WO2019108441A1 - Integrated chip scale packages - Google Patents

Integrated chip scale packages Download PDF

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Publication number
WO2019108441A1
WO2019108441A1 PCT/US2018/061961 US2018061961W WO2019108441A1 WO 2019108441 A1 WO2019108441 A1 WO 2019108441A1 US 2018061961 W US2018061961 W US 2018061961W WO 2019108441 A1 WO2019108441 A1 WO 2019108441A1
Authority
WO
WIPO (PCT)
Prior art keywords
stub
carrier
passageway
chip
scale package
Prior art date
Application number
PCT/US2018/061961
Other languages
French (fr)
Inventor
J. Robert REID
Original Assignee
Nuvotronics, Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nuvotronics, Inc. filed Critical Nuvotronics, Inc.
Publication of WO2019108441A1 publication Critical patent/WO2019108441A1/en

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    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/91—Methods for connecting semiconductor or solid state bodies including different methods provided for in two or more of groups H01L24/80 - H01L24/90
    • H01L24/92—Specific sequence of method steps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/00014—Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/19—Details of hybrid assemblies other than the semiconductor or other solid state devices to be connected
    • H01L2924/1901—Structure
    • H01L2924/1903—Structure including wave guides
    • H01L2924/19033—Structure including wave guides being a coplanar line type

Definitions

  • the present invention relates generally to a chip scale package and more particularly but not exclusively to a chip scale package having a chip integrated therein to provide an integrated chip scale package.
  • lmm thick will grow to a packaged part that is at least 3 x 3.5 x 0.5 mm, a volume increase of 35x from the bare chip to the packaged chip.
  • This volume can be a key driver in systems such as phased arrays.
  • a 30GHz phased array with half wavelength element pitch provides a total area of 5 x 5mm for each element. While the third axis out of the 5 x 5mm plane is not confined, fitting all required parts into the element pitch is a key driver for being able to use a tile based approach in implementing the array.
  • the new approach detailed in the present disclosure solves both of these problems, while also providing improved input/output insertion loss and superior ability to stack packaged parts in the vertical axis.
  • the present invention may provide a packaging approach for enclosing an integrated circuit chip and/or other electronic/Poly Strata ® components inside of a package carrier formed by PolyStrata ® additive sequential layer build technology.
  • PolyStrata ® additive sequential layer build technology by Nuvotronics, Inc. may be found in U. S. Patent Nos. 7,012,489, 7,148,772, 7,405,638, 7,948,335, 7,649,432, 7,656,256, 8,031,037, 7,755,174, and
  • the PolyStrata ® build technology may be of interest in that it enables a chip to be protected per industry best practices, while also minimizing the size and overhead resulting from more traditional packaging of integrated circuit chips.
  • By directly packaging the chip in a PolyStrata ® fabricated carrier it is possible to create larger integrated modules or systems that contain one or more heterogeneous integrated circuits.
  • the approach detailed here offers physically small package overhead, exceptional performance up to millimeter wave frequencies, and tight coupling between integrated circuits and high- performance microwave/ millimeter wave passive circuits fabricated using PolyStrata ® sequential layer build technology.
  • the PolyStrata ® build technology also offers a higher level of performance for transmission lines, filters, couplers, and combiners than either ceramic or soft-board technologies.
  • the present invention may address several key challenges and provide a number of advantages.
  • the present invention may provide higher frequency RF performance, simplified packaging hermeticity, and improved packaging density, such as for wideband and/or millimeter wave phased arrays.
  • a 30Ghz phased array has an array pitch less than 5mm, which generally necessitates the use of a slat architecture due to the sizing required for the chip package.
  • API active PolyStrata ® module
  • devices and structures of the present invention may leverage a small scale packaging advantage of PolyStrata ® sequential layer build technology to create direct high frequency coupling between devices internal to the package with a standard JEDEC external packaging interconnection.
  • This enables high performance coupling to other types of host level packaging.
