JP7219991B2 - 半導体装置の製造装置および製造方法 - Google Patents
半導体装置の製造装置および製造方法 Download PDFInfo
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- JP7219991B2 JP7219991B2 JP2021553366A JP2021553366A JP7219991B2 JP 7219991 B2 JP7219991 B2 JP 7219991B2 JP 2021553366 A JP2021553366 A JP 2021553366A JP 2021553366 A JP2021553366 A JP 2021553366A JP 7219991 B2 JP7219991 B2 JP 7219991B2
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- 238000004519 manufacturing process Methods 0.000 title claims description 45
- 239000004065 semiconductor Substances 0.000 title claims description 28
- 239000000758 substrate Substances 0.000 claims description 125
- 238000012937 correction Methods 0.000 claims description 73
- 238000004364 calculation method Methods 0.000 claims description 12
- 238000000034 method Methods 0.000 claims description 12
- 238000005259 measurement Methods 0.000 description 13
- 238000010586 diagram Methods 0.000 description 9
- 230000006870 function Effects 0.000 description 6
- 238000012545 processing Methods 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 4
- 238000012886 linear function Methods 0.000 description 3
- 238000001514 detection method Methods 0.000 description 2
- 238000012887 quadratic function Methods 0.000 description 2
- 238000013459 approach Methods 0.000 description 1
- 238000005219 brazing Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
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- H01L24/75—Apparatus for connecting with bump connectors or layer connectors
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- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68764—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating caroussel
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- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/60—Attaching or detaching leads or other conductive members, to be used for carrying current to or from the device in operation
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- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/60—Attaching or detaching leads or other conductive members, to be used for carrying current to or from the device in operation
- H01L21/603—Attaching or detaching leads or other conductive members, to be used for carrying current to or from the device in operation involving the application of pressure, e.g. thermo-compression bonding
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- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67132—Apparatus for placing on an insulating substrate, e.g. tape
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- H01L21/67005—Apparatus not specifically provided for elsewhere
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- H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L24/81—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
- H05K13/04—Mounting of components, e.g. of leadless components
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- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/75—Apparatus for connecting with bump connectors or layer connectors
- H01L2224/75001—Calibration means
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- H01L2224/75—Apparatus for connecting with bump connectors or layer connectors
