JP7323080B2 - 天井搬送車 - Google Patents
天井搬送車 Download PDFInfo
- Publication number
- JP7323080B2 JP7323080B2 JP2022561321A JP2022561321A JP7323080B2 JP 7323080 B2 JP7323080 B2 JP 7323080B2 JP 2022561321 A JP2022561321 A JP 2022561321A JP 2022561321 A JP2022561321 A JP 2022561321A JP 7323080 B2 JP7323080 B2 JP 7323080B2
- Authority
- JP
- Japan
- Prior art keywords
- support
- support portion
- shaft
- base portion
- base
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 230000007246 mechanism Effects 0.000 claims description 36
- 230000033001 locomotion Effects 0.000 claims description 13
- 239000000725 suspension Substances 0.000 claims description 7
- 230000032258 transport Effects 0.000 description 17
- 230000003028 elevating effect Effects 0.000 description 6
- 238000003780 insertion Methods 0.000 description 6
- 230000037431 insertion Effects 0.000 description 6
- 230000003139 buffering effect Effects 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 238000005452 bending Methods 0.000 description 2
- 238000013016 damping Methods 0.000 description 2
- 230000001965 increasing effect Effects 0.000 description 2
- 230000008901 benefit Effects 0.000 description 1
- 230000033228 biological regulation Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 229920002050 silicone resin Polymers 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Images
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/0457—Storage devices mechanical with suspended load carriers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B61—RAILWAYS
- B61B—RAILWAY SYSTEMS; EQUIPMENT THEREFOR NOT OTHERWISE PROVIDED FOR
- B61B3/00—Elevated railway systems with suspended vehicles
- B61B3/02—Elevated railway systems with suspended vehicles with self-propelled vehicles
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67733—Overhead conveying
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/6773—Conveying cassettes, containers or carriers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0297—Wafer cassette
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Transportation (AREA)
- Vibration Prevention Devices (AREA)
- Carriers, Traveling Bodies, And Overhead Traveling Cranes (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Warehouses Or Storage Devices (AREA)
- Vehicle Step Arrangements And Article Storage (AREA)
- Harvester Elements (AREA)
Description
Claims (4)
- 軌道に沿って走行可能な本体部と、物品を把持する把持部を有すると共に前記本体部に対して吊持部材によって昇降される昇降部と、を備えた天井搬送車であって、
前記昇降部は、
前記把持部が設けられるベース部と、
鉛直方向下方から前記ベース部を鉛直方向に移動可能に支持する第一緩衝部を有し、鉛直方向から見た平面視において前記本体部の走行方向に直交する幅方向の一方において前記吊持部材に接続される第一支持部と、
鉛直方向下方から前記ベース部を鉛直方向に移動可能に支持する第二緩衝部を有し、前記本体部の前記幅方向の他方において前記吊持部材に接続される第二支持部と、
前記第一支持部と前記第二支持部とを連結すると共に、鉛直方向における前記第一支持部と前記ベース部との間の第一距離と、鉛直方向における前記第二支持部と前記ベース部との間の第二距離とを互いに近づけるように動作するリンク機構と、を備え、
前記リンク機構は、前記第一支持部及び前記第二支持部に対して前記ベース部の前記走行方向における相対移動を可能にする第三緩衝部、及び前記第一支持部と前記第二支持部とに対して前記ベース部の前記幅方向における相対移動を可能にする第四緩衝部の少なくとも一方を有している、天井搬送車。 - 前記リンク機構は、前記第三緩衝部を有している、請求項1記載の天井搬送車。
