Classifications

• • A—HUMAN NECESSITIES
  • A47—FURNITURE; DOMESTIC ARTICLES OR APPLIANCES; COFFEE MILLS; SPICE MILLS; SUCTION CLEANERS IN GENERAL
  • A47L—DOMESTIC WASHING OR CLEANING; SUCTION CLEANERS IN GENERAL
  • A47L13/00—Implements for cleaning floors, carpets, furniture, walls, or wall coverings
  • A47L13/10—Scrubbing; Scouring; Cleaning; Polishing
  • A47L13/16—Cloths; Pads; Sponges
• • D—TEXTILES; PAPER
  • D01—NATURAL OR MAN-MADE THREADS OR FIBRES; SPINNING
  • D01D—MECHANICAL METHODS OR APPARATUS IN THE MANUFACTURE OF ARTIFICIAL FILAMENTS, THREADS, FIBRES, BRISTLES OR RIBBONS
  • D01D5/00—Formation of filaments, threads, or the like
  • D01D5/0007—Electro-spinning
  • D01D5/0015—Electro-spinning characterised by the initial state of the material
  • D01D5/0023—Electro-spinning characterised by the initial state of the material the material being a polymer melt
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B08—CLEANING
  • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
  • B08B1/00—Cleaning by methods involving the use of tools
  • B08B1/10—Cleaning by methods involving the use of tools characterised by the type of cleaning tool
  • B08B1/14—Wipes; Absorbent members, e.g. swabs or sponges
  • B08B1/143—Wipes
• • D—TEXTILES; PAPER
  • D01—NATURAL OR MAN-MADE THREADS OR FIBRES; SPINNING
  • D01D—MECHANICAL METHODS OR APPARATUS IN THE MANUFACTURE OF ARTIFICIAL FILAMENTS, THREADS, FIBRES, BRISTLES OR RIBBONS
  • D01D5/00—Formation of filaments, threads, or the like
  • D01D5/0007—Electro-spinning
  • D01D5/0015—Electro-spinning characterised by the initial state of the material
• • D—TEXTILES; PAPER
  • D01—NATURAL OR MAN-MADE THREADS OR FIBRES; SPINNING
  • D01D—MECHANICAL METHODS OR APPARATUS IN THE MANUFACTURE OF ARTIFICIAL FILAMENTS, THREADS, FIBRES, BRISTLES OR RIBBONS
  • D01D5/00—Formation of filaments, threads, or the like
  • D01D5/04—Dry spinning methods
• • D—TEXTILES; PAPER
  • D04—BRAIDING; LACE-MAKING; KNITTING; TRIMMINGS; NON-WOVEN FABRICS
  • D04H—MAKING TEXTILE FABRICS, e.g. FROM FIBRES OR FILAMENTARY MATERIAL; FABRICS MADE BY SUCH PROCESSES OR APPARATUS, e.g. FELTS, NON-WOVEN FABRICS; COTTON-WOOL; WADDING ; NON-WOVEN FABRICS FROM STAPLE FIBRES, FILAMENTS OR YARNS, BONDED WITH AT LEAST ONE WEB-LIKE MATERIAL DURING THEIR CONSOLIDATION
  • D04H1/00—Non-woven fabrics formed wholly or mainly of staple fibres or like relatively short fibres
  • D04H1/40—Non-woven fabrics formed wholly or mainly of staple fibres or like relatively short fibres from fleeces or layers composed of fibres without existing or potential cohesive properties
  • D04H1/42—Non-woven fabrics formed wholly or mainly of staple fibres or like relatively short fibres from fleeces or layers composed of fibres without existing or potential cohesive properties characterised by the use of certain kinds of fibres insofar as this use has no preponderant influence on the consolidation of the fleece
  • D04H1/4282—Addition polymers
  • D04H1/4291—Olefin series
• • D—TEXTILES; PAPER
  • D04—BRAIDING; LACE-MAKING; KNITTING; TRIMMINGS; NON-WOVEN FABRICS
  • D04H—MAKING TEXTILE FABRICS, e.g. FROM FIBRES OR FILAMENTARY MATERIAL; FABRICS MADE BY SUCH PROCESSES OR APPARATUS, e.g. FELTS, NON-WOVEN FABRICS; COTTON-WOOL; WADDING ; NON-WOVEN FABRICS FROM STAPLE FIBRES, FILAMENTS OR YARNS, BONDED WITH AT LEAST ONE WEB-LIKE MATERIAL DURING THEIR CONSOLIDATION
  • D04H1/00—Non-woven fabrics formed wholly or mainly of staple fibres or like relatively short fibres
  • D04H1/40—Non-woven fabrics formed wholly or mainly of staple fibres or like relatively short fibres from fleeces or layers composed of fibres without existing or potential cohesive properties
  • D04H1/42—Non-woven fabrics formed wholly or mainly of staple fibres or like relatively short fibres from fleeces or layers composed of fibres without existing or potential cohesive properties characterised by the use of certain kinds of fibres insofar as this use has no preponderant influence on the consolidation of the fleece
  • D04H1/4382—Stretched reticular film fibres; Composite fibres; Mixed fibres; Ultrafine fibres; Fibres for artificial leather
• • D—TEXTILES; PAPER
  • D04—BRAIDING; LACE-MAKING; KNITTING; TRIMMINGS; NON-WOVEN FABRICS
  • D04H—MAKING TEXTILE FABRICS, e.g. FROM FIBRES OR FILAMENTARY MATERIAL; FABRICS MADE BY SUCH PROCESSES OR APPARATUS, e.g. FELTS, NON-WOVEN FABRICS; COTTON-WOOL; WADDING ; NON-WOVEN FABRICS FROM STAPLE FIBRES, FILAMENTS OR YARNS, BONDED WITH AT LEAST ONE WEB-LIKE MATERIAL DURING THEIR CONSOLIDATION
  • D04H1/00—Non-woven fabrics formed wholly or mainly of staple fibres or like relatively short fibres
  • D04H1/40—Non-woven fabrics formed wholly or mainly of staple fibres or like relatively short fibres from fleeces or layers composed of fibres without existing or potential cohesive properties
  • D04H1/44—Non-woven fabrics formed wholly or mainly of staple fibres or like relatively short fibres from fleeces or layers composed of fibres without existing or potential cohesive properties the fleeces or layers being consolidated by mechanical means, e.g. by rolling
• • D—TEXTILES; PAPER
  • D04—BRAIDING; LACE-MAKING; KNITTING; TRIMMINGS; NON-WOVEN FABRICS
  • D04H—MAKING TEXTILE FABRICS, e.g. FROM FIBRES OR FILAMENTARY MATERIAL; FABRICS MADE BY SUCH PROCESSES OR APPARATUS, e.g. FELTS, NON-WOVEN FABRICS; COTTON-WOOL; WADDING ; NON-WOVEN FABRICS FROM STAPLE FIBRES, FILAMENTS OR YARNS, BONDED WITH AT LEAST ONE WEB-LIKE MATERIAL DURING THEIR CONSOLIDATION
  • D04H1/00—Non-woven fabrics formed wholly or mainly of staple fibres or like relatively short fibres
  • D04H1/70—Non-woven fabrics formed wholly or mainly of staple fibres or like relatively short fibres characterised by the method of forming fleeces or layers, e.g. reorientation of fibres
  • D04H1/72—Non-woven fabrics formed wholly or mainly of staple fibres or like relatively short fibres characterised by the method of forming fleeces or layers, e.g. reorientation of fibres the fibres being randomly arranged
  • D04H1/728—Non-woven fabrics formed wholly or mainly of staple fibres or like relatively short fibres characterised by the method of forming fleeces or layers, e.g. reorientation of fibres the fibres being randomly arranged by electro-spinning
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
  • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
  • H01L21/67005—Apparatus not specifically provided for elsewhere
  • H01L21/67011—Apparatus for manufacture or treatment
  • H01L21/67017—Apparatus for fluid treatment
  • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
  • H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
  • H01L21/67046—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly scrubbing means, e.g. brushes
• • D—TEXTILES; PAPER
  • D10—INDEXING SCHEME ASSOCIATED WITH SUBLASSES OF SECTION D, RELATING TO TEXTILES
  • D10B—INDEXING SCHEME ASSOCIATED WITH SUBLASSES OF SECTION D, RELATING TO TEXTILES
  • D10B2401/00—Physical properties
  • D10B2401/10—Physical properties porous
• • D—TEXTILES; PAPER
  • D10—INDEXING SCHEME ASSOCIATED WITH SUBLASSES OF SECTION D, RELATING TO TEXTILES
  • D10B—INDEXING SCHEME ASSOCIATED WITH SUBLASSES OF SECTION D, RELATING TO TEXTILES
  • D10B2505/00—Industrial

Definitions

• the present invention relates to a cleaning member and a method for manufacturing the same.
