WO2018221021A1 - 排ガスの減圧除害方法及びその装置 - Google Patents
排ガスの減圧除害方法及びその装置 Download PDFInfo
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- WO2018221021A1 WO2018221021A1 PCT/JP2018/015035 JP2018015035W WO2018221021A1 WO 2018221021 A1 WO2018221021 A1 WO 2018221021A1 JP 2018015035 W JP2018015035 W JP 2018015035W WO 2018221021 A1 WO2018221021 A1 WO 2018221021A1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/005—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by heat treatment
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/46—Removing components of defined structure
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/46—Removing components of defined structure
- B01D53/68—Halogens or halogen compounds
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
- B01D53/76—Gas phase processes, e.g. by using aerosols
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/308—Oxynitrides
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4412—Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
- F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
- F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
- F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
- F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
- F23G7/061—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating
- F23G7/065—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating using gaseous or liquid fuel
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2251/00—Reactants
- B01D2251/10—Oxidants
- B01D2251/102—Oxygen
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2251/00—Reactants
- B01D2251/20—Reductants
- B01D2251/202—Hydrogen
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2251/00—Reactants
- B01D2251/20—Reductants
- B01D2251/208—Hydrocarbons
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2251/00—Reactants
- B01D2251/30—Alkali metal compounds
- B01D2251/304—Alkali metal compounds of sodium
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2251/00—Reactants
- B01D2251/30—Alkali metal compounds
- B01D2251/306—Alkali metal compounds of potassium
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2251/00—Reactants
- B01D2251/60—Inorganic bases or salts
- B01D2251/604—Hydroxides
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2257/00—Components to be removed
- B01D2257/20—Halogens or halogen compounds
- B01D2257/204—Inorganic halogen compounds
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2257/00—Components to be removed
- B01D2257/20—Halogens or halogen compounds
- B01D2257/206—Organic halogen compounds
- B01D2257/2066—Fluorine
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2257/00—Components to be removed
- B01D2257/55—Compounds of silicon, phosphorus, germanium or arsenic
- B01D2257/553—Compounds comprising hydrogen, e.g. silanes
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2258/00—Sources of waste gases
- B01D2258/02—Other waste gases
- B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
- F23G2202/00—Combustion
- F23G2202/30—Combustion in a pressurised chamber
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
- F23G2209/00—Specific waste
- F23G2209/14—Gaseous waste or fumes
- F23G2209/142—Halogen gases, e.g. silane
Definitions
- the present invention relates to an exhaust gas elimination method and apparatus suitable for treating harmful gases such as flammable gas, toxic gas, and greenhouse gas discharged mainly from the manufacturing process of the electronics industry.
- the above prior art has the following problems. That is, the energy required to heat the entire exhaust gas containing the silane-based gas diluted with nitrogen gas to the decomposition temperature as described above is about 76 times that when only the exhaust gas containing the silane-based gas before dilution is heated. Energy is required. In other words, in the conventional detoxification process that requires dilution with nitrogen gas, not only the cost increase associated with the use of a large amount of nitrogen gas, but also nitrogen gas that is not directly related to the detoxification of exhaust gas must be heated. The energy efficiency is low, and the cost of electric power or fuel is increased.
- a main object of the present invention is to provide an exhaust gas removal method and apparatus that can minimize the use of nitrogen gas for dilution without sacrificing safety and that is excellent in energy efficiency and economical. It is in.
- the present invention copes with exhaust gas detoxification under reduced pressure. That is, the first invention in the present invention is characterized in that the exhaust gas E supplied from the exhaust gas generation source 12 via the vacuum pump 14 is kept in a reduced pressure state and decomposed by the combustion heat of the frame 22. This is a vacuum detoxification method.
- the first invention has the following effects. Since the exhaust gas E supplied from the exhaust gas generation source 12 via the vacuum pump 14 is kept in a reduced pressure state and decomposed by the combustion heat of the frame 22, the nitrogen gas for dilution is unnecessary or only a small amount is sufficient. Further, since the dilution with nitrogen gas is unnecessary or only a small amount as described above, almost all of the combustion heat of the frame 22 can be directly used for the decomposition of the exhaust gas E, and the source of the exhaust gas E is generated. Since the exhaust gas E is under reduced pressure, the exhaust gas E leaks out of the system before being thermally decomposed by the combustion heat of the frame 22 even if the exhaust gas E contains toxic substances to the human body. There is no worry to put out.
