CN105938976B - Plating films on cavity surfaces of semiconductor lasers fixture - Google Patents
Plating films on cavity surfaces of semiconductor lasers fixture Download PDFInfo
- Publication number
- CN105938976B CN105938976B CN201610131483.8A CN201610131483A CN105938976B CN 105938976 B CN105938976 B CN 105938976B CN 201610131483 A CN201610131483 A CN 201610131483A CN 105938976 B CN105938976 B CN 105938976B
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- CN
- China
- Prior art keywords
- cover board
- laser
- bar item
- sliding block
- bottom plate
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/028—Coatings ; Treatment of the laser facets, e.g. etching, passivation layers or reflecting layers
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- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Optics & Photonics (AREA)
- Semiconductor Lasers (AREA)
Abstract
Plating films on cavity surfaces of semiconductor lasers fixture, the fixture are a kind of special coating clamp for tilting fixed laser Bar item, which is made of bottom plate, middle plate, cover board, sliding block, Bar item；It is the key that realize that the inclination installation of laser Bar item is fixed using the sliding block with inclined-plane, after completing one face plated film of laser, before carrying out another side cavity surface film coating, need that cant angle theta angle, operating method are by slide block B reverse side in another direction by laser Bar item, and semiconductor laser Bar item is tilted along slide block B inclined-plane and is installed, then cover board A is unloaded, by sliding block A reverse side, is reinstalled cover board A, fixed laser Bar item, finally completes the plated film of another side.The present invention is used the technical solution of the fixed coating clamp of laser Bar item inclination, is efficiently solved the technical problem of blocking in laser cavity surface coating process, is also avoided the secondary pollution of laser Bar item.
Description
Technical field
It is to have important answer in a kind of semiconductor laser development and production process the invention belongs to field of semiconductor lasers
With coating apparatus, it is applied to plating films on cavity surfaces of semiconductor lasers.
Background technique
Cavity surface film coating technology is one of the core technology in semiconductor laser development and production process, the Cavity surface light being coated with
The performance that the performances such as film reflectivity directly affected and determined semiconductor laser is learned, noise spectra of semiconductor lasers is prepared with important shadow
It rings.
In order to improve the control of films on cavity surfaces of semiconductor lasers optical film reflectivity and coating quality, high vacuum item is generallyd use
Ion assisted physical vapor deposition plating technology under part, using quartz crystal film-thickness monitoring and blooming controller to optics
Thickness in film growth course is controlled.Theoretically, it may be implemented to need the films on cavity surfaces of semiconductor lasers optical film of reflectivity,
But in actual process, the Cavity surface optical film reflectivity and design value being coated with are mainly due to: work there are biggish difference
During skill, coating clamp noise spectra of semiconductor lasers Bar item is needed to be fixed, and semiconductor laser active area is from the face P electricity
Pole vertical range is at 1~2 μm, in Bar fixation procedure of laser, because Bar chamber length of laser more or less has several μm
Above difference, and the chucking surface out-of-flatness of Bar item is installed, laser active area part is easy to by adjacent laser
Bar item or clamp member surface block, in such coating process, the film thickness and actual requirement of the growth of laser active zone position
It is worth variant and related with the state of fixation Bar item at that time, there is very big uncertainty.It is asked to solve the technology
Topic, needs to be broken through from Bar fixed form of laser, and the present invention is solved using the technical solution of oblique laser device Bar item
Uncertain problem in this coating process.
Summary of the invention
In order to solve in laser cavity surface coating process, active area is blocked, and active zone position optical film film thickness is uncontrollable
The problem of, the present invention starts with from Bar chuck designs of fixed laser, proposes solid to the inclination installation of laser Bar item
Determine technical solution, it is therefore intended that in coating process, the laser cavity surface active area region of plated film is needed all to be exposed to plated film ring
Under border, guarantee that the film thickness for being deposited to laser active zone position can be surveyed, controllably.
