JP4911045B2 - Conveyed object and vibration isolation mechanism - Google Patents

Description

  The present invention relates to a technical field of a transported object such as a FOUP (Front Opening Unified Pod) that accommodates various substrates for manufacturing semiconductor elements, and a vibration isolation mechanism that prevents vibrations generated when the transported object is transported. .

  As an anti-vibration mechanism for this type of conveyed object, the FOUP main body constituting the FOUP and the shelf arranged inside the FOUP are configured separately, and an elastic material is provided between the FOUP main body and the shelf. There is a mechanism that absorbs vibration generated during conveyance by interposing a body (see Patent Document 1). When such a FOUP is transported, typically, a gripper provided on a transport vehicle such as a vehicle grips a flange integrally provided on the upper surface of the FOUP body, thereby The FOUP is suspended below.

  There is also an anti-vibration mechanism that absorbs vibration during conveyance by interposing an elastic body between the flange and the FOUP body. Specifically, for example, in the elastic body, one end is attached to the lower surface of the gripper by fixing means such as a bolt, and the other end is attached to the upper surface of the FOUP main body by similar fixing means. The flange and the FOUP body are connected in the vertical direction via such an elastic body. When the FOUP is transported, the elastic body is pulled downward by the load of the FOUP body.

JP 2007-123673 A

  According to the vibration isolating mechanism described in Patent Document 1 described above, the elastic body absorbs at least a part of the vibration transmitted from the FOUP main body to the shelf, and is stored in the shelf, for example, a substrate such as a wafer. Vibration is suppressed. However, deformation of the elastic body may cause a positional shift between the FOUP main body and the shelf.

  In general, the FOUP transported by the transport vehicle is mounted on a mounting table such as a load port installed in a processing station for performing various processes on the substrate. Then, the FOUP and the processing station are connected so that the openings of the FOUP and the processing station match each other, and the substrates stored in the shelf are sequentially taken into the processing station by, for example, a handling robot installed in the processing station. . Usually, a handling robot (hereinafter simply referred to as “robot”) is positioned in the vertical direction from the upper surface of the mounting table with reference to the height of the substrate. For this reason, if a positional shift occurs between the FOUP main body and the shelf, a positional shift occurs between the substrate and the robot, which impedes accurate handling by the robot. Such a series of positional deviations is caused by vibration transmitted from the transport vehicle to the FOUP main body via the gripper and the flange during transport.

  Further, according to the above-described vibration isolation mechanism in which the flange and the FOUP main body are connected by the elastic body, the elastic body made of rubber, gel, or the like is used continuously for a predetermined period or more because the tensile strength is low. Otherwise, the elastic body may be damaged due to breakage or the like, which may cause the FOUP body to fall.

  The present invention has been made in view of the above-described problems, for example, and has a structure that has durability, so that vibration transmitted from a transport vehicle to a transported object body such as a FOUP body via a gripper such as a gripper and a flange is transmitted. It is an object of the present invention to provide a transported object that can be suppressed and a vibration isolation mechanism for the transported object.

Conveying object of the present invention is to solve the above problems, an object to be conveyed which is gripped by the gripping means provided on the transport vehicle while being transported by the transport vehicle is gripped by the front Symbol gripping means And a flange having a holding portion, a main body portion having a held portion and suspended by being supported from the lower surface side on the upper surface side of the holding portion, the upper surface of the holding portion, and the covered surface. A vibration absorbing means that is disposed between the lower surface of the holding portion and absorbs vibration transmitted from the transport vehicle to the main body via the gripping means and the flange, and the vibration absorbing means is made of an elastic material. When the flange is gripped during conveyance , one or a plurality of the flanges are disposed between the upper surface of the holding unit and the lower surface of the held unit in a state compressed by the load of the main body unit .

  According to the transported object of the present invention, the transported object such as FOUP is transported by a transport vehicle. The transport vehicle is, for example, a vehicle and travels on a track laid in a facility for manufacturing a semiconductor element, and the transported object is transported to a manufacturing apparatus or a stocker disposed along the track. Transport. Such a transport vehicle includes, for example, a hoist capable of moving up and down inside, and the hoist is provided with gripping means such as a gripper for gripping an object to be transported.

