WO2018079146A1 - 天井搬送車 - Google Patents
天井搬送車 Download PDFInfo
- Publication number
- WO2018079146A1 WO2018079146A1 PCT/JP2017/034135 JP2017034135W WO2018079146A1 WO 2018079146 A1 WO2018079146 A1 WO 2018079146A1 JP 2017034135 W JP2017034135 W JP 2017034135W WO 2018079146 A1 WO2018079146 A1 WO 2018079146A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- main body
- shaft
- link mechanism
- body member
- buffer
- Prior art date
Links
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B66—HOISTING; LIFTING; HAULING
- B66C—CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
- B66C13/00—Other constructional features or details
- B66C13/04—Auxiliary devices for controlling movements of suspended loads, or preventing cable slack
- B66C13/06—Auxiliary devices for controlling movements of suspended loads, or preventing cable slack for minimising or preventing longitudinal or transverse swinging of loads
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67733—Overhead conveying
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/0457—Storage devices mechanical with suspended load carriers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B66—HOISTING; LIFTING; HAULING
- B66C—CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
- B66C11/00—Trolleys or crabs, e.g. operating above runways
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B66—HOISTING; LIFTING; HAULING
- B66C—CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
- B66C19/00—Cranes comprising trolleys or crabs running on fixed or movable bridges or gantries
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67712—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrate being handled substantially vertically
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67724—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations by means of a cart or a vehicule
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67751—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber vertical transfer of a single workpiece
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0297—Wafer cassette
Definitions
- One aspect of the present invention relates to a ceiling transport vehicle.
- Transport vehicles are known.
- Patent Document 1 discloses a ceiling transport vehicle in which a buffer body that is elastically deformable in a vertical direction is disposed between an elevating unit and a gripping unit. According to the ceiling conveyance vehicle of this structure, it can suppress that the vibration at the time of a driving
- the above-mentioned conventional overhead transport vehicle with a cushioning material can reduce the transmission of vibration to the article when the traveling body travels or when the elevating part moves up and down, for example, during acceleration during traveling or during curve traveling Due to the centrifugal force, roll motion is likely to occur in the elevating part.
- the roll motion generated in this manner causes the article to shake because the elevating part is tilted.
- the article may come into contact with the cover of the overhead transport vehicle or the transfer accuracy of the article may be deteriorated. Bring.
- an object of one aspect of the present invention is to provide a ceiling transport vehicle capable of suppressing the vibration of the article while reducing the vibration transmitted to the article.
- An overhead transport vehicle has a main body that can travel along a track, a gripping part that grips an article, and a lifting part that is lifted and lowered by a plurality of suspension members with respect to the main body part
- the lifting unit has a base part provided with a grip part and a support part that supports the base part so as to be movable in the vertical direction from below in the vertical direction via the vibration isolating part,
- a plurality of buffer mechanisms to which at least one suspension member is attached, and the plurality of buffer mechanisms are connected by a link mechanism, and the link mechanism includes a support portion and a base in the plurality of buffer mechanisms connected to each other It operates so that each distance between the parts may be close to each other.
- the base portion is provided so as to be movable in the vertical direction with respect to each support portion via the vibration isolating portion, so that when the main body portion travels or when the lifting portion moves up and down It is possible to suppress vibration from being transmitted to the article.
- the link mechanism operates so that the distances between the support portion and the base portion in the respective buffer mechanisms connected to each other are close to each other, so that the roll motion is applied to the base portion. Can be suppressed. For this reason, the inclination in a base part can be made small and the swing of articles
- the link mechanism may connect two buffer mechanisms arranged in a direction perpendicular to both the direction in which the main body travels and the vertical direction.
- a roll motion in a width direction (a direction perpendicular to both the direction in which the main body travels and the vertical direction) that occurs when traveling on a curve or transferring an article in a lateral direction. Can be suppressed.
- the link mechanism may connect two buffer mechanisms arranged in the direction in which the main body travels.
- the overhead transport vehicle having this configuration for example, it is possible to suppress the roll motion in the front-rear direction (the direction in which the main body travels) generated by acceleration or deceleration during travel.
- the link mechanism connects two buffer mechanisms arranged in a direction orthogonal to both the direction in which the main body travels and the vertical direction, and the main body travels. You may connect two buffer mechanisms arranged in the direction.
- the ceiling transport vehicle of this configuration for example, it is possible to suppress the roll motion in the width direction that occurs when traveling on a curve or when transferring an article in the lateral direction, and for example, before and after occurring due to acceleration or deceleration during traveling Roll movement in the direction (direction in which the main body travels) can be suppressed. Furthermore, it is possible to maintain the horizontal state by absorbing the inclination of the base portion in the state where the article is gripped or the state where the article is not gripped, which is caused by at least one of the change in the gravity center position and the tolerance of the article.
- the elevating part is suspended from the main body part by four suspension members, and one of the plurality of buffer mechanisms is rocked by the support part. It further has a swing part provided so that movement is possible, and two suspension members among four suspension members may be attached to the swing part.