- the frame 22 as a heat source for the thermal decomposition treatment, the results and experience of the atmospheric pressure combustion method, which is one of the mainstream methods of the current exhaust gas abatement device, can be used as it is, and the exhaust gas abatement of such a method is used.
- the power consumption can be reduced to reduce the running cost.
- the reduced pressure state is preferably in the range of 1 Torr to 400 Torr, and more preferably in the range of 100 ⁇ 50 Torr.
- the decompressed state is less than 1 Torr, an expensive and large-scale device is required to realize a high vacuum environment.
- the decompressed state exceeds 400 Torr, the difference from the atmospheric pressure becomes small. Therefore, the exhaust gas E must be diluted with a large amount of nitrogen gas.
- a second invention in the present invention is an apparatus for carrying out the above-described exhaust gas detoxification method.
- an exhaust gas detoxification apparatus 10 is as follows. Configured. That is, the exhaust gas vacuum abatement apparatus 10 according to the present invention maintains the reaction chamber 18 that decomposes the exhaust gas E supplied from the exhaust gas generation source 12 via the vacuum pump 14 with the combustion heat of the frame 22 and substantially atmospheric pressure.
- a combustion chamber 20 that discharges the frame 22 into the reaction chamber 18, and a rear-stage vacuum pump 24 that decompresses the reaction chamber 18 from the exhaust port of the vacuum pump 14. It is characterized by. In the reaction chamber 18 under reduced pressure, the partial pressure of gas is low and it is difficult to burn the fuel to obtain the frame 22.
- fuel is combusted in the combustion chamber 20 maintained at a substantially atmospheric pressure to generate a frame 22, and the frame 22 is discharged toward the reaction chamber 18, whereby the combustion heat of the frame 22 is reduced.
- the exhaust gas E can be decomposed under reduced pressure.
- the decomposition / reaction auxiliary agent is supplied to the reaction chamber 18 for supplying at least one selected from the group consisting of moisture, air, O 2 , H 2 or hydrocarbon gas as a decomposition / reaction auxiliary agent.
- Means 26 are preferably provided. In this case, even if the flue gas E contains a large amount of flammable substances or harmful substances such as SiH 4 or NF 3 , These substances can be easily decomposed to a stable state or rendered harmless by reaction.
- a frame stabilizing nozzle 28 for stabilizing the frame 22 at the frame outlet 20b of the combustion chamber 20.
- FIG. 1 is a diagram showing an outline of an exhaust gas vacuum abatement apparatus 10 according to an embodiment of the present invention.
- the exhaust gas detoxification apparatus 10 of the present embodiment is an apparatus for detoxifying exhaust gas E supplied from an exhaust gas generation source 12 such as a CVD apparatus via a vacuum pump 14,
- a reaction cylinder 16 having a reaction chamber 18 and a combustion chamber 20 and a rear vacuum pump 24 are roughly constituted.
- an example of a silicon oxynitride film CVD apparatus is shown as the exhaust gas generation source 12.
- SiH 4 / NH 3 / N 2 O 1 slm / 10 slm / 10 slm is used as a process gas
- NF 3 / Ar 15 slm / 10 slm is used as a cleaning gas.
- SiF 4 is discharged approximately 10slm as a product of the cleaning reaction.
- These used gases are supplied as exhaust gas E to the vacuum abatement apparatus 10 via the vacuum pump 14.
- N 2 (nitrogen gas) supplied to the vacuum pump 14 is a purge N 2 supplied for the shaft seal of the pump 14.
- the reaction cylinder 16 is formed of a metal material having excellent corrosion resistance, such as Hastelloy (registered trademark), and has a substantially cylindrical casing 16a erected so that its axis is directed in the vertical direction (see FIG. 2).
- the internal space of the casing 16a is a reaction chamber 18 that decomposes the exhaust gas E, and an exhaust gas inlet 32 that communicates with the exhaust port of the vacuum pump 14 through a pipe 30 is provided on the top surface of the casing 16a.
- a base end portion of a pipe line 16c extending in the horizontal direction is connected to the lower part of the casing 16a, and an exhaust gas outlet 34 directly connected to the intake port of the rear vacuum pump 24 is provided at the tip of the pipe line.
- a decomposition / reaction auxiliary agent such as moisture supplied from the decomposition / reaction auxiliary agent supply means 26 is introduced into the reaction chamber 18 in the casing 16a as necessary.
