WO2020004269A1 - 圧電アクチュエータ - Google Patents
圧電アクチュエータ Download PDFInfo
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- WO2020004269A1 WO2020004269A1 PCT/JP2019/024726 JP2019024726W WO2020004269A1 WO 2020004269 A1 WO2020004269 A1 WO 2020004269A1 JP 2019024726 W JP2019024726 W JP 2019024726W WO 2020004269 A1 WO2020004269 A1 WO 2020004269A1
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- WIPO (PCT)
- Prior art keywords
- region
- cylindrical body
- piezoelectric actuator
- joint
- actuator according
- Prior art date
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- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 4
- 239000011230 binding agent Substances 0.000 description 4
- DOIRQSBPFJWKBE-UHFFFAOYSA-N dibutyl phthalate Chemical compound CCCCOC(=O)C1=CC=CC=C1C(=O)OCCCC DOIRQSBPFJWKBE-UHFFFAOYSA-N 0.000 description 4
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 4
- 239000004014 plasticizer Substances 0.000 description 4
- 238000005096 rolling process Methods 0.000 description 4
- 238000007650 screen-printing Methods 0.000 description 4
- 229910052709 silver Inorganic materials 0.000 description 4
- 239000004332 silver Substances 0.000 description 4
- 229910000679 solder Inorganic materials 0.000 description 4
- 239000012212 insulator Substances 0.000 description 3
- 238000010030 laminating Methods 0.000 description 3
- MQIUGAXCHLFZKX-UHFFFAOYSA-N Di-n-octyl phthalate Natural products CCCCCCCCOC(=O)C1=CC=CC=C1C(=O)OCCCCCCCC MQIUGAXCHLFZKX-UHFFFAOYSA-N 0.000 description 2
- BJQHLKABXJIVAM-UHFFFAOYSA-N bis(2-ethylhexyl) phthalate Chemical compound CCCCC(CC)COC(=O)C1=CC=CC=C1C(=O)OCC(CC)CCCC BJQHLKABXJIVAM-UHFFFAOYSA-N 0.000 description 2
- 238000009833 condensation Methods 0.000 description 2
- 230000005494 condensation Effects 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 2
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
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- 239000002245 particle Substances 0.000 description 2
- 239000002002 slurry Substances 0.000 description 2
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 description 1
- ZTQSAGDEMFDKMZ-UHFFFAOYSA-N Butyraldehyde Chemical compound CCCC=O ZTQSAGDEMFDKMZ-UHFFFAOYSA-N 0.000 description 1
- 229910052684 Cerium Inorganic materials 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910052692 Dysprosium Inorganic materials 0.000 description 1
- 229910052691 Erbium Inorganic materials 0.000 description 1
- 229910052693 Europium Inorganic materials 0.000 description 1
- 229910052688 Gadolinium Inorganic materials 0.000 description 1
- 229910052689 Holmium Inorganic materials 0.000 description 1
- 229910013641 LiNbO 3 Inorganic materials 0.000 description 1
- 229910052779 Neodymium Inorganic materials 0.000 description 1
- 229910001252 Pd alloy Inorganic materials 0.000 description 1
- 229910052777 Praseodymium Inorganic materials 0.000 description 1
- 229910052772 Samarium Inorganic materials 0.000 description 1
- 229910052771 Terbium Inorganic materials 0.000 description 1
- 229910052775 Thulium Inorganic materials 0.000 description 1
- 229910052769 Ytterbium Inorganic materials 0.000 description 1
- IHWJXGQYRBHUIF-UHFFFAOYSA-N [Ag].[Pt] Chemical compound [Ag].[Pt] IHWJXGQYRBHUIF-UHFFFAOYSA-N 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
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- 238000004220 aggregation Methods 0.000 description 1
- 230000002776 aggregation Effects 0.000 description 1
- 229910002113 barium titanate Inorganic materials 0.000 description 1
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000005266 casting Methods 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
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- 239000012141 concentrate Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
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- 238000000462 isostatic pressing Methods 0.000 description 1
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- 229910052746 lanthanum Inorganic materials 0.000 description 1
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 1
- 229920000620 organic polymer Polymers 0.000 description 1
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- 229910052727 yttrium Inorganic materials 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/88—Mounts; Supports; Enclosures; Casings
- H10N30/886—Additional mechanical prestressing means, e.g. springs
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/88—Mounts; Supports; Enclosures; Casings
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/85—Piezoelectric or electrostrictive active materials
- H10N30/853—Ceramic compositions
- H10N30/8542—Alkali metal based oxides, e.g. lithium, sodium or potassium niobates
Definitions
- the present disclosure relates to a piezoelectric actuator.