  The conveyed object of the present invention includes a main body, a flange, and vibration absorbing means. The main body portion includes, for example, a plurality of shelves therein, and various shelves for manufacturing semiconductor elements can be stored in each shelf. Specifically, the main body portion is composed of two parts, for example, a storage portion capable of storing various substrates and a held portion held by a flange. For example, a part of the held portion serves as a flange portion. ing. The flange is composed of two parts, for example, a gripped part gripped by gripping means of the transport vehicle and a holding part that holds the held part of the main body part. The gripped portion is gripped by the gripping means when the transported object is transported. For example, both ends of the holding portion are bent inward, and the holding portion has a symmetrical shape when viewed from the side. At the stage of assembling the object to be conveyed, the flanges and the main body are connected by disposing the both end portions below the flange of the held portion (main body). With this connection, in a state where the flange is gripped by the gripping means during conveyance (hereinafter referred to as “gripping state”), the holding portion supports the flange portion from the lower surface side by the load of the main body portion, in other words, the flange The main body is suspended.

  Here, in particular, the vibration generated as the transport vehicle travels is transmitted from the transport vehicle to the main body through a gripper provided on the transport vehicle and a flange gripped by the gripper. However, according to the present invention, the vibration absorbing means is disposed between the flange and the main body in order to prevent or suppress such vibration.

  The vibration absorbing means is disposed between the holding portion of the flange and the held portion (the flange portion) of the main body portion at the stage of assembling the conveyed object. With this arrangement, the vibration absorbing means compressed between the flange and the main body part absorbs at least a part of the vibration from the conveyance vehicle by deforming the original shape according to the vibration accompanying the traveling of the conveyance vehicle. . Specifically, the vibration absorbing means can absorb the vibration that is transmitted from the flange to the main body very efficiently by the elasticity of the compressed elastic material. Further, the seating of the elastic material is extremely stable, and the life of the elastic material can be easily extended. In particular, the elastic material can be easily broken and avoided.

  The vibration absorbing means is made of, for example, rubber, resin, gel or the like having appropriate elasticity. For example, the vibration absorbing means may be a single ring or a plurality of rectangular parallelepipeds along the lower surface of the flange of the main body. For example, when four rectangular parallelepipeds are arranged as the vibration absorbing means, the vibration is dispersed at four locations, so that vibration to the main body can be suppressed compared to the case where one ring is arranged. .

  In particular, compared with the background art, according to the present invention, vibration transmitted to the main body is suppressed, so that the occurrence of failure in the main body provided with various mechanisms and various mechanical parts can be significantly reduced. At the same time, it is possible to effectively avoid the inconvenience that the main body portion collides with the inner wall of the transport vehicle due to vibration. In other words, the mechanical resistance required for the main body and the inside thereof is remarkably low, and it is possible to adopt a simple structure as these, which is very advantageous in practice.

  As described above, by arranging the vibration absorbing means to be compressed between the flange and the main body portion, the vibration between the flange and the main body portion is absorbed by the vibration absorbing means, and the gripper (gripping portion) and the flange are removed from the transport vehicle. The vibration transmitted to the main body via the can be suppressed. Further, the structure in which the vibration absorbing means is compressed during conveyance can ensure the durability of the vibration absorbing means and stably suppress the vibration as compared with the structure in which the vibration absorbing means is pulled.

In one aspect of the conveyed object of the present invention, the main body portion has a flange portion that constitutes the held portion on the upper surface thereof, and the flange is configured so that the flange portion is viewed from the lower surface side via the vibration absorbing means. To support.

  Here, as a background art similar to the present invention, there is a transported object that includes a connecting portion that is a vibration absorbing means, a flange, and a main body, and that connects the flange and the main body via the connecting portion. When the connecting portion is made of an elastic body made of rubber or gel, for example, the tensile strength is low. This may cause the FOUP main body to be detached from the grip portion. According to the present invention, since the flange supports the flange portion of the main body portion from the lower surface side via the vibration absorbing means, there is almost no possibility that the main body portion is detached.

  According to this aspect, in the gripping state, the main body is suspended from the flange, and the vibration absorbing means is compressed by the load of the main body. The vibration absorbing means to be compressed can suppress the vibration transmitted to the main body by deforming the original shape according to the vibration from the transport vehicle.

In this embodiment, the flange further includes a T-shaped bolt having a head portion and a screw cut portion constituting the holding portion, and the screw cut portion is inserted into the flange portion. A possible hole portion is provided, and the bolt is fixed by screwing a tip end portion of the screw cutting portion inserted into the hole portion from the lower surface side of the flange portion into the lower surface side of the flange. Thus, the flange and the main body may be connected to each other, and the vibration absorbing means may be disposed between the head and the main body.

