporting portion of the pellicle film (for example, region A in FIG. 6).
  • the step of preparing the electrode may be a step of preparing a member (for example, an electrostatic chuck) including the electrode.
  • a voltage is applied to the electrodes in the member including the electrodes, and the generated electrostatic attraction is used to demount the pellicle film.
  • the material of the portion of the member including the electrode other than the electrode is not particularly limited, and examples thereof include glass, ceramics, and resin having insulating properties. Further, the structure of the electrode in the member including the electrode is not particularly limited, and may be a unipolar type or a hyperbolic type.
  • the electrostatic chuck as an example of the member including the electrode may be a Coulomb force type electrostatic chuck or a Johnson-Labeck force type (JR type) electrostatic chuck.
  • the Coulomb force type electrostatic chuck is an electrostatic chuck in which the material arranged between the electrode and the object on which the electrostatic attraction is exerted is an insulator, and is a JR type electrostatic chuck.
  • the chuck is an electrostatic chuck in a mode in which the material arranged between the electrode and the object on which the electrostatic attraction is exerted is a conductive ceramic compound.
  • a Coulomb force type electrostatic chuck in which a polyimide sheet of an insulating polymer material is attached to a metal plate with an adhesive, which is shown in JP-A-53-77489.
  • Coulomb force type electrostatic chuck in which electrodes are provided between two insulating ceramic plates as shown in JP-A-63-95644, JP-A-4-206545, and JP-A-5-36819.
  • JP-A-59-152636 a Coulomb force type electrostatic chuck in which an electrode on an insulating ceramic plate is coated with insulating ceramic by a thermal spraying method; And so on.
  • JR type electrostatic chuck There is no particular limitation, for example; A JR type electrostatic chuck using conductive ceramics made of aluminum nitride, TiN, and Ce, which is described in JP-A-2000-143349; A JR type electrostatic chuck using conductive ceramics made of aluminum oxide and titanium oxide described in JP-A-2006-049356; Titanium carbide, titanium nitride, tungsten carbide, tantalum carbide, molybdenum carbide, niobium carbide, vanadium carbide in the insulator ceramics made of alumina, zirconia, silicon nitride, and aluminum nitride described in JP-A-2008-087988. JR type electrostatic chuck using conductive ceramics in which any one or more is dispersed; And so on.
  • the electrostatic chuck is preferably a Coulomb force type electrostatic chuck from the viewpoint of suppressing contamination of the photomask.
  • the method for demounting a pellicle of the present disclosure includes a demounting step of demounting a pellicle film from a photomask in the above-mentioned laminate.
  • the above-mentioned laminate and the above-mentioned electrodes are arranged so that the pellicle film and the electrodes in the laminate face each other, and a voltage is applied to the electrodes to generate an electrostatic attraction. This is done by attracting the pellicle film toward the electrodes by the generated electrostatic attraction. As a result, the pellicle membrane is recovered. The pellicle membrane may be destroyed in this process. When the pellicle film is destroyed, the pellicle film piece is attracted toward the electrode and collected.
  • Electrostatic attractive force generated by applying a voltage to the electrodes from the viewpoint of the recovery of the pellicle film, 9.8 mN / cm 2 (i.e. 1 gf / cm 2) or more preferably, 49 mN / cm 2 (i.e. 5 gf / cm 2 ) The above is more preferable.
  • the pellicle film when the pellicle film is demounted by the electrostatic attraction in this step, another object (for example, a member other than the electrode in the electrostatic chuck described above (for example, a resin member)) is placed between the pellicle film and the electrode.
  • a film, etc., which will be described later) may or may not be present.
  • the pellicle film attracted in the direction of the electrode including the case where it is a pellicle film piece; the same applies hereinafter
  • the pellicle film attracted in the direction of the electrode is adsorbed on the surface of the other object and is recovered. In either case, since the pellicle film moves away from the photomask, the adsorption (that is, contamination) of the pellicle film on the photomask is suppressed.
  • the film In the demounting step, it is preferable to dispose a film between the pellicle film and the electrode in the laminated body, and to demount the pellicle film by attracting the pellicle film to the surface of the film by the electrostatic attraction. This makes it easier to recover the pellicle membrane.
  • film there are no particular restrictions on the film.
  • the concept of "film” in the present disclosure includes not only what is generally called “film” but also what is called “sheet” and what is called “paper”.
  • the thickness of the film is not particularly limited, but from the viewpoint of durability, it is preferably 5 ⁇ m to 200 ⁇ m, and more preferably 5 ⁇ m to 100 ⁇ m.
  • Examples of the material of the film include at least one selected from the group consisting of resin, rubber, paper, metal glass, and ceramics.
