JPH027587A - Variable frequency light source - Google Patents
Variable frequency light sourceInfo
- Publication number
- JPH027587A JPH027587A JP15887988A JP15887988A JPH027587A JP H027587 A JPH027587 A JP H027587A JP 15887988 A JP15887988 A JP 15887988A JP 15887988 A JP15887988 A JP 15887988A JP H027587 A JPH027587 A JP H027587A
- Authority
- JP
- Japan
- Prior art keywords
- frequency
- semiconductor laser
- fabry
- output
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims abstract description 34
- 230000010355 oscillation Effects 0.000 claims abstract description 25
- 230000003595 spectral effect Effects 0.000 claims description 5
- 230000001360 synchronised effect Effects 0.000 abstract description 13
- 230000005540 biological transmission Effects 0.000 abstract description 11
- 230000003287 optical effect Effects 0.000 abstract description 7
- 238000002347 injection Methods 0.000 abstract description 4
- 239000007924 injection Substances 0.000 abstract description 4
- 239000000969 carrier Substances 0.000 abstract 1
- 238000001514 detection method Methods 0.000 abstract 1
- 238000010521 absorption reaction Methods 0.000 description 13
- 238000010586 diagram Methods 0.000 description 6
- 230000007774 longterm Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000003321 amplification Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000003199 nucleic acid amplification method Methods 0.000 description 2
- 244000205754 Colocasia esculenta Species 0.000 description 1
- 235000006481 Colocasia esculenta Nutrition 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000010408 sweeping Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/06—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium
- H01S5/062—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium by varying the potential of the electrodes
- H01S5/06209—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium by varying the potential of the electrodes in single-section lasers
- H01S5/0622—Controlling the frequency of the radiation
Landscapes
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Optics & Photonics (AREA)
- Semiconductor Lasers (AREA)
Abstract
Description
【発明の詳細な説明】
イ、「発明の目的」
〔産業上の利用分野〕
本発明は、半導体レーザの発振周波数を変えることがで
きる可変周波数レーザ光源の改良に関するものである。DETAILED DESCRIPTION OF THE INVENTION A. Object of the Invention [Field of Industrial Application] The present invention relates to an improvement of a variable frequency laser light source that can change the oscillation frequency of a semiconductor laser.
第4図は可変周波数光源の第1の従来例を示す原理図で
ある。光増幅部41の出力光は集光レンズ42を介して
回折格子43に入射し、1次回折光45が光増幅部41
に戻る。44はO次回折光である0回折格子43を回転
すると光増幅部41へ戻る1次回折光の波長が変化する
ので、発振波長を制御することができる。FIG. 4 is a principle diagram showing a first conventional example of a variable frequency light source. The output light of the optical amplifying section 41 enters the diffraction grating 43 via the condensing lens 42, and the first-order diffracted light 45 enters the optical amplifying section 41.
Return to When the zero diffraction grating 44, which is the O-order diffraction light, is rotated, the wavelength of the first-order diffraction light returning to the optical amplification section 41 changes, so that the oscillation wavelength can be controlled.
第5図は可変周波数光源の第2の従来例を示す原理図で
ある。光増幅部51の出力光に対して、第4図のように
回折格子を回転する代りに、音響光学素子52で回折格
子53への入射角を変化させて発振波長を制御する。FIG. 5 is a principle diagram showing a second conventional example of a variable frequency light source. Instead of rotating the diffraction grating as shown in FIG. 4, the oscillation wavelength of the output light from the optical amplifying section 51 is controlled by changing the incident angle to the diffraction grating 53 using the acousto-optic element 52.
しかしながら、上記のような構成の可変波長レーザ光源
には次のような問題点がある。すなわち、第4図の方式
では回折格子を機械的に動かすので、高精度化が国数で
、応答が悪く、経時変化に弱い。However, the variable wavelength laser light source configured as described above has the following problems. That is, in the method shown in FIG. 4, the diffraction grating is moved mechanically, so high precision is required, the response is poor, and it is susceptible to changes over time.