- a piezoelectric actuator for example, a piezoelectric actuator described in JP-A-4-165683 (hereinafter referred to as Patent Document 1) is known.
- the piezoelectric actuator includes a piezoelectric element and a case containing the piezoelectric element therein and including a base and a cylindrical body.
- the lower end of the cylindrical body is spread in a step shape, and an annular convex portion provided on the upper surface of the base is fitted inside the lower end of the cylindrical body, and a compressive load is applied to the piezoelectric element. It is joined in a state.
- a piezoelectric actuator includes a piezoelectric element, a case containing the piezoelectric element therein, and a case including a base and a cylindrical body.
- the base includes a bottom plate portion and an annular convex portion erected on the bottom plate portion.
- the annular convex portion has a first region, and a second region located below the first region and having a larger outer diameter than the first region, and an outer surface of the first region. From the outer surface of the second region to the outer surface of the second region, the first region is inserted inside the cylindrical body, the end surface of the cylindrical body abuts the upper end of the second region, the cylindrical body And the second region are joined.
- FIG. 2 is a schematic vertical sectional view of an example of a piezoelectric actuator taken along line AA shown in FIG. 1.
- FIG. 3 is an enlarged sectional view of a region B (main part) of the piezoelectric actuator shown in FIG. 2.
- FIG. 4 is a schematic longitudinal sectional view of another example of the piezoelectric actuator taken along line AA shown in FIG. 1.
- FIG. 5 is an enlarged sectional view of a region B (main part) of the piezoelectric actuator shown in FIG. 4. It is an important section expanded sectional view of other examples of a piezoelectric actuator. It is an important section expanded sectional view of other examples of a piezoelectric actuator.
- piezoelectric actuator It is an important section expanded sectional view of other examples of a piezoelectric actuator. It is an important section expanded sectional view of other examples of a piezoelectric actuator. It is an important section expanded sectional view of other examples of a piezoelectric actuator. It is an important section expanded sectional view of other examples of a piezoelectric actuator. It is an important section expanded sectional view of other examples of a piezoelectric actuator. It is an important section expanded sectional view of other examples of a piezoelectric actuator. It is an important section expanded sectional view of other examples of a piezoelectric actuator. It is an important section expanded sectional view of other examples of a piezoelectric actuator. It is an important section expanded sectional view of other examples of a piezoelectric actuator. It is an important section expanded sectional view of other examples of a piezoelectric actuator. It is an important section expanded sectional view of other examples of a piezoelectric actuator. It is an important section expanded sectional view of other examples of a piezo
- the piezoelectric actuator 10 shown in FIGS. 1 to 3 includes the piezoelectric element 1 and the case 2 containing the base 21 and the cylindrical body 22 in which the piezoelectric element 1 is housed.
- the piezoelectric element 1 constituting the piezoelectric actuator 10 includes, for example, an active part in which a plurality of piezoelectric layers and internal electrode layers are alternately stacked, and a piezoelectric element in which both ends in the stacking direction of the active part are stacked.
- This is a laminated piezoelectric element including a laminated body having an inactive portion composed of a body layer.
- the active portion is a portion where the piezoelectric layer expands or contracts in the stacking direction when driven
- the inactive portion is a portion where the piezoelectric layer does not expand or contract in the stacking direction when driven.
- the laminated body constituting the piezoelectric element 1 is formed in a rectangular parallelepiped shape having a length of about 4 mm to 7 mm, a width of 4 mm to 7 mm, and a height of about 20 mm to 50 mm.
- the laminate may have, for example, a hexagonal column shape or an octagonal column shape.
- the piezoelectric layer constituting the laminate is made of piezoelectric ceramics having piezoelectric characteristics, and the piezoelectric ceramics have an average particle size of, for example, 1.6 ⁇ m to 2.8 ⁇ m.
- the piezoelectric ceramic for example, a perovskite oxide having lead zirconate titanate (PbZrO 3 -PbTiO 3 ), lithium niobate (LiNbO 3 ), lithium tantalate (LiTaO 3 ), or the like can be used.
