JP7248147B2 - 天井搬送車 - Google Patents
天井搬送車 Download PDFInfo
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- JP7248147B2 JP7248147B2 JP2021558185A JP2021558185A JP7248147B2 JP 7248147 B2 JP7248147 B2 JP 7248147B2 JP 2021558185 A JP2021558185 A JP 2021558185A JP 2021558185 A JP2021558185 A JP 2021558185A JP 7248147 B2 JP7248147 B2 JP 7248147B2
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- 238000001514 detection method Methods 0.000 claims description 7
- 230000007246 mechanism Effects 0.000 description 115
- 230000032258 transport Effects 0.000 description 38
- 230000004048 modification Effects 0.000 description 10
- 238000012986 modification Methods 0.000 description 10
- 238000013016 damping Methods 0.000 description 4
- 230000003213 activating effect Effects 0.000 description 2
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000035939 shock Effects 0.000 description 2
- 230000008719 thickening Effects 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
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- 239000000463 material Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000003381 stabilizer Substances 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67736—Loading to or unloading from a conveyor
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67733—Overhead conveying
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/0457—Storage devices mechanical with suspended load carriers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B66—HOISTING; LIFTING; HAULING
- B66C—CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
- B66C11/00—Trolleys or crabs, e.g. operating above runways
- B66C11/02—Trolleys or crabs, e.g. operating above runways with operating gear or operator's cabin suspended, or laterally offset, from runway or track
- B66C11/04—Underhung trolleys
- B66C11/06—Underhung trolleys running on monorails
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B66—HOISTING; LIFTING; HAULING
- B66C—CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
- B66C13/00—Other constructional features or details
- B66C13/04—Auxiliary devices for controlling movements of suspended loads, or preventing cable slack
- B66C13/08—Auxiliary devices for controlling movements of suspended loads, or preventing cable slack for depositing loads in desired attitudes or positions
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B66—HOISTING; LIFTING; HAULING
- B66C—CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
- B66C13/00—Other constructional features or details
- B66C13/04—Auxiliary devices for controlling movements of suspended loads, or preventing cable slack
- B66C13/08—Auxiliary devices for controlling movements of suspended loads, or preventing cable slack for depositing loads in desired attitudes or positions
- B66C13/085—Auxiliary devices for controlling movements of suspended loads, or preventing cable slack for depositing loads in desired attitudes or positions electrical