また、第5図の方式は光増幅部に戻ってくる光の波長が
ドツプラシフトによりわずかにずれるため、安定な発振
が得られず、発振スペクトル幅が広くなってしまう、ま
た、上記のいずれの方式も周波数の絶対値が分らないの
で、校正が必要である。In addition, in the method shown in Figure 5, the wavelength of the light returning to the optical amplification section is slightly shifted due to Doppler shift, so stable oscillation cannot be obtained and the oscillation spectrum width becomes wide. Since the absolute value of the frequency is not known, calibration is necessary.
本発明は上記の間趙を解決するためになされたもので、
周波数精度が良く、長期安定性に優れた可変周波数光源
を簡単な構成で実現することを目的とする。The present invention was made to solve the above-mentioned problems,
The purpose of this invention is to realize a variable frequency light source with good frequency accuracy and excellent long-term stability with a simple configuration.
口、「発明の構成」
〔問題点そ解決するための手段〕
本発明に係る可変周波数光源は半導体レーザと、出力周
波数が高安定な発振器と、前記半導体レーザの出力光の
一部が入射し前記発振器の出力によりその透過光の周波
数が変調される位相変調器と、この位相変調器の出力光
が入射するフアブリ・ペロー干渉計と、このフアブリ・
ペロー干渉計の透過光を入射してその強度を電気信号に
変換する光検出器と、フアブリ・ペロー干渉計の透過周
波数を前記半導体レーザの発振周波数に制御する第1の
制御手段と、フアブリ・ペロー干渉計の自由スペクトル
領域を前記発振器の出力周波数に制御する第2の制御手
段とを備え、発振器の周波数を変えることによって半導
体レーザの発振周波数を変えるように構成したことを特
徴とする。``Structure of the Invention'' [Means for Solving Problems] A variable frequency light source according to the present invention includes a semiconductor laser, an oscillator with a highly stable output frequency, and a part of the output light of the semiconductor laser incident on the variable frequency light source. a phase modulator whose frequency of transmitted light is modulated by the output of the oscillator; a Fabry-Perot interferometer into which the output light of the phase modulator is incident;
a photodetector that receives the transmitted light of the Perot interferometer and converts its intensity into an electrical signal; a first control means that controls the transmission frequency of the Fabry-Perot interferometer to the oscillation frequency of the semiconductor laser; and a second control means for controlling the free spectral region of the Perot interferometer to the output frequency of the oscillator, and the oscillation frequency of the semiconductor laser is changed by changing the frequency of the oscillator.
第1の制御手段によりフアブリ・ペロー干渉計の透過周
波数は半導体レーザの発振周波数に追従し、発振器の出
力周波数を変えると、第2の制御手段によりフアブリ・
ペロー干渉計の自由スペクトル領域がこれに追従するよ
うに半導体レーザの発振周波数が変化する。The first control means causes the transmission frequency of the Fabry-Perot interferometer to follow the oscillation frequency of the semiconductor laser, and when the output frequency of the oscillator is changed, the second control means causes the Fabry-Perot interferometer to follow the oscillation frequency of the semiconductor laser.
The oscillation frequency of the semiconductor laser changes so that the free spectral range of the Perot interferometer follows this.
以下、図面を用いて本発明の詳細な説明する。 Hereinafter, the present invention will be explained in detail using the drawings.
第1図は本発明に係る可変周波数光源の一実施例を示す
構成ブロック図である。1は半導体レーザ、2,3は半
導体レーザ1からの出射光を2方向に分離するビームス
プリッタ、4はビームス1リツタ3の透過光を位相変調
するLiNb0゜(ニオブ酸リチウム)等の電気光学結
晶からなる位相変調器、5は位相変調器4を変調周波数
f。FIG. 1 is a block diagram showing an embodiment of a variable frequency light source according to the present invention. 1 is a semiconductor laser, 2 and 3 are beam splitters that separate the light emitted from the semiconductor laser 1 into two directions, and 4 is an electro-optic crystal such as LiNb0° (lithium niobate) that modulates the phase of the transmitted light from the beam 1 ritter 3. A phase modulator, 5, modulates the phase modulator 4 with a modulating frequency f.