  • RF interconnects up to lOOGHz with very low insertion loss (less than O. ldB) and excellent match (RL better than 20dB) be designed for most standard interconnects.
  • Full or partial array interconnection which increases package density, shorter RF and DC paths, and higher frequency performance may be provided.
  • the present invention may provide a chip scale package, comprising a carrier composed of a plurality of sequential layers stacked together as a continuous stack to provide a monolithic carrier body.
  • the continuous stack may include metal.
  • the carrier may include at a selected surface thereof a passageway extending between the exterior and interior of the carrier.
  • the passageway may include a conductive stub extending therethrough, with the stub suspended in the passageway by a dielectric support.
  • the stub and support may cooperate to create a hermetic, or at least partially hermetic, seal at the passageway between the exterior and interior of the carrier.
  • the conductive stub may include a plurality of sequential layers stacked together as a continuous stack.
  • the dielectric support may include a first portion embedded in the conductive stub, and/or may include a second portion embedded in the carrier at the passageway.
  • the dielectric support may include an annular disk and have a shape such as a washer.
  • An electronic chip and/or die may be disposed in the carrier and be electrically connected to the stub.
  • the electronic chip and/or die may be electrically connected to the stub by a wirebond, a solder bump, conductive epoxy, or by other traditional electronic assembly means.
  • the chip scale package may include a coaxial connector mounted thereto, and the coaxial connector may include a center conductor electrically connected to the conductive stub and an outer conductor electrically connected to the carrier body.
  • the chip scale package may include a plurality of passageways extending between the exterior and interior of the carrier, the passageways each having a respective conductive stub extending therethrough, each stub suspended in the respective passageway by a dielectric support, each stub and respective support cooperating to create a hermetic seal at the respective passageway between the exterior and interior of the carrier.
  • Figure 1A schematically illustrates an isometric cut-away view of exemplary chip level packaging in accordance with the present invention
  • Figure 1B schematically illustrates a top of the package of Fig. 1A with the lid removed;
  • Figure 1C schematically illustrates a side elevational view of the package of Fig. 1A;
  • Figure 1D schematically illustrates an enlarged view of the center conductor aperture region of the package of Fig. 1A;
  • Figure 1E schematically illustrates an enlarged view of the center conductor via region similar to that of the package of Fig. 1 A but having multiple conductive stubs;
  • Figure 2 schematically illustrates a fragmentary side view of the lower portion of the package of Fig. 1A with an exemplary electrical connection (solder ball) of a chip to the package center conductor;
  • Figure 3 schematically illustrates a fragmentary side cross-sectional view of an exemplary device structure in accordance with the present invention showing multiple vias having dielectric collars to provide a hermetic seal;
  • Figure 4 illustrates the simulated insertion loss and return loss of from the package into the chip for a package as configured in Fig. 1;
  • Figure 5 schematically illustrates a side elevation cross-sectional view of the package of Fig. 2 showing transition from circular LAN pads.
  • Figures 1A - 1D schematically illustrate an exemplary integrated chip scale package 100 in accordance with the present invention having a carrier 110 with
  • the carrier 110 may include a plurality of layers of a material, such as a metal, which may be laid down as a plurality of sequentially deposited layers using PolyStrata ® sequential layer build technology.
  • the carrier may include one or more apertures 112 disposed at a selected surface thereof, the apertures 112 extending through a wall of the carrier to permit communication between, or pass power between, the interior and exterior of the carrier 110.
  • One or more conductive stubs 130 may be provided in each aperture 112 to permit electrical communication between the interior and exterior of the carrier 110 and package 100.
  • the conductive stubs 130 may be suspended within the apertures 112 by insulative dielectric materials 120 to prevent direct contact with, and prevent electrical communication between, the conductive stubs 130 and the carrier 110 in the region of the apertures 112.
  • a multiplicity of conductive stubs 230 may be suspended within the apertures of a carrier 210 by insulative dielectric materials 220, Fig. 3.
  • the conductive stubs 130 may include a plurality of sequentially deposited layers using PolyStrata ® sequential layer build technology.
