WO2020230360A1 - 真空処理装置用のキャンローラ - Google Patents
真空処理装置用のキャンローラ Download PDFInfo
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- WO2020230360A1 WO2020230360A1 PCT/JP2019/051374 JP2019051374W WO2020230360A1 WO 2020230360 A1 WO2020230360 A1 WO 2020230360A1 JP 2019051374 W JP2019051374 W JP 2019051374W WO 2020230360 A1 WO2020230360 A1 WO 2020230360A1
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- roller
- cylinder body
- outer cylinder
- inner cylinder
- gap
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
Definitions
- the present invention is provided in a vacuum processing apparatus that applies a predetermined vacuum treatment to the surface of a sheet-shaped base material while running the sheet-shaped base material in a vacuum chamber, facing the processing unit to be subjected to the vacuum treatment.
- a vacuum vapor deposition apparatus provided with a can roller of the above type is known, for example, in Patent Document 1.
- a sheet-shaped base material is continuously fed from a feeding roller in a vacuum chamber capable of forming a vacuum atmosphere, and the fed base material is wound around a can roller, and the sheet wound around the can roller.
- a predetermined vacuum treatment is performed on the portion of the shaped base material by a processing unit provided facing the portion, and the treated sheet-shaped base material is wound up by a winding roller.
- the can roller includes a shaft body, an inner cylinder body externally inserted into the shaft body, an outer cylinder body that surrounds the outer cylinder surface of the inner cylinder body with a gap, and an axial direction of the inner cylinder body and the outer cylinder body.
- a cover body that closes both ends thereof is provided, and the shaft body of the can roller is pivotally supported by a wall surface of the vacuum chamber or a support provided in the vacuum chamber via a bearing.
- the can roller and the sheet-shaped base material wrapped around the can roller may receive heat due to radiant heat from the processing unit.
- a cooling mechanism such as a cooling water circulation system is provided inside the can roller to cool the can roller, and the sheet-shaped base material is not heated above a predetermined temperature by heat exchange with the cooled can roller. I am doing it.
- the cooling water is supplied to the gap between the inner cylinder and the outer cylinder from one of the axially covering bodies, and the cooling water is discharged from the other axially covering body.
- the cover body is provided with a flow path for cooling water.
- the total amount (volume) of the cooling water flowing through the cover body is small in consideration of the adverse effect when the can roller is rotationally driven.
- the flow path provided in the cover body is a portion that does not contribute to heat exchange with the sheet-shaped base material, it is necessary to configure the cover body so as not to cause an increase in the size of the can roller. If the area of the flow path is large, the heat absorption or heat dissipation area is widened, and the heat exchange rate with the sheet-shaped base material is lowered. Therefore, it is necessary to suppress this as much as possible.
- a vacuum processing apparatus that applies a predetermined vacuum treatment to the surface of a sheet-shaped base material while running it in a vacuum chamber is provided so as to face the processing unit that performs the vacuum treatment.
- the rotatable can roller for the vacuum processing apparatus of the present invention around which the sheet-shaped base material is wound has a gap between the shaft body and the inner cylinder body externally inserted into the shaft body, and is outside the inner cylinder body. It is provided with an outer cylinder that surrounds the cylinder surface and a cover that closes both ends of the inner cylinder and the outer cylinder in the axial direction, and each cover has a plurality of flow paths and is provided along the axial direction.
- the cross section of the flow path overlaps the cross section of the cover body, and the cross-sectional area of the gap between the inner cylinder body and the outer cylinder body communicating with each flow path is set to a size that allows a predetermined flow velocity to be obtained.
- a configuration may be adopted in which the respective flow paths are arranged at equal intervals in the circumferential direction and extend in the radial direction. Further, on the outer peripheral side portion of the cover body, a recess portion that is recessed inward in the radial direction at a depth larger than the gap is formed over the entire circumferential direction, and the recessed portion is formed through the recessed portion with each of the flow paths.
- a configuration may be adopted in which the gaps communicate with each other. In this case, it is preferable that the gap is provided with a fluid that is positioned between the respective flow paths adjacent to each other and extends in the axial direction.
- the cross section of the flow path along the axial direction overlaps the cross section of the cover body, that is, the cross section of the flow path exists inside the cross section of the cover body, so that the cover body including the flow path can be formed. It is possible to prevent the can roller itself from becoming large in the axial direction, and the specific cross section of each flow path can be reduced by dividing the flow path into a plurality of flow paths, so that the cooling water flowing through the cover body can be reduced. The total amount can be reduced, and the heat absorption or heat dissipation area in each flow path can be reduced, so that a decrease in the heat exchange rate with the sheet-shaped base material via the outer cylinder can be suppressed as much as possible.