- the lifting unit is suspended by the four suspension members, but the two suspension members that are not attached to the swinging unit and the lifting unit are located at two locations. It is in a state where it is suspended at substantially three locations of the connecting portion and one swinging portion connected so as to be swingable in the elevating part.
- the elevating part can be suspended in a more stable state.
- the suspension state can be maintained, and safety is improved compared to the case where the suspension member is actually suspended by three suspension members. Can do.
- FIG. 1 is a front view showing an overhead conveyance vehicle according to an embodiment.
- FIG. 2 is a side view of the overhead conveyance vehicle of FIG. 1 as viewed from the front.
- FIG. 3 is a front view of the first buffer mechanism as viewed from the left.
- FIG. 4 is a rear view of the second buffer mechanism as viewed from the right.
- FIG. 5 is a perspective view of the link mechanism.
- FIG. 6 is a perspective view of the link mechanism disposed on the back surface of the base portion.
- FIG. 7 is a perspective view of a link mechanism disposed on the back surface of the base portion.
- FIG. 1 is a front view showing a ceiling transport vehicle according to an embodiment
- FIG. 2 is a side view of the ceiling transport vehicle of FIG. 1 as viewed from the front. 1 and 2, the link mechanism 70 is not shown.
- 1 travels along a traveling rail 2 provided at a position higher than the floor, such as a ceiling of a clean room.
- the ceiling transport vehicle 1 transports, for example, a FOUP (Front Opening Unified Pod) (article) 90 as an article between a storage facility and a predetermined load port.
- FOUP Front Opening Unified Pod
- the FOUP 90 has a flange 95 that is held by the ceiling transport vehicle 1.
- the vertical direction in FIG. 1 is defined as the vertical (vertical) direction (Z-axis direction) of the ceiling transport vehicle 1.
- the depth direction in FIG. 1 is the left-right direction or the width direction (Y-axis direction) of the ceiling transport vehicle 1.
- the X axis, the Y axis, and the Z axis are orthogonal to each other.
- the overhead traveling vehicle 1 includes a travel drive unit 3, a horizontal drive unit (main body unit) 5, a rotation drive unit (main body unit) 6, an elevating drive unit (main body unit) 7, Lifting device (lifting unit) 10, holding device (gripping unit) 11, first buffer mechanism 50 (see FIG. 5), second buffer mechanism 40 (see FIG. 5), and link mechanism 70 (see FIG. 5). And have.
- the ceiling transport vehicle 1 is provided with a pair of covers 8 and 8 in the front-rear direction so as to cover the horizontal drive unit 5, the rotation drive unit 6, the lift drive unit 7, the lift device 10 and the holding device 11.
- the pair of covers 8 and 8 form a space in which the FOUP 90 is accommodated below the holding device 11 in a state where the lifting device 10 is raised to the rising end.
- the fall prevention mechanism 8A prevents the FOUP 90 held by the holding device 11 from dropping in a state where the lifting device 10 is raised to the rising end.
- the shaking suppression mechanism 8B suppresses shaking in the front-rear direction (traveling direction) and the left-right direction of the ceiling transport vehicle 1 of the FOUP 90 held by the holding device 11 during traveling.
- the traveling drive unit 3 moves the overhead conveyance vehicle 1 along the traveling rail 2.
- the travel drive unit 3 is disposed in the travel rail 2.
- the travel drive unit 3 drives a roller (not shown) that travels on the travel rail 2.
- a horizontal drive unit 5 is provided below the travel drive unit 3 via a shaft 3A.
- the horizontal drive unit 5 moves the rotation drive unit 6, the lift drive unit 7, and the lift device 10 in a direction (left-right direction) orthogonal to the extending direction of the traveling rail 2 in a horizontal plane.
- the rotation drive unit 6 rotates the elevating drive unit 7 and the elevating device 10 in a horizontal plane.
- the raising / lowering drive part 7 raises / lowers the raising / lowering apparatus 10 by winding and unwinding four belts (suspending member) 9.
- the belt 9 in the raising / lowering drive part 7 may use appropriate suspension members, such as a wire and a rope.
- the lifting device 10 in the present embodiment is provided so as to be lifted and lowered by the lifting drive unit 7, and functions as a lifting platform in the ceiling transport vehicle 1.
- the lifting device 10 includes a first buffer mechanism 50 and a second buffer mechanism 40 as a plurality of buffer mechanisms to which the four belts 9 are attached, a base unit 10A on which the holding device 11 is provided, and a cover unit that covers the base unit 10A. 10B.
- the holding device 11 holds the FOUP 90.
- the holding device 11 includes an L-shaped pair of arms 12 and 12, hands 13 and 13 fixed to the arms 12 and 12, and an opening and closing mechanism 15 that opens and closes the pair of arms 12 and 12. Yes.
- the pair of arms 12 and 12 are provided in the opening / closing mechanism 15.
- the opening / closing mechanism 15 moves the pair of arms 12 and 12 in a direction close to each other and a direction away from each other.
- the pair of arms 12 and 12 advance and retract in the front-rear direction.
- a pair of hands 13 and 13 fixed to arms 12 and 12 open and close.
