WO2008129783A1 - 圧電素子駆動式制御弁 - Google Patents

圧電素子駆動式制御弁 Download PDF

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Publication number
WO2008129783A1
WO2008129783A1 PCT/JP2008/000572 JP2008000572W WO2008129783A1 WO 2008129783 A1 WO2008129783 A1 WO 2008129783A1 JP 2008000572 W JP2008000572 W JP 2008000572W WO 2008129783 A1 WO2008129783 A1 WO 2008129783A1
Authority
WO
WIPO (PCT)
Prior art keywords
actuator
piezoelectric element
piezoelectric
control valve
driven control
Prior art date
Application number
PCT/JP2008/000572
Other languages
English (en)
French (fr)
Inventor
Yohei Sawada
Kaoru Hirata
Ryousuke Dohi
Kouji Nishino
Nobukazu Ikeda
Original Assignee
Fujikin Incorporated
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujikin Incorporated filed Critical Fujikin Incorporated
Priority to US12/593,580 priority Critical patent/US8162286B2/en
Priority to CN2008800110292A priority patent/CN101652592B/zh
Publication of WO2008129783A1 publication Critical patent/WO2008129783A1/ja

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/004—Actuating devices; Operating means; Releasing devices actuated by piezoelectric means
    • F16K31/007—Piezoelectric stacks
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
    • F16K1/32—Details
    • F16K1/34—Cutting-off parts, e.g. valve members, seats
    • F16K1/36—Valve members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/02—Construction of housing; Use of materials therefor of lift valves
    • F16K27/0236—Diaphragm cut-off apparatus
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Electrically Driven Valve-Operating Means (AREA)

Abstract

　圧電アクチュエータ１６が縮む時に圧電素子に掛かる引っ張り力を緩和し、高温環境下に於いても安定した流量制御を行えるようにする。 　本発明の圧電素子駆動式制御弁は、弁座８ｄを有するボディ８と、弁座８ｄに当離座する金属ダイヤフラム９と、ボディ８側に昇降自在に支持されたアクチュエータボックス１３と、ボディ８側に固定された割りベース１１と、アクチュエータボックス１３を下方へ押圧附勢して金属ダイヤフラム９を弁座８ｄへ当座させる皿バネ１５と、アクチュエータボックス１３内に収容され、電圧の印加により上方へ伸長してアクチュエータボックス１３を皿バネ１５の弾性力に抗して押し上げる圧電アクチュエータ１６とから成る圧電素子駆動式制御弁１に於いて、割りベース１１と圧電アクチュエータ１６との間に、圧電アクチュエータ１６の圧電素子に常時圧縮力を加える予圧機構２０を介設する。
PCT/JP2008/000572 2007-03-30 2008-03-13 圧電素子駆動式制御弁 WO2008129783A1 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
US12/593,580 US8162286B2 (en) 2007-03-30 2008-03-13 Piezoelectric driven control valve
CN2008800110292A CN101652592B (zh) 2007-03-30 2008-03-13 压电元件驱动式控制阀

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-090082 2007-03-30
JP2007090082A JP4933936B2 (ja) 2007-03-30 2007-03-30 圧電素子駆動式制御弁

Publications (1)

Publication Number Publication Date
WO2008129783A1 true WO2008129783A1 (ja) 2008-10-30

Family

ID=39875318

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/000572 WO2008129783A1 (ja) 2007-03-30 2008-03-13 圧電素子駆動式制御弁

Country Status (6)

Country Link
US (1) US8162286B2 (ja)
JP (1) JP4933936B2 (ja)
KR (1) KR100993187B1 (ja)
CN (1) CN101652592B (ja)
TW (1) TWI425159B (ja)
WO (1) WO2008129783A1 (ja)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011040330A1 (ja) * 2009-10-01 2011-04-07 株式会社堀場エステック 流量調整弁及びマスフローコントローラ
WO2011067891A1 (ja) * 2009-12-01 2011-06-09 株式会社フジキン 圧電駆動式バルブ及び圧電駆動式流量制御装置
US20140366952A1 (en) * 2009-10-15 2014-12-18 Pivotal Systems Corporation Method and apparatus for gas flow control
US9400004B2 (en) 2010-11-29 2016-07-26 Pivotal Systems Corporation Transient measurements of mass flow controllers
US10174858B2 (en) 2014-09-01 2019-01-08 Fujikin Incorporated Piezoelectric element-driven valve and flow rate control device including piezoelectric element-driven valve
US10401202B2 (en) 2015-07-10 2019-09-03 Pivotal Systems Corporation Method and apparatus for gas flow control
WO2020004269A1 (ja) * 2018-06-28 2020-01-02 京セラ株式会社 圧電アクチュエータ

