WO2011040330A1 - 流量調整弁及びマスフローコントローラ - Google Patents
流量調整弁及びマスフローコントローラ Download PDFInfo
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- WO2011040330A1 WO2011040330A1 PCT/JP2010/066553 JP2010066553W WO2011040330A1 WO 2011040330 A1 WO2011040330 A1 WO 2011040330A1 JP 2010066553 W JP2010066553 W JP 2010066553W WO 2011040330 A1 WO2011040330 A1 WO 2011040330A1
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- flow rate
- housing
- piezoelectric element
- valve
- flow path
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- 230000001105 regulatory effect Effects 0.000 title abstract description 8
- 239000012530 fluid Substances 0.000 claims description 39
- 230000007246 mechanism Effects 0.000 claims description 7
- 230000008602 contraction Effects 0.000 claims description 3
- 238000009413 insulation Methods 0.000 abstract description 4
- 238000011144 upstream manufacturing Methods 0.000 description 11
- 230000002093 peripheral effect Effects 0.000 description 8
- 238000004891 communication Methods 0.000 description 6
- 238000007789 sealing Methods 0.000 description 6
- 230000006870 function Effects 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 238000005259 measurement Methods 0.000 description 3
- 230000009467 reduction Effects 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 2
- 230000001276 controlling effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000013459 approach Methods 0.000 description 1
- 238000009530 blood pressure measurement Methods 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000005489 elastic deformation Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
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- 230000035945 sensitivity Effects 0.000 description 1
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Classifications
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D7/00—Control of flow
- G05D7/06—Control of flow characterised by the use of electric means
- G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
- G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
- G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K27/00—Construction of housing; Use of materials therefor
- F16K27/02—Construction of housing; Use of materials therefor of lift valves
- F16K27/0236—Diaphragm cut-off apparatus
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/004—Actuating devices; Operating means; Releasing devices actuated by piezoelectric means
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
- F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
Definitions
- the present invention relates to a flow rate adjustment valve capable of precisely controlling the flow rate and pressure of a material gas used in a semiconductor process, and a mass flow controller using the flow rate adjustment valve.
- a flow control valve using a piezoelectric element is known to be capable of precisely controlling the flow rate.
- a plate-like diaphragm as a valve element is energized by an actuator using a piezoelectric element.
- the flow rate is controlled by adjusting the clearance between the valve seat and the valve seat.
- the actuator includes a piezoelectric element that is hermetically accommodated and sealed in an expandable and contractible metal cylindrical case made of bellows. Then, by applying an electrical signal to the piezoelectric element to expand and contract, the front end surface of the metal cylindrical case is advanced and retracted, and a separately provided diaphragm is urged by the front end surface.
- the reason why the piezoelectric element is sealed in the metal case is to prevent insulation failure due to the influence of humidity.
- the diaphragm that directly touches the gas, and the actuator does not directly contact the gas, and the actuator is further accommodated in the housing (not shown), so even if there is no metal cylindrical case, the piezoelectric The device is not affected by outside air humidity or the like. Therefore, a metal cylindrical case for enclosing the piezoelectric element is not necessary. In other words, the conventional configuration unnecessarily increases the number of parts and hinders downsizing and cost reduction.
- Patent Document 1 describes a flow rate adjusting valve having a configuration in which a diaphragm is directly urged by a piezoelectric element.
- the housing enclosing the piezoelectric element is provided with a screw for adjusting the initial position of the piezoelectric element, but gas leakage from the screwed portion of the screw occurs. Airtightness cannot be ensured, and insulation failure or the like may occur in the piezoelectric element.
- the present invention has been made in view of the above problems, and has a simple and easy-to-assemble configuration with a small number of parts, is easy to miniaturize, and is less likely to cause failures such as defective insulation.
- the present invention is intended to provide a valve and a mass flow controller using the valve.
