WO2020195981A1 - 半導体装置の製造方法、ダイボンディングフィルム、及びダイシング・ダイボンディング一体型接着シート - Google Patents
半導体装置の製造方法、ダイボンディングフィルム、及びダイシング・ダイボンディング一体型接着シート Download PDFInfo
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- WO2020195981A1 WO2020195981A1 PCT/JP2020/011256 JP2020011256W WO2020195981A1 WO 2020195981 A1 WO2020195981 A1 WO 2020195981A1 JP 2020011256 W JP2020011256 W JP 2020011256W WO 2020195981 A1 WO2020195981 A1 WO 2020195981A1
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- Prior art keywords
- die bonding
- bonding film
- epoxy resin
- mass
- adhesive layer
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Images
Classifications
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/52—Mounting semiconductor bodies in containers
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J133/00—Adhesives based on homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by only one carboxyl radical, or of salts, anhydrides, esters, amides, imides, or nitriles thereof; Adhesives based on derivatives of such polymers
- C09J133/04—Homopolymers or copolymers of esters
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J163/00—Adhesives based on epoxy resins; Adhesives based on derivatives of epoxy resins
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J7/00—Adhesives in the form of films or foils
- C09J7/30—Adhesives in the form of films or foils characterised by the adhesive composition
- C09J7/38—Pressure-sensitive adhesives [PSA]
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- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L21/6836—Wafer tapes, e.g. grinding or dicing support tapes
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
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- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L24/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L24/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J2203/00—Applications of adhesives in processes or use of adhesives in the form of films or foils
- C09J2203/326—Applications of adhesives in processes or use of adhesives in the form of films or foils for bonding electronic components such as wafers, chips or semiconductors
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J2301/00—Additional features of adhesives in the form of films or foils
- C09J2301/30—Additional features of adhesives in the form of films or foils characterized by the chemical, physicochemical or physical properties of the adhesive or the carrier
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- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L2221/68327—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support used during dicing or grinding
- H01L2221/68336—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support used during dicing or grinding involving stretching of the auxiliary support post dicing
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L2221/68377—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support with parts of the auxiliary support remaining in the finished device
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
- H01L2224/321—Disposition
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- H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/32225—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/48225—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
- H01L2224/48227—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73251—Location after the connecting process on different surfaces
- H01L2224/73265—Layer and wire connectors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
- H01L2224/8319—Arrangement of the layer connectors prior to mounting
- H01L2224/83191—Arrangement of the layer connectors prior to mounting wherein the layer connectors are disposed only on the semiconductor or solid-state body
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/153—Connection portion
- H01L2924/1531—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface
- H01L2924/15311—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a ball array, e.g. BGA
Definitions
- the present invention relates to a method for manufacturing a semiconductor device, a die bonding film, and a dicing / die bonding integrated adhesive sheet.
- the semiconductor wafer back surface sticking method is a method in which a die bonding film and a dicing tape are stuck on the back surface of the semiconductor wafer, and then the semiconductor wafer, the die bonding film, and a part of the dicing tape are cut in a dicing step.
- a method of attaching a die bonding film on a dicing tape and attaching the die bonding film to a semiconductor wafer has been proposed (see, for example, Patent Documents 1 to 4).
- the number of stacked chips in a package has been increasing for the purpose of increasing the storage capacity per package.
- a semiconductor wafer having a thickness of 30 ⁇ m or less is manufactured. If the semiconductor wafer is made thin, the semiconductor wafer is liable to crack in the dicing process, which may significantly reduce the manufacturing efficiency.
- a modified layer is formed by irradiating the inside of the semiconductor wafer on the planned cutting line with a laser beam, and then the outer peripheral portion is expanded to individualize the semiconductor wafer.
- a method of clearing is known (see, for example, Patent Document 5). Stealth dicing is expected to improve manufacturing efficiency because it has the effect of reducing defects such as chipping even when the thickness of the semiconductor wafer is relatively thin.
- the dicing film in the dicing / die bonding integrated adhesive sheet is usually flexible and has elasticity, there is a problem that the dicing film is difficult to be divided when the base film is expanded.
- the method for manufacturing the semiconductor device is a die bonding / die bonding integrated bonding method comprising an adhesive layer made of a die bonding film having a breaking elongation at ⁇ 15 ° C. of 5% or less, an adhesive layer, and a base film in this order.
- a step of adhering a semiconductor chip with an agent layer to a support substrate for mounting the semiconductor chip via an adhesive layer is provided.
- the die bonding film contains an epoxy resin, an epoxy resin curing agent, and an epoxy group-containing (meth) acrylic copolymer, and the total content of the epoxy resin and the epoxy resin curing agent is the epoxy resin and the epoxy resin curing. It is 10% by mass or more and less than 30% by mass based on the total amount of the agent and the epoxy group-containing (meth) acrylic copolymer.
- the die bonding film may have a die shear strength at 250 ° C. of 0.7 MPa or more in the cured product of the die bonding film after the die bonding film is thermocompression bonded to a wiring board and cured at 170 ° C. for 3 hours.
- the die bonding film may further contain a silane coupling agent.
- the silane coupling agent may be a silane coupling agent represented by the following general formula (1).
- R is an alkoxy group and n is an integer of 1 to 3.
- the die bonding film may further contain an inorganic filler.
- the content of the inorganic filler may be 25% by mass or more based on the total amount of the die bonding film.
- the content of the epoxy group-containing (meth) acrylic copolymer may be 60% by mass or less based on the total amount of the die bonding film.
- the die bonding film for adhering a semiconductor chip and a support member on which the semiconductor chip is mounted.
- the die bonding film has a breaking elongation at ⁇ 15 ° C. of 5% or less.
- the die bonding film contains an epoxy resin, an epoxy resin curing agent, and an epoxy group-containing (meth) acrylic copolymer, and the total content of the epoxy resin and the epoxy resin curing agent is the epoxy resin. It is 10% by mass or more and less than 30% by mass based on the total amount of the epoxy resin curing agent and the epoxy group-containing (meth) acrylic copolymer.
- the dicing / die bonding integrated adhesive sheet includes an adhesive layer made of the above-mentioned die bonding film, an adhesive layer, and a base film in this order.
- a die bonding film having excellent splittability and a method for manufacturing a semiconductor device using the same is also excellent in terms of die shear strength and embedding property. Further, according to the present invention, a dicing / die bonding integrated adhesive sheet using such a die bonding film is provided.
- FIG. 1 is a schematic cross-sectional view showing an embodiment of a semiconductor device.
- FIG. 2 is a schematic cross-sectional view for explaining an embodiment of a method for manufacturing a semiconductor device, and FIGS. 2 (a), (b), (c), (d), and (e) are steps. It is a schematic cross-sectional view which shows.
- FIG. 3 is a schematic cross-sectional view for explaining an embodiment of a method for manufacturing a semiconductor device, and FIGS. 3 (f), (g), (h), and (i) are schematic cross-sectional views showing each step. It is a figure.
- FIG. 4 is a schematic cross-sectional view showing an embodiment of a dicing / die bonding integrated adhesive sheet.
- the numerical range indicated by using "-" in the present specification indicates a range including the numerical values before and after "-" as the minimum value and the maximum value, respectively.
- the upper limit value or the lower limit value described in one numerical range may be replaced with the upper limit value or the lower limit value of another numerical range described stepwise.
- the upper limit value or the lower limit value of the numerical range may be replaced with the value shown in the examples.
- (meth) acrylate means acrylate or the corresponding methacrylate.
- FIG. 1 is a schematic cross-sectional view showing an embodiment of a semiconductor device.
- the semiconductor chip Wa is adhered to the semiconductor chip mounting support substrate 60 via the adhesive layer 30a (or the cured product of the adhesive layer 30a).
- the semiconductor chip Wa is electrically connected to the semiconductor chip mounting support substrate 60 by a wire bond 70.
- the semiconductor chip Wa is resin-sealed by the resin encapsulant 80 on the surface 60a of the semiconductor chip mounting support substrate 60.
