JP5622686B2 - 燃焼除害装置 - Google Patents
燃焼除害装置 Download PDFInfo
- Publication number
- JP5622686B2 JP5622686B2 JP2011179693A JP2011179693A JP5622686B2 JP 5622686 B2 JP5622686 B2 JP 5622686B2 JP 2011179693 A JP2011179693 A JP 2011179693A JP 2011179693 A JP2011179693 A JP 2011179693A JP 5622686 B2 JP5622686 B2 JP 5622686B2
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- gas
- hydrogen
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
- F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
- F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23D—BURNERS
- F23D14/00—Burners for combustion of a gas, e.g. of a gas stored under pressure as a liquid
- F23D14/20—Non-premix gas burners, i.e. in which gaseous fuel is mixed with combustion air on arrival at the combustion zone
- F23D14/22—Non-premix gas burners, i.e. in which gaseous fuel is mixed with combustion air on arrival at the combustion zone with separate air and gas feed ducts, e.g. with ducts running parallel or crossing each other
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23C—METHODS OR APPARATUS FOR COMBUSTION USING FLUID FUEL OR SOLID FUEL SUSPENDED IN A CARRIER GAS OR AIR
- F23C13/00—Apparatus in which combustion takes place in the presence of catalytic material
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
- F23G5/00—Incineration of waste; Incinerator constructions; Details, accessories or control therefor
- F23G5/50—Control or safety arrangements
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
- F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
- F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
- F23G7/061—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating
- F23G7/065—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating using gaseous or liquid fuel
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
- F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
- F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
- F23G7/07—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases in which combustion takes place in the presence of catalytic material
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23M—CASINGS, LININGS, WALLS OR DOORS SPECIALLY ADAPTED FOR COMBUSTION CHAMBERS, e.g. FIREBRIDGES; DEVICES FOR DEFLECTING AIR, FLAMES OR COMBUSTION PRODUCTS IN COMBUSTION CHAMBERS; SAFETY ARRANGEMENTS SPECIALLY ADAPTED FOR COMBUSTION APPARATUS; DETAILS OF COMBUSTION CHAMBERS, NOT OTHERWISE PROVIDED FOR
- F23M5/00—Casings; Linings; Walls
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23M—CASINGS, LININGS, WALLS OR DOORS SPECIALLY ADAPTED FOR COMBUSTION CHAMBERS, e.g. FIREBRIDGES; DEVICES FOR DEFLECTING AIR, FLAMES OR COMBUSTION PRODUCTS IN COMBUSTION CHAMBERS; SAFETY ARRANGEMENTS SPECIALLY ADAPTED FOR COMBUSTION APPARATUS; DETAILS OF COMBUSTION CHAMBERS, NOT OTHERWISE PROVIDED FOR
- F23M5/00—Casings; Linings; Walls
- F23M5/08—Cooling thereof; Tube walls
- F23M5/085—Cooling thereof; Tube walls using air or other gas as the cooling medium
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23C—METHODS OR APPARATUS FOR COMBUSTION USING FLUID FUEL OR SOLID FUEL SUSPENDED IN A CARRIER GAS OR AIR
- F23C2900/00—Special features of, or arrangements for combustion apparatus using fluid fuels or solid fuels suspended in air; Combustion processes therefor
- F23C2900/9901—Combustion process using hydrogen, hydrogen peroxide water or brown gas as fuel
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23D—BURNERS
- F23D2900/00—Special features of, or arrangements for burners using fluid fuels or solid fuels suspended in a carrier gas
- F23D2900/00014—Pilot burners specially adapted for ignition of main burners in furnaces or gas turbines
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
- F23G2207/00—Control
- F23G2207/50—Cooling fluid supply
Description
Claims (5)