- the flow rate adjusting valve includes a valve seat member and a valve body member that are attached to a body having an internal flow path and adjust the flow rate of fluid flowing through the internal flow path
- the valve body member has a cylindrical housing, a diaphragm member that is an elastically deformable valve body provided so as to close one end surface of the housing, and a tip of the diaphragm member abuts on an inner surface of the diaphragm member.
- Retractable piezoelectric element disposed in the housing, advancing / retracting attached to the other end of the housing so as to be movable in the same direction as the expansion / contraction direction of the piezoelectric element, and airtightness inside the housing is maintained.
- a deformable hermetic holding member provided inside the housing rather than the advancement / retraction, and the advancement / retraction comes into contact with the piezoelectric element via the hermetic holding member and adjusts its position. It is characterized by being.
- the diaphragm member functions as a sealing member for hermetically sealing the piezoelectric element to the housing and a valve body for adjusting the flow rate, so the number of parts can be reduced and the size can be reduced. And space saving.
- a diaphragm member is provided on one end surface of the housing, and an airtight holding member is provided on the other end portion, and the position of the piezoelectric element can be adjusted by moving forward and backward through the airtight holding member. The airtightness in the housing can be reliably maintained.
- the housing is composed of at least one end side element and the other end side element, and the diaphragm member is integrally formed on the one end side element.
- the diaphragm member functions as a sealing member for the housing and a valve body, the number of parts can be reduced, and the size and space can be reduced.
- the diaphragm member is provided on one end surface of the housing, the manufacturing is simple, and the airtight holding member is provided on the other end portion. Can be done while holding.
- Fluid circuit diagram of mass flow controller in one embodiment of the present invention The whole perspective view of the mass flow controller in the embodiment.
- the longitudinal cross-sectional view which shows the internal structure of the massflow controller in the embodiment.
- the top view of the massflow controller in the embodiment The cross-sectional view which shows the internal structure of the pressure sensor in the embodiment.
- the disassembled perspective view of the massflow controller in the embodiment The fragmentary sectional view which shows the internal structure of the flow regulating valve in the embodiment.
- the fragmentary sectional view which shows the internal structure of the flow regulating valve in the embodiment The fragmentary sectional view which shows the internal structure in the state which accommodated the fluid resistance member in the same embodiment in the recessed part.
- the schematic sectional drawing which shows the internal structure of the conventional flow regulating valve.
- FIG. 1 shows a fluid circuit diagram
- FIG. 2 shows an overall perspective view.
- a flow rate control valve 4 provided on the internal flow path 1a, a flow control valve 4 provided on the internal flow path 1a, and a downstream side of the flow control valve 4;
- a flow rate measurement mechanism 10 that measures the flow rate of the fluid flowing through the internal flow path 1a, and a control circuit 6 that controls the flow rate adjustment valve 4 so that the flow rate measured by the flow rate measurement mechanism 10 becomes a predetermined target flow rate (FIG. 1). Is not shown).
- FIG. 1 shows a fluid circuit diagram
- FIG. 2 shows an overall perspective view.
- a flow rate control valve 4 provided on the internal flow path 1a, a flow control valve 4 provided on the internal flow path 1a, and a downstream side of the flow control valve 4;
- a flow rate measurement mechanism 10 that measures the flow rate of the fluid flowing through the internal flow path 1a, and a control circuit 6 that controls the flow rate adjustment valve 4 so that the flow rate measured by the flow rate measurement mechanism 10 becomes
- the body 1 has a long and thin rectangular parallelepiped shape as shown in FIG.
- One surface parallel to the longitudinal direction of the body 1 is set as a component mounting surface 1c, and the flow rate adjusting valve 4, the pressure sensors 21, 22 and the like are mounted only on the component mounting surface 1c. It is. Further, the surface opposite to the mounting surface 1c is used as a fixing surface for fixing the body 1 to a panel or the like. Further, nothing is attached to the other two surfaces (hereinafter referred to as side surfaces) parallel to the longitudinal direction so that the side surfaces of the plurality of bodies 1 can be arranged in close contact or close to each other.