The present invention solves the problems, such as that laser cavity surface plated film active area is blocked the technical scheme adopted is that semiconductor laser
Device cavity surface film coating fixture, the fixture are a kind of special coating clamp for tilting fixed laser Bar item, which is by bottom plate
1, middle plate 2, cover board 3, sliding block 4, Bar item 5 form；
Bottom plate 1 and middle 2 contact surface of plate are smooth flat, and the centre of bottom plate 1 is provided with rectangular through holes, the Bar item 5 of laser
It is matched with the rectangular through holes, and is coated with its required optical film, 1 hollow space edge thickness of bottom plate through the rectangular through holes
d1Relatively thin, which uses as coating clamp bottom support plate, and 1 both sides of bottom plate are provided with internal thread through hole；
The two sides of middle plate 2 is smooth metal plate, and middle plate 2 is consistent with the size of bottom plate 1, and the centre of middle plate 2 is emptied
Rectangularity, rectangle width w2The rectangle width w more hollow than bottom plate1Wide 0.5mm-1.5mm, the thickness and laser of middle plate 2
Chamber long one show the Bar item 5 of locking laser, the both sides of middle plate 2 are provided with the through-hole of no internal screw thread；
Cover board 3 is consistent with the size of bottom plate 1, and cover board 3 is divided into cover board A, cover board B two parts, opens among cover board 3
Having hollow rectangular metallic plate is cover board B, and the other part of cover board 3 is cover board A, and cover board A, cover board B cooperate to tear open
It unloads；In addition rectangular cutout has symmetrically been opened on both sides empty in the part cover board B, in order to which the Bar item 5 of laser dismounts；Cover board
The two sides A and B are provided with having been formed without disposed thread through-hole so that bottom plate 1, middle plate 2, cover board 3 to be assembled integrally for invagination nut
Whole fixture, cover board 3 are combined about the 5 Bar item of laser is fixed with bottom plate 1.
The inclination base angle of 4 one side of sliding block is θ, the width w of sliding block 42For the rectangle width in middle plate 2, sliding block 4 needs pairs of
It is matched with middle plate 2, the inclined-plane of sliding block 4 is in contact with laser electrode face, and one group of laser is fixed among each pair of sliding block 4
Bar item 5.
The Bar item 5 of laser is the main body of plated film, is divided by the interior empty edge notches of cover board 3, passes through symmetrical two
Sliding block 4 is fixed in the inside groove of coating clamp, and laser Bar item can be successively arranged in parallel as needed, installation Bar item 5
In the process, guarantee that the active region of coated surface is set in dew film coating environment with not blocking.
Sliding block 4 uses stainless steel metal material, and inclination base angle θ is 45 ° to 75 °,
It is the key that realize that the inclination installation of laser Bar item is fixed using the sliding block with inclined-plane, when completion laser one side
After plated film, before carrying out another side cavity surface film coating, need laser Bar item cant angle theta angle in another direction, operating method be by
Slide block B reverse side, and semiconductor laser Bar item is tilted along slide block B inclined-plane and is installed, cover board A is then unloaded, by sliding block A reverse side, weight
New clothes upper cover plate A, fixed laser Bar item, finally completes the plated film of another side.
In conclusion the present invention is used the technical solution of the fixed coating clamp of laser Bar item inclination, effectively solve
Technical problem is blocked in laser cavity surface coating process, as can be seen from the above technical solutions, semiconductor laser of the present invention
Device coating clamp design scheme has the advantages that
(1) program is designed by using sloping slide, can effectively realize that Bar plated film top rake of laser is placed, plating
In membrane process, laser active area unobstructed can be placed in film coating environment, be avoided because laser Bar item is uneven or sliding block is to laser
Device active region blocks, to realize the accurate control to active area coating film thickness and membrane system；
(2) design scheme, can be conveniently by tearing open after completing a face plated film by the way that cover board is divided into designing two portions
Cover board part A adjustment Bar tilt angle of laser is unloaded, realizes another side plated film, a large amount of laser Bar item dismounting can be saved
Time also avoids the secondary pollution of laser Bar item.
Detailed description of the invention
Fig. 1 .1 is facade installation diagram of the invention.
Fig. 1 .2 is floor map of the invention.