  • resin film examples include polyethylene, polypropylene (PP), and polyester (for example, polyethylene terephthalate (PET), polyethylene naphthalate (PEN), and polycarbonate (PC)). Etc.) and the like are preferably mentioned.
  • the resin film may contain only one kind of the above-mentioned material, or may contain two or more kinds of the above-mentioned materials.
  • the film containing a resin as a main component means a film in which the content of the resin with respect to the entire film is 50% by mass or more.
  • An adhesive layer may be formed on one side or both sides of the film. That is, in the demounting step, a film with an adhesive layer is interposed between the pellicle film and the electrode in the laminated body so that the pellicle film and the adhesive layer face each other, and in this state, the pellicle is subjected to the electrostatic attraction.
  • the film may be demounted by attracting the film to the surface of the adhesive layer of the film with the adhesive layer and adsorbing the film on the surface. According to this aspect, the recovery of the pellicle membrane becomes easier.
  • a resin film with an adhesive layer is preferable.
  • the pressure-sensitive adhesive layer in the film with a pressure-sensitive adhesive layer preferably contains an adhesive. Preferred pressure-sensitive adhesives will be described later.
  • the thickness of the adhesive layer in the film with the adhesive layer is not particularly limited, but is preferably in the range of about 50 ⁇ m to 200 ⁇ m from the viewpoint of recovering the pellicle film.
  • the method for producing the film with the adhesive layer is not particularly limited, and a known production method can be used.
  • a method for producing a film with an adhesive layer for example; A method of applying an adhesive solution for forming an adhesive layer on at least one surface of a film and drying the film; A method of applying an adhesive solution for forming an adhesive layer on a release liner to form an adhesive layer, and then transferring this adhesive layer to a film; And so on.
  • the release liner is not particularly limited as long as it can be easily peeled off from the adhesive layer.
  • a resin film whose surface is subjected to a mold release treatment using a fluorine compound or the like for example, a polyester film such as PET).
  • Etc. can be used.
  • the laminate When the laminate further includes a mask adhesive layer between the photomask and the pellicle frame, the laminate (that is, the photomask, the mask adhesive layer, the pellicle frame, and the pellicle film) is in this order.
  • the laminated body provided in the arrangement is the first laminated body
  • the demounting process is The pellicle film is demounted by the electrostatic attraction while leaving the pellicle frame on the photomask side in the first laminated body on which the adhesive layer is formed, and the second laminated body including the photomask, the mask adhesive layer, and the pellicle frame is formed.
  • the adhesive force in the mask adhesive layer can be reduced by heat-treating the second laminated body, so that the pellicle frame can be more easily demounted.
  • the entire second laminated body may be heat-treated, or a part of the second laminated body (for example, a portion including the mask adhesive layer) may be heat-treated.
  • the device for heat treatment is not particularly limited, and a heater, a hot plate, an oven, or the like can be used. Examples of the heat treatment temperature include 50 ° C. to 140 ° C. Examples of the heat treatment time include 10 seconds to 300 seconds.
  • the pellicle demounting method of the present disclosure may further include a step of heat-treating the laminate (that is, the laminate including the photomask, the pellicle frame, and the pellicle film) before the demount step.
  • the aspect including the step of heat-treating the laminate is particularly effective when the laminate includes at least one of the pellicle film adhesive layer and the mask adhesive layer. In this case, by heat-treating the laminate, the adhesive force of at least one of the pellicle film adhesive layer and the mask adhesive layer can be reduced, so that demounting can be performed more easily while suppressing damage to the pellicle film. it can.
  • the entire laminate may be heat-treated, or a part of the laminate (for example, a portion including at least one of the pellicle film adhesive layer and the mask adhesive layer) may be heat-treated.
  • the device for heat treatment is not particularly limited, and a heater, a hot plate, an oven, or the like can be used.
  • Examples of the heat treatment temperature include 50 ° C. to 140 ° C.
  • Examples of the heat treatment time include 10 seconds to 300 seconds.
  • the step of forming the adhesive layer is a step of forming the adhesive layer on the pellicle film in the laminated body.
  • the step of forming the adhesive layer is from the viewpoint of further reducing the load applied to the pellicle film during the formation of the adhesive layer. It is preferably a step of forming an adhesive layer by a spray coating method, a spin coating method, an inkjet method, a screen printing method, or a dip coating method. More preferably, it is a step of forming an adhesive layer by a spray coating method or a spin coating method. It is particularly preferable that the step is to form an adhesive layer by a spray coating method.
  • the adhesive layer can be formed by the spray coating method using a known spray coating device.
  • the spray coating device include a spray gun, an ultrasonic spray coating device, a two-fluid spray coating device, a one-fluid spray coating device, and the like.