  • the dielectric material 120 may also be provided as part of the PolyStrata ® sequential layer build process.
  • the dielectric material 120 may include a ceramic material such as alumina, or a glass such as Coming 7070 or 3D photo imaged glass.
  • the dielectric material 120 may be kept thin in a range from 50 to 75 micrometers in height.
  • the dielectric material 120 may be provided in the form of an annular disk, such as in the shape of a washer, where the outer periphery of the dielectric material 120 may be embedded in the carrier 110 and the inner portion of the dielectric material 120 may be embedded in the conductive stubs 130.
  • the dielectric materials 120 may be structured and positioned to provide a hermetic seal about the conductive stubs 130, in turn hermetically sealing the apertures 112.
  • a lid 160 to the carrier 110 With the addition of a lid 160 to the carrier 110, a hermetically sealed integrated chip scale package 100 may be provided.
  • the chip 140 may electrically communicate with the conductive stubs 130 via one or more wirebonds 152 which may be electrically connected to a microstrip line 150 of the chip 140, Fig. 1B.
  • wirebonds 152 may be particularly suitable for RF connections through the conductive stubs 130 and aperture 112.
  • RF connections may be designed in conjunction with the wire bonds 152 to provide a suitable match over frequencies from DC through at least 50GHz in the current design. Further optimization can enable a good match at frequencies up to at least lOOGHz.
  • the transition from the bottom of the conductive stub 130 into a microstrip 150 in the chip 140 can achieve an excellent match up to millimeter wave frequencies.
  • multiple conductive stubs 330 may be provided in a single aperture 312 to provide a higher density of conductive stubs, such as a pitch as low as 0. l5mm, Fig. 1E.
  • multiple conductive stubs 330 can be passed through a single dielectric layer 320.
  • the chip 140 may be adhered to the carrier 110 via a solder or epoxy 142, and the carrier 110 may serve as a ground, Fig. 1C.
  • the chip 140 may alternatively electrically communicate with the conductive stubs 130 via solder 143, such as by flip- chip mounting, Fig. 2.
  • the conductive stubs 130, 230 can directly transition into rectangular (or other shaped) coaxial transmission lines, and microwave circuits including couplers, combiners, and filters, fabricated by PolyStrata ® sequential layer build technology.
  • An example of this is provided in Fig. 5, where the carrier 110 of Fig. 1A is electrically connected to rectangular coaxial transmission lines 170, 172 via solder 145, rather than directly to the chip 140, to provide a package 500.
  • a region under the chip 140 may include circuits or lines, or can be solid copper to provide an efficient thermal path below the chip to a host interface.
  • the chip/carrier combination can be tested before the lid 160 is sealed allowing for rework if required.
  • This chip/carrier combination can include one or more chips 140.
  • the package 100 can be integrated with other components using several techniques. For instance, the package 100 can be directly connectorized using standard RF and DC connectors. These standard connectors can be edge launch or normal launch. However, more compacted methods for assembling multiple packages 100 together may include vertical and planar epoxy connections that can be made directly to printed circuit boards, to additional packages 100, or to other PolyStrata ® sequential layer build technology boards.

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  • Microelectronics & Electronic Packaging (AREA)
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Abstract

Chip scale package such as a chip scale package having a chip integrated therein to provide an integrated chip scale package.

Description

INTEGRATED CHIP SCALE PACKAGES
Related Applications
[0001] This application claims the benefit of priority of U.S. Application No. 15/829,288, filed on December 1, 2017, the entire contents of which application is incorporated herein by reference.
Field of the Invention
[0002] The present invention relates generally to a chip scale package and more particularly but not exclusively to a chip scale package having a chip integrated therein to provide an integrated chip scale package.