- Solder balls 90 may be formed on the surface of the semiconductor chip mounting support substrate 60 opposite to the surface 60a for electrical connection with the external substrate (motherboard).
- the semiconductor chip for example, a general semiconductor chip such as an IC, LSI, or VLSI can be used.
- the support substrate for mounting a semiconductor chip for example, a lead frame having a die pad, a ceramic substrate, an organic substrate, or the like can be used without being limited to the substrate material.
- the ceramic substrate include an alumina substrate and an aluminum nitride substrate.
- the organic substrate include an FR-4 substrate in which an epoxy resin is impregnated in a glass cloth, a BT substrate in which a bismaleimide-triazine resin is impregnated, a polyimide film substrate using a polyimide film as a substrate, and the like. ..
- the wiring provided on the semiconductor chip mounting support substrate may be either single-sided wiring, double-sided wiring, or multi-layer wiring, and if necessary, a through hole electrically connected to the semiconductor chip mounting support substrate. Alternatively, a non-through hole may be provided. Further, when the wiring is arranged outside the semiconductor device, a protective resin layer may be provided.
- the method for manufacturing a semiconductor device of one embodiment is a dicing die bonding in which an adhesive layer made of a die bonding film having a breaking elongation at ⁇ 15 ° C. of 5% or less, an adhesive layer, and a base film are provided in this order.
- a step of preparing an integrated adhesive sheet (dicing / die bonding integrated adhesive sheet preparation step), a step of preparing a semiconductor wafer and forming a modified layer on the semiconductor wafer (a modified layer forming step), and dicing.
- FIG. 4 is a schematic cross-sectional view showing an embodiment of a dicing / die bonding integrated adhesive sheet.
- the dicing / die bonding integrated adhesive sheet 1 includes an adhesive layer 30, an adhesive layer 20, and a base film 10 in this order.
- the die bonding film constituting the adhesive layer 30 is thermosetting, and can be in a semi-cured (B stage) state and then in a completely cured product (C stage) state after the curing treatment.
- the die bonding film has a breaking elongation of 5% or less at -15 ° C.
- the elongation at break of the die bonding film at ⁇ 15 ° C. may be 4.5% or less, 4% or less, or 3.5% or less.
- the elongation at break of the die bonding film at ⁇ 15 ° C. may be, for example, 0.5% or more.
- the elongation at break at ⁇ 15 ° C. means a numerical value measured by the method described in Examples.
- the die bonding film contains an epoxy resin (hereinafter, may be referred to as "(A) component”), an epoxy resin curing agent (hereinafter, may be referred to as “(B) component”), and an epoxy group (meth). ) Acrylic copolymer (hereinafter, may be referred to as “component (C)”).
- the die bonding film may further contain an inorganic filler (hereinafter, may be referred to as "(D) component”), and may further contain a silane coupling agent (hereinafter, may be referred to as "(E) component”). ) May be further contained. By adjusting the type and content of these components, the elongation at break of the die bonding film at ⁇ 15 ° C. can be adjusted.
- Component (A) Epoxy resin
- the component (A) is a component having a property of forming a three-dimensional bond between molecules and being cured by heating or the like, and is a component that exhibits an adhesive action after curing.
- the component (A) can be used without particular limitation as long as it has an epoxy group in the molecule.
- the component (A) may have two or more epoxy groups in the molecule.
- component (A) examples include bisphenol A type epoxy resin, bisphenol F type epoxy resin, bisphenol S type epoxy resin, phenol novolac type epoxy resin, cresol novolac type epoxy resin, bisphenol A novolak type epoxy resin, and bisphenol F novolac type.
- the component (A) may be a cresol novolac type epoxy resin, a bisphenol type epoxy resin, or a dicyclopentadiene type epoxy resin from the viewpoint of film tackiness, flexibility, and the like.
- the epoxy equivalent of the component (A) is not particularly limited, but may be 90 to 300 g / eq, 110 to 290 g / eq, or 130 to 280 g / eq.
- the breaking elongation of the die bonding film tends to be adjusted to be lower.
- the final die-bonded film tends to be more stress-concentrated and more likely to split during expansion.
- the content of the component (A) may be 1 to 30% by mass based on the total amount of the die bonding film.
- the content of the component (A) may be 2% by mass or more, 3% by mass or more, or 5% by mass or more, based on the total amount of the die bonding film, 20% by mass or less, 15% by mass or less, or 10%. It may be mass% or less.
- the component (B) may be, for example, a phenol resin that can be a curing agent for the epoxy resin.
- the phenol resin can be used without particular limitation as long as it has a phenolic hydroxyl group in the molecule.
- examples of the phenol resin include phenols such as phenol, cresol, resorcin, catechol, bisphenol A, bisphenol F, phenylphenol and aminophenol, and / or naphthols such as ⁇ -naphthol, ⁇ -naphthol and dihydroxynaphthalene, and formaldehyde and the like.
- Phenols such as novolak-type phenol resin, allylated bisphenol A, allylated bisphenol F, allylated naphthalenediol, phenol novolac, and phenol obtained by condensing or co-condensing with a compound having an aldehyde group of
- a phenol aralkyl resin synthesized from naphthols and dimethoxyparaxylene or bis (methoxymethyl) biphenyl, a naphthol aralkyl resin, a biphenyl aralkyl type phenol resin, a phenyl aralkyl type phenol resin and the like can be mentioned. These may be used individually by 1 type or in combination of 2 or more type.
- the hydroxyl group equivalent of the phenol resin may be 40 to 300 g / eq, 70 to 290 g / eq, or 100 to 280 g / eq.
- the hydroxyl group equivalent of the phenol resin is 40 g / eq or more, the storage elastic modulus of the film tends to be further improved, and when it is 300 g / eq or less, it is possible to prevent problems due to the generation of foaming, outgas, etc. ..
- the ratio of the epoxy equivalent of the component (A) to the hydroxyl equivalent of the phenol resin is 0.30 / 0.70 to 0.70 from the viewpoint of curability. /0.30, 0.35 / 0.65 to 0.65 / 0.35, 0.40 / 0.60 to 0.60 / 0.40, or 0.45 / 0.55 to 0.55 / It may be 0.45.
- the equivalent amount ratio is 0.30 / 0.70 or more, more sufficient curability tends to be obtained.
- the equivalent equivalent ratio is 0.70 / 0.30 or less, it is possible to prevent the viscosity from becoming too high, and it is possible to obtain more sufficient fluidity.
- the content of the component (B) may be 1 to 30% by mass based on the total amount of the die bonding film.
- the content of the component (B) may be 2% by mass or more, 3% by mass or more, or 5% by mass or more, based on the total amount of the die bonding film, 20% by mass or less, 15% by mass or less, or 10%. It may be mass% or less.
- the total content of the component (A) and the component (B) may be 25% by mass or less based on the total amount of the die bonding film.
- the total content of the component (A) and the component (B) may be 20% by mass or less, 18% by mass or less, or 15% by mass or less based on the total amount of the die bonding film.
- the total content of the component (A) and the component (B) may be 3% by mass or more, 5% by mass or more, or 7% by mass or more based on the total amount of the die bonding film.
- the (meth) acrylic copolymer means a polymer containing a structural unit derived from a (meth) acrylic acid ester.
- the epoxy group-containing (meth) acrylic copolymer is a polymer containing a structural unit derived from a (meth) acrylic acid ester having an epoxy group as a structural unit.
- the (meth) acrylic copolymer may be an acrylic rubber such as a copolymer of (meth) acrylic acid ester and acrylic nitrile. These may be used individually by 1 type or in combination of 2 or more type.
- the glass transition temperature (Tg) of the component (C) may be ⁇ 50 to 50 ° C. or ⁇ 30 to 20 ° C.
- Tg of the acrylic resin is ⁇ 50 ° C. or higher, the tackiness of the die bonding film is lowered, so that the handleability tends to be further improved.
- Tg of the acrylic resin is 50 ° C. or lower, the fluidity of the adhesive composition when forming the die bonding film tends to be more sufficiently secured.
