WO2020122033A1 - 実装装置 - Google Patents
実装装置 Download PDFInfo
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- WO2020122033A1 WO2020122033A1 PCT/JP2019/048163 JP2019048163W WO2020122033A1 WO 2020122033 A1 WO2020122033 A1 WO 2020122033A1 JP 2019048163 W JP2019048163 W JP 2019048163W WO 2020122033 A1 WO2020122033 A1 WO 2020122033A1
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- Prior art keywords
- mounting
- shape
- image
- paste
- coating
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Classifications
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
- H05K13/08—Monitoring manufacture of assemblages
- H05K13/083—Quality monitoring using results from monitoring devices, e.g. feedback loops
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
- H05K13/04—Mounting of components, e.g. of leadless components
- H05K13/046—Surface mounting
- H05K13/0465—Surface mounting by soldering
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
- H05K13/08—Monitoring manufacture of assemblages
- H05K13/081—Integration of optical monitoring devices in assembly lines; Processes using optical monitoring devices specially adapted for controlling devices or machines in assembly lines
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
- H05K13/08—Monitoring manufacture of assemblages
- H05K13/081—Integration of optical monitoring devices in assembly lines; Processes using optical monitoring devices specially adapted for controlling devices or machines in assembly lines
- H05K13/0817—Monitoring of soldering processes
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/30—Assembling printed circuits with electric components, e.g. with resistor
- H05K3/32—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
- H05K3/34—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
- H05K3/3457—Solder materials or compositions; Methods of application thereof
- H05K3/3468—Applying molten solder
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2210/00—Aspects not specifically covered by any group under G01B, e.g. of wheel alignment, caliper-like sensors
- G01B2210/56—Measuring geometric parameters of semiconductor structures, e.g. profile, critical dimensions or trench depth
Definitions
- a mounting device for mounting a chip component after applying a paste on a substrate is disclosed.
- a mounting device for mounting a chip component such as a semiconductor chip on a substrate has been widely known.
- Some of these mounting apparatuses have an application unit for applying a paste such as NPC to a substrate and a bonding unit for bonding a chip component onto the paste applied to the substrate.
- the coating unit and the bonding unit have a camera, and based on an image obtained by using the camera, the dispenser and the bonding head are positioned, and the quality of the mounting result is judged.
- Patent Document 1 discloses a technique of inspecting a solder joint state of an electronic component solder-bonded to a mounting board using an X-ray inspection apparatus.
- Patent Document 2 discloses a technique of measuring the volume of the die bond paste applied to the lead frame with a laser displacement measuring device before fixing the semiconductor chip to the lead frame.
- this specification discloses a mounting apparatus that can identify the cause of a mounting failure.
- a mounting device disclosed in the present specification is a mounting device for mounting a chip component on a substrate via a paste, and a paste for applying the paste to the substrate under a predetermined application condition to form an application body.
- the three-dimensional shape of the application body is obtained as the first shape from the first image information, and the second image information is obtained.
- a control unit for calculating From the three-dimensional shape of the mounting body as a second shape, and a control unit for calculating, wherein the control unit evaluates the coating process or the mounting process based on the first shape and the second shape. It is characterized by doing.
- the cause of mounting failure can be specified.
- FIG. 1 is a schematic plan view of the mounting apparatus 10.
- FIG. 2 is a block diagram showing the configuration of the mounting apparatus 10.
- the mounting apparatus 10 mounts one or more chip components 104 on a substrate 100 to manufacture a mounted body 106.
- a die bonding apparatus for fixing the chip component 104 called “die” to the substrate 100 via a paste adhesive made of resin or metal will be described as an example.
- the mounting apparatus 10 is provided with a transport rail 12 that transports the substrate 100 in one direction (X direction).
- the substrate 100 in this example is a lead frame having one or more mounting areas for the chip components 104.
- an application unit 14 a first inspection unit 16, a bonding unit 18, and a second inspection unit 20 are provided in this order from the upstream side.
- the coating unit 14 coats the paste on the surface of the substrate 100, and has a dispenser 24, a moving mechanism, and the like.
- the paste is an adhesive that bonds the chip component 104 to the mounting section of the substrate 100, and is made of, for example, resin or solder.
- the paste applied to the substrate 100 is referred to as “applied body 102”.
- the dispenser 24 discharges the paste onto the substrate 100 to form the application body 102, and is, for example, a syringe type dispenser.