- the height position of the holding device 11 is set so that the holding surface of the hand 13 is below the height of the lower surface of the flange 95 when the pair of hands 13 and 13 are in the open state. Adjusted.
- a pair of hands 13 and 13 will be in a closed state, the holding surface of hands 13 and 13 will advance below the lower surface of flange 95, and by raising and lowering lifting device 10 in this state, a pair of The flanges 95 are held (gripped) by the hands 13 and 13, and the FOUP 90 is supported.
- FIG. 3 is a front view showing a schematic configuration of the first buffer mechanism
- FIG. 4 is a front view showing a schematic configuration of the second buffer mechanism.
- illustration of a part of the first main body member 54 (second support member 54 ⁇ / b> B) and a link mechanism 70 connected to the first buffer mechanism 50 is omitted.
- 4 also omits a part of a fourth body member 46 (fourth support member 46B), which will be described later, and a link mechanism 70 connected to the second buffer mechanism 40 for convenience of explanation.
- the first buffer mechanism 50 and the second buffer mechanism 40 are mechanisms that connect the belt 9 and the lifting device 10 (see FIG. 1), and the travel drive unit 3 travels. This is a mechanism that suppresses the transmission of vibration to the FOUP 90 when the elevating device 10 moves up or down.
- the first buffer mechanism 50 is provided on the right side of the lifting device 10 in the left-right direction. Moreover, the 1st buffer mechanism 50 is arrange
- the first buffer mechanism 50 includes a connection member 51, a swinging member 53, a first main body member (supporting portion) 54, a second main body member 56, first shaft portions 57 and 57, and a first spring member ( Vibration isolator) 58, 58.
- the connection member 51 is a member attached to the belt 9.
- the swing member 53 is a member coupled to the connection member 51.
- the swing member 53 is rotatably connected to the connection member 51 via the first pin member 52.
- the first main body member 54 is a substantially U-shaped member having an upper end opened, and the bottom thereof is formed to be flat in the horizontal direction.
- the upper end of the first main body member 54 is connected to both ends of the swing member 53 by bolts 55.
- the first main body member 54 includes a first support member 54A (see FIGS. 5 and 6) and a second support member 54B (see FIGS. 5 and 6).
- the first support member 54A supports the first spring members 58, 58 from below.
- the second support member 54B is a member orthogonal to the first support member 54A.
- the second main body member 56 is a member that connects the substantially central portions of the swinging member 53 and the first main body member 54 in the front-rear direction.
- the pair of first shaft portions 57, 57 are rod-shaped members extending upward from the first main body member 54, and are disposed so as to sandwich the second main body member 56 in the front-rear direction.
- the pair of first spring members 58 and 58 are compression coil springs having a predetermined spring constant, and are inserted through the pair of first shaft portions 57 and 57, respectively.
- a base portion 10 ⁇ / b> A is disposed in contact with the upper ends of the pair of first spring members 58, 58.
- the first spring member 58 presses the base portion 10A upward on the side opposite to the gripping direction of the FOUP 90 (downward in the vertical direction).
- the first spring member 58 as a vibration isolator has a role of reducing vibration transmitted between members in contact with each other.
- the second buffer mechanism 40 is provided on the left side of the lifting device 10 in the left-right direction. As shown in FIG. 4, the second buffer mechanism 40 is disposed near the center in the front-rear direction.
- the second buffer mechanism 40 includes connection members 41, 41, a swing member (swing portion) 43, a third main body member 45, a fourth main body member (support portion) 46, and second shaft portions 47, 47. And second spring members (vibration isolation portions) 48, 48.
- connection members 41 and 41 are members to which the belts 9 and 9 are attached.
- the swing member 43 is a member that couples the pair of connection members 41, 41 and the third main body member 45.
- the pair of connection members 41, 41 and the swing member 43 are coupled so as to be rotatable in both directions, and are coupled via a pair of third pin members 42, 42.
- the swing member 43 and the third main body member 45 are connected via a fourth pin member 44.
- the fourth body member 46 is a plate member that is connected to the lower end of the third body member 45 and extends in the horizontal direction.
- the fourth body member 46 includes a third support member 46A (see FIGS. 5 and 6) and a fourth support member 46B (see FIGS. 5 and 6).
- the third support member 46A supports the second spring members 48, 48 from below.
- the fourth support member 46B is a member orthogonal to the third support member 46A.
- the pair of second shaft portions 47 and 47 are rod-like members extending upward from the fourth main body member 46, and are arranged so as to sandwich the third main body member 45 in the front-rear direction.
- the pair of second spring members 48, 48 are compression coil springs having a predetermined spring constant, and are inserted through the pair of second shaft portions 47, 47, respectively.
- a base portion 10 ⁇ / b> A is arranged in contact with the upper ends of the pair of second shaft portions 47, 47.
- the second spring member 48 presses the base portion 10A upward on the side opposite to the gripping direction of the FOUP 90 (downward in the vertical direction).
- the second spring member 48 as a vibration isolator has a role of reducing vibration transmitted between members in contact with each other.