Background of the Invention
[0003] Current industry approaches to packaging integrated circuits have key deficiencies: first, the packaging approaches currently available are not able to produce passive circuits such as combiners or filters with performance suitable for modem communication systems; and second, these packaging processes result in significant size growth of the chips in all three dimensions. In a typical package, it is necessary for the package to have at least a lmm region around the chip in the planar dimensions. In addition, packages with a physical height less than 0.5mm are difficult to achieve, particularly for parts that require an air cavity above the chip. As a result a semiconductor chip that is lxl.5mm in the planar direction and 0. lmm thick will grow to a packaged part that is at least 3 x 3.5 x 0.5 mm, a volume increase of 35x from the bare chip to the packaged chip. This volume can be a key driver in systems such as phased arrays. For example, a 30GHz phased array with half wavelength element pitch provides a total area of 5 x 5mm for each element. While the third axis out of the 5 x 5mm plane is not confined, fitting all required parts into the element pitch is a key driver for being able to use a tile based approach in implementing the array. The new approach detailed in the present disclosure solves both of these problems, while also providing improved input/output insertion loss and superior ability to stack packaged parts in the vertical axis. G Summary of the Invention
[0004] In one of its aspects the present invention may provide a packaging approach for enclosing an integrated circuit chip and/or other electronic/Poly Strata® components inside of a package carrier formed by PolyStrata® additive sequential layer build technology. As used herein the examples of the PolyStrata® additive sequential layer build technology by Nuvotronics, Inc. may be found in U. S. Patent Nos. 7,012,489, 7,148,772, 7,405,638, 7,948,335, 7,649,432, 7,656,256, 8,031,037, 7,755,174, and
7,898,356, the contents of which patents are incorporated herein by reference. The PolyStrata® build technology may be of interest in that it enables a chip to be protected per industry best practices, while also minimizing the size and overhead resulting from more traditional packaging of integrated circuit chips. By directly packaging the chip in a PolyStrata® fabricated carrier, it is possible to create larger integrated modules or systems that contain one or more heterogeneous integrated circuits. The approach detailed here offers physically small package overhead, exceptional performance up to millimeter wave frequencies, and tight coupling between integrated circuits and high- performance microwave/ millimeter wave passive circuits fabricated using PolyStrata® sequential layer build technology. The PolyStrata® build technology also offers a higher level of performance for transmission lines, filters, couplers, and combiners than either ceramic or soft-board technologies.
[0005] In some of its aspects the present invention may address several key challenges and provide a number of advantages. For instance, the present invention may provide higher frequency RF performance, simplified packaging hermeticity, and improved packaging density, such as for wideband and/or millimeter wave phased arrays. For example, a 30Ghz phased array has an array pitch less than 5mm, which generally necessitates the use of a slat architecture due to the sizing required for the chip package. Further, when integrated into an active PolyStrata® module (APM), it is possible to connect parts together both vertically and horizontally. As a result, devices and structures of the present invention may leverage a small scale packaging advantage of PolyStrata® sequential layer build technology to create direct high frequency coupling between devices internal to the package with a standard JEDEC external packaging interconnection. This enables high performance coupling to other types of host level packaging. RF interconnects up to lOOGHz with very low insertion loss (less than O. ldB) and excellent match (RL better than 20dB) be designed for most standard interconnects. Full or partial array interconnection which increases package density, shorter RF and DC paths, and higher frequency performance may be provided.
[0006] Accordingly, in one of its aspects the present invention may provide a chip scale package, comprising a carrier composed of a plurality of sequential layers stacked together as a continuous stack to provide a monolithic carrier body. The continuous stack may include metal. The carrier may include at a selected surface thereof a passageway extending between the exterior and interior of the carrier. The passageway may include a conductive stub extending therethrough, with the stub suspended in the passageway by a dielectric support. The stub and support may cooperate to create a hermetic, or at least partially hermetic, seal at the passageway between the exterior and interior of the carrier. The conductive stub may include a plurality of sequential layers stacked together as a continuous stack. The dielectric support may include a first portion embedded in the conductive stub, and/or may include a second portion embedded in the carrier at the passageway. The dielectric support may include an annular disk and have a shape such as a washer. An electronic chip and/or die may be disposed in the carrier and be electrically connected to the stub. The electronic chip and/or die may be electrically connected to the stub by a wirebond, a solder bump, conductive epoxy, or by other traditional electronic assembly means.
