WO2018117701A1 - 다층구조의 도금강판 및 그 제조방법 - Google Patents

다층구조의 도금강판 및 그 제조방법 Download PDF

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WO2018117701A1
WO2018117701A1 PCT/KR2017/015275 KR2017015275W WO2018117701A1 WO 2018117701 A1 WO2018117701 A1 WO 2018117701A1 KR 2017015275 W KR2017015275 W KR 2017015275W WO 2018117701 A1 WO2018117701 A1 WO 2018117701A1
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Prior art keywords
layer
steel sheet
plated steel
plating
corrosion resistance
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PCT/KR2017/015275
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English (en)
French (fr)
Inventor
고경필
남경훈
김태엽
이동열
정용화
정우성
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주식회사 포스코
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Application filed by 주식회사 포스코 filed Critical 주식회사 포스코
Priority to JP2019533483A priority Critical patent/JP6974467B2/ja
Priority to CN201780080312.XA priority patent/CN110168141A/zh
Priority to EP17885343.8A priority patent/EP3561154B1/en
Priority to US16/469,980 priority patent/US10988845B2/en
Publication of WO2018117701A1 publication Critical patent/WO2018117701A1/ko

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    • C23C28/023Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings only including layers of metallic material only coatings of metal elements only
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    • BPERFORMING OPERATIONS; TRANSPORTING
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    • BPERFORMING OPERATIONS; TRANSPORTING
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    • BPERFORMING OPERATIONS; TRANSPORTING
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    • C23C28/026Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings only including layers of metallic material including at least one amorphous metallic material layer
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    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/02Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings only including layers of metallic material
    • C23C28/028Including graded layers in composition or in physical properties, e.g. density, porosity, grain size
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C30/00Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
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    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D3/00Electroplating: Baths therefor
    • C25D3/02Electroplating: Baths therefor from solutions
    • C25D3/22Electroplating: Baths therefor from solutions of zinc
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Definitions

  • the present invention relates to a plated steel sheet that is used a lot of materials, such as automobiles, home appliances, construction, and more particularly, to a plated steel sheet of a multi-layer structure and a method of manufacturing the same.
  • the surface of steel plate products used for automobile materials, home appliances, building materials, etc. is galvanized by electroplating or hot dip for the purpose of improving corrosion resistance and durability. Since the galvanized product is significantly improved in corrosion resistance due to the sacrificial corrosion resistance of zinc compared to the general untreated steel sheet products, it has been applied throughout the industry.
  • the plating adhesion amount is a factor that greatly affects the corrosion protection and long-term rust resistance of the metal.As the plating deposition amount increases, the time required for the red blue color increases, which results in corrosion resistance. Is higher. Therefore, due to the problem of lowering the corrosion resistance it is a situation that can not reduce the amount of plating.
  • Many different products have been developed, including the three elements.
  • Zn-Mg alloy plating has a very brittle characteristic of Zn or Mg as all alloy phases formed are Mg 2 Zn 11 , MgZn 2 , MgZn, Mg 7 Zn 3, etc., which are intermetallic compounds.
  • Mg 2 Zn 11 , MgZn 2 , MgZn, Mg 7 Zn 3, etc. which are intermetallic compounds.
  • Patent Documents 1 and 2 as an effort to prevent such blackening phenomenon.
  • Patent Document 1 Japanese Unexamined Patent Publication No. 9-241828
  • Patent Document 2 Japanese Unexamined Patent Publication No. 2005-146340
  • One side of the present invention is to provide a Zn / Mn / Zn multi-layer plated steel sheet excellent in corrosion resistance of the plating layer, excellent black deformation resistance to the blackening of the surface, excellent adhesion of the plating layer and a method of manufacturing the same will be.
  • One aspect of the present invention is a steel sheet
  • It includes a third Zn layer formed on the second Mg layer, the second Mg layer provides an amorphous plated steel sheet of a multi-layer structure.
  • Another aspect of the present invention comprises the steps of preparing a steel sheet
  • the second Mg layer and the third Zn layer are formed by a vacuum deposition method, and the temperature of the steel sheet is 50 ⁇ 120 °C to provide a multi-layer plated steel sheet manufacturing method.
  • the present invention it is possible to provide a multi-layer plated steel sheet having a Zn / Mg / Zn structure having excellent corrosion resistance and excellent surface adhesion and no surface blackening phenomenon, and a method of manufacturing the same.
  • FIG. 1 is a TEM photograph showing a Zn / Mg / Zn multilayer plated steel sheet according to an embodiment of the present invention.
  • FIG. 2 is a photograph of a TEM diffraction pattern of a second Mg layer in a Zn / Mg / Zn multilayer plated steel sheet according to an embodiment of the present invention.
  • FIG. 3 are photographs which evaluated the corrosion resistance of Inventive Example 8 and Comparative Example 8, respectively.
  • One embodiment of the present invention to form a multi-layer structure of the first Zn layer, the second Mg layer and the third Zn layer on the surface of the steel sheet, control the thickness of each layer, into the second Mg layer of the third Zn layer While controlling the diffusion of the second Mg layer itself, the corrosion resistance is greatly improved, and the formation of crystallized Zn-Mg alloy layer can be prevented to secure plating adhesion, and the upper Zn layer is further coated. Prevents blackening;
  • the multilayer plated steel sheet of the present invention includes a first Zn layer formed on a base steel sheet, a second Mg layer formed on the first Zn layer, and a third Zn layer formed on the second Mg layer. It includes.
  • the kind of the steel sheet is not particularly limited, and any one may be used in the technical field to which the present invention pertains, such as a hot rolled steel sheet and a cold rolled steel sheet.
  • the first Zn layer is formed on the base steel sheet.
  • the first Zn layer may be formed by hot dip galvanizing, full zinc plating, vacuum deposition, or the like, and the plating layer composition of the first Zn layer is not particularly limited, and may be conventional hot dip galvanizing, electro zinc plating, Plating layer compositions such as vacuum deposition are applied.