- the internal flow path 1 a is formed by opening the fluid inlet 1 d and the fluid outlet 1 e at both end faces orthogonal to the longitudinal direction of the body 1. And when it sees from the direction orthogonal to the said component attachment surface 1c (henceforth planar view), it is comprised so that a fluid may flow along a longitudinal direction.
- the flow rate adjusting valve 4 has a substantially columnar shape including a valve seat member 42 and a valve body member 41, and a fluid introduction port 1 d in the component mounting surface 1 c. It is vertically attached to one end of the side.
- the maximum width dimension of the flow rate adjusting valve 4 is set smaller than or equal to the width dimension (dimension in the direction orthogonal to the longitudinal direction) of the component mounting surface 1c. As shown in FIG. In a state where the regulating valve 4 is attached to the body 1, the flow regulating valve 4 is configured not to protrude in the width direction from the body 1.
- the valve seat member 42 has a substantially columnar shape in which an annular seat surface 42a protrudes from the center of the top surface as shown in FIGS. Is. Further, one end of the valve seat member 42 opens into the center of the top surface of the valve seat member 42 (specifically, the inside of the valve seat surface 42a), and the other end of the valve seat member 42 is in the center of the bottom surface of the valve seat member 42.
- a fluid introduction path 42b that opens to one end of the valve seat member 42, and one end that opens to the peripheral edge of the top surface of the valve seat member 42 (more specifically, outside the valve seat surface 42a) and the other end that is the peripheral edge of the bottom surface of the valve seat member 42.
- a fluid lead-out path 42c opening in the part is penetrated.
- the valve seat member 42 is fitted into a bottomed recess 1f opened at one end of the component mounting surface 1c.
- the bottomed recess 1f is provided at a position where the internal flow path 1a is divided. Specifically, the end of the upstream internal flow path 1a (1) of the divided internal flow path 1a is opened at the center of the bottom surface of the bottomed recess 1f, and the bottom of the bottomed recess 1f is opened.
- the starting end of the downstream internal flow path 1a (2) is opened on the side peripheral surface.
- the valve body member 41 includes a casing 411 configured to be in an airtight state and a columnar stack accommodated in the casing 411. And a piezoelectric element 412.
- the housing 411 has a long cylindrical housing 411a, an elastically deformable thin plate-like diaphragm member 411b that hermetically closes one end face of the housing 411a, and the other end face of the housing 411a airtightly closed. And a closing member 411c.
- the housing 411a has a cylindrical one end side element 411a. Attached to the component mounting surface 1c so as to cover the bottomed recess 1f. 1 and the one end side element 411a. 1 is connected to the other end side element 411a. 2.
- the diaphragm member 411b includes protrusions 411b. 1 is a thin plate having elastic deformation and having one end side element 411a. 1 is formed integrally.
- the closing member 411c is a disk-shaped member body 411c attached so as to close the other end surface of the housing 411a. 1 and the member main body 411c.
- Adjustment screw 411c which is advancing / retracting screwed into a female screw hole penetrating in the center of 1. 2 and the member main body 411c. 1 is attached to the inner surface of the airtight holding member 411c. 3.
- the member main body 411c. 1 a piezoelectric element driving terminal T is hermetically penetrated to form a so-called hermetic structure.
- the airtight holding member 411c. 3 is a cylindrical bellows portion 411c. 31 and the bellows portion 411c. 31.
- the columnar member 411c. 32 is an adjustment screw 411c. 2 and the laminated piezoelectric element 412, and the adjusting screw 411 c. 2 is screwed back and forth, whereby the columnar member 411c.
- the position of the laminated piezoelectric element 412 in the axial direction can be adjusted via 32. Note that the columnar member 411c.
- the tip end face of 32 and the base end face of the laminated piezoelectric element 412 are bonded.
- the one end surface of the housing 411a is attached to the component attachment surface 1c of the body 1 via the seal member SL1, thereby opening the opening of the bottomed recess 1f formed in the body 1.