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67253—Process monitoring, e.g. flow or thickness monitoring
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/6773—Conveying cassettes, containers or carriers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0297—Wafer cassette
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Carriers, Traveling Bodies, And Overhead Traveling Cranes (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Description
上記実施形態の天井搬送車1において、ベルトBの一端を昇降方向に移動させるために少なくとも一つの第二アイドラローラ65Bの位置を移動させる機能を有する直動機構67に代えて、同様の機能を有するカム機構(アクチュエータ)167を設けてもよい。
上記実施形態の天井搬送車1では、少なくとも一つの第二アイドラローラ65Bの位置を移動させることにより、ベルトBの一端を昇降方向に移動させる例を挙げて説明したが、第二アイドラローラ65Bに代えて第一アイドラローラ65Aの位置を移動させることにより、ベルトBの一端を昇降方向に移動させる構成としてもよい。
Claims (6)
- 軌道に沿って走行する走行部に対し、物品を把持する把持部を有する昇降部を複数の吊持部材によって昇降させるようにした天井搬送車であって、
一の巻取駆動部によって駆動され、前記複数の吊持部材の巻き取り及び繰り出しを行うことにより、前記昇降部を昇降させる巻取ドラムと、
前記巻取ドラムから繰り出される前記吊持部材が巻き掛けられる少なくとも一つの案内ローラと、
前記走行部に設けられ、前記巻取ドラム及び前記案内ローラを支持する本体フレームと、
前記吊持部材の前記昇降部への接続部分が昇降方向に移動するように、少なくとも一つの前記案内ローラの位置を移動させるアクチュエータと、を備える、天井搬送車。 - 前記複数の吊持部材は、前記昇降部の三点を吊り下げるように設けられており、
前記アクチュエータは、前記三点のうち二点を吊り下げる前記吊持部材が巻き掛けられる前記案内ローラの位置を移動させる、請求項1記載の天井搬送車。 - 前記昇降部は、接続部材を介して四本の前記吊持部材によって吊り下げられており、
前記四本のうち二本の前記吊持部材は、前記昇降部に対して揺動可能に設けられた一の揺動部に接続されており、
前記四本のうち残りの二本の前記吊持部材のそれぞれは、前記昇降部に接続されている、請求項2記載の天井搬送車。 - 前記昇降部を水平方向に移動させる水平移動部と、
前記水平移動部による前記昇降部の移動時に生じる前記水平移動部の撓み量に基づいて、前記アクチュエータによる前記案内ローラの移動量を制御する第一制御部と、を更に備える、請求項1~3の何れか一項記載の天井搬送車。 - 前記昇降部の水平方向に対する傾きを取得する傾き検出部と、
前記傾き検出部によって取得される傾きが所定値となるように前記アクチュエータを制御する第二制御部と、を更に備える、請求項1~4の何れか一項記載の天井搬送車。 - 前記天井搬送車との間で前記物品の受け渡しが行われる移載部ごとの傾きを記憶する記憶部と、
前記昇降部における傾きが、前記物品を載置しようとする前記移載部における前記傾きと略同一となるように前記アクチュエータを制御する第三制御部と、を更に備える、請求項1~5の何れか一項記載の天井搬送車。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019209950 | 2019-11-20 | ||
JP2019209950 | 2019-11-20 | ||
PCT/JP2020/034895 WO2021100297A1 (ja) | 2019-11-20 | 2020-09-15 | 天井搬送車 |
Publications (3)
Publication Number | Publication Date |
---|---|
JPWO2021100297A1 JPWO2021100297A1 (ja) | 2021-05-27 |
JPWO2021100297A5 JPWO2021100297A5 (ja) | 2023-01-23 |
JP7248147B2 true JP7248147B2 (ja) | 2023-03-29 |
Family
ID=75981636
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2021558185A Active JP7248147B2 (ja) | 2019-11-20 | 2020-09-15 | 天井搬送車 |
Country Status (8)
Country | Link |
---|---|
US (1) | US20220402731A1 (ja) |
EP (1) | EP4063297A4 (ja) |
JP (1) | JP7248147B2 (ja) |
KR (1) | KR20220100670A (ja) |
CN (1) | CN114728743B (ja) |
IL (1) | IL293002A (ja) |
TW (1) | TWI830966B (ja) |
WO (1) | WO2021100297A1 (ja) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP4249405A1 (en) * | 2020-11-18 | 2023-09-27 | Murata Machinery, Ltd. | Transport vehicle system |
JP7544278B2 (ja) | 2021-07-08 | 2024-09-03 | 村田機械株式会社 | 天井搬送車 |
WO2023079882A1 (ja) * | 2021-11-05 | 2023-05-11 | 村田機械株式会社 | 天井搬送車 |