- 前記リンク機構は、前記第三緩衝部及び前記第四緩衝部の両方を有している、請求項1又は2記載の天井搬送車。
- 前記第三緩衝部又は前記第四緩衝部は、弾性部材を含んで形成されている、請求項1~3の何れか一項記載の天井搬送車。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2020187426 | 2020-11-10 | ||
JP2020187426 | 2020-11-10 | ||
PCT/JP2021/036619 WO2022102280A1 (ja) | 2020-11-10 | 2021-10-04 | 天井搬送車 |
Publications (3)
Publication Number | Publication Date |
---|---|
JPWO2022102280A1 JPWO2022102280A1 (ja) | 2022-05-19 |
JPWO2022102280A5 JPWO2022102280A5 (ja) | 2023-05-15 |
JP7323080B2 true JP7323080B2 (ja) | 2023-08-08 |
Family
ID=81601111
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2022561321A Active JP7323080B2 (ja) | 2020-11-10 | 2021-10-04 | 天井搬送車 |
Country Status (8)
Country | Link |
---|---|
US (1) | US20240002148A1 (ja) |
EP (1) | EP4245631A1 (ja) |
JP (1) | JP7323080B2 (ja) |
KR (1) | KR20230078765A (ja) |
CN (1) | CN116368054A (ja) |
IL (1) | IL302545A (ja) |
TW (1) | TW202225060A (ja) |
WO (1) | WO2022102280A1 (ja) |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009176765A (ja) | 2008-01-21 | 2009-08-06 | Asyst Technologies Japan Inc | 被搬送物及び防振機構 |
WO2018079146A1 (ja) | 2016-10-25 | 2018-05-03 | 村田機械株式会社 | 天井搬送車 |
WO2019146276A1 (ja) | 2018-01-24 | 2019-08-01 | 村田機械株式会社 | 搬送車 |
JP2019218180A (ja) | 2018-06-19 | 2019-12-26 | 株式会社ダイフク | 物品搬送体 |
WO2020174809A1 (ja) | 2019-02-25 | 2020-09-03 | 村田機械株式会社 | 天井搬送車 |
WO2020217632A1 (ja) | 2019-04-24 | 2020-10-29 | 村田機械株式会社 | 緩衝装置、スタッカクレーン、搬送システム及び緩衝装置用治具 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4075002B2 (ja) * | 2004-06-28 | 2008-04-16 | 村田機械株式会社 | 天井走行車 |
-
2021
- 2021-10-04 IL IL302545A patent/IL302545A/en unknown
- 2021-10-04 KR KR1020237014561A patent/KR20230078765A/ko unknown
- 2021-10-04 US US18/035,372 patent/US20240002148A1/en active Pending
- 2021-10-04 CN CN202180074576.0A patent/CN116368054A/zh active Pending
- 2021-10-04 JP JP2022561321A patent/JP7323080B2/ja active Active
- 2021-10-04 WO PCT/JP2021/036619 patent/WO2022102280A1/ja active Application Filing
- 2021-10-04 EP EP21891527.0A patent/EP4245631A1/en active Pending
- 2021-11-08 TW TW110141511A patent/TW202225060A/zh unknown
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009176765A (ja) | 2008-01-21 | 2009-08-06 | Asyst Technologies Japan Inc | 被搬送物及び防振機構 |
WO2018079146A1 (ja) | 2016-10-25 | 2018-05-03 | 村田機械株式会社 | 天井搬送車 |
WO2019146276A1 (ja) | 2018-01-24 | 2019-08-01 | 村田機械株式会社 | 搬送車 |
JP2019218180A (ja) | 2018-06-19 | 2019-12-26 | 株式会社ダイフク | 物品搬送体 |
WO2020174809A1 (ja) | 2019-02-25 | 2020-09-03 | 村田機械株式会社 | 天井搬送車 |
WO2020217632A1 (ja) | 2019-04-24 | 2020-10-29 | 村田機械株式会社 | 緩衝装置、スタッカクレーン、搬送システム及び緩衝装置用治具 |
Also Published As
Publication number | Publication date |
---|---|
EP4245631A1 (en) | 2023-09-20 |
US20240002148A1 (en) | 2024-01-04 |
TW202225060A (zh) | 2022-07-01 |
CN116368054A (zh) | 2023-06-30 |
KR20230078765A (ko) | 2023-06-02 |
JPWO2022102280A1 (ja) | 2022-05-19 |
WO2022102280A1 (ja) | 2022-05-19 |
IL302545A (en) | 2023-07-01 |
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