  • the said 1st Zn layer has a thickness of 1-3 micrometers.
  • the thickness variation of the first Zn layer may be increased according to the roughness of the base iron, thereby reducing the plating effect.
  • the corrosion resistance of the whole plated steel sheet of the multi-layered structure of the present invention is most influenced by the second Mg layer, if the thickness of the first Zn layer exceeds 3 ⁇ m, even if the effect of improving the corrosion resistance is not great, There is an inefficient problem due to the increased cost.
  • a second Mg layer is formed on the first Zn layer, and a third Zn layer is formed on the second Mg layer.
  • the second Mg layer and the third Zn layer may be formed by vacuum deposition using pure Mg and Zn metal, respectively.
  • the second Mg layer may be a kind of solid solution in which Zn diffused from the third Zn layer is mixed. As Zn diffuses, the Mg crystal structure is changed, resulting in lattice deformation. (lattice distortion) is accompanied by normal crystallization is not possible. In addition, while the diffused Zn interferes with the growth of the Mg particles, the second Mg layer finally grows in an amorphous phase.
  • the amorphous phase of the second Mg layer may be confirmed through a transmission electron microscope (TEM). That is, as shown in FIG. 2, it can be seen that the second Mg layer does not show a spot-shaped pattern in which the diffraction pattern shows a crystalline structure, which explains that it has grown to an amorphous phase.
  • TEM transmission electron microscope
  • the second Mg layer may include an amorphous phase and a Zn-Mg amorphous phase or a nano-crystal Zn-Mg alloy phase finely formed by reacting Mg and Zn diffused therein.
  • the nano-crystal Zn-Mg alloy phase has a size of up to several tens of nm, unlike the general crystallized alloy phase, it appears as an amorphous phase even when observed by XRD (X-ray diffraction) or TEM. That is, the Zn-Mg amorphous phase or the Zn-Mg alloy phase in the form of nanocrystals occupies a part in the amorphous second Mg layer.
  • Such a Zn-Mg amorphous phase or a nano-crystalline Zn-Mg alloy phase may exhibit synergistic effects in addition to the amorphousization of the second Mg layer in improving corrosion resistance inside the second Mg layer.
  • the electrical resistivity resistivity
  • the Zn-Mg amorphous phase as described above may have a large contribution to corrosion resistance as a constant alloy phase with an amorphous effect.
  • nano-crystal Zn-Mg alloy phase formed by diffusing Zn alloyed in a minute region within the second Mg layer is hard to expect corrosion resistance of MgxZny level formed entirely of an alloy phase, but at least pure Mg or Zn Corrosion properties are expected to be significantly improved than those present.
  • the content of Zn contained in the Zn-Mg amorphous phase or the Zn-Mg alloy phase in the form of nanocrystals in the second Mg layer formed by diffusion of Zn into the second Mg layer is 20 to 60% by weight. . If less than 20% by weight, the diffusion may not significantly affect the Mg growth and Mg lattice deformation is also not so large that amorphous may not occur smoothly. In addition, when the diffused Zn exceeds 60% by weight, the diffusion was increased due to the influence of the substrate temperature, and the Zn-Mg crystallized as the diffused Zn alloyed with some Mg by the thermal driving force. Some alloy phase begins to form.
  • the Zn-Mg alloy phase forms a crystalline phase that is not amorphous. As described in the background, the Zn-Mg alloy phase has a high brittle region, which adversely affects the plating adhesion and causes blackening. Therefore, the amount of Zn diffused in the second Mg layer is preferably at most 60% by weight.
  • the thickness of a said 2nd Mg layer is 0.5-1.5 micrometers.
  • the thickness of the second Mg layer is less than 0.5 ⁇ m, even if amorphous and nanocrystal Mg-Zn alloy phases due to Zn diffusion are formed therein, the thickness may be thin, thereby reducing the effect of contributing to corrosion resistance, and exceeding 1.5 ⁇ m.
  • Zn becomes more than the diffusible thickness and the coating layer section made of pure Mg is widened to form an unnecessary coating layer which does not contribute to the improvement of corrosion resistance, which is uneconomical, and at the same time causes blackening over time even when the third Zn layer is coated. can do.
  • the third Zn layer supplies Zn that can diffuse into the second Mg layer, and at the same time, a kind of protective film or barrier that prevents blackening from occurring when the second Mg layer is exposed to the surface. barrier) to act as a layer.
  • the thickness of the third Zn layer may be 1 to 3 ⁇ m. When the thickness of the third Zn layer is less than 1 ⁇ m, it is difficult to expect sufficient black denaturation because the coated Zn layer does not sufficiently block the inside of the coating film such as external moisture to prevent blackening of the second Mg layer. When it exceeds 3 ⁇ m, the effect of improving the blackening resistance is not further improved and it is uneconomical to form an unnecessary coating film layer.
  • Multi-layer plated steel sheet of the present invention comprises the steps of preparing a steel sheet; Forming a first Zn layer on the prepared steel sheet; Forming a second Mg layer on the first Zn layer; And forming a third Zn layer on the second Mg layer.
  • the process of preparing the base steel sheet may include a step of removing a nanometer thin oxide film (scale) formed on the surface of the base steel sheet.
  • the method for removing the oxide film is not particularly limited, and for example, the oxide film may be removed by plasma etching using an ion beam. As described above, a plating layer is formed on the surface of the base steel sheet from which the oxide film is removed.
  • the method of forming the first Zn layer on the base steel sheet is not particularly limited as described above, and may be formed by a general method of hot dip galvanizing, full zinc plating, vacuum deposition, or the like, and the first Zn layer.
  • the plating layer composition is not particularly limited, and may be Zn plating using a conventional hot dip galvanizing, electro zinc plating, or vacuum deposition method.