- the moving mechanism 26 (see FIG. 2) has a motor, an air cylinder, a hydraulic cylinder, etc. as a drive source, and moves the dispenser 24 in the Y direction (that is, the direction orthogonal to the transfer path of the substrate 100) and the Z direction. To do.
- the number of the dispenser 24 is not limited to one and may be plural.
- the coating unit 14 also has an imager 28 that captures a planar view image by picking up the mounting area to be coated from the vertical direction (see FIG. 2).
- the imager 28 images the mounting section both before and after applying the paste.
- the position of the dispenser 24 with respect to the mounting section is calculated based on the image data obtained by the image pickup device 28, and the dispenser 24 is positioned based on the calculation result.
- the imager 28 functions as a first imager that captures the first planar view image of the application body 102 formed in the mounting section from the vertical direction.
- the acquired first planar view image is stored in the memory 50 of the control unit 22 in association with the identification information for each mounting section (for example, the ID number set for each mounting section).
- the first inspection unit 16 is provided between the coating section 14 and the bonding section 18, and has an image pickup device 38 and a moving mechanism 40.
- the image pickup device 38 picks up an image of the coating material 102 from the company newsletter to obtain a first perspective image.
- the first perspective image is stored in the memory 50 of the control unit 22 in association with the identification information for each mounting section.
- the configuration of the image pickup device 38 is not limited to the configuration for obtaining a perspective image as long as it can obtain image information including height information. Therefore, the configuration for acquiring the image information including the height information may be, for example, a stereo camera system having two cameras having parallax.
- the imager 38 may be a system that uses a non-contact length measuring device that scans and acquires the surface height of an object. Further, an imager using a so-called light cutting method, in which a geometrical light is applied to the surface of an object and then the object is imaged by an image sensor, may be used.
- the imager 38 is not limited to an imager that acquires only the surface shape of the target object, but may be an imager that also acquires the cross-sectional shape of the target object.
- the imager 38 may be an imager that acquires a tomographic image of an object using X-rays or the like.
- the image pickup device 38 acquires a perspective image.
- the bonding section 18 mounts a chip component 104 such as a semiconductor chip on the coating body 102 coated on the mounting section.
- the bonding unit 18 is provided with a bonding head 30 that suction-holds and conveys the chip component 104, a moving mechanism 32 that moves the bonding head 30 in the Y and Z directions, and an imager 34.
- a wafer stage 36 is provided on the opposite side of the bonding section 18 with the transport rail 12 interposed therebetween.
- a chip component 104 (die) obtained by dicing a wafer is placed on the wafer stage 36.
- the bonding head 30 picks up the chip component 104 from the wafer stage 36 and bonds it to the target mounting section.
- the one in which the chip component 104 is fixed via the coating body 102 is referred to as a "mounting body 106".
- the image pickup device 34 has almost the same configuration as the image pickup device 34 provided in the coating section 14, and picks up the mounting area to be mounted and the chip component 104 to be picked up from the vertical direction.
- the control unit 22 calculates the relative position between the bonding head 30 and the wafer stage 36 or the substrate 100 based on the image picked up by the image pickup device 34, and positions the bonding head 30 according to the calculation result. Further, the imager 34 images the mounting section, and thus the mounting body 106, even after bonding.
- the image obtained by picking up the mounting body 106 is stored in the memory 50 of the control unit 22 as a second planar view image in association with the identification information of the mounting section.
- a second inspection unit 20 is provided further downstream of the bonding section 18.
- the second inspection unit 20 has substantially the same configuration as the first inspection unit 16, and includes an image pickup device 42 and a moving mechanism 44 that moves the image pickup device 42 in the X direction.
- the imager 42 of the second inspection unit 20 acquires the second perspective image by obliquely imaging the mounting section after bonding, that is, the mounting body 106.
- the second perspective image is stored in the memory 50 of the control unit 22 in association with the identification information for each mounting section. Similar to the imager 38, the imager 42 is not particularly limited in its configuration as long as it can acquire image information including height information.
- the imager 42 may have the same configuration as the imager 38 of the first inspection unit 16 or a different configuration.
- the control unit 22 controls the driving of the coating unit 14, the bonding unit 18, the first inspection unit 16, and the second inspection unit 20 described above.
- the control unit 22 includes a CPU 48 that performs various calculations and a memory 50 that stores various programs and data.