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JP4743763B2 (ja) * 2006-01-18 2011-08-10 株式会社フジキン 圧電素子駆動式金属ダイヤフラム型制御弁
GB2474892B (en) * 2009-10-30 2011-09-21 Siemens Vai Metals Tech Ltd Flow control valve
EP2450630A3 (de) * 2010-11-03 2018-03-21 Vaillant GmbH Piezo Gasventil
WO2013006552A2 (en) * 2011-07-02 2013-01-10 Viking At, Llc Mass flow controller driven by smart material actuator with mechanical amplification
DE102011084107A1 (de) * 2011-10-06 2013-04-11 Continental Automotive Gmbh Piezoelektrischer Aktuator
US8783652B2 (en) 2012-03-12 2014-07-22 Mps Corporation Liquid flow control for film deposition
JP5616416B2 (ja) 2012-11-02 2014-10-29 株式会社フジキン 集積型ガス供給装置
US9454158B2 (en) 2013-03-15 2016-09-27 Bhushan Somani Real time diagnostics for flow controller systems and methods
JP5847106B2 (ja) * 2013-03-25 2016-01-20 株式会社フジキン 流量モニタ付圧力式流量制御装置。
JP5775110B2 (ja) 2013-03-26 2015-09-09 株式会社フジキン 流量制御装置用の流量制御弁
EP3014154B1 (en) * 2013-09-04 2021-02-17 Horiba Stec, Co., Ltd. Interlace lifting mechanism
JP6380401B2 (ja) * 2013-09-30 2018-08-29 日立金属株式会社 流量制御弁及びそれを用いた質量流量制御装置
WO2015100280A1 (en) 2013-12-24 2015-07-02 Viking At, Llc Mechanically amplified smart material actuator utilizing layered web assembly
KR20160105801A (ko) 2014-01-07 2016-09-07 썬듀 테크놀로지스 엘엘씨 유체-작동식 유량 제어 밸브
JP6416529B2 (ja) * 2014-07-23 2018-10-31 株式会社フジキン 圧力式流量制御装置
US10016341B2 (en) 2015-03-30 2018-07-10 Elwha Llc Systems and devices for controlling delivery of breast milk supplementation
US9925122B2 (en) 2015-03-30 2018-03-27 Elwha Llc Systems and methods for controlling delivery of breast milk supplementation
US9968523B2 (en) * 2015-03-30 2018-05-15 Elwha Llc Systems and devices for controlling delivery of breast milk supplementation
US10290372B2 (en) 2015-03-30 2019-05-14 Elwha Llc Systems and devices for controlling delivery of breast milk supplementation
US10400906B2 (en) * 2015-06-25 2019-09-03 Illinois Tool Works Inc. Piezo actuator type valve
DE102016112115A1 (de) * 2016-07-01 2018-01-04 Bürkert Werke GmbH Ventillinearantrieb sowie Ventil
WO2018011793A1 (en) * 2016-07-10 2018-01-18 Ham-Let (Israel - Canada ) Ltd. Valve and a method of counting valve operation cycles
WO2018088326A1 (ja) * 2016-11-08 2018-05-17 株式会社フジキン バルブ装置、このバルブ装置を用いた流量制御方法および半導体製造方法
US10983538B2 (en) 2017-02-27 2021-04-20 Flow Devices And Systems Inc. Systems and methods for flow sensor back pressure adjustment for mass flow controller
JP7113529B2 (ja) * 2017-09-25 2022-08-05 株式会社フジキン バルブ装置、流量調整方法、流体制御装置、流量制御方法、半導体製造装置および半導体製造方法
CN111684186B (zh) 2017-11-21 2023-02-21 伊利诺斯工具制品有限公司 用于推动致动器的紧凑的圆形连杆机构
CN111373182A (zh) * 2017-11-24 2020-07-03 株式会社富士金 阀装置以及使用该阀装置的控制装置的控制方法、流体控制装置以及半导体制造装置
WO2019107215A1 (ja) 2017-11-30 2019-06-06 株式会社フジキン 流量制御装置
CN111373340A (zh) 2017-11-30 2020-07-03 株式会社富士金 流量控制装置的自我诊断方法
CN111836985A (zh) 2018-02-28 2020-10-27 株式会社富士金 阀装置以及流体控制装置
JP7133945B2 (ja) * 2018-03-02 2022-09-09 株式会社堀場エステック 流体制御弁及び流体制御装置
JP7259839B2 (ja) * 2018-03-19 2023-04-18 株式会社プロテリアル ダイアフラム弁及びそれを用いた質量流量制御装置
US11269362B2 (en) 2018-04-27 2022-03-08 Fujikin Incorporated Flow rate control method and flow rate control device
WO2020004183A1 (ja) 2018-06-26 2020-01-02 株式会社フジキン 流量制御方法および流量制御装置
CN109282073A (zh) * 2018-09-20 2019-01-29 北京七星华创流量计有限公司 压电阀驱动器以及压电阀
US11079035B2 (en) * 2019-07-12 2021-08-03 Pivotal Systems Corporation Preloaded piezo actuator and gas valve employing the actuator
JP7412747B2 (ja) 2020-01-30 2024-01-15 株式会社フジキン 圧電素子駆動式バルブ、圧力式流量制御装置及び気化供給装置
DE102020115057A1 (de) * 2020-06-05 2021-12-09 Bürkert Werke GmbH & Co. KG Ventillinearantrieb sowie Ventil
JP7357982B2 (ja) 2020-10-31 2023-10-10 株式会社フジキン 流体制御器用筐体およびそれを備えた流体制御器
JP7045738B1 (ja) * 2021-03-23 2022-04-01 株式会社リンテック 常時閉型流量制御バルブ
CN113248045B (zh) * 2021-05-18 2021-12-07 浙江备得福食品有限公司 一种基于多级处理的农业废水的处理装置及方法