で励振する高安定発振器、6は位相変調器4の出力光を
入射するフアブリ・ペロー干渉器、7はフアブリ・ペロ
ー干渉器6のミラー間隔を微小に、例えば波長オーダー
で変化させるためにミラーの一方に取付けられたPZT
等の圧電アクチュエータ、8はフアブリ・ペロー干渉器
6を格納する真空チャンバ、9はフアブリ・ペロー干渉
器6を透過する光の強度を検出して電気信号に変換する
フォトダイオード等の受光素子−10は受光素子9の出
力を入力しフアブリ・ペロー干渉計6の透過周波数を半
導体レーザ1の発振周波数に制御する第1の制御手段で
ある。第1の制御手段10において、101は受光素子
9の出力を入力する同期整流回路、102は同期整流回
路101の出力を入力する制御部である。11は制御部
102の出力を一方の入力とする加算器、12はその出
力が同期整流回路101および加算器11の他方の入力
となる第2の発振器、13は受光素子9の出力を入力し
フアブリ・ペロー干渉計6の自由スペクトル領域を発振
器5の出力周波数に制御する第2の制御手段である。第
2の制御手段13は受光素子9の出力を一方の入力とし
発振器5の出力を他方の入力とする同期整流口1131
と、同期整流回路131の出力を入力する制御部132
から構成される。14は制御部132の出力を一端に入
力しその出力が半導体レーザ1の注入電流となる切換ス
イッチである。15はビームスプリッタ2の反射光を入
力して半導体レーザ1の発振周波数を基準周波数に制御
する第3の制御手段で、151はビームスプリッタ2の
反射光を入射して周波数変調する音響光学変調器、15
2は音響光学変調器151の出力光を入射し特定の波長
の光を吸収するRb、NHz等の標準物質を封入した吸
収セル、153は吸収セル152の透過光を検出して電
気信号に変換する受光素子、154は受光素子153の
出力を入力する同期整流回路、155は周波数で3 (
例えば80MHz)の第3の発振器、156は発振器1
55の出力を入力し音響光学変調器151に出力するス
イッチ、157はその一方の出力がこのスイッチ156
をオンオフ駆動し他方の出力が同期整流回路154の参
照信号となる周波数14の第4の発振器、158は同期
整流回路154の出力を入力しその出力が切換スイッチ
14の他方の入力@aに接続する制御部である6本装置
の出力光はビームスプリッタ3の反射光として外部に取
出される。6 is a Fabry-Perot interferometer into which the output light of the phase modulator 4 is input; 7 is a Fabry-Perot interferometer in which the mirror spacing of the Fabry-Perot interferometer 6 is minutely changed, for example, on the wavelength order. PZT mounted on one side
8 is a vacuum chamber that stores the Fabry-Perot interferometer 6, and 9 is a light receiving element 10 such as a photodiode that detects the intensity of light passing through the Fabry-Perot interferometer 6 and converts it into an electric signal. is a first control means which inputs the output of the light receiving element 9 and controls the transmission frequency of the Fabry-Perot interferometer 6 to the oscillation frequency of the semiconductor laser 1. In the first control means 10, 101 is a synchronous rectifier circuit that inputs the output of the light receiving element 9, and 102 is a control section that inputs the output of the synchronous rectifier circuit 101. 11 is an adder which receives the output of the control unit 102 as one input; 12 is a second oscillator whose output is the other input of the synchronous rectifier circuit 101 and the adder 11; and 13 receives the output of the light receiving element 9. This is second control means for controlling the free spectral range of the Fabry-Perot interferometer 6 to the output frequency of the oscillator 5. The second control means 13 has a synchronous rectifier port 1131 which has the output of the light receiving element 9 as one input and the output of the oscillator 5 as the other input.
and a control unit 132 that inputs the output of the synchronous rectification circuit 131.
