WO2020029408A1

WO2020029408A1 - Mask replacement device and replacement method

Info

Publication number: WO2020029408A1
Application number: PCT/CN2018/108403
Authority: WO
Inventors: 谭伟
Original assignee: 深圳市华星光电半导体显示技术有限公司
Priority date: 2018-08-09
Filing date: 2018-09-28
Publication date: 2020-02-13
Also published as: CN109023234A; CN109023234B

Abstract

Disclosed in the present application are a mask replacement device and a replacement method; the mask replacement device comprises a substrate holder for carrying a mask, an automatic fastening mechanism provided on the substrate holder for selectively fastening or releasing the mask, and a tray provided below the substrate support for lifting the mask; the substrate holder comprises a tray opening; and the tray can selectively enter and exit the tray opening to lift or lower the mask.

Description

Mask replacement device and replacement method

Technical field

The present application relates to a sputtering film coating machine, in particular to a mask plate replacement device and a replacement method of a sputtering film coating machine.

Background technique

Sputter coating machine is widely used in touch panel (TP), liquid crystal display (Liquid Crystal Display (LCD), Organic Light Emitting Diode (Organic Light-Emitting Diode (OLED) coating process. In the coating process, there are many film-forming processes that do not require the entire substrate to be film-formed. Instead, a mask plate and its supporting close-alignment system are used for sputtering coating. Deposition of a specific shape of the film layer, and different product types use different masks. Each time the product model is replaced, the corresponding mask plate will also be replaced, and the relative position of the mask plate and the substrate holder must be maintained during the film formation process before each production. The desired specific film pattern.

With the development of new technology, the application of horizontal magnetron sputtering coating machines with masks and alignment systems will become more and more widespread. For example, in the thin film deposition process of magnetron sputtering coating machines, a substrate holder is required. The horizontal movement of the bearing glass substrate, the sputtering method of the OLED cathode will also be used, and the TP matting layer will also use this coating machine. The substrate rack in the sputtering coating machine must not only accept the mask plate and the glass substrate, but also The relative position should be maintained during the film deposition process.

technical problem

The current method of using a substrate holder on a horizontal magnetron sputtering coating machine using a mask plate is to make a hole of a specific shape on the substrate frame, install the required mask plate directly above the hole, and then surround the mask plate. The mask is fastened to the substrate holder with screws, and then the substrate is loaded on the mask, and the substrate is clamped with a substrate holder to start film formation. When replacing the product model, remove the substrate holder from the vacuum chamber and replace the mask plate. The mask plate is screwed to the substrate holder. Each time the model is replaced, it needs to be removed from the vacuum state and reinstalled after the replacement is completed. Vacuum. Especially for single-chamber coating, it takes more than 3 hours for each replacement. For continuous coating machines, replacement is also a waste of time, and a substrate rack trolley is used every time the substrate rack is taken from the machine, which increases equipment costs and Risk factor. Due to the large number of fastening screws, replacing each mask plate is a waste of time, and replacing the fastening screws multiple times will invalidate the mask plate. It is necessary to replace the new mask plate and increase the cost; the entire replacement process is manual work. Completed and inefficient.

Technical solutions

The present application provides a mask plate replacement device and a replacement method, which are convenient for replacing different mask plates.

In a first aspect, the present application provides a mask replacement device, which includes a substrate holder for carrying the mask, and an automatic locking provided on the substrate holder for selectively locking or releasing the mask. A mechanism and a tray for holding a mask plate provided below the substrate frame, the substrate frame includes a tray hole, and the tray can be selectively moved in and out of the tray hole to lift or lower the mask plate. The mask plate has two positioning holes respectively arranged on two opposite sides of the mask plate, and the substrate frame includes positioning pins for inserting in the positioning holes to horizontally limit the mask plate.

Wherein, the automatic locking mechanism includes a lock lever, a lock shell, a release button, a first spring, a second spring and a lock core, two opposite sides and a top of the lock shell are provided with through holes, and the lock Both ends of the lever are slidably disposed in through holes on two opposite sides of the lock housing. An annular boss is provided in the middle of the lock lever, and one end of the first spring and the annular boss are provided. Abutting, the other end is in contact with the inner side of the lock shell, and one end of the lock lever near the mask plate can selectively abut or separate with the mask plate; the annular boss is provided with A lock cylinder groove, the lock cylinder being located in the lock cylinder groove and sliding with the lock lever in the lock housing, one end of the second spring abuts against the lock cylinder and the other end is in contact with the lock cylinder groove When the lock lever moves toward the mask plate and the lock core is located below the through hole at the top of the lock case, the lock core enters the top of the lock case under the push of a second spring. The through hole restricts the movement of the lock lever. One end of the release button is located in the through hole on the top of the lock case, and is used to insert the through hole into the top of the lock case. The launch of the lock cylinder.

Wherein, the number of the automatic locking mechanisms is at least two, and the automatic locking mechanisms are provided on two opposite sides of the tray hole for locking and releasing the mask plate.

Wherein, the automatic locking mechanism further includes an end of the locking lever abutting away from the mask plate, a locking driving mechanism for pushing the locking lever, and a release button away from the lock shell. One end of the through hole at the top abuts, and a release driving mechanism for pushing the release button.

The locking lever is a stepped lever composed of four segments with different thicknesses.

Wherein, the automatic locking mechanism further includes a clamping mechanism, and the clamping mechanism can selectively place the mask plate on the tray or remove the mask plate from the tray.

In a second aspect, the present application provides another mask plate replacement device, which includes a substrate frame for carrying the mask plate, and an automatic locking mechanism provided on the substrate frame for selectively locking or releasing the mask plate. And a tray provided below the substrate holder for holding the mask, the substrate holder includes a tray hole, and the tray can selectively enter and exit the tray hole to hold or lower the mask.

Wherein, the mask plate has at least three positioning holes respectively disposed on two opposite sides of the mask plate, and the substrate frame includes positioning pins inserted in the positioning holes to horizontally limit the mask plate. .

Wherein, the automatic locking mechanism further includes an abutting end of the lock lever away from the metal mask plate, a lock driving mechanism for pushing the lock lever, and a release button away from the lock. One end of the through hole at the top of the shell abuts, and is used for pushing the release driving mechanism of the release button.

In a third aspect, the present application provides a mask replacement method, including:

S101. The automatic locking mechanism releases the mask plate.

S102. The tray rises to support the mask plate;

S103. The clamping mechanism removes the mask plate on the tray.

S104. The clamping mechanism places the mask plate to be replaced on the tray;

S105. The tray is lowered and the mask plate is placed on the substrate frame.

S106. The automatic locking mechanism locks the mask plate.

Wherein, the step S101 specifically includes: the release driving mechanism pushes the release button to squeeze the lock core out of the through hole at the top of the lock shell, and under the action of the first spring, the lock lever and the mask Plate isolated.

Wherein, the step S106 specifically includes: the locking driving mechanism pushes the lock lever toward the mask plate to abut the mask plate, and when the lock core passes through the through hole on the top of the lock shell, Under the action of two springs, the lock core is inserted into the through hole to limit the length of the lock lever.

Beneficial effect

The mask plate replacement device and replacement method provided in the present application, the tray can be moved in and out of the tray hole of the substrate frame to lift or lower the mask plate, and facilitate the replacement of different mask plates; the automatic locking mechanism can lock or Release the mask to increase stability and ease of operation.

BRIEF DESCRIPTION OF THE DRAWINGS

1 is a schematic structural plan view of a mask plate replacement device of the present application;

2 is a schematic cross-sectional structure diagram of a mask plate replacement device of the present application;

3 is a schematic cross-sectional structure diagram of a mask plate replacement device in a state where the mask plate is lifted by a tray in the present application;

4 is a schematic cross-sectional structure diagram of a mask plate replacement device in which a mask plate of the present application is placed on a substrate frame;

5 is a schematic cross-sectional structure diagram of a mask plate replacement device in an unlocked state of the automatic locking mechanism of the present application;

6 is a schematic cross-sectional structure diagram of a mask plate replacement device in a locked state of an automatic locking mechanism of the present application.

Embodiments of the invention

The problem to be solved in this application is how to effectively increase the replacement rate of the mask plate, reduce the damage to the mask plate during the replacement process, and improve the coating efficiency. The embodiments of the present application will be described in detail below with reference to the drawings.

In the related art, the method of using a substrate holder on a horizontal magnetron sputtering coating machine using a mask plate is to make a hole of a specific shape on the substrate frame, install a desired mask plate directly above the hole, and then The mask is fastened to the substrate holder with screws around the diaphragm, and then the substrate is loaded on the mask, and the substrate is clamped with a substrate holder to form a film. When replacing the product model, remove the substrate holder from the vacuum chamber and replace the mask plate. The mask plate is screwed to the substrate holder. Each time the model is replaced, it needs to be removed from the vacuum state and reinstalled after the replacement is completed. Vacuum. Especially for single-chamber coating, it takes more than 3 hours for each replacement. For continuous coating machines, replacement is also a waste of time, and a substrate rack trolley is used every time the substrate rack is taken from the machine, which increases equipment costs and Risk factor. Due to the large number of fastening screws, replacing each mask plate is a waste of time, and replacing the fastening screws multiple times will invalidate the mask plate. It is necessary to replace the new mask plate and increase the cost; the entire replacement process is manual work. Completed and inefficient.

As shown in FIGS. 1-4, the mask replacement device of this embodiment includes a substrate holder 1 for carrying a mask plate 4, and a substrate holder 1 disposed on the substrate holder 1 for selectively locking or releasing the mask plate 4. An automatic locking mechanism 2 and a tray 3 provided below the substrate holder 1 for holding the mask plate 4. The substrate holder 1 includes a tray hole 12, and the tray 3 can selectively enter and exit the tray hole 12 to place The masking plate 4 is lifted or lowered. In order to facilitate the replacement of the masking plate, the tray directly lifts up the masking plate 4 through the tray hole 12 and then lifts up until the masking plate 4 is separated from the substrate frame 1. The mask plate 4 is placed on the substrate frame 1 smoothly, so that the mask plate 4 and the substrate frame 1 are fixed together. When the mask plate 4 and the substrate frame 1 are fixed, the automatic locking mechanism 2 locks the mask plate 4 to death. The mask plate 4 does not move on the substrate frame 1. The entire replacement process no longer needs to disassemble the substrate frame, saving time.

As a preferred embodiment, the mask plate 4 has at least two positioning holes 41 respectively disposed on two opposite sides of the mask plate 4, and the substrate frame 1 includes a positioning hole 41 for inserting into the positioning holes 41. The positioning pin 11 for horizontally limiting the mask plate is used. The position of the mask plate 4 can be accurately determined by the cooperation of the pin and the hole. At the same time, the pin-hole cooperation can be in one step. The friction generated during the fitting process is more than the thread connection. The generated friction is small and the loss to the mask is small.

As shown in FIGS. 5 and 6, as a preferred embodiment, the automatic locking mechanism 2 includes a lock lever 21, a lock housing 22, a release button 23, a first spring 24, a second spring 25, and a lock cylinder. 26. The lock case 22 is a rectangular parallelepiped with an internal accommodating space. The two opposite sides in the length direction and the top thereof are provided with through holes, and the lock rod 21 passes through the lock case 22 to oppose in the length direction. The two through holes on both sides are located outside the lock housing 22, the lock lever 21 can slide in the through holes on both sides of the lock housing 22, and the lock lever 21 is provided in the middle There is a ring-shaped boss, one end of the first spring 24 is in contact with the ring-shaped boss, and the other end is in contact with the inner side of the lock housing 22. When an external force pushes the lock lever 21, the lock The lever 21 will move toward the mask plate 4 until one end of the lock lever 21 near the mask plate 4 abuts the mask plate 4. When the external force is removed, the lock lever is under the action of the first spring elastic force. 21 is separated from the mask plate 4.

As a preferred embodiment, a lock cylinder groove is provided in the middle of the lock lever 21, and the lock cylinder 26 is located in the lock cylinder groove and moves with the lock lever 21 in the lock housing 22. One end of the second spring 25 is in contact with the lock cylinder 26, and the other end is in contact with the bottom surface of the lock cylinder groove. When the lock cylinder 26 moves with the lock lever 21 below the through hole at the top of the lock housing 22 At the time, under the action of the elastic force of the second spring 25, the lock core 26 enters the through hole on the top of the lock case 22, and after the lock core 26 enters the through hole on the top of the lock case 22, the lock core 26 The lock lever 21 can be restricted so that the lock lever 21 can no longer move within the lock housing 22.

As a preferred embodiment, one end of the release button 23 is located in a through hole at the top of the lock case 22, and is used to abut one end of the through hole of the lock core 26 entering the top of the lock case 22 under the action of external force. Next, the release button 23 will move in the direction of the lock cylinder 26, and squeeze the lock cylinder 26 out of the through hole of the upper end of the lock housing 22 to unlock the lock lever 21, so that The lock lever 21 can move again in the lock case 22.

As a preferred embodiment, the number of the automatic locking mechanisms 2 is at least two, and the automatic locking mechanisms 2 are disposed on two opposite sides of the tray hole 12 for locking and releasing the mask plate, and at least two automatic lockings are performed. The mechanism 2 can lock and fix the mask plate in different directions. According to actual needs, the number of automatic locking mechanisms 2 can also be increased to fix the mask plate from different directions.

As a preferred implementation manner, the automatic locking mechanism 2 in this embodiment further includes an abutting end of the locking lever 21 away from the mask plate 4 for pushing the locking of the locking lever 21 The driving mechanism 27 is in contact with an end of the release button 23 that is far from the through hole on the top of the lock case 22, and is used to push the release button 23 to release the drive button. The driving force provided by the opening driving mechanism 28 can make the automatic locking mechanism 2 fast lock or release the mask plate 4.

As a preferred implementation manner, the mask replacement device of this embodiment further includes a clamping mechanism, and the clamping mechanism can selectively place the mask 4 on the tray 3 or from the tray 3. The mask plate 4 is removed from the tray 3.

As a preferred embodiment, the lock lever 21 is a stepped lever composed of four segments with different thicknesses. As shown in FIG. 5 and FIG. 6, from the left to the right of the figure, the first lever segment, The second rod section, the third rod section, and the fourth rod section. The third rod section is a section provided with an annular boss. The third rod section and the inner side wall of the lock housing 22 are slidably fixed. The second rod section It is thinner than the fourth rod section, and is through the through holes on the two opposite sides of the lock housing 22, respectively. The first rod section is located outside the lock housing 22, and its diameter is larger than that of the lock. The through holes on the two opposite sides of the shell 22, when the lock lever 21 slides in the lock shell 22, the first lever segment cannot pass through the through hole, which plays a limiting role and can prevent the lock lever 21 from communicating with Excessive penetration of the mask plate 4 causes damage.

As a preferred embodiment, a ring-shaped convex boss turned inward is provided at the opening of the lock cylinder groove of the lock lever 21, and the lock cylinder 26 is divided into two segments with different diameters and a larger diameter. Located at the bottom, one end is in elastic contact with the second spring 25 and one end is in contact with the inner ring surface of the annular boss, which can prevent the lock cylinder 26 from falling out of the lock cylinder groove. The smaller diameter section passes out of the annular boss, and can selectively enter or push out a through hole at the top of the lock case 22.

The method for replacing a mask plate in this embodiment includes:

S101. The automatic locking mechanism 2 releases the mask plate 4.

S102, the tray 3 rises to support the mask plate 4;

S103. The clamping mechanism removes the mask plate 4 on the tray 3.

S104. The clamping mechanism places the mask plate 4 to be replaced on the tray 3.

S105. The tray 3 is lowered, and the mask plate 4 is placed on the substrate frame 1.

S106. The automatic locking mechanism locks the mask plate 4.

As a preferred embodiment, in the step S101, the method specifically includes: the release driving mechanism 27 pushes the release button 23 to squeeze the lock core 26 out of the through hole at the top of the lock housing 22, and the first spring Under the action of 24, the lock lever 21 is separated from the mask plate 4.

As a preferred embodiment, in the step S106, the locking drive mechanism 28 specifically pushes the lock lever 21 toward the mask plate 4 to abut the mask plate 4, and when the lock core 26 When passing through the through hole on the top of the lock housing 22, the lock core 26 is inserted into the through hole under the action of the second spring 25, so as to limit the length of the lock lever 21.