  • the pressure-sensitive adhesive layer preferably contains at least one type of pressure-sensitive adhesive.
  • the adhesive layer is Silicone adhesives, acrylic adhesives, urethane adhesives, polyamide adhesives, polyester adhesives, ethylene vinyl acetate copolymers, olefin adhesives, polybutadiene adhesives, rubber adhesives, and styrene adhesives. It preferably contains at least one adhesive selected from the group consisting of adhesives. More preferably, it contains at least one adhesive selected from the group consisting of acrylic adhesives, polybutadiene adhesives, rubber adhesives, and styrene adhesives.
  • At least one pressure-sensitive adhesive selected from the group consisting of an acrylic pressure-sensitive adhesive, a polybutadiene-based pressure-sensitive adhesive, and a rubber-based pressure-sensitive adhesive.
  • the pressure-sensitive adhesive may be used alone or in combination of two or more.
  • the silicone-based pressure-sensitive adhesive is preferably a pressure-sensitive adhesive containing a silicone resin as a main component.
  • the silicone-based pressure-sensitive adhesive is not particularly limited, and examples thereof include addition-reaction type silicone-based pressure-sensitive adhesives, peroxide-curable silicone-based pressure-sensitive adhesives, and condensation-type silicone-based pressure-sensitive adhesives. Among these, an addition-curable silicone-based pressure-sensitive adhesive having a large holding power is preferable from the viewpoint of holding the pellicle film with the pressure-sensitive adhesive.
  • the main component of the pressure-sensitive adhesive means a component that accounts for 50% by mass or more with respect to the total mass of the pressure-sensitive adhesive.
  • the acrylic pressure-sensitive adhesive is preferably a pressure-sensitive adhesive containing an acrylic resin as a main component.
  • the acrylic resin contained in the acrylic pressure-sensitive adhesive is not particularly limited, and examples thereof include alkyl (meth) acrylate-based pressure-sensitive adhesives, urethane (meth) acrylates, and epoxy (meth) acrylates.
  • the acrylic pressure-sensitive adhesive may be a pressure-sensitive adhesive containing an acrylic rubber resin as a main component. Examples of the acrylic rubber resin include block copolymers of methyl methacrylate and butyl acrylate.
  • the urethane-based pressure-sensitive adhesive is preferably a pressure-sensitive adhesive containing a polyurethane resin as a main component.
  • the polyurethane contained in the urethane-based adhesive is not particularly limited, and examples thereof include polyester polyurethane and polycarbonate polyurethane.
  • the polyamide-based pressure-sensitive adhesive is preferably a pressure-sensitive adhesive containing a polyamide resin as a main component.
  • the polyamide resin contained in the polyamide-based pressure-sensitive adhesive is not particularly limited, and examples thereof include a polyamide obtained by ring-opening polycondensation of undecanlactam (amide 11) and a polyamide obtained by ring-opening polycondensation of lauryllactam (amide 12). ..
  • the polyester-based pressure-sensitive adhesive is preferably a pressure-sensitive adhesive containing a polyester resin as a main component.
  • the polyester resin is not particularly limited, and examples thereof include a condensed polymer of a polyvalent carboxylic acid and a polyhydric alcohol. Specific examples of the polyester include polyethylene terephthalate and polybutylene terephthalate.
  • the olefin-based pressure-sensitive adhesive is preferably a pressure-sensitive adhesive containing an olefin resin as a main component.
  • the olefin is not particularly limited, and may be a polymer obtained by homopolymerizing an olefin or a copolymer obtained by polymerizing an olefin and another monomer.
  • an olefin having 2 to 6 carbon atoms is preferable, and examples thereof include ethylene, propylene, butene, methylpentene, and hexene.
  • Examples of other monomers used for the copolymer include vinyl acetate.
  • the rubber-based pressure-sensitive adhesive is preferably a pressure-sensitive adhesive containing rubber as a main component, and examples thereof include natural rubber-based pressure-sensitive adhesives and synthetic rubber-based pressure-sensitive adhesives.
  • examples of the synthetic rubber-based pressure-sensitive adhesive include styrene-butadiene copolymer (SBR, SBS), styrene-isoprene copolymer (SIS), acrylonitrile-butadiene copolymer (NBR), chloroprene polymer, and isoprene-isoprene. Examples include a polymer (butyl rubber).
  • the rubber-based pressure-sensitive adhesive is preferably a synthetic rubber-based pressure-sensitive adhesive from the viewpoint of easily forming a pressure-sensitive adhesive layer and easily holding a pellicle film, and contains a styrene-butadiene copolymer as a main component. It is more preferable that it is a pressure-sensitive adhesive.