- the temperature distribution of the fluid in the above can be suppressed as small as possible, and it is possible to suppress the occurrence of a relatively large temperature distribution in the length direction and the width direction of the sheet-like base material. This is because the cross-sectional area of the fluid flow path partitioned by the ridges is small (squeezed), so that a certain flow velocity is secured for the fluid flowing through the flow path and the heat transfer coefficient is improved. However, this complicates the structure of the inner cylinder and leads to high product cost.
- the fluid when a fluid having a predetermined temperature is supplied to an inflow passage extending from one axial direction to the other along the axial body in the inner cylinder, the fluid communicates with the inflow passage in the axial direction.
- a fluid is supplied to each flow path (first flow path) of the cover body (first cover body) located on the side.
- first flow path a plurality of first flow paths extending in the radial direction are arranged at equal intervals in the circumferential direction
- the fluid from the inflow flow path is dispersed and supplied to each first flow path, and each first flow path is supplied.
- the fluid from one flow path can flow into the gap between the inner cylinder and the outer cylinder substantially evenly.
- the fluid flows through the gap to the flow path (second flow path) of the other cover body (second cover body), and is discharged to the outside through the outflow passage in which each second flow path communicates. Will be done.
- the cross-sectional area of the gap is set to a size that allows a flow velocity similar to that of the fluid flowing through the fluid passage partitioned by the ridges. If throttled, the fluids that have flowed in from the first flow path will flow uniformly along the axial direction in the gap, and at that time, the temperature distribution of the fluid flowing through the gap (especially in the axial direction) will be possible. It was confirmed that the temperature difference between the fluid flowing into the gap and the fluid flowing out from the gap can be suppressed to be as small as possible. In this case, it is not necessary to spirally provide the ridges on the outer cylinder surface of the inner cylinder, and the cost of the product can be reduced, which is advantageous.
- the recessed portion when the recessed portion is provided, the recessed portion functions as a liquid pool portion, and in the first cover body, the fluid flowing out from each first flow path once collides with the inner wall of the outer cylinder body and is dispersed in the circumferential direction. By doing so (in other words, the fluid wraps around to a position located in the middle of the first flow path adjacent to each other), the fluid flows from substantially the entire circumferential direction to the gap between the inner cylinder and the outer cylinder.
- the second cover body the fluid that has flowed uniformly through the gap is once received, and then flows out to each second flow path, so that the temperature distribution of the fluid flowing through the gap in the circumferential direction is reached. Can be suppressed as small as possible.
- the split fluid does not need to be completely separated in the circumferential direction, and is separated by, for example, a plate or wire having a predetermined plate thickness or wire diameter attached to the outer cylinder surface of the inner cylinder.
- a fluid can be constructed.
- FIG. 2 is an enlarged cross-sectional view showing a part of FIG. (A) and (b) are a partially enlarged cross-sectional view and a partially enlarged perspective view of the can roller according to the modified example.
- the vacuum of the present invention is taken as an example in which a predetermined thin film is vapor-deposited (deposited) on a sheet-shaped base material Sw wound around a can roller CR using a processing unit as a vapor deposition source.
- An embodiment of the can roller CR for the processing device will be described.
- the can roller CR is housed in the vacuum chamber Vc in a posture in which the axial direction of the can roller CR coincides with the horizontal direction, and the axial direction is set to the X axis direction and the X axis in the same horizontal plane.
- the orthogonal direction is the Y-axis direction
- the X-axis and the vertical direction orthogonal to the Y-axis are the Z-axis directions, and the directions such as "up” and "down” are based on FIG.
- the vacuum processing apparatus Dm including the can roller CR of the present embodiment includes a vacuum chamber Vc.
- a vacuum pump unit Pu composed of a turbo molecular pump, a rotary pump, or the like is connected to the vacuum chamber Vc via an exhaust pipe Ep so that a vacuum atmosphere (for example, 10-5 Pa) can be formed.
- the vacuum chamber Vc is divided into two upper and lower chambers by a partition plate Sp, and one of the chambers (deposited chamber Vs) located on the lower side in FIG. 1 is provided with a vapor deposition source Es as a processing unit. ..
- the vapor deposition source Es one provided with a ⁇ ⁇ Ev accommodating the vapor deposition material Em and a heating means Eh such as a sheath heater for heating the vapor deposition material Em housed in the ⁇ ⁇ Ev is used, and is housed in the ⁇ ⁇ Ev by heating.