- the link mechanism 70 has two first buffer mechanisms arranged in the left-right direction (width direction) orthogonal to both the front-rear direction (travel direction) and the up-down direction (vertical direction). 50 and the second buffer mechanism 40 are connected, and the two first buffer mechanisms 50 and 50 arranged in the front-rear direction are connected.
- the link mechanism 70 includes a distance between the first main body member 54 and the base portion 10A in the first buffer mechanism 50 and a distance between the fourth main body member 46 and the base portion 10A in the second buffer mechanism 40. Operates to be close to each other.
- the link mechanism 70 includes a distance between the first main body member 54 and the base portion 10A in the first buffer mechanism 50 disposed on the left side, and a first main body member 54 in the first buffer mechanism 50 disposed on the right side. And the distance between the base portion 10A and the base portion 10A.
- the link mechanism 70 includes a first shaft 71, a second shaft 72, a third shaft 73, a fourth shaft 74, a first bush 81, a first block 82, a second block 83, and a second bush. 84, a third bush 85, a fixing portion 86, and a connecting portion 88.
- the first shaft 71 is supported by the first bush 81 fixed to the fourth support member 46B in the second buffer mechanism 40, and extends in the front-rear direction.
- the first shaft 71 is inserted into the insertion hole 81 ⁇ / b> A of the first bush 81, and is provided so as to be rotatable with respect to the first bush 81 and slidable in the axial direction.
- the material of the first bush 81 is appropriately selected so that the first shaft 71 has a predetermined rotational property and a predetermined slidability.
- the two first shafts 71 arranged in the front-rear direction are arranged substantially in a straight line in the front-rear direction. Each first shaft 71 is arranged in a straight line with second shaft portions 47 and 47 (see FIG. 4) through which the pair of second spring members 48 and 48 are inserted in the front-rear direction. .
- the third shaft 73 is supported by the second bush 84 fixed to the second support member 54B in the first buffer mechanism 50, and extends in the front-rear direction.
- the third shaft 73 is inserted into the insertion hole 84 ⁇ / b> A of the second bush 84, and is provided so as to be rotatable with respect to the second bush 84 and slidable in the axial direction.
- the fourth shaft 74 is supported by a third bush 85 fixed to the second support member 54B in the first buffer mechanism 50, and extends in the front-rear direction.
- the fourth shaft 74 is inserted into the insertion hole 85A of the third bush 85, and is provided so as to be rotatable with respect to the third bush 85 and slidable in the axial direction.
- the material of the second bush 84 and the third bush 85 is appropriately selected so that the third shaft 73 and the fourth shaft 74 have a predetermined rotational property and a predetermined slidability.
- the third shaft 73 and the fourth shaft 74 are arranged so as to be parallel to each other with the second buffer mechanism 40 interposed therebetween. More specifically, when the front-rear direction line passing through the first shaft portions 57 and 57 through which the pair of first spring members 58 and 58 are inserted is defined as an imaginary line, the third shaft 73 and the fourth shaft 74 are The lines are symmetrical about the virtual line.
- the two third shafts 73 and 73 arranged in the front-rear direction are arranged in a straight line in the front-rear direction, and are connected via a connecting portion 88 described in detail later. Further, the two fourth shafts 74, 74 arranged in the front-rear direction are arranged in a straight line in the front-rear direction.
- the second shaft 72 is supported by the first block 82 and the second block 83 fixed to the bottom surface of the base portion 10A, and extends in the left-right direction.
- the second shaft 72 is inserted into the insertion hole 82A of the first block 82 and the insertion hole 83A of the second block 83, and is provided so as to be rotatable and slidable in the axial direction with respect to the first block 82 and the second block 83. It has been.
- One end of the second shaft 72 in the left-right direction is connected to the first shaft 71. Specifically, the end of the first shaft 71 is inserted through an insertion hole 72 ⁇ / b> A formed in the second shaft 72. The other end of the second shaft 72 in the left-right direction is connected to the third shaft 73. Specifically, the end of the third shaft 73 is inserted through an insertion hole 72 ⁇ / b> B formed in the second shaft 72.
- the second shaft 72 is connected to the fourth shaft 74 between the first block 82 and the second block 83 in the left-right direction.
- the second shaft 72 is connected to the fourth shaft 74 via a fixing portion 86 fixed to the bottom surface of the base portion 10A. The fixing portion 86 absorbs the mounting tolerance between the fourth shaft 74 and the second shaft 72.
- the third shaft 73 connected to the first buffer mechanism 50 disposed on the front side and the third shaft 73 coupled to the first buffer mechanism 50 disposed on the rear side.
- the shaft 73 is connected via a connecting portion 88.
- the connection part 88 is arrange
- the connecting portion 88 has an insertion portion 88A having an inner diameter larger than the outer diameter of the third shaft 73 disposed on the front side.
- the third shaft 73 is fixed through a support member such as resin at one place in the insertion portion 88A, for example. Thereby, the 3rd shaft 73 is provided so that the inside of 88 A of insertion parts can be moved to an up-down and left-right direction.
- the end of the fourth shaft 74 opposite to the side connected to the second shaft 72 is downward from the end connected to the second shaft 72 (the direction opposite to the arrow D4). ) Thereby, the 1st main body member 54 is pushed down below (direction opposite to arrow D5), and a pair of 1st spring members 58 and 58 are extended.