Fig. 1 .3 is A of the invention to sectional view.
Fig. 1 .4 is B of the invention to sectional view.
Fig. 2 .1 is the floor map of bottom plate.
Fig. 2 .2 is the A of bottom plate to sectional view.
Fig. 2 .3 is the B of bottom plate to sectional view.
Fig. 3 .1 is the floor map of middle plate
Fig. 3 .2 is the A of middle plate to sectional view.
Fig. 3 .3 is the B of middle plate to sectional view.
Fig. 4 .1 is the floor map of sliding block
Fig. 4 .2 is the A of sliding block to sectional view.
Fig. 4 .3 is the B of sliding block to sectional view.
Fig. 5 .1 is coating clamp sliding block figure.
Fig. 5 .2 is coating clamp sliding block A to sectional view.
Fig. 5 .3 is coating clamp slide block B to sectional view.
Specific embodiment
It is clear in order to be more clear the object, technical solutions and advantages of the present invention, below in conjunction with specific embodiment, and join
According to attached drawing, the present invention is described in more detail.
As Fig. 1 .1-5 .3 show the signal of the whole i.e. each component of semiconductor laser coating clamp provided by the invention
Figure；Coating clamp of the invention includes bottom plate, middle plate, cover board (A and B), four part of sliding block, in which:
Bottom plate 1 uses stainless steel metal material, cuboid design, wide W in 20mm between 50mm, long L 30mm extremely
Between 120mm, thickness d is 1.5mm between 4.0mm, and a rectangular through holes, entire widths W are opened in centre1For 10mm to 30mm it
Between, long L1In 15mm between 90mm, through-hole edge thickness d1It is flat and smooth with middle plate contact surface for 0.5mm.
Middle plate 2 uses stainless steel metal material, and cuboid design, shape length and width are consistent with bottom plate, thickness d2With laser
Chamber is long consistent, inside opens rectangular through holes, panel is at U-shaped, the width w of aperture2Than baseplate width w1Wide 1.0mm, upper and lower surface are flat
It is capable and flat and smooth.
Cover board 3 uses stainless steel metal material, and the long L wide W thickness d of cuboid design shape is consistent with bottom plate, and centre is opened rectangular
Shape through-hole, the clear size of opening of cover board and the clear size of opening of bottom plate are consistent, and cover board bottom surface and middle plate contact surface are flat smooth surface.
Cover board is made of A, B two parts, the length L of cover board A3Than 4 length L of sliding block0Long 1-3mm.The hollow side of cover board is leaned in cover board B
A square through hole, the wide w of through-hole are respectively opened in both sides at edge20.5mm, long L4It is 2 times or so long for laser chamber.
Sliding block 4 uses stainless steel metal material, and inclination base angle θ is 45 ° to 75 °, slider width w2It is logical with middle plate rectangle
Hole width w2Equally, thickness d2Long consistent with Bar chamber of laser, four sides is bright smooth up and down, every time in use, needing
Mounted in pairs fixed laser Bar item.
Bottom plate 1, middle plate 2, the design of 3 both sides of the cover board aligned through holes fixed by screw, wherein bottom plate opens disposed thread
Hole, middle plate open non-threaded through-hole, cover board open invagination nut without disposed thread through-hole.
In a preferred embodiment of the invention, the width w1For 10mm or 14mm, length L1It is for 30mm, L 50mm, w
30mm, sliding block base angle θ are 60 °.
In conclusion the present embodiment proposes a kind of plating films on cavity surfaces of semiconductor lasers fixture design, efficiently solve sharp
During light device cavity surface film coating, films on cavity surfaces of semiconductor lasers optical film caused by mutually blocking because of laser reflects during being coated with
The uncontrollable problem of rate, can significantly improve the yield rate of plating films on cavity surfaces of semiconductor lasers.
Particular embodiments described above has carried out further in detail the purpose of the present invention, technical scheme and beneficial effects
It describes in detail bright, it should be understood that the above is only a specific embodiment of the present invention, is not intended to restrict the invention, it is all
It is any modification, equivalent substitution, improvement and etc. done within the spirit and principles in the present invention, should all includes of the invention
Within protection scope.