• ultrafine fibers having a diameter of several or less have been used in various applications in the form of a fiber assembly in which the fibers are entangled.
• the diameter of a single fiber according to the number average is 1 to 400 n
• Single fiber diameter in all ultrafine fibers Disclosed is a washed cloth made of a non-woven fabric in which ultrafine fibers and/or ultrafine fiber bundles having a weight ratio of single fibers of 60% or more are entangled.
• this cleaning cloth has a dense structure and can be used for cleaning a magnetic recording medium substrate.
• Patent Document 1 Japanese Patent Laid-Open No. 2058_551541
• the present invention relates to a cleaning member.
• the cleaning member comprises a non-woven structure that is retained by the entanglement of single fibers having a median fiber diameter of 100 0 nm or more and 200 0 0 n 01 or less.
• the non-woven structure has an apparent density of 0.
• the present invention also relates to a method for manufacturing the cleaning member.
• the production method includes a step of discharging a solution or a melt of the electrospinning composition into an electric field and spinning the solution by an electrospinning method to form a monofilament deposit.
• the stack is pressed to have a density of 0.0. ⁇ 0 2020/175496 2 (: 17 2020/007541
• the method comprises the following steps of forming a non-woven structure.
• FIG. 1(3) is a schematic view showing the entangled state of the single fibers contained in the non-woven structure included in the cleaning member of the present invention.
• FIG. 3 is a schematic view showing an arrangement form of fibers existing on the surface of a fiber sheet of a conventional technique.
• FIG. 2 is a schematic view showing an embodiment of the cleaning member of the present invention.
• FIG. 3 ( 3 ) to ( ⁇ 0) are schematic views showing another embodiment of the cleaning member of the present invention.
• FIG. 4 is a schematic diagram showing a method for producing single fibers using a production apparatus.
• FIG. 5 ( 3 ) and () are an image and a graph showing the fine particle removal performance when the cleaning members of Examples and Comparative Examples were used for cleaning.
• the cleaning work cloth described in Patent Document 1 has a dense and high-density structure, and scrubs and removes fine particles such as polishing abrasive grains and polishing dust remaining on the surface to be cleaned. To do.
• the present invention relates to a cleaning member that improves the cleaning performance of fine particles adhering to the surface to be cleaned, and a manufacturing method thereof.
• the present invention relates to a cleaning member.
• Cleaning in the present invention includes both cleaning and wiping of objects.For example, cleaning of buildings such as floors, walls, ceilings and columns, cleaning of fittings and fixtures, and cleaning of various articles. Includes wiping, cleaning of the body and equipment related to the body. INDUSTRIAL APPLICABILITY
• the cleaning member of the present invention is particularly preferably used for cleaning the surface of a precision electronic component such as a semiconductor substrate such as a silicon wafer or a semiconductor wafer, a magnetic recording substrate, or the like, which is required to have a smooth surface to be cleaned. ⁇ 0 2020/175496 3 (: 170? 2020 /007541
• the cleaning member of the present invention includes a non-woven structure made of an aggregate of single fibers.
• the non-woven structure is shaped by the entanglement of monofilaments.
• the non-woven structure is a deposit in which monofilaments are randomly deposited and entangled with each other, and if necessary, shape retention such as pressing is further applied. .. Voids that do not contain single fibers penetrate three-dimensionally in the sheet surface direction and the thickness direction between the single fibers, and the voids communicate with each other to form fine particles inside the nonwoven structure. Pores (hereinafter, also referred to as fine pores) are formed. These holes are generally open holes that are in communication with each other.
• the monofilaments contained in the non-woven structure may have sites that come into contact with each other, but are not adhered to each other by fusion or the like.
• the single fibers When the single fibers have contact points where they contact each other, the single fibers do not adhere to each other, but the cross-sectional shape of at least one of the single fibers at the contact points of the single fibers is the cross section of the single fiber at the non-contact point. It is preferably deformed into a shape different from the shape.
• the “single fiber” in the present invention refers to a single fiber that does not form a fiber bundle, and excludes the fiber formed by the fiber bundle.
• the median fiber diameter of the monofilament is preferably 100 or more, and more preferably 01 or more.
• the fiber diameter can be determined by, for example, observing the surface to be observed of the non-woven structure with a scanning electron microscope (3M IV!), and selecting a fiber excluding the fiber lumps and fiber intersections from the two-dimensional image.
• the fiber diameter is defined as the length between the two points where the straight line orthogonal to the longitudinal direction of the fiber and the fiber outline intersect, the fiber diameter is defined as the median of these measured values.
• fibers having a fiber diameter of less than 100 n or more than 200 n in the non-woven structure is acceptable as long as the effect of the present invention is not impaired, but preferably 10 ⁇ 0 2020/175496 4 ⁇ (: 170? 2020 /007541
• the non-woven structure preferably has a thickness of 0.0. Or more, more preferably 0.04 111 111 or more, still more preferably 0.06 111 111 or more, and preferably 300.00! or less, more preferably 2500! or less. , And more preferably It is the following.
• the strength of the cleaning member can be maintained, and the fine particles adhering to the cleaning object can be excellently removed.
• the shape of the non-woven structure having a thickness in such a range may be, for example, a sheet shape, or a bulk shape such as a plate shape, a prismatic shape, a columnar shape, and a block shape.
• the thickness of the non-woven structure can be appropriately adjusted by, for example, the content of the monofilament or compression during molding.
• the thickness of the non-woven structure can be measured, for example, by observing a cross section of the non-woven structure to be measured with a scanning electron microscope as described later.
• the sheet shape in the present invention refers to a nonwoven structure having a thickness of 10 or more and 100 or less.
• the bulk shape is a shape having a size capable of visually recognizing the outer shape, and for example, the shortest length of the three dimensions of the non-woven structure, that is, the length, the width, and the depth.
• the thickness is more than 1 01 01 01.
• the thickness here means the thickness of the non-woven fabric structure under no load measured by the measuring method described later.