It consists of Reference numeral 14 denotes a changeover switch which inputs the output of the control section 132 at one end and whose output becomes the injection current of the semiconductor laser 1. 15 is a third control means that inputs the reflected light from the beam splitter 2 and controls the oscillation frequency of the semiconductor laser 1 to the reference frequency; 151 is an acousto-optic modulator that inputs the reflected light from the beam splitter 2 and modulates the frequency. , 15
2 is an absorption cell in which the output light of the acousto-optic modulator 151 is input and standard substances such as Rb and NHZ are sealed to absorb light of a specific wavelength; 153 is an absorption cell that detects the transmitted light of the absorption cell 152 and converts it into an electrical signal. 154 is a synchronous rectifier circuit that inputs the output of the light receiving element 153, and 155 is a frequency of 3 (
a third oscillator (e.g. 80MHz), 156 is oscillator 1
A switch 157 inputs the output of 55 and outputs it to the acousto-optic modulator 151, and 157 has one output connected to this switch 156.
A fourth oscillator with a frequency of 14, whose output is turned on and off and whose other output serves as a reference signal for the synchronous rectifier circuit 154; 158 inputs the output of the synchronous rectifier circuit 154, and its output is connected to the other input @a of the changeover switch 14; The output light from the six-piece device, which is a control section, is extracted to the outside as reflected light from the beam splitter 3.
上記のような構成の可変周波数光源の動作を次に説明す
る。The operation of the variable frequency light source configured as described above will be explained next.
(イ)まずスイッチ14をa側にして半導体レーザ1の
発振周波数fOを吸収セル152の吸収線周波数に制御
する。すなわち半導体レーザの出力光の一部はビームス
プリッタ2で反射され、音響光学変調器151に入射す
る。スイッチ156がオンの時音皆光学変調器151は
発振器155の周波数で、の出力で駆動されるので、入
射光の大部分は回折して周波数シフトを受け、1次回折
光として周波数fo 十f3の光が吸収セル152に入
射する。スイッチ156がオフのときは入射光はすべて
0次光として周波数f、で吸収セル152に入射する。(a) First, the switch 14 is set to the a side to control the oscillation frequency fO of the semiconductor laser 1 to the absorption line frequency of the absorption cell 152. That is, a part of the output light of the semiconductor laser is reflected by the beam splitter 2 and enters the acousto-optic modulator 151. When the switch 156 is on, the optical modulator 151 is driven by the output of the oscillator 155 at the frequency of Light enters absorption cell 152. When the switch 156 is off, all incident light enters the absorption cell 152 as zero-order light at a frequency f.
スイッチ156は発振器157の周波数f4のタロツク
で駆動されるので、吸収セル152に入射する光は変調
周波数fd+変調深さf、の周波数変調を受けることに
なる。音響光学変調器151からの周波数変調を受けた
光は吸収セル152の吸収信号の箇所で透過光量が変調
を受けて出力に信号があられれる。この信号を光検出器
153で電気信号に変換し同期整流回路154で周波数
で4で同期整流することにより2次微分信号が得られ、
この信号が所定の値となるよう制御部158により半導
体レーザ1の注入電流を制御して、発振周波数foを吸
収波長の中心faに制御することができる。この結果半
導体レーザ1からは発振周波数が変調されていない、瞬
時的に安定な出力光が得られる。また音響光学変調器1
51で回折した1次光と0次光は共に1つの受光素子1
53に入射するので、半導体レーザ1の光量の変動の影
響を受けない。Since the switch 156 is driven by the taro clock of the frequency f4 of the oscillator 157, the light incident on the absorption cell 152 is subjected to frequency modulation of modulation frequency fd+modulation depth f. The frequency-modulated light from the acousto-optic modulator 151 is modulated in the amount of transmitted light at the absorption signal location of the absorption cell 152, and a signal is output. This signal is converted into an electrical signal by a photodetector 153 and synchronously rectified at a frequency of 4 by a synchronous rectifier circuit 154, thereby obtaining a second-order differential signal.