- the diaphragm member 411b is opposed to the valve seat surface 42a and the distance between the diaphragm member 411b and the valve seat surface 42a is changed by the expansion and contraction of the piezoelectric element 412, and the diaphragm member 411b becomes the valve body 41a. It is supposed to function as.
- one end surface of the housing 411a and the top peripheral surface 42d of the valve seat member 42 are brought into close contact with each other by a reaction force caused by the compression of the seal member SL2.
- the parallelism between the outer surface of the diaphragm member 411b and the valve seat surface 42a is ensured with high accuracy, and the gap between them functions as an ideal orifice.
- the flow rate measuring mechanism 10 includes a resistance channel 3a provided on the internal channel 1a, and an internal channel 1a on the upstream side and the downstream side of the resistance channel 3a, as shown in FIG. A fluid flowing through the internal flow path 1a based on a pressure measurement value by the pressure sensors 21 and 22 and a resistance value of the resistance flow path 3a.
- the flow rate is configured to be measurable.
- the resistance flow path 3a is formed in a rectangular parallelepiped fluid resistance member 3 in which a plurality of rectangular thin plates 31 to 35 are laminated. That is, as shown in FIG. 6, a through hole 3b that becomes a communication passage 3c that overlaps each thin plate or a part of the thin plate and penetrates in the stacking direction when laminated, and an inner end communicates with the communication passage 3c. Then, a slit 3d having an outer end opened on a side surface orthogonal to the longitudinal direction is provided, and when the thin plates 31 to 35 are laminated, the resistance flow path 3a is formed by the slit 3d.
- the flow path resistance can be adjusted by changing the shape and number of the slits 3d.
- a rectangular recess 1h is provided at the center in the longitudinal direction of the component mounting surface 1c of the body 1 so as to divide the internal flow path 1a.
- the fluid resistance member 3 is attached to the recess 1h by being fitted with a gap in the longitudinal direction of the body 1 without a gap in the width direction.
- the end of the upstream internal flow channel 1a (2) of the internal flow channel 1a divided by the recess 1h is opened, while the bottom surface edge in the longitudinal direction of the bottomed recess 1f. Is configured such that the start end of the downstream side internal flow path 1a (3) is opened.
- the fluid resistance member 3 When the fluid resistance member 3 is fitted in the recess 1h, one end on the bottom side of the communication path 3c is connected to the end of the upstream internal flow path 1a (2) via the seal member SL3, and the resistance The outer end of the flow path 3a communicates with the start end of the downstream internal flow path 1a (3). That is, the upstream internal flow path 1a (2) is connected to the downstream internal flow path 1a (3) via the communication path 3c and the resistance flow path 3a.
- the pressure sensors 21 and 22 include a main body 2A having a flat shape and a sensor element such as a piezoelectric element (not shown) housed in the main body 2A.
- the flat main body 2A is arranged so that the face plate portion is perpendicular to the component mounting surface 1c of the body 1 and parallel to the longitudinal direction of the body 1 with respect to the component mounting surface 1c of the body 1. It is attached.
- the thickness dimension of the pressure sensors 21 and 22 is set smaller than or equal to the width dimension orthogonal to the longitudinal direction of the component mounting surface 1c, and the pressure sensor 21 in the mounted state. , 22 does not protrude in the width direction from the body 1.
- a fluid filling chamber 2b having a pressure-sensitive surface 2b1 formed on the inner surface, a pressure introduction port 2a1 provided on the mounting surface 2a for the body 1, and a fluid introduction path 2c communicating with the fluid filling chamber 2b
- the sensor element detects the amount of displacement of the pressure-sensitive surface 2b1 received by pressure, and outputs it as a pressure signal.
- the fluid filling chamber 2b has a thin disk shape formed in the main body 2A, and one face plate portion of the fluid filling chamber 2b is used as the pressure sensitive surface 2b1.
- the pressure-sensitive surface 2b1 is set to be parallel to the longitudinal direction of the body 1 and perpendicular to the component mounting surface 1c when the pressure sensors 21 and 22 are attached to the body 1.