  If comprised in this way, a flange and a main-body part will be connected via a volt | bolt. Specifically, the flange is, for example, the above-described gripped portion, and in particular, the gripped portion is embedded with a nut that is screwed with a threaded portion of the bolt. The main body part is composed of, for example, two parts of the above-described storage part and the above-mentioned held part, and in particular, a hole part through which a threaded part can be inserted is formed in the collar part of the held part. . As for the bolt, the head has a diameter larger than the inner diameter of the hole, and abuts against the lower surface of the flange. Further, the screw cutting portion is inserted into the hole portion from the lower surface side of the flange portion, and the inserted distal end portion is screwed into the nut of the flange (gripped portion). By this screwing, the main body is fixed to the flange while maintaining a predetermined distance between the lower surface of the flange and the upper surface of the held portion.

  In order to connect the flange and the main body at the stage of assembling the conveyed object, a gripped portion (flange) is disposed at a predetermined connection position on the upper surface of the held portion (main body), and further the lower surface of the main body and Vibration absorbing means is disposed around the hole. Subsequently, the screw threaded portion of the bolt is inserted into the hole from the arranged vibration absorbing means side, and the inserted tip is screwed into the nut of the gripped portion. By this screwing, the flange and the main body are connected. In this case, in the gripping state, the main body portion is suspended from the flange, and the vibration absorbing means is compressed between the head of the bolt fixed to the gripped portion (flange) and the main body portion.

  Thus, the vibration absorbing means is arranged between the head of the bolt and the main body. With this arrangement, vibration transmitted from the transport vehicle to the main body via the gripping part and the flange can be suppressed by the vibration absorbing means.

In another aspect of the conveyed object of the present invention, the flange further includes a T-type bolt screwed into the upper surface side of the main body portion and having a head portion and a screw cutting portion constituting the held portion. Is provided with a hole through which the threaded part can be inserted, and the bolt is threaded into the main body part at the tip of the threaded part inserted into the hole from the upper surface side of the flange. By being rarely fixed, the flange and the main body are connected to each other, and the vibration absorbing means is disposed between the flange and the head.

  According to this aspect, the flange and the main body are connected via the bolt. Specifically, the main body portion is composed of two parts, for example, the above-described storage portion and a fixing portion that is integrally provided on the upper surface of the storage portion and in which a nut that engages with a threaded portion of a bolt is embedded. Yes. For example, the fixing portion may be formed of two parts that are symmetrical when viewed from the side, or may be formed of only one part. The flange is, for example, the above-described gripped portion, and in particular, the gripped portion is formed with a hole portion through which the screw cutting portion can be inserted. As for the bolt, the head has a diameter larger than the inner diameter of the hole, and abuts against the upper surface of the flange (held portion). Further, the threaded portion is inserted into the hole portion from the upper surface side of the flange, and the inserted distal end portion is screwed into the nut of the fixing portion (main body portion). By this screwing, the main body portion is fixed to the flange while maintaining a predetermined distance between the lower surface of the flange and the upper surface of the fixing portion.

  In order to connect the flange and the main body at the stage of assembling the object to be conveyed, the gripped portion (flange) is disposed at a predetermined connection position on the upper surface of the fixed portion (main body), and the gripped portion is further disposed. A vibration absorbing means is disposed around the hole portion. Subsequently, the screw threaded portion of the bolt is inserted into the hole from the arranged vibration absorbing means side, and the inserted tip is screwed into the nut of the fixed portion. By this screwing, the flange and the main body are connected. In this case, in the gripping state, the main body portion is suspended from the flange, and the vibration absorbing means is compressed between the flange and the head portion of the bolt fixed to the fixing portion (main body portion).

  In this way, the vibration absorbing means is disposed between the flange and the head of the bolt. With this arrangement, vibration transmitted from the transport vehicle to the main body via the gripping part and the flange can be suppressed by the vibration absorbing means.

  In the aspect provided with the above-mentioned bolt, a plurality of the hole portions are provided, a plurality of the bolts are provided corresponding to the plurality of hole portions, and a plurality of the vibration absorbing means are arranged corresponding to the plurality of bolts. May be.

