JP6701468B1 - 真空処理装置用のキャンローラ - Google Patents
真空処理装置用のキャンローラ Download PDFInfo
- Publication number
- JP6701468B1 JP6701468B1 JP2020511829A JP2020511829A JP6701468B1 JP 6701468 B1 JP6701468 B1 JP 6701468B1 JP 2020511829 A JP2020511829 A JP 2020511829A JP 2020511829 A JP2020511829 A JP 2020511829A JP 6701468 B1 JP6701468 B1 JP 6701468B1
- Authority
- JP
- Japan
- Prior art keywords
- roller
- vacuum processing
- gap
- sheet
- cylinder body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000012545 processing Methods 0.000 title claims abstract description 31
- 239000000463 material Substances 0.000 claims abstract description 35
- 239000012530 fluid Substances 0.000 claims description 61
- 238000000034 method Methods 0.000 claims description 8
- 230000008569 process Effects 0.000 claims description 6
- 230000002093 peripheral effect Effects 0.000 claims description 3
- 238000004891 communication Methods 0.000 claims description 2
- 238000009826 distribution Methods 0.000 abstract description 14
- 239000000758 substrate Substances 0.000 abstract description 12
- 238000007740 vapor deposition Methods 0.000 description 13
- 239000000498 cooling water Substances 0.000 description 9
- 238000010521 absorption reaction Methods 0.000 description 5
- 230000000052 comparative effect Effects 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 5
- 238000009489 vacuum treatment Methods 0.000 description 4
- 239000010408 film Substances 0.000 description 3
- 230000017525 heat dissipation Effects 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 239000007788 liquid Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 238000005192 partition Methods 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 238000004804 winding Methods 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000003507 refrigerant Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/541—Heating or cooling of the substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Rolls And Other Rotary Bodies (AREA)
Abstract
Description
Claims (4)
- 真空チャンバ内でシート状の基材を走行させながらその表面に対して所定の真空処理を施す真空処理装置にて、真空処理を施す処理ユニットに対峙させて設けられ、シート状の基材が巻き掛けられる回転自在な真空処理装置用のキャンローラにおいて、
軸体と、軸体に外挿される内筒体と、隙間を存して内筒体の外筒面を囲う外筒体と、内筒体と外筒体の軸方向の両端を夫々閉塞するカバー体とを備え、
各カバー体が複数本の流路を有し、軸方向に沿った各流路の断面がカバー体の断面に重なり、各流路に夫々連通する内筒体と外筒体との隙間の断面積が所定の流速が得られる大きさに設定されることを特徴とする真空処理装置用のキャンローラ。 - 前記各流路が、周方向に等間隔で配置されて径方向にのびるものであることを特徴とする請求項1記載の真空処理装置用のキャンローラ。
- 前記カバー体の外周側部に、前記隙間より大きな深さで径方向内方に向けて窪む窪み部が周方向全体に亘って形成され、この窪み部を介して前記各流路と前記隙間とが互いに連通することを特徴とする請求項1または請求項2記載の真空処理装置用のキャンローラ。
- 前記隙間に、互いに隣接する各流路の間に位置させて軸方向にのびる分流体が設けられることを特徴とする請求項2または請求項3記載の真空処理装置用のキャンローラ。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019089657 | 2019-05-10 | ||
JP2019089657 | 2019-05-10 | ||
PCT/JP2019/051374 WO2020230360A1 (ja) | 2019-05-10 | 2019-12-27 | 真空処理装置用のキャンローラ |
Publications (2)
Publication Number | Publication Date |
---|---|
JP6701468B1 true JP6701468B1 (ja) | 2020-05-27 |
JPWO2020230360A1 JPWO2020230360A1 (ja) | 2021-06-03 |
Family
ID=70776061
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2020511829A Active JP6701468B1 (ja) | 2019-05-10 | 2019-12-27 | 真空処理装置用のキャンローラ |
Country Status (3)
Country | Link |
---|---|
US (1) | US11434562B2 (ja) |
JP (1) | JP6701468B1 (ja) |
KR (1) | KR20220007158A (ja) |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7025123B1 (en) * | 1999-01-29 | 2006-04-11 | Kimberly-Clark Worldwide, Inc. | Fluid distribution system for thermal transfer rollers |
JP2002339950A (ja) | 2001-05-18 | 2002-11-27 | Mitsubishi Heavy Ind Ltd | 熱処理ロール |
JP2010163693A (ja) | 2010-04-12 | 2010-07-29 | Ulvac Japan Ltd | 巻取式真空蒸着方法 |
JP6642686B2 (ja) | 2018-11-26 | 2020-02-12 | 住友金属鉱山株式会社 | 長尺フィルムの真空成膜方法 |
-
2019
- 2019-12-27 KR KR1020217040543A patent/KR20220007158A/ko active Search and Examination
- 2019-12-27 JP JP2020511829A patent/JP6701468B1/ja active Active
- 2019-12-27 US US17/604,676 patent/US11434562B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
KR20220007158A (ko) | 2022-01-18 |
US20220145449A1 (en) | 2022-05-12 |
US11434562B2 (en) | 2022-09-06 |
JPWO2020230360A1 (ja) | 2021-06-03 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN104454569B (zh) | 涡轮分子泵 | |
TWI434347B (zh) | 用於化學氣相沉積設備的氣體注入單元 | |
JP2009155723A (ja) | 化学気相蒸着装置 | |
TW201144478A (en) | Apparatus for controlling temperature uniformity of a showerhead | |
US10228198B2 (en) | Multi-disk heat exchanger and fan unit | |
JP6701468B1 (ja) | 真空処理装置用のキャンローラ | |
KR20160140877A (ko) | 주 흐름 방향을 가로질러 연장된 열교환 채널을 갖는 환열기 | |
JPS6045316B2 (ja) | ポンプ・メカニカルシール組立体の多流多路熱交換器 | |
JPH0549029B2 (ja) | ||
WO2020230360A1 (ja) | 真空処理装置用のキャンローラ | |
JP2005085803A (ja) | サセプタ | |
JP6408949B2 (ja) | 成膜装置 | |
TWI613314B (zh) | 成膜裝置及成膜裝置的分隔壁構造體 | |
US11333451B2 (en) | Plate and shell heat exchanging system having a divided manifold tube | |
JP2006225758A (ja) | 真空蒸着装置 | |
JP2009248421A (ja) | シート・フィルム成形ロール及びシート・フィルム成形装置 | |
JP5961260B2 (ja) | マルチベーン型スロットルバルブ | |
TW201734257A (zh) | 用於在塗佈裝置中提供製程氣體之裝置 | |
JP4809788B2 (ja) | 気相成長装置 | |
EP2955469A1 (en) | Baffle suitable for evaporators | |
KR20160014897A (ko) | 막 형성 장치용 롤 | |
JP2006027031A (ja) | 樹脂押出機のシリンダ冷却装置及びシリンダ冷却方法 | |
JP6483866B2 (ja) | 排気熱回収装置 | |
US20070149376A1 (en) | Vacuum cooling roller | |
JPS6314084A (ja) | 流下液膜式蒸発器の製造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20200226 |
|
A871 | Explanation of circumstances concerning accelerated examination |
Free format text: JAPANESE INTERMEDIATE CODE: A871 Effective date: 20200226 |
|
A975 | Report on accelerated examination |
Free format text: JAPANESE INTERMEDIATE CODE: A971005 Effective date: 20200318 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20200414 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20200501 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6701468 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |