CN109023234B - Mask plate replacing device and replacing method - Google Patents
Mask plate replacing device and replacing method Download PDFInfo
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- CN109023234B CN109023234B CN201810903190.6A CN201810903190A CN109023234B CN 109023234 B CN109023234 B CN 109023234B CN 201810903190 A CN201810903190 A CN 201810903190A CN 109023234 B CN109023234 B CN 109023234B
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- mask plate
- mask
- lock
- locking
- tray
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/042—Coating on selected surface areas, e.g. using masks using masks
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention discloses a mask plate replacing device and a mask plate replacing method. According to the automatic locking mechanism, the mask plate is conveyed to be arranged on the tray through the clamping mechanism, the tray is arranged on the substrate frame, the positioning pin is positioned and is fixed relative to the threads, so that the abrasion of the mask plate is reduced, and the automatic locking mechanism is stable and effective in fixation and simple and convenient to operate.
Description
Technical Field
The invention relates to a sputter coating machine, in particular to a mask plate replacing device and a mask plate replacing method of the sputter coating machine.
Background
The sputtering film plating machine is widely applied to film plating processes of TP, LCD and OLED, in the film plating process, a plurality of film forming processes do not need the whole substrate to form films, but a mask plate and a matched close alignment system are used for depositing film layers with specific shapes during sputtering film plating, and different mask plates are used for different product types. When the product model is replaced every time, the corresponding mask plate can be replaced, and the required specific film pattern can be produced only after the mask plate and the substrate frame are replaced every time, so that the relative position of the mask plate and the substrate frame is kept unchanged in the film forming process.
With the development of new technologies, horizontal magnetron sputtering coating machines with masks and alignment systems are more and more widely used, for example, in the film deposition process of the magnetron sputtering coating machine, a substrate rack is required to bear the glass substrate to move horizontally, the cathode of the OLED is also used in a sputtering mode, a TP shadow eliminating layer is also used in the coating machine, the substrate rack in the sputtering coating machine is required to not only bear the masks and the glass substrate, but also keep the relative position in the film deposition process unchanged.
The use method of the substrate frame on the horizontal magnetron sputtering film plating machine using the mask plate at present is to manufacture a hole with a specific shape on the substrate frame, install the required mask plate right above the hole, then lock the mask plate on the substrate frame by screws around the mask plate, then load the substrate on the mask plate, and clamp the substrate by a substrate clamp to start film formation. When changing the product model, take out the base plate frame and then change the mask plate from the vacuum cavity, the screw lock for the mask plate is on the base plate frame, need take out under the vacuum state when changing the model at every turn, adorn back board evacuation again after the change is accomplished. Especially for single-cavity coating, more than 3 hours are needed for each replacement, the time is wasted for continuous coating machines, and the substrate frame trolley is needed for taking the substrate frame from the machine table every time, so that the equipment cost and the danger coefficient are increased. Because the number of fastening screws is large, time is wasted when each mask plate is replaced, the mask plates are invalid due to the fact that the fastening screws are replaced for many times, the new mask plates need to be replaced, and cost is increased; the whole replacement process is completed by manual work, and the efficiency is low.
Disclosure of Invention
The technical problem to be solved by the invention is to overcome the defects of the prior art and provide a mask plate replacing device and a replacing method, wherein the mask plate can be efficiently and safely replaced and fixed in a vacuum environment without failure.
In one general aspect, a mask replacing device is provided, which comprises a substrate holder for bearing a mask, an automatic locking mechanism arranged on the substrate holder and used for selectively locking or loosening the mask, and a tray arranged below the substrate holder and used for supporting the mask, wherein the substrate holder comprises a tray hole, and the tray can selectively enter and exit the tray hole to support or put down the mask.
Preferably, the mask plate is provided with at least two positioning holes respectively arranged at two opposite sides of the mask plate, and the substrate frame comprises positioning pins which are inserted into the positioning holes and horizontally limit the mask plate.
Preferably, the automatic locking mechanism comprises a lock rod, a lock shell, a release button, a first spring, a second spring and a lock cylinder, through holes are formed in two opposite side faces and the top of the lock shell, two ends of the lock rod slidably penetrate through the through holes in the two opposite side faces of the lock shell, an annular boss is arranged in the middle of the lock rod, one end of the first spring is abutted against the annular boss, the other end of the first spring is abutted against the inner side face of the lock shell, and one end, close to a mask plate, of the lock rod can be selectively abutted against or separated from the mask plate; the annular boss is provided with a lock cylinder groove, the lock cylinder is positioned in the lock cylinder groove and slides in the lock shell along with the lock rod, one end of the second spring is abutted to the lock cylinder, the other end of the second spring is abutted to the bottom surface of the lock cylinder groove, when the lock rod moves towards the mask plate to the position below the through hole in the top of the lock shell, the lock cylinder enters the through hole in the top of the lock shell under the pushing of the second spring to limit the movement of the lock rod, and one end of the loosening button is positioned in the through hole in the top of the lock shell and used for pushing out the lock cylinder entering the through hole in the top of the lock shell.
Preferably, the number of the automatic locking mechanisms is at least two, and the automatic locking mechanisms are arranged on two opposite sides of the tray hole and used for locking and unlocking the mask plate.
Preferably, the automatic locking mechanism further comprises a locking driving mechanism which is connected with one end of the locking rod far away from the metal mask plate in an abutting mode and used for pushing the locking rod, and a loosening driving mechanism which is connected with one end of the loosening button far away from the through hole in the top of the lock shell in an abutting mode and used for pushing the loosening button.
Preferably, the automatic locking mechanism further comprises a clamping mechanism, and the clamping mechanism can selectively place the mask plate on the tray or take down the mask plate from the tray.
In another general aspect, there is provided a mask replacing method, including:
s01, loosening the mask plate by an automatic locking mechanism;
s02, lifting the tray to support the mask plate;
s03, taking down the mask plate on the tray by the clamping mechanism;
s04, placing the mask plate to be replaced on the tray by the clamping mechanism;
s05, lowering the tray to place the mask plate on the substrate frame;
and S06, locking the mask plate by an automatic locking mechanism.
Preferably, in step S01, the method specifically includes: the loosening driving mechanism pushes the loosening button to extrude the lock cylinder out of the through hole in the top of the lock shell, and the lock rod is separated from the mask plate under the thrust action of the first spring.
Preferably, in step S06, the method specifically includes: locking actuating mechanism promotes the locking lever to the mask plate impels to with the mask plate butt, when the lock core through the through-hole at lock shell top, in the lock core inserts the through-hole under the effect of second spring, realizes spacing to locking lever length direction.
The invention provides a mask plate replacing device and a replacing method which can efficiently and safely replace and fix a mask plate in a vacuum environment and cannot enable the mask plate to be invalid.
Drawings
FIG. 1 is a schematic top view of a mask replacing apparatus according to the present invention;
FIG. 2 is a schematic cross-sectional view of a mask replacing apparatus according to the present invention;
FIG. 3 is a schematic cross-sectional view of a mask replacing device in a state where a mask is lifted by a tray according to the present invention;
FIG. 4 is a schematic cross-sectional view of a mask replacing apparatus according to the present invention, in which a mask is placed on a substrate holder;
FIG. 5 is a schematic cross-sectional view of a mask replacing device in an unlocked state of the automatic locking mechanism according to the present invention;
fig. 6 is a schematic cross-sectional structure view of the mask replacing device in the locking state of the automatic locking mechanism of the present invention.
Detailed Description
The invention aims to solve the problems of how to effectively improve the replacement rate of the mask plate, reduce the damage to the mask plate in the replacement process and improve the film coating efficiency. Embodiments of the present invention will be described in detail below with reference to the accompanying drawings.
As shown in fig. 1-4, the mask replacing device of the present embodiment includes a substrate holder 1 for holding a mask 4, an automatic locking mechanism 2 disposed on the substrate holder 1 for selectively locking or releasing the mask 4, and a tray 3 disposed below the substrate holder 1 for supporting the mask 4, wherein the substrate holder 1 includes a tray hole 12, the tray 3 can selectively enter and exit the tray hole 12 to lift or put down the mask 4, for facilitating the replacement of the mask, the tray directly passes through the tray hole 12 to lift the mask 4, and then the mask 4 is lifted to be separated from the substrate holder 1, and the mask 4 can also be stably placed on the substrate holder 1, so that the mask 4 is fixed to the substrate holder 1 in a matching manner, when the mask 4 is fixed to the substrate holder 1, the automatic locking mechanism 2 locks the mask 4, and the mask 4 does not move on the substrate holder 1, the whole replacement process does not need to disassemble the substrate frame any more, so that the time is saved.
As a preferred embodiment, at least two positioning holes 41 are formed in the mask plate 4 and are respectively arranged on two opposite sides of the mask plate 4, the substrate holder 1 includes positioning pins 11 for being inserted into the positioning holes 41 to horizontally limit the mask plate, the position of the mask plate 4 can be accurately determined by matching the pins with the holes, and meanwhile, the pin holes can be matched in place in one step, friction generated in the matching process is smaller than friction generated by threaded connection, and the loss of the mask plate is smaller.
As shown in fig. 5 and 6, as a preferred embodiment, the automatic locking mechanism 2 includes a locking rod 21, a lock case 22, a release button 23, a first spring 24, a second spring 25 and a lock core 26, the lock case 22 is a rectangular parallelepiped with an inner accommodating space, two opposite sides and the top thereof in the length direction are provided with through holes, the locking rod 21 passes through the through holes on the two opposite sides in the length direction of the lock case 22, and two ends of the through holes are located outside the lock case 22, the locking rod 21 can slide in the through holes on the two sides of the lock case 22, the middle part of the locking rod 21 is provided with an annular boss, one end of the first spring 24 abuts against the annular boss, the other end abuts against the inner side of the lock case 22, when the locking rod 21 is pushed by external force, the locking rod 21 can move towards the mask plate 4 until one end of the locking rod 21 close to the mask plate 4 abuts against the mask plate 4, when the external force is removed, the lock rod 21 is separated from the mask 4 under the action of the first spring force.
As a preferred embodiment, a lock cylinder groove is arranged in the middle of the lock rod 21, the lock cylinder 26 is located in the lock cylinder groove and moves in the lock case 22 along with the lock rod 21, one end of the second spring 25 abuts against the lock cylinder 26, the other end of the second spring abuts against the bottom surface of the lock cylinder groove, when the lock cylinder 26 moves below the through hole at the top of the lock case 22 along with the lock rod 21, under the action of the elastic force of the second spring 25, the lock cylinder 26 enters the through hole at the top of the lock case 22, and after the lock cylinder 26 enters the through hole at the top of the lock case 22, the lock cylinder 26 can limit the lock rod 21 so that the lock rod 21 cannot move in the lock case 22 any more.
As a preferred embodiment, one end of the release button 23 is located in the through hole at the top of the lock case 22 and is used for abutting against one end of the lock cylinder 26 entering the through hole at the top of the lock case 22, and under the action of external force, the release button 23 moves towards the lock cylinder 26 and extrudes the lock cylinder 26 from the through hole at the upper end of the lock case 22, so as to unlock the lock rod 21, and the lock rod 21 can move again in the lock case 22.
As a preferred embodiment, the number of the automatic locking mechanisms 2 is at least two, and the automatic locking mechanisms 2 are disposed at two opposite sides of the tray hole 12 and used for locking and releasing the mask plate, at least two automatic locking mechanisms 2 can lock and fix the mask plate in different directions, and according to actual needs, the number of the automatic locking mechanisms 2 can be increased, and the mask plate can be fixed in different directions.
As a preferred embodiment, the automatic locking mechanism 2 of this embodiment further includes an abutting part at one end of the lock rod 21 far away from the mask 4, a locking driving mechanism 27 for pushing the lock rod 21, and an abutting part at one end of the release button 23 far away from the through hole at the top of the lock case 22, a release driving mechanism 28 for pushing the release button 23, and the mask 4 that is locked or released by the automatic locking mechanism 2 can be quickly locked or released by the driving force provided by the locking driving mechanism 27 and the release driving mechanism 28.
As a preferred embodiment, the mask replacing device of this embodiment further includes a clamping mechanism, and the clamping mechanism can selectively place the mask 4 on the tray 3 or take down the mask 4 from the tray 3.