- the vaporized material Em is sublimated or vaporized, and the sublimated or vaporized vaporized particles are adhered to and deposited on a sheet-shaped base material Sw wound around the can roller CR to be deposited (deposited).
- the vapor deposition source Es is not limited to this, and a sputtering method or a CVD method can be used. Since known sources can be used, further description thereof will be omitted.
- a sheet-shaped base material Sw is wound around the other chamber (transport chamber Ts) located on the upper side in FIG. 1, and is rotationally driven by a motor (not shown) to drive the sheet-shaped base material Sw at a constant traveling speed.
- a feeding roller Rr for feeding the material and a winding roller Ru for winding the sheet-shaped base material Sw on which the film has been formed are provided.
- the can roller CR of the present embodiment in which the sheet-shaped base material Sw is wound so as to face the vapor deposition source Es is arranged.
- Gr is a guide roller.
- the canroller CR has an outer cylinder 1 that surrounds the outer cylinder surface of the inner cylinder 2 with a gap Ds and an inner cylinder 2 that is externally inserted into the shaft body 1. It comprises a tubular member 3, an inner cylindrical body 2 and the first and second respective cover the X-axis direction at both ends of the outer cylinder 3 respectively closed 4 1, 4 2.
- shaft 1 In from each cover member 4 1, 4 2 parts of the shaft 1 which protrudes to the outside, one end of shaft 5 of the respective fixed hollow extrapolated to the cover member 4 1, 4 2, shaft 5 is pivotally supported via a bearing 51 on a wall surface of a vacuum chamber Vc (not shown) or a support provided in the vacuum chamber Vc.
- An internal passage 11 is formed in the shaft body 1 as an inflow passage extending in the Y-axis direction, and one end (right side in FIG. 2) of the internal passage 11 is a water absorption pipe (not shown) leading to a chiller unit (not shown). ), And a fluid such as cooling water appropriately selected according to the vacuum treatment performed in the vacuum chamber Vc is supplied. Furthermore, (in FIG.
- the inner cylinder 2 and the outer cylinder 3 arranged concentrically with each other are made of metal such as stainless steel, so that the bus length (Y-axis direction) of the inner cylinder 2 is shorter than that of the outer cylinder 3. It is sized to.
- the outer diameter of the portion of each cover body 4 1 , 4 2 located inside in the Z-axis direction matches the inner diameter of the inner cylinder 2, and the outer diameter of the portion of each cover body 4 1 , 42 2 located outside in the Z-axis direction is outside.
- the diameter is formed so as to match the inner diameter of the outer cylinder 3, and the cover bodies 4 1 and 4 2 are fitted from both sides in the X-axis direction with the inner cylinder 2 and the outer cylinder 3 arranged concentrically. By wearing it, both ends of the inner cylinder 2 and the outer cylinder 3 in the X-axis direction are closed.
- each cover member 4 1, 4 2 a plurality of flow paths communicating with the central opening 41 and central opening 41 which shaft 1 is inserted (hereinafter, first the cover body 4 the first channel “first passage 42 1", the second respective cover member 4 2 of the flow path of the) as “the second channel 42 2" are provided. As shown in FIGS.
- each flow path 42 1, 42 2 of the cross section along the axial direction overlap each the cross-section of the cover body 4 1, 4 2, i.e., the cover member 4 1, 4 2 a cross-section vision was being adapted passage 42 1, 42 2 of the cross section is inside, also each passage 42 1, 42 2, (in the present embodiment, 45 degrees interval) predetermined intervals in the circumferential direction It is formed so as to extend over the entire length in the radial direction.
- each passage 42 1, 42 2 is circular, a cross-sectional area, as described below, each channel 42 1, 42 2 axial end of the fluid outer cylindrical body 3 flowing out of The fluid is once collided with the inner wall located in the portion and dispersed in the circumferential direction, and is set as small as possible within a range in which the flow rate at which the fluid can flow from substantially the entire circumferential direction can be secured with respect to the gap Ds.
- the specific surface area by each channel 42 1, 42 2 of the cross-sectional shape is circular and straight tube is minimized, minimization of pipeline resistance is realized a structure caused.
- the depth Dp from the outer peripheral surface of the inner cylinder 2 is appropriately set according to the number of branched flow paths 42 1, 42 2 are formed, for example, in the cover body 4 1, 4 2, with respect to the gap Ds It is set to twice or more, preferably four times.
- the fluid is respectively supplied to the first cover body 4 first passage 42 1 each one.