- the glass transition temperature (Tg) of the component (C) means a value measured using a DSC (thermal differential scanning calorimeter) (for example, "Thermo Plus 2" manufactured by Rigaku Co., Ltd.).
- the weight average molecular weight (Mw) of the component (C) may be 50,000 to 1.2 million, 100,000 to 1.2 million, or 300,000 to 900,000. When the weight average molecular weight of the component (C) is 50,000 or more, the film forming property tends to be better. When the weight average molecular weight of the component (C) is 1.2 million or less, the fluidity of the adhesive composition when forming the die bonding film tends to be more excellent.
- the weight average molecular weight (Mw) is a value measured by gel permeation chromatography (GPC) and converted using a calibration curve using standard polystyrene.
- the measuring device, measuring conditions, etc. of the weight average molecular weight (Mw) of the component (C) are as follows.
- the total content of the component (A) and the component (B) is 10% by mass or more and less than 30% by mass based on the total amount of the component (A), the component (B), and the component (C).
- the die bonding film is broken. There is a tendency for the elongation to be adjusted low. As a result, the final die-bonded film tends to be more stress-concentrated and more likely to split during expansion.
- the die bonding film is wired.
- the cured product of the die bonding film after thermocompression bonding to the substrate and curing at 170 ° C. for 3 hours tends to show higher die shear strength.
- the total content of the component (A) and the component (B) is 28% by mass or less, 25% by mass or less, and 22% by mass based on the total amount of the component (A), the component (B), and the component (C).
- the following, or 20% by mass or less may be 12% by mass or more, or 15% by mass or more.
- the content of the component (C) may be more than 70% by mass and 90% by mass or less based on the total amount of the component (A), the component (B), and the component (C).
- the content of the component (C) exceeds 70% by mass based on the total amount of the component (A), the component (B), and the component (C)
- the die bonding film is thermocompression bonded to the wiring board and molded.
- the step of the substrate is easily embedded.
- the breaking elongation of the die bonding film can be adjusted to be low. I tend to be able to do it.
- the content of the component (C) is 72% by mass or more, 75% by mass or more, 78% by mass or more, or 80% by mass or more based on the total amount of the component (A), the component (B), and the component (C). It may be 88% by mass or less or 85% by mass or less.
- the content of the component (C) may be 60% by mass or less based on the total amount of the die bonding film.
- the breaking elongation of the die bonding film tends to be adjusted to be lower.
- the final die-bonded film tends to be more stress-concentrated and more likely to split during expansion.
- the content of the component (C) may be 58% by mass or less based on the total amount of the die bonding film.
- the content of the component (C) may be 35% by mass or more, 40% by mass or more, or 45% by mass or more based on the total amount of the die bonding film.
- Component (D) Inorganic filler
- the component (D) include aluminum hydroxide, magnesium hydroxide, calcium carbonate, magnesium carbonate, calcium silicate, magnesium silicate, calcium oxide, magnesium oxide, aluminum oxide, aluminum nitride, and the like.
- examples thereof include aluminum borate whisker, boron nitride, crystalline silica, and amorphous silica. One of these may be used alone, or two or more thereof may be used in combination. Of these, component (D) may be silica.
- the average particle size of the component (D) may be 0.1 to 1.0 ⁇ m.
- the average particle size of the component (D) may be 0.2 ⁇ m or more, 0.3 ⁇ m or more, or 0.4 ⁇ m or more, and may be 0.9 ⁇ m or less, 0.8 ⁇ m or less, or 0.7 ⁇ m or less.
- the average particle size means a value obtained by converting from the BET specific surface area.
- the shape of the component (D) may be spherical.
- the spherical shape is a concept including a true spherical shape.
- the component (D) may be surface-treated with a surface treatment agent from the viewpoint of compatibility between the surface and the solvent, other components and the like, and adhesive strength.
- a surface treatment agent include a silane-based coupling agent and the like.
- the functional group of the silane coupling agent include a vinyl group, a (meth) acryloyl group, an epoxy group, a mercapto group, an amino group, a diamino group, an alkoxy group, an ethoxy group and the like.
- the content of the component (D) may be 25% by mass or more based on the total amount of the die bonding film.
- the breaking elongation of the die bonding film tends to be adjusted to be lower.
- the final die-bonded film tends to be more stress-concentrated and more likely to split during expansion.
- the content of the component (D) may be 26% by mass or more or 28% by mass or more based on the total amount of the die bonding film.
- the content of the component (D) may be 50% by mass or less, 45% by mass or less, or 40% by mass or less based on the total amount of the die bonding film.
- the total content of the components (A), (B), and (C) is 75% by mass or less based on the total amount of the die bonding film. , 74% by mass or less, or 72% by mass or less, and may be 50% by mass or more, 55% by mass or more, or 60% by mass or more.
- the mass ratio of the component (D) to the component (C) is 0.30 or more, 0.35 or more, 0.40 or more, 0.45 or more, or. It may be 0.50 or more.
- the mass ratio of the component (D) to the component (C) is 0.30 or more, the breaking elongation of the die bonding film can be adjusted to be low. It is in. As a result, the final die-bonded film tends to be more stress-concentrated and more likely to split during expansion.
- the mass ratio of the component (D) to the component (C) may be, for example, 0.80 or less, 0.70 or less, or 0.60 or less. ..
- Component (E) Silane coupling agent
- the component (E) may be a silane coupling agent represented by the following general formula (1).
- R is an alkoxy group such as a methoxy group or an ethoxy group
- n is an integer of 1 to 3.
- silane coupling agent represented by the general formula (1) examples include anilinopropyltrimethoxysilane, anilinopropyltriethoxysilane, anilinoethyltrimethoxysilane, anilinoethyltriethoxysilane, and anilinomethyltri. Examples thereof include methoxysilane and anilinomethyltriethoxysilane.
- the component (E) may contain a silane coupling agent other than the silane coupling agent represented by the general formula (1).
- a silane coupling agent include vinyltrichlorosilane, vinyltriethoxysilane, vinyltris ( ⁇ -methoxyethoxy) silane, ⁇ -methacryloxypropyltrimethoxysilane, and ⁇ - (3,4-epoxycyclohexyl) ethyl.
- the content of the component (E) may be 0.01 to 3.0% by mass based on the total amount of the die bonding film. When the content of the component (E) is in such a range, the interfacial bond between different components tends to be further enhanced.
- the mass ratio of the silane coupling agent represented by the general formula (1) to the total amount of the component (E) is It may be 0.5 or more, 0.6 or more, 0.7 or more, 0.8 or more, or 0.85 or more.
- the die bonding film may further contain a curing accelerator (hereinafter, may be referred to as "component (F)").
- component (F) a curing accelerator
- Component (F) Curing accelerator
- the component (F) include imidazoles and derivatives thereof, organic phosphorus compounds, secondary amines, tertiary amines, quaternary ammonium salts and the like. These may be used individually by 1 type or in combination of 2 or more type.
- the component (F) may be imidazoles and derivatives thereof from the viewpoint of reactivity.
- imidazoles examples include 2-methylimidazole, 1-benzyl-2-methylimidazole, 1-cyanoethyl-2-phenylimidazole, 1-cyanoethyl-2-methylimidazole and the like. These may be used individually by 1 type or in combination of 2 or more type.
- the content of the component (F) may be 0.001 to 1% by mass based on the total amount of the die bonding film.
- the storage stability tends to be improved while achieving both adhesiveness and shortening of the process time.
- the die bonding film may further contain an antioxidant, a rheology control agent, a leveling agent and the like as other ingredients.
- the content of these components may be 0.01 to 3% by mass based on the total amount of the die bonding film.
- the die bonding film forms an adhesive composition containing the above-mentioned components (A) to (C) and, if necessary, the components (D) to (F) and other components in the form of a film. It can be produced by.
- a die bonding film can be formed by applying an adhesive composition to a support film.
- the adhesive composition may be used as a varnish for the adhesive composition diluted with a solvent.