- the control unit 22 is illustrated as a single device in FIG. 2, the control unit 22 may be configured by combining a plurality of computers and has a plurality of CPUs 48 and a plurality of memories 50. May be.
- the control unit 22 may include a control computer incorporated in the mounting apparatus 10 and a personal computer capable of communicating with the control computer.
- control unit 22 controls the driving of each unit that configures the mounting apparatus 10, and calculates the three-dimensional shapes of the application body 102 and the mounting body 106 based on the above-described perspective image, planar view image, and the like. To do. Then, the control unit 22 independently evaluates the coating process and the mounting process based on the three-dimensional shape, which will be described later.
- An input device 52 and an output device 54 are connected to the control unit 22.
- the input device 52 is for inputting various data and commands to the control unit 22, and corresponds to, for example, a keyboard, a mouse, a dedicated switch, a microphone, or the like.
- the output device 54 presents various kinds of information to the user, and corresponds to, for example, a display or a speaker.
- FIG. 3 is a diagram showing a state of the mounting section after the paste is applied and FIG. 4 is a state of the mounting section after the bonding.
- An application body 102 formed by applying a paste is formed on the substrate 100 after applying the paste and before bonding. As shown in FIG. 3, the applicator body 102 bulges into a substantially dome shape due to surface tension.
- the diameter of the applied body 102 is referred to as "paste diameter d1”
- the maximum height of the applied body 102 is referred to as "paste height h1”.
- the chip component 104 is fixed on the substrate 100 by the coating body 102 to form the mounting body 106.
- the diameter of the coating body 102 that constitutes the mounting body 106 will be referred to as a “mounting diameter d2”.
- the distance from the surface of the substrate 100 to the upper surface of the chip component 104 is “die height h2”
- the distance from the surface of the substrate 100 to the paste highest point is “fillet height h3”
- the distance from the surface of the substrate 100 to the bottom surface of the chip component 104 Is referred to as "bottom height h4".
- FIGS. 5 and 6 are flowcharts showing the flow of the mounting process.
- the substrate 100 is supplied to the transport rail 12 (S10).
- the controller 22 drives the transport rail 12 to transport the substrate 100 to the coating position set on the transport rail 12 (S12).
- the image pickup device 28 provided in the coating unit 14 acquires a planar view image of the substrate 100.
- the control unit 22 calculates the relative position of the substrate 100 with respect to the dispenser 24 based on the plan view image, and positions the substrate 100 and the dispenser 24 (S14).
- the control unit 22 drives the dispenser 24 to apply the paste to the mounting section on the surface of the substrate 100 to form the application body 102 (S16). If the paste can be applied to one mounting section, the control unit 22 drives the image pickup device 28 to image the application body 102 (S18).
- the planar view image obtained by this imaging is stored in the memory 50 of the control unit 22 as the first planar view image. Such a coating process is repeatedly executed for all mounting sections of the substrate 100.
- the control unit 22 transfers the substrate 100 to the first inspection position set on the transfer rail 12 (S22).
- the image pickup device 38 picks up an image of the application body 102 obliquely (S24).
- the perspective image obtained by this imaging is stored in the memory 50 of the control unit 22 as the first perspective image.
- the control unit 22 subsequently transports the substrate 100 to the bonding position set on the transport rail 12 (S28). ).
- the image pickup device 34 provided in the bonding unit 18 acquires a planar view image of the chip component 104 sucked and held by the substrate 100 and the bonding head 30.
- the control unit 22 calculates the relative position of the chip component 104 with respect to the substrate 100 based on the plan view image, and positions the chip component 104 (S30). If the positioning is possible, the control unit 22 drives the bonding head 30 to press the chip component 104 onto the application body 102 and fix it (S32).
- the control unit 22 drives the imaging device 34 to image the mounting body 106 (S34).
- the planar view image obtained by this imaging is stored in the memory 50 of the control unit 22 as the second planar view image.
- Such mounting processing is executed for all mounting sections of the substrate 100.
- the control unit 22 conveys the substrate 100 to the second inspection position set on the conveyance rail 12 (S38).
- the image pickup device 42 picks up an image of each mounting body 106 obliquely (S40).
- the perspective image obtained by this imaging is stored in the memory 50 of the control unit 22 as the second perspective image.
- the control unit 22 evaluates the mounting process based on at least the first perspective image and the second perspective image (S44). When the evaluation is completed for all the mounting sections, the board 100 is output (S46).