The control unit 158 controls the injection current of the semiconductor laser 1 so that this signal has a predetermined value, and the oscillation frequency fo can be controlled to the center fa of the absorption wavelength. As a result, an instantaneously stable output light whose oscillation frequency is not modulated can be obtained from the semiconductor laser 1. Also, the acousto-optic modulator 1
Both the first-order light and the zero-order light diffracted by the light receiving element 1
53, it is not affected by fluctuations in the amount of light from the semiconductor laser 1.
(ロ)次にフアブリ・ペロー干渉計6の透過周波数をレ
ーザ周波数f、ヘロックする。このとき位相変調器は動
作させず、半導体レーザ1の出力光はそのままフアブリ
・ペロー干渉計6に入射し、周波数で2で変調されて受
光素子9で検出される。(b) Next, the transmission frequency of the Fabry-Perot interferometer 6 is locked to the laser frequency f. At this time, the phase modulator is not operated, and the output light from the semiconductor laser 1 enters the Fabry-Perot interferometer 6 as it is, is modulated at a frequency of 2, and is detected by the light receiving element 9.
受光素子9の出力は同期整流回路101により参照周波
数f2で同期整流され、制御部102を介して圧電アク
チュエータフの印加電圧として帰還され、フアブリ・ペ
ロー干渉計6の透過周波数のピークをレーザ発振周波数
faに制御する。The output of the light receiving element 9 is synchronously rectified by a synchronous rectifier circuit 101 at a reference frequency f2, and is fed back as an applied voltage to the piezoelectric actuator via a control unit 102, and the peak of the transmission frequency of the Fabry-Perot interferometer 6 is set to the laser oscillation frequency. control to fa.
(ハ)次にフアブリ・ペロー干渉計6のFSR(Fre
e 5pectral Ranoe:自由スペクトル領
域)を位相変調周波数f、にロックする。まず発振器5
の出力をオンとして位相変調器4を動作させ、第2図(
B)に示ずようにレーザ光21の周波数faを中心にサ
ブキャリア22.23を発生させる。(c) Next, the FSR (Fre) of the Fabry-Perot interferometer 6
e 5spectral Ranoe (free spectral region) to the phase modulation frequency f. First, oscillator 5
The phase modulator 4 is operated by turning on the output of
As shown in B), subcarriers 22 and 23 are generated around the frequency fa of the laser beam 21.
変調周波数で1を掃引してサブキャリア22.23を周
波数軸上で左右に動かし、第2図(A)に示すフアブリ
・ペロー干渉計6の透過特性のピークの1つの周波数と
P点において一致したときにスイッチ14をa側からb
lllへ切換える。このときの変調周波数f1の値をf
lLとする。この切換の結果、レーザ発振周波数を吸収
周波数にロックするループが切離され、フアブリ・ペロ
ー干渉計6のFSRを変調周波数f1にロックするルー
プが新たに形成される。すなわち、受光素子9の出力を
同期整流回路131において周波数で1の信号で同期検
波した出力はFMサブキャリア22゜23とフアブリ・
ペロー干渉計6の透過ピークとの周波数ずれに比例する
ので、周波数ずれが存在するとこれがゼロになるように
制御部132で半導体レーザ1の注入電流を制御し、半
導体レーザ1の周波数を変化させ、第1の制御手段10
によりフアブリ・ペロー干渉計6の透過ピークがこれに
追従し、結果的にFSRが変調周波数f、に一致するこ
とになる。By sweeping 1 at the modulation frequency and moving the subcarriers 22 and 23 left and right on the frequency axis, point P coincides with one frequency of the peak of the transmission characteristic of the Fabry-Perot interferometer 6 shown in Figure 2 (A). when the switch 14 is turned from side a to side b
Switch to lll. The value of modulation frequency f1 at this time is f
Let it be LL. As a result of this switching, the loop that locks the laser oscillation frequency to the absorption frequency is separated, and a new loop that locks the FSR of the Fabry-Perot interferometer 6 to the modulation frequency f1 is formed. In other words, the output of the light receiving element 9 is synchronously detected using a signal with a frequency of 1 in the synchronous rectifier circuit 131, and the output is output from the FM subcarrier 22°23 and the Fabry subcarrier 22°23.