- 被処理ガス中に含まれる有害ガス成分を燃焼火炎によって除害処理する燃焼除害装置において、有害ガス成分を含む被処理ガスを燃焼チャンバ内に導入する被処理ガス導入ノズルと、該被処理ガス導入ノズルの燃焼チャンバ外周側から前記燃焼チャンバ内に酸化剤を導入する酸化剤導入ノズルと、前記被処理ガス導入ノズルから燃焼チャンバ内に導入された前記被処理ガスと前記酸化剤導入ノズルから燃焼チャンバ内に導入された前記酸化剤とが混合した混合ガスに点火する点火バーナと、前記被処理ガス導入ノズルに前記被処理ガスを供給する被処理ガス供給経路内に、燃焼用燃料となる水素を導入して該水素と前記被処理ガスとを混合させる水素導入部とを備えるとともに、前記酸化剤導入ノズルのノズル軸線を、前記被処理ガス導入ノズルのノズル軸線の延長線上に向かう方向に配置した燃焼除害装置。
- 前記被処理ガスが、有害ガス成分としてアンモニアを含んでいる請求項1記載の燃焼除害装置。
- 前記燃焼チャンバは、外筒と、該外筒の内周に配置されたガス透過性材料からなる内筒とで形成され、前記被処理ガス導入ノズル及び前記酸化剤導入ノズルは前記内筒内に形成された燃焼室内に被処理ガス及び酸化剤を導入する状態で設けられ、前記内筒と前記外筒との間に、前記内筒を透過して燃焼室内に導入される空気が外筒外部から供給される空気室が設けられている請求項1又は2記載の燃焼除害装置。
- 前記点火バーナは、水素を触媒により活性化させて燃焼させるバーナである請求項1乃至3のいずれか1項記載の燃焼除害装置。
- 前記被処理ガスは、工程中の一部で水素を使用するプロセスから排出される排ガスであり、前記プロセスでの水素の使用量が少ないときには、プロセスで使用する水素の少なくとも一部を燃焼用燃料の水素として前記水素導入部から導入する請求項1乃至4のいずれか1項記載の燃焼除害装置。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011179693A JP5622686B2 (ja) | 2011-08-19 | 2011-08-19 | 燃焼除害装置 |
KR1020137012972A KR101887248B1 (ko) | 2011-08-19 | 2012-08-09 | 연소 제해 장치 |
PCT/JP2012/070290 WO2013027589A1 (ja) | 2011-08-19 | 2012-08-09 | 燃焼除害装置 |
CN201280004451.1A CN103299131B (zh) | 2011-08-19 | 2012-08-09 | 燃烧除害装置 |
TW101129891A TWI542830B (zh) | 2011-08-19 | 2012-08-17 | Burning device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011179693A JP5622686B2 (ja) | 2011-08-19 | 2011-08-19 | 燃焼除害装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2013040749A JP2013040749A (ja) | 2013-02-28 |
JP5622686B2 true JP5622686B2 (ja) | 2014-11-12 |
Family
ID=47746336
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011179693A Active JP5622686B2 (ja) | 2011-08-19 | 2011-08-19 | 燃焼除害装置 |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP5622686B2 (ja) |
KR (1) | KR101887248B1 (ja) |
CN (1) | CN103299131B (ja) |
TW (1) | TWI542830B (ja) |
WO (1) | WO2013027589A1 (ja) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5785978B2 (ja) * | 2013-04-24 | 2015-09-30 | 大陽日酸株式会社 | 排ガス処理装置 |
JP5785979B2 (ja) * | 2013-04-24 | 2015-09-30 | 大陽日酸株式会社 | 排ガス処理装置 |
CN103591592B (zh) * | 2013-10-25 | 2016-04-27 | 包秀敏 | 基于氢气和氧气的废气焚烧装置 |
JP2017089985A (ja) * | 2015-11-11 | 2017-05-25 | 株式会社荏原製作所 | 排ガス処理装置 |
CN110461437B (zh) * | 2017-01-06 | 2022-09-13 | 阿尔泽塔公司 | 用于改善废气消减的系统和方法 |
KR102129719B1 (ko) * | 2017-05-29 | 2020-07-03 | 칸켄 테크노 가부시키가이샤 | 배기 가스의 감압 제해 장치 |
CN112750717B (zh) * | 2019-10-30 | 2022-12-02 | 夏泰鑫半导体(青岛)有限公司 | 设备前后端模块及具有该设备前后端模块的半导体加工站 |
CN112797424B (zh) * | 2020-12-23 | 2021-11-05 | 北京京仪自动化装备技术股份有限公司 | 一种用于处理半导体TiN工艺废气的方法 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4176132B2 (ja) * | 1997-11-21 | 2008-11-05 | 株式会社荏原製作所 | 排ガス処理用燃焼器 |
JPH11218318A (ja) * | 1998-02-03 | 1999-08-10 | Air Liquide Japan Ltd | 排ガス処理設備 |
JP3812638B2 (ja) * | 1999-11-02 | 2006-08-23 | 株式会社荏原製作所 | 排ガス処理用燃焼器 |
JP4535558B2 (ja) * | 2000-03-31 | 2010-09-01 | 大陽日酸株式会社 | 燃焼式排ガス処理装置 |
JP3864092B2 (ja) * | 2002-01-10 | 2006-12-27 | 東京瓦斯株式会社 | 難燃性物質分解バーナ |
CN101029734B (zh) * | 2002-09-04 | 2010-05-26 | 住友金属工业株式会社 | 废弃物的处理方法以及处理装置 |
KR100666673B1 (ko) * | 2005-05-03 | 2007-01-09 | 주식회사 케이피씨 | 폐가스 연소용 버너 및 이를 이용한 가스 스크러버 |
GB0509163D0 (en) * | 2005-05-05 | 2005-06-15 | Boc Group Plc | Gas combustion apparatus |
JP4937886B2 (ja) * | 2006-12-05 | 2012-05-23 | 株式会社荏原製作所 | 燃焼式排ガス処理装置 |
CN101363629B (zh) * | 2008-09-05 | 2011-04-20 | 友达光电股份有限公司 | 燃烧装置及燃烧方法 |
-
2011
- 2011-08-19 JP JP2011179693A patent/JP5622686B2/ja active Active
-
2012
- 2012-08-09 KR KR1020137012972A patent/KR101887248B1/ko active IP Right Grant
- 2012-08-09 CN CN201280004451.1A patent/CN103299131B/zh active Active
- 2012-08-09 WO PCT/JP2012/070290 patent/WO2013027589A1/ja active Application Filing
- 2012-08-17 TW TW101129891A patent/TWI542830B/zh active
Also Published As
Publication number | Publication date |
---|---|
WO2013027589A1 (ja) | 2013-02-28 |
CN103299131B (zh) | 2015-10-07 |
TW201319471A (zh) | 2013-05-16 |
TWI542830B (zh) | 2016-07-21 |
KR20140051103A (ko) | 2014-04-30 |
KR101887248B1 (ko) | 2018-08-09 |
JP2013040749A (ja) | 2013-02-28 |
CN103299131A (zh) | 2013-09-11 |
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