The present application provides a mask replacement device and a replacement method capable of efficiently and safely replacing and fixing a mask in a vacuum environment without invalidating the mask. The mask is transferred to a tray through a clamping mechanism. On the tray, the tray is placed on the substrate frame. The positioning pins are fixed relative to the screws to reduce the wear of the mask plate. The automatic locking mechanism is not only stable and effective, but also easy to operate.

The above is only a specific implementation of the present application. It should be noted that, for those of ordinary skill in the art, without departing from the principles of the present application, several improvements and retouching can be made. These improvements and retouching also It should be regarded as the protection scope of this application.

Claims

A mask plate replacement device includes a substrate frame (1) for carrying a mask plate (4), and a mask plate (4) provided on the substrate frame (1) for selectively locking or releasing the mask plate (4). An automatic locking mechanism (2) and a tray (3) provided under the substrate holder (1) for holding the mask, the substrate holder (1) includes a tray hole (12), and the tray (3) may Selectively enter and exit the tray hole (12) to lift or lower the mask plate (4), two of the mask plate (4) are arranged on opposite sides of the mask plate (4), respectively The positioning hole (41), the substrate frame (1) includes a positioning pin (11) for inserting in the positioning hole (41) to horizontally limit the mask plate.
The mask plate replacement device according to claim 1, wherein the automatic locking mechanism (2) comprises a lock lever (21), a lock housing (22), a release button (23), and a first spring (24) , A second spring (25) and a lock core (26), two opposite sides and the top of the lock housing (22) are provided with through holes, and two ends of the lock lever (21) are slidably passed through In the through holes on two opposite sides of the lock housing (22), an annular boss is provided in the middle of the lock lever (21), and one end of the first spring (24) abuts the annular boss. The other end is in contact with the inner side of the lock housing (22), and one end of the lock lever (21) near the mask plate (4) may selectively abut the mask plate (4) or Separation; a lock cylinder groove is provided on the annular boss, the lock cylinder (26) is located in the lock cylinder groove and slides in the lock housing (22) with the lock lever (21), the One end of the second spring (25) is in contact with the lock cylinder (26), and the other end is in contact with the bottom surface of the lock cylinder groove. When the lock lever (21) moves toward the mask plate (4), The lock cylinder (26) When below the through hole at the top of the lock housing (22), the lock core (26) is pushed into the through hole at the top of the lock housing (22) by the push of a second spring (25) to restrict the lock lever ( 21), one end of the release button (23) is located in a through hole at the top of the lock case (22), and is used to push out the lock core (26) that enters the through hole at the top of the lock case (22).
The mask plate replacement device according to claim 2, wherein the number of the automatic locking mechanisms (2) is at least two, and the automatic locking mechanisms (2) are disposed on two opposite sides of the tray hole (12) for locking and loosening. Open the mask.
The mask plate replacement device according to claim 2, wherein the automatic locking mechanism (2) further comprises an abutting end of the lock lever (21) away from the mask plate (4) for The locking drive mechanism (27) for pushing the lock lever (21) and an end of the release button (23) that is far from the through hole at the top of the lock housing (22) are used to push the release. The button (23) releases the drive mechanism (28).
The mask plate replacement device according to claim 2, wherein the locking lever (21) is a stepped lever composed of four segments with different thicknesses.
The mask plate replacement device according to claim 1, further comprising a clamping mechanism, wherein the clamping mechanism can selectively place the mask plate (4) on the tray (3) or from the tray (3). Remove the mask plate (4) from the tray (3).
A mask plate replacement device includes a substrate frame (1) for carrying a mask plate (4), and a mask plate (4) provided on the substrate frame (1) for selectively locking or releasing the mask plate (4). An automatic locking mechanism (2) and a tray (3) provided under the substrate holder (1) for holding the mask, the substrate holder (1) includes a tray hole (12), and the tray (3) may The tray hole (12) is selectively entered and exited to lift or lower the mask plate (4).
The mask plate replacement device according to claim 7, wherein the mask plate (4) has at least three positioning holes (41) arranged on opposite sides of the mask plate (4), and the substrate frame (1) It includes a positioning pin (11) for horizontally limiting the mask plate inserted in the positioning hole (41).