- the die bonding film can be formed by applying the varnish of the adhesive composition to the support film and removing the solvent by heating and drying.
- the solvent is not particularly limited as long as it can dissolve components other than component (D).
- the solvent include aromatic hydrocarbons such as toluene, xylene, mesitylene, cumene and p-simene; aliphatic hydrocarbons such as hexane and heptane; cyclic alkanes such as methylcyclohexane; tetrahydrofuran, 1,4-dioxane and the like.
- Cyclic ethers such as acetone, methyl ethyl ketone, methyl isobutyl ketone, cyclohexanone, 4-hydroxy-4-methyl-2-pentanone; esters such as methyl acetate, ethyl acetate, butyl acetate, methyl lactate, ethyl lactate, ⁇ -butyrolactone; Carbonated esters such as ethylene carbonate and propylene carbonate; amides such as N, N-dimethylformamide, N, N-dimethylacetamide and N-methyl-2-pyrrolidone can be mentioned. These may be used individually by 1 type or in combination of 2 or more type.
- the solvent may be toluene, xylene, methyl ethyl ketone, methyl isobutyl ketone, or cyclohexanone from the viewpoint of solubility and boiling point.
- the concentration of the solid component in the varnish of the adhesive composition may be 10 to 80% by mass based on the total mass of the varnish of the adhesive composition.
- the varnish of the adhesive composition is prepared by mixing and kneading the components (A) to (C) and, if necessary, the components (D) to (F), other components, and a solvent. be able to.
- the order of mixing and kneading each component is not particularly limited and can be set as appropriate. Mixing and kneading can be carried out by appropriately combining a disperser such as a normal stirrer, a raft machine, a triple roll, a ball mill, and a bead mill.
- air bubbles in the varnish may be removed by vacuum degassing or the like.
- the support film is not particularly limited, and examples thereof include films such as polytetrafluoroethylene, polyethylene, polypropylene, polymethylpentene, polyethylene terephthalate, and polyimide.
- the thickness of the support film may be, for example, 10 to 200 ⁇ m or 20 to 170 ⁇ m.
- a known method can be used, for example, a knife coating method, a roll coating method, a spray coating method, a gravure coating method, a bar coating method, a curtain coating method. And so on.
- the conditions for heat drying are not particularly limited as long as the solvent used is sufficiently volatilized, but may be, for example, 0.1 to 90 minutes at 50 to 200 ° C.
- the thickness of the die bonding film can be adjusted as appropriate according to the application.
- the thickness of the die bonding film may be 3 to 40 ⁇ m, 5 to 35 ⁇ m, or 7 to 30 ⁇ m.
- the die bonding film may have a die shear strength at 250 ° C. of 0.7 MPa or more in the cured product of the die bonding film after the die bonding film is thermocompression bonded to a wiring board and cured at 170 ° C. for 3 hours.
- the die shear strength at 250 ° C. may be 0.8 MPa or more, 1.0 MPa or more, or 1.2 MPa or more.
- the upper limit of the die shear strength at 250 ° C. is not particularly limited, but may be, for example, 3 MPa or less.
- the obtained die bonding film can be used as it is as the adhesive layer 30.
- Adhesive layer and base film As the pressure-sensitive adhesive layer 20 and the base film 10, a laminate in which the pressure-sensitive adhesive layer 20 is provided on the base film 10, that is, a dicing tape can be used.
- the pressure-sensitive adhesive layer 20 may be a layer that is cured by high-energy rays or heat (that is, a layer that can control the adhesive force), a layer that is cured by high-energy rays, or a layer that is cured by ultraviolet rays.
- a pressure-sensitive adhesive constituting the pressure-sensitive adhesive layer a pressure-sensitive adhesive generally used in the dicing tape field can be used.
- a pressure-sensitive adhesive whose adhesive strength to the adhesive layer 30 is reduced by irradiation with high-energy rays can be appropriately selected and used.
- the base film 10 a base film generally used in the dicing tape field can be used.
- the base material of the base film 10 is not particularly limited as long as it can be expanded in the dicing step, and for example, crystalline polypropylene, amorphous polypropylene, high-density polyethylene, medium-density polyethylene, low-density polyethylene, and ultra-low density.
- polypropylene such as polybutene, polymethylpentene, ethylene-vinyl acetate copolymer,
- the base material of the base film 10 is polypropylene, polyethylene-polypropylene random copolymer, polyethylene-polypropylene block copolymer, ethylene-vinyl acetate from the viewpoint of characteristics such as young ratio, stress relaxation property, and melting point. It may be a copolymer, an ionomer resin, or an ethylene- (meth) acrylic acid copolymer.
- a dicing / die bonding integrated adhesive sheet 1 including the adhesive layer 30, the adhesive layer 20, and the base film 10 in this order is obtained. be able to.
- a semiconductor wafer W1 having a thickness H1 is prepared.
- the thickness H1 of the semiconductor wafer W1 forming the modified layer may exceed 35 ⁇ m.
- the protective film 2 is attached on one main surface of the semiconductor wafer W1 (see FIG. 2A).
- the surface on which the protective film 2 is attached may be the circuit surface of the semiconductor wafer W1.
- the protective film 2 may be a back grind tape used for back grinding (back grind) of a semiconductor wafer.
- the modified layer 4 is formed by irradiating the inside of the semiconductor wafer W1 with laser light (see FIG. 2B), and the side opposite to the surface to which the protective film 2 of the semiconductor wafer W1 is attached (back surface side).
- a semiconductor wafer W2 having the modified layer 4 is produced by performing back grinding (back surface grinding) and polishing (polishing) on the surface (see FIG. 2C).
- the thickness H2 of the obtained semiconductor wafer W2 may be 35 ⁇ m or less.
- the adhesive layer 30 of the dicing / die bonding integrated adhesive sheet 1 is placed in a predetermined device. Subsequently, the dicing / die bonding integrated adhesive sheet 1 is attached to the main surface Ws of the semiconductor wafer W2 via the adhesive layer 30 (see FIG. 2D), and the protective film 2 of the semiconductor wafer W2 is peeled off. (See FIG. 2 (e)).
- the semiconductor wafer W2 is divided by the modified layer 4 by expanding the base film 10.
- the semiconductor wafer W2 and the adhesive layer 30 are separated into individual pieces to produce a semiconductor chip with an adhesive layer (see FIG. 3 (f)).
- the condition for expanding the base film 10 may be a cooling condition of 0 ° C. or lower.
- the pressure-sensitive adhesive layer 20 may be irradiated with ultraviolet rays, if necessary (see FIG. 3 (g)).
- the pressure-sensitive adhesive in the pressure-sensitive adhesive layer 20 is cured by ultraviolet rays, the pressure-sensitive adhesive layer 20 is cured, and the adhesive force between the pressure-sensitive adhesive layer 20 and the adhesive layer 30 can be reduced.
- ultraviolet rays having a wavelength of 200 to 400 nm may be used.
- the ultraviolet irradiation conditions may be adjusted so that the illuminance is 30 to 240 mW / cm 2 and the irradiation amount is 200 to 500 mJ.
- the semiconductor chip 50 with an adhesive layer has a semiconductor chip Wa and an adhesive layer 30a.
- the semiconductor chip Wa is a semiconductor wafer W2 divided by dicing
- the adhesive layer 30a is an adhesive layer 30 divided by dicing.
- the pressure-sensitive adhesive layer 20ac is a cured pressure-sensitive adhesive layer obtained by dicing the cured pressure-sensitive adhesive layer.
- the adhesive cured product layer 20ac may remain on the base film 10 when the semiconductor chip 50 with the adhesive layer is picked up. In the pick-up process, it is not always necessary to expand, but the pick-up property can be further improved by expanding.
- the semiconductor chip 50 with an adhesive layer is bonded to the semiconductor chip mounting support substrate 60 via the adhesive layer 30a by thermocompression bonding (FIG. 3 (i)). reference).
- a plurality of semiconductor chips 50 with adhesive layers may be adhered to the support substrate 60 for mounting the semiconductor chip.