- H01L2224/757—Means for aligning
- H01L2224/75743—Suction holding means
- H01L2224/75745—Suction holding means in the upper part of the bonding apparatus, e.g. in the bonding head
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- H01L2224/75—Apparatus for connecting with bump connectors or layer connectors
- H01L2224/758—Means for moving parts
- H01L2224/75841—Means for moving parts of the bonding head
- H01L2224/75842—Rotational mechanism
- H01L2224/75843—Pivoting mechanism
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- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/81—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
- H01L2224/8112—Aligning
- H01L2224/81121—Active alignment, i.e. by apparatus steering, e.g. optical alignment using marks or sensors
- H01L2224/81122—Active alignment, i.e. by apparatus steering, e.g. optical alignment using marks or sensors by detecting inherent features of, or outside, the semiconductor or solid-state body
- H01L2224/81123—Shape or position of the body
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/81—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
- H01L2224/8112—Aligning
- H01L2224/81148—Aligning involving movement of a part of the bonding apparatus
- H01L2224/81169—Aligning involving movement of a part of the bonding apparatus being the upper part of the bonding apparatus, i.e. bonding head
- H01L2224/8117—Rotational movements
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
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- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/81—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
- H01L2224/81908—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector involving monitoring, e.g. feedback loop
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- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Wire Bonding (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
- Apparatuses And Processes For Manufacturing Resistors (AREA)
- Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
Description
Sb[n]=Sb[n-1]+C[n] 式1
Ss[n]=Sb[n]-Sd[n] 式2
Sd[n+1]=Sb[n]+C[n+1]-Sd[n+1] 式3
C[n+1]=Sd[n+1]-Sb[n] 式4
Claims (8)
- 基板が載置される載置面を有するステージと、
チップを保持するチップ保持面を有し、前記ステージに載置された前記基板に前記チップを配置する実装ヘッドと、
前記実装ヘッドにより前記基板の実装面に載置されたチップの前記実装面に対する傾斜角を検出傾斜角として測定する測定機構と、
前記チップ保持面の前記載置面に対する傾斜角である保持面傾斜角を変更する保持面調整機構と、
前記検出傾斜角に基づいて前記保持面傾斜角の補正量を算出し、算出された前記補正量に応じて前記保持面調整機構により前記保持面傾斜角を変更させる、コントローラと、
を備え、
前記コントローラは、過去に測定された複数の前記検出傾斜角を記憶しており、
前記コントローラは、前記複数の検出傾斜角それぞれから前記保持面傾斜角の補正の影響を除去した基本傾斜角を求め、前記基本傾斜角の基板間での変化傾向に応じて、前記補正量の算出ポリシーを変更する、
ことを特徴とする半導体装置の製造装置。 - 請求項1に記載の半導体装置の製造装置であって、
前記コントローラは、前記基本傾斜角の基板間でのばらつきが、規定の許容値以下の場合、直近の基板について得られた前記検出傾斜角を相殺する値を前記補正量として算出する、ことを特徴とする半導体装置の製造装置。 - 請求項1または2に記載の半導体装置の製造装置であって、
前記コントローラは、前記基本傾斜角の基板間でのばらつきが、規定の許容値超過、かつ、前記基本傾斜角が基板間で所定の規則性をもって変化する場合、前記規則性に従って次の基板の基本傾斜角を推定し、これを相殺する値を前記補正量として算出する、ことを特徴とする半導体装置の製造装置。 - 請求項1から3のいずれか1項に記載の半導体装置の製造装置であって、
前記コントローラは、前記基本傾斜角の基板間でのばらつきが、規定の許容値超過、かつ、前記基本傾斜角が基板間でランダムに変化する場合、前記複数の基板について得られた前記複数の基本傾斜角の代表値を次の基板の基本傾斜角として推定し、これを相殺する値を前記補正量として算出する、ことを特徴とする半導体装置の製造装置。 - 請求項1から4のいずれか1項に記載の半導体装置の製造装置であって、
