WO2018074208A1 - 流体制御弁、流体制御装置、及び駆動機構 - Google Patents

流体制御弁、流体制御装置、及び駆動機構 Download PDF

Info

Publication number
WO2018074208A1
WO2018074208A1 PCT/JP2017/035808 JP2017035808W WO2018074208A1 WO 2018074208 A1 WO2018074208 A1 WO 2018074208A1 JP 2017035808 W JP2017035808 W JP 2017035808W WO 2018074208 A1 WO2018074208 A1 WO 2018074208A1
Authority
WO
WIPO (PCT)
Prior art keywords
fluid control
casing
piezo stack
control valve
actuator
Prior art date
Application number
PCT/JP2017/035808
Other languages
English (en)
French (fr)
Japanese (ja)
Inventor
繁之 林
政幸 長澤
Original Assignee
株式会社堀場エステック
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=62019371&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=WO2018074208(A1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by 株式会社堀場エステック filed Critical 株式会社堀場エステック
Priority to JP2018546228A priority Critical patent/JP6920331B2/ja
Publication of WO2018074208A1 publication Critical patent/WO2018074208A1/ja

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K37/00—Special means in or on valves or other cut-off apparatus for indicating or recording operation thereof, or for enabling an alarm to be given

Definitions

  • the present invention relates to a fluid control valve used for controlling the flow rate and pressure of a fluid, a fluid control device using the fluid control surface, and a drive mechanism for driving the fluid control valve.
  • a fluid is controlled by adjusting an opening between a valve seat and a valve body, and an actuator that displaces the valve body, and a valve body And a displacement meter that measures the displacement of the actuator, and is configured to control the actuator based on the displacement of the valve body detected by the displacement meter.
  • This actuator is a piezo stack provided in the casing, and its driving terminal is arranged on the upper surface of the casing.
  • the inventor of the present application uses, for example, an eddy current type displacement meter, and is examining a configuration in which the displacement meter is disposed below the casing.
  • the output terminal of the displacement meter must be pulled out from the side of the fluid control valve in order to extract the signal output from the displacement meter.
  • the mounting of the terminal and the assembly of the fluid control valve become complicated, which increases the cost and makes it difficult to downsize the fluid control valve.
  • the present invention has been made to solve the above-mentioned problems, and its main object is to make the fluid control valve capable of detecting the displacement of the valve body a simple and small configuration.
  • the fluid control valve according to the present invention is a fluid control valve that controls the fluid flowing through the flow path, and accommodates the valve body, an actuator that displaces the valve body, the actuator, and a drive terminal for the actuator.
  • a displacement sensor that is provided in the casing and that changes the magnitude of an output signal in accordance with the displacement of the valve body, and an output terminal of the displacement sensor includes It is arrange
  • the casing has a cylindrical casing body that houses the actuator and the displacement sensor, and the lid closes an upper end opening of the casing body, and the driving terminal and A configuration in which a through hole through which the output terminal passes is formed.
  • the actuator has a first piezo stack provided in the casing, and the displacement sensor has a second piezo stack provided above or below the first piezo stack in the casing, It is preferable that an end face of the first piezo stack and an end face of the second piezo stack are in contact with each other. With such a configuration, since the extension of the first piezo stack is directly transmitted to the second piezo stack, the displacement of the valve body can be detected with high accuracy.
  • the first piezo stack and the second piezo stack have a quadrangular prism shape or a polygonal column shape, and a casing main body that houses the first piezo stack and the second piezo stack has a cylindrical shape.
  • a casing main body that houses the first piezo stack and the second piezo stack has a cylindrical shape.
  • first piezo stacks when a plurality of first piezo stacks are used to increase the displacement of the valve body, a pair of the first piezo stacks are arranged in the upper and lower sides of the casing, and the second piezo stack is the pair of first piezo stacks. It is preferably arranged between the piezo stacks. With such a configuration, both the first piezo stacks can be brought into contact with the second piezo stack, so that the displacement amount can be accurately detected while increasing the displacement amount of the valve element.
  • the fluid control device according to the present invention is characterized by including the above-described fluid control valve, and such a fluid control device can obtain the above-described effects.
  • the drive mechanism drives the fluid control valve, and includes an actuator for displacing the valve body of the fluid control valve, the actuator, and a drive terminal for the actuator.
  • a casing having a lid, and a displacement sensor provided in the casing and having a magnitude of an output signal changed according to the displacement of the valve body, and an output terminal of the displacement sensor is disposed on the lid It is characterized by being.
  • the fluid control valve capable of detecting the displacement of the valve body using the displacement sensor can be simply and compactly configured.
  • the figure which shows typically the whole structure of the fluid control apparatus of this embodiment The figure which shows typically the structure of the upper surface of the cover body of the embodiment.
  • transformation embodiment The figure which shows typically the structure of the fluid control apparatus of deformation