  • the polybutadiene-based pressure-sensitive adhesive is a pressure-sensitive adhesive other than the above-mentioned rubber-based pressure-sensitive adhesive, and is preferably a pressure-sensitive adhesive containing polybutadiene as a main component.
  • the polybutadiene is not particularly limited as long as it contains a structural unit formed from butadiene, and may be a homopolymer or a copolymer with a monomer other than butadiene.
  • the styrene-based pressure-sensitive adhesive is a pressure-sensitive adhesive other than the above-mentioned rubber-based pressure-sensitive adhesive, and is a pressure-sensitive adhesive containing polystyrene resin as a main component.
  • the polystyrene resin is not particularly limited, and the single weight of a styrene-based monomer (for example, styrene, methylstyrene, ethylstyrene, isopropylstyrene, dimethylstyrene, paramethylstyrene, chlorostyrene, bromostyrene, vinyltoluene, vinylxylene) is used.
  • Examples thereof include a coalescence and a copolymer of a styrene-based monomer and a monomer copolymerizable with the styrene-based monomer.
  • Examples of the monomer copolymerizable with the styrene-based monomer include vinyl monomers (for example, acrylonitrile, methacrylic acid, acrylic acid, methacrylic acid, methyl methacrylate, maleic anhydride, and butadiene). ..
  • the glass transition temperature of the pressure-sensitive adhesive is preferably -60 ° C to -20 ° C, more preferably -60 ° C to -40 ° C.
  • the weight average molecular weight of the base polymer of the pressure-sensitive adhesive is preferably 10,000 to 1,500,000, preferably 50,000 to 1,000,000. Is more preferable. Further, base polymers having different polymerization average molecular weights may be mixed.
  • the amount of the pressure-sensitive adhesive applied when the pressure-sensitive adhesive is applied onto the pellicle film to form the pressure-sensitive adhesive layer is 1 g / g after drying. It is preferably m 2 to 500 mg / m 2 , and more preferably 5 mg / m 2 to 200 g / m 2 .
  • the pressure-sensitive adhesive layer may be formed by applying a pressure-sensitive adhesive solution containing a pressure-sensitive adhesive and a solvent on the pellicle film.
  • a known solvent can be used as the solvent in the pressure-sensitive adhesive solution.
  • a solvent in the pressure-sensitive adhesive solution for example, acetone, methyl ethyl ketone (2-butanone), cyclohexane, ethyl acetate, ethylene dichloride, tetrahydrofuran, toluene, ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, ethylene glycol dimethyl ether, propylene glycol monomethyl ether, Propylene glycol monoethyl ether, acetylacetone, cyclohexanone, diacetone alcohol, ethylene glycol monomethyl ether acetate, ethylene glycol ethyl ether acetate, ethylene glycol monoisopropyl ether, ethylene glycol monobutyl ether
  • the solid content concentration in the pressure-sensitive adhesive solution (that is, the content of the pressure-sensitive adhesive with respect to the total amount of the pressure-sensitive adhesive solution) is preferably about 1% by mass to 50% by mass.
  • the viscosity (25 ° C.) of the pressure-sensitive adhesive solution is preferably 1 mPa ⁇ s to 1,000 mPs ⁇ s, preferably 100 mPa ⁇ s to 800 mPs ⁇ s, from the viewpoint of further improving the adhesion between the pellicle film and the pressure-sensitive adhesive. Is more preferable.
  • the viscosity of the pressure-sensitive adhesive solution can be appropriately adjusted depending on the type and / or amount of the solvent.
  • the thickness of the adhesive layer is more preferably 1 ⁇ m or more and 1 mm or less, and further preferably 50 ⁇ m or more and 1 mm or less.
  • the thickness of the adhesive layer can be adjusted by a known method. For example, when the pressure-sensitive adhesive layer is formed by the spray coating method, the thickness of the pressure-sensitive adhesive layer can be adjusted by adjusting the injection amount of the pressure-sensitive adhesive solution sprayed from the spray coating device (for example, a spray gun). The thickness of the adhesive layer is determined by cutting the laminate in the vertical direction and confirming the cross section with a scanning electron microscope.
  • the adhesive layer may have a groove of a lattice structure. Since the adhesive layer has grooves having a lattice structure, for example, when a protective film described later is laminated on the adhesive layer, it gets into the space between the pellicle film and the protective film when the pellicle film and the protective film are bonded to each other. The gas is easily discharged from the lattice structure to the outside, and the rupture of the pellicle film can be prevented.
  • the adhesive discharged on the self-supporting portion of the pellicle film is a portion other than the self-supporting portion of the pellicle film and other than the pellicle film.
