JP6014225B2 - 測定機構 - Google Patents
測定機構 Download PDFInfo
- Publication number
- JP6014225B2 JP6014225B2 JP2015177573A JP2015177573A JP6014225B2 JP 6014225 B2 JP6014225 B2 JP 6014225B2 JP 2015177573 A JP2015177573 A JP 2015177573A JP 2015177573 A JP2015177573 A JP 2015177573A JP 6014225 B2 JP6014225 B2 JP 6014225B2
- Authority
- JP
- Japan
- Prior art keywords
- fluid
- flow path
- flow rate
- resistance member
- fluid resistance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D7/00—Control of flow
- G05D7/06—Control of flow characterised by the use of electric means
- G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
- G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
- G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
- G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
- G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
- G01F1/363—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction with electrical or electro-mechanical indication
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
- G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
- G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
- G01F1/40—Details of construction of the flow constriction devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
- G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
- G01F1/48—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by a capillary element
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Engineering & Computer Science (AREA)
- Automation & Control Theory (AREA)
- Measuring Volume Flow (AREA)
- Flow Control (AREA)
Description
さらに、前記凹部1b’を閉塞するための専用の蓋体やパッキンが必要となるため、構造が複雑になったり多くのシール部材が必要になったりしてコスト高を招く場合もある。
本実施形態に係るマスフローコントローラ100は、例えばガスパネルに搭載されて半導体製造装置の材料供給ラインの一部を構成するものであり、図1に流体回路図、図2に全体斜視図を示すように、流量制御対象である流体を流す内部流路1aと、前記内部流路1a上に設けられた流量調整弁4と、この流量調整弁4よりも下流側に設けられ、当該内部流路1aを流れる流体の流量を測定する流量測定機構10と、この流量測定機構10による測定流量が予め定めた目標流量になるように前記流量調整弁4を制御する制御回路6(図1には示していない)とから構成されている。以下に各部を詳述する。
図示しないセンサ素子は、感圧面2b1を形成する壁体の裏側に接触させてある。
なお、本発明は前記実施形態に限られるものではない。
流体抵抗部材は、音速ノズルを利用したものでもよい。
10・・・流量測定機構
1・・・ボディ
1a・・・内部流路
1a(2)・・・上流側内部流路
1a(3)・・・下流側内部流路
1h・・・凹部
1c・・・外表面(部品取付面)
21、22・・・圧力センサ
23・・・熱式流量センサ
2a1・・・圧力導入口、流体導入口(導入口)
2a2・・・導出口
3・・・流体抵抗部材
3a・・・抵抗流路
3c・・・連通路
4・・・流量調整弁
6・・・制御回路
Claims (5)
- 測定対象流体が流れる内部流路を有したボディと、
前記ボディの外表面に開口させて形成されており、その内表面に前記内部流路の開口端が開口する凹部と、
前記凹部内に収容される流体抵抗部材と、
前記流体抵抗部材を前記ボディに対して押さえつける押圧固定部材と、
前記押圧固定部材の内部に形成され、当該押圧固定部材の外表面に開口端が開口する流体流通路と、
前記流体抵抗部材に形成され、前記内部流路と前記流体流通路を連通させる連通路と、を備え、
前記流体抵抗部材が対向する一対の面を有しており、
前記流体抵抗部材の一方の面が前記押圧固定部材によって押圧された状態において、当該流体抵抗部材の一方の面によって前記流体流通路の開口端の周囲にシール面が形成されるとともに、当該流体抵抗部材の他方の面によって前記内部流路の開口端の周囲にシール面が形成されるように構成されていることを特徴とする流体測定機構。 - 前記流体抵抗部材が、前記凹部の底面と前記押圧固定部材との間で前記連通路を流れる流体の流れ方向に挟持されている請求項1記載の流体測定機構。
- 前記流体抵抗部材が前記押圧固定部材によって押圧されることだけで前記凹部内に固定されるように構成されている請求項1又は2に記載の流体測定機構。
- 前記流体抵抗部材が、音速ノズルである請求項1乃至3いずれかに記載の流体測定機構。
- 請求項1乃至4いずれかに記載の流体測定機構を備えたことを特徴とするマスフローコントローラ。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015177573A JP6014225B2 (ja) | 2009-10-01 | 2015-09-09 | 測定機構 |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009229267 | 2009-10-01 | ||
JP2009229267 | 2009-10-01 | ||
JP2015177573A JP6014225B2 (ja) | 2009-10-01 | 2015-09-09 | 測定機構 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010538665A Division JP5808537B2 (ja) | 2009-10-01 | 2010-09-28 | 流量測定機構及びマスフローコントローラ |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2016035462A JP2016035462A (ja) | 2016-03-17 |
JP6014225B2 true JP6014225B2 (ja) | 2016-10-25 |
Family
ID=43826225
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010538665A Active JP5808537B2 (ja) | 2009-10-01 | 2010-09-28 | 流量測定機構及びマスフローコントローラ |