  • the second Mg layer and the third Zn layer are preferably formed by vacuum deposition using pure Mg and Zn metals, respectively. At this time, it is preferable to remove foreign substances or natural oxide film on the surface by using a plasma, an ion beam, or the like.
  • the vacuum deposition method may be applied to the electron beam method, sputtering method, thermal evaporation method, induction heating evaporation method, ion plating method, and the like, preferably high-speed deposition to improve the production speed, the electromagnetic stirring effect (Electromagnetic Stirring)
  • the eggplant is preferably formed by an electromagnetic levitation induction heating method.
  • the temperature of the steel sheet is preferably 50 to 120 ° C.
  • the atomic mobility of the deposited material may be smoothed, and the diffusion mobility of the material may be increased.
  • Zn atoms of the third Zn layer may smoothly diffuse into the second Mg layer, but when the temperature exceeds 120 ° C., the diffused Zn atoms and the Mg inside the second Mg layer As the alloying between atoms starts, some crystallized Zn-Mg alloy layer may be formed.
  • the temperature of the steel sheet is preferably set to 50 ⁇ 120 °C.
  • the degree of vacuum within the chamber is 1 ⁇ 10 - preferably in the 5 ⁇ 1 ⁇ 10 -2 mbar.
  • a general cold rolled steel sheet was prepared as a base steel sheet, and the first Zn layer was formed by ordinary electrogalvanization.
  • the blackening resistance evaluation visually determined the color difference after the telephone call to hold the plated steel sheet for 72 hours in a constant temperature and humidity chamber at a temperature of 50 ° C. and a relative humidity of 95%.
  • Plating adhesion was evaluated using a commonly used OT bending test to evaluate the presence or absence of peeling, and the phase of the thin film was analyzed by XRD analysis.
  • the phase analysis of the thin film is for the entire plating layer structure, and in Table 1, Zn + Mg indicates that the Zn crystal phase coming out of the first Zn layer and the third Zn layer, and the second Mg layer are not amorphous so that the Mg crystal phase is simultaneously It is analyzed.
  • Zn means that the second Mg layer is amorphous and thus the crystal phase of Mg is not observed through XRD, so that only the Zn crystal phase coming out of the first and third Zn layers is analyzed.
  • the corrosion resistance was evaluated by performing a salt spray test under conditions of a salt concentration of 5%, a temperature of 35 ° C., and a spray pressure of 1 kg / cm 2, and measured the time of generating 5% of red blue.
  • the criteria for evaluating the results of corrosion resistance evaluation are as follows.
  • Comparative Examples 1 to 3 formed only a two-layer structure consisting of a first Zn layer and a second Mg layer without forming a third Zn layer, and Zn and Mg constituted each layer in a single phase and are very susceptible to corrosion resistance. It is characterized by the fact that the upper part is covered with Mg layer, and the blackening phenomenon is very severely blackened.
  • Comparative Example 4 is a second Mg layer amorphous by the diffusion of the third Zn layer and the amorphous or nano-crystal Zn-Mg alloying in the second Mg layer fine region to improve the corrosion resistance, but beyond the thickness of the Mg layer of the present invention It is not economical because it exists as an unnecessary coating layer area.
  • Comparative Example 5 As the thickness of the third Zn layer is coated below the thickness suggested in the present invention, the amount of Zn diffused is reduced, so that the amount of Zn diffused into the second Mg layer is small, and thus Mg and some Zn-Mg The degree of amorphousness and nanocrystal alloy phase is lowered, resulting in poor corrosion resistance.
  • Comparative Example 6 the thickness of the third Zn layer was coated over the thickness suggested in the present invention, which was not effective to improve the corrosion resistance, which was uneconomical, and as the third Zn layer became excessively thick, plating adhesion was somewhat inferior. .
  • Comparative Example 7 may be a thickness in which the thickness of the first Zn layer is greater than or equal to the thickness suggested in the present invention, so that the effect of improving the characteristics required by the present invention is insignificant and exists as an economically unnecessary cutting layer region.
  • the first Zn layer, the second Mg layer and the third Zn layer were prepared to have thicknesses of 1, 1, and 3 ⁇ m, respectively.
  • the plated steel sheet was manufactured by controlling the Zn diffusion of the third Zn layer by varying the substrate temperature at room temperature from 160 ° C. during the vacuum deposition of the second Mg layer and the third Zn layer.
  • Table 2 shows the results of analyzing the Zn weight ratio diffused into the second Mg layer through TEM-EDS point analysis for the second Mg layer cross-section.
  • Inventive Examples 8 to 10 satisfying the conditions of the present invention can be confirmed to have excellent blackening resistance, plating adhesion, and corrosion resistance.
  • Comparative Example 8 since the Zn diffusion in the third Zn layer is not performed at all when the second Zn layer and the third Mg layer are coated without a separate heating operation, the respective coating layers are individually present and the corrosion resistance is very inferior.
  • Comparative Example 9 the degree of Zn diffusion in the third Zn layer was weakened by heating to 30 ° C., so that the amount of Zn present in the second Mg layer was less than several percent. As a result of this, the corrosion resistance was relatively poor.
  • the Mg of the second Mg layer and the diffused Zn were alloyed to some extent as the Zn diffusion in the third Zn layer was sufficiently performed by heating to 160 ° C. and the alloying occurred in a temperature region where the alloying occurred to some extent.
  • Some Zn-Mg alloy phases were formed.
  • the Zn-Mg alloy phase was identified as Mg 2 Zn 11 phase by XRD measurement, and the corrosion resistance was sufficiently expressed by the formation of the alloy phase in which such crystallization was made, but as the brittleness peculiar to the Zn-Mg alloy phase was increased, some aspects of plating adhesion were observed. It showed the result of peeling phenomenon.
  • 3 (a) and 3 (b) are photographs observing the occurrence of red blue on the surface after evaluation of corrosion resistance of Inventive Example 8 and Comparative Example 8, respectively.
  • red blue did not occur, whereas in the comparative example (b), red blue occurred.