  • a cover may be provided to prevent the portion from adhering to the portion.
  • the method for demounting a pellicle according to the above-described step of forming the adhesive layer is a protective film on the adhesive layer in the laminate in which the adhesive layer is formed after the step of forming the adhesive layer and before the demounting step. May further include a step of adhering.
  • the protective film is not particularly limited, but polyethylene terephthalate (PET) film, polypropylene (PP) film, polycarbonate (PC) film, and the like are preferably used.
  • the thickness of the protective film is not particularly limited, but from the viewpoint of having an appropriate strength, it is preferably 50 ⁇ m or more and 500 ⁇ m or less, and more preferably 100 ⁇ m or more and 200 ⁇ m or less.
  • the protective film may be laminated on the pellicle film as a two-layer film co-extruded together with the above-mentioned adhesive layer.
  • the pellicle demounting method of the present disclosure may include other steps other than the above-mentioned steps, if necessary.
  • the first embodiment which is a specific embodiment of the pellicle demounting method of the present disclosure, will be shown.
  • the method of demounting the pellicle of the present disclosure is not limited to the following embodiments.
  • a laminate having the same configuration as the laminate shown in FIG. 6 and an electrostatic chuck (not shown) as a member including an electrode are provided of a pellicle film 602 in the laminate and an electrode in the electrostatic chuck. And are arranged in the opposite direction.
  • the laminated body is arranged in the direction opposite to the posture shown in FIG. 6 (that is, the direction in which the pellicle film 602 is on the lower side and the photomask 605 is on the upper side).
  • the electrostatic chuck is arranged below the pellicle film 602 in the laminated body so that the electrodes face upward.
  • a resin film with an adhesive layer (not shown) is provided between the pellicle film 602 in the laminated body and the electrode in the electrostatic chuck, and the pellicle film 602 and the adhesive layer (not shown) are separated by a predetermined interval. Arrange them so that they face each other.
  • an electrostatic attraction is generated by applying a voltage to the electrodes of the electrostatic chuck, and the generated electrostatic attraction attracts the pellicle film 602 toward the electrodes (that is, downward) in the laminated body.
  • the demounted pellicle film 602 is adsorbed on the adhesive layer of the resin film with the adhesive layer and recovered.
  • the pellicle film 602 may be damaged, and the pellicle film pieces generated by the breakage may be adsorbed on the adhesive layer and recovered.
  • the inside of the laminated body is made positive pressure by sending air into the laminated body through a through hole (that is, a vent; not shown) penetrating from the outer peripheral surface to the inner peripheral surface of the pellicle frame 603.
  • the pellicle film 602 may be inflated outward (that is, in the direction of the electrode) to damage the pellicle film.
  • the remaining second laminate (that is, the laminate containing the photomask 605, the mask adhesive layer 607, the pellicle frame 603, and the pellicle film adhesive layer 606) is placed on the hot plate with the photomask 605. It is placed in a direction in which it comes into contact with the hot plate and heated so that the temperature of the mask adhesive layer becomes about 50 ° C. to reduce the adhesive force of the mask adhesive layer 607.
  • the mask adhesive layer 607 by inserting or hooking a gripper for handling the pellicle frame into the recesses and / or notches (not shown) provided on the outer peripheral surface of the pellicle frame 603 in the second laminated body.
  • the pellicle frame 603 and the pellicle film adhesive layer 606 are demounted from the photomask 605.
  • the pellicle demounting device is A pellicle demounting device for carrying out the demounting step in the pellicle demounting method of the present disclosure.
  • the holding member for holding the laminated body described in the method of demounting the pellicle of the present disclosure, and The electrodes described in the pellicle demounting method of the present disclosure and To be equipped.
  • the pellicle demounting device of the present disclosure described above can be implemented by the pellicle demounting device according to the present embodiment. Therefore, according to the pellicle demounting device according to the present embodiment, the effect of suppressing the contamination of the photomask by the pellicle film piece can be achieved as in the above-described pellicle demounting method of the present disclosure.
  • the holding member in the pellicle demounting device holds the laminate (that is, the laminate including the photomask, the pellicle frame, and the pellicle film in this order) described in the pellicle demounting method of the present disclosure. It is a member to be used.
  • the electrode in the pellicle demounting device is an electrode described in the pellicle demounting method of the present disclosure (that is, an electrostatic attraction is generated by applying a voltage, and the generated electrostatic attraction forms a pellicle film.
  • the pellicle demounting device may include an electrostatic chuck as a member including electrodes. In this case, the pellicle film can be demounted using the electrodes in the electrostatic chuck.