- the internal electrode layer constituting the laminate is mainly composed of a metal such as silver, silver-palladium, silver-platinum, or copper.
- the positive electrode and the negative electrode are alternately arranged in the laminating direction.
- the positive electrode is drawn out on one side of the laminate, and the negative electrode is drawn out on the other side.
- the laminate may include a metal layer or the like that is a layer for relaxing stress and does not function as an internal electrode layer.
- An external electrode is provided on each of a pair of opposed side surfaces of the stacked body from which the positive electrode or the negative electrode (or the ground electrode) of the internal electrode layer is drawn out, and is electrically connected to the drawn out internal electrode layer.
- the external electrode is a metallized layer having, for example, silver and glass.
- both the positive electrode and the negative electrode (or ground electrode) of the internal electrode layer are exposed on the other pair of opposing side surfaces of the laminate, and a coating layer having an insulator is provided on this side surface as necessary. ing.
- the coating layer By providing the coating layer, it is possible to prevent creeping discharge between the two electrodes which occurs when a high voltage is applied during driving.
- the insulator serving as the coating layer include a ceramic material.
- the insulator can follow the drive deformation (expansion and contraction) of the laminated body when the piezoelectric actuator is driven, so that there is no possibility that the coating layer is peeled off and creeping discharge occurs.
- a material that can be deformed by stress can be used.
- a partially stabilized zirconia Ln 1-x Si x AlO 3 + 0.5x
- Ln is Sn, Y, La, Ce , Pr, Nd, Pm, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, and Yb.
- X 0.01 to 0.3
- piezoelectric materials such as barium titanate and lead zirconate titanate, in which the distance between ions in the crystal lattice changes so as to reduce the generated stress.
- This coating layer is formed by, for example, forming an ink, applying the coating to the side surface of the laminate by dipping or screen printing, and sintering.
- the case 2 that constitutes the piezoelectric actuator 10 includes a base 21, a cylindrical body 22, and a lid 23.
- the case 2 houses the piezoelectric element 1 therein, and the lower end surface of the piezoelectric element 1 contacts the upper surface of the base 21, and the upper end surface of the piezoelectric element 1 contacts the lower surface of the lid 23.
- the base 21, the cylindrical body 22, and the lid 23 have a metal body such as SUS304 or SUS316L.
- the cylindrical body 22 is a cylindrical body having both ends extending vertically.
- the cylindrical body 22 is formed into a bellows shape by, for example, rolling or isostatic pressing after producing a seamless pipe in a predetermined shape.
- the cylinder 22 has a predetermined spring constant so that it can follow the expansion and contraction of the piezoelectric element 1 when a voltage is applied to the piezoelectric element 1, and adjusts the spring constant by the thickness, the groove shape and the number of grooves. ing.
- the thickness of the cylindrical body 22 is, for example, 0.1 to 0.5 mm.
- the lid 23 is formed such that the outer diameter is substantially the same as the inner diameter of the one end opening of the cylindrical body 22.
- the lid body 23 is fitted from one end side opening of the cylindrical body 22, and its side surface (outer periphery) is joined to the inner wall near the one end side opening of the cylindrical body 22 (near the upper end) by, for example, welding.
- the base 21 has a bottom plate 211 and an annular protrusion 212 erected on the bottom plate 211.
- the bottom plate portion 211 has a disk shape, and in the example shown in the figure, the peripheral portion is thinner than other portions.
- the base 21 is formed with two through holes through which the lead pins 33 can be inserted, and the lead pins 33 are inserted through the through holes.
- the gap between the through holes is filled with, for example, soft glass 34, and the lead pin 33 is fixed.
- a lead wire 31 is connected to the tip of the lead pin 33, and the lead wire 31 is attached to an external electrode of the piezoelectric element 1 by solder 32, and a drive voltage is applied to the piezoelectric element 1 via these. It has become.
- the annular convex portion 212 erected on the upper surface of the bottom plate portion 211 includes a first region 2121 having a relatively small outer diameter located on the upper side and a second region having a relatively large outer diameter located on the lower side. 2122, and a step-shaped outer surface extends from the outer surface of the first region 2121 to the outer surface of the second region 2122.
- the first region 2121 having a relatively small outer diameter means that the outer diameter of the first region 21221 is smaller than the outer diameter of the second region 2122.