- the coating process and the mounting process are individually evaluated. That is, in most of the conventional evaluations of the mounting process, the shape of the mounting body 106 is compared with the target shape, and the quality of the mounting process is judged based on the difference.
- the difference from the target shape includes the difference caused by the coating failure and the difference caused by the mounting failure. Therefore, in the conventional technology that focuses only on the difference between the shape of the mounting body 106 and the target shape, it is difficult to determine whether the cause of the mounting failure is the coating process or the mounting process. Then, since the cause of the defect cannot be identified, appropriate measures cannot be taken to reduce the defect.
- the first shape which is the three-dimensional shape of the application body 102 and the three-dimensional shape of the mounting body 106 can be calculated. Since the two shapes can be calculated, the coating process and the mounting process can be individually evaluated, and the cause of the mounting defect can be specified.
- the coating process may be evaluated based on the first shape
- the mounting process may be evaluated based on the evaluation result of the coating process and the second shape.
- FIG. 7 is a flowchart showing an example of such evaluation processing.
- the control unit 22 first calculates the first shape, which is the three-dimensional shape of the coating body 102 formed on the substrate 100, from the first perspective image (S50).
- the first shape preferably includes at least the paste height h1, the paste diameter d1, and the paste volume Vp.
- the first shape may be a set of coordinate values of the paste surface position.
- the control unit 22 also calculates the second shape, which is the three-dimensional shape of the mounting body 106 obtained by bonding the chip component 104, from the second perspective image (S52).
- This second shape preferably includes at least a diameter d2, a die height h2, and a fillet height h3.
- the second shape may be a set of coordinate values of the surface position of the mounting body 106.
- the control unit 22 calculates a paste error E1 which is an error between the calculated first shape and the first target shape stored in the memory 50 (S54).
- the first target shape is an ideal shape of the applicator body 102.
- the first target shape may be set in advance by the user.
- the initial shape set by the user may be used as the first target shape by correcting the shape on the device side in accordance with changes in various conditions (for example, changes in paste viscosity).
- the paste error E1 is not particularly limited in its calculation method as long as it represents the degree of difference between the first target shape and the first shape (measured shape). Therefore, the paste error E1 may be a deviation of a representative dimension value (for example, the paste height h1, the paste diameter d1, etc.) that represents the shape of the paste. Further, when the first target shape and the first shape are a set of coordinate values of the surface position of the paste, the paste error E1 may be the root mean square deviation or standard deviation of the Z coordinate values.
- the control unit 22 calculates a final error Ef which is an error between the calculated second shape and the second target shape stored in the memory 50 (S56).
- the second target shape is an ideal shape of the mounting body 106.
- the second target shape is preset by the user according to the required product specifications.
- the calculation method of the final error Ef is not particularly limited as long as it represents the degree of difference between the second target shape and the first shape (measured shape). Therefore, the final error Ef may be a deviation of a representative dimension value (for example, the die height h2, the mounting diameter d2, etc.) representing the shape of the mounting body 106.
- the mounting error E2 may be the root mean square deviation or standard deviation of the Z coordinate values.
- the control unit 22 compares the calculated paste error E1 with the allowable paste error Edef1 stored in the memory 50 (S58).
- the allowable paste error Edef1 is an allowable value of the paste error E1 and is an error value to the extent that the quality of the mounting body 106 cannot be maintained.
- the allowable paste error Edef1 may be a fixed value preset by the user, or may be a variable value that changes according to changes in various conditions (for example, changes in paste viscosity).
- the control unit 22 determines the mounting error E2 by correcting the calculated final error Ef with the paste error E1 (S62). That is, the calculated final error Ef includes the error amount e1 caused by the coating failure and the error amount e2 caused by the mounting failure. Therefore, the mounting process cannot be accurately evaluated with the final error Ef. Therefore, in this example, the final error Ef is corrected by the paste error E1 to calculate the mounting error E2.
- the control unit 22 compares the mounting error E2 with the allowable mounting error Edef2 (S64).
- the allowable mounting error Edef2 is preset by the user according to the required product specifications. Then, as a result of the comparison, if the mounting error E2 exceeds the allowable mounting error Edef2 (Yes in S64), it is determined that the mounting process is defective (S66).
- the paste error E1 that is the evaluation index of the coating process is obtained based on the first shape, and based on the second shape and the paste error E1 (evaluation result of the coating process).