- Nozzle 36 is attached.
- a plurality of combustion chambers 20 are attached to the side peripheral wall (inner peripheral wall) of the casing 16a in multiple stages and multiple rows in the circumferential direction and the vertical direction of the casing 16a.
- symbol 16b in FIG. 2 has shown the heat insulating material which covers the outer periphery of the casing 16a.
- the combustion chamber 20 is formed inside a chamber 20a formed of a metal material having excellent heat resistance and corrosion resistance such as Hastelloy (registered trademark).
- one surface of the chamber 20a forming the combustion chamber 20 is formed in a shape along the wall surface of the casing 16a and is integrally formed with the casing 16a so as to constitute a part of the wall surface of the casing 16a. Incorporated.
- a frame outlet 20b is formed in one surface of the chamber 20a incorporated in the casing 16a, and a frame stabilizing nozzle 28 having a Laval nozzle shape or the like is attached to the frame outlet 20b as necessary.
- the chamber 20a is supplied with a fuel supply pipe 38 for supplying a combustible fuel gas such as a hydrocarbon-based gas toward the internal combustion chamber 20, and an oxidizing gas such as oxygen or air is supplied to the inside thereof.
- An oxidizing gas supply pipe 40 is connected, and further, an igniter 42 for burning these gases to generate the frame 22 is attached.
- the rear vacuum pump 24 reduces the pressure from the exhaust port of the vacuum pump 14 to the predetermined degree of vacuum over the reaction chamber 18 of the reaction cylinder 16 and sucks and exhausts the exhaust gas E detoxified in the reaction chamber 18. It is a pump.
- a water ring pump is used as the latter-stage vacuum pump 24.
- a separator 44 such as a gas-liquid separation coalescer that separates the treated exhaust gas E discharged from the rear vacuum pump 24 and the sealed water from the exhaust port side of the rear vacuum pump 24. Is mounted as necessary (see FIG. 1).
- the reduced pressure state of the exhaust gas flow region extending from the exhaust port of the vacuum pump 14 to the reaction chamber 18 created by the rear vacuum pump 24 is preferably in the range of 1 Torr to 400 Torr, more preferably 100. It is within the range of ⁇ 50 Torr.
- the decompressed state is less than 1 Torr, an expensive and large-scale device is required to realize a high vacuum environment.
- the decompressed state exceeds 400 Torr, the difference from the atmospheric pressure becomes small. For this reason, the exhaust gas E must be diluted with a large amount of nitrogen gas at the same level as that under atmospheric pressure.
- the exhaust gas depressurization apparatus 10 of the present embodiment includes various detection devices, control devices, power supplies, and the like necessary for generating the frame 22 in the combustion chamber 20 and operating the post-stage vacuum pump 24 and the like. Needless to say, it is provided.
- the exhaust gas E discharged from the exhaust gas generation source 12 is sent to the reaction cylinder 16 via the vacuum pump 14.
- the exhaust gas E is maintained in a predetermined reduced pressure state and introduced into the reaction chamber 18, and is decomposed by the combustion heat of the frame 22 released from the combustion chamber 20 in the reaction chamber 18. It is processed.
- the exhaust gas E is kept in a decompressed state and decomposed by the combustion heat of the frame 22, so that the nitrogen gas for dilution is unnecessary or only a small amount is sufficient. Further, since dilution with nitrogen gas is unnecessary or only a small amount is sufficient as described above, almost all of the combustion heat of the frame 22 can be directly used for the decomposition and reaction of the exhaust gas E. Therefore, these two actions together make it possible to make the exhaust gas abatement apparatus very compact. Further, since the exhaust gas generation source to the processing section are under reduced pressure, even if the exhaust gas E contains toxic substances for the human body, the exhaust gas E is decomposed before being decomposed by the combustion heat of the frame 22. There is no worry of leaking out of the system.
- said embodiment can be changed as follows.
- the attachment location of the combustion chamber 20 in the casing 16a is not limited to the above.
- the exhaust gas E contains a large amount of PFCs (perfluoro compounds) such as NF 3 and decomposed.
- PFCs perfluoro compounds
- a large amount of HF is generated as a reaction product, it is preferable to add an aqueous alkali solution such as an aqueous KOH solution or an aqueous NaOH solution as a neutralizing agent (decomposition / reaction aid).