Claims (3)
1. plating films on cavity surfaces of semiconductor lasers fixture, which is a kind of coating clamp for tilting fixed laser Bar item, special
Sign is: the fixture is made of bottom plate (1), middle plate (2), cover board (3), sliding block (4), Bar item (5)；
Bottom plate (1) and middle plate (2) contact surface are smooth flat, and the centre of bottom plate (1) is provided with rectangular through holes, the Bar of laser
Item (5) is matched with the rectangular through holes, and is coated with its required optical film, bottom plate (1) hollow space through the rectangular through holes
Edge thickness is d1For 0.5mm, which uses as coating clamp bottom support plate, and bottom plate (1) both sides are provided with internal screw thread
Through-hole；
The two sides of middle plate (2) is smooth metal plate, and middle plate (2) is consistent with the size of bottom plate (1), the centre of middle plate (2)
Empty rectangularity, rectangle width w2The rectangle width w more hollow than bottom plate1Wide 0.5mm-1.5mm, the thickness of middle plate (2) with
The chamber of laser long one shows the Bar item (5) of locking laser, and the both sides of middle plate (2) are provided with the through-hole of no internal screw thread；
The size of cover board (3) and bottom plate (1) is consistent, and cover board (3) is divided into cover board A, cover board B two parts, and cover board (3) is intermediate
Being provided with hollow rectangular metallic plate is cover board B, and the other part of cover board (3) is cover board A, cover board A, cover board B match with
Just it dismantles；In addition rectangular cutout has symmetrically been opened on both sides empty in cover board part B, in order to which the Bar item (5) of laser is torn open
Dress；The two sides cover board A be provided with invagination nut without disposed thread through-hole, so that bottom plate (1), middle plate (2), cover board (3) are assembled into
One, forms complete fixture, and cover board (3) combines with bottom plate (1) and fixes the Bar item (5) of laser up and down；The through-hole ruler of cover board
It is very little consistent with the clear size of opening of bottom plate, the length L of cover board A3Than sliding block (4) length L0Long 1-3mm；
The inclination base angle of sliding block (4) one side is θ, the width w of sliding block (4)2For the rectangle width in middle plate (2), sliding block (4) is needed
It is matched in pairs with middle plate (2), the inclined-plane of sliding block (4) is in contact with laser electrode face, is fixed with one among each pair of sliding block (4)
The Bar item (5) of group laser；
The Bar item (5) of laser is the main body of plated film, is divided by the interior empty edge notches of cover board (3), passes through symmetrical two
Sliding block (4) is fixed in the inside groove of coating clamp, and laser Bar item can be successively arranged in parallel as needed, installs Bar item
(5) during, guarantee that the active region of coated surface is set in dew film coating environment with not blocking.
2. plating films on cavity surfaces of semiconductor lasers fixture according to claim 1, it is characterised in that: sliding block (4) is using stainless
Steel metal material, inclination base angle θ are 45 ° to 75 °.