- the first region 2121 having a relatively small outer diameter means that the outer diameter of the first region 2121 is smaller than the outer diameter of the second region 2122. More specifically, the first region 2121 is thinner than the second region 2122.
- the outer diameter of the first area 2121 is, for example, 5 mm to 20 mm, and the outer diameter of the second area 2122 is, for example, 5.2 mm to 20.2 mm.
- the difference between the thickness of the first region 2121 and the thickness of the second region 2122 is, for example, 0.1 mm to 7.6 mm.
- the first region 2121 is inserted into the inside of the cylinder 22, the end face of the cylinder 22 abuts on the upper end of the second region 2122, and the cylinder 22 and the second region 2122 are joined.
- the joint 4 is formed from the lower end of the cylindrical body 22 to the upper end of the second region 2122.
- welding is used to join the cylindrical body 22 and the second region 2122.
- the first region 2121 can suppress horizontal deformation while making it difficult to hinder vertical vibration. Therefore, cracks are less likely to occur in the joint portion 4 between the cylindrical body 22 and the annular convex portion 212, and the displacement is stable over a long period of time, and the durability is also improved.
- the cylindrical body 22 includes a third region 221 having a relatively large inner diameter located on the lower side and a fourth region 222 having a relatively small internal diameter located on the upper side. And a step-shaped inner surface from the inner surface of the third region 221 to the inner surface of the fourth region 222, and the first region 2121 may be inserted inside the third region 221.
- the inside diameter of the third region 221 is, for example, 5.01 mm to 20.01 mm
- the inside diameter of the fourth region 222 is, for example, 4.91 mm to 19.91 mm.
- the difference between the thickness of the third region 221 and the thickness of the fourth region 222 is, for example, 0.05 mm to 0.45 mm.
- the outer diameter of the cylindrical body 22 may be equal to or smaller than the outer diameter of the second region 2122.
- a compressive load is applied, a load in the direction in which the cylindrical body 22 expands (falls) outward is less likely to be applied, and the stress applied to the joint 4 is reduced.
- the joint 4 between the cylindrical body 22 and the second region 2122 may be provided outside the center of the end face of the cylindrical body 22 when viewed in cross section. Since the inner side of the center of the end face of the body 22 is not joined, the stress applied to the joint is reduced.
- the joint 4 between the cylinder 22 and the second region 2122 may be provided over the entire end surface of the cylinder 22 when viewed in cross section. Since it is firmly fixed, it can transmit tensile and compressive loads well.
- the first region 2121 is inclined inward, and there is a gap between the outer surface of the first region 2121 and the inner surface of the cylindrical body 22, and the gap is located above the first region 2121. May be wider than the lower side. According to this configuration, even if the expansion and contraction drive of the piezoelectric element 1 causes a movement in the expansion and contraction direction of the piezoelectric element 1 between the first area 2121 and the cylinder 22, the first area 2121 and the cylinder 22 are rubbed. And the displacement is stable over a long period of time. At this time, the inclination of the first region 2121 is set in a range of, for example, 1 to 30 degrees toward the inside with respect to the expansion and contraction direction of the piezoelectric element 1.
- the first region 2121 is inclined outward, and there is a gap between the outer surface of the first region 2121 and the inner surface of the cylindrical body 22. May be narrower than the lower side. According to this configuration, even if dew condensation occurs in the gap between the outer surface of the first region 2121 and the inner surface of the cylindrical body 22, the dew condensation is trapped to prevent the transmission of the water to the piezoelectric element 1. Can be.
- the inclination of the first region 2121 is set in a range of, for example, 1 to 30 degrees outward with respect to the expansion and contraction direction of the piezoelectric element 1. It should be noted that, even at a portion where the distance between the outer surface of the first region 2121 and the inner surface of the cylindrical body 22 is the shortest, it is preferable that there is a gap such that they do not contact each other.
- the joint 4 between the cylindrical body 22 and the second region 2122 may have a concave portion 41 at a position outside the cylindrical body 22 when viewed in cross section.
- the stress applied to the joint 4 can be dispersed.
- the concave portion 41 may be located annularly along the outer periphery of the cylindrical body 22. Further, the concave portion 41 may have an arcuate shape in cross section. In this case, the stress applied to the joint 4 can be further reduced. This is because the concave portion 41 is distorted when stress is applied by providing the annular concave portion 41 along the outer periphery of the cylindrical body 22, but the stress is formed in an annular shape along the concave portion by the presence of the annular concave portion 41. This is because they can be dispersed.