- a sensor element (not shown) is brought into contact with the back side of the wall forming the pressure-sensitive surface 2b1.
- the downstream pressure sensor 22 is attached to the said component attachment surface 1c. Attach to the other end in the longitudinal direction.
- the attachment surface 2a hermetically seals the opening of the recess 1h via the annular seal member SL4, and the inside of the recess 1h.
- the fluid resistance member 3 is configured to be pressed and clamped between the bottom surface of the recess 1h. As a result, it is not necessary to seal the fluid resistance member 3 with a dedicated lid or the like, and the cost reduction can be achieved by promoting the reduction in the number of parts and the ease of assembly.
- the communication path 3c in the fluid resistance member 3 is connected to the pressure introduction port 2a1 of the upstream pressure sensor 21, and the internal flow path 1a (2) upstream of the resistance flow path 3a is connected to the communication path 3c. It is constituted so as to communicate with the upstream pressure sensor 21 via.
- the internal flow path 1a (3) on the downstream side of the resistance flow path 3a extends along the longitudinal direction of the body 1 to reach the fluid outlet 1e, and is further downstream by the branch flow path 1i branched in the middle.
- the side pressure sensor 22 is connected to the pressure inlet 2a1.
- the control circuit 6 is provided separately from or attached to the body 1 and includes a CPU, a memory, an I / O channel, an A / D converter, a D / A converter, and other analog or digital electric circuits. ing. Then, the CPU and other peripheral devices cooperate with each other in accordance with the program stored in the memory, so that the control circuit 6 controls the flow rate adjusting valve 4 to set the fluid flow rate of the internal flow path 1a from the outside. Adjust the flow rate.
- the outline of the operation will be briefly described below together with the operation of the mass flow controller.
- the control circuit 6 When the control circuit 6 receives the output signal values from the pressure sensors 21 and 22, the control circuit 6 upstream of the resistance flow path 3 a based on a predetermined conversion formula considering an offset, a coefficient and the like from the output signal values. And the pressure of the fluid on the downstream side is calculated. Based on these pressures and the previously measured fluid resistance value (resistance coefficient) in the resistance channel 3a, fluid viscosity, and the like, the flow rate of the fluid flowing through the resistance channel 3a is calculated.
- the control circuit 6 calculates a deviation between the set flow rate and the calculated flow rate, and the calculated flow rate approaches the set flow rate based on the deviation.
- a command signal for expanding and contracting the laminated piezoelectric element 412 is output to the flow rate adjusting valve 4.
- the separation distance between the valve seat surface 42a and the valve body 41a is varied to adjust the flow rate of the fluid flowing through the flow rate adjusting valve 4, that is, the fluid flowing through the internal flow path 1a.
- the diaphragm member 411b has a function as a sealing member for hermetically sealing the piezoelectric element 412 to the housing 411a and a valve body for adjusting the flow rate. Therefore, the number of parts can be reduced, and it becomes possible to achieve downsizing and space saving.
- a diaphragm member 411b is integrally formed on one end surface of the housing 411a, and an airtight holding member 411c. Since 3 is provided, the airtightness in the housing can be reliably maintained. Further, the airtight holding member 411c. 3 through the adjusting screw 411c. 2, the piezoelectric element 412 can be pushed and pulled, so that the position of the piezoelectric element 412 can be adjusted while maintaining the airtightness in the housing.
- the flow rate adjusting valve 4 and the fluid resistance member 3 are provided side by side on the component mounting surface 1c in the body 1, the volume of the internal flow path 1a connecting between them is provided. Can be reduced as much as possible. Therefore, the time lag between the detection of the flow rate and the control of the flow rate can be reduced, and the control response of the mass flow controller 100 can be greatly improved.
- the fluid resistance member 3 and the pressure sensor 21 are disposed in a substantially direct stack, although the seal member is interposed, it is possible to suppress the body 1 from being elongated in the longitudinal direction as much as possible, and to be compact. Can be promoted.