  If comprised in this way, a vibration absorption means will consist of rubber | gum, resin, gel, etc. which have moderate elasticity, for example. The vibration absorbing means is preferably a single ring body, for example, along the head of the bolt. For example, when the vibration absorbing means corresponding to one bolt is a single ring body, when a plurality of holes are provided in the flange (for example, gripped portion) or the main body (for example, held portion), Correspondingly, a plurality of bolts are used, and a plurality of vibration absorbing means are arranged corresponding to the plurality of bolts. That is, the number of holes or bolts and vibration absorbing means in the flange or main body is the same. In this way, when a plurality of annular bodies as vibration absorbing means are arranged, vibration is dispersed at a plurality of locations, so that the vibration to the main body is suppressed compared to the arrangement of one annular body. Can do.

In order to solve the above problems, a vibration isolating mechanism for a conveyed object according to the present invention is a vibration isolating mechanism for a conveyed object that is conveyed by a conveying vehicle and is gripped by a gripping means provided in the conveying vehicle. a flange having a holding portion while being gripped by the previous SL gripping means, the body portion該被holding portion is suspended by being supported by the upper surface of the holding portion from the lower surface side and has a held portion The vibration absorbing means is disposed between the upper surface of the holding portion and the lower surface of the held portion, and absorbs vibration transmitted from the transport vehicle to the main body portion via the gripping means and the flange. The means is made of an elastic material, and is compressed between the upper surface of the holding portion and the lower surface of the held portion in a compressed state by the load of the main body portion when the flange is gripped during conveyance. Multiple placement It is.

  According to the vibration isolating mechanism for the conveyed object of the present invention, as in the case of the conveyed object according to the present invention described above, by arranging the vibration absorbing means to be compressed between the flange and the main body, these flange and The vibration between the main body portions can be absorbed by the vibration absorbing means, and vibration transmitted from the transport vehicle to the main body portion via the gripper (gripping portion) and the flange can be suppressed. Further, the structure in which the vibration absorbing means is compressed during conveyance can ensure the durability of the vibration absorbing means and stably suppress the vibration as compared with the structure in which the vibration absorbing means is pulled.

  In the vibration isolating mechanism according to the present invention, it is possible to adopt various aspects similar to the various aspects of the transported object according to the present invention described above.

  The operation and other advantages of the present invention will become apparent from the best mode for carrying out the invention described below.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

  <First Embodiment>

  First, the configuration of the conveyed object according to the first embodiment will be described with reference to FIGS. 1 and 2. FIG. 1 is a front view schematically showing a conveyed object according to the first embodiment, and FIG. 2 is a top view of the conveyed object according to the first embodiment as viewed from the upper surface side.

  In FIG. 1, a transported object 100 according to the first embodiment is transported along a rail by a transport vehicle 1 that is, for example, an OHT or a vehicle. During this transport, the transported object 100 is gripped by the gripper 2 provided on the bottom side of the transport vehicle 1. As an example of the “gripping means” according to the present invention, the gripper 2 includes a gripping portion 2 a that can be displaced into a gripping state for gripping the transported object 100 and a released state for releasing the transported object 100. In other words, both end portions of the grip portion 2a are configured to be bent inward, and their tips are opposed to each other in the grip state. As shown in FIG. 1, the grip portion 2 a grips the object to be transported 100 by supporting both ends of the flange 12 described later from the lower surface side in the grip state.

  The transported object 100 includes a main body portion 11, a flange 12, and a vibration absorbing member 13. In the present invention, in particular, the vibration transmitted from the transport vehicle 1 to the main body portion 11 via the gripper 2 and the flange 12 is a vibration absorbing member. 13 is configured to suppress.

  The main body part 11 includes a storage part 11a and a held part 11b. The storage unit 11a includes a plurality of shelves (not shown) inside, and can store various substrates for manufacturing semiconductor elements in each shelf. The held portion 11b is fixed to the upper surface of the storage portion 11a, and a part of the held portion 11b is a collar portion.

  The flange 12 includes a gripped portion 12a and a holding portion 12b. The gripped portion 12a is gripped by the gripper 2 by being supported by the grip portion 2a from the lower surface side. The holding part 12b is fixed to the lower surface of the gripped part 12a. Both end portions of the holding portion 12b are bent inward, and their tips are opposed to each other. These both end parts are located below the collar part of the to-be-held part 11b. For this reason, the holding part 12b supports the collar part of the to-be-held part 11b, and hold | maintains the main-body part 11 whole in the state (gripping state) in which the holding part 2a hold | grips the to-be-held part 12a.