- the joint 4 may have a convex portion 42 protruding outside of the cylindrical body 22 at a portion in contact with the cylindrical body 22.
- the joint 4 may have a crack starting point particularly at a portion in contact with the cylindrical body 22. Increasing the amount of the joining material in a portion that may become a crack starting point by having the convex portion 42 protruding outside the cylinder 22 in a portion in contact with the cylinder 22 in the joining portion 4. Can be. Therefore, the strength of the portion in contact with the cylinder 22 can be increased. As a result, it is possible to reduce the possibility that cracks will occur starting from the portion of the joint 4 that is in contact with the cylinder 22.
- the projection 42 may be located at a position in contact with the second region 2122 so as to protrude outside the second region 2122. Since the stress concentrates on the boundary between the joint 4 and the second region 2122, the boundary may be a starting point of a crack. Since the convex portion 42 is located outside the second region 2122 at a position in contact with the second region 2122, the amount of the bonding material near the boundary between the bonding portion 4 and the second region 2122 can be reduced. Since it can be increased, it is possible to increase the amount of the bonding material at a portion where there is a possibility of becoming a crack starting point. As a result, it is possible to reduce the possibility that cracks occur starting from a portion of the joint 4 that is in contact with the second region 2122.
- the protrusion 42 may be provided in an annular shape along the annular concave portion 41. Thereby, the possibility that a crack is generated in the entire periphery of the joint 4 starting from a portion of the joint 4 that is in contact with the cylindrical body 22 can be reduced.
- the cylindrical body 22 has a third region 221 having a relatively large inner diameter located on the lower side and a fourth region 222 having a relatively small internal diameter located on the upper side.
- a stepped inner surface may be formed from the inner surface of the third region 221 to the inner surface of the fourth region 222, and the first region 2121 of the annular convex portion 212 may be inserted inside the third region 221.
- the length of the third region 221 may be shorter than the length of the first region 2121.
- a space can be provided between the second region 2122 and the fourth region 222.
- the thickness of the third region 221 may be smaller than that of the first region 2121. Accordingly, a space can be provided between the first region 2121 and the third region 221. As a result, even when a large stress is instantaneously applied, priority can be given to the stress relaxation in the concave portion 41.
- the concave portion 41 for example, laser welding is used as a welding method, and the focus is controlled so that energy is concentrated at the central position of the laser irradiation region, and welding is performed in an annular shape.
- the projection 42 can be provided on the outer periphery of the irradiation region by shifting the position while irradiating the pulse with the irradiation method, the projection 42 can be provided in an annular shape by welding in an annular shape.
- a ceramic green sheet to be a piezoelectric layer is prepared. Specifically, a ceramic slurry is prepared by mixing a calcined powder of a piezoelectric ceramic, a binder having an organic polymer such as an acrylic or butyral system, and a plasticizer. Then, a ceramic green sheet is manufactured from the ceramic slurry by using a well-known tape forming method such as a doctor blade method or a calendar roll method.
- the piezoelectric ceramics any ceramics having a piezoelectric property may be used. For example, a perovskite oxide having PbZrO 3 -PbTiO 3 can be used.
- the plasticizer dibutyl phthalate (DBP), dioctyl phthalate (DOP), or the like can be used.
- a conductive paste to be an internal electrode layer is prepared.
- a conductive paste is prepared by adding and mixing a binder and a plasticizer to a silver-palladium alloy metal powder.
- This conductive paste is printed on the above ceramic green sheet using a screen printing method, and then a plurality of ceramic green sheets on which the conductive paste is printed are laminated, and the conductive paste is applied to both ends in the laminating direction.
- a plurality of unprinted ceramic green sheets are laminated to obtain a laminated molded body. After debinding the laminate at a predetermined temperature, the laminate is fired at 900 to 1200 ° C. to obtain a laminate.
- an oxide ink is printed by screen printing on a pair of side surfaces from which both internal electrode layers (positive electrode and negative electrode) are led out of the side surfaces of the laminate, and then fired at 900 to 1200 ° C. to form a coating layer.
- the oxide ink disperses the oxide powder in a solvent, a dispersant, a plasticizer, and a binder solution, and then passes through three rolls several times to disintegrate the powder aggregation, It is made by dispersing powder.
- an external electrode made of a metallized layer is formed.