Since it is proportional to the frequency deviation from the transmission peak of the Perot interferometer 6, if there is a frequency deviation, the control unit 132 controls the injection current of the semiconductor laser 1 so that this becomes zero, and changes the frequency of the semiconductor laser 1. First control means 10
Therefore, the transmission peak of the Fabry-Perot interferometer 6 follows this, and as a result, the FSR coincides with the modulation frequency f.
上記の操作において、フアブリ・ペロー干渉計6のモー
ド数mは
m = f a / f + L −(1
)で算出されるので、レーザ発振周波数f、はf□=m
−f。In the above operation, the number of modes m of the Fabry-Perot interferometer 6 is m = fa / f + L - (1
), so the laser oscillation frequency f is f□=m
-f.
=fa −fl /f1 L = (2)と
なり、flを変えることにより出力周波数fOを連続的
に変化することができる。ここで、圧電アクチュエータ
7がミラーを2μmまで掃引できるとすると、Δfo
=2.6GHz (波長λ=1゜557zm、fFSR
=IGH2)となるので、Δfを2.6GHz以上とる
場合にはモード数mをm+l、m+2とステップ的に変
えればよい。=fa − fl /f1 L = (2), and by changing fl, the output frequency fO can be changed continuously. Here, assuming that the piezoelectric actuator 7 can sweep the mirror up to 2 μm, Δfo
=2.6GHz (wavelength λ=1°557zm, fFSR
= IGH2), so if Δf is set to 2.6 GHz or more, the number of modes m may be changed stepwise from m+l to m+2.
このような構成の可変周波数光源によれば、第1の発振
器5の周波数f1が高安定なので、(2)式から明らか
なように一周波数精度が良く、長期安定性に優れた可変
周波数レーザが実現できる。According to the variable frequency light source with such a configuration, the frequency f1 of the first oscillator 5 is highly stable, so as is clear from equation (2), a variable frequency laser with good single frequency accuracy and excellent long-term stability can be obtained. realizable.
また(2)式から明らかなように、変調周波数f1を変
化させることにより、出力周波数f、をアナログ的に変
化することができる。Furthermore, as is clear from equation (2), by changing the modulation frequency f1, the output frequency f can be changed in an analog manner.
半導体レーザを1つしか用いないので、小形化が出来る
。Since only one semiconductor laser is used, miniaturization is possible.
吸収セルに封入する物質を選択することにより、種々な
波長帯での可変周波数光源を実現することができる。By selecting the material to be filled in the absorption cell, it is possible to realize a variable frequency light source in various wavelength bands.
なお上記の実施例において、変調周波数f、を高安定化
するために、外部からCsビーム等の発振器の出力を基
準としてもよい。In the above embodiment, in order to highly stabilize the modulation frequency f, the output of an oscillator such as an external Cs beam may be used as a reference.
また半導体レーザの注入電流に帰還するかわりに、温度
に帰還をかけてもよい。Moreover, instead of feedback to the current injected into the semiconductor laser, feedback may be applied to the temperature.
また半導体レーザの発振周波数の安定化は制御手段15
の方式に限らない。Further, the control means 15 stabilizes the oscillation frequency of the semiconductor laser.
It is not limited to this method.