As a preferred embodiment, the locking rod 21 is a stepped rod formed by combining four rod segments with different thicknesses, as shown in fig. 5 and 6, the first rod segment, the second rod segment, the third rod segment and the fourth rod segment are respectively arranged from left to right in the drawing, the third rod segment is a segment provided with an annular boss, the third rod segment is slidably fixed with the inner side wall of the lock case 22, the second rod segment and the fourth rod segment are thinner than the third rod segment and are slidably fixed with the through holes on two opposite sides of the lock case 22, the first rod segment is located outside the lock case 22, the rod diameter of the first rod segment is larger than the through holes on two opposite sides of the lock case 22, when the locking rod 21 slides in the lock case 22, the first rod segment cannot pass through the through holes, so as to play a role of limiting, and prevent the damage caused by the excessive penetration of the locking rod 21 when being matched with the mask plate 4.
As a preferred embodiment, a circle of annular boss which is turned inwards is arranged at the opening of the lock cylinder groove of the lock rod 21, the lock cylinder 26 is divided into two sections with different diameters, one section with a larger diameter is positioned below, one end of the section with the larger diameter is elastically abutted against the second spring 25, and the other end of the section with the larger diameter is abutted against the inner annular surface of the annular boss, so that the lock cylinder 26 can be prevented from falling off from the lock cylinder groove. The smaller diameter section extends out of the annular boss and selectively enters or exits the through hole in the top of the lock housing 22.
The method for replacing the mask plate comprises the following steps:
s01, loosening the mask plate 4 by the automatic locking mechanism 2;
s02, lifting the tray 3 to lift the mask plate 4;
s03, taking down the mask plate 4 on the tray 3 by the clamping mechanism;
s04, placing the mask plate 4 to be replaced on the tray 3 by the clamping mechanism;
s05, lowering the tray 3 to place the mask plate 4 on the substrate holder 1;
and S06, locking the mask plate 4 by an automatic locking mechanism.
As a preferred embodiment, in step S01, the method specifically includes: the release driving mechanism 27 pushes the release button 23 to extrude the lock core 26 out of the through hole at the top of the lock case 22, and the lock bar 21 is separated from the mask 4 under the action of the first spring 24.
As a preferred embodiment, in step S06, the method specifically includes: locking actuating mechanism 28 promotes locking lever 21 to mask plate 4 impels to with mask plate 4 butt, when lock core 26 passes through the through-hole at lock shell 22 top, in lock core 26 inserts the through-hole under the effect of second spring 25, realizes spacing to locking lever 21 length direction.
The invention provides a mask plate replacing device and a replacing method which can efficiently and safely replace and fix a mask plate in a vacuum environment and cannot enable the mask plate to be invalid.
The foregoing is directed to embodiments of the present application and it is noted that numerous modifications and adaptations may be made by those skilled in the art without departing from the principles of the present application and are intended to be within the scope of the present application.
Claims (7)
1. A mask plate replacing device is characterized by comprising a substrate frame (1) for bearing a mask plate (4), an automatic locking mechanism (2) arranged on the substrate frame (1) and used for selectively locking or loosening the mask plate (4), and a tray (3) arranged below the substrate frame (1) and used for lifting the mask plate, wherein the substrate frame (1) comprises a tray hole (12), and the tray (3) can selectively enter and exit the tray hole (12) so as to lift or put down the mask plate (4);
the automatic locking mechanism (2) comprises a locking rod (21), a lock shell (22), a loosening button (23), a first spring (24), a second spring (25) and a lock cylinder (26), through holes are formed in two opposite side faces and the top of the lock shell (22), two ends of the locking rod (21) are slidably arranged in the through holes in the two opposite side faces of the lock shell (22), an annular boss is arranged in the middle of the locking rod (21), one end of the first spring (24) is abutted to the annular boss, the other end of the first spring is abutted to the inner side face of the lock shell (22), and one end, close to a mask plate (4), of the locking rod (21) can be selectively abutted to or separated from the mask plate (4); be provided with the lock core groove on the cyclic annular boss, lock core (26) are located lock core inslot and along with locking lever (21) are in slide in lock shell (22), second spring (25) one end with lock core (26) butt, the other end with the bottom surface butt in lock core groove, work as locking lever (21) court mask plate (4) remove extremely when lock core (26) are located the through-hole below at lock shell (22) top, lock core (26) get into under the promotion of second spring (25) in the through-hole at lock shell (22) top, the restriction the removal of locking lever (21), it is located in the through-hole at lock shell (22) top to loosen button (23) one end for lock core (26) in the through-hole that will get into lock shell (22) top are released.