  The vibration absorbing member 13 is made of rubber as an example of the “vibration absorbing means” according to the present invention, and is composed of four rectangular parallelepipeds as shown in FIG. The vibration absorbing member 13 is disposed between the flange 12 and the main body portion 11, more specifically, between the holding portion 12b and the flange portion of the held portion 11b. Each vibration absorbing member 13 absorbs vibration transmitted to the main body 11 by being compressed between the holding portion 12b and the held portion 11b in a deformable manner. The vibration absorbing member 13 may be formed of resin, gel, or the like in addition to rubber.

  Referring again to FIG. 1, a state in which the transported object 100 of the first embodiment is transported by the transport vehicle 1 will be described. When the transported object 100 is transported, the gripped part 12a is gripped by the gripping part 2a in the gripped state. At this time, in the conveyed object 100, the held portion 11b is supported by the holding portion 12b via the vibration absorbing member 13, and the vibration absorbing member 13 is compressed by the load of the main body portion 11 as a whole. The compressed vibration absorbing member 13 is deformed according to vibration, so that vibration transmitted to the main body 11 is suppressed.

  Thus, according to 1st Embodiment, since the vibration-absorbing member 13 compressed between the flange 12 and the main-body part 11 is arrange | positioned, the vibration transmitted to the main-body part 11 from the conveyance vehicle 1 via the gripper 2 and the flange 12 is provided. And the durability of the vibration absorbing member 13 can be ensured.

  In addition, in the to-be-conveyed object 100 of 1st Embodiment, although the vibration absorption member 13 is comprised from four rectangular parallelepipeds, it is good also as one ring body along the collar part of the to-be-held part 11b.

  <Second Embodiment>

  Next, the configuration of the transported object according to the second embodiment will be described with reference to FIGS. 3 and 4. Here, FIG. 3 is a front view schematically showing a conveyed object according to the second embodiment, and FIG. 4 is a top view of the conveyed object according to the second embodiment as viewed from the upper surface side. Hereinafter, about the site | part comprised substantially the same as the to-be-conveyed object 100 of 1st Embodiment, while attaching | subjecting the same name or the same code | symbol as the case of the to-be-conveyed object 100, the description is abbreviate | omitted, The characteristic content of this embodiment Is specifically described.

  The to-be-conveyed object 200 according to the second embodiment is different from the to-be-conveyed object 100 of the first embodiment in the shape of the vibration absorbing means and the shapes of the held part (main body part) and the holding part (flange). Moreover, a bolt is used for connection of a main-body part and a flange.

  In FIG. 3, the transported object 200 includes a main body 21, a flange 22, a vibration absorbing member 23, and a bolt 24.

  The main body portion 21 includes a storage portion 21a and a held portion 21b. A part of the held portion 21b is a flange, and as shown in FIG. 4, four holes 21c are formed in the flange particularly. The inner diameters of these four holes 21c are formed so as to be able to be inserted through a threaded portion 24b of a bolt 24 described later.

  The flange 22 is a gripped portion 22 a that is gripped by the gripper 2. A nut 22c is embedded in the lower surface of the gripped portion 22a. The flange 22 and the main body 21 are connected by screwing the tip end portion of the screw cutting portion 24b of the bolt 24 into the nut 22c.

  The bolt 24 is a T-type bolt having a head portion 24a and a threaded portion 24b. The diameter of the head 24a is formed larger than the inner diameter of the hole 21c. The threaded portion 24b is inserted into the hole portion 21c from the lower surface side of the held portion 21b, and the inserted distal end portion is screwed into the nut 22c of the gripped portion 22a. By this screwing, the entire body portion 21 is held by the flange 22 while maintaining a predetermined interval between the lower surface of the gripped portion 22 b and the upper surface of the held portion 21 b of the body portion 21. As shown in FIG. 4, four bolts 24 are used corresponding to the four holes 21c.

  The vibration absorbing member 23 is disposed between the head portion 24 a of the bolt 24 and the held portion 21 b of the main body portion 21. Each vibration absorbing member 23 absorbs vibration transmitted to the main body portion 21 by being deformably compressed between the head portion 24a and the held portion 21b.