- the link mechanism 70 that connects the second buffer mechanism 40 and the first buffer mechanism 50 arranged in the left-right direction, one spring member of the second buffer mechanism 40 and the first buffer mechanism 50 contracts or extends. If this is the case, the second shaft 72 follows the first block 82 and the second block 83 fixed to the bottom surface of the base portion 10 ⁇ / b> A and rotates to follow the other of the second buffer mechanism 40 and the first buffer mechanism 50. Shrink or stretch the spring member. That is, the link mechanism 70 includes the distance between the base portion 10A and the fourth body member 46 in the second buffer mechanism 40 and the first buffer mechanism 50 that are connected to each other, and the distance between the base portion 10A and the first body member 54. Between the base portion 10A and the fourth body member 46 in the second buffer mechanism 40 and the first buffer mechanism 50 that are connected to each other, and the base portion 10A and the first body member. It operates so that the distance to 54 is close to each other.
- the link mechanism 70 is between the distance between the base portion 10A and the fourth body member 46 and the distance between the base portion 10A and the first body member 54 in the second buffer mechanism 40 and the first buffer mechanism 50 that are connected to each other.
- the second shaft 72 generates a stress (torsional stress) when a difference occurs between them.
- the reaction force against the stress generated in the second shaft 72 is the distance between the base portion 10A and the fourth main body member 46 in the second buffer mechanism 40 and the first buffer mechanism 50 that are connected to each other, the base portion 10A, and the first This acts as a force for bringing the distance from the main body member 54 close to each other.
- the link mechanism 70 that connects the first buffer mechanisms 50 arranged in the front-rear direction is connected if one of the first spring members 58, 58 of the first buffer mechanism 50 contracts or extends.
- the movement of one third shaft 73 follows the movement of one third shaft 73 with the portion 88 as a fulcrum, and the first spring members 58, 58 of the other first buffer mechanism 50 are contracted or extended. That is, the link mechanism 70 operates so that the distances between the base portion 10A and the first main body members 54 and 54 in the first buffer mechanisms 50 connected to each other are close to each other.
- the link mechanism 70 includes a third shaft 73 that generates stress when a difference occurs between the distances between the base portion 10A and the first main body member 54 in the first buffer mechanisms 50 connected to each other. Yes.
- the reaction force against the stress generated in the third shaft 73 acts as a force that brings the distances between the base portion 10A and the first main body member 54 of the first buffer mechanisms 50 connected to each other closer to each other.
- the base portion 10A is provided so as to be movable in the vertical direction with respect to the first main body member 54 and the fourth main body member 46 via the first spring member 58 and the second spring member 48. Therefore, it is possible to suppress the transmission of vibration to the article when the traveling drive unit 3 travels or when the lifting device 10 moves up and down.
- the link mechanism 70 is the distance between the base part 10A and the 4th main body member 46 in the 2nd buffer mechanism 40 and the 1st buffer mechanism 50 which are mutually connected, and a base part.
- the link mechanism 70 connects the two first buffer mechanisms 50 and the second buffer mechanisms 40 arranged in the left-right direction (width direction) orthogonal to both the front-rear direction and the vertical direction in which the travel drive unit 3 travels. Further, it is possible to suppress the roll motion in the width direction that occurs when traveling on a curve or when transferring the FOUP 90 in the lateral direction. Moreover, since the link mechanism 70 connects the two first buffer mechanisms 50 arranged in the direction in which the travel drive unit 3 travels, the roll motion in the front-rear direction generated by acceleration or deceleration during travel can be suppressed. .
- the lifting device 10 is suspended by the four belts 9, but the two belts 9 attached to the first buffer mechanism 50 and the lifting device 10 are the two. It is in a state where it is suspended at substantially three locations of the connection portion of the location and the fourth pin member 44 at one location that is pivotably coupled in the second buffer mechanism 40. Thereby, the same effect as the case of being suspended by the three belts 9 can be obtained, and the lifting device 10 can be suspended in a more stable state. Furthermore, even when one belt 9 is cut for some reason, the suspended state can be maintained, and safety can be improved as compared with the case where the belt 9 is actually suspended. .
- the first buffer mechanism 50 and the second buffer mechanism 40 arranged in the left-right direction are connected by the link mechanism 70, and the first buffer mechanisms 50 arranged in the front-rear direction are connected by the link mechanism 70.
- the overhead conveyance vehicle of the structure by which only the 1st buffer mechanism 50 and the 2nd buffer mechanism 40 which are arranged in the left-right direction are connected by the link mechanism 70 may be sufficient. Even in this case, it is possible to suppress the roll motion in the width direction that occurs when traveling on a curve or when transferring the FOUP in the lateral direction.
- the ceiling conveyance vehicle of the structure by which only the 1st buffer mechanism 50 arranged in the front-back direction is connected by the link mechanism 70 may be sufficient. Even in this case, the roll motion in the front-rear direction generated by acceleration or deceleration during traveling can be suppressed.