- the adhesive layer 30a may be cured by heating at, for example, 120 to 150 ° C. for 0.5 to 6 hours.
- the semiconductor device shown in FIG. 1 includes the above steps, a step of electrically connecting the semiconductor chip Wa and the semiconductor chip mounting support substrate 60 by a wire bond 70, and a surface 60a of the semiconductor chip mounting support substrate 60. It can be manufactured by a manufacturing method further including a step of sealing the semiconductor chip Wa with a resin using the resin sealing material 80.
- the die bonding film of one embodiment is for adhering a semiconductor chip and a support member on which the semiconductor chip is mounted.
- the die bonding film has a breaking elongation at ⁇ 15 ° C. of 5% or less.
- the die bonding film contains an epoxy resin, an epoxy resin curing agent, and an epoxy group-containing (meth) acrylic copolymer, and the total content of the epoxy resin and the epoxy resin curing agent is the epoxy resin and the epoxy resin. It is 10% by mass or more and less than 30% by mass based on the total amount of the curing agent and the epoxy group-containing (meth) acrylic copolymer.
- the components, content, etc. contained in the die bonding film are the same as the components, content, etc. exemplified in the above-mentioned adhesive layer. Therefore, a duplicate description will be omitted here.
- the dicing / die bonding integrated adhesive sheet of one embodiment includes an adhesive layer made of the above-mentioned die bonding film, an adhesive layer, and a base film in this order.
- a varnish of the adhesive composition was prepared by the following procedure.
- the types and contents (solid content) of each component are as shown in Table 1.
- (A) epoxy resin, (B) epoxy resin curing agent, (D) inorganic filler, and (E) silane coupling agent were blended, cyclohexanone was added thereto, and the mixture was stirred.
- (C) an epoxy group-containing (meth) acrylic copolymer and (F) a curing accelerator were added and vacuum degassed to obtain a varnish of an adhesive composition.
- D1 Silica filler (manufactured by Admatex Co., Ltd., trade name "SC2050”, average particle size 0.5 ⁇ m, spherical silica including spherical silica)
- D2 Silica filler (manufactured by Admatex Co., Ltd., trade name "YA050”, average particle size 0.05 ⁇ m, spherical silica including spherical silica)
- the varnish of the obtained adhesive composition was applied onto a support film, a polyethylene terephthalate (PET) film having a thickness of 38 ⁇ m and undergoing a mold release treatment.
- the applied varnish was heated and dried at 90 ° C. for 5 minutes and at 130 ° C. for 5 minutes. In this way, die bonding films of Examples 1 to 3 and Comparative Examples 1 and 2 having the thickness shown in Table 1 in a semi-cured (B stage) state were obtained on the support film.
- a semiconductor wafer having a thickness of 50 ⁇ m and a diameter of 300 mm was prepared.
- a stealth dicing laser saw manufactured by Disco Corporation, device name "DFL7361”
- a modified layer was formed on the semiconductor wafer so as to obtain a semiconductor chip having a size of 4 mm ⁇ 12 mm.
- backgrinding was performed using a backgrinding device (manufactured by Disco Corporation, device name "DGP8761”), and the thickness of the semiconductor wafer was adjusted to 25 ⁇ m.
- the support film of the dicing / die bonding integrated adhesive sheet of Examples 1 to 3 and Comparative Examples 1 and 2 was peeled off, and the adhesive layer of the dicing / die bonding integrated adhesive sheet was applied to the semiconductor wafer whose thickness was adjusted to 25 ⁇ m.
- the dicing film) was laminated and attached at 70 ° C. using a laminating device (manufactured by Disco Corporation, device name “DFM2800”).
- the semiconductor wafer to which the dicing / die bonding integrated adhesive sheet is attached is fixed, and the dicing tape is expanded at -15 ° C using an expanding device (manufactured by DISCO Co., Ltd., device name "DDS2300”), and the adhesive is used.
- the layer and the semiconductor wafer were separated into a semiconductor chip with an adhesive layer of 4 mm ⁇ 12 mm.
- the expanding conditions were adjusted so that the expanding speed was 100 mm / sec and the expanding amount was 8 mm.
- the ratio of both the adhesive layer and the semiconductor wafer being cut at the same time was 90% or more, it was evaluated as "A” as good breakability, and 90%. If it was less than, it was evaluated as "B” as poor splittability.
- Table 1 The results are shown in Table 1.
- the die shear strength of the dicing / die bonding film was measured using the dicing / die bonding integrated adhesive sheet of Examples 1 to 3 which was excellent in breakability.
- the semiconductor chip for measuring the die shear strength was produced as follows. A semiconductor wafer having a thickness of 400 ⁇ m was prepared, and the dicing film side of the dicing / die bonding integrated adhesive sheet of Examples 1 to 3 was laminated on the semiconductor wafer at a stage temperature of 70 ° C. to prepare a dicing sample. The obtained dicing sample was cut using a fully automatic dicing DFD-6361 (manufactured by Disco Corporation).
- the cutting was performed by a step cutting method using two blades, and dicing blades ZH05-SD2000-N1-70-FF and ZH05-SD4000-N1-70-EE (both manufactured by DISCO Corporation) were used.
- the cutting conditions were blade rotation speed: 4000 rpm, cutting speed: 50 mm / sec, and chip size: 5 mm ⁇ 5 mm.
- the first step was cut so that the semiconductor wafer remained about 200 ⁇ m, and the second step was cut so that the dicing tape had a notch of about 20 ⁇ m.
- the pressure-sensitive adhesive layer made of the ultraviolet-curable pressure-sensitive adhesive was irradiated with ultraviolet rays to cure the pressure-sensitive adhesive layer.
- the semiconductor chip to be picked up was picked up using the pick-up collet. In the pickup, it was pushed up using a total of five pins, one in the center and four in the four corners.
- the push-up speed was set to 20 mm / sec, and the push-up height was set to 450 ⁇ m.
- the semiconductor chips with the die bonding films of Examples 1 to 3 were obtained.
- the obtained semiconductor chips with die bonding films of Examples 1 to 3 were subjected to a wiring board (organic substrate with solder resist, solder resist: Taiyo Holdings Co., Ltd.) under the conditions of a temperature of 120 ° C., a pressure of 0.1 MPa, and a time of 1.0 second.
- the embedding property of the dicing / die bonding film was evaluated using the dicing / die bonding integrated adhesive sheet of Examples 1 to 3 which was excellent in splittability.
- the embedding property is evaluated in the same manner as the fabrication of the semiconductor chip used in the measurement of die shear strength, except that a semiconductor wafer having a thickness of 75 ⁇ m is prepared and the chip size is adjusted to 7.5 mm ⁇ 7.5 mm.
- the semiconductor chips with die bonding films of Examples 1 to 3 for this purpose were produced.
- the semiconductor chips with die bonding films of Examples 1 to 3 were subjected to a temperature of 120 ° C., a pressure of 0.15 MPa, and a time of 1.0 second, and a wiring board (organic substrate with solder resist, solder resist: Taiyo Holdings Co., Ltd., trade name).
- a sample attached to "AUS308", unevenness on the substrate: about 6 ⁇ m) was prepared, and the sample was heated at 150 ° C. for 6 hours on a hot plate to be cured. After that, the semiconductor chip is sealed at 175 ° C., 6.9 MPa, and 120 seconds using a mold encapsulant (manufactured by Hitachi Chemical Co., Ltd., trade name "CEL-9700HF”) to prepare an evaluation package.
- a mold encapsulant manufactured by Hitachi Chemical Co., Ltd., trade name "CEL-9700HF
- the wiring board of the evaluation package was observed with an ultrasonic microscope to confirm the embedding property of the unevenness on the board. Those having no voids on the unevenness on the substrate were evaluated as "A” as having good embedding property, and those having voids were evaluated as "B” as having poor embedding property. The results are shown in Table 1.
- the die bonding film of the present invention has excellent breakability.