  • the holding member in the present embodiment preferably has an opening that holds the laminate in a direction in which the photomask is on the upper side and the pellicle film is on the lower side, and at least the self-supporting portion of the pellicle film is exposed.
  • the demounted pellicle film and / or the pellicle film piece falls downward (that is, in the direction of gravity) through the opening, so that the contamination of the photomask due to the adhesion of the pellicle film piece is more effectively suppressed.
  • the concept of an opening that exposes at least a self-supporting portion of the pellicle membrane is: A mode in which the opening is arranged below the pellicle membrane, and A mode in which the opening is arranged above the pellicle membrane (that is, a mode in which the pellicle membrane protrudes downward from the opening) (see, for example, FIGS. 9 and 10). Is included.
  • the holding member When the holding member in this embodiment holds the laminated body, the holding member supports at least one of the pellicle frame and the photomask in the laminated body from the viewpoint of suppressing unintended damage to the pellicle film when attached to the holding member. By doing so, it is preferable to hold the laminated body (see, for example, FIGS. 9 and 10).
  • the holding member and the electrode are (1) The opening of the holding member and the electrode are arranged so as to face each other, or (2) It is preferable that at least one of the holding member and the electrode is movable so that the opening of the holding member and the electrode face each other.
  • the electrostatic attraction can be more effectively applied to the pellicle film at the time of demounting, so that the pellicle film can be more easily demounted by the electrostatic attraction.
  • the aspect (1) means that the opening of the holding member and the electrode are always opposed to each other.
  • the embodiment (1) is not limited to the case where the holding member and the electrode are fixedly arranged, and at least one of the holding member and the electrode is movable so that the distance between the holding member and the electrode changes. Is also included.
  • at least one of the holding member and the electrode is movable, so that the opening of the holding member and the electrode face each other, and the opening of the holding member and the electrode do not face each other. It means an aspect in which both of the above can be taken.
  • a transport member capable of transporting the laminated body while holding the laminated body is used as the holding member, and the transport member is both arranged to face the electrode and not opposed to the electrode.
  • the area of the electrode is preferably larger than the area of the opening.
  • the entire self-supporting portion of the pellicle film can be pulled toward the electrode and demounted, so that contamination of the photomask can be suppressed more effectively.
  • the size of the opening is a rectangle (including a square) of 6 inches or more x 6 inches or more.
  • the pellicle demounting device is provided with the opening in the aspect of (1) or (2) above, and further between the opening and the electrode facing each other (that is, in the aspect of (2) above). It is preferable that a film transporting means for running the resin film is further provided between the opening and the electrode when the electrodes are opposed to each other.
  • the pellicle film and / or the pellicle film piece can be dropped onto the resin film from the opening by demounting, and the pellicle film and / or the pellicle film piece can be recovered by running the resin film. Therefore, it is possible to more efficiently demount the pellicle film while suppressing contamination of the photomask.
  • Two-roll system that can continuously convey film, A sheet-fed method or the like in which films are transported one by one discontinuously can be applied. Above all, the two-roll method is preferable from the viewpoint of demount efficiency.
  • the holding member in the pellicle demounting device preferably includes a pellicle frame fixing member for fixing the pellicle frame. According to this aspect, the displacement of the pellicle frame at the time of demounting the pellicle film can be suppressed.
  • the pellicle demounting device may include other members other than the above-mentioned members, if necessary.
  • the pellicle demounting device according to the present embodiment is not limited to the following three examples.
  • FIG. 9 is a schematic cross-sectional view conceptually showing an example of the pellicle demounting device according to the present embodiment.
  • the pellicle demounting device 800 according to this example has a holding member 820 for holding a laminated body including a photomask 805, a pellicle frame 803, and a pellicle film 802 in this order, and a holding member. It includes an electrode 810 arranged below the 820.
  • the holding member 820 includes a box-shaped housing 822 having an opening OP1, and further includes a pellicle frame fixing pin 824 as a pellicle frame fixing member.
  • the holding member 820 holds the laminated body by these elements while exposing the pellicle film 802 from the opening OP1 in the direction in which the photomask 805 is on the upper side and the pellicle film 802 is on the lower side.
  • the main surface and side surfaces of the photomask 805 on which the pellicle is not mounted are surrounded by a housing 822.
  • the holding member 820 holds the laminated body by fixing the pellicle frame 803 in the laminated body with the pellicle frame fixing pin 824.
  • One end of the pellicle frame fixing pin 824 is connected to the inner surface of the housing 822.
  • the other end of the pellicle frame fixing pin 824 fixes the pellicle frame 803.
  • the fixing method is not particularly limited, and examples thereof include a method of inserting or hooking the other end of the pellicle frame fixing pin 824 into a recess or a notch (not shown) provided on the outer peripheral surface of the pellicle frame 803.