- the first buffer mechanism 50 has been described with reference to the example in which the third shaft 73 and the fourth shaft 74 are fixed.
- the third shaft 73 is fixed. It may be configured. Note that, as in the present embodiment, when the shaft that is a part of the link mechanism 70 fixed to the first main body member 54 does not coincide with the arrangement direction of the first spring members 58 and 58 (when not on the imaginary line described above) ), It is easier to maintain the balance in the horizontal direction by the configuration in which the third shaft 73 and the fourth shaft 74 are fixed by the two shafts. Thereby, the shaking of FOUP90 can be suppressed effectively.
- first spring member 58 and the second spring member 48 as the vibration isolating portion are disposed almost directly below the position of the hanging portion by the belt 9 .
- One aspect is not limited to this.
- the position of the hanging part by the belt 9 and the position of the vibration isolating part may be shifted from each other.
- a gel-like elastic body formed of silicone resin or the like may be disposed. Even in this case, vibrations and impacts can be absorbed as in the case where the first spring member 58 or the second spring member 48 is disposed.
- the lifting device 10 has been described with an example in which the lifting device 10 is suspended by the four belts 9, but a configuration in which the lifting device 10 is suspended by the three belts 9 may be employed.
- the belt 9 is attached to three locations of the connection members 51 and 51 (see FIG. 3) and the fourth pin member 44 (see FIG. 4).
- the first spring member 58 is inserted through the first shaft portion 57 as the shaft member, or the second spring member 48 is inserted through the second shaft portion 47 as the shaft member.
- the base portion 10A is arranged to be movable in the vertical direction with respect to the first main body member 54 or the fourth main body member 46 as the support portion.
- one aspect of the present invention is limited thereto. Not. For example, you may employ
Abstract
Description
Claims (5)
- 軌道に沿って走行可能な本体部と、物品を把持する把持部を有し、前記本体部に対し複数の吊持部材によって昇降される昇降部と、を備えた天井搬送車であって、
前記昇降部は、
前記把持部が設けられるベース部と、
防振部を介して前記ベース部を鉛直方向下方から鉛直方向に移動可能に支持する支持部を有し、少なくとも一つの前記吊持部材が取り付けられる、複数の緩衝機構と、を備え、
前記複数の緩衝機構はリンク機構によって連結されており、
前記リンク機構は、互いに連結されている前記複数の緩衝機構における前記支持部と前記ベース部との間の各距離同士を互いに近づけるように動作する、天井搬送車。 - 前記リンク機構は、前記本体部が走行する方向及び鉛直方向の両方に直交する方向に配列された二つの前記緩衝機構同士を連結する、請求項1記載の天井搬送車。
- 前記リンク機構は、前記本体部が走行する方向に配列された二つの前記緩衝機構同士を連結する、請求項1又は2記載の天井搬送車。
- 前記リンク機構は、前記本体部が走行する方向及び鉛直方向の両方に直交する方向に配列された二つの前記緩衝機構同士を連結すると共に、前記本体部が走行する方向に配列された二つの前記緩衝機構同士を連結する、請求項1~3の何れか一項記載の天井搬送車。
- 前記昇降部は、前記本体部に対して四本の前記吊持部材によって吊り下げられており、
前記複数の緩衝機構のうち一つの緩衝機構は、前記支持部に揺動可能に設けられる揺動部を更に有し、
前記四本の吊持部材のうち二本の吊持部材は、前記揺動部に取り付けられている、請求項1~4の何れか一項記載の天井搬送車。
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US16/342,538 US10822205B2 (en) | 2016-10-25 | 2017-09-21 | Overhead transport vehicle |
KR1020197011477A KR102165435B1 (ko) | 2016-10-25 | 2017-09-21 | 천장 반송차 |
EP17863648.6A EP3533728B1 (en) | 2016-10-25 | 2017-09-21 | Overhead transport vehicle |
CN201780063631.XA CN109890730B (zh) | 2016-10-25 | 2017-09-21 | 空中搬送车 |
JP2018547200A JP6717384B2 (ja) | 2016-10-25 | 2017-09-21 | 天井搬送車 |
SG11201903299UA SG11201903299UA (en) | 2016-10-25 | 2017-09-21 | Overhead transport vehicle |
IL265984A IL265984B (en) | 2016-10-25 | 2019-04-11 | Overhead transport vehicle |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016-208748 | 2016-10-25 | ||