- air or oxygen may be added, or a hydrocarbon-based gas such as reducing H 2 or CH 4 may be added.
- the exhaust port of the vacuum pump 14 and the exhaust gas inlet 32 of the reaction cylinder 16 may be directly connected.
- the exhaust gas outlet 34 of the reaction cylinder 16 and the intake port of the rear vacuum pump 24 are directly connected.
- the exhaust gas outlet 34 of the reaction cylinder 16 and the rear vacuum pump 24 are connected via a pipe. May be.
- Exhaust gas detoxification device 10: Exhaust gas detoxification device, 12: Exhaust gas generation source, 14: Vacuum pump, 16: Reaction cylinder, 18: Reaction chamber, 20: Combustion chamber, 20b: Flame outlet, 22: Flame (flame), 24: Rear stage Vacuum pump, 26: decomposition / reaction auxiliary agent supply means, 28: flame stabilization nozzle, E: exhaust gas.
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Abstract
Description
このうち、例えばシリコン系薄膜の形成には、主として爆発性や毒性を有するシラン系ガスを用いたCVD法が使われている。このCVD法で使用された上記シラン系ガスを含むプロセスガスは、CVDプロセスで使用された後、排ガスとして下記の特許文献1に記載のような除害装置で無害化されるが、従来より、かかる除害装置の手前で、排ガス中のシラン系ガスを爆発限界以下まで希釈するために大量の希釈用窒素ガスが投入されていた。
ここで、典型的なシリコン酸窒化膜CVDでは、SiH4/NH3/N2O=1slm/10slm/10slm(slm;standard liter per minute,1atm、0℃における1分間辺りの流量をリットルで表示した単位)が使われるが、SiH4の爆発範囲が1.3%~100%であるため、CVDプロセスから排出されたこのようなガスは、直ちに希釈用窒素ガスで約76倍程度希釈をする必要がある。かかる希釈を行えば、例えば下記の特許文献1に示す従来の燃焼方式や、大気圧プラズマ方式の熱分解装置で安全且つ確実に除害処理をすることができる。
すなわち、上述のように窒素ガスで希釈されたシラン系ガスを含む排ガス全体を分解温度まで加熱するのに必要なエネルギーは、希釈前のシラン系ガスを含む排ガスのみを加熱する場合の約76倍のエネルギーが必要となる。つまり、従来の窒素ガスでの希釈が必要な除害プロセスでは、多量な窒素ガスの使用に伴うコストアップのみならず、排ガスの除害に直接関係が無い窒素ガスも加熱しなければならないため、エネルギー効率が低く、電力或いは燃料などのコストアップも招いていた。
すなわち、本発明における第1の発明は、真空ポンプ14を介して排ガス発生源12より供給される排ガスEを、減圧状態に保ちフレーム22の燃焼熱で分解処理する、ことを特徴とする排ガスの減圧除害方法である。
真空ポンプ14を介して排ガス発生源12より供給される排ガスEを、減圧状態に保ちフレーム22の燃焼熱で分解処理するため、希釈用の窒素ガスが不要か極少量で足りることとなる。
また、このように窒素ガスでの希釈が不要か極少量で足りるため、フレーム22の燃焼熱のほぼ全てを直接的に排ガスEの分解に使用することができるのに加え、排ガスEの発生源から処理部までが減圧下にあるため、排ガスE中に人体にとって有毒なものが含まれる場合であっても、フレーム22の燃焼熱で加熱分解処理される前に当該排ガスEが系外へ漏れ出す心配はない。
さらに、加熱分解処理の熱源としてフレーム22を使用することにより、現在の排ガス除害装置の主流の方式の一つである大気圧燃焼方式の実績・経験をそのまま利用でき、かかる方式の排ガス除害装置における付帯配管などの多くの既存設備をそのまま転用することもできるといった利点を有する。また、電力の消費を削減してランニングコストの低減を図ることができる。