- the mounting error E2, which is the evaluation index of the mounting process, is calculated. Therefore, the coating process and the mounting process can be evaluated separately. Thus, it is possible to determine whether the cause of the mounting failure is the coating process or the mounting process, and it becomes easier to take measures to reduce the mounting defect.
- FIG. 8 is a flowchart showing the flow of evaluation processing in this case.
- the control unit 22 first obtains the first shape (measured shape of the application body 102) from the first perspective image and the second shape (measured shape of the mounting body 106) from the second plan view image. Are respectively calculated (S68, S70).
- control unit 22 obtains a paste error E3 which is an error between the calculated first shape (actually measured shape of the coating body 102) and the first target shape (target shape of the coating body 102) (S72). Up to this point, the flow is almost the same as that in FIG. 7.
- the control unit 22 estimates the three-dimensional shape of the mounting body 106 that will be obtained in the mounting process as an estimated shape, based on the calculated first shape and mounting conditions (S74).
- the mounting conditions include, for example, the lowered height of the bonding head 30, the pressing force, the heating temperature, and the like.
- the correlation between the amount of deformation of the applied body 102 (paste) due to bonding and the bonding conditions is acquired in advance by an experiment or the like, and the applied body after bonding is based on this correlation.
- the shapes of 102 and chip component 104 may be estimated.
- the control unit 22 may have a built-in simulation device for performing finite element method analysis and the like, and the estimated shape may be obtained using this simulation device.
- the control unit 22 obtains a mounting error E4 which is an error between the second shape (the actually measured shape of the mounting body 106) and the estimated shape (the estimated shape of the mounting body 106) (S76). That is, the estimated shape is a shape estimated in consideration of the first shape which is the actually measured shape of the applicator 102. If the mounting process is performed according to the theory, the second shape is expected to follow the estimated shape, and if there is a large difference between the estimated shape and the second shape, it means that the mounting process is performed according to the theory. It can be said that some sort of mounting failure has occurred. Therefore, the mounting error E4 can be used as an evaluation index of the mounting process.
- the control unit 22 compares these with the allowable errors Edef3 and Edef4 stored in the memory 50 (S78, S82). As a result of the comparison, if the paste error E3 exceeds the allowable paste error Edef3, it is determined that a coating failure has occurred (S80). If the mounting error E4 exceeds the allowable mounting error Edef4, a mounting failure has occurred. It is determined that there is (S84).
- the target shape of the mounting body 106 is estimated as the estimated shape based on the first shape and the bonding conditions.
- the estimation process is a shape that reflects the actual shape of the applied body 102, it is possible to more accurately determine the mounting defect by comparing the estimated shape and the second shape.
- the control unit 22 may perform feedback control or feedforward control on the coating process and the mounting process based on the evaluation result thus obtained. For example, the control unit 22 may feed back the evaluation index of the coating process to the coating process control, or may feed back the evaluation index of the mounting process to at least one of the coating process control and the mounting process control. For example, if the paste errors E1 and E3 are obtained, the control unit 22 can reduce the errors E1 and E3 so that they can be reduced. Etc.) may be adjusted. Similarly, if the mounting errors E2 and E4 are obtained, the control unit controls the bonding parameters (falling height, pressing force, At least one of the heating temperature) may be adjusted.
- step S44 after the coating process and the mounting process are completed, these processes are evaluated (step S44), but at the stage of acquiring the first perspective image (between steps S26 and S30). Then, the paste errors E1 and E3 may be obtained. Then, feedforward control for correcting the bonding parameter may be performed based on the paste errors E1 and E3 so that the final mounting failure can be reduced. For example, in a product in which the die height h2 is important, when the paste height h1 is higher than the target value, the lowering height of the bonding head 30 is corrected to be lower than usual, The height h2 may be close to the target value.
- FIG. 9 is a diagram showing an example of a flow of correcting such bonding parameters.
- the estimated shape is obtained based on the first shape and the bonding condition (including the bonding parameter) (S86).
- an estimated error E5 which is an error between the estimated shape and the second shape which is the target shape of the mounting body 106 is calculated (S88).
- the control unit 22 compares the predicted error E5 with the preset allowable mounting error Edef5 (S90). As a result of the comparison, when the predicted error E5 exceeds the allowable mounting error Edef5, the control unit 22 corrects the bonding condition (specifically, the bonding parameter) so as to reduce the predicted error E5 (S92).