JP2016208748 | 2016-10-25 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2018079146A1 true WO2018079146A1 (ja) | 2018-05-03 |
Family
ID=62024777
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2017/034135 WO2018079146A1 (ja) | 2016-10-25 | 2017-09-21 | 天井搬送車 |
Country Status (9)
Country | Link |
---|---|
US (1) | US10822205B2 (ja) |
EP (1) | EP3533728B1 (ja) |
JP (1) | JP6717384B2 (ja) |
KR (1) | KR102165435B1 (ja) |
CN (1) | CN109890730B (ja) |
IL (1) | IL265984B (ja) |
SG (1) | SG11201903299UA (ja) |
TW (1) | TWI716647B (ja) |
WO (1) | WO2018079146A1 (ja) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2019218180A (ja) * | 2018-06-19 | 2019-12-26 | 株式会社ダイフク | 物品搬送体 |
WO2020174809A1 (ja) | 2019-02-25 | 2020-09-03 | 村田機械株式会社 | 天井搬送車 |
WO2020230440A1 (ja) * | 2019-05-13 | 2020-11-19 | 村田機械株式会社 | 天井搬送車 |
WO2021049203A1 (ja) * | 2019-09-13 | 2021-03-18 | 村田機械株式会社 | 天井搬送車 |
JP2021075388A (ja) * | 2019-11-13 | 2021-05-20 | 株式会社ダイフク | 物品昇降装置 |
WO2022102280A1 (ja) | 2020-11-10 | 2022-05-19 | 村田機械株式会社 | 天井搬送車 |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6881486B2 (ja) * | 2019-02-27 | 2021-06-02 | 村田機械株式会社 | 搬送車 |
CN111863681A (zh) * | 2019-04-26 | 2020-10-30 | 台湾积体电路制造股份有限公司 | 搬运装置及其应用的搬运系统及搬运系统的预测保养方法 |
JP7248147B2 (ja) * | 2019-11-20 | 2023-03-29 | 村田機械株式会社 | 天井搬送車 |
CN115215054A (zh) * | 2022-07-28 | 2022-10-21 | 杭州明度智能科技有限公司 | 用于货物码放的装载设备 |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0192396U (ja) * | 1987-12-07 | 1989-06-16 | ||
JP2001163447A (ja) * | 1999-12-10 | 2001-06-19 | Murata Mach Ltd | 移載装置とこれを用いた無人搬送車 |
JP2005194009A (ja) * | 2004-01-05 | 2005-07-21 | Asyst Shinko Inc | 懸垂型搬送台車 |
JP2006008354A (ja) * | 2004-06-28 | 2006-01-12 | Murata Mach Ltd | 天井走行車 |
JP2006008355A (ja) * | 2004-06-28 | 2006-01-12 | Murata Mach Ltd | 天井走行車 |
JP2009176765A (ja) * | 2008-01-21 | 2009-08-06 | Asyst Technologies Japan Inc | 被搬送物及び防振機構 |
JP2016094263A (ja) | 2014-11-12 | 2016-05-26 | 株式会社ダイフク | 物品搬送車 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0840510A (ja) * | 1994-08-01 | 1996-02-13 | Murata Mach Ltd | 昇降台吊持装置 |
JP3749289B2 (ja) * | 1995-09-19 | 2006-02-22 | タイコエレクトロニクスアンプ株式会社 | 電気コネクタ |
CN102026858B (zh) * | 2008-05-22 | 2013-06-26 | 村田机械株式会社 | 天车 |
KR20120003368A (ko) * | 2010-07-02 | 2012-01-10 | 무라텍 오토메이션 가부시키가이샤 | 천정 반송차의 그리퍼 장치 및 천정 반송차 |
CN102642697B (zh) * | 2012-05-09 | 2014-03-12 | 四川省原子能研究院 | 积放式悬挂输送机人字轨推头桥 |
WO2015052972A1 (ja) * | 2013-10-07 | 2015-04-16 | 村田機械株式会社 | グリッパを備える搬送装置とグリッパの制振方法 |
CN204568658U (zh) * | 2015-04-17 | 2015-08-19 | 南通迅翔自动化设备有限公司 | 一种重型积放式悬挂输送装置 |
JP6344410B2 (ja) * | 2016-02-19 | 2018-06-20 | 村田機械株式会社 | 天井搬送車 |
-
2017
- 2017-09-21 JP JP2018547200A patent/JP6717384B2/ja active Active
- 2017-09-21 CN CN201780063631.XA patent/CN109890730B/zh active Active
- 2017-09-21 WO PCT/JP2017/034135 patent/WO2018079146A1/ja unknown
- 2017-09-21 KR KR1020197011477A patent/KR102165435B1/ko active IP Right Grant
- 2017-09-21 EP EP17863648.6A patent/EP3533728B1/en active Active
- 2017-09-21 US US16/342,538 patent/US10822205B2/en active Active
- 2017-09-21 SG SG11201903299UA patent/SG11201903299UA/en unknown
- 2017-10-23 TW TW106136298A patent/TWI716647B/zh active
-
2019
- 2019-04-11 IL IL265984A patent/IL265984B/en unknown
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0192396U (ja) * | 1987-12-07 | 1989-06-16 | ||
JP2001163447A (ja) * | 1999-12-10 | 2001-06-19 | Murata Mach Ltd | 移載装置とこれを用いた無人搬送車 |