またフアブリ・ペロー干渉計6のFSRを変調周波数f
1にロックする代りに、第3図に示すように、n−FS
R=f、としてFSRの整数倍のf、でサブキャリア3
2.33にロックしてもよい。In addition, the FSR of the Fabry-Perot interferometer 6 is determined by the modulation frequency f
Instead of locking to 1, as shown in Figure 3, n-FS
R = f, and subcarrier 3 with f, which is an integer multiple of FSR.
It may be locked to 2.33.
ハ、「発明の効果」
以、Eの説明から明らかなように、本願発明によれば、
周波数精度が良く、長期安定性に優れl:可変周波数光
源を簡単な構成で実現することができる。C. "Effects of the Invention" As is clear from the explanation in E, according to the claimed invention,
Good frequency accuracy and excellent long-term stability: A variable frequency light source can be realized with a simple configuration.
第1図は本発明に係る可変周波数光源の一実施例を示す
構成ブロック図、第2図は第1図の動作を説明するため
の図、第3図は第1図装置の変形例の動作を示す図、第
4図および第5図は可変周波数光源の従来例を示す説明
図である。
1・・・半導体レーザ、4・・・位相変調器、5・・・
発振器、6・・・ファブリ・ペロー干渉計、9・・・光
検出器、第4 因
→;ジ5図FIG. 1 is a block diagram showing an embodiment of a variable frequency light source according to the present invention, FIG. 2 is a diagram for explaining the operation of FIG. 1, and FIG. 3 is an operation of a modification of the device shown in FIG. 1. FIGS. 4 and 5 are explanatory diagrams showing conventional examples of variable frequency light sources. 1... Semiconductor laser, 4... Phase modulator, 5...
Oscillator, 6... Fabry-Perot interferometer, 9... Photodetector, 4th factor → ; Figure 5
Claims (1)
半導体レーザの出力光の一部が入射し前記発振器の出力
によりその透過光の周波数が変調される位相変調器と、
この位相変調器の出力光が入射するフアブリ・ペロー干
渉計と、このフアブリ・ペロー干渉計の透過光を入射し
てその強度を電気信号に変換する光検出器と、ファブリ
・ペロー干渉計の透過周波数を前記半導体レーザの発振
周波数に制御する第1の制御手段と、フアブリ・ペロー
干渉計の自由スペクトル領域を前記発振器の出力周波数
に制御する第2の制御手段とを備え、発振器の周波数を
変えることによって半導体レーザの発振周波数を変える
ように構成したことを特徴とする可変周波数光源。a semiconductor laser, an oscillator with a highly stable output frequency, and a phase modulator into which a portion of the output light of the semiconductor laser enters and the frequency of the transmitted light is modulated by the output of the oscillator;
A Fabry-Perot interferometer into which the output light of this phase modulator enters, a photodetector which receives the transmitted light of this Fabry-Perot interferometer and converts its intensity into an electrical signal, and a transmitted light of the Fabry-Perot interferometer. A first control means for controlling the frequency to the oscillation frequency of the semiconductor laser, and a second control means for controlling the free spectral region of the Fabry-Perot interferometer to the output frequency of the oscillator, and changing the frequency of the oscillator. A variable frequency light source characterized by being configured to change the oscillation frequency of a semiconductor laser by changing the oscillation frequency of a semiconductor laser.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15887988A JPH027587A (en) | 1988-06-27 | 1988-06-27 | Variable frequency light source |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15887988A JPH027587A (en) | 1988-06-27 | 1988-06-27 | Variable frequency light source |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH027587A true JPH027587A (en) | 1990-01-11 |
Family
ID=15681389
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15887988A Pending JPH027587A (en) | 1988-06-27 | 1988-06-27 | Variable frequency light source |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH027587A (en) |
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JPH0513077U (en) * | 1991-03-01 | 1993-02-19 | 横河電機株式会社 | Frequency stabilized laser light source |
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