- step S86 returns to step S86 again, and the estimated shape is calculated based on the corrected bonding condition and the first shape.
- steps S88 and S90 are performed based on this estimated shape.
- the same procedure is repeated until the prediction error E5 becomes less than the allowable mounting error Edef5.
- the mounting process may be executed under the finally obtained bonding condition.
- the physical properties such as the viscosity of the paste change depending on the elapsed time and the surrounding environment. For example, it is known that the viscosity of the paste gradually rises over time. The viscosity of the paste also changes depending on the ambient temperature and the like. If the physical properties of the paste change, the appropriate values of coating parameters and bonding parameters also change.
- the physical properties of the paste may be estimated, and the coating parameters and bonding parameters may be changed according to the estimation results. Further, the estimated shape and the first target shape used when evaluating each process may be changed according to the estimated physical properties of the paste. That is, even if the first shape and the bonding conditions are the same, if the physical properties of the paste change, the shape of the mounting body 106 that will be obtained after bonding also changes. Therefore, the estimated shape may be calculated in consideration of not only the first shape and the bonding condition but also the physical properties of the paste. Further, if the physical properties of the paste change, the paste shape (first target shape) required to obtain the target mounting shape also changes. Therefore, the first target shape, which is the target shape of the paste, may be changed according to the change in the physical properties of the paste.
- the physical properties of the paste may be estimated based on the dimensional ratio of one coating body 102. That is, the application body 102 formed by applying the paste to the substrate 100 swells in a dome shape due to the surface tension as shown by the solid line in FIG. As the viscosity of the paste increases, the horizontal spread of the paste decreases and the height increases, as indicated by the chain double-dashed line in FIG. That is, the ratio h1/d1 of the height h1 to the paste diameter d1 increases as the viscosity of the paste increases.
- control unit 22 may obtain the ratio of height to diameter h1/d1 and estimate the viscosity of the paste based on the value. Then, the application parameter and the bonding parameter may be modified based on the estimated viscosity of the paste.
- the physical properties of the paste may be estimated based on the amount of variation in the dimensions between the applied plurality of applied bodies 102 and the amount of variation in the application conditions of the applied plurality of applied bodies 102. For example, it is expected that the viscosity of the paste will change over time using the same syringe. Then, even under the same application conditions, it is assumed that the paste height h1 changes when the viscosity of the paste increases, for example. Therefore, the heights h1 of the plurality of applied bodies 102 may be acquired, and the physical properties of the paste may be obtained from the variation of the heights h1.
- FIG. 11 is a diagram showing an example of the relationship between the paste height h1 and the elapsed time t from the start of using a syringe (not shown).
- the horizontal axis represents the elapsed time t and the vertical axis represents the paste height h1.
- the black circles in FIG. 11 indicate the measurement results of the paste height h1.
- the control unit 22 may obtain the correlation between the paste height h1 and the elapsed time t from this measurement result, and acquire this as information indicating the physical properties of the paste.
- FIG. 11 is a diagram showing an example of the relationship between the paste height h1 and the elapsed time t from the start of using a syringe (not shown).
- the horizontal axis represents the elapsed time t
- the vertical axis represents the paste height h1.
- the black circles in FIG. 11 indicate the measurement results of the paste height h1.
- the control unit 22 may obtain the correlation between the paste height h1 and
- an approximate straight line (dashed line) of a plurality of measurement results (black circles) may be acquired as the physical property information of the paste. Then, based on the obtained approximate straight line, physical properties of the paste in the future and control parameter values suitable for this may be estimated and adjusted.
- the elapsed time t has been described as the time from the start of using the syringe, it may be the elapsed time from the application of the application body 102 to the measurement of the shape of the application body 102. In this case, it is expected that the paste will be exposed to air and the viscosity will change as shown in FIG. 11 depending on the elapsed time t.
- the physical properties of the paste may be estimated based on the variation amount of the coating conditions (discharge pressure, etc.) instead of the size of the coating body 102. In any case, the physical properties of the paste are estimated, and various control parameters are modified accordingly, so that the chip component 104 can be mounted more appropriately. Further, the coating process and the mounting process can be evaluated more accurately by modifying the first target shape and the estimated shape according to the estimated physical properties.
- the three-dimensional shapes of the application body 102 and the mounting body 106 are calculated based on the perspective image.