  • 4 (a) and 4 (b) show the results of the OT bending test of Inventive Example 8 and Comparative Example 10, respectively, and in Inventive Example (a), the film peeling was not severe. Was found to be ten.

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Abstract

본 발명은 자동차, 가전, 건축용 등의 소재로 많이 사용되는 도금강판에 관한 것으로서, 보다 상세하게는 다층 구조의 도금강판 및 이를 제조하는 방법에 관한 것이다.

Description

다층구조의 도금강판 및 그 제조방법
본 발명은 자동차, 가전, 건축용 등의 소재로 많이 사용되는 도금강판에 관한 것으로서, 보다 상세하게는 다층 구조의 도금강판 및 이를 제조하는 방법에 관한 것이다.
자동차 재료, 가전제품, 건축재료 등의 용도로 사용되는 강판 제품의 표면은 내식성, 내구성 향상을 목적으로 전기도금이나 용융도금 등의 방식으로 아연도금을 실시한다. 이러한, 아연도금 처리 제품은 처리되지 않은 일반 강판 제품에 비해 아연의 희생방식성에 의하여 내식성이 월등히 향상되기 때문에, 산업 전반에 걸쳐서 적용이 되고 있다.
그러나, 최근 관련 산업분야에서는 내식성이 더욱 우수하면서, 가볍고, 경제적인 도금 제품의 요구가 커지면서 이에 대응하는 기술 개발 역시 활발하게 진행되고 있다. 더불어, 상기 아연도금강판 도금층의 주원료인 아연 가격이 급격히 상승하고 있기 때문에, 아연의 함량을 줄여 도금 부착량을 축소하거나 아연을 다른 원소로 대체하고자 하는 연구가 지속적으로 이어지고 있다.
우선, 도금강판의 도금 부착량을 줄이는 기술이 제안되기는 하였으나, 도금부착량은 금속의 부식 방지와 장기 방청성에 큰 영향을 주는 인자로써, 도금 부착량이 증가할수록 적청이 발생하는데 소요되는 시간이 증가되어, 내식성이 높아진다. 따라서, 내식성의 저하 문제 때문에 도금 부착량을 줄이지 못하는 실정이다.
한편, 아연을 활용하여 타물질과 결합된 합금화 연구가 다양하게 진행되었다. 대표적으로, Zn-Mg 합금도금이 아연(Zn) 도금 대비 우수한 내식성을 나타냄에 따라, Zn-Mg 합금 또는 Zn-Mg-X(X=Al, Ni, Cr, Pb, Cu 등) 합금과 같이 제3의 원소를 포함하여 다양한 제품들이 많이 개발되었다.
그러나, Zn-Mg 합금도금은 형성되는 합금상(phase)이 모두 금속간 화합물인 Mg2Zn11, MgZn2, MgZn, Mg7Zn3 등으로서, Zn 혹은 Mg 대비 매우 브리틀(brittle)한 특성을 가짐으로써, 강판의 가공단계에서 다수의 크랙 또는 필오프(peel-off)가 발생하여, 실제적인 응용이 거의 불가능하다는 단점이 있다. 즉, Zn-Mg 합금도금의 경우에는 순수 아연도금과 비교하여, 단단하고 부서지기 쉬운 특성을 가지고 있기 때문에 약간의 변형에도 도금층에 크랙(crack)이 가면서 쉽게 떨어지며 도금 밀착력이 현저히 떨어지는 단점이 있다.
또한, Zn-Mg 도금층에 들어있는 Mg의 활성이 매우 높아서, 습한 분위기에서 제품의 표면이 수분과 반응하여 검게 변하는 흑변현상의 발생이 제품의 품질을 저하시키는 문제로 작용한다. 이러한 흑변현상을 방지하기 위한 노력으로 특허문헌 1 및 2가 있다.
(특허문헌 1) 일본 공개특허 특개평9-241828호
(특허문헌 2) 일본 공개특허 특개2005-146340호
본 발명의 일측면은 도금층의 내식성이 우수하고, 표면의 흑변현상이 되지되는 내흑변성이 우수하며, 도금층의 밀착력이 우수한 Zn/Mn/Zn 다층구조의 도금강판과 이를 제조하는 방법을 제공하고자 하는 것이다.
본 발명이 해결하고자 하는 과제는 이상에서 언급한 과제로 제한되지 않으며, 언급되지 않는 또 다른 과제들은 아래의 기재로부터 당업자가 명확하게 이해될 수 있을 것이다.
본 발명의 일태양은 소지강판;
상기 소지강판 상에 형성된 제1 Zn층;
상기 제1 Zn층 상에 형성된 제2 Mg층; 및
상기 제2 Mg층 상에 형성된 제3 Zn층을 포함하고, 상기 제2 Mg층은 비정질상인 다층구조의 도금강판을 제공한다.
본 발명의 또다른 일태양은 소지강판을 준비하는 단계;
상기 소지강판 상에 제1 Zn층을 형성하는 단계;
상기 제1 Zn층 상에 제2 Mg층을 형성하는 단계; 및
상기 제2 Mg층 상에 제3 Zn층을 형성하는 단계를 포함하고,
상기 제2 Mg층 및 제3 Zn층은 진공증착법으로 형성하며, 소지강판의 온도는 50~120℃인 다층구조의 도금강판 제조방법을 제공한다.
본 발명에 의하면, 우수한 내식성을 보유하면서 도금 밀착성이 우수하고 동시에 표면 흑변현상이 발생되지 않는 Zn/Mg/Zn 구조의 다층 도금강판과 그 제조방법을 제공할 수 있다.
도 1은 본 발명의 일 구현예에 따른 Zn/Mg/Zn 다층 도금강판을 나타낸 TEM 사진이다.
도 2는 본 발명의 일 구현예에 따른 Zn/Mg/Zn 다층 도금강판에서 제2 Mg층의 TEM 회절 패턴을 찍은 사진이다.