  • a fluid control apparatus 100 is used in a semiconductor manufacturing apparatus, and controls the flow rate and pressure of a fluid such as a gas flowing in a flow path 51 formed in a body 5 as shown in FIG. To do. Specifically, this is to make the flow rate detection mechanism 2 that senses the flow rate of the fluid, the fluid control valve 3 that controls the flow rate of the fluid, and the measurement flow rate output from the flow rate detection mechanism 2 close to a predetermined set flow rate.
  • a control unit (not shown) for controlling the valve opening degree of the fluid control valve 3.
  • the thermal flow rate detection mechanism 2 includes a narrow tube 21 connected in parallel to the flow channel 51 so that a predetermined proportion of the fluid flowing through the flow channel 51 is guided, a heater 24 provided in the narrow tube 21, and front and rear thereof. And a pair of temperature sensors 22, 23 provided in. When a fluid flows through the thin tube 21, a temperature difference corresponding to the mass flow rate is generated between the two temperature sensors 22 and 23. Therefore, the flow rate is measured based on the temperature difference. .
  • the fluid control valve 3 is of a so-called normally closed type, and the valve body 6 comes into contact with the valve seat 4 from the closed state where the upstream flow path 51 (A) and the downstream flow path 51 (B) are blocked.
  • the body 6 receives the driving force from the actuator 7 and is biased so that the body 6 moves away from the valve seat 4 to an open state in which the upstream flow path 51 (A) and the downstream flow path 51 (B) communicate with each other. It is configured.
  • the actuator 7 includes, for example, a first piezo stack 71 formed by stacking a plurality of piezo elements (driving piezoelectric elements), and an operating body 72 that is displaced by the extension of the first piezo stack 71. is there.
  • the tip of the first piezo stack 71 is connected to the operating body 72 via an intermediate connecting member 74.
  • the operating body 72 includes a diaphragm member 721 and an abutting shaft portion 722 that is provided at the center of the diaphragm member 721 and contacts the upper surface of the valve body 6 through the center of the valve seat 4.
  • the first piezo stack 71 extends, and the operating body 72 urges the valve body 6 in the valve opening direction (downward here),
  • the valve body 6 is separated from the valve seat 4 and is opened.
  • the driving voltage falls below a certain voltage
  • the valve body 6 and the valve seat 4 are separated by a distance corresponding to the voltage value.
  • the upstream channel 51 (A) and the downstream channel 51 (B) communicate with each other through this gap.
  • the first piezo stack 71 described above is accommodated in the casing 8.
  • the casing 8 includes a cylindrical casing body 81 and a lid body 82 that closes the upper end opening of the casing body 81.
  • a driving terminal 7 x for inputting a driving voltage to the actuator 7 is arranged on the upper surface 8 a of the lid 82, that is, the upper surface of the casing 8.
  • the upper surface 8a of the lid 82 is a flat surface, but may be a curved surface, a curved surface, an uneven surface, or the like. More specifically, as shown in FIG.
  • a through hole 8 h 1 through which the driving terminal 7 x passes is formed in the lid 82, and the driving terminal 7 x is removed from the casing 8 through the through hole 8 h 1. It extends upward.
  • the through-hole 8h1 corresponding to each of the two drive terminals 7x is formed in the lid body 82 of the present embodiment, the two drive terminals 7x extend from one through-hole 8h1.
  • the fluid control valve 3 of the present embodiment further includes a displacement sensor 9 that is provided in the above-described casing 8 and that changes the magnitude of an output signal according to the displacement of the valve body 6. Yes.
  • the displacement sensor 9 includes, for example, a second piezo stack 91 formed by laminating a plurality of piezoelectric elements (sensor piezoelectric elements).
  • the second piezo stack 91 is disposed in the casing 8 so as to be adjacent to the first piezo stack 71 constituting the actuator 7 in the axial direction.
  • the second piezo stack 91 may be disposed above or below the first piezo stack 71, but here is disposed above the first piezo stack 71.
  • the axial length of the second piezo stack 91 is shorter than the axial length of the first piezo stack 71, but the length of the second piezo stack 91 may be changed as appropriate.
  • the opposing surfaces of the first piezo stack 71 and the second piezo stack 91 are in contact with each other. More specifically, one end surface 911 (here, the lower end surface) of the second piezo stack 91 is in surface contact with the end surface 711 (here, the upper end surface) of the first piezo stack 71, and the second piezo stack 91. The other end surface 912 (here, the upper end surface) is in contact with the inner surface of the casing 8 (the inner surface of the lid 82).
  • the second piezo stack 91 contracts as the first piezo stack 71 expands, and a voltage having a magnitude corresponding to the contraction degree is output from the second piezo stack 91 as an output signal.
  • the control part which is not illustrated acquires this output signal, and a control part calculates the position of the valve body 6 according to the voltage value which an output signal shows.
  • the output terminal 9x of the displacement sensor 9 for taking out the output signal is disposed on the lid 82 described above. More specifically, as shown in FIG. 2, the lid 82 is formed with a second through hole 8h2 through which the output terminal 9x passes, and the output terminal 9x is directed upward through the second through hole 8h2. It extends.
  • the 2nd through-hole 8h2 corresponding to each of the two output terminals 9x is formed in the cover body 82 of this embodiment, the two output terminals 9x are extended from one 2nd through-hole 8h2. You may make it come out. Further, four of the two output terminals 9x and the two driving terminals 7x described above may extend from one through hole.