- a silver glass-containing conductive paste is prepared by adding a binder to silver particles and glass powder, and printed on a pair of opposed side surfaces of a laminate from which a positive electrode or a negative electrode of an internal electrode layer is led out by a screen printing method.
- the baking process is performed at a temperature of about 800 ° C.
- the external electrodes formed of the metallized layer are formed, and the piezoelectric element 1 is completed.
- the external electrodes of the piezoelectric element 1 and the lead wires 31 are soldered.
- a base 21 having a through hole formed therein and an annular convex portion 212 as shown in the figure is prepared, and the lead pins 33 are inserted into the two through holes formed in the base 21 respectively.
- the gap is filled with a soft glass 34 and fixed, and the lower end surface of the piezoelectric element 1 is bonded to the upper surface 21 of the base with an adhesive.
- the lead wire 31 soldered to the external electrode of the piezoelectric element 1 by solder and the lead pin 33 attached to the base 21 are connected by solder.
- the metal to be the base 21 may be ground or cast by a lathe so as to have a desired shape.
- a bellows shape is formed by rolling a seamless cylindrical body 22 made of, for example, SUS304.
- a seamless cylindrical body 22 made of, for example, SUS304.
- one end (upper end) and the other end (lower end) of the cylindrical body 22 are open.
- the thickness of the groove and the radius of curvature can be changed by changing the shape of the mold during rolling.
- the end may be polished with a lathe, and it is preferable to manufacture the cylindrical body from the beginning by casting.
- An SUS304 lid 23 is fitted into the opening so as to cover the opening on one end side (upper end side) of the cylindrical body, and is welded by, for example, laser welding.
- the cylinder 22 and the lid 21 are put on the piezoelectric element 1 adhered to the base 21, the cylinder 22 is pulled with a predetermined load, and the cylinder 22 and the base 21 Are welded, for example, by laser welding.
- the laser intensity may be adjusted.
- Piezoelectric actuator 1 Piezoelectric element 2 Case 21 Substrate 211 Bottom plate 212 Annular convex part 2121 First region 2122 Second region 22 ⁇ Cylindrical body 221 ⁇ third region 222 ⁇ fourth region 23 ⁇ lid 31 ⁇ lead wire 32 ⁇ solder 33 ⁇ lead pin 34 ⁇ soft glass 4 ⁇ Joint part 41 ⁇ ⁇ ⁇ Concave part 42 ⁇ ⁇ ⁇ Convex part
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- Ceramic Engineering (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
Description
1・・・圧電素子
2・・・ケース
21・・・基体
211・・・底板部
212・・・環状凸部
2121・・・第1領域
2122・・・第2領域
22・・・筒体
221・・・第3領域
222・・・第4領域
23・・・蓋体
31・・・リード線
32・・・はんだ
33・・・リードピン
34・・・軟質ガラス
4・・・接合部
41・・・凹部
42・・・凸部
Claims (10)
- 圧電素子と、
該圧電素子を内部に収容した、基体および筒体を含むケースとを備え、
前記基体は、底板部と該底板部に立設された環状凸部とを有し、
該環状凸部は、第1領域と、該第1領域より下に位置し該第1領域より相対的に外径の大きな第2領域とを有し、前記第1領域の外面から前記第2領域の外面にかけて段差状の外面になっており、
前記筒体の内側に前記第1領域が挿通され、前記筒体の端面が前記第2領域の上端に当接し、前記筒体と前記第2領域とが接合されている圧電アクチュエータ。 - 前記筒体は、第3領域と、該第3領域より上に位置し該第3領域より相対的に内径の小さな第4領域とを有し、前記第3領域の内面から前記第4領域の内面にかけて段差状の内面になっており、