[0007] In addition, the chip scale package may include a coaxial connector mounted thereto, and the coaxial connector may include a center conductor electrically connected to the conductive stub and an outer conductor electrically connected to the carrier body. The chip scale package may include a plurality of passageways extending between the exterior and interior of the carrier, the passageways each having a respective conductive stub extending therethrough, each stub suspended in the respective passageway by a dielectric support, each stub and respective support cooperating to create a hermetic seal at the respective passageway between the exterior and interior of the carrier. Brief Description of the Drawings
[0008] The foregoing summary and the following detailed description of exemplary embodiments of the present invention may be further understood when read in conjunction with the appended drawings, in which:
[0009] Figure 1A schematically illustrates an isometric cut-away view of exemplary chip level packaging in accordance with the present invention;
[0010] Figure 1B schematically illustrates a top of the package of Fig. 1A with the lid removed;
[0011] Figure 1C schematically illustrates a side elevational view of the package of Fig. 1A;
[0012] Figure 1D schematically illustrates an enlarged view of the center conductor aperture region of the package of Fig. 1A;
[0013] Figure 1E schematically illustrates an enlarged view of the center conductor via region similar to that of the package of Fig. 1 A but having multiple conductive stubs;
[0014] Figure 2 schematically illustrates a fragmentary side view of the lower portion of the package of Fig. 1A with an exemplary electrical connection (solder ball) of a chip to the package center conductor;
[0015] Figure 3 schematically illustrates a fragmentary side cross-sectional view of an exemplary device structure in accordance with the present invention showing multiple vias having dielectric collars to provide a hermetic seal;
[0016] Figure 4 illustrates the simulated insertion loss and return loss of from the package into the chip for a package as configured in Fig. 1; and
[0017] Figure 5 schematically illustrates a side elevation cross-sectional view of the package of Fig. 2 showing transition from circular LAN pads.
Detailed Description of the Invention
[0018] Referring now to the figures, wherein like elements are numbered alike throughout, Figures 1A - 1D schematically illustrate an exemplary integrated chip scale package 100 in accordance with the present invention having a carrier 110 with
AT a chip 140 integrally mounted therein with the carrier 110 sealed by a lid 160. The carrier 110 may include a plurality of layers of a material, such as a metal, which may be laid down as a plurality of sequentially deposited layers using PolyStrata® sequential layer build technology. The carrier may include one or more apertures 112 disposed at a selected surface thereof, the apertures 112 extending through a wall of the carrier to permit communication between, or pass power between, the interior and exterior of the carrier 110. One or more conductive stubs 130 may be provided in each aperture 112 to permit electrical communication between the interior and exterior of the carrier 110 and package 100. The conductive stubs 130 may be suspended within the apertures 112 by insulative dielectric materials 120 to prevent direct contact with, and prevent electrical communication between, the conductive stubs 130 and the carrier 110 in the region of the apertures 112. (A multiplicity of conductive stubs 230 may be suspended within the apertures of a carrier 210 by insulative dielectric materials 220, Fig. 3.) The conductive stubs 130 may include a plurality of sequentially deposited layers using PolyStrata® sequential layer build technology. The dielectric material 120 may also be provided as part of the PolyStrata® sequential layer build process. The dielectric material 120 may include a ceramic material such as alumina, or a glass such as Coming 7070 or 3D photo imaged glass. The dielectric material 120 may be kept thin in a range from 50 to 75 micrometers in height.
[0019] The dielectric material 120 may be provided in the form of an annular disk, such as in the shape of a washer, where the outer periphery of the dielectric material 120 may be embedded in the carrier 110 and the inner portion of the dielectric material 120 may be embedded in the conductive stubs 130. Thus, the dielectric materials 120 may be structured and positioned to provide a hermetic seal about the conductive stubs 130, in turn hermetically sealing the apertures 112. With the addition of a lid 160 to the carrier 110, a hermetically sealed integrated chip scale package 100 may be provided.