3. plating films on cavity surfaces of semiconductor lasers fixture according to claim 1, it is characterised in that: use the sliding block with inclined-plane
It is the key that realize that the inclination installation of laser Bar item is fixed, after completing one face plated film of laser, carries out another side cavity surface film coating
Before, it needs laser Bar item cant angle theta angle in another direction, operating method is by slide block B reverse side, and by semiconductor laser
Bar item is tilted along slide block B inclined-plane and is installed, and is then unloaded cover board A, by sliding block A reverse side, is reinstalled cover board A, fixed laser Bar
Item finally completes the plated film of another side.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610131483.8A CN105938976B (en) | 2016-03-08 | 2016-03-08 | Plating films on cavity surfaces of semiconductor lasers fixture |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610131483.8A CN105938976B (en) | 2016-03-08 | 2016-03-08 | Plating films on cavity surfaces of semiconductor lasers fixture |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105938976A CN105938976A (en) | 2016-09-14 |
| CN105938976B true CN105938976B (en) | 2019-03-22 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610131483.8A Expired - Fee Related CN105938976B (en) | 2016-03-08 | 2016-03-08 | Plating films on cavity surfaces of semiconductor lasers fixture |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105938976B (en) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108360047B (en) * | 2018-04-11 | 2020-03-17 | 中国科学院半导体研究所 | Electroplating clamp and using method thereof |
| CN109932761A (en) * | 2019-04-11 | 2019-06-25 | 浙江舜宇光学有限公司 | Film coating jig |
| CN112410741B (en) * | 2019-08-23 | 2023-02-10 | 哈尔滨理工大学 | Mask clamp based on hard alloy blade coating |
| CN110535025B (en) * | 2019-09-18 | 2024-06-14 | 全磊光电股份有限公司 | BAR strip structure capable of increasing placement quantity |
| CN111501042B (en) * | 2020-06-02 | 2023-09-01 | 海南师范大学 | Edge-emitting semiconductor laser chip cavity surface coating clamp |
| CN112501576B (en) * | 2020-11-30 | 2022-09-20 | 武汉光迅科技股份有限公司 | Clamp and clamping method for semiconductor laser bar |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000340936A (en) * | 1999-05-27 | 2000-12-08 | Toshiba Corp | Solder material applying method, multi-chip module, and manufacture thereof |
| JP2002016310A (en) * | 2000-06-28 | 2002-01-18 | Opnext Japan Inc | Method for manufacturing semiconductor optical element, clamp jig and alignment jig |
| CN2651264Y (en) * | 2003-06-23 | 2004-10-27 | 中国科学院半导体研究所 | Coating film rack with guides |
| CN1563476A (en) * | 2004-03-24 | 2005-01-12 | 长春理工大学 | Flexible clamp in use for filming face of cavity of semiconductor laser |
| CN203747237U (en) * | 2014-03-27 | 2014-07-30 | 北京牡丹电子集团有限责任公司 | Novel semiconductor laser cavity surface film-coating clamp |
| CN104037617A (en) * | 2014-06-17 | 2014-09-10 | 中国科学院半导体研究所 | Coating film holder for blocking free coating film of laser device |
| CN204333598U (en) * | 2015-01-29 | 2015-05-13 | 中国电子科技集团公司第十三研究所 | A kind of semiconductor laser chip cavity surface film coating fixture |
| CN105006740A (en) * | 2015-07-23 | 2015-10-28 | 山东华光光电子有限公司 | End face coating fixture for stripe-geometry semiconductor laser and application thereof |
-
2016
- 2016-03-08 CN CN201610131483.8A patent/CN105938976B/en not_active Expired - Fee Related
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000340936A (en) * | 1999-05-27 | 2000-12-08 | Toshiba Corp | Solder material applying method, multi-chip module, and manufacture thereof |
| JP2002016310A (en) * | 2000-06-28 | 2002-01-18 | Opnext Japan Inc | Method for manufacturing semiconductor optical element, clamp jig and alignment jig |
| CN2651264Y (en) * | 2003-06-23 | 2004-10-27 | 中国科学院半导体研究所 | Coating film rack with guides |
| CN1563476A (en) * | 2004-03-24 | 2005-01-12 | 长春理工大学 | Flexible clamp in use for filming face of cavity of semiconductor laser |
| CN203747237U (en) * | 2014-03-27 | 2014-07-30 | 北京牡丹电子集团有限责任公司 | Novel semiconductor laser cavity surface film-coating clamp |
| CN104037617A (en) * | 2014-06-17 | 2014-09-10 | 中国科学院半导体研究所 | Coating film holder for blocking free coating film of laser device |
| CN204333598U (en) * | 2015-01-29 | 2015-05-13 | 中国电子科技集团公司第十三研究所 | A kind of semiconductor laser chip cavity surface film coating fixture |
| CN105006740A (en) * | 2015-07-23 | 2015-10-28 | 山东华光光电子有限公司 | End face coating fixture for stripe-geometry semiconductor laser and application thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| CN105938976A (en) | 2016-09-14 |
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