JP2005194009A (ja) * | 2004-01-05 | 2005-07-21 | Asyst Shinko Inc | 懸垂型搬送台車 |
JP2006008354A (ja) * | 2004-06-28 | 2006-01-12 | Murata Mach Ltd | 天井走行車 |
JP2006008355A (ja) * | 2004-06-28 | 2006-01-12 | Murata Mach Ltd | 天井走行車 |
JP2009176765A (ja) * | 2008-01-21 | 2009-08-06 | Asyst Technologies Japan Inc | 被搬送物及び防振機構 |
JP2016094263A (ja) | 2014-11-12 | 2016-05-26 | 株式会社ダイフク | 物品搬送車 |
Non-Patent Citations (1)
Title |
---|
See also references of EP3533728A4 |
Cited By (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110615241A (zh) * | 2018-06-19 | 2019-12-27 | 株式会社大福 | 物品输送体 |
JP2019218180A (ja) * | 2018-06-19 | 2019-12-26 | 株式会社ダイフク | 物品搬送体 |
WO2020174809A1 (ja) | 2019-02-25 | 2020-09-03 | 村田機械株式会社 | 天井搬送車 |
US11961751B2 (en) | 2019-02-25 | 2024-04-16 | Murata Machinery, Ltd. | Ceiling transport vehicle |
TWI816982B (zh) * | 2019-02-25 | 2023-10-01 | 日商村田機械股份有限公司 | 高架搬送車 |
JP7226518B2 (ja) | 2019-02-25 | 2023-02-21 | 村田機械株式会社 | 天井搬送車 |
CN113439063A (zh) * | 2019-02-25 | 2021-09-24 | 村田机械株式会社 | 空中搬送车 |
JPWO2020174809A1 (ja) * | 2019-02-25 | 2021-12-23 | 村田機械株式会社 | 天井搬送車 |
JP7111255B2 (ja) | 2019-05-13 | 2022-08-02 | 村田機械株式会社 | 天井搬送車 |
WO2020230440A1 (ja) * | 2019-05-13 | 2020-11-19 | 村田機械株式会社 | 天井搬送車 |
JPWO2020230440A1 (ja) * | 2019-05-13 | 2020-11-19 | ||
CN114364620A (zh) * | 2019-09-13 | 2022-04-15 | 村田机械株式会社 | 空中搬送车 |
JP7276474B2 (ja) | 2019-09-13 | 2023-05-18 | 村田機械株式会社 | 天井搬送車 |
CN114364620B (zh) * | 2019-09-13 | 2023-06-16 | 村田机械株式会社 | 空中搬送车 |
JPWO2021049203A1 (ja) * | 2019-09-13 | 2021-03-18 | ||
WO2021049203A1 (ja) * | 2019-09-13 | 2021-03-18 | 村田機械株式会社 | 天井搬送車 |
JP2021075388A (ja) * | 2019-11-13 | 2021-05-20 | 株式会社ダイフク | 物品昇降装置 |
JP7238736B2 (ja) | 2019-11-13 | 2023-03-14 | 株式会社ダイフク | 物品昇降装置 |
WO2022102280A1 (ja) | 2020-11-10 | 2022-05-19 | 村田機械株式会社 | 天井搬送車 |
KR20230078765A (ko) | 2020-11-10 | 2023-06-02 | 무라다기카이가부시끼가이샤 | 천장 반송차 |
JP7323080B2 (ja) | 2020-11-10 | 2023-08-08 | 村田機械株式会社 | 天井搬送車 |
Also Published As
Publication number | Publication date |
---|---|
US20190241406A1 (en) | 2019-08-08 |
TW201815638A (zh) | 2018-05-01 |
KR102165435B1 (ko) | 2020-10-14 |
US10822205B2 (en) | 2020-11-03 |
TWI716647B (zh) | 2021-01-21 |
JPWO2018079146A1 (ja) | 2019-08-08 |
IL265984A (en) | 2019-06-30 |
EP3533728B1 (en) | 2022-02-09 |
IL265984B (en) | 2022-06-01 |
SG11201903299UA (en) | 2019-05-30 |
CN109890730B (zh) | 2020-12-08 |
KR20190051055A (ko) | 2019-05-14 |
JP6717384B2 (ja) | 2020-07-01 |
CN109890730A (zh) | 2019-06-14 |
EP3533728A1 (en) | 2019-09-04 |
EP3533728A4 (en) | 2020-05-27 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
WO2018079146A1 (ja) | 天井搬送車 | |
JP6344410B2 (ja) | 天井搬送車 | |
JP7226518B2 (ja) | 天井搬送車 | |
WO2022102280A1 (ja) | 天井搬送車 | |
WO2023013172A1 (ja) | 天井搬送車 | |
WO2021049203A1 (ja) | 天井搬送車 | |
WO2023281827A1 (ja) | 天井搬送車 | |
WO2023013173A1 (ja) | 天井搬送車 | |
TWI827842B (zh) | 高架搬送車 | |
TW202227353A (zh) | 物品搬送車 | |
JP2023136803A (ja) | 天井搬送車 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 17863648 Country of ref document: EP Kind code of ref document: A1 |
|
ENP | Entry into the national phase |
Ref document number: 2018547200 Country of ref document: JP Kind code of ref document: A |
|
ENP | Entry into the national phase |
Ref document number: 20197011477 Country of ref document: KR Kind code of ref document: A |
|
NENP | Non-entry into the national phase |
Ref country code: DE |
|
ENP | Entry into the national phase |
Ref document number: 2017863648 Country of ref document: EP Effective date: 20190527 |