  • each terminal is a driving terminal 7x or an output by marking (not shown) in the vicinity of the through hole 8h1 or the second through hole 8h2 in the upper surface 8a of the lid 82. Whether the terminal 9x is a positive terminal or a negative terminal can be identified.
  • the output terminal 9x of the second piezo stack 91 located on the upper side is The second through hole 8h2 located above the second through hole 8h2 can be taken out relatively easily.
  • the first piezo stack 71 located on the lower side is at a distance from the through hole 8h1, and if the drive terminal 7x is arranged on the lid 82, the drive terminal 7x and the first piezo stack 71 are electrically connected. It is necessary to extend the electric cable to be connected from the lower side in the casing 8 to the upper side, which may make wiring work difficult. This is a problem that also occurs when the vertical relationship between the first piezo stack 71 and the second piezo stack 91 is reversed.
  • a cylindrical body is used as the casing body 81, and square pillars are used as the first piezo stack 71 and the second piezo stack 91. Yes.
  • a gap S between the inner peripheral surface 811 of the casing body 81 and the outer peripheral surface 712 of the first piezo stack 71 and the outer peripheral surface 913 of the second piezo stack 91.
  • the drive terminal 7x of the actuator 7 and the output terminal 9x of the displacement sensor 9 are arranged on the upper surface 8a of the lid 82, so that the output There is no need to take out the terminal 9x from the side of the casing 8, and the fluid control valve 3 can be made simple and compact.
  • the extension of the first piezo stack 71 is directly transmitted to the second piezo stack 91 and the displacement of the valve body 6 Can be detected with high accuracy.
  • the present invention is not limited to the above embodiment.
  • the actuator 7 may have a plurality of first piezo stacks 71.
  • the actuator 7 has two first piezo stacks 71, and a second piezo stack 91 that constitutes the displacement sensor 9 is disposed between the first piezo stacks 71.
  • the displacement amount can be detected with high accuracy while increasing the displacement amount of the valve element.
  • the two first piezo stacks 71 may be adjacent to each other, and the second piezo stack 91 may be disposed above or below them.
  • the opposing surface of the 1st piezo stack and the 2nd piezo stack was mutually in surface contact, these opposing surfaces do not necessarily need to be in direct contact and between these opposing surfaces. Inclusions may be interposed between them.
  • the casing body has a cylindrical shape
  • the first piezo stack and the second piezo stack have a quadrangular prism shape.
  • the first piezo stack and the second piezo stack have a polygonal column shape.
  • a cylindrical shape having a smaller diameter than the casing body may be used.
  • the casing body may be a rectangular cylinder, and the first piezo stack and the second piezo stack may be cylindrical.
  • the fluid control valve of the above embodiment is normally closed, but may be a so-called normally open valve.
  • fluid control valve of the above embodiment is provided on the downstream side of the flow rate detection mechanism, but may be provided on the upstream side of the flow rate detection mechanism.
  • the fluid control valve of the present invention may be used in a pressure type fluid control device.
  • a fluid control valve according to the present invention a pressure sensor provided on the downstream side of the fluid control valve, and a sonic nozzle provided on the downstream side of the pressure sensor.
  • the structure which comprises fluid resistance, such as these, is mentioned.
  • FIG. 5 (b) a configuration in which pressure sensors are provided on the upstream side and downstream side of the fluid resistance, and a plurality of resistors are arranged in parallel as shown in FIGS. 5 (c) and 5 (d). And the like.
  • a flow sensor or a regulator may be provided on the flow path.
  • the displacement sensor is not limited to one using a piezo stack.
  • a fluid control valve 3 controls a fluid flowing through a flow path 51, and includes a valve body 6, an actuator 7 that displaces the valve body 6,
  • the actuator 7 is accommodated, and includes a casing 8 provided with a driving terminal 7x of the actuator 7 at an upper portion, and a displacement sensor 9 in which the magnitude of an output signal changes according to the displacement of the valve body 6,
  • the structure provided below the casing 8 without the displacement sensor 9 being accommodated in the casing 8 is mentioned. Since the configuration other than the displacement sensor 9 is the same as that of the above embodiment, the description thereof is omitted here.
  • the displacement sensor 9 is of an eddy current type in which the sensing surface 91 is disposed opposite to the diaphragm member 721, for example. By detecting the displacement of the diaphragm member 721, the displacement of the valve body 6 is detected from this detected value. It is structured to understand. However, the output terminal 9 x of the displacement sensor 9 is pulled out from the side of the casing 8 without passing through the casing 8. More specifically, the connection line 9L that connects the sensing surface 91 and the output terminal 9x extends upward along the outer peripheral surface of the casing 8 without passing through the casing 8. When the displacement sensor 9 is provided below the casing 8 as described above, the fluid control valve can be simplified by pulling out the output terminal 9x of the displacement sensor 9 from the side of the casing 8 as compared with the case of passing through the casing 8. Can be configured.
  • a fluid control valve can be made into a simple and small structure, detecting the displacement of a valve body using a displacement sensor.