JP2015177573A Active JP6014225B2 (ja) | 2009-10-01 | 2015-09-09 | 測定機構 |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010538665A Active JP5808537B2 (ja) | 2009-10-01 | 2010-09-28 | 流量測定機構及びマスフローコントローラ |
Country Status (3)
Country | Link |
---|---|
JP (2) | JP5808537B2 (ja) |
TW (1) | TWI491852B (ja) |
WO (1) | WO2011040409A1 (ja) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5933936B2 (ja) * | 2011-06-17 | 2016-06-15 | 株式会社堀場エステック | 流量測定システム、流量制御システム、及び、流量測定装置 |
US9188989B1 (en) | 2011-08-20 | 2015-11-17 | Daniel T. Mudd | Flow node to deliver process gas using a remote pressure measurement device |
US9958302B2 (en) | 2011-08-20 | 2018-05-01 | Reno Technologies, Inc. | Flow control system, method, and apparatus |
WO2014040002A2 (en) | 2012-09-10 | 2014-03-13 | Mudd Daniel T | Pressure based mass flow controller |
JP6416529B2 (ja) * | 2014-07-23 | 2018-10-31 | 株式会社フジキン | 圧力式流量制御装置 |
JP5781711B1 (ja) * | 2015-03-06 | 2015-09-24 | 山洋電気株式会社 | 測定装置 |
JP6106773B2 (ja) * | 2016-01-28 | 2017-04-05 | 株式会社堀場エステック | 流量測定装置及び流量制御装置 |
US11144075B2 (en) | 2016-06-30 | 2021-10-12 | Ichor Systems, Inc. | Flow control system, method, and apparatus |
US10838437B2 (en) | 2018-02-22 | 2020-11-17 | Ichor Systems, Inc. | Apparatus for splitting flow of process gas and method of operating same |
US10679880B2 (en) | 2016-09-27 | 2020-06-09 | Ichor Systems, Inc. | Method of achieving improved transient response in apparatus for controlling flow and system for accomplishing same |
US10303189B2 (en) | 2016-06-30 | 2019-05-28 | Reno Technologies, Inc. | Flow control system, method, and apparatus |
US10663337B2 (en) | 2016-12-30 | 2020-05-26 | Ichor Systems, Inc. | Apparatus for controlling flow and method of calibrating same |
JP2024512898A (ja) | 2021-03-03 | 2024-03-21 | アイコール・システムズ・インク | マニホールドアセンブリを備える流体流れ制御システム |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0222647Y2 (ja) * | 1985-05-09 | 1990-06-19 | ||
JPH06258106A (ja) * | 1993-03-02 | 1994-09-16 | Gijutsu Kaihatsu Sogo Kenkyusho:Kk | 差圧流量計 |
JPH0863235A (ja) * | 1994-08-24 | 1996-03-08 | Burutsukusu Instr Kk | 差圧式質量流量コントロール装置 |
JP2001147722A (ja) * | 1999-11-22 | 2001-05-29 | Ace:Kk | ガス流量制御装置 |
US6539968B1 (en) * | 2000-09-20 | 2003-04-01 | Fugasity Corporation | Fluid flow controller and method of operation |
WO2003100358A1 (en) * | 2002-05-29 | 2003-12-04 | Ckd Corporation | Thermal flowmeter |
SG144762A1 (en) * | 2002-07-19 | 2008-08-28 | Entegris Inc | Fluid flow measuring and proportional fluid flow control device |
US7222029B2 (en) * | 2004-07-08 | 2007-05-22 | Celerity, Inc. | Attitude insensitive flow device system and method |
US7000463B1 (en) * | 2004-11-12 | 2006-02-21 | Mks Instruments, Inc. | Reynolds number correction function for mass flow rate sensor |
KR100963937B1 (ko) * | 2005-06-24 | 2010-06-17 | 씨케이디 가부시키 가이샤 | 유량 제어 밸브 |
JP4589846B2 (ja) * | 2005-08-24 | 2010-12-01 | 株式会社堀場エステック | マスフローコントローラ用ボディ構造 |
JP4700448B2 (ja) * | 2005-09-12 | 2011-06-15 | サーパス工業株式会社 | 差圧式流量計 |
-
2010
- 2010-09-28 JP JP2010538665A patent/JP5808537B2/ja active Active
- 2010-09-28 WO PCT/JP2010/066848 patent/WO2011040409A1/ja active Application Filing
- 2010-09-30 TW TW099133366A patent/TWI491852B/zh active
-
2015
- 2015-09-09 JP JP2015177573A patent/JP6014225B2/ja active Active
Also Published As
Publication number | Publication date |
---|---|
JP5808537B2 (ja) | 2015-11-10 |
TW201132942A (en) | 2011-10-01 |
JPWO2011040409A1 (ja) | 2013-02-28 |
TWI491852B (zh) | 2015-07-11 |
WO2011040409A1 (ja) | 2011-04-07 |
JP2016035462A (ja) | 2016-03-17 |
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