  • the holding member 820 is movable in the horizontal direction H1.
  • both the arrangement in which the opening OP1 of the holding member and the electrode 810 face each other and the arrangement in which the opening OP1 of the holding member and the electrode 810 do not face each other can be adopted.
  • the holding member 820 can also move in the vertical direction V1 (that is, the direction of gravity G and the opposite direction).
  • the electrode 810 is also movable in the vertical direction V2 (that is, the direction of gravity G and vice versa). With these configurations, the electrostatic attraction acting on the pellicle film 802 can be adjusted by adjusting the distance (that is, the gap) between the electrode 810 and the pellicle film 802 at the time of demounting.
  • the electrode 810 is connected to a power supply (not shown) for applying a voltage to the electrode 810.
  • a power supply not shown
  • an electrostatic chuck as a member including the electrode can also be used.
  • the area of the electrode 810 is larger than the area of the opening OP1 in the holding member 820 (specifically, the housing 822). As a result, the entire self-supporting portion of the pellicle film 802 can be pulled toward the electrode 810 and demounted, so that contamination of the photomask can be suppressed more effectively.
  • the holding member 820 holds the laminated body as described above. This operation may be performed in an arrangement in which the opening OP1 of the holding member and the electrode 810 do not face each other.
  • the holding member 820 is moved in the horizontal direction H1 and adjusted so that the opening OP1 of the holding member and the electrode 810 face each other.
  • a voltage is supplied to the electrode 810 from a power source (not shown) to generate an electrostatic attraction.
  • the gap between the electrode 810 and the pellicle film 802 is adjusted to adjust the generated electrostatic attraction.
  • the pellicle film 802 is attracted toward the electrode 810 by electrostatic attraction. At this time, the pellicle film 802 may be destroyed by the electrostatic attraction. The pellicle film piece due to the destruction of the pellicle film 802 or the pellicle film 802 is attracted to the electrode 810. As a result, the pellicle film 802 or the pellicle film piece is demounted in the direction away from the photomask 805, so that the adsorption (that is, contamination) of the pellicle film on the photomask is suppressed. In this example, since the electrode is arranged under the pellicle film 802, the pellicle film 802 or the pellicle film piece is also attracted to the electrode 810 by gravity.
  • the pellicle film 802 is demounted from the photomask 805 in the laminated body. Then, if necessary, the pellicle frame 803 is demounted from the photomask 805 by a conventional method.
  • FIG. 10 is a schematic cross-sectional view conceptually showing another example of the pellicle demounting device according to the present embodiment.
  • the structure of the pellicle demounting device 840 shown in FIG. 10 is similar to the structure of the pellicle demounting device 800 in FIG. 8 except that the structure of the holding member for holding the laminated body is different. Therefore, according to the pellicle demounting device 840, the same effect as that of the pellicle demounting device 800 is obtained.
  • the holding member 830 in the pellicle demounting device 840 includes the housing 832 and does not include the pellicle frame fixing pin.
  • the housing 832 is common to the housing 833 (FIG. 8) in that it has a box shape having an opening OP2, but the housing 833 (FIG. 8) has a convex portion 833 that determines the opening OP2. It is different from 8).
  • the holding member 830 in the pellicle demounting device 840 holds the laminated body by supporting the photomask 805 by the convex portion 833. Also in the pellicle demounting device 840, the area of the electrode 810 is larger than the area of the opening OP2 in the holding member 830 (specifically, the housing 832).
  • FIG. 11 is a schematic cross-sectional view conceptually showing another example of the pellicle demounting device according to the present embodiment.
  • the structure of the pellicle demounting device 860 shown in FIG. 11 is the same as the structure of the pellicle demounting device 840 in FIG. 8 except for the following points. Therefore, according to the pellicle demounting device 860, the same effect as that of the pellicle demounting devices 800 and 840 is obtained.
  • the pellicle demounting device 860 shown in FIG. 11 has a film transporting means (specifically, a two-roll transporting method) for running the resin film F1 between the openings OP2 and the electrodes 810 facing each other.
  • a film feeding device R1 and a film winding device R2) for transporting the film are further provided.
  • the pellicle film demounted from the photomask is collected on the resin film F1. Therefore, it is possible to more efficiently demount the pellicle film while suppressing contamination of the photomask.
  • An adhesive layer may be formed on the side of the resin film F1 facing the opening OP2. This makes it easier to recover the pellicle membrane.
  • the pellicle demounting device 860 includes a partition member 850 on the upstream side in the resin film transport direction with respect to the holding member 830 and the electrode 810.
  • the partition member 850 has an opening through which the resin film passes.