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Abstract
Description
図1は、半導体装置の一実施形態を示す模式断面図である。図1に示す半導体装置100は、半導体チップWaが、接着剤層30a(又は接着剤層30aの硬化物)を介して、半導体チップ搭載用支持基板60に接着されている。半導体チップWaは、ワイヤーボンド70によって半導体チップ搭載用支持基板60と電気的に接続されている。半導体チップWaは、半導体チップ搭載用支持基板60の表面60a上で、樹脂封止材80によって樹脂封止されている。半導体チップ搭載用支持基板60の表面60aと反対側の面に、外部基板(マザーボード)との電気的な接続用として、はんだボール90が形成されていてもよい。
図2及び図3は、半導体装置の製造方法の一実施形態を説明するための模式断面図である。一実施形態の半導体装置の製造方法は、-15℃における破断伸びが5%以下であるダイボンディングフィルムからなる接着剤層と、粘着剤層と、基材フィルムとをこの順に備えるダイシング・ダイボンディング一体型接着シートを準備する工程(ダイシング・ダイボンディング一体型接着シート準備工程)と、半導体ウェハを準備し、半導体ウェハに対して改質層を形成する工程(改質層形成工程)と、ダイシング・ダイボンディング一体型接着シートの接着剤層の面を、半導体ウェハに貼り付ける工程(ウェハラミネート工程)と、基材フィルムをエキスパンドすることによって、半導体ウェハ及び接着剤層を個片化し、接着剤層付き半導体チップを作製する工程(ダイシング工程)と、接着剤層付き半導体チップを粘着剤層からピックアップする工程(ピックアップ工程)と、接着剤層付き半導体チップを、接着剤層を介して支持基板に接着する工程(半導体チップ接着工程)とを備える。
図4は、ダイシング・ダイボンディング一体型接着シートの一実施形態を示す模式断面図である。ダイシング・ダイボンディング一体型接着シート1は、接着剤層30と、粘着剤層20と、基材フィルム10とをこの順に備える。
接着剤層30を構成するダイボンディングフィルムは、熱硬化性であり、半硬化(Bステージ)状態を経て、硬化処理後に完全硬化物(Cステージ)状態となり得る。
(A)成分は、加熱等によって、分子間で三次元的な結合を形成し硬化する性質を有する成分であり、硬化後に接着作用を示す成分である。(A)成分は、分子内にエポキシ基を有するものであれば、特に制限なく用いることができる。(A)成分は、分子内に2以上のエポキシ基を有していてもよい。
(B)成分は、例えば、エポキシ樹脂の硬化剤となり得るフェノール樹脂であってよい。フェノール樹脂は、分子内にフェノール性水酸基を有するものであれば特に制限なく用いることができる。フェノール樹脂としては、例えば、フェノール、クレゾール、レゾルシン、カテコール、ビスフェノールA、ビスフェノールF、フェニルフェノール、アミノフェノール等のフェノール類及び/又はα-ナフトール、β-ナフトール、ジヒドロキシナフタレン等のナフトール類とホルムアルデヒド等のアルデヒド基を有する化合物とを酸性触媒下で縮合又は共縮合させて得られるノボラック型フェノール樹脂、アリル化ビスフェノールA、アリル化ビスフェノールF、アリル化ナフタレンジオール、フェノールノボラック、フェノール等のフェノール類及び/又はナフトール類とジメトキシパラキシレン又はビス(メトキシメチル)ビフェニルから合成されるフェノールアラルキル樹脂、ナフトールアラルキル樹脂、ビフェニルアラルキル型フェノール樹脂、フェニルアラルキル型フェノール樹脂などが挙げられる。これらは、1種を単独で又は2種以上を組み合わせて用いてもよい。
(メタ)アクリル共重合体とは、(メタ)アクリル酸エステルに由来する構成単位を含むポリマーを意味する。エポキシ基含有(メタ)アクリル共重合体は、構成単位として、エポキシ基を有する(メタ)アクリル酸エステルに由来する構成単位を含むポリマーである。また、(メタ)アクリル共重合体は、(メタ)アクリル酸エステルとアクリルニトリルとの共重合体等のアクリルゴムであってもよい。これらは、1種を単独で又は2種以上を組み合わせて用いてもよい。
ポンプ:L-6000(株式会社日立製作所製)
カラム:ゲルパック(Gelpack)GL-R440(日立化成株式会社製)、ゲルパック(Gelpack)GL-R450(日立化成株式会社製)、及びゲルパックGL-R400M(日立化成株式会社製)(各10.7mm(直径)×300mm)をこの順に連結したカラム
溶離液:テトラヒドロフラン(以下、「THF」という。)
サンプル:試料120mgをTHF5mLに溶解させた溶液
流速:1.75mL/分
(D)成分としては、例えば、水酸化アルミニウム、水酸化マグネシウム、炭酸カルシウム、炭酸マグネシウム、ケイ酸カルシウム、ケイ酸マグネシウム、酸化カルシウム、酸化マグネシウム、酸化アルミニウム、窒化アルミニウム、ホウ酸アルミウィスカ、窒化ホウ素、結晶性シリカ、非晶性シリカ等が挙げられる。これらは1種を単独で用いてもよく、2種以上を組み合わせて用いてもよい。これらのうち、(D)成分は、シリカであってよい。
ダイボンディングフィルムが(E)成分を含有することによって、異種成分間の界面結合をより高めることができる傾向にある。(E)成分は、下記一般式(1)で表されるシランカップリング剤であってよい。
ダイボンディングフィルムが(F)成分を含有することによって、接着性と工程時間の短縮とをより両立することができる傾向にある。(F)成分としては、例えば、イミダゾール類及びその誘導体、有機リン系化合物、第二級アミン類、第三級アミン類、第四級アンモニウム塩等が挙げられる。これらは、1種を単独で又は2種以上を組み合わせて用いてもよい。これらの中でも、反応性の観点から(F)成分はイミダゾール類及びその誘導体であってよい。
ダイボンディングフィルムは、その他の成分として、抗酸化剤、レオロジーコントロール剤、レベリング剤等をさらに含有していてもよい。これらの成分の含有量は、ダイボンディングフィルム全量を基準として、0.01~3質量%であってよい。
粘着剤層20及び基材フィルム10は、基材フィルム10上に粘着剤層20を設けた積層体、すなわち、ダイシングテープを用いることができる。
まず、厚みH1の半導体ウェハW1を用意する。改質層を形成する半導体ウェハW1の厚みH1は、35μmを超えていてよい。続いて、半導体ウェハW1の一方の主面上に保護フィルム2を貼り付ける(図2(a)参照)。保護フィルム2が貼り付けられる面は、半導体ウェハW1の回路面であってよい。保護フィルム2は、半導体ウェハの裏面研削(バックグラインド)に使用されるバックグラインドテープであってよい。続いて、半導体ウェハW1内部にレーザー光を照射して改質層4を形成し(図2(b)参照)、半導体ウェハW1の保護フィルム2が張り付けられた面とは反対側(裏面側)に対してバックグラインディング(裏面研削)及びポリッシング(研磨)を行うことによって、改質層4を有する半導体ウェハW2を作製する(図2(c)参照)。得られる半導体ウェハW2の厚みH2は、35μm以下であってよい。
次いで、ダイシング・ダイボンディング一体型接着シート1の接着剤層30を所定の装置に配置する。続いて、半導体ウェハW2の主面Wsに、接着剤層30を介してダイシング・ダイボンディング一体型接着シート1を貼り付け(図2(d)参照)、半導体ウェハW2の保護フィルム2を剥離する(図2(e)参照)。
次いで、冷却条件下において、基材フィルム10をエキスパンドすることによって、改質層4で半導体ウェハW2を分断させる。これによって、半導体ウェハW2及び接着剤層30を個片化し、接着剤層付き半導体チップが作製される(図3(f)参照)。基材フィルム10をエキスパンドする条件は、0℃以下の冷却条件下であってよい。