CN118366904B (zh) * | 2024-06-19 | 2024-08-30 | 华芯智上半导体设备(上海)有限公司 | 空中搬运系统 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5693686B2 (ja) | 2013-09-09 | 2015-04-01 | 三菱電機株式会社 | 回転電機 |
WO2018179369A1 (ja) | 2017-03-31 | 2018-10-04 | 平田機工株式会社 | 搬送装置 |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL7101224A (ja) * | 1971-01-29 | 1972-08-01 | ||
JPS6042155B2 (ja) * | 1979-12-24 | 1985-09-20 | 三井造船株式会社 | クレ−ンの吊荷振れ制動装置 |
US5819962A (en) * | 1993-03-05 | 1998-10-13 | Mitsubishi Jukogyo Kabushiki Kaisha | Apparatus for stopping the oscillation of hoisted cargo |
KR100314143B1 (ko) * | 1995-08-30 | 2001-12-28 | 튜보 린타마키, 타피오 하카카리 | 크레인의 로드와 로딩부 제어 장치 및 제어 방법 |
AU4275497A (en) * | 1996-11-07 | 1998-05-14 | Ishikawajima-Harima Jukogyo Kabushiki Kaisha | Container crane |
JPH10194410A (ja) * | 1997-01-09 | 1998-07-28 | Toyota Autom Loom Works Ltd | 搬送台車における昇降ベルトの巻取構造及び搬送台車 |
WO2001005696A1 (en) * | 1999-07-15 | 2001-01-25 | Gimetsi Oy | System and method for controlling the movements of container handling device |
JP2006008355A (ja) * | 2004-06-28 | 2006-01-12 | Murata Mach Ltd | 天井走行車 |
JP2013035657A (ja) * | 2011-08-08 | 2013-02-21 | Murata Machinery Ltd | 移動装置 |
JP6641926B2 (ja) * | 2015-11-26 | 2020-02-05 | 株式会社ダイフク | 物品搬送設備 |
JP6344410B2 (ja) * | 2016-02-19 | 2018-06-20 | 村田機械株式会社 | 天井搬送車 |
JP6617832B2 (ja) * | 2016-05-20 | 2019-12-11 | 村田機械株式会社 | 搬送車及び搬送方法 |
CN109890730B (zh) * | 2016-10-25 | 2020-12-08 | 村田机械株式会社 | 空中搬送车 |
US11084505B2 (en) * | 2017-02-06 | 2021-08-10 | Murata Machinery, Ltd. | Overhead conveyance vehicle |
JP6844715B2 (ja) * | 2017-11-02 | 2021-03-17 | 村田機械株式会社 | 天井搬送車システム及び天井搬送車システムでの物品の一時保管方法 |
KR20230097158A (ko) * | 2020-11-18 | 2023-06-30 | 무라다기카이가부시끼가이샤 | 천장 반송차 및 반송차 시스템 |
-
2020
- 2020-09-15 KR KR1020227020135A patent/KR20220100670A/ko not_active Application Discontinuation
- 2020-09-15 US US17/777,404 patent/US20220402731A1/en active Pending
- 2020-09-15 JP JP2021558185A patent/JP7248147B2/ja active Active
- 2020-09-15 CN CN202080079179.8A patent/CN114728743B/zh active Active
- 2020-09-15 EP EP20890145.4A patent/EP4063297A4/en active Pending
- 2020-09-15 WO PCT/JP2020/034895 patent/WO2021100297A1/ja unknown
- 2020-11-09 TW TW109138958A patent/TWI830966B/zh active
-
2022
- 2022-05-15 IL IL293002A patent/IL293002A/en unknown
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5693686B2 (ja) | 2013-09-09 | 2015-04-01 | 三菱電機株式会社 | 回転電機 |
WO2018179369A1 (ja) | 2017-03-31 | 2018-10-04 | 平田機工株式会社 | 搬送装置 |
Also Published As
Publication number | Publication date |
---|---|
JPWO2021100297A1 (ja) | 2021-05-27 |
IL293002A (en) | 2022-07-01 |
TW202128528A (zh) | 2021-08-01 |
CN114728743B (zh) | 2024-03-19 |
WO2021100297A1 (ja) | 2021-05-27 |
US20220402731A1 (en) | 2022-12-22 |
EP4063297A1 (en) | 2022-09-28 |
EP4063297A4 (en) | 2023-12-20 |
TWI830966B (zh) | 2024-02-01 |
KR20220100670A (ko) | 2022-07-15 |
CN114728743A (zh) | 2022-07-08 |
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