• the non-woven structure has any of the above-mentioned shapes, its apparent density is preferably ⁇ . More preferably ⁇ . Above all, more preferably 0.20 It is 3 or more, also preferably ⁇ . 6 0 9 /
• 0 9 / ⁇ 111 is 3 or less.
• the non-woven structure having such an apparent density can be manufactured by, for example, the method described below.
• the apparent density of the nonwoven structure can be measured by the following method. Specifically, the non-woven structure is cut using a single-edged blade (Product No. 3-10) manufactured by Feather Safety Razor Co., Ltd. to form a cross section of the non-woven structure. Next, the scanning electron microscope (model number Use 100) to magnify and observe the cut section. The section of the magnified observation is used as image data or printed matter to measure the thickness of the non-woven structure without load. Fluffy fibers that are unavoidably present on the surface of the non-woven structure are excluded from measurement. The thickness of the non-woven structure is the average value of the thickness in the image enlarged and observed by the above method. After that, the non-woven structure is cut into a predetermined area (for example, 4001X4001), the basis weight is calculated from the mass and area, and the basis weight is divided by the thickness to obtain the apparent density. calculate.
• a predetermined area for example, 4001X4001
• the basis weight is calculated from the mass and area
• the basis weight
• the non-woven structure containing the single fibers has open pores in which fine voids communicate with each other while the constituent fibers have a small diameter. Since they are formed in large numbers and have a low apparent density, the fine particles present on the surface to be cleaned are scraped off with single fibers to efficiently collect and remove the fine particles adhering to the surface to be cleaned. be able to. Further, the fine particles can be retained in the spaces between the fibers to prevent recontamination of the surface to be cleaned. As a result, the cleaning performance of fine particles on the surface to be cleaned is excellent.
• the cleaning member of the present invention when used for cleaning an object to be cleaned such as a semiconductor substrate such as a semiconductor wafer such as a silicon wafer, the particle size of polishing abrasive grains or polishing debris remaining on the surface to be cleaned Since the fine particles having a particle diameter of 100 000 or less can be effectively removed, the frequency of occurrence of surface defects due to the residual fine particles can be reduced.
• the cleaning member when used together with a cleaning liquid such as a polishing liquid, the fine particles generated by polishing can be adsorbed to the cleaning member side together with the cleaning liquid, which makes the cleaning and removal of the fine particles even more excellent.
• the non-woven structure constituting the cleaning member has a porosity within a specific range.
• the porosity (%) is the value calculated from the following equation (1).
• Porosity ( ⁇ / ⁇ ) 100 X ((Single fiber raw material density -(Apparent density of non-woven structure ) / (Density of monofilament raw material
• the porosity of the nonwoven structure in the present invention is preferably 30% or more, more preferably 40% or more, further preferably 50% or more, and preferably 75% or less, It is more preferably 70% or less, still more preferably 65% or less.
• the cleaning member of the present invention is entangled in a non-woven state in which a plurality of monofilament knives 2 are arranged in a random orientation as shown in Fig. 1 (3),
• the distance between fibers varies from short to long, and with this, the size of the voids formed between fibers also becomes random.
• the void distribution of the cleaning member of the present invention is measured as a pore volume distribution, a high peak is observed in a small pore size range.
• the nonwoven structure preferably has a top peak in the range of pore diameters of 50 or less in the pore volume distribution. , And does not have a top peak in the range of pore diameters exceeding 50.
• “having no top peak in the range of pore size exceeding 50” means that the peak height of the highest peak in the range of pore size of 50 or less, that is, based on the top peak, It means that there are no peaks with a peak height greater than half the peak height in the pore size range above 50.
• the sheet is configured as shown in FIG. Textile 1 exists with a certain orientation ⁇ 02020/175496 7 ⁇ (: 170? 2020 /007541
• the void distribution of the non-woven structure is, for example, "I 3 1
• a measurement sample of 0. 029 to 0. 19 is cut out from the measurement target, and the measurement cell containing the measurement sample is set in a mercury porosimeter (Saito Topore V9500, manufactured by Micromeritics). Then, measure the cumulative pore volume V 1 (1_/ 9 ) of the measurement sample when the mercury injection pressure is increased within the specified range. Then, the converted pore size converted according to the following formula (2) On the horizontal axis, I 0 9 differential pore volume ((VI) (I ⁇ 910 ⁇ )
• the pore volume distribution is obtained with the reduced pore diameter ⁇ on the horizontal axis and the cumulative pore volume V 1 differentiated by the logarithmic value of the pore diameter 0 on the vertical axis.
• the range is as follows. Based on the distribution curve of the converted pore size ports obtained under these measurement conditions, the cumulative total value of the converted pore size ⁇ over the range 0.001 to 100 is calculated as the cumulative pore volume V 1 (m L/g). Then, the median value of the pore diameters in the distribution curve is defined as the pore diameter port 0 () in the present invention.
• the nonwoven structure of the present invention has a pore diameter of 50 or less in the above-mentioned pore volume distribution obtained by differentiating the cumulative pore volume by the logarithm of the pore diameter. ⁇ 0 2020/1754 96 8 ⁇ (: 170? 2020 /007541
• the distribution has a top peak in the above range and does not have a top peak in the range of the pore size of more than 50.
• the pore diameter of the non-woven structure is, as the pore diameter, preferably not less than 10 nm, more preferably not less than 500!
• the cumulative pore volume V 1 of the non-woven structure is preferably ⁇ . 8_Rei! _ / 9 or more, is 1. 0_Rei! _ / 9 or more More preferably, it is also preferable that it is 200 1 1_ / 9 or less, The following is more preferable.
• the non-woven structure having the above-mentioned void distribution, pore size and pore volume can be produced, for example, by the method described below.
• the cleaning member of the present invention can change the shape of the non-woven structure contained therein, or combine the non-woven structure with other members, depending on the structure and application of the object to be cleaned. Can be combined.
• the cleaning member 1 can be configured to include a non-woven structure 2 formed of a compact obtained by compression-molding a deposit in which single fibers are entangled.
• the cleaning member 1 shown in the figure is a bulk compression molded product, and has two main surfaces 2 facing each other.
• the non-woven structure 2 in the form of a plate having 2 3 can be used for cleaning an object to be cleaned as it is or by impregnating the non-woven structure with water, a cleaning liquid or the like. That is, in the form shown in the figure, the shape of the cleaning member 1 is substantially the same as the shape of the nonwoven structure 2.
• the effect of the present invention is exhibited even if the cleaning surface of the cleaning member 1 (the surface facing the surface to be cleaned) is any surface, but the efficiency of cleaning is improved. from the viewpoint, the cleaning surface, surface contact area increases with the cleaned surface, i.e. it is preferable that the a face 2 3.
• the cleaning member further includes a support member such as a sponge, a cleaning pad, or a mouth, and is arranged so that the support member and the non-woven structure contact each other. It can also have a different form. ⁇ 0 2020/175496 9 ⁇ (: 170? 2020 /007541
• the sheet-shaped nonwoven structure 2 may be arranged so as to cover the entire surface of the plate-shaped supporting member 3.
• a sheet-like or plate-like bulky nonwoven structure 2 is laminated on at least one plate surface of a plate-like supporting member 3. It can be in the form of a body.