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Electrically Driven Valve-Operating Means (AREA)
  • Indication Of The Valve Opening Or Closing Status (AREA)
  • Valve Housings (AREA)
PCT/JP2017/035808 2016-10-21 2017-10-02 流体制御弁、流体制御装置、及び駆動機構 WO2018074208A1 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2018546228A JP6920331B2 (ja) 2016-10-21 2017-10-02 流体制御弁、流体制御装置、及び駆動機構

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2016207323 2016-10-21
JP2016-207323 2016-10-21

Publications (1)

Publication Number Publication Date
WO2018074208A1 true WO2018074208A1 (ja) 2018-04-26

Family

ID=62019371

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2017/035808 WO2018074208A1 (ja) 2016-10-21 2017-10-02 流体制御弁、流体制御装置、及び駆動機構

Country Status (3)

Country Link
JP (1) JP6920331B2 (zh)
TW (1) TWI718340B (zh)
WO (1) WO2018074208A1 (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020092192A (ja) * 2018-12-06 2020-06-11 株式会社堀場エステック ピエゾアクチュエータ、及び、流体制御弁

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11506295B2 (en) * 2018-07-24 2022-11-22 Fujikin Incorporated Valve device, fluid control device, fluid control method, semiconductor manufacturing apparatus, and semiconductor manufacturing method

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62288782A (ja) * 1986-06-09 1987-12-15 Nippon Denso Co Ltd 制御弁
JPH07230322A (ja) * 1994-02-20 1995-08-29 Stec Kk 気化流量制御器
JP2014047821A (ja) * 2012-08-30 2014-03-17 Nec Tokin Corp 流量制御弁