[0020] The chip 140 may electrically communicate with the conductive stubs 130 via one or more wirebonds 152 which may be electrically connected to a microstrip line 150 of the chip 140, Fig. 1B. Such a configuration may be particularly suitable for RF connections through the conductive stubs 130 and aperture 112. RF connections may be designed in conjunction with the wire bonds 152 to provide a suitable match over frequencies from DC through at least 50GHz in the current design. Further optimization can enable a good match at frequencies up to at least lOOGHz. The transition from the bottom of the conductive stub 130 into a microstrip 150 in the chip 140 can achieve an excellent match up to millimeter wave frequencies. In the preliminary design, simulations show a match better than 22dB up to 40GHz and better than 12.5 dB up to 50GHz. Further tuning can enable a match better than l5dB up to lOOGHz. For DC applications, multiple conductive stubs 330 may be provided in a single aperture 312 to provide a higher density of conductive stubs, such as a pitch as low as 0. l5mm, Fig. 1E. For the DC aperture 312 multiple conductive stubs 330 can be passed through a single dielectric layer 320.
[0021] The chip 140 may be adhered to the carrier 110 via a solder or epoxy 142, and the carrier 110 may serve as a ground, Fig. 1C. The chip 140 may alternatively electrically communicate with the conductive stubs 130 via solder 143, such as by flip- chip mounting, Fig. 2.
[0022] One advantage to the approach of the present invention is that the conductive stubs 130, 230 can directly transition into rectangular (or other shaped) coaxial transmission lines, and microwave circuits including couplers, combiners, and filters, fabricated by PolyStrata® sequential layer build technology. An example of this is provided in Fig. 5, where the carrier 110 of Fig. 1A is electrically connected to rectangular coaxial transmission lines 170, 172 via solder 145, rather than directly to the chip 140, to provide a package 500. For instance, a region under the chip 140 may include circuits or lines, or can be solid copper to provide an efficient thermal path below the chip to a host interface. Once the chip 140 is integrated into the PolyStrata® sequential layer build technology carrier 110, the chip/carrier combination can be tested before the lid 160 is sealed allowing for rework if required. This chip/carrier combination can include one or more chips 140.
[0023] Once the package 100 has been fabricated and tested, it can be integrated with other components using several techniques. For instance, the package 100 can be directly connectorized using standard RF and DC connectors. These standard connectors can be edge launch or normal launch. However, more compacted methods for assembling multiple packages 100 together may include vertical and planar epoxy connections that can be made directly to printed circuit boards, to additional packages 100, or to other PolyStrata® sequential layer build technology boards.
[0024] These and other advantages of the present invention will be apparent to those skilled in the art from the foregoing specification. Accordingly, it will be recognized by those skilled in the art that changes or modifications may be made to the above- described embodiments without departing from the broad inventive concepts of the invention. It should therefore be understood that this invention is not limited to the particular embodiments described herein, but is intended to include all changes and modifications that are within the scope and spirit of the invention as set forth in the claims.
"T

Claims

Claims What is claimed is:
1. A chip scale package, comprising a carrier composed of a plurality of sequential layers stacked together as a continuous stack to provide a monolithic carrier body, the carrier comprising at a selected surface thereof at least one passageway extending between the exterior and interior of the carrier, the passageway having a conductive stub extending therethrough, the stub suspended in the at least one passageway by a dielectric support, the stub and support cooperating to create an at least partially hermetic seal at the at least one passageway between the exterior and interior of the carrier.
2. The chip scale package according to any one of the preceding claims, wherein the conductive stub comprises a plurality of sequential layers stacked together as a continuous stack.
3. The chip scale package according to any one of the preceding claims, wherein the dielectric support comprises a first portion embedded in the conductive stub.
4. The chip scale package according to any one of the preceding claims, wherein the dielectric support comprises a second portion embedded in the carrier at the at least one passageway.
5. The chip scale package according to any one of the preceding claims, wherein the dielectric support comprises an annular disk.