前記コントローラは、一つの基板に載置された複数のチップそれぞれについて前記検出傾斜角が得られた場合、複数のチップについて得られた複数の検出傾斜角の代表値を、前記一つの基板の前記検出傾斜角として取り扱う、ことを特徴とする半導体装置の製造装置。 - 請求項1から4のいずれか1項に記載の半導体装置の製造装置であって、
前記コントローラは、一つの基板に載置された複数のチップそれぞれについて前記検出傾斜角が得られた場合、各チップの前記基板内の位置と、各チップの前記検出傾斜角と、の対応関係を記録したマップを生成し、前記マップに基づいて、各チップ位置それぞれについて前記補正量を算出する、ことを特徴とする半導体装置の製造装置。 - 請求項1から6のいずれか1項に記載の半導体装置の製造装置であって、
前記実装ヘッドは、前記チップ保持面を含む実装ツールと、前記実装ツールを保持する球面空気軸受と、を有しており、
前記球面空気軸受は、前記実装ツールをその揺動を許容した状態で保持するフリー状態と、前記実装ツールをその揺動を阻害した状態で保持するロック状態と、に切り替え可能であり、
前記保持面調整機構は、
前記チップ保持面が当接する傾斜板と、
前記傾斜板を支持する複数の支持柱であって、互いに独立して進退することで前記傾斜板の角度を任意に変更する複数の支持柱と、
を有する、ことを特徴とする半導体装置の製造装置。 - 半導体装置の製造方法であって、
実装ツールのチップ保持面でチップを保持し、前記実装ツールを移動させて前記チップを、ステージの載置面に載置された基板の実装面に載置するボンディングステップと、
前記実装面に載置されたチップの上面と前記実装面との傾斜角を検出傾斜角として測定する測定ステップと、
前記検出傾斜角に基づいて、前記チップ保持面の前記ステージに対する傾斜角である保持面傾斜角の補正量を算出する補正量算出ステップと、
前記保持面傾斜角を変更する保持面調整機構により、前記保持面傾斜角を前記補正量に応じて変更する補正ステップと、
過去に測定された複数の前記検出傾斜角を記憶するステップと、
を備え、
前記補正量算出ステップにおいて、前記複数の検出傾斜角それぞれから前記保持面傾斜角の補正の影響を除去した基本傾斜角を求め、前記基本傾斜角の基板間での変化傾向に応じて、前記補正量の算出ポリシーを変更する、
ことを特徴とする半導体装置の製造方法。
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PCT/JP2020/046618 WO2022130472A1 (ja) | 2020-12-14 | 2020-12-14 | 半導体装置の製造装置および製造方法 |
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US (1) | US20230154775A1 (ja) |
JP (1) | JP7219991B2 (ja) |
KR (1) | KR20220088636A (ja) |
CN (1) | CN114981938A (ja) |
TW (1) | TWI810742B (ja) |
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Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001308597A (ja) | 2000-04-25 | 2001-11-02 | Toray Eng Co Ltd | チップ実装装置およびチップ実装装置における平行度調整方法 |
JP2007157970A (ja) | 2005-12-05 | 2007-06-21 | Sony Corp | ボンディング方法及びボンディング装置 |
JP2014022633A (ja) | 2012-07-20 | 2014-02-03 | Fuji Mach Mfg Co Ltd | 部品実装機 |
WO2014098174A1 (ja) | 2012-12-21 | 2014-06-26 | 株式会社新川 | フリップチップボンダ及びボンディングステージの平坦度並びに変形量補正方法 |
WO2016024364A1 (ja) | 2014-08-13 | 2016-02-18 | 株式会社新川 | 実装装置および測定方法 |
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JP3323395B2 (ja) | 1995-03-24 | 2002-09-09 | 松下電器産業株式会社 | フラットパネルディスプレイへのic部品の接合方法 |
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- 2020-12-14 KR KR1020217039520A patent/KR20220088636A/ko active IP Right Grant
- 2020-12-14 WO PCT/JP2020/046618 patent/WO2022130472A1/ja active Application Filing
- 2020-12-14 US US17/915,094 patent/US20230154775A1/en active Pending
- 2020-12-14 CN CN202080045533.5A patent/CN114981938A/zh active Pending
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Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001308597A (ja) | 2000-04-25 | 2001-11-02 | Toray Eng Co Ltd | チップ実装装置およびチップ実装装置における平行度調整方法 |
JP2007157970A (ja) | 2005-12-05 | 2007-06-21 | Sony Corp | ボンディング方法及びボンディング装置 |
JP2014022633A (ja) | 2012-07-20 | 2014-02-03 | Fuji Mach Mfg Co Ltd | 部品実装機 |
WO2014098174A1 (ja) | 2012-12-21 | 2014-06-26 | 株式会社新川 | フリップチップボンダ及びボンディングステージの平坦度並びに変形量補正方法 |
WO2016024364A1 (ja) | 2014-08-13 | 2016-02-18 | 株式会社新川 | 実装装置および測定方法 |
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WO2022130472A1 (ja) | 2022-06-23 |
TW202240733A (zh) | 2022-10-16 |
KR20220088636A (ko) | 2022-06-28 |
TWI810742B (zh) | 2023-08-01 |
CN114981938A (zh) | 2022-08-30 |
US20230154775A1 (en) | 2023-05-18 |
JPWO2022130472A1 (ja) | 2022-06-23 |
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