- the first flow path 42 1 is a plurality of equally spaced circumferential direction, that the first cover member 4 1 of the recess 43 on the outer surface is present, from the first flow path 42 1
- the fluid flows into the gap Ds between the inner cylinder 2 and the outer cylinder 3 substantially evenly.
- the fluid then flows into the second cover member 4 2 of the recess 43 through the gap Ds, returns to the chiller unit and flows out from the second flow passage 42 2 to the outlet passage 52.
- the recess 43 functions as a liquid reservoir, once the inner wall in the first cover member 4 1, the fluid flowing from the first flow passage 42 1 is located at the axial end of the outer cylinder 3 by colliding is dispersed in the circumferential direction (in other words, in the fluid from flowing to the point located in the first flow path 42 first intermediate the adjacent) to the gap Ds, fluid from the entire circumferential direction substantially There while flowing, the second cover member 4 2, and is received once the fluid flows uniformly the gap Ds, so that then flows out to the second flow passage 42 2.
- spiral ridges are formed at a pitch of 15 mm on the outer cylinder surface of the inner cylinder having a total length of 3300 mm, and the gap between the inner cylinder and the outer cylinder (corresponding to Ds in the present invention) is 25 mm.
- the outer cylinder is externally inserted so as to be, and a cover body having a branch flow path leading to the inlet and outlet of the fluid flow path between the inner cylinder and the outer cylinder partitioned by the ridge is fitted.
- a can roller was manufactured (comparative product 1).
- the gap Ds between the inner cylinder 2 without the ridge and the outer cylinder 3 is 5 mm so that the speed of the fluid flowing through the gap Ds is the same as that of the comparative product 1.
- the outer cylinder 3 extrapolating was fabricated cover member 4 1, 4 2 in 30 degree intervals can roller CR which the first flow path 42 1 and the second flow passage 42 2 to respectively form (invention).
- a 288K fluid is flowed from one end in the axial direction toward the other end in the gap Ds as a fluid flow path between the inner cylinder 2 and the outer cylinder 3, and the inflow port of the gap Ds is formed.
- each flow path 42 1 along the axial direction, 42 2 of the cross section overlaps the cross section of the cover body 4 1, 4 2, i.e., inside the cover member 4 1, 4 2 and cross section the flow channel 42 1, 42 by the second cross-section is present, prevents the cover member 4 1, 4 2 which includes the channel 42 1, 42 2 can roller CR itself increases in the axial direction becomes large can also because it reduces the specific surface area of the individual flow path by configuring separately the channel 42 1, 42 2 into a plurality of possible to reduce the amount of cooling water flowing through the cover member 4 1, 4 2, moreover , it is possible to suppress the reduction of the heat exchange rate between each channel 42 1, 42 sheet-like base material Sw the heat absorbing or dissipating area through the outer cylinder 3 is smaller in the two as much as possible.
- the temperature distribution in the axial and radial directions of the fluid flowing through the gap Ds is suppressed to be small (that is, the fluid flowing into the gap Ds) without providing the ridges on the outer cylinder surface of the inner cylinder 2 in a spiral shape. Since the temperature difference from the fluid flowing out from the gap Ds becomes small), it is possible to suppress the occurrence of temperature distribution in the length direction and the width direction of the sheet-shaped base material Sw as much as possible.
- the present invention is not limited to those of the above embodiments, and various modifications can be made as long as the gist of the present invention is not deviated.
- the film forming process has been described as an example of the vacuum process, but the present invention can also be applied to other vacuum processes such as heat treatment and etching process.
- cooling water is described as an example as a refrigerant, the present invention is not limited to this, and a sheet-shaped base material Sw is specified while hot water heated to a predetermined temperature is flowed and a predetermined vacuum treatment is performed.
- the present invention can also be applied when the temperature is adjusted to the temperature.
- the gap Ds may be provided in the split member 6 extending in the axial direction is positioned between the branched flow paths 42 1, 42 2 adjacent to each other.
- the split fluid 6 can be made of, for example, a plate material or a wire material having a predetermined plate thickness to be attached to the outer cylinder surface of the inner cylinder body 2.
- the cover member 4 1, 4 2 constituted by a disk-shaped member, the radial direction respective passage 42 1, 42 2 each cover member 4 1, 4 2 in the circumferential direction at predetermined intervals
- a matrix-like flow path structure by joining two plate members with a columnar structure (for example, a honeycomb structure and a part thereof is opened as a flow path).