The mask plate replacement device according to claim 7, wherein the automatic locking mechanism (2) comprises a lock lever (21), a lock housing (22), a release button (23), and a first spring (24) , A second spring (25) and a lock core (26), two opposite sides and the top of the lock housing (22) are provided with through holes, and two ends of the lock lever (21) are slidably passed through In the through holes on two opposite sides of the lock housing (22), an annular boss is provided in the middle of the lock lever (21), and one end of the first spring (24) abuts the annular boss. The other end is in contact with the inner side of the lock housing (22), and one end of the lock lever (21) near the mask plate (4) may selectively abut the mask plate (4) or Separation; a lock cylinder groove is provided on the annular boss, the lock cylinder (26) is located in the lock cylinder groove and slides in the lock housing (22) with the lock lever (21), the One end of the second spring (25) is in contact with the lock cylinder (26), and the other end is in contact with the bottom surface of the lock cylinder groove. When the lock lever (21) moves toward the mask plate (4), The lock cylinder (26) When below the through hole at the top of the lock housing (22), the lock core (26) is pushed into the through hole at the top of the lock housing (22) by the push of a second spring (25) to restrict the lock lever ( 21), one end of the release button (23) is located in a through hole at the top of the lock case (22), and is used to push out the lock core (26) that enters the through hole at the top of the lock case (22).
The mask plate replacement device according to claim 9, wherein the number of the automatic locking mechanisms (2) is at least two, and the automatic locking mechanisms (2) are disposed on two opposite sides of the tray hole (12) for locking and loosening. Open the mask.
The mask plate replacement device according to claim 9, wherein the automatic locking mechanism (2) further comprises an abutting end of the lock lever (21) away from the mask plate (4) for The locking drive mechanism (27) for pushing the lock lever (21) and an end of the release button (23) that is far from the through hole at the top of the lock housing (22) are used to push the release. The button (23) releases the drive mechanism (28).
The mask plate replacement device according to claim 7, further comprising a clamping mechanism, the clamping mechanism can selectively place the mask plate (4) on the tray (3) or from the tray (3). Remove the mask plate (4) from the tray (3).
The mask plate replacement device according to claim 8, further comprising a clamping mechanism, wherein the clamping mechanism can selectively place the mask plate (4) on the tray (3) or from the tray (3). Remove the mask plate (4) from the tray (3).
The mask plate replacement device according to claim 9, further comprising a clamping mechanism, the clamping mechanism can selectively place the mask plate (4) on the tray (3) The mask plate (4) is removed from the tray (3).
The mask plate replacement device according to claim 10, further comprising a clamping mechanism, wherein the clamping mechanism can selectively place the mask plate (4) on the tray (3) The mask plate (4) is removed from the tray (3).
The mask plate replacement device according to claim 11, further comprising a clamping mechanism, wherein the clamping mechanism can selectively place the mask plate (4) on the tray (3) The mask plate (4) is removed from the tray (3).
The mask plate replacement device according to claim 9, wherein the lock lever (21) is a stepped lever composed of four segments with different thicknesses.
A mask replacement method, including:

S101. The automatic locking mechanism (2) releases the mask plate (4);

S102. The tray (3) rises to support the mask plate (4);

S103. The clamping mechanism removes the mask plate (4) on the tray (3);

S104. The clamping mechanism places the mask plate (4) to be replaced on the tray (3);

S105. The tray (3) is lowered and the mask plate (4) is placed on the substrate frame (1);

S106. The automatic locking mechanism locks the mask plate (4).
The mask replacement method according to claim 18, wherein in step 101, the method further comprises: pushing the release button (23) by the release driving mechanism (27) to remove the lock core (26) from the lock housing. (22) The top through hole is extruded. Under the action of the thrust of the first spring (24), the lock lever (21) is separated from the mask plate (4).
The method for replacing a mask plate according to claim 18, wherein in the step 106, the method further comprises: pushing the lock lever (21) toward the mask plate (4) by the lock driving mechanism (28). As far as it is in contact with the mask plate (4), when the lock cylinder (26) passes through the through hole on the top of the lock shell (22), the lock cylinder (26) is inserted into the through hole under the action of the second spring (25). Limit the length of the lock lever (21).