粘着剤層20に対しては、必要に応じて、紫外線を照射してもよい(図3(g)参照)。粘着剤層20における粘着剤が紫外線で硬化するものである場合、当該粘着剤層20が硬化し、粘着剤層20と接着剤層30との間の接着力を低下させることができる。紫外線照射においては、波長200~400nmの紫外線を用いてもよい。紫外線照射条件は、照度:30~240mW/cm2で照射量200~500mJとなるように調整してもよい。
次いで、基材フィルム10をエキスパンドすることによって、ダイシングされた接着剤層付き半導体チップ50を互いに離間させつつ、基材フィルム10側からニードル42で突き上げ、接着剤層付き半導体チップ50を吸引コレット44で吸引して、粘着剤硬化物層20acからピックアップする(図3(h)参照)。なお、接着剤層付き半導体チップ50は、半導体チップWaと接着剤層30aとを有する。半導体チップWaは半導体ウェハW2がダイシングによって分割されたものであり、接着剤層30aは接着剤層30がダイシングによって分割されたものである。粘着剤硬化物層20acは粘着剤層が硬化した粘着剤硬化物層がダイシングによって分割されたものである。粘着剤硬化物層20acは接着剤層付き半導体チップ50をピックアップする際に基材フィルム10上に残存し得る。ピックアップ工程では、必ずしもエキスパンドする必要はないが、エキスパンドすることによってピックアップ性をより向上させることができる。
次いで、接着剤層付き半導体チップ50をピックアップした後、接着剤層付き半導体チップ50を、熱圧着によって、接着剤層30aを介して半導体チップ搭載用支持基板60に接着する(図3(i)参照)。半導体チップ搭載用支持基板60には、複数の接着剤層付き半導体チップ50を接着してもよい。接着剤層30aは、例えば、120~150℃で、0.5~6時間で加熱して硬化させてもよい。
一実施形態のダイボンディングフィルムは、半導体チップと前記半導体チップを搭載する支持部材とを接着するためのものである。当該ダイボンディングフィルムは、-15℃における破断伸びが5%以下である。当該ダイボンディングフィルムは、エポキシ樹脂と、エポキシ樹脂硬化剤と、エポキシ基含有(メタ)アクリル共重合体とを含有し、エポキシ樹脂及びエポキシ樹脂硬化剤の合計の含有量は、エポキシ樹脂、エポキシ樹脂硬化剤、及びエポキシ基含有(メタ)アクリル共重合体の総量を基準として、10質量%以上30質量%未満である。ダイボンディングフィルムに含まれる成分、含有量等は、上述の接着剤層で例示した成分、含有量等と同様である。したがって、ここでは、重複する説明を省略する。
一実施形態のダイシング・ダイボンディング一体型接着シートは、上述のダイボンディングフィルムからなる接着剤層と、粘着剤層と、基材フィルムとをこの順に備える。
以下の手順によって接着剤組成物のワニスを調製した。各成分の種類及び含有量(固形分量)は表1に示すとおりである。まず、(A)エポキシ樹脂、(B)エポキシ樹脂硬化剤、(D)無機フィラー、及び(E)シランカップリング剤を配合し、これにシクロヘキサノンを加えて撹拌した。続いて、(C)エポキシ基含有(メタ)アクリル共重合体及び(F)硬化促進剤を加え、真空脱気することによって、接着剤組成物のワニスを得た。
(A1)クレゾールノボラック型エポキシ樹脂(日鉄ケミカル&マテリアル株式会社製、商品名「YDCN-700-10」、エポキシ当量:210g/eq)
(B1)フェノールアラルキル型フェノール樹脂(三井化学株式会社製、商品名「ミレックスXLC-LL」、軟化点:77℃、水酸基当量:176g/eq)
(B2)ビフェニルアラルキル型フェノール樹脂(日本化薬株式会社製、商品名「KAYAHARD GPH-103」、軟化点:99~106℃、水酸基当量:220~240g/eq)
(C1)アクリルゴム(ナガセケムテックス株式会社製、商品名「HTR-860P-3」、重量平均分子量:80万、ガラス転移点:-13℃、ブチルアクリレート:エチルアクリレート:アクリロニトリル:グリシジルメタクリレート=39.4:29.3:30.3:3.0(質量比))
(D1)シリカフィラー(株式会社アドマテックス製、商品名「SC2050」、平均粒径0.5μm、真球状を含む球状シリカ)
(D2)シリカフィラー(株式会社アドマテックス製、商品名「YA050」、平均粒径0.05μm、真球状を含む球状シリカ)
(E1)γ-メルカプトプロピルトリメトキシシラン(モメンティブ・パフォーマンス・マテリアルズ・ジャパン合同会社製、商品名「A-189」)
(E2)3-(N-フェニル)アミノプロピルトリメトキシシラン(アニリノプロピルトリメトキシシラン)(モメンティブ・パフォーマンス・マテリアルズ・ジャパン合同会社製、商品名「Y9669」、一般式(1)において、R=すべてメトキシ基、n=3のシランカップリング剤)
(E3)アニリノメチルトリメトキシシラン(信越化学工業株式会社製、商品名「X12-1191」、一般式(1)において、R=すべてメトキシ基、n=1のシランカップリング剤)
(F1)1-シアノエチル-2-フェニルイミダゾール(四国化成工業株式会社製、商品名「キュアゾール2PZ-CN」)
実施例1~3及び比較例1、2のダイボンディングフィルムを、それぞれ幅10mm、長さ100mmに切り出し、短冊状の破断伸び測定用サンプルを作製した。測定用サンプルの支持フィルムを剥離除去した後、テンシロン(株式会社島津製作所製、商品名「UTM-III-500」)に治具間の距離が40mmとなるようにセットした。その後、-15℃まで冷却し、速度50mm/分で引っ張りながらフィルム長さを測定し、フィルムが破断した時点におけるフィルム長さを読み取った。破断した時点におけるフィルム長さ及び初期のフィルム長さ(40mm)から、以下の式に基づき、破断伸びを算出した。結果を表1に示す。
破断伸び(%)=(破断した時点におけるフィルム長さ-初期のフィルム長さ(40mm))/初期のフィルム長さ(40mm)×100
アイオノマー系樹脂を含む基材フィルム(厚み:100μm、直径:370mm)に紫外線硬化型粘着剤(厚み:10μm)を塗布することによって、粘着剤層と基材フィルムとの積層体であるダイシングテープを作製した。次いで、実施例1~3及び比較例1、2の支持フィルム付きダイボンディングフィルム(厚み:表1、直径:312mm)を用意し、ダイシングテープの紫外線硬化型粘着剤とダイボンディングフィルムとが接するように貼り合わせ、接着剤層(ダイボンディングフィルム)、粘着剤層(紫外線硬化型粘着剤)、及び基材フィルムをこの順に備える実施例1~3及び比較例1、2のダイシング・ダイボンディング一体型接着シートを作製した。
厚み50μm、直径300mmの半導体ウェハを用意した。ステルスダイシングレーザーソー(株式会社ディスコ製、装置名「DFL7361」)を用いて、4mm×12mmの半導体チップが得られるように、半導体ウェハに改質層を形成した。次いで、バックグラインド装置(株式会社ディスコ製、装置名「DGP8761」)を用いて、バックグラインドを行い、半導体ウェハの厚みを25μmに調整した。実施例1~3及び比較例1、2のダイシング・ダイボンディング一体型接着シートの支持フィルムを剥離し、厚みを25μmに調整した半導体ウェハに、ダイシング・ダイボンディング一体型接着シートの接着剤層(ダイボンディングフィルム)を、ラミネート装置(株式会社ディスコ製、装置名「DFM2800」)を用いて、70℃でラミネートして貼り付けた。ダイシング・ダイボンディング一体型接着シートが貼り付けられた半導体ウェハを固定し、エキスパンド装置(株式会社ディスコ製、装置名「DDS2300」)を用いて、-15℃にてダイシングテープをエキスパンドし、接着剤層及び半導体ウェハを、4mm×12mmの接着剤層付き半導体チップに個片化した。このとき、エキスパンド速度が100mm/秒、エキスパンド量が8mmとなるように、エキスパンド条件を調整した。個片化した半導体チップを観察し、接着剤層及び半導体ウェハの両方が同時に切断されていたものの割合が全体の90%以上であった場合を割断性良好として「A」と評価し、90%未満であった場合を割断性不良として「B」と評価した。結果を表1に示す。