- the entire shape of the object may not be accurately grasped only by the perspective image. This will be described with reference to FIG.
- FIG. 12 is a schematic diagram showing a configuration of an image pickup device that acquires three-dimensional information including height by a light section method.
- the image pickup device includes a projector 55 and a camera 56 that is provided with an inclination with respect to the projector 55.
- the projector 55 includes a plurality of light sources 58 and an optical member 60 that expands the light from the light sources 58 in one direction and converts the light into line light 62. Therefore, the projector 55 emits a plurality of line lights 62.
- the camera 56 picks up an image of an object and has an image sensor such as a CMOS or CCD.
- FIG. 13 is an image diagram of an image obtained by imaging the coated body 102 as an object. As shown in FIG. 13, the plurality of line lights 62 appear to be appropriately distorted according to the surface shape of the target object. By calculating the height of the object from the shape of the line light 62, the three-dimensional shape of the object can be calculated.
- the three-dimensional shape of the object can be calculated with relatively inexpensive equipment.
- the light section method since the object is imaged only obliquely, there is a range behind the object itself that cannot be imaged. Specifically, in FIG. 12, when viewed from the camera 56, the hatched portion is the shadow of the target object, and thus is a missing portion 57 that cannot be imaged. As a result, the three-dimensional shape of the missing portion 57 cannot be grasped only by the perspective image taken by the image pickup device.
- the shape of the missing portion 57 may be estimated from a planar view image.
- the center point of the applicator 102 is obtained from the plan view image, and the three-dimensional shape of the hatched portion is calculated based on the three-dimensional shape at the symmetrical position with the missing portion 57. May be estimated.
- the imager of the optical cutting method is given as an example of the imager in which the missing portion 57 is generated, the above-described technique may be used in an imager of another form as a matter of course.
- the image pickup device regardless of the configuration of the image pickup device, a large amount of calculation is required to calculate a three-dimensional shape from a perspective image or the like, which may take time. Therefore, even if the correlation between the three-dimensional shape and the two-dimensional shape is estimated from the 3D image and the 2D image obtained for some of the plurality of objects (applied body 102 or mounted body 106). Good. Then, the three-dimensional shape of the other object may be estimated based on this correlation and the 2D image obtained for the other object.
- FIG. 14 is a diagram showing an example of this correlation, in which the horizontal axis shows the paste diameter d1, the vertical axis shows the paste height h1, and the black circles show the measured values. When this measured value is approximated, a correlation curve as shown by the solid line is obtained.
- the control unit 22 calculates the paste diameter d1 from the plan view image of the coating body 102 that is not captured obliquely but only captured in the vertical direction, and compares the paste diameter d1 with this correlation curve. ,
- the paste height h1 may be estimated.
- the configuration described up to this point is an example, and includes imagers 38 and 42 that acquire first and second perspective images, and a first shape and a second shape from the first and second perspective images.
- Other configurations may be appropriately changed as long as the above is calculated and at least the coating process and the mounting process are individually evaluated based on the first and second shapes.
- the die mounting is described as an example of the mounting device, but other types of mounting devices, such as a flip chip bonder device, may be used as long as the chip component is fixed via paste. ..
- 10 mounting device 12 transport rail, 14 coating section, 16 first inspection unit, 18 bonding section, 20 second inspection unit, 22 control section, 24 dispenser, 26, 32, 40, 44 moving mechanism, 28, 34, 38 , 42 imaging device, 30 bonding head, 36 wafer stage, 48 CPU, 50 memory, 52 input device, 54 output device, 55 projector, 56 camera, 57 missing part, 58 light source, 60 optical member, 62 line light, 100 substrate , 102 coated body, 104 chip parts, 106 mounted body.