6. The chip scale package according to any one of the preceding claims, comprising an electronic chip disposed therein electrically connected to the stub.
7. The chip scale package according to any one of the preceding claims, comprising a chip disposed therein electrically connected to the stub.
8. The chip scale package according to any one of the preceding claims, comprising an electronic chip disposed therein electrically connected to the stub by a wirebond.
9. The chip scale package according to any one of the preceding claims, comprising an electronic chip disposed therein electrically connected to the stub by a solder bump.
10. The chip scale package according to any one of the preceding claims, comprising a coaxial connector mounted thereto, the coaxial connector comprising a center conductor electrically connected to the conductive stub and comprising an outer conductor electrically connected to the carrier body to provide a coaxial-to- coaxial connection.
11. The chip scale package according to any one of the preceding claims, wherein the continuous stack comprises metal.
12. The chip scale package according to any one of the preceding claims, comprising a lid hermetically sealed thereto to hermetically seal the chip in the carrier.
13. The chip scale package according to any one of the preceding claims, wherein the at least one passageway comprises a plurality of passageways extending between the exterior and interior of the carrier, each one of the plurality of passageways having a respective conductive stub extending therethrough, each stub suspended in the respective passageway by a dielectric support, each stub and respective support cooperating to create a hermetic seal at the respective passageway between the exterior and interior of the carrier.
14. The chip scale package according to any one of the preceding claims, wherein the at least one passageway comprises a plurality of conductive stubs disposed therein, each stub hermetically sealed in the at least one passageway.
15. A method of forming a chip scale package component, comprising:
depositing a plurality of layers, wherein the layers comprise one or more of a conductive material and a dielectric material, thereby forming a structure comprising:
a carrier composed of a plurality of sequential layers of the conductive
material stacked together as a continuous stack to provide a monolithic conductive carrier body, the carrier comprising at a selected surface thereof at least one passageway extending between the exterior and interior of the carrier, the at least one passageway having a conductive stub extending therethrough, the stub suspended in the at least one passageway by a dielectric support, the stub and support cooperating to create a hermetic or partially hermetic seal at the at least one passageway between the exterior and interior of the carrier.
16. The method according to claim 15, comprising electrically connecting an
electronic chip to the stub within the interior of the carrier.
17. The method according to claim 16, wherein the electronic chip is electrically connected to the stub by a wirebond.
18. The method according to claim 16, wherein the electronic chip is electrically connected to the stub by a solder bump.
19. The method according to any one of claims 16-18, comprising hermetically sealing a lid onto the carrier to hermetically seal the chip in the carrier.
20. The method according to any one of claims 15-19, wherein the dielectric support comprises a first portion embedded in the conductive stub.
21. The method according to any one of claims 15-20, wherein the dielectric support comprises a second portion embedded in the carrier at the at least one passageway.
22. The method according to any one of claims 15-21, wherein the dielectric support comprises an annular disk.
23. The method according to any one of claims 15-22, comprising mounting a
coaxial connector to the carrier, the coaxial connector comprising a center conductor electrically connected to the conductive stub and comprising an outer conductor electrically connected to the carrier body to provide a coaxial-to- coaxial connection.
24. The method according to any one of claims 15-23, wherein the continuous stack comprises metal.
25. The method according to any one of claims 15-24, wherein the at least one
passageway comprises a plurality of passageways extending between the exterior and interior of the carrier, each one of the plurality of passageways having a respective conductive stub extending therethrough, each stub suspended in the respective passageway by a dielectric support, each stub and respective support cooperating to create a hermetic seal at the respective passageway between the exterior and interior of the carrier. 1(G
26. The method according to any one of claims 15-25, wherein the at least one passageway comprises a plurality of conductive stubs disposed therein, each stub hermetically sealed in the passageway.
27. The method according to any one of claims 15-26, wherein the conductive stub comprises a plurality of sequential layers stacked together as a continuous stack.
nr
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US20190172764A1 (en) 2019-06-06
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US10319654B1 (en) 2019-06-11

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