• a support member 3 can be arranged on the upper surface of a sheet-shaped non-woven structure 2 that has been unrolled, that is, a sheet-shaped non-woven structure that is conveyed in one direction by the mouth-to-roll method. It is also possible to adopt a form in which the above is arranged on one surface of the support member 3. Alternatively, as shown in FIG. 3 ([1]), it is also possible to adopt a configuration in which a sheath-shaped non-woven structure 2 is arranged on the peripheral surface of a mouth-shaped support member 3. In the forms shown in FIGS. 3 (a) to ( ⁇ 0), the surface on which the non-woven structure 2 is arranged is used as the cleaning surface in the cleaning member 1 to remove fine particles existing on the surface to be cleaned. It has excellent performance.
• the support member 3 preferably contains polyurethane, polyvinyl acetal, elastomer resin, or the like.
• the basis weight of the nonwoven structure is appropriately selected according to the specific application of the nonwoven structure.
• the permeation time of water droplets is within a specific range.
• the permeation time of water droplets into the sheet-like nonwoven structure is preferably 1 minute or less, more preferably 40 seconds or less, and further preferably 20 seconds or less.
• the retention of the cleaning liquid can be enhanced, and as a result, the removal efficiency of fine particles is further enhanced.
• the hydrophilicity of fibers means that the retention of water or aqueous liquid between the fibers becomes high.
• the permeation time of water droplets into the sheet-like nonwoven structure can be measured, for example, by the following method. In other words, using two pairs of 3_3 plates with a pre_thickness of 1 0 111 111, sandwich both ends of a sheet-shaped non-woven structure, and in that state, tension is applied to the non-woven structure. Was applied to fix the non-woven structure and the laboratory table so as to be separated from each other. Next, ion-exchanged water is made into water droplets 15 and dropped from above the non-woven structure fixed under tension. Visually observe the surface on which the water droplets have been dropped, and the time from the time when the water droplets are dropped until the water droplets are completely invisible is taken as the water droplet penetration time. The size of the non-woven structure to be measured is 80 5 001 1 111, Then, apply tension so that the sample does not slacken and pinch it, and place the sample at the center at a height of 1 Dropped from above.
• the monofilament constituting the non-woven structure is not particularly limited in its production method as long as the thickness is within the above range, and a fiber produced by a melt blown method or an electrospinning method can be used.
• the single fiber used in the present invention is preferably an electrospun fiber.
• Electrospinning refers to discharging a solution or melt containing a resin, which is a raw material of fibers, into an electric field while a high voltage is applied, whereby the discharged solution or melt is elongated and elongated, and the fiber length is increased. It is a method that can form long fibers having a small fiber diameter.
• thermoplastic resin having a fiber-forming property.
• thermoplastic resin examples include polyethylene, ⁇ 0 2020/1754 96 1 1 ⁇ (: 170? 2020 /007541
• the content of the thermoplastic resin used as the raw material resin is the total constituent components of the single fiber.
• 100 parts by mass it is preferably 70 parts by mass or more, more preferably 75 parts by mass or more, further preferably 80 parts by mass or more, and 98 parts by mass. It is preferably not more than 97 parts by mass, more preferably not more than 90 parts by mass, still more preferably not more than 90 parts by mass.
• the dispersion solvent for dispersing the resin is, for example, dimethylsulfoxide, dimethylacetamide, dimethylformamide or 1 ⁇ 1_methylpyrrolidone.
• Polar solvents alcohols such as glycerin, ethylene glycol and ethanol, ketones such as acetone and methyl ethyl ketone, halogenated solvents such as dichloromethane and chloroform, inorganic salt solvents such as nitric acid, zinc chloride aqueous solution, sodium thiocyanate aqueous solution
• solvents such as nitric acid, zinc chloride aqueous solution, sodium thiocyanate aqueous solution
• the single fiber constituting the non-woven structure preferably contains an ionic surfactant.
• an ionic surfactant By adding an ionic surfactant to the single fiber, it is possible to easily manufacture a non-woven structure containing a fine fiber and having a predetermined density.
• the single fiber is formed by electrospinning. In this case, the charge amount of the raw material resin can be increased, so that the solution or melt containing the resin can be efficiently drawn, and as a result, fibers with a smaller diameter can be produced with high production efficiency. .. Furthermore, hydrophilicity can be easily expressed in the produced fiber. ⁇ 0 2020/175496 12 (: 170? 2020 /007541
• the content of the ionic surfactant is preferably 2 parts by mass or more, and more preferably 4 parts by mass or more, relative to 100 parts by mass of all the constituent components of the single fiber. , 5 parts by mass or more, more preferably 10 parts by mass or less, more preferably 8 parts by mass or less, and further preferably 6 parts by mass or less.
• Examples of the ionic surfactant include a cationic surfactant, a zwitterionic surfactant, and an anionic surfactant.
• a cationic surfactant may be used alone.
• these ionic surfactants may be used in combination of two or more kinds as long as they are surfactants having the same ionicity.
• a plurality of cationic surfactants may be used, a plurality of amphoteric surfactants may be used, and a plurality of anionic surfactants may be used.
• Examples of the cationic surfactant include amine salt type cation surfactants such as fatty acid ester amine salt, fatty acid amide amine salt, urea condensed amine salt, and imidazoline salt, tetraalkylammonium salt, and trialkylbenzyl acetate.
• Examples thereof include quaternary ammonium salt type cationic surfactants such as ammonium salts, quaternary ammonium organic acid salts, fatty acid amide type quaternary ammonium salts, and alkylpyridinium salts.
• zwitterionic surfactants include aminoglutamates, alkyl-/3-alanine, or salts thereof, such as amino acid-type zwitterionic surfactants, and betaine-type zwitterionic surfactants such as alkyl betaine. Is mentioned.
• anionic surfactant examples include caprylic acid, capric acid, lauric acid, myristic acid, palmitic acid, stearic acid, oleic acid, linoleic acid, linolenic acid, arachidic acid, behenic acid, and erucic acid.
• Alkylether sulfates ([3 ⁇ 4- ⁇ one (Rei_1 ⁇ 1 2 Rei_1 - 1 2 ⁇ ) "-3_Rei 3 1 ⁇ / 1) alkyl ether sulfates such as, alkyl sulfonates ([3 ⁇ 4-3 ⁇ 3 1 ⁇ /1), alkyl benzene sulfonate ([3 ⁇ 4-11 -3 ⁇ 3 1 ⁇ /1), alkylnaphthalene sulfone (
• Dialkyl sulfosuccinate [3 ⁇ 4 — ⁇ ⁇ ⁇ 10 1 ⁇ 1 2 — ⁇ 1 ⁇ 1 (- 3 ⁇ 31 1 ⁇ /1) — ⁇ ⁇ ⁇ 1 [3 ⁇ 4), ⁇ 3 ⁇ 4-sulfo fatty acid ester ( [3 ⁇ 4- ⁇ 1 ⁇ 1 (— 3 ⁇ 31 1//1) — ⁇ ⁇ ⁇ — ⁇ 1 ⁇ 1 3 ), acyl isethionate ([3 ⁇ 4 — ⁇ ⁇ 101 ⁇ ( ⁇ 1 _ 1 2 ⁇ 1 _ 1 2 ) — 30 3 IV!), acyl taurine salt ([3 ⁇ 4- ⁇ ⁇ 1 ⁇ 11 ⁇ 1-( ⁇ 1 ⁇ 1 2 ) 2 -3 ⁇ 31 1 ⁇ /1), acyl alkyl taurine salt (8 _ hundred _ (one [3 ⁇ 4 ') one (01 to 1 2) 2 _ 3_Rei 3 1 ⁇ / 1), such as 1 ⁇ ⁇
• sulfate ester salt and sulfonate Represents a linear or branched alkyl group, the carbon number of which is preferably 8 or more, more preferably 10 or more, still more preferably 12 or more, preferably 22 or less, more preferably 20 or more. Or less, more preferably 18 or less.
