SG11201903299UA - Overhead transport vehicle - Google Patents

Overhead transport vehicle

Info

Publication number
SG11201903299UA
SG11201903299UA SG11201903299UA SG11201903299UA SG11201903299UA SG 11201903299U A SG11201903299U A SG 11201903299UA SG 11201903299U A SG11201903299U A SG 11201903299UA SG 11201903299U A SG11201903299U A SG 11201903299UA SG 11201903299U A SG11201903299U A SG 11201903299UA
Authority
SG
Singapore
Prior art keywords
shock
base portion
absorbing mechanisms
transport vehicle
absorbing
Prior art date
Application number
SG11201903299UA
Inventor
Makoto Kobayashi
Original Assignee
Murata Machinery Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Machinery Ltd filed Critical Murata Machinery Ltd
Publication of SG11201903299UA publication Critical patent/SG11201903299UA/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B66—HOISTING; LIFTING; HAULING
    • B66C—CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
    • B66C13/00—Other constructional features or details
    • B66C13/04—Auxiliary devices for controlling movements of suspended loads, or preventing cable slack
    • B66C13/06—Auxiliary devices for controlling movements of suspended loads, or preventing cable slack for minimising or preventing longitudinal or transverse swinging of loads
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67733—Overhead conveying
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B65G1/0457—Storage devices mechanical with suspended load carriers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B66—HOISTING; LIFTING; HAULING
    • B66C—CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
    • B66C11/00—Trolleys or crabs, e.g. operating above runways
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B66—HOISTING; LIFTING; HAULING
    • B66C—CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
    • B66C19/00—Cranes comprising trolleys or crabs running on fixed or movable bridges or gantries
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67712—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrate being handled substantially vertically
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67724—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations by means of a cart or a vehicule
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67751—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber vertical transfer of a single workpiece
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0297—Wafer cassette

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Vibration Prevention Devices (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Vehicle Step Arrangements And Article Storage (AREA)
  • Harvester Elements (AREA)
  • Carriers, Traveling Bodies, And Overhead Traveling Cranes (AREA)

Abstract

FP0650-00SG-MRT 30 In an overhead transport vehicle 1, a lifting device 10 includes: shock-absorbing mechanisms (second shock-absorbing mechanism 40 and first shock-absorbing mechanisms 50) to which a plurality of belts 9 are attached, respectively; and a base portion 10A to which a holding 5 device 11 is provided. The shock-absorbing mechanisms each include a support portion (a fourth body member 46 and a first body member 54) disposed below the base portion. The base portion is provided so as to be vertically movable with respect to each of the support portions with the vibration-isolating portions (second spring members 48 and 10 first spring members 58). The shock-absorbing mechanisms are connected by a link mechanism 70, and the link mechanism operates so as to ensure similarity of respective distances between the base portion and the support portions in the shock-absorbing mechanisms connected to each other. 15
SG11201903299UA 2016-10-25 2017-09-21 Overhead transport vehicle SG11201903299UA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2016208748 2016-10-25
PCT/JP2017/034135 WO2018079146A1 (en) 2016-10-25 2017-09-21 Overhead transport vehicle

Publications (1)

Publication Number Publication Date
SG11201903299UA true SG11201903299UA (en) 2019-05-30

Family

ID=62024777

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201903299UA SG11201903299UA (en) 2016-10-25 2017-09-21 Overhead transport vehicle

Country Status (9)