2. A mask plate replacing device according to claim 1, wherein the mask plate (4) has at least two positioning holes (41) respectively arranged at two opposite sides of the mask plate (4), and the substrate holder (1) comprises positioning pins (11) for inserting into the positioning holes (41) to horizontally position the mask plate.
3. A mask replacing apparatus according to claim 1, wherein the number of the automatic locking mechanisms (2) is at least two, and the automatic locking mechanisms are provided at both opposite sides of the tray hole (12) for locking and unlocking a mask.
4. A mask replacing device according to claim 1, wherein the automatic locking mechanism (2) further comprises a locking driving mechanism (27) which abuts against one end of the locking rod (21) far away from the mask (4) and is used for pushing the locking rod (21) and a loosening driving mechanism (28) which abuts against one end of the loosening button (23) far away from the through hole at the top of the lock case (22) and is used for pushing the loosening button (23).
5. A mask replacing apparatus according to any one of claims 1 to 4, further comprising a clamping mechanism for selectively placing the mask (4) on the tray (3) or removing the mask (4) from the tray (3).
6. A method for replacing a mask is characterized by comprising the following steps:
s01, loosening the mask plate (4) by the automatic locking mechanism (2);
s02, lifting the mask plate (4) by the tray (3);
s03, taking down the mask plate (4) on the tray (3) by the clamping mechanism;
s04, placing the mask plate (4) to be replaced on the tray (3) by the clamping mechanism;
s05, lowering the tray (3) and placing the mask plate (4) on the substrate frame (1);
s06, automatic locking mechanism locking mask plate (4), wherein, locking actuating mechanism (28) promote locking lever (21) to mask plate (4) impel to with mask plate (4) butt, when lock core (26) through the through-hole at lock shell (22) top, in lock core (26) insert the through-hole under the effect of second spring (25), realize the spacing to locking lever (21) length direction.
7. A method for replacing a mask according to claim 6, wherein in the step S01, the method specifically comprises: the loosening driving mechanism (27) pushes the loosening button (23) to extrude the lock core (26) out of the through hole in the top of the lock shell (22), and the lock rod (21) is separated from the mask plate (4) under the thrust action of the first spring (24).
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810903190.6A CN109023234B (en) | 2018-08-09 | 2018-08-09 | Mask plate replacing device and replacing method |
| PCT/CN2018/108403 WO2020029408A1 (en) | 2018-08-09 | 2018-09-28 | Mask replacement device and replacement method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810903190.6A CN109023234B (en) | 2018-08-09 | 2018-08-09 | Mask plate replacing device and replacing method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109023234A CN109023234A (en) | 2018-12-18 |
| CN109023234B true CN109023234B (en) | 2020-08-28 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810903190.6A Active CN109023234B (en) | 2018-08-09 | 2018-08-09 | Mask plate replacing device and replacing method |
Country Status (2)
| Country | Link |
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| CN (1) | CN109023234B (en) |
| WO (1) | WO2020029408A1 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115155881A (en) * | 2022-08-26 | 2022-10-11 | 沅江市恒盛机械制造有限公司 | Paint spraying equipment for machining trolley frame and using method |
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| CN203034081U (en) * | 2012-12-04 | 2013-07-03 | 彩虹（佛山）平板显示有限公司 | Adjusting instrument for mask loading and separating machine |
| CN104278232A (en) * | 2013-07-08 | 2015-01-14 | 三星显示有限公司 | Vacuum deposition apparatus and method using same |
| CN103839864A (en) * | 2014-02-24 | 2014-06-04 | 合肥鑫晟光电科技有限公司 | Coating alignment device and coating system |
| CN104294213A (en) * | 2014-09-27 | 2015-01-21 | 昆山允升吉光电科技有限公司 | Metal mask plate component assembly device |
| CN105624634A (en) * | 2014-11-04 | 2016-06-01 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Reaction chamber and semiconductor processing equipment |
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| CN105063551A (en) * | 2015-07-15 | 2015-11-18 | 中国工程物理研究院激光聚变研究中心 | Mask method for preparing thin mask layer composed of multiple materials in zoning mode |
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| CN106048551A (en) * | 2016-07-19 | 2016-10-26 | 沈阳大学 | Workpiece bracket of vacuum coating machine |
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| Publication number | Publication date |
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| WO2020029408A1 (en) | 2020-02-13 |
| CN109023234A (en) | 2018-12-18 |
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