  Referring again to FIG. 3, a state where the transported object 200 of the second embodiment is transported will be described. When the transported object 200 is transported, the gripped part 22a is gripped by the gripping part 2a in the gripped state. At this time, in the conveyed object 200, the held portion 21b is supported via the vibration absorbing member 23 by the bolt 24 fixed to the gripped portion 22a, and the vibration absorbing member 23 is connected to the head 24a of the bolt 24 and the object to be conveyed. The holding portion 21b is compressed by the load of the main body portion 21 as a whole. The compressed vibration absorbing member 23 is deformed according to vibration, so that vibration transmitted to the main body 21 is suppressed.

  As described above, according to the second embodiment, the head 24a of the bolt 24 fixed to the flange 22 and the vibration absorbing member 23 that is compressed between the main body 21 are disposed. The vibration transmitted to the main body 21 via the flange 22 can be suppressed, and the durability of the vibration absorbing member 23 can be ensured.

  In addition, in the to-be-conveyed object 200 of 2nd Embodiment, although the damping member 23 is comprised from four ring bodies, you may comprise each ring body from several rectangular parallelepiped.

  <Third Embodiment>

  Next, the configuration of the transported object according to the third embodiment will be described with reference to FIGS. 5 and 6. FIG. 5 is a front view schematically showing a transported object according to the third embodiment, and FIG. 6 is a top view of the transported object according to the third embodiment as viewed from the upper surface side. Hereinafter, parts that are configured substantially the same as the transported object 200 of the second embodiment are given the same names or the same reference numerals as those of the transported objects 100 and 200, and the description thereof is omitted. In particular, describe the specific contents.

  Compared to the transported object 200 of the second embodiment, the transported object 300 according to the third embodiment connects the shape of the held part (main body part) and the holding part (flange), and the main body part and the flange. Bolt arrangement is different.

  In FIG. 5, the conveyed object 300 includes a main body portion 31, a flange 32, a vibration absorbing member 33, and a bolt 34.

  The main body portion 31 includes a storage portion 31a and a fixing portion 31b. The fixing part 31b is fixed to the upper surface of the storage part 31a. A nut 31c is embedded in the upper surface of the fixed portion 31b, and an end portion of a threaded portion 34b of a bolt 34 described later is screwed into the nut 31c, whereby the flange 32 and the main body portion 31 are connected. .

  The bolt 34 is a T-type bolt having a head portion 34a and a threaded portion 34b. The diameter of the head 34a is formed larger than the inner diameter of a hole 32c of the flange 32 described later. The threaded portion 34b is inserted into the hole 32c from the upper surface side of the gripped portion 32a of the flange 32, and the inserted distal end portion is screwed into the nut 31c of the fixing portion 31b. By this screwing, the entire body portion 31 is held by the flange portion 32 while maintaining a predetermined interval between the lower surface of the gripped portion 32a and the upper surface of the fixed portion 31b. As shown in FIG. 6, four bolts 34 are used corresponding to the four holes 32 c of the flange 32.

  The flange 32 is a gripped portion 32a gripped by the gripper 2, and in particular, the held portion 32a has four holes 32c. The inner diameters of these four holes 32c are formed so as to be able to be inserted through the threaded portion 34b.

  The vibration absorbing member 33 is disposed between the gripped portion 32 a of the flange 32 and the head portion 34 a of the bolt 34. Each vibration absorbing member 33 absorbs vibration transmitted to the main body 31 by being deformably compressed between the gripped portion 32a and the head 24a.

  Referring again to FIG. 5, the state in which the object to be conveyed according to the third embodiment is conveyed will be described. When the object to be conveyed 300 is conveyed, the grasped part 32a is grasped by the grasping part 2a in the grasping state. At this time, in the conveyed object 300, the entire main body 31 is suspended via the vibration absorbing member 23 by the bolt 34 inserted into the gripped portion 32a and fixed to the fixing portion 31b, and the vibration absorbing member 33 is Between the gripped portion 32a and the head portion 34a of the bolt 34, the body portion 31 is compressed by the load. The compressed vibration absorbing member 33 is deformed according to vibration, so that vibration transmitted to the main body 31 is suppressed.

  As described above, according to the third embodiment, the vibration absorbing member 33 that is compressed between the flange 32 and the head portion 34a of the bolt 34 fixed to the main body 31 is disposed. The vibration transmitted to the main body 31 via the flange 32 can be suppressed, and the durability of the vibration absorbing member 33 can be ensured.