• IV! represents a monovalent cation, preferably a metal ion, more preferably a sodium ion.
• One of these sulfate ester salts and sulfonates may be used alone, or a mixture of two or more thereof may be used.
• the single fiber contains an ionic surfactant
• an anionic surfactant among the ionic surfactants it is preferable to use a sulfonate.
• a fine fiber having a small diameter and a non-woven structure having a predetermined density can be efficiently produced.
• the cleaning member of the present invention may contain a constituent component other than the raw material constituting the single fiber in the non-woven structure as long as the effects of the present invention are exhibited.
• a constituent component other than the raw material constituting the single fiber in the non-woven structure as long as the effects of the present invention are exhibited.
• other constituents include polyurethane, polyvinyl acetate, cellulose, and derivatives thereof.
• the other constituent components may be contained, for example, in a fibrous form constituting the non-woven structure, or in a layered form such as being laminated on one surface of the non-woven structure. ..
• the smaller the content of the other constituent components the more preferable, but preferably 0.5 parts by mass or more, and more preferably 1 part by mass or more based on 100 parts by mass of all the constituent components of the single fiber. And preferably not more than 95 parts by mass, more preferably not more than 90 parts by mass.
• an additive may be added to the single fiber as long as the effect of the present invention is not impaired.
• additives examples include antioxidants, light stabilizers, ultraviolet absorbers, lubricants, antistatic agents and metal deactivators.
• antioxidants examples include phenol-based antioxidants, phosphite-based antioxidants, and thio-based antioxidants.
• Examples of the light stabilizer and the ultraviolet absorber include hindered amines, nickel complex compounds, benzotriazoles, benzophenones and the like.
• Examples of the lubricant include higher fatty acid amides such as stearic acid amide.
• Examples of the antistatic agent include fatty acid partial esters such as glycerin fatty acid monoester.
• Examples of metal deactivators include phosphons and epoxies. ⁇ 0 2020/1754 96 15 ⁇ (: 170? 2020 /007541
• Triazoles Triazoles, hydrazides, oxamids and the like.
• the content of the additive is preferably 0.001 part by mass or more based on 100 parts by mass of all the constituent components of the single fiber, and 0.05 part by mass. It is more preferable that the amount is not less than 10 parts by mass, preferably not more than 10 parts by mass, further preferably not more than 1 part by mass.
• the non-woven structure constituting the cleaning member is preferably impregnated with a cleaning liquid, depending on the purpose of cleaning, from the viewpoint of enhancing the cleaning efficiency of the particles to be cleaned.
• a cleaning liquid water alone or in addition to water, surfactants, bactericides, fragrances, fragrances, deodorants, ! ⁇ 1 regulators, organic solvents such as alcohol and cleaning agents such as abrasive particles can be used.
• the dispersion liquid include:
• the method comprises a spinning step of discharging a solution or melt of an electrospinning composition containing a raw material of monofilaments into an electric field, and spinning by an electrospinning method to form a monofilament deposit; Is roughly divided into two steps: a pressing step of forming a non-woven structure having a predetermined density by pressing.
• the manufacturing apparatus 10 shown in FIG. 4 is roughly divided into a composition supply section 10 ! ⁇ , an electrode section 10 _, a fluid ejection section 10 ⁇ 3, and a collection section 10 port.
• the manufacturing apparatus 10 has a housing 11, a discharge nozzle 12 and a composition supply section 10 including a hopper 19 for supplying the electrospinning composition 1.
• the electrospinning composition 1 supplied from the hopper 19 can be heated and melted in the case 11 to form a melt 8 of the electrospinning composition.
• a screw (not shown) provided in the casing 11 can supply the molten liquid in the direction of a discharge nozzle 12 described later.
• the discharge nozzle 12 is a member that discharges the molten liquid into an electric field, and includes a nozzle base 13 and a discharge nozzle tip portion 14.
• the discharge nozzles 12 are made of a conductive material such as metal.
• the nozzle base 13 and the discharge nozzle tip portion 14 are electrically insulated by an insulating member (not shown).
• the case 11, the discharge nozzle 12 and the nozzle base 13 are in communication with each other, so that the molten liquid 8 in the case 11 can be discharged from the discharge port of the discharge nozzle tip part 14. Has become.
• the discharge nozzle tip 14 is grounded and grounded.
• the tip portion 14 of the discharge nozzle is heated by, for example, heat transfer from a heater (not shown) provided in the nozzle base 13 or heat transfer from the molten liquid in the housing 11. There is.
• the heating temperature of the melt in the discharge nozzle tip 1 depending on the components of the electrospun composition, preferably 1 0 0 ° ⁇ As, more preferably 2 0 0 ° ⁇ As, preferably 4500° or less, more preferably 400° or less
• the manufacturing apparatus 10 has an electrode section 10 having a charging electrode 21 and a high voltage generator 22 connected to the charging electrode 21.
• the charging electrode 21 is arranged at a position separated from the discharge nozzle tip 14 by a predetermined distance, facing the discharge nozzle tip 14 and spaced apart.
• the charging electrode 21 is preferably made of a conductive material such as metal or covered with a dielectric.
• the distance between the discharge nozzle 12 and the charging electrode 21 depends on the fiber diameter (diameter) of the desired fiber and the accumulating property on the collecting electrode 27 described later, but is preferably 10 or more. ⁇ 0 2020/1754 96 17 ⁇ (: 170? 2020 /007541
• the distance between the discharge nozzle 12 and the charging electrode 21 is within this range, sparks and corona discharge are less likely to occur between the discharge nozzle 12 and the charging electrode 21 and the manufacturing equipment 10 malfunctions. Is hard to happen.
• the manufacturing apparatus 10 further includes a fluid ejecting unit 10 ⁇ 3.
• the fluid ejecting unit 100 is provided with a fluid ejecting device 23 below a virtual straight line connecting the composition supplying unit 100 and the electrode unit 10m.
• the fluid ejection device 23 is provided between the composition supply unit 10 and the electrode unit 10.
• An air flow is flowing between the tip of the discharge nozzle tip portion 14 and the charging electrode 21 in a direction intersecting the direction connecting the two. This air flow is ejected from the fluid ejection device 23.
• the molten liquid discharged from the tip portion 14 of the discharge nozzle can be transferred to an air stream to form finer fibers.
• air it is preferable to use air as the heating fluid as the air stream 8.
• the temperature of the heated air depends on the components of the composition for electrospinning, but it is preferably 100°C or higher, more preferably 200°C or higher, and preferably 500°C or higher. It is less than or equal to 0°, more preferably less than or equal to 400°.
• the flow rate of the air flow at the discharge port of the fluid ejecting device 23 when ejecting the air flow is preferably 5 0 1 _ / 0 1 ⁇ or more, and more preferably. n or more, and preferably n or less, more preferably It is less than or equal to n.
• the manufacturing apparatus 10 further includes a collection unit 10 port.
• the collecting section 10 is equipped with a collecting sheet 24 for collecting fibers, a carrying conveyor 25 for carrying fibers, a high voltage generator 26 and a collecting electrode 27.