- the pressure sensors 21 and 22 are configured such that the pressure-sensitive surface 2b1 stands upright with respect to the mounting surface 2a, and the pressure sensors 21 and 22 are viewed in plan view, the fluid flow direction and the pressure-sensitive surface 2b1.
- the pressure-sensitive surface 2b1 stands upright with respect to the mounting surface 2a, and the pressure sensors 21 and 22 are viewed in plan view, the fluid flow direction and the pressure-sensitive surface 2b1.
- the present invention is not limited to the above embodiment, and various modifications can be made without departing from the spirit of the present invention.
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Abstract
Description
ところが、この構成では、ダイヤフラムがハウジングと別に設けられており、ダイヤフラムをハウジングと弁本体との間で挟み込んで固定する構造であることから、シールが難しい。また、圧電素子を封入しているハウジングには、圧電素子の初期位置調整のためのネジが設けられているが、このネジの螺合部分からの気体漏れが発生するため、この点でもハウジング内の気密性が確保できず、圧電素子に絶縁不良等が発生する恐れがある。
前記弁体部材が、筒状をなすハウジングと、該ハウジングにその一端面を閉塞するように設けられた弾性変形可能な弁体たるダイヤフラム部材と、前記ダイヤフラム部材の内面に先端が当接するように前記ハウジング内に配置された伸縮可能な圧電素子と、前記ハウジングの他端部に、前記圧電素子の伸縮方向と同方向に進退可能に取り付けられた進退桿と、前記ハウジング内部の気密性を保持できるように前記進退桿よりも該ハウジングの内側に設けられた変形可能な気密保持部材とを具備し、前記進退桿が前記気密保持部材を介して前記圧電素子に当接しその位置を調整するものであることを特徴とする。
本実施形態に係るマスフローコントローラ100は、例えばガスパネルに搭載されて半導体製造装置の材料供給ラインの一部を構成するものであり、図1に流体回路図、図2に全体斜視図を示すように、流量制御対象である流体が流れる内部流路1aを有するボディ1と、前記内部流路1a上に設けられた流量調整弁4と、この流量調整弁4よりも下流側に設けられ、当該内部流路1aを流れる流体の流量を測定する流量測定機構10と、この流量測定機構10による測定流量が予め定めた目標流量になるように前記流量調整弁4を制御する制御回路6(図1には示していない)とから構成されている。以下に各部を詳述する。
また、このとき、シール部材SL2が圧縮されることによる反力で、前記ハウジング411aの一端面と弁座部材42の頂面周縁面42dとが密接するようにしてある。このことによって、ダイヤフラム部材411bの外面と弁座面42aとの平行度が高い精度で担保され、これらの間の隙間が理想的なオリフィスとして機能するように図っている。
図示しないセンサ素子は、感圧面2b1を形成する壁体の裏側に接触させてある。
また、この流量調整弁と圧力センサを用いて、圧力コントローラを構成しても構わない。
なお、本発明は前記実施形態に限られるものではなく、本発明はその趣旨を逸脱しない範囲で種々の変形が可能である。
10・・・流量測定機構
1・・・ボディ
1a・・・内部流路
4・・・流量調整弁
41・・・弁体部材
411a・・・ハウジング
411a.1・・・一端側要素
411a.2・・・他端側要素
411b・・・ダイヤフラム部材
411c・・・閉塞部材
411c.1・・・部材本体
411c.2・・・進退桿(調整ネジ)
411c.3・・・気密保持部材
412・・・圧電素子
42・・・弁座部材
6・・・制御回路
Claims (3)
- 内部流路を有したボディに取り付けられて前記内部流路を流れる対象流体の流量を調節するものであって、
流量調節のための弁体部材が、
筒状をなすハウジングと、
該ハウジングにその一端面を閉塞するように設けられた弾性変形可能な弁体たるダイヤフラム部材と、
前記ダイヤフラム部材の内面に先端が当接するように前記ハウジング内に配置された伸縮可能な圧電素子と、
前記ハウジングの他端部に、前記圧電素子の伸縮方向と同方向に進退可能に取り付けられた進退桿と、
前記進退桿よりも前記ハウジングの内側に設けられて、該ハウジング内部の気密性を保持する変形可能な気密保持部材とを具備し、
前記進退桿が前記気密保持部材を介して前記圧電素子に当接しその位置を調整するものであることを特徴とする流量調整弁。 - 請求項1記載の前記ハウジングが一端側要素と他端側要素とを連結して構成したものであり、前記一端側要素に前記ダイヤフラム部材が一体成形されていることを特徴とする流量測定機構。