도 3의 (a)와 (b)는 각각 발명예 8과 비교예 8의 내식성을 평가한 사진이다.
도 4는 (a)와 (b)는 각각 발명예 8과 비교예 10의 도금 밀착성 평가(OT bending test) 사진이다.
이하, 본 발명에 대해서 상세히 설명한다.
본 발명 일 구현예는 소지강판 표면에 제1 Zn층, 제2 Mg층 및 제3 Zn층의 다층구조를 형성하고, 각 층의 두께를 제어하고, 제3 Zn층의 제2 Mg층 내부로의 확산을 조절하는 한편 제2 Mg층 자체의 비정질화를 통하여 내식성을 월등히 향상시키고, 결정화된 Zn-Mg 합금층 형성을 방지하여 도금 말착력을 확보할 수 있으며, 상부 Zn층을 추가로 코팅하여 흑변 현상을 방지한다.
먼저, 본 발명의 다층 도금강판에 대해 상세히 설명한다. 본 발명의 다층 도금강판은 도 1에 예시된 바와 같이, 소지강판 상에 형성된 제1 Zn층, 상기 제1 Zn층 상에 형성된 제2 Mg층 및 상기 제2 Mg층 상에 형성된 제3 Zn층을 포함한다.
상기 소지강판의 종류는 특별히 제한되지 않으며, 열연강판, 냉연강판 등 본 발명이 속하는 기술분야에서 사용될 수 있는 것이면 어느 것이든 무방하다.
상기 소지강판 상에는 제1 Zn층이 형성된다. 상기 제1 Zn층은 용융아연도금, 전가아연도금, 진공증착 등의 방법에 의해 형성될 수 있으며, 상기 제1 Zn층의 도금층 조성은 특별히 한정하지 않으며, 통상적인 융융아연도금, 전기아연도금, 진공증착 등의 도금층 조성이 적용된다.
상기 제1 Zn층은 1~3㎛의 두께를 갖는 것이 바람직하다. 상기 제1 Zn층의 두께가 1㎛ 보다 작을 경우에는 소지철의 조도에 따라 도금되는 두께 편차가 심해져서, 도금 효과가 줄어들 수 있다. 한편, 본 발명의 다층 구조의 도금강판 전체의 내식성은 제2 Mg층이 가장 크게 좌우하게 되는데, 제1 Zn층의 두께가 3㎛를 초과하게 되면, 내식성 향상에 효과가 크지 않음에도, 시간과 비용이 증가하여 비효율적인 문제가 있다.
상기 제1 Zn층 상에 제2 Mg층이 형성되고, 상기 제2 Mg층 상에는 제3 Zn층이 형성된다. 상기 제2 Mg층 및 제3 Zn층의 형성은 순수한 Mg와 Zn 금속을 각각 활용하여 진공증착법으로 형성하는 것이 바람직하다.
상기 제2 Mg층 내부는 제3 Zn층으로부터 확산된 Zn이 혼합된 일종의 고용상(solid solution)이 될 있으며, Zn이 확산되면서 Mg 결정 구조에 변동이 생기고, 그 결과 제2 Mg층은 격자 변형(lattice distortion)이 수반되면서 정상적인 결정화(crystallization)이 일어나지 못하게 된다. 또한, 확산되는 Zn이 Mg입자의 성장을 방해하기도 하면서, 최종적으로 제2 Mg층은 비정질상(amorphous phase)으로 성장하게 된다. 상기 제2 Mg층의 비정질상 여부는 TEM(Transmission Electron Microscope)을 통해서 확인할 수 있다. 즉, 도 2에 도시된 바와 같이, 제2 Mg층은 회절 패턴이 결정질 구조를 나타내는 스팟(spot) 형태의 패턴이 나타나지 않은 것을 알 수 있고, 이는 비정질상으로 성장하였음을 설명한다.
한편, 상기 제2 Mg층은 비정질상이면서, 내부에 Mg와 확산된 Zn이 반응하여 미세하게 형성된 Zn-Mg 비정질상 또는 나노 크리스탈 형태의 Zn-Mg 합금상을 포함할 수 있다. 상기 나노 크리스탈 Zn-Mg 합금상은 최대 수십㎚의 크기를 가지기 때문에, 일반적인 결정화된 합금상과 다르게 XRD(X-ray diffraction)이나 TEM으로 관찰하여도 비정질상으로 나타난다. 즉, 비정질의 제2 Mg층 내에 상기 Zn-Mg 비정질상 또는 나노 크리스탈 형태의 Zn-Mg 합금상이 일부를 차지하고 있는 구조를 갖는다.
이러한 Zn-Mg 비정질상 또는 나노 크리스탈 Zn-Mg 합금상은 제2 Mg층 내부에서 내식성 향상에 제2 Mg층의 비정질화에 더불어서 시너지 효과가 나타날 수 있다. 일반적으로 결정질보다 비정질이 전기 비저항(resistivity)이 커지면서 전도성이 낮아지게 되는데 이에 따라 전기 화학반응이 일어나지 않게 되고 부식 반응에 더 잘 견딜수 있게 된다. 따라서, 위와 같은 Zn-Mg 비정질상은 비정질 효과와 더불어, 일정의 합금상으로서 내식성에 기여하는 바가 클 수 있다. 또한, 확산된 Zn가 제2 Mg층 내부에서 나노미터 단위로 미세한 영역에서 합금화되어 형성된 나노 크리스탈 Zn-Mg 합금상은 완전히 코팅층 전체가 합금상으로 형성된 MgxZny 수준의 내식성을 기대하기 힘들지만 적어도 순수 Mg 또는 Zn로 존재하는 것보다 부식 특성이 크게 향상될 것으로 기대된다.