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02138582A (ja) * 1988-08-25 1990-05-28 Hitachi Metals Ltd ガス流量制御装置用バルブ
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Publication number Priority date Publication date Assignee Title
JPH02138582A (ja) * 1988-08-25 1990-05-28 Hitachi Metals Ltd ガス流量制御装置用バルブ
JPH048974A (ja) * 1990-04-27 1992-01-13 Hitachi Metals Ltd ガス流量制御装置用バルブ
JP2002541401A (ja) * 1999-03-30 2002-12-03 ローベルト ボツシユ ゲゼルシヤフト ミツト ベシユレンクテル ハフツング 圧電式アクチエータ
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JP2004197754A (ja) * 2002-12-16 2004-07-15 Fujikin Inc 圧電素子駆動式金属ダイヤフラム型制御弁
JP2005149075A (ja) * 2003-11-14 2005-06-09 Fujikin Inc 流体制御装置
JP2007192269A (ja) * 2006-01-18 2007-08-02 Fujikin Inc 圧電素子駆動式金属ダイヤフラム型制御弁

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011040330A1 (ja) * 2009-10-01 2011-04-07 株式会社堀場エステック 流量調整弁及びマスフローコントローラ
US9523435B2 (en) 2009-10-15 2016-12-20 Pivotal Systems Corporation Method and apparatus for gas flow control
US9983595B2 (en) 2009-10-15 2018-05-29 Pivotal Systems Corporation Method and apparatus for gas flow control
US9904297B2 (en) * 2009-10-15 2018-02-27 Pivotal Systems Corporation Method and apparatus for gas flow control
US20140366952A1 (en) * 2009-10-15 2014-12-18 Pivotal Systems Corporation Method and apparatus for gas flow control
CN102667284A (zh) * 2009-12-01 2012-09-12 株式会社富士金 压电驱动式阀和压电驱动式流量控制装置
US9163743B2 (en) 2009-12-01 2015-10-20 Fujikin Incorporated Piezoelectrically driven valve and piezoelectrically driven flow rate control device
JP2011117499A (ja) * 2009-12-01 2011-06-16 Fujikin Inc 圧電駆動式バルブ及び圧電駆動式流量制御装置
WO2011067891A1 (ja) * 2009-12-01 2011-06-09 株式会社フジキン 圧電駆動式バルブ及び圧電駆動式流量制御装置
US9400004B2 (en) 2010-11-29 2016-07-26 Pivotal Systems Corporation Transient measurements of mass flow controllers
US10174858B2 (en) 2014-09-01 2019-01-08 Fujikin Incorporated Piezoelectric element-driven valve and flow rate control device including piezoelectric element-driven valve
US10401202B2 (en) 2015-07-10 2019-09-03 Pivotal Systems Corporation Method and apparatus for gas flow control
WO2020004269A1 (ja) * 2018-06-28 2020-01-02 京セラ株式会社 圧電アクチュエータ
JPWO2020004269A1 (ja) * 2018-06-28 2021-07-01 京セラ株式会社 圧電アクチュエータ
JP7129478B2 (ja) 2018-06-28 2022-09-01 京セラ株式会社 圧電アクチュエータ

Also Published As

Publication number Publication date
JP2008249002A (ja) 2008-10-16
TWI425159B (zh) 2014-02-01
KR20090088943A (ko) 2009-08-20
US20100127196A1 (en) 2010-05-27
TW200907205A (en) 2009-02-16
CN101652592A (zh) 2010-02-17
CN101652592B (zh) 2012-06-27
KR100993187B1 (ko) 2010-11-10
US8162286B2 (en) 2012-04-24
JP4933936B2 (ja) 2012-05-16

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