割断性に優れていた実施例1~3のダイシング・ダイボンディング一体型接着シートを用いて、ダイボンディングフィルムのダイシェア強度を測定した。ダイシェア強度を測定するための半導体チップは、以下のようにして作製した。厚み400μmの半導体ウェハを用意し、実施例1~3のダイシング・ダイボンディング一体型接着シートのダイボンディングフィルム側を、ステージ温度70℃で半導体ウェハにラミネートし、ダイシングサンプルを作製した。フルオートダイサーDFD-6361(株式会社ディスコ製)を用いて、得られたダイシングサンプルを切断した。切断には、2枚のブレードを用いるステップカット方式で行い、ダイシングブレードZH05-SD2000-N1-70-FF、及びZH05-SD4000-N1-70-EE(いずれも株式会社ディスコ製)を用いた。切断条件は、ブレード回転数:4000rpm、切断速度:50mm/秒、チップサイズ:5mm×5mmとした。切断は、半導体ウェハが200μm程度残るように1段階目の切断を行い、ダイシングテープに20μm程度の切り込みが入るように2段階目の切断を行った。次いで、紫外線硬化型粘着剤からなる粘着剤層に紫外線を照射して、粘着剤層を硬化させた。次に、ピックアップ用コレットを用いて、ピックアップすべき半導体チップをピックアップした。ピックアップでは、中央の1本及び四隅の4本の合計5本のピンを用いて突き上げた。ピックアップ条件は、突き上げ速度を20mm/秒とし、突き上げ高さを450μmに設定した。このようにして、実施例1~3のダイボンディングフィルム付き半導体チップを得た。得られた実施例1~3のダイボンディングフィルム付き半導体チップを温度120℃、圧力0.1MPa、時間1.0秒の条件で、配線基板(ソルダーレジスト付き有機基板、ソルダーレジスト:太陽ホールディングス株式会社、商品名「AUS308」、基板上の凹凸:約6μm)に圧着し、170℃で3時間硬化させてダイボンディングフィルムの硬化物のサンプルを作製し、万能ボンドテスター(ノードソン・アドバンスト・テクノロジー株式会社製)を用いて、測定温度250℃で測定した。結果を表1に示す。
割断性に優れていた実施例1~3のダイシング・ダイボンディング一体型接着シートを用いて、ダイボンディングフィルムの埋込性を評価した。厚み75μmの半導体ウェハを用意し、チップサイズが7.5mm×7.5mmとなるように調整した以外は、ダイシェア強度の測定で用いた半導体チップの作製と同様にして、埋込性を評価するための実施例1~3のダイボンディングフィルム付き半導体チップを作製した。実施例1~3のダイボンディングフィルム付き半導体チップを温度120℃、圧力0.15MPa、時間1.0秒の条件で、配線基板(ソルダーレジスト付き有機基板、ソルダーレジスト:太陽ホールディングス株式会社、商品名「AUS308」、基板上の凹凸:約6μm)に貼り付けたサンプルを作製し、当該サンプルをホットプレート上で、150℃、6時間加熱して硬化させた。その後、モールド用封止材(日立化成株式会社製、商品名「CEL-9700HF」)を用いて、半導体チップを175℃、6.9MPa、120秒の条件で封止し、評価用パッケージを作製した。評価用パッケージの配線基板を超音波顕微鏡で観察し、基板上の凹凸の埋込性を確認した。基板上の凹凸に空隙がなかったものを埋込性良好として「A」と評価し、空隙があったものを埋込性不良として「B」と評価した。結果を表1に示す。
Claims (13)
- -15℃における破断伸びが5%以下であるダイボンディングフィルムからなる接着剤層と、粘着剤層と、基材フィルムとをこの順に備えるダイシング・ダイボンディング一体型接着シートを準備する工程と、
半導体ウェハを準備し、前記半導体ウェハに対して改質層を形成する工程と、
前記ダイシング・ダイボンディング一体型接着シートの前記接着剤層の面を、半導体ウェハに貼り付ける工程と、
前記基材フィルムをエキスパンドすることによって、前記半導体ウェハ及び前記接着剤層を個片化し、接着剤層付き半導体チップを作製する工程と、
前記接着剤層付き半導体チップを前記粘着剤層からピックアップする工程と、
前記接着剤層付き半導体チップを、前記接着剤層を介して半導体チップ搭載用支持基板に接着する工程と、
を備え、
前記ダイボンディングフィルムが、エポキシ樹脂と、エポキシ樹脂硬化剤と、エポキシ基含有(メタ)アクリル共重合体とを含有し、
前記エポキシ樹脂及び前記エポキシ樹脂硬化剤の合計の含有量が、前記エポキシ樹脂、前記エポキシ樹脂硬化剤、及び前記エポキシ基含有(メタ)アクリル共重合体の総量を基準として、10質量%以上30質量%未満である、半導体装置の製造方法。 - 前記ダイボンディングフィルムは、当該ダイボンディングフィルムを配線基板に熱圧着し、170℃で3時間硬化させた後の前記ダイボンディングフィルムの硬化物において、250℃のダイシェア強度が0.7MPa以上である、請求項1に記載の半導体装置の製造方法。
- 前記ダイボンディングフィルムがシランカップリング剤をさらに含有する、請求項1又は2に記載の半導体装置の製造方法。
- 前記ダイボンディングフィルムが無機フィラーをさらに含有し、
前記無機フィラーの含有量が、ダイボンディングフィルム全量を基準として、25質量%以上である、請求項1~4のいずれか一項に記載の半導体装置の製造方法。 - 前記エポキシ基含有(メタ)アクリル共重合体の含有量が、ダイボンディングフィルム全量を基準として、60質量%以下である、請求項1~5のいずれか一項に記載の半導体装置の製造方法。
- 半導体チップと前記半導体チップを搭載する支持部材とを接着するためのダイボンディングフィルムであって、
-15℃における破断伸びが5%以下であり、
エポキシ樹脂と、エポキシ樹脂硬化剤と、エポキシ基含有(メタ)アクリル共重合体とを含有し、
前記エポキシ樹脂及び前記エポキシ樹脂硬化剤の合計の含有量が、前記エポキシ樹脂、前記エポキシ樹脂硬化剤、及び前記エポキシ基含有(メタ)アクリル共重合体の総量を基準として、10質量%以上30質量%未満である、ダイボンディングフィルム。 - 前記ダイボンディングフィルムは、当該ダイボンディングフィルムを配線基板に熱圧着し、170℃で3時間硬化させた後の前記ダイボンディングフィルムの硬化物において、250℃のダイシェア強度が0.7MPa以上である、請求項7に記載のダイボンディングフィルム。
- 前記ダイボンディングフィルムがシランカップリング剤をさらに含有する、請求項7又は8に記載のダイボンディングフィルム。
- 無機フィラーをさらに含有し、
前記無機フィラーの含有量が、ダイボンディングフィルム全量を基準として、25質量%以上である、請求項7~10のいずれか一項に記載のダイボンディングフィルム。 - 前記エポキシ基含有(メタ)アクリル共重合体の含有量が、ダイボンディングフィルム全量を基準として、60質量%以下である、請求項7~11のいずれか一項に記載のダイボンディングフィルム。
- 請求項7~12のいずれか一項に記載のダイボンディングフィルムからなる接着剤層と、
粘着剤層と、
基材フィルムと、
をこの順に備える、ダイシング・ダイボンディング一体型接着シート。
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KR20210144731A (ko) | 2021-11-30 |
TW202105489A (zh) | 2021-02-01 |
SG11202109887QA (en) | 2021-10-28 |
WO2020194613A1 (ja) | 2020-10-01 |
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