  • the pellicle demounting device 860 includes a partition member 851 on the downstream side in the resin film transport direction with respect to the holding member 830 and the electrode 810.
  • the partition member 851 also has an opening through which the resin film passes.
  • the demounting area is determined as the area between the partition members 850 and 851.
  • Example 1 The pellicle was demounted by carrying out each of the following steps. Details will be shown below.
  • the pellicle was pressed against the light-shielding film layer side of the photomask including the light-shielding film layer in a direction in which the light-shielding film layer side of the photomask and the mask adhesive layer of the pellicle were in contact with each other for 30 seconds with a load of 98N. As a result, the pellicle was mounted on the photomask to obtain a laminated body.
  • An electrostatic chuck (specifically, an 8-inch electrostatic chuck manufactured by NGK Spark Plug Co., Ltd.) was prepared as a member including an electrode.
  • ⁇ Demount process> The laminate was suspended and fixed to a Z-axis driven suspension type precision stage (hereinafter, also referred to as “suspended type Z drive stage”) so that the pellicle film faces downward.
  • the electrostatic chuck was placed below the suspended and fixed laminate. That is, the laminate and the electrostatic chuck were arranged so that the pellicle film in the laminate and the electrode in the electrostatic chuck face each other. At this time, the surface of the pellicle film and the surface of the electrode were made parallel to each other, and the distance between the two was adjusted to be 50 mm.
  • a resin film (specifically, PET film manufactured by Toray Industries, Inc., trade name; Lumirror (registered trademark), thickness 50 ⁇ m) was placed on the electrostatic chuck.
  • a voltage of 800 V is applied to the electrodes of the electrostatic chuck for 1 minute to generate an electrostatic attraction (that is, horizontal holding force) of about 7 gf / cm 2 (that is, 68.6 mN / cm 2).
  • the PET film was adsorbed on the electrostatic chuck.
  • the laminated body suspended and fixed to the suspended Z drive stage was slowly moved downward, and the pellicle film in the laminated body was brought into contact with the PET film arranged on the electrostatic chuck.
  • the laminate is slowly moved upward to break the pellicle film, and the broken pellicle film is placed on the PET film arranged on the electrostatic chuck by electrostatic attraction. Was adsorbed on.
  • the pellicle film was demounted from the photomask.
  • the second laminate remaining by demounting the pellicle film (that is, the laminate including the photomask, the mask adhesive layer, and the pellicle frame) is placed on the hot plate in the direction in which the photomask and the hot plate come into contact with each other.
  • the second laminate was placed and heated at about 70 ° C. for 5 minutes. As a result, the adhesive strength of the mask adhesive layer was reduced.
  • the pellicle frame was demounted from the second laminated body using a lever with a handling hole provided on the outer peripheral surface of the pellicle frame as an action point.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
PCT/JP2020/046072 2019-12-13 2020-12-10 ペリクルのデマウント方法、及び、ペリクルのデマウント装置 WO2021117817A1 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
EP20900204.7A EP4033302A4 (en) 2019-12-13 2020-12-10 FILM DISASSEMBLY METHOD AND FILM DISASSEMBLY DEVICE
CN202080076341.0A CN114641724A (zh) 2019-12-13 2020-12-10 防护膜组件的拆卸方法及防护膜组件的拆卸装置
KR1020227015795A KR20220079655A (ko) 2019-12-13 2020-12-10 펠리클의 디마운팅 방법, 및 펠리클의 디마운팅 장치
US17/770,163 US20220390829A1 (en) 2019-12-13 2020-12-10 Pellicle demounting method, and pellicle demounting device
JP2021564032A JP7204009B2 (ja) 2019-12-13 2020-12-10 ペリクルのデマウント方法、及び、ペリクルのデマウント装置

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US11822230B2 (en) * 2020-07-24 2023-11-21 Taiwan Semiconductor Manufacturing Company, Ltd. EUV pellicle and mounting method thereof on photo mask

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JPS6057841A (ja) * 1983-09-09 1985-04-03 Hitachi Ltd 異物固定方法及び装置
JPS6395644A (ja) 1986-10-13 1988-04-26 Nippon Telegr & Teleph Corp <Ntt> 静電チヤツク
JPH04206545A (ja) 1990-11-30 1992-07-28 Hitachi Ltd 保持装置およびそれを用いた半導体製造装置
JPH0536819A (ja) 1991-07-30 1993-02-12 Kyocera Corp 静電チヤツク
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US20220390829A1 (en) 2022-12-08
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TW202122912A (zh) 2021-06-16
EP4033302A4 (en) 2023-10-04
JPWO2021117817A1 (ko) 2021-06-17
EP4033302A1 (en) 2022-07-27

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