- 請求項1記載の流量調整弁と、前記対象流体の流量を測定する流量測定機構と、前記流量測定機構による測定流量が予め定めた目標流量になるように前記流量調整弁を制御する制御回路とを具備したものであることを特徴とするマスフローコントローラ。
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Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI480712B (zh) * | 2012-04-27 | 2015-04-11 | Fujikin Kk | A gas shunt supply device for a semiconductor manufacturing apparatus |
JPWO2015060176A1 (ja) * | 2013-10-21 | 2017-03-09 | 株式会社堀場エステック | 流体制御弁 |
JP2022037588A (ja) * | 2020-08-25 | 2022-03-09 | Ckd株式会社 | 流体制御機器用子局 |
JP7288463B2 (ja) | 2018-05-07 | 2023-06-07 | エム ケー エス インストルメンツ インコーポレーテッド | 多流路質量流量・質量流量比制御システムのための方法及び装置 |
Families Citing this family (1)
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US9846074B2 (en) * | 2012-01-20 | 2017-12-19 | Mks Instruments, Inc. | System for and method of monitoring flow through mass flow controllers in real time |
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JPH11270699A (ja) * | 1998-03-24 | 1999-10-05 | Aera Japan Ltd | 流量制御弁 |
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WO2008129783A1 (ja) * | 2007-03-30 | 2008-10-30 | Fujikin Incorporated | 圧電素子駆動式制御弁 |
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2010
- 2010-09-24 KR KR1020127008601A patent/KR20120092585A/ko not_active Application Discontinuation
- 2010-09-24 WO PCT/JP2010/066553 patent/WO2011040330A1/ja active Application Filing
- 2010-09-24 JP JP2010537981A patent/JPWO2011040330A1/ja active Pending
- 2010-09-27 TW TW099132627A patent/TW201128342A/zh unknown
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JPH0276859U (ja) * | 1988-12-02 | 1990-06-13 | ||
JPH02116071U (ja) * | 1989-03-06 | 1990-09-17 | ||
JPH11270699A (ja) * | 1998-03-24 | 1999-10-05 | Aera Japan Ltd | 流量制御弁 |
JP2000197374A (ja) * | 1998-12-25 | 2000-07-14 | Stec Inc | ピエゾアクチュエ―タ並びにこれを用いた制御弁 |
WO2008129783A1 (ja) * | 2007-03-30 | 2008-10-30 | Fujikin Incorporated | 圧電素子駆動式制御弁 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI480712B (zh) * | 2012-04-27 | 2015-04-11 | Fujikin Kk | A gas shunt supply device for a semiconductor manufacturing apparatus |
JPWO2015060176A1 (ja) * | 2013-10-21 | 2017-03-09 | 株式会社堀場エステック | 流体制御弁 |
JP7288463B2 (ja) | 2018-05-07 | 2023-06-07 | エム ケー エス インストルメンツ インコーポレーテッド | 多流路質量流量・質量流量比制御システムのための方法及び装置 |
JP2022037588A (ja) * | 2020-08-25 | 2022-03-09 | Ckd株式会社 | 流体制御機器用子局 |
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JPWO2011040330A1 (ja) | 2013-02-28 |
TW201128342A (en) | 2011-08-16 |
KR20120092585A (ko) | 2012-08-21 |
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