• the collection part 100 is provided at a position above a virtual straight line connecting the composition supply part 10 and the electrode part 10 and at a position facing the fluid ejection part 1 0 ⁇ 3. ing. Each of the collection units 100 is electrically connected. ⁇ 0 2020/1754 96 18 ⁇ (: 170? 2020 /007541
• collecting sheet 2 4 is transported in the transport conveyor 2 5 drawn out from the raw mouth Lumpur 2 4 3.
• a collection electrode 27 for collecting the electrospun fibers is arranged inside the transport conveyor 25, a collection electrode 27 for collecting the electrospun fibers is arranged.
• a high voltage generator 26 is connected to the collector electrode 27, and a high voltage is applied to the collector electrode 27 by the high voltage generator 26.
• the fibers are attracted to the negatively charged transport conveyor 25 side and deposited on the surface of the collection sheet 24. Further, the collection electrode 27 may be grounded instead of the high voltage generator 26.
• the hopper 19 is filled with the electrospinning composition 1, and the electrospinning composition is heated and melted in the housing 11.
• the melt is extruded toward the discharge nozzle 12, and the melt is supplied to the discharge port of the discharge nozzle tip portion 14.
• the electrospinning composition 1 contains a thermoplastic resin, which is a raw material resin of a target single fiber, and, if necessary, an ionic surfactant and an additive, and a mixture thereof. Can be used.
• the method for producing the electrospinning composition 1 is not particularly limited, and may be produced, for example, as a masterbatch by previously mixing the respective raw materials. Alternatively, each raw material may be individually supplied to the production apparatus 10. It may be produced by kneading while feeding and heating and melting in the apparatus.
• the molten liquid is discharged from the discharge nozzle tip portion 14 into an electric field and is spun by the electrospinning method (spinning step).
• This electric field can be generated by, for example, grounding the tip portion 14 of the discharge nozzle 12 and connecting the charging electrode 21 to the high voltage generating device 22 to apply a voltage. ..
• the electrically charged melt is made into ultrafine fibers by repeating stretching due to the attractive force and the self-repulsive force due to the charge of the melt itself, and becomes an electrically attractive force toward the charging electrode 21. ⁇ 0 2020/175496 19 ⁇ (: 170? 2020 /007541
• the discharge amount of the melted electrospinning composition is 1 It is preferable that it is more than ⁇ , 29 It is more preferable that it is not less than ⁇ , and it is more preferable that it is not more than 209 / ⁇ !
• the melt flow rate (1 ⁇ /1 [3 ⁇ 4) of the melted electrospinning composition is set from the viewpoint of facilitating stretching of the melt during electrospinning and making the fiber to be produced thinner.
• Melt flow rate (IV! [3 ⁇ 4) is in accordance with "I 3 ⁇ 7 210.
• polypropylene resin is used as the raw material resin, under the load of 230 ° ⁇ , 2.1 6 1 ⁇ 9 , Hole diameter 2.0 9 5 111 111, measured with a die with length 80!
• the molten liquid discharged from the discharge nozzle tip portion 14 is further stretched and fine fibers are generated. While being transported.
• the molten liquid discharged from the tip of the discharge nozzle ⁇ 14 is conveyed to the air stream 8 before reaching the charging electrode 21 and its flight direction changes and the molten liquid is stretched.
• Fibers are produced by being extremely thinned and solidified.
• the fibers generated from the molten liquid are conveyed by the air stream 8 and are attracted by the electric attraction generated in the collecting electrode 27, and are deposited on the surface of the collecting sheet 24 facing the fluid ejecting device 23. To do.
• the applied voltage applied between the discharge nozzle 12 and the charging electrode 21 or the collecting electrode 27 is preferably 1 1 ⁇ 0 1 ⁇ V or more, more preferably 1 8 0 1 ⁇ V or more. Further, it is preferably 1 5 1 ⁇ or less, more preferably 1 10 1 ⁇ V or less. When the applied voltage is within this range, the melt is easily charged with good charge, and the production efficiency of fibers having a small fiber diameter can be further enhanced.
• Spark and corona discharge are less likely to occur between the charging electrode 21 and the collecting electrode 27, and malfunction of the device is less likely to occur.
• the fiber thus produced is considered to be one continuous fiber, that is, a single fiber, between the discharge nozzle 12 and the collection sheet 24. Even if the fibers are temporarily cut due to the manufacturing conditions and the surrounding environment, the cut fibers will immediately come into contact with each other, and as a result, the ultrafine fibers will be collected from the discharge nozzle 1 2 to the collection sheet. By the time of 24, it is considered as if it were one continuous fiber.
• the monofilaments are deposited on the collection sheet 24 to form a monofilament stack on the collection sheet 24.
• the single fiber and the deposit thereof produced through the above steps are spun using the above-described electrospinning composition as a raw material, and there is substantially no alteration of the composition by melt electrospinning. Therefore, the composition of the electrospinning composition as the raw material and the composition of the monofilament as the product are substantially the same.
• a discharge nozzle that discharges a solution of an electrospinning composition a syringe that communicates with the discharge nozzle and can supply the electrospinning composition to the discharge nozzle, and a spun fiber are collected.
• a conductive collector (not shown) is provided for spinning, and spinning can be performed with a voltage applied between the syringe and the conductive collector.
• the syringe contains a solution of the composition, the solution is supplied from a syringe to a discharge nozzle, the solution is discharged from the discharge nozzle into an electric field, and an ultrafine single particle containing a raw material resin is prepared by electrospinning.
• the fibers can be spun to form a monofilament stack on the conductive collector.
• nanofibers having extremely small fiber diameters. ⁇ 0 2020/1754 96 21 ⁇ (: 170? 2020 /007541
• the median fiber diameter of the single fiber is, as described above, preferably 1 O O n m or more and 2 0 0 0 1 ⁇ O! or less.
• the average fiber length of the single fibers is preferably 10 or more, more preferably 50 or more, and further preferably 100 or more!
• the average fiber length of a single fiber can be taken as the arithmetic average value by measuring the length of 500 fibers in the longitudinal direction.
• the apparent density is preferably 0 by pressing the formed monofilament stack.
• the pressure and temperature applied should be controlled and pressed. Further, the applied pressure can be appropriately changed so that the nonwoven structure has a desired shape.
• the obtained monofilament stack is used to measure the dimensions of the target non-woven structure and A compression-molded nonwoven structure 2 can be obtained by putting the mold in a mold corresponding to the shape and applying pressure.
• the pressure applied to the deposit is preferably 10 As described above, more preferably 1 0 0 1 ⁇ 1 / ⁇ 12 or more, and preferably
• the temperature at the time of pressing can be appropriately set at a temperature that does not exceed the melting point or pour point of the raw material resin of the single fiber.
• the temperature is set based on the resin having the lowest melting point or pour point among the resins used.
• the pour point is the length of resin to be measured 4 01 01 01 Width 5 01 01 X thickness It is made into a rate-like solid, and this is applied to a viscoelasticity measuring device (for example, 011 ⁇ /1718700 manufactured by Hitachi High-Tech Science Co., Ltd.). Dynamic viscoelasticity is measured while raising the temperature to the glass transition point of the resin to be measured and the temperature range higher than the glass transition region (frequency at measurement is 1 1 to 1 2, strain amplitude is 0.025% When the storage elastic modulus' is higher than the loss elastic modulus ", the loss elastic modulus ⁇ 0 2020/1754 96 22 ⁇ (: 170? 2020 /007541
• the pressure and temperature at the time of pressing can be set to the above-mentioned pressure and temperature.