상기 제2 Mg층의 내부로 Zn이 확산되어 형성된, 상기 제2 Mg층 내의 Zn-Mg 비정질상 또는 나노 크리스탈 형태의 Zn-Mg 합금상에 포함된 Zn의 함량은 20 내지 60 중량%인 것이 바람직하다. 만약, 20 중량%보다 낮게 확산될 경우 Mg 성장에 크게 영향을 주지 않을 수 있으며 Mg 격자 변형 역시 크지 않게 되어 비정질화가 원활하게 일어나지 못할 수 있다. 또한, 확산된 Zn가 60 중량%를 넘어가게 되면 그만큼 기판온도의 영향을 많이 받아서 확산이 많이 되었고, 그러한 기판온도 증가에 따라서 확산된 Zn가 열적 구동력에 의하여 일부 Mg과 합금화되면서 결정화된 Zn-Mg 합금상이 일부 형성되기 시작한다. 이러한 Zn-Mg 합금상은 비정질이 아닌 결정질 상을 이루고 있으며, 배경에 서술된 바와 같이 취성이 높은 영역으로서 도금 밀착성에 좋지 않은 영향을 끼치게 됨과 동시에 흑변 현상을 일으키게 된다. 따라서, 제2 Mg층 내부에 확산된 Zn의 양은 최대 60 중량%가 바람직하다.
상기 제2 Mg층의 두께는 0.5~1.5㎛인 것이 바람직하다. 제2 Mg층의 두께가 0.5 ㎛ 미만이 될 경우에는 Zn 확산에 따른 비정질화 및 나노 크리스탈 Mg-Zn 합금상이 내부에 형성되더라도 두께가 얇아서 내식성에 기여하는 효과가 낮아질 수 있으며, 1.5 ㎛를 초과하게 될 경우 Zn가 확산가능한 두께 이상이 되면서 순수 Mg으로 이루어진 코팅층 구간이 넓어지면서 내식성 향상에 기여하지 못하는 불필요한 코팅층이 형성되어 비경제적이며, 동시에 제3 Zn층을 코팅하더라도 시간 경과에 따라 흑변 현상을 야기할 수 있다.
상기 제3 Zn층은 기술된 바와 같이 제2 Mg층 내부에 확산할 수 있는 Zn를 공급해줌과 동시에 제2 Mg층이 표면에 노출될 경우 흑변 현상이 발생되는 것을 방지해주는 일종의 보호피막 또는 배리어(barrier) 층의 역할을 담당하게 된다. 상기 제3 Zn층의 두께는 1 내지 3 ㎛가 될 수 있다. 제3 Zn층의 두께가 1 ㎛ 미만이 될 경우에는 제2 Mg층의 흑변 현상을 막기 위하여 코팅된 Zn층이 외부 습기 등의 도막내부 침입을 충분히 차단하지 못하므로 충분한 내흑변성을 기대하기 어렵고, 3 ㎛를 초과하게 될 경우에는 내흑변성 향상 효과가 크게 더 개선되지 않으며 불필요한 도막층을 형성하게 됨으로서 비경제적이다.
이하, 본 발명의 다층 도금강판의 제조방법에 대해서 상세히 설명한다. 본 발명의 다층 도금강판은 소지강판을 준비하는 단계; 상기 준비된 소지강판 상에 제1 Zn층을 형성하는 단계; 상기 제1 Zn층 상에 제2 Mg층을 형성하는 단계; 및 상기 제2 Mg층 상에 제3 Zn층을 형성하는 단계를 포함한다.
상기 소지강판을 준비하는 과정에서, 소지강판의 표면에 형성된 나노미터 수준의 얇은 산화막(스케일)을 제거하는 과정을 포함할 수 있다. 상기 산화막을 제거하기 위한 방법은 특별히 한정하지 않으며, 일례로 이온빔을 이용한 플라즈마 에칭을 통해 상기 산화막을 제거할 수 있다. 상기와 같이, 산화막이 제거된 소지강판의 표면에 도금층을 형성한다.
상기 소지강판 상에 제1 Zn층을 형성하는 방법은 전술한 바와 같이 특별히 한정하지 않고, 통상의 용융아연도금, 전가아연도금, 진공증착 등의 방법에 의해 형성될 수 있으며, 상기 제1 Zn층의 도금층 조성은 특별히 한정하지 않고, 통상적인 융융아연도금, 전기아연도금, 진공증착 방법의 Zn 도금이면 가능하다.
상기 제2 Mg층과 제3 Zn층은 각각 순수 Mg 및 Zn 금속을 이용하여 진공증착법으로 형성하는 것이 바람직하다. 이때 표면의 이물이나 자연 산화막을 플라즈마, 이온빔 등을 이용하여 제거하는 것이 바람직하다. 상기 진공증착법은 전자빔법, 스퍼터링법, 열증발법, 유도가열 증발법, 이온 플레이팅법 등이 적용될 수 있으며, 바람직하게는 생산속도 향상을 위해 고속 증착이 가능하며, 전자기 교반 효과(Electromagnetic Stirring)를 가지는 전자기 부양 유도가열 방법에 의하여 형성하는 것이 바람직하다.
상기 제2 Mg층과 제3 Zn층을 진공증착할 때, 소지강판의 온도는 50~120℃로 하는 것이 바람직하다. 상기 소지강판의 온도가 올라가면 증착되는 물질의 원자 이동이 원활해지며 물질의 확산 이동도를 증가시킬 수 있다. 소지강판의 온도가 50℃ 이상이 되면, 상기 제2 Mg층 내부로 제3 Zn층의 Zn 원자가 원활하게 확산할 수 있으나, 120℃를 초과하게 되면 확산된 Zn 원자와 제2 Mg층 내부의 Mg 원자간의 합금화가 시작되면서 결정화된 Zn-Mg 합금층이 일부 형성될 수 있다.
상기 Zn-Mg 합금층의 형성은 내식성이 대폭 증대되는 효과가 있지만, 합금화된 영역이 커질수록 취성이 높은 합금상 비율이 함께 증가하기 때문에, 가공시 도금층이 탈락되면서 도금 밀착성을 열위하게 한다. 이러한 이유에서 소지강판의 온도는 50~120℃로 하는 것이 바람직하다.