前記第3領域の内側に前記第1領域が挿通されている請求項1に記載の圧電アクチュエータ。 - 前記筒体の外径は、前記第2領域の外径と同じかまたはそれよりも小さい請求項1または請求項2に記載の圧電アクチュエータ。
- 前記筒体と前記第2領域との接合部が、断面で見て前記筒体の端面の中央よりも外側に設けられている請求項1乃至請求項3のうちのいずれかに記載の圧電アクチュエータ。
- 前記筒体と前記第2領域との接合部が、断面で見て前記筒体の端面の全域にわたって設けられている請求項1乃至請求項3のうちのいずれかに記載の圧電アクチュエータ。
- 前記第1領域は内側に傾いており、前記第1領域の外面と前記筒体の内面との間に隙間があって、当該隙間は前記第1領域の上側のほうが下側よりも広い請求項1乃至請求項5のうちのいずれかに記載の圧電アクチュエータ。
- 前記第1領域は外側に傾いており、前記第1領域の外面と前記筒体の内面との間に隙間があって、当該隙間は前記第1領域の上側のほうが下側よりも狭い請求項1乃至請求項5のうちのいずれかに記載の圧電アクチュエータ。
- 前記筒体と前記第2領域との接合部は、断面で見て前記筒体の外側の位置に凹部を有する請求項1乃至請求項7のうちのいずれかに記載の圧電アクチュエータ。
- 前記接合部は、前記筒体に接する部位において、前記筒体よりも外側に突出する凸部を有する請求項8に記載の圧電アクチュエータ。
- 前記接合部は、前記第2領域に接する部位において、前記第2領域よりも外側に突出する凸部を有する請求項8に記載の圧電アクチュエータ。
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JP2020527478A JP7129478B2 (ja) | 2018-06-28 | 2019-06-21 | 圧電アクチュエータ |
US17/255,076 US20210249584A1 (en) | 2018-06-28 | 2019-06-21 | Piezoelectric actuator |
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JPH04165683A (ja) | 1990-10-30 | 1992-06-11 | Nec Corp | 圧電アクチュエータ |
JPH1122845A (ja) * | 1997-07-01 | 1999-01-26 | Hitachi Metals Ltd | 圧電アクチュエータ及びマスフローコントローラ |
WO2008129783A1 (ja) * | 2007-03-30 | 2008-10-30 | Fujikin Incorporated | 圧電素子駆動式制御弁 |
US20180003312A1 (en) * | 2016-07-01 | 2018-01-04 | Buerkert Werke Gmbh & Co. Kg | Linear valve drive and valve |
JP2018007360A (ja) * | 2016-06-29 | 2018-01-11 | 京セラ株式会社 | 圧電アクチュエータ |
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JP2844711B2 (ja) * | 1989-08-30 | 1999-01-06 | 日本電気株式会社 | 圧電アクチュエータおよびその製造方法 |
JP2508321B2 (ja) * | 1989-12-04 | 1996-06-19 | 日本電気株式会社 | 圧電アクチュエ―タおよびその製造方法 |
JPH0661544A (ja) * | 1992-05-28 | 1994-03-04 | Nec Corp | 圧電アクチュエータ |
JPH06283778A (ja) * | 1993-03-26 | 1994-10-07 | Hitachi Metals Ltd | 圧電素子組立体 |
JP4222220B2 (ja) * | 2003-03-17 | 2009-02-12 | 株式会社デンソー | 圧電アクチュエータ |
JP2012174947A (ja) * | 2011-02-23 | 2012-09-10 | Nec Tokin Corp | 積層型圧電アクチュエータ |
JP6711908B2 (ja) * | 2016-05-16 | 2020-06-17 | 京セラ株式会社 | 圧電アクチュエータ |
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2019
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- 2019-06-21 WO PCT/JP2019/024726 patent/WO2020004269A1/ja active Application Filing
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JPH04165683A (ja) | 1990-10-30 | 1992-06-11 | Nec Corp | 圧電アクチュエータ |
JPH1122845A (ja) * | 1997-07-01 | 1999-01-26 | Hitachi Metals Ltd | 圧電アクチュエータ及びマスフローコントローラ |
WO2008129783A1 (ja) * | 2007-03-30 | 2008-10-30 | Fujikin Incorporated | 圧電素子駆動式制御弁 |
JP2018007360A (ja) * | 2016-06-29 | 2018-01-11 | 京セラ株式会社 | 圧電アクチュエータ |
US20180003312A1 (en) * | 2016-07-01 | 2018-01-04 | Buerkert Werke Gmbh & Co. Kg | Linear valve drive and valve |
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Title |
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JPWO2020004269A1 (ja) | 2021-07-01 |
EP3817076B1 (en) | 2023-12-06 |
CN112236876A (zh) | 2021-01-15 |
JP7129478B2 (ja) | 2022-09-01 |
EP3817076A1 (en) | 2021-05-05 |
US20210249584A1 (en) | 2021-08-12 |
EP3817076A4 (en) | 2022-03-23 |
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