• the cross-sectional shape of at least one monofilament at the contact point between the monofilaments without fusion is transformed into a shape different from the cross-sectional shape of the monofilament at the non-contact point.
• washing member 1 including the non-woven structure 2 and the support member 3 can be obtained by further performing a step of winding the body 2 around the outer surface of the support member.
• the method for joining the non-woven structure 2 and the support member 3 is not particularly limited as long as the effects of the present invention are exhibited, and for example, by using a joining means such as heat sealing or an adhesive, it can be partially or entirely used. Can be joined together.
• the composition for electrospinning contains an ionic surfactant, from the viewpoint of more effectively expressing hydrophilicity on the fiber surface and enhancing hydrophilicity of the nonwoven structure, at least the nonwoven structure is used. It is also preferable to subject the body to heat treatment.
• the heat treatment method is not particularly limited as long as the fusion of the single fibers does not occur.
• a method in which hot air is blown onto the fibers for treatment, a method for irradiating the fibers with infrared rays, or heating for hot water is used.
• Method of immersing fiber in liquid, method of passing fiber between a pair of heated mouths, holding fiber in a heated space such as a constant temperature bath ⁇ 0 2020/1754 96 23 ⁇ (: 170? 2020 /007541
• heat treatment may be performed at a temperature not exceeding the melting point or pour point of the raw material resin of the single fibers.
• the cleaning member including the non-woven structure manufactured in this manner can be used as a cleaning member alone, or by being attached to a cleaning tool such as a wiper or a cleaning device, a building such as a floor or a wall surface, a cabinet, It can be used for cleaning windows, mirrors, doors, doorknobs and other fittings, rugs, furniture, tabletop furniture, and the surface of objects to be cleaned such as the skin surface of the body.
• a cleaning tool such as a wiper or a cleaning device
• a building such as a floor or a wall surface, a cabinet
• It can be used for cleaning windows, mirrors, doors, doorknobs and other fittings, rugs, furniture, tabletop furniture, and the surface of objects to be cleaned such as the skin surface of the body.
• the cleaning member may be used in a dry state or may be used in a state in which a cleaning liquid or a chemical liquid is impregnated.
• the cleaning member of the present invention can effectively clean and remove fine particles having a particle size of several tens to several hundreds n°!, such as polishing abrasive particles, a semiconductor substrate such as a silicon wafer or a It can be suitably used for cleaning the surfaces of precision electronic components such as magnetic recording substrates for which the smoothness of the surface to be cleaned is highly required, and the frequency of surface defects on these substrates can be reduced.
• the present invention has been described above based on its preferred embodiments, the present invention is not limited to the above embodiments.
• the composition supply unit 10 and the fluid ejection unit 100 were separately provided, but instead of this, the composition supply unit 10 and the fluid ejection unit 1 0 ⁇ 3 may be included.
• an electric field is generated between a nozzle for discharging a solution or a melt of an electrospinning composition and the nozzle.
• An electrode, a high-voltage generator that applies a voltage to the electrode, and a collection unit that collects fibers generated from the electrospinning composition, and a solution or a melt is circulated between the casing and the nozzle.
• a manufacturing apparatus in which a possible flow passage is formed and a fluid injection unit is formed so as to surround the flow passage may be used. ⁇ 0 2020/1754 96 24 ⁇ (: 170? 2020 /007541
• a voltage is applied to the collection electrode 27 at the port of the collection unit 10 instead of the electrode unit 10 to generate an electric field between the collection electrode 27 and the nozzle, and in this state, from the discharge nozzle 12
• the solution or the molten liquid may be directly ejected toward the mouth of the collection unit 10.
• the fluid ejecting section 10 ⁇ 3 in this embodiment is capable of ejecting the air stream 8 along the ejection direction of the molten liquid in the ejection nozzle 12.
• the electrode for generating an electric field between the discharge nozzle 12 and the discharge nozzle 12 was provided as the charging electrode 21 separately from the composition supply section 108.
• the charging electrode 21 may be incorporated in the composition supply section 108.
• the charging electrode 21 is a concave curved electrode in which a concave curved surface is arranged so as to surround the discharge nozzle 12.
• a voltage may be applied to the electrode.
• the collecting section 100 arranged facing the discharge nozzle 12 is provided with a suction means such as a suction box which is not electrically connected, instead of the collecting electrode 27.
• a suction means such as a suction box which is not electrically connected, instead of the collecting electrode 27.
• the spun fibers may be sucked and the fibers may be deposited on the collection sheet 24.
• the present invention further discloses the following cleaning member and a method for manufacturing the same.
• a non-woven structure that is retained by the entanglement of single fibers having a median fiber diameter of 100 0 or more and 200 0 0 n or less,
• the nonwoven structure has an apparent density of 0.0 5 9 / Rei_rei_1 3 or more ⁇ . 6 is 0 9 / hundred! 3 below, the cleaning member.
• the non-woven structure has a porosity of not less than 30% and not more than 75%, and in the pore volume distribution obtained by differentiating the cumulative pore volume by the logarithmic value of the pore diameter, in the pore diameter range of 50 or less. It has a top peak and a pore size range of more than 50. ⁇ 0 2020/175496 25 ⁇ (: 170? 2020 /007541
• the cleaning member according to ⁇ 1> which has a distribution that does not have a top peak in the surrounding area.
• the cleaning member according to ⁇ 4> wherein the non-woven structure is arranged so as to cover the entire surface of the support member.
• the cleaning member according to ⁇ 4> wherein the sheet-shaped or bulk-shaped non-woven structure is arranged on at least one surface of the plate-shaped support member.
• the cleaning member according to ⁇ 4> wherein the sheet-shaped non-woven structure is arranged on the peripheral surface of the mouth-shaped support member.
• the non-woven structure is in the form of a sheet, and the penetration time of water droplets into the non-woven structure is preferably 1 minute or less, more preferably 40 seconds or less, and further preferably 20 seconds or less.
• the cleaning member according to any one of ⁇ 1> to ⁇ 8>.
• the single fiber contains a thermoplastic resin
• the thermoplastic resin may be polyethylene, polypropylene, polyolefin resin such as ethylene-refin copolymer, ethylene-propylene copolymer, polyester resin such as polyethylene terephthalate, polyamide resin such as polyamide 6 and polyamide 66, polyamine resin. At least one selected from vinyl-based resins such as vinyl chloride and polystyrene, and acrylic-based resins such as polyacrylic acid and polymethylmethacrylate, and the like described in any one of the above items ⁇ 1> to ⁇ 10>. Cleaning member.
• the content of the thermoplastic resin is preferably 70 parts by mass or more, and more preferably 75 parts by mass or more, based on 100 parts by mass of all the constituent components of the single fiber. It is more preferably 0 parts by mass or more, preferably 98 parts by mass or less, and more preferably 97 parts by mass or less,
• the cleaning material according to ⁇ 11> further preferably 90 parts by mass or less.
• the content of the ionic surfactant is preferably 2 parts by mass or more, more preferably 4 parts by mass or more, and 5 parts by mass with respect to 100 parts by mass of all the constituent components of the single fiber. It is more preferably not less than 10 parts by mass, more preferably not more than 10 parts by mass, more preferably not more than 8 parts by mass, further preferably not more than 6 parts by mass, in the above ⁇ 13> The cleaning member described.