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03229079A (ja) * 1990-01-31 1991-10-11 Komatsu Ltd 流量制御弁
JP2000197374A (ja) * 1998-12-25 2000-07-14 Stec Inc ピエゾアクチュエ―タ並びにこれを用いた制御弁
DE102005009147A1 (de) * 2005-03-01 2006-09-07 Robert Bosch Gmbh Kraftstoffinjektor für Verbrennungskraftmaschinen
DE102005046122A1 (de) * 2005-09-27 2007-03-29 Robert Bosch Gmbh Brennstoffeinspritzventil
JP5652318B2 (ja) * 2011-05-11 2015-01-14 株式会社デンソー センサモジュール
CN103867776A (zh) * 2012-12-10 2014-06-18 大连乾宝铸铁有限公司 数字流量阀
WO2014201032A1 (en) * 2013-06-11 2014-12-18 Illinois Tool Works Inc. High flow piezo type valve

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62288782A (ja) * 1986-06-09 1987-12-15 Nippon Denso Co Ltd 制御弁
JPH07230322A (ja) * 1994-02-20 1995-08-29 Stec Kk 気化流量制御器
JP2014047821A (ja) * 2012-08-30 2014-03-17 Nec Tokin Corp 流量制御弁

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020092192A (ja) * 2018-12-06 2020-06-11 株式会社堀場エステック ピエゾアクチュエータ、及び、流体制御弁
JP7210253B2 (ja) 2018-12-06 2023-01-23 株式会社堀場エステック 流体制御弁
US11867308B2 (en) 2018-12-06 2024-01-09 Horiba Stec, Co., Ltd. Piezoelectric actuator and fluid control valve

Also Published As

Publication number Publication date
TW201816312A (zh) 2018-05-01
TWI718340B (zh) 2021-02-11
JP6920331B2 (ja) 2021-08-18
JPWO2018074208A1 (ja) 2019-08-22

Similar Documents

Publication Publication Date Title
JP6014225B2 (ja) 測定機構
JP5220642B2 (ja) 差圧式流量計および流量コントローラ
JP5933936B2 (ja) 流量測定システム、流量制御システム、及び、流量測定装置
JP6499969B2 (ja) 流体制御弁
JP5697453B2 (ja) 流量測定機構、マスフローコントローラ及び圧力センサ
JP6475441B2 (ja) 圧電素子駆動式バルブ及び圧電素子駆動式バルブを備えた流量制御装置
KR20170042227A (ko) 유체 제어 밸브 및 그 제어 프로그램을 기록한 기록 매체
WO2016056419A1 (ja) 圧力センサ
WO2018074208A1 (ja) 流体制御弁、流体制御装置、及び駆動機構
KR101209762B1 (ko) 유량 센서 및 이것을 사용한 질량 유량 제어 장치
JP2022010221A (ja) 流量制御装置、流量制御方法、及び、流量制御装置用プログラム
EP2216632B1 (en) Differential-pressure flowmeter and flow-rate controller
US10013002B2 (en) Fluid flow regulator device, comprising a valve member and a valve seat defining a fluid flow surface area, as well as method of using the same
JP2010066177A (ja) 流量計及び流量制御装置
JP5833403B2 (ja) 流体機構及び該流体機構を構成する支持部材
Groenesteijn et al. Single-chip mass flow controller with integrated coriolis flow sensor and proportional control valve
JP6106773B2 (ja) 流量測定装置及び流量制御装置
JP6082082B2 (ja) 流体機構及び該流体機構を構成する支持部材
JP6481282B2 (ja) 気体流量制御装置および気体流量制御弁
US20200393277A1 (en) Thermoresistive Micro Sensor Device
JP2017009563A (ja) 圧力センサ
JP2005098826A (ja) 渦流量計
JP2021093182A (ja) 流量制御装置、流量制御方法、及び、流量制御装置用プログラム
JP5202465B2 (ja) 流量制御装置
JP2017009562A (ja) 圧力センサ

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 17861983

Country of ref document: EP

Kind code of ref document: A1

ENP Entry into the national phase

Ref document number: 2018546228

Country of ref document: JP

Kind code of ref document: A

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 17861983

Country of ref document: EP

Kind code of ref document: A1