한편, 상기 제2 Mg층과 제3 Zn층을 진공증착할 때, 챔버내 진공도는 1×10-5~1×10-2 mbar로 하는 것이 바람직하다. 이렇게 진공도를 유지할 때, 박막 형성 과정에서 산화물 형성으로 인한 취성이 증가하거나 물성이 하락하는 것을 방지할 수있다.
이하, 본 발명의 실시예에 대해서 상세히 설명한다. 하기 실시예는 본 발명의 이해를 위한 것일 뿐, 본 발명을 한정하는 것은 아니다.
(실시예 1)
소지강판으로서 일반 냉연강판을 준비하고, 통상의 전기아연도금으로 제1 Zn층을 형성하였다.
이후, 진공챔버내에 장입하고, 플라즈마 전처리를 통해 표면의 이물 및 자연산화막을 제거한 후, 전자기 부양 유도 가열 증착법을 이용하여 제2 Mg층 및 제3 Zn층을 형성하였다. 각 층의 두께와 증착시의 온도는 표 1에 나타내었다. 제2 Mg 층과 제3 Zn층의 진공증착시 챔버 내부의 진공도는 약 2×10-2~9×10- 4mbar 사이를 유지하였다.
이와 같이 제조된 다층 도금강판에 대해서, 내흑변성, 도금 밀착성, 내식성 등을 평가하여 표 1에 함께 나타내었다.
이때, 내흑변성 평가는 온도 50℃ 및 상대습도 95%인 항온항습기 안에서 도금강판을 72시간 유지하기 전화 후의 색차를 육안으로 판정하였다.
○: 색상변화 없음, ×: 표면 흑화 발생
도금 밀착성은 일반적으로 사용되는 OT bending test를 이용하여 평가하여, 박리 유무를 평가하였고, 박막의 상을 XRD 분석을 통해서 분석하였다. 상기 박막의 상 분석은 도금층 구조 전체에 대한 것이며, 표 1에서 Zn+Mg의 표기는 제1 Zn층 및 제3 Zn층에서 나오는 Zn 결정상, 그리고 제2 Mg층이 비정질화되지 않아서 Mg 결정상이 동시에 분석된 것이다. 한편, Zn으로 표기된 것은 제2 Mg층이 비정질화되어 Mg의 결정상이 XRD를 통해 관찰되지 않음에 따라 제1 Zn층 및 제3 Zn층에서 나오는 Zn 결정상에서만 분석되는 것을 의미한다.
마지막으로 내식성 평가는 염수농도 5 %, 온도 35 ℃, 분무압 1 kg/㎠의 조건에서 염수분무테스트를 진행하여, 적청이 5 % 발생하는 시간을 측정하였다. 내식성 평가에 대한 결과 판정 기준은 아래와 같다.
120시간 이상: OK, 120시간 미만: NG
구분 코팅층 두께(㎛) 기판 온도 내흑변성 도금밀착성(박리 유/무) 내식성 상 분석
제1 Zn층 제2 Mg층 제3 Zn층
비교예 1 2 0.5 - - × NG Zn+Mg
비교예 2 2 1 - - × NG Zn+Mg
비교예 3 2 2 - - × NG Zn+Mg
발명예 1 2 0.5 1 80 OK Zn
발명예 2 2 1 1 80 OK Zn
발명예 3 2 1.5 1 80 OK Zn
비교예 4 2 2 1 80 OK Zn+Mg
비교예 5 2 1 0.5 80 NG Zn+Mg
발명예 4 2 1 1 80 OK Zn
발명예 5 2 1 3 80 OK Zn
비교예 6 2 1 5 80 OK Zn
발명예 6 1 1 1 80 OK Zn
발명예 7 3 1 1 80 OK Zn
비교예 7 5 1 1 80 OK Zn
발명의 조건을 만족하는 발명예 1 내지 7의 경우에는 모두 우수한 내흑변성, 도금 밀착성 및 내식성이 우수한 도금강판을 경제적으로 제조할 수 있음을 확인할 수 있었다.
비교예 1 내지 3은 제3 Zn층을 형성하기 않고, 제1 Zn층과 제2 Mg층으로 구성된 2층 구조만을 형성한 것으로서, Zn와 Mg이 단일상으로 각 층을 구성하여 내식성에 매우 취약한 특성을 보이게 되며 상부가 Mg층으로 덮여있어서 흑변 현상이 매우 심하게 흑화되는 결과를 보였다.
비교예 4는 제3 Zn층의 확산에 의한 제2 Mg층 비정질화 및 제2 Mg층 미세 영역에서의 비정질 또는 나노 크리스탈 Zn-Mg 합금화가 이루어져 내식성이 향상되긴 하지만 본 발명의 Mg층 두께를 벗어나 불필요한 코팅층 영역으로 존재하여 경제적이지 못하다.
비교예 5는 제3 Zn층의 두께가 본 발명에서 제시된 두께 이하로 코팅되어 확산가능한 Zn양의 범위가 작아짐에 따라서 제2 Mg층 내부에 확산되는 Zn양이 적고 그에 따른 Mg 및 일부 Zn-Mg 비정질화 및 나노 크리스탈 합금상에 대한 정도가 낮아지며 이에 따른 내식성이 열위한 결과를 보였다.
비교예 6은 제3 Zn층의 두께가 본 발명에서 제시된 두께 이상으로 코팅되어 내식성 향상에 효과적으로 크지 않아 비경제적이며 또한 제3 Zn층이 과도하게 두꺼워짐에 따라 도금 밀착성이 다소 열위해지는 결과를 보였다.
비교예 7은 제1 Zn층의 두께가 본 발명에서 제시된 두께 이상으로 코팅되어 본 발명에서 요구되는 특성향상에 미치는 효과가 미미하며 경제적으로 불필요한 크팅층 영역으로 존재하는 두께일 수 있다.