- CR ... can roller Dm ... vacuum processing device, Es ... vapor deposition source (processing unit), Sw ... sheet-like base material, Vc ... vacuum chamber, 1,5 ... shaft body, 2 ... inner cylinder body, 3 ... outer cylinder Body, Ds ... Gap between inner cylinder 2 and outer cylinder 3, 4 1 , 4 2 ... Cover body, 42 1 , 42 2 ... Branch flow path, 43 ... Recessed part, 6 ... Minute fluid.
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- Physical Vapour Deposition (AREA)
Abstract
Description
Claims (4)
- 真空チャンバ内でシート状の基材を走行させながらその表面に対して所定の真空処理を施す真空処理装置にて、真空処理を施す処理ユニットに対峙させて設けられ、シート状の基材が巻き掛けられる回転自在な真空処理装置用のキャンローラにおいて、
軸体と、軸体に外挿される内筒体と、隙間を存して内筒体の外筒面を囲う外筒体と、内筒体と外筒体の軸方向の両端を夫々閉塞するカバー体とを備え、
各カバー体が複数本の流路を有し、軸方向に沿った各流路の断面がカバー体の断面に重なり、各流路に夫々連通する内筒体と外筒体との隙間の断面積が所定の流速が得られる大きさに設定されることを特徴とする真空処理装置用のキャンローラ。 - 前記各流路が、周方向に等間隔で配置されて径方向にのびるものであることを特徴とする請求項1記載の真空処理装置用のキャンローラ。
- 前記カバー体の外周側部に、前記隙間より大きな深さで径方向内方に向けて窪む窪み部が周方向全体に亘って形成され、この窪み部を介して前記各流路と前記隙間とが互いに連通することを特徴とする請求項1または請求項2記載の真空処理装置用のキャンローラ。
- 前記隙間に、互いに隣接する各流路の間に位置させて軸方向にのびる分流体が設けられることを特徴とする請求項2または請求項3記載の真空処理装置用のキャンローラ。
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CN201980036469.1A CN112236545B (zh) | 2019-05-10 | 2019-12-27 | 真空处理装置用的辊筒 |
US17/604,676 US11434562B2 (en) | 2019-05-10 | 2019-12-27 | Can-roller for vacuum processing apparatus |
KR1020217040543A KR20220007158A (ko) | 2019-05-10 | 2019-12-27 | 진공 처리 장치용 캔 롤러 |
JP2020511829A JP6701468B1 (ja) | 2019-05-10 | 2019-12-27 | 真空処理装置用のキャンローラ |
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JP2002535586A (ja) * | 1999-01-29 | 2002-10-22 | キンバリー クラーク ワールドワイド インコーポレイテッド | 伝熱ローラのための流体分配装置 |
JP2002339950A (ja) * | 2001-05-18 | 2002-11-27 | Mitsubishi Heavy Ind Ltd | 熱処理ロール |
JP2019044272A (ja) * | 2018-11-26 | 2019-03-22 | 住友金属鉱山株式会社 | 長尺フィルムの真空成膜方法及び真空成膜装置 |
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JP4516304B2 (ja) * | 2003-11-20 | 2010-08-04 | 株式会社アルバック | 巻取式真空蒸着方法及び巻取式真空蒸着装置 |
JP5895179B2 (ja) * | 2011-06-15 | 2016-03-30 | パナソニックIpマネジメント株式会社 | 基板搬送ローラ、薄膜製造装置及び薄膜製造方法 |
CN102310083A (zh) * | 2011-09-08 | 2012-01-11 | 江苏鑫皇铝业发展有限公司 | 铸轧机偏导辊冷却水循环装置 |
CN103726021B (zh) * | 2014-01-22 | 2017-02-01 | 温岭市通茂电子装备有限公司 | 一种镀膜机的蒸镀鼓 |
CN207247951U (zh) * | 2017-04-14 | 2018-04-17 | 美塞斯(珠海)工业自动化设备有限公司 | 一种单侧双流向传热辊 |
CN208101039U (zh) * | 2018-03-12 | 2018-11-16 | 河北正洋新材料有限公司 | Pvc装饰膜用压辊 |
CN208118252U (zh) * | 2018-03-26 | 2018-11-20 | 厦门市省力机械有限公司 | 一种冷却滚筒 |
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JP2002535586A (ja) * | 1999-01-29 | 2002-10-22 | キンバリー クラーク ワールドワイド インコーポレイテッド | 伝熱ローラのための流体分配装置 |
JP2002339950A (ja) * | 2001-05-18 | 2002-11-27 | Mitsubishi Heavy Ind Ltd | 熱処理ロール |
JP2019044272A (ja) * | 2018-11-26 | 2019-03-22 | 住友金属鉱山株式会社 | 長尺フィルムの真空成膜方法及び真空成膜装置 |
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