• the apparent density of the nonwoven structure is preferably ⁇ . 05 9 / ⁇ 3 or more, more preferably ⁇ . More preferably ⁇ .
• the non-woven structure has a porosity of preferably 30% or more, more preferably 40% or more, further preferably 50% or more, and preferably 75% or less, more preferably 70% or less, and further preferably The cleaning member according to any one of ⁇ 1> to ⁇ 15>, which is 65% or less.
• the cumulative pore volume of the non-woven structure is preferably more than 0.80! !_/9, more preferably more than ! 0 !_/9, and 20 ⁇ 11_. /9 or less, preferably 10
• Electrospinning is performed using the electrospinning composition containing a resin to form a monofilament deposit containing the resin,
• the apparent density is ⁇ when the deposit is pressed. 6 0 9 /
• the obtained monofilament stack was supplied to a hand press machine (IV! ⁇ n ⁇ 6 3 "6 3 3-10 manufactured by Toyo Seiki Co., Ltd.) to obtain room temperature (25 ° ⁇ ).
• a sheet-shaped non-woven structure which was shaped by the entanglement of monofilaments, was manufactured by pressing it with 9 4 0 0 1 ⁇ 1 / ⁇ 0 1 2.
• the thickness of this non-woven structure was 7 6.
• the penetration time of water droplets was 45 seconds
• the apparent density of the non-woven structure was 0.4. 3 and the porosity is 5 5% had a pore distribution showing the top peaks at pore diameters of 8.
• This non-woven structure is arranged so as to cover the entire outer surface of a plate-shaped supporting member (a substrate cleaning pad made of polyvinyl acetate, manufactured by Aion Co., Ltd., model number: series), and A cleaning member 1 was obtained.
• the plate-shaped support member described above was used as it was as a cleaning member.
• the cleaning member of this comparative example consisted only of the plate-shaped support member and did not have the non-woven structure. ⁇ 0 2020/1754 96 30 ⁇ (: 170? 2020 /007541
• a cleaning member composed of a non-woven structure which is a compression molded body was manufactured. Specifically, the monofilament stack obtained by the method described above (basis weight: 1 9 9 / 0! 2 ) was X Horizontal 1 8 0 1 0 1 Depth 3 0 01 01 Insert into a rectangular parallelepiped mold, then,
• Example 1 and Comparative Example 1 The cleaning member of Example 1 and Comparative Example 1 was mounted on a substrate cleaning apparatus, and the number of surface defects on the silicon wafer was measured to evaluate the particle cleaning performance.
• the specific procedure was as follows: finish polishing of the silicon wafer, cleaning with a cleaning member, and measurement of surface defects. Details of the evaluation procedure and conditions are shown below.
• the final polishing of the silicon wafer was performed under the following polishing conditions.
• Rough polishing was performed on a silicon wafer using a commercially available polishing liquid, and then finish polishing was performed under the following final polishing conditions.
• the haze of a silicon wafer after rough polishing is 2 to 3 Met.
• the haze is a value in the dark field wide oblique incidence channel (mouth) measured using a 1_8-chome ⁇ ⁇ “Made in 3” “3 3 0 3 3 39 1 device.
• Hydroxyethyl cellulose manufactured by Daicel Co., Ltd., 3 1400, molecular weight 250,000
• polyethylene glycol (6) 600 weight average molecular weight 600, Wako Pure Chemical Industries Ltd.
• Wako first grade ammonia water
• silica particles ? !_ _ 3, Fuso Kagaku Kogyo Co., Ltd.
• polishing obtained by mixing ion-exchanged water.
• the liquid concentrate was diluted 40 times with ion-exchanged water to obtain a final polishing liquid.
• finishing polish ⁇ 02020/175496 31 ⁇ (: 170? 2020 /007541
• composition is as follows.
• Hydroxyethyl cellulose 0.01 mass%
• Single-crystal silicon wafer 200 mm diameter silicon single-sided mirror-polished wafer, conductivity type: P, crystal orientation: 100, resistivity: 0.1 Q cm or more and 100 Q cm unsatisfactory
• Polishing machine Single-sided 8-inch polishing machine “GR I N D— X SP P 600 s” (Okamoto Manufacturing)
• -Polishing pad Suede pad (Toray Cortex, Asker hardness: 64, Thickness: 1.37 mm, Nap length: 450 m, Opening diameter: 60 /xm)
• the silicon wafer was subjected to a total of 2 sets, with one set including cleaning with a cleaning member, ozone cleaning, and diluted hydrofluoric acid cleaning. After that, the cleaned silicon wafer was spun at 1,500 rpm for 2 minutes for spin drying. The conditions of each washing were as follows.
• the cleaning time was 1 minute.
• ozone water at room temperature (23 °C) containing 20 ozone was directed toward the center of a silicon wafer rotating at 600 "01 at a flow rate of 1 !_ / n for 3 minutes. Jetted.
• the surface defects of the silicon wafer after cleaning are present on the surface of the silicon wafer by using the ⁇ !_8 Tencor "3 Li 3 0 3 1 ⁇ 3 1 — 0 1_ 3" device.
• the evaluation was performed by measuring the number of particles having a particle size of n or more and 50 n or less.
• the evaluation results of the surface defects were evaluated based on the value at the dark-field oblique beam composite channel (0(30) measured by the above-mentioned apparatus. The smaller this value is, the smaller the surface defects are.
• FIGS. 5(3) and (3) The numbers of surface defects generated on the silicon wafers when the cleaning members of Example 1 and Comparative Example 1 were used for cleaning are shown in FIGS. 5(3) and (3) as the results.
• Figure 5 (a) shows that the smaller the number of white spots in the inner black area surrounded by the circle, the less the occurrence of surface defects, and the better the cleaning performance for fine particles.
• the cleaning member of Example 1 has less fine particles remaining on the surface of the silicon wafer as compared with the cleaning member of Comparative Example 1. It can be seen that the number of defects is small. Therefore, the cleaning material of the present invention has excellent fine particle cleaning performance, and is particularly suitable for cleaning precision electronic components such as substrates for which effective removal of fine particles is desired.
• a cleaning member having excellent cleaning performance for fine particles adhering to the surface to be cleaned.

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• Engineering & Computer Science (AREA)
• Textile Engineering (AREA)
• Mechanical Engineering (AREA)
• Manufacturing & Machinery (AREA)
• Condensed Matter Physics & Semiconductors (AREA)
• General Physics & Mathematics (AREA)
• Physics & Mathematics (AREA)
• Computer Hardware Design (AREA)
• Microelectronics & Electronic Packaging (AREA)
• Power Engineering (AREA)
• Nonwoven Fabrics (AREA)
• Cleaning Implements For Floors, Carpets, Furniture, Walls, And The Like (AREA)
• Spinning Methods And Devices For Manufacturing Artificial Fibers (AREA)
• Cleaning In General (AREA)

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• 2019
  • 2019-02-28 JP JP2019037024A patent/JP6959280B2/ja active Active
• 2020
  • 2020-02-25 SG SG11202108390RA patent/SG11202108390RA/en unknown
  • 2020-02-25 CN CN202080016583.0A patent/CN113473893B/zh active Active
  • 2020-02-25 WO PCT/JP2020/007541 patent/WO2020175496A1/ja not_active Ceased
  • 2020-02-25 KR KR1020217025604A patent/KR102433468B1/ko active Active
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