Country Link
US (1) US10822205B2 (en)
EP (1) EP3533728B1 (en)
JP (1) JP6717384B2 (en)
KR (1) KR102165435B1 (en)
CN (1) CN109890730B (en)
IL (1) IL265984B (en)
SG (1) SG11201903299UA (en)
TW (1) TWI716647B (en)
WO (1) WO2018079146A1 (en)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6835039B2 (en) * 2018-06-19 2021-02-24 株式会社ダイフク Goods carrier
EP3932830B1 (en) * 2019-02-25 2023-08-09 Murata Machinery, Ltd. Ceiling transport vehicle
JP6881486B2 (en) * 2019-02-27 2021-06-02 村田機械株式会社 Transport vehicle
CN111863681B (en) * 2019-04-26 2024-05-24 台湾积体电路制造股份有限公司 Conveying device, conveying system using conveying device and predictive maintenance method of conveying system
JP7111255B2 (en) * 2019-05-13 2022-08-02 村田機械株式会社 overhead carrier
JP7276474B2 (en) * 2019-09-13 2023-05-18 村田機械株式会社 overhead carrier
JP7238736B2 (en) * 2019-11-13 2023-03-14 株式会社ダイフク Article lifting device
JP7248147B2 (en) * 2019-11-20 2023-03-29 村田機械株式会社 overhead carrier
JP7391739B2 (en) * 2020-03-19 2023-12-05 Ckd株式会社 gripping device
JP7323080B2 (en) * 2020-11-10 2023-08-08 村田機械株式会社 overhead carrier
JP7359171B2 (en) * 2021-02-17 2023-10-11 株式会社ダイフク Goods transport vehicle
CN115215054A (en) * 2022-07-28 2022-10-21 杭州明度智能科技有限公司 Loading device for stacking goods

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0627347Y2 (en) * 1987-12-07 1994-07-27 トヨタ自動車株式会社 Robot hand
JPH0840510A (en) * 1994-08-01 1996-02-13 Murata Mach Ltd Elevating base hanging device
JP2001163447A (en) * 1999-12-10 2001-06-19 Murata Mach Ltd Transfer device and automated guided vehicle using this
JP2005194009A (en) * 2004-01-05 2005-07-21 Asyst Shinko Inc Suspension type conveying carriage
JP4075002B2 (en) * 2004-06-28 2008-04-16 村田機械株式会社 Overhead traveling car
JP2006008355A (en) * 2004-06-28 2006-01-12 Murata Mach Ltd Overhead traveling vehicle
JP4911045B2 (en) * 2008-01-21 2012-04-04 ムラテックオートメーション株式会社 Conveyed object and vibration isolation mechanism
WO2009141976A1 (en) * 2008-05-22 2009-11-26 村田機械株式会社 Overhead conveying vehicle
KR20120003368A (en) * 2010-07-02 2012-01-10 무라텍 오토메이션 가부시키가이샤 Gripper device of overhead transportation vehicle and overhead transportation vehicle
CN102642697B (en) * 2012-05-09 2014-03-12 四川省原子能研究院 Herringbone rail head pushing bridge of power and free overhead conveyer
JP6041234B2 (en) * 2013-10-07 2016-12-07 村田機械株式会社 Conveying device with gripper
JP6327124B2 (en) 2014-11-12 2018-05-23 株式会社ダイフク Goods transport vehicle
CN204568658U (en) * 2015-04-17 2015-08-19 南通迅翔自动化设备有限公司 A kind of heavy accumulation type formula suspension conveyor system
JP6344410B2 (en) * 2016-02-19 2018-06-20 村田機械株式会社 Ceiling transport vehicle

Also Published As

Publication number Publication date
CN109890730A (en) 2019-06-14
IL265984A (en) 2019-06-30
EP3533728A4 (en) 2020-05-27
TW201815638A (en) 2018-05-01
US10822205B2 (en) 2020-11-03
KR102165435B1 (en) 2020-10-14
CN109890730B (en) 2020-12-08
US20190241406A1 (en) 2019-08-08
JPWO2018079146A1 (en) 2019-08-08
EP3533728B1 (en) 2022-02-09
IL265984B (en) 2022-06-01
TWI716647B (en) 2021-01-21
EP3533728A1 (en) 2019-09-04
KR20190051055A (en) 2019-05-14
WO2018079146A1 (en) 2018-05-03
JP6717384B2 (en) 2020-07-01

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