Abstract
Description
Claims (10)
- 基板上に、ペーストを介して、チップ部品を実装する実装装置であって、
前記基板に前記ペーストを所定の塗布条件で塗布して塗布体を形成するペースト塗布部と、
前記塗布体を介して前記チップ部品を所定の実装条件で前記基板に実装した実装体を形成するボンディング部と、
前記ペーストの塗布処理後かつ前記チップ部品の実装処理の前に、前記塗布体を撮像して第一の画像情報を取得する第一の撮像部と、
前記実装処理の後に、前記実装体を撮像して第二の画像情報を取得する第二の撮像部と、
前記ペースト塗布部、前記ボンディング部、前記第一、第二の撮像部を制御するとともに、前記第一の画像情報から前記塗布体の三次元形状を第一形状として求め、前記第二の画像情報から前記実装体の三次元形状を第二形状として、算出する制御部と、
を備え、前記制御部は、前記第一形状と前記第二形状とに基づいて前記塗布処理または前記実装処理を評価する、
ことを特徴とする実装装置。 - 請求項1に記載の実装装置であって、
前記制御部は、少なくとも前記第一形状に基づいて前記塗布処理を評価し、少なくとも前記塗布処理の評価結果と前記第二形状とに基づいて前記実装処理を評価する、ことを特徴とする実装装置。 - 請求項1に記載の実装装置であって、
前記制御部は、少なくとも前記第一形状と前記実装条件とに基づいて前記実装体の三次元形状を推定形状として推定し、少なくとも前記第一形状に基づいて前記塗布処理を評価し、少なくとも前記推定形状と前記第二形状とに基づいて前記実装処理を評価する、ことを特徴とする実装装置。 - 請求項1から3のいずれか1項に記載の実装装置であって、
前記制御部は、前記塗布体の寸法、または複数の前記塗布体を塗布する際の前記複数の塗布体間の寸法の経時変化による変動量に基づいて前記ペーストの物性情報を取得する、ことを特徴とする実装装置。 - 請求項3を引用する請求項4に記載の実装装置であって、
前記制御部は、少なくとも前記第一形状と前記実装条件と前記物性情報とに基づいて前記推定形状を推定する、ことを特徴とする実装装置。 - 請求項4または5に記載の実装装置であって、
前記制御部は、前記塗布体の目標形状である第一目標形状と前記第一形状との比較結果に基づいて前記塗布処理を評価し、前記物性情報に基づいて前記第一目標形状を修正する、ことを特徴とする実装装置。 - 請求項1から6のいずれか1項に記載の実装装置であって、
前記制御部は、前記塗布処理の評価結果に基づいて前記塗布条件を変更し、前記実装処理の評価結果に基づいて前記塗布条件または前記実装条件を変更する、ことを特徴とする実装装置。 - 請求項1から7のいずれか1項に記載の実装装置であって、
前記制御部は、前記塗布処理の評価結果に基づいて前記実装条件を変更する、ことを特徴とする実装装置。 - 請求項1から8のいずれか1項に記載の実装装置であって、さらに、
前記塗布処理後かつ前記実装処理の前に前記塗布体を垂直方向から撮像し、前記塗布体の第一の平面視画像を取得する第一の平面撮像部と、
前記実装処理の後に前記実装体を垂直方向から撮像し、前記実装体の第二の平面視画像を取得する第二の平面撮像部を備え、
前記第一の撮像部は、前記塗布体を斜方から撮像し、前記塗布体の第一の斜視画像を取得するものであり、
第二の撮像部は、前記実装体を斜方から撮像し、前記実装体の第二の斜視画像を取得するものであり、
前記制御部は、前記第一の斜視画像の陰となる形状を前記第一の平面画像から推定し、前記第二の斜視画像の陰となる形状を前記第二の平面画像から推定する。
ことを特徴とする実装装置。 - 請求項1から8のいずれか1項に記載の実装装置であって、さらに、
前記塗布処理後かつ前記実装処理の前に前記塗布体を垂直方向から撮像し、前記塗布体の第一の平面視画像を取得する第一の平面撮像部と、
前記実装処理の後に前記実装体を垂直方向から撮像し、前記実装体の第二の平面視画像を取得する第二の平面撮像部を備え、
前記第一の撮像部は、前記塗布体を斜方から撮像し、前記塗布体の第一の斜視画像を取得するものであり、
第二の撮像部は、前記実装体を斜方から撮像し、前記実装体の第二の斜視画像を取得するものであり、
前記制御部は、前記第一の平面視画像と第一の斜視画像の第一の相関関係を算出して前記第一の相関関係に基づいて前記塗布体の三次元形状を推定し、前記第二の平面視画像と第二の斜視画像の第二の相関関係を算出して前記第二の相関関係に基づいて前記実装体の三次元形状を推定する、
ことを特徴とする実装装置。
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KR1020217007999A KR102454557B1 (ko) | 2018-12-10 | 2019-12-09 | 실장 장치 |
US17/312,388 US11910534B2 (en) | 2018-12-10 | 2019-12-09 | Mounting apparatus |
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