減圧状態が1Torr未満の場合には、高度な真空環境を実現するために高価で大掛かりな装置が必要になり、逆に、減圧状態が400Torrを超える場合には、大気圧との差が小さくなるため、排ガスEを多量の窒素ガスで希釈しなければならなくなる。
すなわち、本発明の排ガスの減圧除害装置10は、真空ポンプ14を介して排ガス発生源12より供給される排ガスEをフレーム22の燃焼熱で分解処理する反応室18と、略大気圧に保持され、上記の反応室18内に向けて上記フレーム22を放出する燃焼室20と、上記の真空ポンプ14の排気口から上記の反応室18に亘って減圧する後段真空ポンプ24とを備える、ことを特徴とする。
減圧下の反応室18内では、ガスの分圧が低く燃料を燃焼させてフレーム22を得ることが困難である。そこで、この発明では、略大気圧に保持された燃焼室20で燃料を燃焼させてフレーム22を生成し、そのフレーム22を反応室18内に向けて放出することで、フレーム22の燃焼熱を用いた減圧下での排ガスEの分解処理を可能としている。
この場合、排ガスE中にSiH4やNF3などと言った可燃性の物質や有害な物質が主体で且つ多量に含まれる場合であっても、上記の分解・反応補助剤を加えることにより、これらの物質を安定な状態まで容易に分解したり反応で無害化したりすることができる。
この場合、反応室18内の排ガスEの流れによるフレーム22の失火などを防止して、フレーム22の燃焼熱による排ガスEの分解処理をより一層安定して行うことができるようになる。
図1は、本発明の一実施形態の排ガスの減圧除害装置10の概要を示す図である。この図が示すように、本実施形態の排ガスの減圧除害装置10は、CVD装置などの排ガス発生源12より真空ポンプ14を介して供給される排ガスEを除害するための装置であり、反応室18及び燃焼室20を有する反応筒16と、後段真空ポンプ24とで大略構成される。
また、ケーシング16aの排ガス入口32の近傍には、必要に応じて、分解・反応補助剤供給手段26より供給される水分などの分解・反応補助剤をケーシング16a内の反応室18に導入するためのノズル36が取り付けられる。
そして、このケーシング16aの側周壁(内周壁)には、複数の燃焼室20が当該ケーシング16aの周方向及び上下方向において多段多列にて取り付けられる。
なお、図2中の符号16bは、ケーシング16aの外周を覆う断熱材を示している。
排ガス発生源12から排出される排ガスEは真空ポンプ14を介して反応筒16へと送られる。ここで、後段真空ポンプ24を作動させることにより、排ガスEは所定の減圧状態に保たれ反応室18へと導入され、この反応室18で燃焼室20より放出されるフレーム22の燃焼熱によって分解処理される。
さらに、排ガスの発生源から処理部までが減圧下にあるため、排ガスE中に人体にとって有毒なものが含まれる場合であってもフレーム22の燃焼熱で分解処理される前に当該排ガスEが系外へ漏れ出す心配はない。
前記の反応筒16として、ケーシング16aの側周壁(内壁)の周方向及び上下方向に複数の燃焼室20を多段多列にて取り付ける場合を示したが、1つの燃焼室20より放出されるフレーム22で排ガスEを十分に熱分解できるのであれば、反応筒16に取り付ける燃焼室20は1つであってもよい。また、ケーシング16aにおける燃焼室20の取付箇所も上述のものに限定されるものではない。
Claims (5)
- 真空ポンプを介して排ガス発生源より供給される排ガスを、減圧状態に保ちフレームの燃焼熱で分解処理する、
ことを特徴とする排ガスの減圧除害方法。 - 請求項1の排ガスの減圧除害方法において、
前記の減圧状態が、1Torr以上で且つ400Torr以下の範囲内である、ことを特徴とする排ガスの減圧除害方法。 - 真空ポンプ(14)を介して排ガス発生源(12)より供給される排ガス(E)をフレーム(22)の燃焼熱で分解処理する反応室(18)と、
略大気圧に保持され、上記の反応室(18)内に向けて上記フレーム(22)を放出する燃焼室(20)と、
上記の真空ポンプ(14)の排気口から上記の反応室(18)に亘って減圧する後段真空ポンプ(24)を備える、
ことを特徴とする排ガスの減圧除害装置。 - 請求項3の排ガスの減圧除害装置において、
前記の反応室(18)に分解・反応補助剤として水分,空気,O2,H2又は炭化水素ガスからなる群より選ばれる少なくとも1種を供給する分解・反応補助剤供給手段(26)を設けた、ことを特徴とする排ガスの減圧除害装置。 - 請求項3又は4の排ガスの減圧除害装置において、
前記の燃焼室(20)のフレーム出口(20b)に前記フレーム(22)を安定化させるフレーム安定化ノズル(28)を設けた、ことを特徴とする排ガスの減圧除害装置。
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