(실시예 2)
다음으로, 실시예 1과 동일한 조건으로 제1 Zn층, 제2 Mg층 및 제3 Zn층을 각각 1, 1, 3㎛의 두께로 제조하였다. 다만, 제2 Mg층과 제3 Zn층의 진공증착시 기판 온도를 상온에서 160℃까지 달리하여, 제3 Zn층의 Zn 확산도를 조절하여 도금강판을 제조하였다.
위와 같이 제조된 도금강판에 대하여, 내흑변성, 도금 밀착성, 내식성 및 상 분석을 실시예 1의 방법으로 평가하여, 그 결과를 아래 표 2에 나타내었다. 또한, 제2 Mg층 내부로 확산된 Zn 중량비를 제2 Mg층 단면부에 대한 TEM-EDS 점분석을 통하여 분석한 결과를 표 2에 함께 나타내었다.
구분 기판 온도 제2 Mg층의 Zn 중량비 내흑변성 도금 밀착성(박리 유무) 내식성 상 분석
비교예 8 상온 0 × NG Zn+Mg
비교예 9 30 <10 × NG Zn+Mg
발명예 8 50 20 × OK Zn
발명예 9 80 20~40 × OK Zn
발명예 10 120 30~60 × OK Zn
비교예 10 160 5~60 OK Zn+Mg2Zn11
본 발명의 조건을 만족하는 발명예 8 내지 10은 모두 우수한 내흑변성, 도금 밀착성, 내식성을 갖는 것을 확인할 수 있다.
이에 비해, 비교예 8은 별도의 가열작업 없이 제2 Zn층과 제3 Mg층 코팅시 제3 Zn층에서의 Zn 확산이 전혀 이루어지지 않음에 따라 각각의 코팅층이 개별적으로 존재하며 내식성이 매우 열위해지는 결과를 보였고, 비교예 9는 30℃로 가열하여 제3 Zn층에서의 Zn 확산 정도가 약하여 제2 Mg층 내부에 Zn양이 수% 미만으로 존재함에 따라 Mg층 역시 결정화된 Mg상이 형성이 되었으며 이에 따른 비정질화가 거의 일어나지 않음에 따라 내식성이 상대적으로 떨어지는 결과를 보여주었다.
비교예 10은 160℃로 가열하여 제3 Zn층에서의 Zn 확산이 충분히 이루어짐과 동시에 합금화가 어느 정도 발생되는 온도 영역에 들어감에 따라 제2 Mg층의 Mg과 확산된 Zn가 합금화가 어느 정도 이루어지면서 Zn-Mg 합금상이 일부 형성되었다. 이러한 Zn-Mg 합금상은 XRD 측정 결과 Mg2Zn11상으로 확인이 되었으며, 이러한 결정화가 이루어진 합금상 형성에 의해 내식성은 충분히 발현되었으나 Zn-Mg 합금상 특유의 취성이 높아짐에 따라 도금 밀착성 측면에서 일부 박리 현상이 발생되는 결과를 보여주었다.
한편, 도 3의 (a)와 (b)는 각각 발명예 8과 비교예 8의 내식성 평가 후 표면의 적청 발생을 관찰한 사진이다. 도 3에 나타난 바와 같이, 본 발명예(a)에서는 적청이 발생하지 않은 반면, 비교예(b)에서는 적청이 발생함을 알 수 있다. 또한, 도 4의 (a) 및 (b)는 각각 발명예 8과 비교예 10의 OT bending test 결과를 나타낸 것으로서, 발명예(a)에서는 도막 박리가 심하지 않으나, 비교예(b)에서는 도막 박리가 열위한 것을 알 수 있었다.

Claims (9)

  1. 소지강판;
    상기 소지강판 상에 형성된 제1 Zn층;
    상기 제1 Zn층 상에 형성된 제2 Mg층; 및
    상기 제2 Mg층 상에 형성된 제3 Zn층을 포함하고,
    상기 제2 Mg층은 비정질상인 다층구조의 도금강판.
  2. 청구항 1에 있어서,
    상기 제2 Mg층은 Zn-Mg 비정질상 및 나노 크리스탈 형태의 Zn-Mg 합금상 중 하나 이상을 포함하는 다층구조의 도금강판.
  3. 청구항 2에 있어서,
    상기 Zn-Mg 비정질상 및 나노 크리스탈 형태의 Zn-Mg 합금상에 포함된 Zn의 함량은 20~60중량%인 다층구조의 도금강판.
  4. 청구항 1에 있어서,
    상기 제1 Zn층의 두께는 1~3㎛인 다층구조의 도금강판.
  5. 청구항 1에 있어서,
    상기 제2 Mg층의 두께는 0.5~1.5㎛인 다층구조의 도금강판.
  6. 청구항 1에 있어서,
    상기 제3 Zn층의 두께는 1~3㎛인 다층구조의 도금강판.
  7. 소지강판을 준비하는 단계;
    상기 소지강판 상에 제1 Zn층을 형성하는 단계;
    상기 제1 Zn층 상에 제2 Mg층을 형성하는 단계; 및
    상기 제2 Mg층 상에 제3 Zn층을 형성하는 단계를 포함하고,
    상기 제2 Mg층 및 제3 Zn층은 진공증착법으로 형성하며, 소지강판의 온도는 50~120℃인 다층구조의 도금강판 제조방법.
  8. 청구항 7에 있어서,
    상기 제1 Zn층은 용융도금, 전기도금 및 진공증착 중에서 선택된 어느 하나의 방법으로 행하는 다층구조의 도금강판 제조방법.
  9. 청구항 7에 있어서,
    상기 제2 Mg층 및 제3 Zn층의 진공증착시 챔버의 진공도는 1×10-5~1×10-2 mbar인 다층구조의 도금강판 제조방법.
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