  In addition, in the to-be-conveyed object 300 of 3rd Embodiment, although the fixing | fixed part 31b is comprised from two site | parts, you may be comprised by one site | part. For example, as shown in FIG. 7, the main body 41 of the transported object 400 that is a modification of the third embodiment includes a storage part 41 a, a fixing part 41 b, and a bolt 43. The fixing part 41b is not separated into two parts but is one part, and a plurality of nuts 41c are embedded in this one part. Thus, by making the fixing part into one part, it is possible to further suppress the vibration according to the magnitude and direction of the vibration.

  The present invention is not limited to the above-described embodiment, and can be appropriately changed without departing from the spirit or concept of the invention that can be read from the claims and the entire specification. An anti-vibration mechanism is also included in the technical scope of the present invention.

It is a schematic front view which shows the to-be-conveyed object which concerns on 1st Embodiment. It is the top view which looked at the to-be-conveyed object which concerns on 1st Embodiment from the upper surface side. It is a schematic front view which shows the to-be-conveyed object which concerns on 2nd Embodiment. It is the top view which looked at the to-be-conveyed object which concerns on 2nd Embodiment from the upper surface side. It is a schematic front view which shows the to-be-conveyed object which concerns on 3rd Embodiment. It is the top view which looked at the to-be-conveyed object which concerns on 3rd Embodiment from the upper surface side. It is a schematic front view which shows the to-be-conveyed object which concerns on the modification of 3rd Embodiment.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Conveyance vehicle, 2 ... Gripper, 11 ... Main-body part, 12 ... Flange, 13 ... Damping member, 100 ... Conveyed object

Claims (6)

A transported object that is transported by a transporting vehicle and gripped by gripping means provided in the transporting vehicle;
A flange having a holding portion while being gripped by the previous SL gripping means,
A main body having a held portion and suspended by being supported from the lower surface side on the upper surface side of the holding portion;
A vibration absorbing means that is disposed between the upper surface of the holding part and the lower surface of the held part and absorbs vibration transmitted from the transport vehicle to the main body part via the gripping means and the flange;
The vibration absorbing means is made of an elastic material, and is compressed between the upper surface of the holding portion and the lower surface of the held portion when compressed by the load of the main body when the flange is gripped during conveyance. One or a plurality of objects to be conveyed are arranged. The main body has a collar portion that constitutes the held portion on the upper surface thereof,
The said flange supports the said collar part from the lower surface side via the said vibration absorption means. The to-be-conveyed object of Claim 1 characterized by the above-mentioned. A T-type bolt which is screwed into the lower surface side of the flange, and which has a head portion and a screw cutting portion constituting the holding portion ;
The flange is provided with a hole through which the threaded portion can be inserted,
The bolt is fixed by being screwed into the lower surface side of the flange and fixed at the front end portion of the screw cutting portion inserted through the hole from the lower surface side of the flange portion. Connected to
The conveyed object according to claim 2, wherein the vibration absorbing means is disposed between the head and the main body. A T-type bolt that is screwed into the upper surface side of the main body, and that has a head and a screw cutting portion that constitute the held portion ;
The flange is provided with a hole through which the threaded portion can be inserted,
The bolt connects the flange and the main body portion by fixing the front end portion of the screw cutting portion inserted through the hole from the upper surface side of the flange into the main body portion. ,
The conveyed object according to claim 1, wherein the vibration absorbing means is disposed between the flange and the head. A plurality of the holes are provided,
A plurality of the bolts are provided corresponding to the plurality of holes,
The object to be conveyed according to claim 3 or 4, wherein a plurality of the vibration absorbing means are arranged corresponding to the plurality of bolts. An anti-vibration mechanism for an object to be transported that is transported by a transport vehicle and gripped by gripping means provided on the transport vehicle,
A flange having a holding portion while being gripped by the previous SL gripping means, the body portion該被holding portion is suspended by being supported by the upper surface of the holding portion from the lower surface side and has a held portion Between the upper surface of the holding portion and the lower surface of the held portion, and comprising vibration absorbing means for absorbing vibration transmitted from the transport vehicle to the main body portion via the gripping means and the flange,
The vibration absorbing means is made of an elastic material, and is compressed between the upper surface of the holding portion and the lower surface of the held portion when compressed by the load of the main body when the flange is gripped during conveyance. An anti-vibration mechanism for a conveyed object, wherein one or more are arranged.

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